A single crystal furnace pipe cleaning device

Abstract

This utility model relates to the field of single crystal furnace maintenance technology, specifically to a single crystal furnace pipe cleaning device, including pipes, a cleaning mechanism, and a driving mechanism. The cleaning mechanism includes a fixed pipe, a first pipe network, and a second pipe network sequentially arranged from the outside to the inside, thereby forming a collection tank, a slag collection tank, and a dust collection tank sequentially from the outside to the inside. The fixed pipe is provided with several scrapers along its circumference, which fit against the inner wall of the pipe. The two ends of the scrapers are closed and connected to a back plate extending radially along the pipe to form a scraper bucket. The end of the scraper bucket away from the pipe has a discharge port that communicates with the collection tank. The driving mechanism includes a hollow tube driven by a hollow shaft motor. One end of the hollow tube is connected to the second pipe network and then to the dust collection tank. The other end passes through the hollow shaft motor and is connected to a transition pipe through a rotary joint. The other end of the transition pipe is connected to a vacuum cleaner through a flexible hose. This utility model can completely absorb the impurities after cleaning, avoiding secondary adhesion or overflow of impurities into the pipe and affecting the working environment, resulting in a cleaner finish.

Description

Technical Field

[0001] This utility model belongs to the field of single crystal furnace maintenance technology, and specifically relates to a single crystal furnace pipeline cleaning device. Background Technology

[0002] A single crystal furnace is a device that melts polycrystalline materials such as polycrystalline silicon in an inert gas environment using a graphite heater and grows dislocation-free single crystals using the Czochralski method. Because the production process of single crystal silicon has strict requirements for cleanliness, otherwise it will affect the production quality of single crystal silicon. Since a large number of impurities adhere to the single crystal furnace after each production of single crystal silicon, the single crystal furnace needs to be cleaned after each production run.

[0003] The exhaust pipe of a single crystal furnace is a component with a lot of impurities adhering to it. It is necessary to clean the impurities in the exhaust pipe to ensure smooth exhaust. The utility model patent with publication number CN204396403U proposes a cleaning tool for the exhaust straight pipe of a single crystal furnace, which includes a pipe body, a micro motor and a cleaning head. The micro motor is fixedly connected to a motor bracket fixed to the inner wall of the pipe body, and the motor switch is fixed to the outer wall of the pipe body. The shaft of the micro motor is detachably connected to the cleaning head at the front end of the pipe body. The rear end of the pipe body is connected to an exhaust hose, which is connected to a vacuum cleaner. While this solution has the advantages of thoroughly cleaning the inner wall and bottom of the exhaust pipe, greatly improving cleaning quality and effect, and reducing the labor intensity of operators, it also has the following drawbacks: when cleaning the pipe wall through the cleaning head, the cleaned impurities cannot be collected and processed, which may cause impurities to stick to the cleaning head and affect its use; at the same time, the flared mouth, which is spaced apart from the cleaning head, cannot completely absorb the cleaned impurities, which may cause impurities to re-adhere to the pipe wall or affect the working environment; moreover, larger particles of impurities may appear during the cleaning process, which, if not separated, may cause the hose or vacuum cleaner to become clogged, affecting the cleaning work. Utility Model Content

[0004] To address the problems of existing technologies, this utility model proposes a single crystal furnace pipe cleaning device to solve the problems of inconvenience in use, incomplete cleaning, and easy blockage of current single crystal furnace exhaust pipe cleaning devices.

