Substrate support plate transfer apparatus for fabricating organic light emitting display
A light-emitting display and transfer device technology, applied in lighting devices, electroluminescent light sources, semiconductor/solid-state device manufacturing, etc., can solve problems such as low moisture resistance, low oxidation resistance, and material aging
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[0018] Certain embodiments will be described with reference to the figures. However, various changes, additions and substitutions can be made without departing from the scope and spirit of the invention, and the invention is not limited to the described embodiments.
[0019] figure 2 is a perspective view showing a substrate support plate transfer device according to one embodiment. The substrate support plate transfer device supports a substrate support plate 100 (commonly referred to as "quartz") to reliably move the substrate support plate 100 into and out of a bonding chamber (not shown). The substrate support plate transfer device includes: a protective frame 110 on which the substrate support plate 100 is placed; a support plate 120 configured to be attached to the bonding chamber and having a sliding transfer device configured to transfer the protective frame 110 and The substrate support plate 100 moves smoothly into and out of the binding chamber.
[0020] As desc...
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