Vacuum chamber high-efficiency sealed water-cooling heat dissipation structure

Abstract

This utility model discloses a high-efficiency, sealed water-cooled heat dissipation structure for a vacuum chamber, relating to the field of heat exchange technology. It includes a protective shell that covers the outer side of the vacuum chamber body. The inner wall of the protective shell has two positioning ribs that press against the outer wall of the vacuum chamber body, and these ribs are spirally distributed. A guide channel is formed between the two positioning ribs, and a water-cooling pipe is installed inside the guide channel. The two ends of the water-cooling pipe are an inlet and an outlet, respectively. The inlet and outlet can be connected to an external constant-temperature cooling water circulator to form a sealed cooling water circulation loop that spirals around the vacuum chamber body. The end of the water-cooling pipe in the guide channel can connect to the end of an external water-cooling pipe, so that, with the assistance of the guide channel, the water-cooling pipe in the guide channel acts as a pull, allowing the external water-cooling pipe to replace the water-cooling pipe in the guide channel. This solves the problem in the prior art where water-cooling pipes cannot be easily replaced after damage.

Description

Technical Field

[0001] This utility model relates to the field of heat exchange technology, specifically to a high-efficiency sealed water-cooled heat dissipation structure for a vacuum chamber. Background Technology

[0002] Vacuum chambers are the core load-bearing components of precision vacuum process equipment such as plasma etching, electron beam processing, and vacuum coating. During equipment operation, conditions such as plasma discharge, high-temperature heat treatment of workpieces, electron beam bombardment, and heat radiation from heat sources continuously release a large amount of heat within the chamber. However, since there is no air convection heat transfer in a vacuum environment, the heat can only be dissipated through conduction from the metal walls of the chamber, which can easily lead to heat accumulation and rapid temperature rise in the vacuum chamber.

[0003] High temperatures can cause uneven thermal deformation of the metal body of the vacuum chamber, damaging the sealing flatness of the flanges and splicing surfaces, leading to micro-leakage, failure to meet overall vacuum standards, and directly causing drift in vacuum process parameters and failure to achieve consistent processing. Simultaneously, high temperatures accelerate the aging, hardening, and cracking of temperature-sensitive precision components such as sealing rings, insulation parts, detection sensors, and process monitoring cameras, significantly shortening their lifespan. Therefore, water cooling has become an essential technique for temperature control in vacuum chambers.

[0004] Existing water-cooled pipelines are subjected to high-temperature radiation, high-pressure water circulation, and complex workshop conditions over long periods, making them highly susceptible to irreversible performance degradation and structural damage, necessitating periodic replacement. The specific causes of failure fall into two main categories: one is scale buildup and blockage on the inner wall of the pipeline. Calcium and magnesium ions and impurities in the cooling water continuously precipitate and adhere to the pipe wall under the influence of high-temperature heat conduction within the cavity, gradually forming a dense scale layer. On one hand, the extremely low thermal conductivity of scale significantly hinders heat exchange within the pipe wall, leading to a continuous decrease in heat dissipation capacity and loss of temperature control accuracy. On the other hand, the continuous accumulation of scale reduces the effective pipe diameter and increases water flow resistance, resulting in insufficient water flow and uneven heat dissipation. Conventional water washing and unblocking methods cannot completely remove the solidified thick layer of scale, rendering heat exchange performance unrecoverable. Another type of failure is caused by damage from the harsh external environment of the pipeline. Water-cooled pipelines are laid in close contact with high-temperature vacuum chambers for a long time, and are continuously subjected to alternating hot and cold shocks and high-temperature baking. At the same time, they are affected by workshop water vapor, trace corrosive media and dust erosion. The inner and outer walls of water-cooled pipes are prone to structural damage such as oxidation peeling, pitting, cracking and deformation. This not only causes water flow turbulence and unstable heat exchange, but also easily induces pipeline micro-leakage or water seepage risks, seriously damaging the sealing environment of the vacuum chamber.

[0005] However, the existing integrated water-cooling structure cannot independently and quickly disassemble and replace failed water-cooling pipes. Once the pipes fail due to scaling or structural damage, the entire heat dissipation assembly can only be removed, resulting in extremely high maintenance costs and long equipment downtime, which in turn affects the continuous production efficiency of the vacuum process. Utility Model Content

[0006] The purpose of this invention is to solve the problem that water-cooling pipes cannot be easily replaced after damage in the prior art, and to provide a high-efficiency, sealed water-cooling heat dissipation structure in a vacuum chamber.

