A card sleeve frame
By designing a cassette holder, the problem of cassette misalignment and deformation during wafer ETCH cleaning was solved, achieving stable cassette fixation and efficient cleaning, thereby improving wafer etching uniformity and production efficiency.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-18
- Publication Date
- 2026-06-12
AI Technical Summary
In the existing technology, during the ETCH cleaning process, the wafer is misaligned or deformed due to the pressure of the hand-held cassette, which affects the uniformity of wafer corrosion and is inefficient, as only one cassette wafer can be cleaned at a time.
Design a plug holder frame with a rectangular structure consisting of a left frame plate, a right frame plate, an upper strip plate, a lower strip plate, a front strip baffle, and a rear strip baffle. Set plug guide grooves and slides, and use upper and lower key pins to support the plug, prevent plug misalignment and deformation, and achieve stable fixing of the plug.
By fixing the cassette with a cassette holder, misalignment and deformation of the cassette are prevented, ensuring uniform etching of the wafer and improving production efficiency. It also enables the simultaneous cleaning of wafers from two cassette holders.
Smart Images
Figure CN224356623U_ABST
Abstract
Description
Technical Field
[0001] This utility model belongs to the field of wafer processing technology, and more specifically, relates to a cassette holder. Background Technology
[0002] During the processing of wafers, they need to be cleaned with ETCH solution for a long time. Conventional operation requires two plugs to be locked together, and the plugs are held and pressed down to be immersed in the ETCH solution. The plugs are continuously shaken to make the wafer move back and forth between the plugs to ensure that the surface of the wafer is in uniform contact with the ETCH solution. However, this method is inefficient and can only ETCH one plug of wafer at a time. Moreover, during cleaning, the two plugs are held together by hand, which can easily cause the two plugs to become misaligned or deformed due to compression, resulting in wafer jamming and affecting the uniformity of wafer ETCH. Uneven etching areas will have deeper etching pits. Utility Model Content
[0003] To solve the above problems, the present invention adopts the following technical solution:
[0004] A plug holder is provided, the plug holder having a rectangular structure. The rectangular structure is composed of a left frame plate and a right frame plate, an upper strip plate and a lower strip plate, and a front strip baffle and a rear strip baffle, which are arranged opposite to each other. The left frame plate, the upper strip plate, the right frame plate and the lower strip plate are connected end to end to form an enclosing structure. The front strip baffle and the rear strip baffle are slidably arranged on the front and rear sides of the enclosing structure, respectively. Plug guide grooves for fixing plugs are provided on opposite sides of the left frame plate and the right frame plate.
[0005] Furthermore, both the left frame plate and the right frame plate are provided with two locking guide grooves.
[0006] Furthermore, the left frame plate and the right frame plate are provided with slides that cooperate with the front strip baffle and the rear strip baffle.
[0007] Furthermore, an upper keyway is provided on the upper side of the upper strip plate, and a lower keyway is provided on the lower side of the lower strip plate. An upper key pin is detachably connected to the upper keyway, and a lower key pin is detachably connected to the lower keyway.
[0008] Furthermore, the upper key pin and the lower key pin have the same structure and are both provided with multiple protrusions, which are used to support the plug.
[0009] The beneficial effects of this utility model are:
[0010] This invention uses a retainer holder to fix the retainer, avoiding the risk of misalignment and deformation caused by manually pressing the retainer. This also prevents corrosion pits caused by uneven etching of the wafers. Furthermore, the retainer holder allows for the simultaneous etching of two wafer boxes, improving production efficiency. Attached Figure Description
[0011] Figure 1 This is a schematic diagram of the structure of a clip holder according to the present invention;
[0012] Figure 2 This is a schematic diagram of the structure of the lower key pin of this utility model.
[0013] In the diagram: 1. Left frame plate; 2. Right frame plate; 3. Upper strip plate; 4. Lower strip plate; 5. Front strip baffle; 6. Rear strip baffle; 7. Slide rail; 8. Protrusion; 9. Locking guide groove; 10. Upper key pin; 11. Lower key pin. Detailed Implementation
[0014] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. The present invention will now be described in detail with reference to the accompanying drawings and embodiments.
