Micromechanical component for a capacitive sensor and / or actuator device

DE102025101446A1Undetermined Publication Date: 2026-07-16ROBERT BOSCH GMBH
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Patent Information

Application Number
DE102025101446
Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-01-16
Publication Date
2026-07-16

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Abstract

The present invention relates to a micromechanical component for a capacitive sensor and / or actuator device with a deformable first membrane and a deformable second membrane, wherein an internal volume is bounded by a first membrane surface of the first membrane and a second membrane surface of the second membrane, and at least one first electrode (20) arranged in the internal volume, which has continuous recesses (24) each in the form of a slot (24) extending along a straight or odd longitudinal line (26) of the slot, which are designed such that a straight line (28) definable for the respective slot (24), which passes through a first endpoint (P1) and through a second endpoint (P2) of its longitudinal line (26) of the slot, extends radially away from a center point (M) of the first electrode (20) or perpendicularly away from a central axis of the first electrode (20) with a deviation of less than or equal to 20°.
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Citation Information

Patent Citations

  • MEMS microphone with low pressure region between diaphragm and counter electrode

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  • MEMS microphone with low pressure region between diaphragm and counter electrode

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  • Transducer unit for acoustic or electrical signals or relative pressures

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  • MEMS microphone system and method

    DE112017007905T5

  • Electrostatic pressure transducer and manufacturing method therefor

    US20080123876A1