[0005] The purpose of this utility model and the technical problem it solves are achieved by the following technical solution. A single crystal furnace pipe cleaning device according to this utility model includes a pipe, a cleaning mechanism, and a driving mechanism. The cleaning mechanism includes a fixed pipe, a first pipe network, and a second pipe network sequentially arranged from the outside to the inside, thereby forming a collection tank, a slag collection tank, and a dust collection tank sequentially from the outside to the inside. The fixed pipe is provided with several scrapers along its circumference that fit against the inner wall of the pipe. The two ends of the scrapers are closed and connected to a back plate extending radially along the pipe to form a scraper bucket. The back plate extends and connects to the first pipe network so that the collection tank forms a receiving tank corresponding to the scraper bucket. The end of the scraper bucket away from the pipe has a discharge port that communicates with the receiving tank. The driving mechanism includes a hollow tube driven by a hollow shaft motor. One end of the hollow tube is connected to the second pipe network and then communicates with the dust collection tank. The other end passes through the hollow shaft motor and is connected to a transition pipe through a rotary joint. The other end of the transition pipe is connected to a vacuum cleaner through a flexible hose.

[0006] Furthermore, several sets of guide sliding mechanisms are distributed axially on the outer wall of the fixed pipe. The guide sliding mechanism includes several bases arranged circumferentially along the outer wall of the fixed pipe. A universal ball is connected to the ball head on the base, and the universal ball contacts the inner wall of the pipe.

[0007] Furthermore, the guide mechanism has at least two sets.

[0008] Furthermore, the storage trough and slag collection trough are closed at one end and have a detachable cover at the other end.

[0009] Furthermore, the end of the dust collection trough furthest from the hollow tube is sealed.

[0010] Furthermore, a first support plate is provided on the outer wall of the pipe, and a second support plate is provided on the hollow shaft motor. The first support plate and the second support plate are connected by an electric push rod.

[0011] Furthermore, the electric actuator is detachably connected to the second support plate.

[0012] Furthermore, the mesh size on the first pipeline is larger than the mesh size on the second pipeline.

[0013] In summary, this utility model has the following advantages: Several scrapers are installed on the outer wall of the fixed tube. By rotating, not only can impurities on the outer wall of the pipe be scraped off, but they can also be collected after scraping, preventing impurities from prolonged contact with the cleaning head and thus adhering to it or falling into the pipe. This eliminates the need for secondary cleaning of the pipe and cleaning head, making it convenient to use. The hollow shaft motor, hollow tube, flexible hose, and second pipe network are interconnected, allowing for direct adsorption of impurities collected by the scrapers into the collection tank from within. This eliminates gaps between the cleaning mechanism and the adsorption components, ensuring complete absorption of the cleaned impurities and preventing secondary adhesion or overflow from the pipe, which could affect the working environment. The cleaning is also more thorough. The fixed tube, first pipe network, and second pipe network separate the collection tank, slag collection tank, and dust collection tank, allowing for the classified collection of impurities. This avoids large particles clogging the flexible hose or vacuum cleaner, ensuring the normal operation of the device.

[0014] The above description is merely an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, and to make the above and other objects, features and advantages of this utility model more obvious and understandable, preferred embodiments are given below, and detailed descriptions are provided in conjunction with the accompanying drawings. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of a single crystal furnace pipe cleaning device according to the present invention.

[0016] Figure 2 for Figure 1 Sectional view at point AA. Detailed Implementation

[0017] The technical solution of this utility model will be further described below with reference to the accompanying drawings and preferred embodiments.

