Method and apparatus for calibrating a pyrometer

DE102025102172A1Undetermined Publication Date: 2026-07-23AIXTRON LTD
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Patent Information

Application Number
DE102025102172
Authority / Receiving Office
DE · DE
Patent Type
Applications
Current Assignee / Owner
Filing Date
2025-01-22
Publication Date
2026-07-23

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Abstract

The invention relates to a multi-step method for calibrating a pyrometer, wherein a calibration element is provided which has an emission zone that emits light with a spectrum of gray-body radiation at a reference temperature, wherein the light is generated by at least two individual light sources, wherein the radiating surfaces of the individual light sources have different emissivities and the sum of the emissivities is greater than 1, wherein a characteristic temperature is determined for each individual light source, wherein a sum curve of the spectral specific emissivities of the radiating surfaces is calculated using the Planck equation, and the temperature parameters in the respective Planck equation are varied by means of an optimization calculation.that the course of the sum curve approximates a course of a blackbody spectral specific emission curve of a blackbody at the reference temperature calculated using the Planck equation, whereby the individual light sources are heated to the characteristic temperatures and a mixed light generated by the individual light sources is used for calibration.
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Citation Information

Patent Citations

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