[0007] To address the shortcomings of the aforementioned technical problems, the present invention adopts the following technical solution: a high-efficiency sealed water-cooled heat dissipation structure for a vacuum chamber, comprising a protective shell that can cover the outer side of the main body of the vacuum chamber, and the inner wall of the protective shell is provided with two positioning ribs that can press against the outer wall of the main body of the vacuum chamber, the two positioning ribs being distributed in a spiral shape. The two positioning ribs together form a guide channel, and a water-cooling pipe is provided inside the guide channel. The two ends of the water-cooling pipe are an inlet and an outlet, respectively. The inlet and outlet can be connected to a constant temperature cooling water circulator to form a closed cooling water circulation loop that spirals around the main body of the vacuum chamber. The end of the water-cooled pipe located in the guide channel can be connected to the end of the external water-cooled pipe, so that with the assistance of the guide channel, the water-cooled pipe in the guide channel can be used as a traction to replace the water-cooled pipe in the guide channel with the external water-cooled pipe.

[0008] As a further optimization of the efficient sealed water-cooled heat dissipation structure of the vacuum chamber of this utility model: the included angle between the two ends of the positioning rib is 180°, the water inlet extends out of the protective shell from the first end of the guide channel, and the water outlet extends out of the protective shell from the second end of the guide channel.

[0009] As a further optimization of the efficient sealed water-cooled heat dissipation structure of the vacuum chamber of this utility model: the outer walls of the water inlet and water outlet are provided with external threads, and the external threads are connected to flanges.

[0010] As a further optimization of the efficient sealed water-cooled heat dissipation structure of the vacuum chamber of this utility model: the inner wall of the water outlet is provided with internal threads, and the water inlet of the water-cooling pipe in the guide channel can be screwed into the water outlet of the external water-cooling pipe.

[0011] As a further optimization of the efficient sealed water-cooled heat dissipation structure of the vacuum chamber of this utility model: the spacing between the two positioning ribs is 1.1 to 1.2 times the outer diameter of the water-cooling pipe.

[0012] As a further optimization of the efficient sealed water-cooled heat dissipation structure of the vacuum chamber of this utility model: the inner sidewalls of the two positioning ribs are provided with a smooth layer.

[0013] As a further optimization of the efficient sealed water-cooled heat dissipation structure for vacuum chamber of this utility model: the outer surface of the protective shell is uniformly provided with a number of heat dissipation fins.

[0014] As a further optimization of the efficient sealed water-cooled heat dissipation structure of the vacuum chamber of this utility model: the water outlet can be externally connected to a pressure relief valve and a temperature detection head, and the water inlet can be externally connected to a flow regulating valve and a pressure sensor.

[0015] Compared with the prior art, the present invention has the following beneficial effects: This invention utilizes spiral positioning ribs to form a closed-loop, meandering guide channel, creating a closed-loop, meandering turbulent flow path for the water-cooled pipes. This causes the water flowing through the pipes to be turbulently redirected, actively breaking the laminar flow state of the cooling water and forcing it into high-intensity turbulence. This disrupts the fluid's thermal boundary layer and significantly improves heat exchange efficiency. Simultaneously, it effectively extends the cooling water flow path, expands the effective heat exchange area, eliminates stagnant dead zones and heat dissipation blind spots in traditional water-cooling structures, and achieves uniform heat dissipation across the entire outer wall of the vacuum chamber, effectively solving the problem of localized high-temperature hotspots caused by plasma discharge, electron beam bombardment, and high-temperature processes. Furthermore, it allows for the connection of new and old water-cooled pipes, working in conjunction with the smooth inner wall guide channel to create a pull-out replacement structure that eliminates the need for disassembly. During operation and maintenance, there is no need to disassemble the protective shell, dismantle the vacuum chamber sealing structure, or damage the original assembly precision of the equipment. The failure of the water cooling tube can be quickly replaced simply by connecting the old and new pipes and pulling them axially. This solves to some extent the problems of cumbersome disassembly and assembly, long downtime, and high operation and maintenance costs of traditional integrated water cooling structures. It can improve the efficiency of equipment operation and maintenance to a certain extent and adapt to the continuous production conditions in industry. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the axial side structure of this utility model; Figure 2 This is a schematic diagram of the axonal structure of the present invention in use. Figure 3 This is a cross-sectional structural diagram of the present invention in use. The markings in the diagram are: 1. Vacuum chamber body; 2. Protective shell; 3. Flange; 4. Water cooling pipe; 5. Heat dissipation fins; 6. Screw; 7. Positioning rib; 8. Water inlet; 9. Guide channel; 10. Water outlet. Detailed Implementation

[0017] To better understand this utility model, the following embodiments further illustrate the content of this utility model, but the content of this utility model is not limited to the following embodiments.