[0018] Please see Figure 1 , Figure 2 A single crystal furnace pipe cleaning device includes a pipe 1, a cleaning mechanism 2 and a driving mechanism; The cleaning mechanism 2 includes a fixed pipe 13, a first pipe network 12, and a second pipe network 11 arranged sequentially from the outside to the inside, thus forming a collection trough, a slag collection trough 18, and a dust collection trough 19 sequentially from the outside to the inside. The fixed pipe 13 is provided with several scrapers 16 along its circumference, which are in contact with the inner wall of the pipe 1. The scrapers 16 are arc-shaped, with sealing plates at both ends and connected to a back plate 20 extending radially along the pipe to form a scraper bucket. The back plate 20 extends and connects to the first pipe network 12, so that the collection trough forms several receiving troughs 17 corresponding to the scraper buckets. The end of the scraper bucket away from the pipe 1 has a discharge port that communicates with the receiving troughs 17. With the aforementioned technical features, the scraper bucket can be cleaned through the receiving troughs 17, the slag collection trough 18, and the dust collection trough 19. The impurities are sorted and processed, and the mesh size on the first pipe network 12 is larger than that on the second pipe network 11. This allows large pieces of debris to remain in the collection tank 17, smaller impurities to remain in the slag collection tank 18, and fine dust to be collected in the dust collection tank 19. Furthermore, the collection tank 17 and the slag collection tank 18 are closed at one end and detachably equipped with a cover plate at the other end (for example, cover plates that match the shape of the collection tank 17 and the slag collection tank 18 respectively, with a locking post at the sealing end of the cover plate, and locking holes protruding on the inner wall of the collection tank 17 and the slag collection tank 18 to lock them together). This allows the impurities in the collection tank 17 and the slag collection tank 18 to be processed separately, thereby avoiding the problem of large particles of impurities clogging the hose or vacuum cleaner and ensuring the normal operation of the device.

[0019] The driving mechanism includes a hollow tube 3 driven by a hollow shaft motor 4. One end of the hollow tube 3 is connected to the second pipe network 11 and then communicates with the dust collection tank 19. The end of the dust collection tank 19 away from the hollow tube 3 is closed. At the same time, the other end of the hollow tube 3 passes through the hollow shaft motor 4 and is connected to the transition pipe 6 through a rotary joint 5. The other end of the transition pipe 6 is connected to the vacuum cleaner through a flexible hose 7. With the help of the aforementioned technical features, impurities collected by the scraper can be directly adsorbed from the inside of the fixed pipe 13, so that there is no gap between the cleaning mechanism and the adsorption component. The impurities can be completely absorbed, avoiding secondary adhesion of impurities or overflow of pipe 1 that would affect the working environment. The cleaning is relatively clean, ensuring the normal operation of the pipe.

[0020] Several sets of guide sliding mechanisms are distributed axially on the outer wall of the fixed pipe 13. There are at least two sets of guide sliding mechanisms. Each guide sliding mechanism includes several bases 14 arranged circumferentially along the outer wall of the fixed pipe 13. A universal ball 15 is connected to the ball head on the base 14. The universal ball 15 contacts the inner wall of the pipe 1. With the aforementioned technical features, a certain guiding sliding effect can be given to the cleaning mechanism, which is convenient for the cleaning mechanism to move or rotate in the pipe 1, thereby carrying out stable cleaning work.

[0021] The outer wall of the pipe 1 is provided with a first support plate 10 and the hollow shaft motor 4 is provided with a second support plate 9. The first support plate 10 and the second support plate 9 are connected by an electric push rod 8. The electric push rod 8 and the second support plate 9 are detachably connected (e.g., connected by bolts and nuts). With the aforementioned technical features, the cleaning mechanism and the driving mechanism can be driven to move along the axial direction of the pipe 1 without manual operation, which is convenient to use. At the same time, the electric push rod 8 and the second support plate 9 can be detached to remove the cleaning mechanism, thereby processing the impurities inside the cleaning mechanism (i.e., the collection tank 17 and the slag collection tank 18).

