Evaluation method of film magnetic head
A technology of thin-film magnetic head and evaluation method, which is applied in the direction of magnetic recording head, magnetic field control resistor, and manufacturing flux-sensitive magnetic head, etc., which can solve the problems of poor yield, instability, aging, etc.
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[0027] Hereinafter, the present invention will be described with reference to the drawings. In the figure, the X direction is the track width direction of the thin film magnetic head, the Y direction is the height direction of the thin film magnetic head (rotary valve film), and the Z direction is the stacking direction of the layers constituting the thin film magnetic head.
[0028] FIG. 1 is a cross-sectional view showing an embodiment of a thin-film magnetic head which is an evaluation object of the method of the present invention. The thin-film magnetic head 1 has a rotary valve film 10 exhibiting a huge magnetoresistance effect between a lower magnetic shield layer 2 and an upper magnetic shield layer 3, and hard bias films positioned on both sides of the rotary valve film 10 in the track width direction. 20 and electrode layer 30.
[0029] The spin valve film 10 has a seed layer 11 , an antiferromagnetic layer 12 , a fixed magnetic layer 13 , a nonmagnetic conductive la...
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