[0018] like Figures 1 to 3As shown, this utility model discloses a high-efficiency, sealed water-cooled heat dissipation structure for a vacuum chamber, suitable for the high-temperature temperature control requirements of high-precision vacuum processes such as plasma etching, electron beam processing, and vacuum coating. The core structure includes a protective shell 2 that can fully cover the outside of the main body 1 of the vacuum chamber. Two spirally arranged positioning ribs 7 are symmetrically fixed on the inner wall of the protective shell 2. The two positioning ribs 7 are parallel to each other and evenly spaced, forming a spiral guide channel 9 that runs parallel to the direction of the positioning ribs 7. A water-cooling pipe 4 is fitted inside the guide channel 9, enabling the positioning and close fit of the water-cooling pipe 4, ensuring full contact between the water-cooling pipe 4 and the outer wall of the vacuum chamber, maximizing heat transfer efficiency. The two ends of the water-cooling pipe 4 are respectively configured as an inlet 8 and an outlet 10. The inlet 8 and outlet 10 are connected to a constant-temperature cooling water circulator via pipelines to construct a closed-loop cooling water circulation system, achieving continuous circulating supply of cooling water. Meanwhile, the inlet section 8 can be externally connected to a flow regulating valve and a pressure sensor. Based on different process conditions, different heat generation power and hot spot distribution of the vacuum chamber body 1, it can dynamically adjust the cooling water inlet flow and inlet temperature in real time to accurately match the heat dissipation and temperature control requirements of various operating scenarios. The outlet section 10 is equipped with a pressure relief valve and a temperature detection probe, which can monitor the return water temperature and internal operating pressure of the pipeline in real time around the clock. Once there are potential faults such as pipeline overpressure, excessive cooling water temperature, or abnormal circulation, it can provide timely warnings and automatically relieve pressure and stabilize pressure through the pressure relief valve. This effectively avoids problems such as pipeline overpressure damage and high temperature heat dissipation failure, and achieves closed-loop constant temperature and pressure stabilization heat dissipation throughout the process. It strictly controls the internal temperature fluctuation of the vacuum chamber body 1 within the allowable range of the process, ensuring the continuous and stable operation of the vacuum process.

[0019] like Figure 3 As shown, both the inlet section 8 and the outlet section 10 of the water-cooled pipe 4 are machined with external threads on their outer walls. These threads allow for docking with the flange 3, significantly simplifying the assembly process of the water-cooled pipe 4 with the external constant-temperature cooling water circulator and testing and control equipment, and improving the sealing performance and ease of assembly of the pipe connections. Simultaneously, the outer diameter of the inlet section 8 matches the inner diameter of the outlet section 10, and the inner wall of the outlet section 10 is threaded, allowing the inlet section 8 to be screwed into the outlet section 10. This enables operators to thread-connect and fix the outlet section 10 of the new external water-cooled pipe 4 with the inlet section 8 of the existing water-cooled pipe 4 within the guide channel 9, completing the connection between the old and new pipes. Based on this structure, operators only need to pull the water outlet 10 of the water-cooled pipe 4 in the guide channel 9. Relying on the directional and limiting guiding effect of the spiral guide channel 9 formed by the two positioning ribs 7, the old and failed water-cooled pipe 4 located in the guide channel 9 can be smoothly pulled out along the guide channel 9. At the same time, the brand-new external water-cooled pipe 4 is sent into the guide channel 9 to complete the assembly. The whole process does not require disassembly or dismantling of the main structure of the protective shell 2, and does not damage the original assembly precision and sealing structure of the equipment. This simplifies the water-cooled pipe 4 replacement process and greatly shortens the equipment downtime for operation and maintenance.

[0020] The distance between the two positioning ribs 7 is 1.1 to 1.2 times the outer diameter of the water-cooling pipe 4, so that the water-cooling pipe 4 can be restricted by the guide channel 9. At the same time, it allows the water-cooling pipe 4 to have a certain bending space and displacement space when it is pulled, so that the water-cooling pipe 4 can be pulled out and replaced stably. It can also be restricted within the guide channel 9 to form a closed cooling water circulation loop.

