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Clamp for preparing detection sample in use for electron microscope

An electron microscope and sample detection technology, which is applied in the preparation of test samples, circuits, discharge tubes, etc., can solve the problems of inconsistent sample quality, difficulty in ensuring the reliability of sample test results, labor and time-consuming, etc., and improve corrosion treatment. Efficiency, reduced time to process samples, consistent results

Inactive Publication Date: 2010-09-01
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The current sample preparation method is not only labor-intensive and time-consuming, but also because the concentration and temperature of the corrosion solution used to corrode the samples change with the increase in the number of treatments and the passage of time, so the quality of the prepared samples is not consistent. Difficult to guarantee the reliability of sample test results

Method used

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  • Clamp for preparing detection sample in use for electron microscope
  • Clamp for preparing detection sample in use for electron microscope
  • Clamp for preparing detection sample in use for electron microscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0022] figure 1 It is a perspective view of a jig for preparing an electron microscope test sample according to an embodiment of the present invention. figure 2 is a schematic diagram showing the parameter relationship of each constituent part of the clip.

[0023] image 3 is a schematic showing the assembly parameters between the clip, connecting device, support frame and handle.

[0024] see figure 1 , figure 1 The fixture shown in the present invention for preparing samples for electron microscope inspection includes: a handle 1 , a support frame 2 , a clip 3 , and a connecting device 4 . The support frame 2 is connected with the handle 1, and one end of the connection device 4 is connected to the clip 3 and the other end is connected to the support frame 2, and the clip 3 is fixed on the support frame 4 by the connection device 4 at a fixed interval g.

[0025] In the fixture used for preparing electron microscope inspection samples according to the present embodime...

Embodiment 2

[0031] According to this embodiment, the structure and the size of each part of the fixture used to prepare the electron microscope inspection sample are basically the same as the fixture of the first embodiment, except that the number of clamps fixed on the support frame is any number according to needs, and the shape of the handle is suitable for operation. Any shape held by the personnel, the shape of the support frame 2 is any shape according to the needs, for example: see Figure 4 and Figure 5 , The support frame 2 can be circular, semicircular, elliptical or polygonal. The supporting frame can be fixed on the handle; it can also be rotated, moved and shaken left and right relative to the handle, and then fixed with screws. A similar movement of the clamp relative to the support frame is also possible.

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Abstract

The invention is a clamp for preparing the detection sample of an electron microscope, comprising: handgrip, bracket, clips and connection device, where the bracket is connected with the handgrip, one end of the connection device is connected with the clips, and the other end is connected with the bracket, the clips are fixed at regular intervals on the bracket by the connection device. And theseparts are made from chemical corrosion-resistant material.

Description

technical field [0001] The invention relates to a sample fixture used in quality testing of semiconductor devices, in particular to a fixture used for preparing electron microscope testing samples. Background technique [0002] In semiconductor device manufacturing, scanning electron microscope (SEM) and transmission electron microscope (TEM) have become indispensable tools for monitoring product quality. The number is also increasing, and the burden on scanning electron microscopes (SEM) and transmission electron microscopes (TEM), which are product quality monitoring tools, is also increasing. Electron microscopes are expensive precision equipment. It is impossible for semiconductor device manufacturers to add more electron microscopes. Without increasing equipment and manpower, if we want to complete more and more product quality monitoring, we can only improve processing efficiency and more Effective use of testing equipment can alleviate the contradiction between the l...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N1/32H01J37/20
Inventor 郭志蓉周娟张启华潘敏
Owner SEMICON MFG INT (SHANGHAI) CORP