A water-cooled ring device for a single crystal furnace

Abstract

This utility model discloses a water-cooling ring device for a single crystal furnace, including a base plate. A pre-embedded pipe is fixedly connected to the center of the lower surface of the base plate. A hydraulic cylinder is installed inside the pre-embedded pipe. The piston rod at the top of the hydraulic cylinder passes through the center of the base plate. A single crystal furnace body is fitted into the inner ring wall of an annular hole in the top plate, and the outer wall of the single crystal furnace body and the inner ring wall of the annular hole in the top plate are fitted with a clearance. The center of the lower surface of the single crystal furnace body is fixedly connected to the top of the piston rod of the hydraulic cylinder. In the water-cooling process of the single crystal furnace body, heat dissipation is achieved by adding a lifting mechanism and a water-cooling ring structure. After the furnace is shut down, the furnace body is first allowed to dissipate heat through natural air convection, reducing the furnace body temperature from an extremely high value to a medium-high temperature range, avoiding direct impact of high temperature on water cooling. The single crystal furnace body is then cooled by water flow. The advantage of this design is that it achieves a balance between heat dissipation and temperature reduction through a staged cooling strategy.

Description

Technical Field

[0001] This utility model relates to the field of water cooling technology for single crystal furnaces, specifically to a water cooling ring device for single crystal furnaces. Background Technology

[0002] A single crystal furnace, also known as a crystal growth furnace or single crystal growth equipment, is a high-temperature precision device used to grow high-quality single crystal materials under controlled conditions. As one of the core pieces of equipment in modern materials science and the semiconductor industry, it plays a crucial role in the critical step of transforming raw materials into high-purity single crystals. It is a specialized device that melts and recrystallizes raw materials under high-temperature conditions to form bulk materials with a single crystal structure.

[0003] During the operation of a single crystal furnace, especially during the crystal growth stage, if these high-temperature components are not effectively cooled in time after crystal growth, prolonged exposure to high temperatures can lead to uneven temperature reduction inside the furnace. Residual thermal stress can affect the temperature field distribution during the next crystal growth, resulting in unstable crystal growth interfaces and an increase in crystal defects such as dislocations, bubbles, and impurity aggregation. Therefore, a water-cooling ring device for a single crystal furnace is proposed to remove the generated heat and keep critical components within a safe temperature range. Utility Model Content

[0004] The purpose of this invention is to provide a water-cooled ring device for a single crystal furnace to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a water-cooled ring device for a single crystal furnace, comprising a base plate, a pre-embedded pipe fixedly connected to the center of the lower surface of the base plate, a hydraulic cylinder provided in the inner cavity of the pre-embedded pipe, the piston rod at the top of the hydraulic cylinder penetrating through the center of the base plate and being clearance-fitted, support legs fixedly connected to the four corners of the upper surface of the base plate, a top plate fixedly connected to the upper surfaces of the four support legs, an annular hole opened at the center of the top plate, a single crystal furnace body sleeved on the inner ring wall of the annular hole of the top plate, and the outer wall of the single crystal furnace body and the inner ring wall of the annular hole of the top plate being clearance-fitted, and the center of the lower surface of the single crystal furnace body being fixedly connected to the top of the piston rod of the hydraulic cylinder.

[0006] Preferably, it also includes a water-cooling ring structure, which is disposed at the center of the upper surface of the base plate, and the center of the water-cooling ring structure is in clearance fit with the outer wall of the piston rod of the hydraulic cylinder.

[0007] Preferably, the water-cooling ring structure includes annular square tubes, the inner ring wall radius of which is larger than the radius of the single crystal furnace body, and the number of annular square tubes is three, arranged vertically in sequence. A connecting square tube is fixedly connected between the inner sidewalls of the three annular square tubes, and an inlet and outlet pipe is fixedly connected to the sidewalls of the two outer annular square tubes. A valve is installed at the center of the inlet and outlet pipe.

[0008] Preferably, the inner ring wall of the inlet and outlet pipe is threaded near the end, and the outer ring wall of the inlet and outlet pipe is threaded near the end.

[0009] Preferably, the support leg is in the shape of a right-angled plate.