[0022] Working process: First, the extension of the electric actuator 8 controls the cleaning mechanism to enter the pipe 1, while the scraper bucket and the universal ball 15 in the cleaning mechanism contact the inner wall of the pipe 1. Then, the hollow shaft motor 4 drives the hollow tube 3 to rotate, thereby causing the cleaning mechanism to rotate towards the cleaning end of the scraper bucket. When the cleaning mechanism rotates, the scraper bucket scrapes away impurities on the inner wall of the pipe 1, and the impurities enter the scraper bucket under the action of centrifugal force. Next, the speed of the hollow shaft motor 4 is appropriately reduced, so that the impurities fall into the collection tank 17 along the back plate 20 under the action of gravity. Then, the impurities flow along the first pipe network 12. The outer wall and the inner wall of the fixed pipe 13 are repeatedly rolled to filter, and larger impurities are intercepted in the collection tank 17; after the impurities through the first pipe network 12 fall onto the second pipe network 11, they are filtered again, and smaller impurities remain in the slag collection tank 18, while fine dust and debris enter the dust collection tank 19. At the same time, since the vacuum cleaner is connected to the hollow pipe 3 and the dust collection tank 19, the dust that falls into the dust collection tank 19 is absorbed into the vacuum cleaner; after the above process is completed, part of the inner wall of the pipe 1 is cleaned, and then the electric push rod 8 is driven to extend to continue cleaning the depth of the pipe 1; When it is necessary to deal with impurities in the cleaning mechanism, retract the electric actuator 8, then separate the electric actuator 8 from the second support plate 9, and then open the cover plates of the receiving tank 17 and the slag collection tank 18 to deal with the impurities therein.

[0023] The above description is merely a preferred embodiment of this utility model. Any simple modifications, equivalent changes, and alterations made by those skilled in the art to the above embodiments without departing from the scope of the technical solution of this utility model shall still fall within the scope of the technical solution of this utility model.

Claims

1. A single crystal furnace piping cleaning device, characterized by: It includes a pipe (1), a cleaning mechanism (2), and a drive mechanism; The cleaning mechanism (2) includes a fixed pipe (13), a first pipe network (12) and a second pipe network (11) arranged sequentially from the outside to the inside, thereby forming a collection tank, a slag collection tank (18) and a dust collection tank (19) sequentially from the outside to the inside; the fixed pipe (13) is provided with several scrapers (16) along the circumferential direction that fit against the inner wall of the pipe (1), the two ends of the scraper (16) are closed and connected to the back plate (20) extending radially along the pipe to form a scraper bucket, the back plate (20) extends and connects to the first pipe network (12) so that the collection tank forms a receiving tank (17) corresponding to the scraper bucket, and the scraper bucket is provided with a discharge port at the end away from the pipe (1) to communicate with the receiving tank (17); The drive mechanism includes a hollow tube (3) driven by a hollow shaft motor (4). One end of the hollow tube (3) is connected to the second pipe network (11) and then connected to the dust collection tank (19). The other end passes through the hollow shaft motor (4) and is connected to the transition tube (6) through a rotary joint (5). The other end of the transition tube (6) is connected to the vacuum cleaner through a hose (7).

2. A single crystal furnace tube cleaning device according to claim 1, wherein: Several sets of guide sliding mechanisms are distributed along the axial direction on the outer wall of the fixed pipe (13). The guide sliding mechanism includes several bases (14) arranged circumferentially along the outer wall of the fixed pipe (13). A universal ball (15) is connected to the ball head on the base (14). The universal ball (15) contacts the inner wall of the pipe (1).

3. A single crystal furnace tube cleaning device as defined in claim 2, wherein: The guide mechanism has at least two sets.

4. A single crystal furnace tube cleaning device as defined in claim 1, wherein: The storage trough (17) and slag collection trough (18) are closed at one end and have a detachable cover at the other end.

5. A single crystal furnace tube cleaning device as defined in claim 1, wherein: The dust collection trough (19) is closed off at the end away from the hollow tube (3).

6. A single crystal furnace tube cleaning device as defined in claim 1, wherein: The outer wall of the pipe (1) is provided with a first support plate (10) and the hollow shaft motor (4) is provided with a second support plate (9). The first support plate (10) and the second support plate (9) are connected by an electric push rod (8).

7. A single crystal furnace tube cleaning device as defined in claim 6, wherein: The electric actuator (8) is detachably connected to the second support plate (9).

8. A single crystal furnace tube cleaning device as defined in claim 1, wherein: The mesh size on the first pipe network (12) is larger than the mesh size on the second pipe network (11).

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