[0021] The spacing between the two positioning ribs 7 is set to 1.1 to 1.2 times the outer diameter of the water-cooled pipe 4. This allows the formed guide channel 9 to provide reliable radial constraint on the water-cooled pipe 4, preventing it from shifting, loosening, or detaching from the guide channel 9 under long-term water circulation pulsation impact and equipment operating vibration conditions. This ensures that the water-cooled pipe 4 is always attached to the outer wall of the vacuum chamber body 1, stably constructing a closed cooling water circulation loop and guaranteeing the integrity and stability of the structure. Simultaneously, the small gap between the formed guide channel 9 and the water-cooled pipe 4 provides adequate bending allowance and radial displacement space for the water-cooled pipe 4 during the pulling and replacement process. This accommodates the arc curvature changes of the spiral guide channel 9, effectively avoiding situations such as water-cooled pipe 4 jamming, pipe wall scratching, and pulling jamming that are prone to occur in gapless fit structures. This improves the smoothness and operational fault tolerance of water-cooled pipe 4 disassembly and replacement.

[0022] The inner walls of the two positioning ribs 7 and the contact surfaces of the guide channel 9 are all provided with a smooth layer. The smooth layer is polished to maintain a low contact friction, thereby effectively reducing the frictional resistance during the replacement of the water cooling tube 4, avoiding wear and jamming of the outer wall of the tube, ensuring a smooth and stable replacement process of the old and new water cooling tubes 4, and effectively protecting the outer wall structure of the water cooling tube 4, avoiding mechanical damage during disassembly and assembly, and extending the service life of the water cooling tube 4.

[0023] Furthermore, the protective shell 2 adopts a composite assembly method of screw 6 locking and welding sealing. The bottom of the protective shell 2 is fastened to the outer wall of the vacuum chamber body 1 by screw 6, realizing the positioning and initial fixation of the overall structure. The protective shell 2 is initially a regular plate structure with multiple sets of matching holes. During the installation process, the plate is surrounded and formed around the outer periphery of the vacuum chamber body 1, so that the matching holes at each position are aligned and matched, realizing the initial positioning of the protective shell 2. After the enclosure is completed, the joints of the protective shell 2 are closed and sealed by circumferential welding process. This not only ensures the stability, airtightness and structural strength of the overall structure of the protective shell 2, but also ensures the installation accuracy of the inner positioning rib 7 and guide channel 9, providing structural support for the close assembly, stable operation and smooth replacement of the water cooling pipe 4.

[0024] The guide channel 9, together with the built-in water-cooling pipe 4 and the outer protective shell 2, forms a fully enclosed integrated water-cooling heat dissipation structure, enabling seamless heat dissipation across the entire outer wall of the vacuum chamber body 1. Simultaneously, the guide channel 9 employs a spiral closed-loop meandering structure design, creating a closed-loop meandering turbulent flow channel layout for the water-cooling pipe 4. Compared to traditional straight or simple serpentine flow channels, this significantly extends the effective flow path of the cooling water and expands the heat exchange area of ​​the medium. Furthermore, the directional disturbance effect of the spiral flow channel breaks the laminar flow state of the cooling water, forcing the fluid to form high-intensity turbulent disturbances, effectively disrupting the thermal boundary layer on the fluid surface and improving the efficiency of hot and cold medium exchange. This structure completely eliminates the heat dissipation blind spots and stagnant dead zones of traditional water-cooling structures, achieving uniform heat dissipation across the entire vacuum chamber. It effectively solves the problem of localized high-temperature hotspots generated by plasma bombardment and high-temperature processing, significantly improving the constant temperature control of the vacuum chamber body 1, and effectively avoiding faults such as high-temperature deformation and vacuum leakage, thus ensuring the stability of vacuum processes and the yield rate of workpiece processing.