[0010] Compared with the prior art, the beneficial effects of this utility model are as follows: In the water cooling process of the single crystal furnace body, heat dissipation is achieved by adding a lifting mechanism and a water-cooling ring structure. When the single crystal furnace body is working, it is raised by the lifting mechanism to avoid the high temperature during operation affecting the water flow of the water-cooling ring structure. After the single crystal furnace body is used, it is first subjected to natural air cooling for a short period of time, and then the lifting mechanism is activated to pull it to the bottom and fit it in close contact with the water-cooling ring structure. The water pipe of the water-cooling ring adopts a ring-shaped design with a square cross-section, which fits the contour of the outer wall of the single crystal furnace body, increases the contact area, and optimizes the water flow distribution. After the furnace is shut down, the furnace body is first allowed to dissipate heat through natural air convection, reducing the furnace body temperature from an extremely high value to a medium-high temperature range, avoiding direct impact of high temperature on water cooling. The single crystal furnace body is cooled by water flow. The advantage of this design is that it achieves a balance between heat dissipation and temperature reduction through a staged cooling strategy. Attached Figure Description

[0011] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 for Figure 1 Detailed structural diagram of the single crystal furnace body; Figure 3 for Figure 1 Detailed structural diagram of the pre-embedded cylinder; Figure 4 for Figure 1 Detailed structural diagram of the water-cooled ring structure; In the diagram: 1. Base plate; 2. Support leg; 3. Top plate; 4. Water-cooled ring structure; 41. Annular square tube; 42. Continuing square tube; 43. Inlet and outlet pipes; 44. Valve; 5. Embedded cylinder; 6. Hydraulic cylinder; 7. Single crystal furnace body. Detailed Implementation

[0012] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0013] Please see Figure 1-4 This utility model provides a water-cooling ring device for a single crystal furnace, including a base plate 1. A pre-embedded pipe 5 is fixedly connected to the center of the lower surface of the base plate 1. A hydraulic cylinder 6 is installed in the inner cavity of the pre-embedded pipe 5. The piston rod at the top of the hydraulic cylinder 6 passes through the center of the base plate 1 and is clearance-fitted. Support legs 2 are fixedly connected to the four corners of the upper surface of the base plate 1. A top plate 3 is fixedly connected to the upper surface of the four support legs 2. An annular hole is opened at the center of the top plate 3. A single crystal furnace body 7 is sleeved on the inner wall of the annular hole of the top plate 3, and the outer wall of the single crystal furnace body 7 and the inner wall of the annular hole of the top plate 3 are clearance-fitted. The center of the lower surface of the single crystal furnace body 7 is fixedly connected to the top of the piston rod of the hydraulic cylinder 6.

[0014] This device is applied to the water cooling process of the single crystal furnace body 7. Heat dissipation is achieved by adding a lifting mechanism and a water cooling ring structure 4. A top plate 3 and a bottom plate 1 are installed at the bottom of the single crystal furnace body 7, which are supported by support legs 2. The pre-embedded pipe 5 is pre-installed and installed in the ground of the single crystal furnace body 7. After the single crystal furnace body 7 is used, it is first subjected to natural air cooling for a short period of time. Then, the water cooling ring structure 4 is activated to circulate water. Then, the hydraulic cylinder 6 inside the pre-embedded pipe 5 is activated. When the piston rod of the hydraulic cylinder 6 is retracted, the single crystal furnace body 7 can be pulled between the top plate 3 and the bottom plate 1 and put into contact with the water cooling ring structure 4. The water flow dissipates heat and cools the single crystal furnace body 7.

[0015] like Figure 1 and Figure 2 , Figure 3 As shown, it also includes a water-cooled ring structure 4, which is located at the center of the upper surface of the base plate 1. The center of the water-cooled ring structure 4 is in clearance fit with the outer wall of the piston rod of the hydraulic cylinder 6. The water-cooled ring structure 4 is located on the surface of the base plate 1. When the hydraulic cylinder 6 moves the single crystal furnace body 7, the single crystal furnace body 7 can be placed at the center of the water-cooled ring structure 4. After the two are in contact, water flow is connected to both sides of the water-cooled ring structure 4 to dissipate heat and cool the single crystal furnace body 7.

