Microsensor with a protective coating

DE102025101442A1Undetermined Publication Date: 2026-07-16ROBERT BOSCH GMBH
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Patent Information

Application Number
DE102025101442
Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-01-16
Publication Date
2026-07-16

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Abstract

The invention relates to a microsensor (10) for detecting a measured quantity, comprising a substrate (14) constructed from a layer structure in a normal direction (12), at least one sensor element (18) detecting a measured quantity, a carrier element (22) which is largely freed from the substrate (14) at least by a lateral free area (20) and which comprises the sensor element (18), wherein a gel-like protective mass (28) is introduced in the normal direction (12) above the sensor element (18) and at least in the lateral free area (20), which is extendable into a further lower free area (30) which is arranged in the normal direction (12) below the carrier element (22) and / or a further lateral free area (46) which is introduced laterally offset to the lateral free area (20).
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Citation Information

Patent Citations

  • Micromechanical component and manufacturing process for a micromechanical component

    DE102022205516A1

  • Process for the production of micromechanical sensors

    DE102017210691A1

  • Micromechanical sensor device and corresponding manufacturing process

    DE102019201768A1