[0015] Example 1
[0016] refer to Figures 1 to 2 A plug holder includes: the plug holder is a rectangular structure, which is composed of a left frame plate 1 and a right frame plate 2 arranged opposite each other, an upper strip plate 3 and a lower strip plate 4 arranged opposite each other, and a front strip baffle 5 and a rear strip baffle 6 arranged opposite each other. The left frame plate 1, the upper strip plate 3, the right frame plate 2 and the lower strip plate 4 are connected end to end to form an enclosing structure. The front strip baffle 5 and the rear strip baffle 6 are respectively slidably arranged on the front and rear sides of the enclosing structure. Plug guide grooves 9 for fixing plugs are provided on the opposite sides of the left frame plate 1 and the right frame plate 2.
[0017] In this embodiment, two guide grooves 9 are provided on both the left frame plate 1 and the right frame plate 2.
[0018] This invention uses a retainer holder for fixing, which avoids deformation and misalignment of the retainers, thereby preventing uneven corrosion of the wafers. It can also simultaneously ETCH two retainer wafers, improving production efficiency.
[0019] In this embodiment, the left frame plate 1 and the right frame plate 2 are provided with slides 7 that cooperate with the front strip baffle 5 and the rear strip baffle 6.
[0020] In this embodiment, an upper keyway is provided on the upper side of the upper strip plate 3, and a lower keyway is provided on the lower side of the lower strip plate 4. An upper key pin 10 is detachably connected to the upper keyway, and a lower key pin 11 is detachably connected to the lower keyway.
[0021] In this embodiment, the upper key pin 10 and the lower key pin 11 have the same structure and are both provided with multiple protrusions 8, which are used to support the plug.
[0022] In practice, the plug is placed into the plug holder through the plug guide groove, and the front strip baffle 5 and the rear strip baffle 6 on both sides are inserted to fix the plug. The upper key pin 10 and the lower key pin 11 are inserted into the corresponding plug key slots. The upper key pin 10 and the lower key pin 11 can support the bottom of the plug and prevent the plug from deforming and affecting the chip's movement between the two plugs.
[0023] Preferably, the cartridge holder is assembled from PP board, which has low material cost and stable chemical properties. The cartridge is placed into the cartridge holder through the cartridge guide groove to ensure that the upper and lower cartridges are properly aligned. The front strip baffle 5 and the rear strip baffle 6 on both sides are inserted to ensure that the cartridge will not shift. The upper key pin 10 and the lower key pin 11 are inserted into the keyway to support the bottom of the cartridge and prevent the cartridge from deforming and affecting the movement of the chip between the cartridges.
[0024] This invention features low cost, stable chemical properties of materials, and a cassette guide groove design that ensures the cassettes are neatly aligned after being placed in the holder. The insertion of side baffles prevents the cassettes from shifting. The upper key pin 10 and lower key pin 11, inserted into the keyway, support the bottom of the cassettes, preventing deformation and ensuring the wafers do not wobble between the cassettes. This avoids deformation and misalignment of the cassettes, thus preventing uneven corrosion of the wafers. The holder can simultaneously ETCH two cassette wafers, improving production efficiency.
[0025] The above description is merely a preferred embodiment of this utility model and is not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model are included within the protection scope of this utility model.
Claims
1. A cartridge holder, characterized in that, The plug holder is a rectangular structure, which consists of a left and right frame plate, an upper and lower strip plate, and a front and rear strip baffle arranged opposite to each other. The left frame plate, the upper strip plate, the right frame plate, and the lower strip plate are connected end to end to form an enclosing structure. The front and rear strip baffles are slidably arranged on the front and rear sides of the enclosing structure, respectively. Plug guide grooves for fixing the plugs are provided on opposite sides of the left and right frame plates.
2. The retainer sleeve according to claim 1, characterized in that, Both the left frame plate and the right frame plate are provided with two locking guide grooves.
3. A retainer sleeve according to claim 1, characterized in that, The left frame plate and the right frame plate are provided with slides that cooperate with the front strip baffle and the rear strip baffle.
4. A retainer sleeve according to claim 1, characterized in that, The upper strip plate has an upper keyway on its upper side, and the lower strip plate has a lower keyway on its lower side. The upper keyway is detachably connected to an upper key pin, and the lower keyway is detachably connected to a lower key pin.
5. A retainer sleeve according to claim 4, characterized in that, The upper key pin and the lower key pin have the same structure and both are provided with multiple protrusions, which are used to support the plug.