[0016] like Figure 1 , Figure 2 , Figure 3 , Figure 4As shown, the water-cooled ring structure 4 includes annular square tubes 41. The inner ring wall radius of the annular square tubes 41 is larger than the radius of the single crystal furnace body 7. There are three annular square tubes 41, which are arranged vertically in sequence. The inner sidewalls of the three annular square tubes 41 are fixedly connected with connecting square tubes 42. The sidewalls of the two outer annular square tubes 41 are fixedly connected with inlet and outlet pipes 43. A valve 44 is installed at the center of the inlet and outlet pipes 43. The specific use of the water-cooled ring structure 4 is as follows: the annular square tubes 41 serve as the main body of the water-cooled ring structure 4. The annular square tubes 41 adopt an annular design with a square cross-section. There are three annular square tubes 41, which are arranged vertically in sequence. They fit tightly against the outer wall contour of the single crystal furnace body 7, increasing the contact area and optimizing the water flow distribution. Each annular square tube 41 is connected to the other through connecting square tubes 41. The two outer annular square tubes 41 are connected with inlet and outlet pipes 43. The two inlet and outlet pipes 43 can be equipped with water pumps or other equipment depending on the site. Water enters through the inlet and outlet pipes 43 at a higher position. The water inlet and outlet pipes 43 at the bottom discharge water, completing the water cooling of the single crystal furnace body 7.

[0017] like Figure 4 As shown, the inner ring wall of the inlet and outlet pipe 43 is threaded near the end, and the outer ring wall of the inlet and outlet pipe 43 is threaded near the end. By opening threads on both the inner and outer sides of the inlet and outlet pipe 43, pipes can be connected to both the inner and outer sides during actual use, giving it more connection options.

[0018] like Figure 2 and Figure 3 As shown, the support leg 2 is in the shape of a right-angled plate. The right-angled plate shape of the support leg 2 can provide more stable support, while reducing the space occupied by the inner side of the base plate 1, leaving more usable space on the surface of the base plate 1.

[0019] Working principle: This device is applied to the water cooling process of the single crystal furnace body 7. Heat dissipation is achieved by adding lifting and water cooling ring structure 4. A top plate 3 and a bottom plate 1 are set at the bottom of the single crystal furnace body 7, which are supported by support legs 2. The pre-embedded pipe 5 is pre-installed and set in the ground of the single crystal furnace body 7. When the single crystal furnace body 7 is used, it is first subjected to natural air cooling for a short period of time. The water cooling ring structure 4 is activated to circulate water. Then, the hydraulic cylinder 6 inside the pre-embedded pipe 5 is activated. When the piston rod of the hydraulic cylinder 6 is retracted, the single crystal furnace body 7 can be pulled between the top plate 3 and the bottom plate 1 and put into contact with the water cooling ring structure 4. The water flow dissipates heat and cools the single crystal furnace body 7.

[0020] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A water-cooled ring device for a single crystal furnace, characterized in that: The system includes a base plate (1), with a pre-embedded pipe (5) fixedly connected to the center of the lower surface of the base plate (1). A hydraulic cylinder (6) is installed in the inner cavity of the pre-embedded pipe (5). The piston rod at the top of the hydraulic cylinder (6) passes through the center of the base plate (1) and is clearance-fitted. Support legs (2) are fixedly connected to the four corners of the upper surface of the base plate (1). A top plate (3) is fixedly connected to the upper surface of the four support legs (2). An annular hole is opened at the center of the top plate (3). A single crystal furnace body (7) is sleeved on the inner wall of the annular hole of the top plate (3). The outer wall of the single crystal furnace body (7) and the inner wall of the annular hole of the top plate (3) are clearance-fitted. The center of the lower surface of the single crystal furnace body (7) is fixedly connected to the top of the piston rod of the hydraulic cylinder (6).

2. The water-cooled ring device for a single crystal furnace according to claim 1, characterized in that: It also includes a water-cooled ring structure (4), which is located at the center of the upper surface of the base plate (1), and the center of the water-cooled ring structure (4) is in clearance fit with the outer wall of the piston rod of the hydraulic cylinder (6).

3. The single crystal furnace water-cooling ring device according to claim 2, characterized in that: The water-cooled ring structure (4) includes an annular square tube (41). The inner ring wall radius of the annular square tube (41) is larger than the radius of the single crystal furnace body (7). There are three annular square tubes (41) arranged vertically in sequence. A connecting square tube (42) is fixedly connected between the inner side walls of the three annular square tubes (41). An inlet and outlet pipe (43) is fixedly connected to the side walls of the two outer annular square tubes (41). A valve (44) is installed at the center of the inlet and outlet pipe (43).

4. The single crystal furnace water-cooling ring device according to claim 3, characterized in that: The inner ring wall of the inlet and outlet pipe (43) is threaded near the end, and the outer ring wall of the inlet and outlet pipe (43) is threaded near the end.

5. The water-cooled ring device for a single crystal furnace according to claim 1, characterized in that: The support leg (2) is in the shape of a right-angled plate.

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