Scanning electron microscope and methods for its use

The scanning electron microscope with three objective lenses and a condenser lens system provides high resolution, large depth of field, and wide field of view, addressing limitations of conventional systems by enabling flexible imaging modes and supporting diverse sample types and ion beam processing.

DE102017110993B4Active Publication Date: 2026-07-09TESCAN GRP AS
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Patent Information

Application Number
DE102017110993
Authority / Receiving Office
DE · DE
Patent Type
Patents
Current Assignee / Owner
Priority Date
2016-05-21
Filing Date
2017-05-19
Publication Date
2026-07-09
Estimated Expiration
2037-05-19

AI Technical Summary

Technical Problem

Conventional scanning electron microscopes typically lack the ability to simultaneously achieve high resolution, a large depth of field, and a large field of view, with limited degrees of freedom in adjusting imaging modes due to the use of a single objective lens with predetermined properties.

Method used

A scanning electron microscope equipped with at least one condenser lens and three objective lenses, including a distal and proximal conventional lens and an immersion lens, allowing independent control and combination of lens activities for various imaging modes, including an electrostatic field generation for improved resolution.

Benefits of technology

Enables high resolution, large depth of field, and wide field of view with adjustable imaging modes, suitable for diverse sample types and simultaneous use with a focused ion beam for processing and examination.

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Abstract

Scanning electron microscope comprising a primary electron source (1), at least one condenser lens (2, 2a, 2b), an aperture diaphragm (3), scanning coils (5), at least one detector (7) of signal electrons, a sample holder (9), a distal objective lens (4) arranged between the condenser lens (2, 2a, 2b) and the sample holder (9), and an electromagnetic immersion objective lens (8) arranged between the distal objective lens (4) and the sample holder (9), further comprising a proximal objective lens (6) arranged between the distal objective lens (4) and the immersion objective lens (8), characterized in that the activities of the three objective lenses are controlled independently of each other.
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Citation Information

Patent Citations

  • Particle-optical apparatus comprising a detector for secondary electrons

    EP0708975A1

  • Scanning electron microscope

    JP2969219B2

  • Charged particle beam apparatus

    US5124556A

  • Charged particle beam column

    US7223983B2

  • System and method to determine focus parameters during an electron beam inspection

    US7705298B2