[0025] The two ends of the positioning rib 7 are angled at 180°. The water inlet 8 passes through the protective shell 2 from the top of the guide channel 9, and the water outlet 10 passes through the protective shell 2 from the bottom of the guide channel 9. This makes the water inlet 8 and the water outlet 10 of the water cooling pipe 4 arranged in an alternating and symmetrical pattern, thereby making the water circulation more stable. Furthermore, the staggered port layout can form a stable vertical liquid level pressure difference and flow driving force to avoid adverse flow problems such as short flow, cross flow, and local short circuit in the closed cooling water circulation loop. This ensures that the cooling water flows unidirectionally throughout the closed cooling water circulation loop without flow shortcuts or blind spots, guaranteeing the utilization rate of the flow medium. At the same time, the symmetrical staggered layout can balance the overall inlet and outlet water pressure difference of the water-cooled pipe 4, making the water flow velocity distribution uniform in each section of the closed cooling water circulation loop. This eliminates local low-speed stagnation areas to a certain extent, reduces the phenomenon of water stagnation and accumulation from the source, significantly reduces the probability of mineral impurity deposition and scaling, and maintains the pipe diameter and heat exchange performance for a long time. like Figure 1 and Figure 2 As shown, furthermore, multiple sets of heat dissipation fins 5 are evenly distributed on the outer surface of the protective shell 2. The heat dissipation fins 5 are integrally formed with the protective shell 2 and are arranged in a regular manner, which can form an auxiliary heat dissipation structure. On the basis of forced liquid cooling by the water cooling pipe 4, the heat dissipation fins 5 increase the contact area between the protective shell 2 and the outside air, enhance the natural convection heat dissipation effect, and form a composite heat dissipation system of liquid cooling as the main heat dissipation and air cooling as the auxiliary heat dissipation. This dually improves the overall cooling efficiency of the vacuum chamber, further optimizes the temperature control effect of the equipment, and is suitable for long-term, high-load continuous operation.

[0026] In this embodiment, the selection of materials and specifications of the water-cooled pipe 4, the constant temperature cooling water circulator, the pressure relief valve, the temperature detection head, the flow regulating valve, and the pressure sensor are all conventional technical selections in the field and are common knowledge to those skilled in the art. Those skilled in the art can flexibly adapt and select the appropriate selections according to the actual equipment operating conditions and heat dissipation requirements, and will not elaborate further here.

[0027] The specific embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above, and those skilled in the art can make various modifications or variations within the scope of the claims, which do not affect the substantive content of this utility model.

Claims

1. A high-efficiency sealed water-cooled heat dissipation structure for a vacuum chamber, characterized in that: It includes a protective shell (2) that can cover the outside of the vacuum chamber body (1), and the inner wall of the protective shell (2) is provided with two positioning ribs (7) that can press against the outer wall of the vacuum chamber body (1). The two positioning ribs (7) are distributed in a spiral shape. The two positioning ribs (7) together form a guide channel (9), and a water cooling pipe (4) is provided inside the guide channel (9). The two ends of the water cooling pipe (4) are a water inlet (8) and a water outlet (10). The water inlet (8) and the water outlet (10) can be connected to a constant temperature cooling water circulator to form a closed cooling water circulation loop that can spirally surround the vacuum chamber body (1). The end of the water-cooled pipe (4) located in the guide channel (9) can be connected to the end of the external water-cooled pipe (4) so ​​that, with the assistance of the guide channel (9), the water-cooled pipe (4) in the guide channel (9) can be used as a pull to replace the water-cooled pipe (4) in the guide channel (9) with the external water-cooled pipe (4).

2. A vacuum chamber high-efficiency sealed water-cooling heat dissipation structure according to claim 1, characterized in that: The included angle between the two ends of the positioning rib (7) is 180°. The water inlet (8) passes through the protective shell (2) from the first end of the guide channel (9), and the water outlet (10) passes through the protective shell (2) from the second end of the guide channel (9).

3. A vacuum chamber high-efficiency sealed water-cooling heat dissipation structure according to claim 1, characterized in that: Both the water inlet (8) and the water outlet (10) have external threads on their outer walls, and the external threads are connected to a flange (3).

4. A vacuum chamber high-efficiency sealed water-cooling heat dissipation structure according to claim 3, characterized in that: The inner wall of the water outlet (10) is provided with an internal thread, and the water inlet (8) of the water cooling pipe (4) in the guide channel (9) can be screwed into the water outlet (10) of the external water cooling pipe (4).

5. A vacuum chamber high-efficiency sealed water-cooling heat dissipation structure according to claim 1, characterized in that: The distance between the two positioning ribs (7) is 1.1 to 1.2 times the outer diameter of the water cooling pipe (4).

6. A vacuum chamber high efficient sealed water cooling heat dissipation structure as claimed in claim 1, characterized in that: The inner walls of the two positioning ribs (7) are provided with a smooth layer.

7. A vacuum chamber high efficient sealed water cooling heat dissipation structure as claimed in claim 1, characterized in that: The outer surface of the protective shell (2) is uniformly provided with several heat dissipation fins (5).

8. A vacuum chamber high efficient sealed water cooling heat dissipation structure as claimed in claim 1, characterized in that: The water outlet (10) can be connected to an external pressure relief valve and a temperature detection head, and the water inlet (8) can be connected to an external flow regulating valve and a pressure sensor.

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