SENSOR SYSTEM AND METHOD FOR MEASURING MAGNETIC FLUIDITY AND OTHER PARAMETERS BY MEANS OF A MULTIPLE OF NV CENTERS

Description

Field of invention

[0001] The invention relates to a sensor system based on an NV center and a method for operating this sensor system, as well as its applications. The system differs from the prior art in that no microwave frequency is required. Preferably, several NV centers are used. Particularly preferably, a plurality of nanodiamonds with different crystal orientations and a plurality of NV centers are used. Introduction and overview

[0002] The invention is explained below with the aid of the exemplary figures, noting that a microphone with the features of the preamble of claim 1 is known from WO-A-2016 / 118791. The invention is defined by independent claims 1 and 2 and by the dependent claims. Figures 21 to 24 and the accompanying descriptive pages show and describe embodiments according to the invention.

[0003] In this description, the term "non-vibratory optical systems" (NVMS) also includes systems that generally exploit the quantum properties of optical centers at room temperature. This applies in particular to systems that perform and / or evaluate and / or detect and output modifications to the quantum states of the paramagnetic centers. Preferably, these are systems with diamond as the substrate. For other substrates and defects, reference is made to the aforementioned and still unpublished PCT / DE 2020 / 100 827 and DE 10 2020 125 189.0. Preferably, the defect centers are defect centers in diamond, and more preferably NV centers and / or SiV centers. Other suitable paramagnetic centers could be, for example, ST1 centers, GeV centers, TR1 centers, L2 centers, etc.

[0004] The table is only an exemplary compilation of some possible paramagnetic centers. The functionally equivalent use of other paramagnetic centers in other materials is expressly possible. The wavelengths of the excitation radiation are also exemplary. Other wavelengths are generally possible if they are shorter than the wavelength of the ZPL to be excited. Material beispielhaftes Störstellenzentrum ZPL beispielhafte Pumpstrahlungswellenlänge (λ pmp ) Reference Diamond NV Center 520nm, 532nm Diamond SiV Center 738 nm 685 nm / 1 / , / 2 / , / 3 / Diamond GeV Center 602 nm 532 nm / 3 / , / 4 / Diamond SnV Center 620 nm 532 nm / 3 / , / 5 / Diamond PbV Center 520 nm, 450 nm / 3 / , / 6 / 552 nm / 3 / , / 6 / 715 nm 532 nm / 6 /

[0005] The references to the above fault reporting centers are: / 1 / C. Wang, C. Kurtsiefer, H. Weinfurter, B. Burchard, "Single photon emission from SiV centres in diamond produced by ion implantation" J. Phys. B: At. Mol.Opt. Phys., 39(37), 2006 / 2 / Björn Tegetmeyer, "Luminescence properties of SiV-centers in diamond diodes" Promotionsschrift, Universität Freiburg, 30.01.2018 / 3 / Carlo Bradac, Weibo Gao, Jacopo Forneris, Matt Trusheim, Igor Aharonovich, "Quantum Nanophotonics with Group IV defects in Diamond", DOI: 10.1038 / s41467-020-14316-x, arXiv:1906.10992 / 4 / Rasmus Høy Jensen, Erika Janitz, Yannik Fontana, Yi He, Olivier Gobron, Ilya P. Radko, Mihir Bhaskar, Ruffin Evans, Cesar Daniel Rodriguez Rosenblueth, Lilian Childress, Alexander Huck, Ulrik Lund Andersen, "Cavity-Enhanced Photon Emission from a Single Germanium-Vacancy Center in a Diamond Membrane", arXiv:1912.05247v3 [quant-ph] 25 May 2020 / 5 / Takayuki Iwasaki, Yoshiyuki Miyamoto, Takashi Taniguchi, Petr Siyushev, Mathias H.Metsch, Fedor Jelezko, Mutsuko Hatano, "Tin-Vacancy Quantum Emitters in Diamond", Phys. Rev. Lett. 119, 253601 (2017), DOI: 10.1103 / PhysRevLett.119.253601, arXiv:1708.03576 [quant-ph] / 6 / Matthew E. Trusheim, Noel H. Wan, Kevin C. Chen, Christopher J. Ciccarino, Ravishankar Sundararaman, Girish Malladi, Eric Bersin, Michael Walsh, Benjamin Lienhard, Hassaram Bakhru, Prineha Narang, Dirk Englund, "Lead-Related Quantum Emitters in Diamond" Phys. Rev. B 99, 075430 (2019), DOI: 10.1103 / PhysRevB.99.075430, arXiv:1805.12202 [quant-ph] .

[0006] These sensor systems are part of the technical teaching disclosed here.

[0007] The principles and features mentioned in this disclosure can be combined and are part of the claim to the extent that the result is meaningful.

[0008] In addition to the state of the art publicly available at the time of filing, the state of the art known to the applicants but not yet published without prejudice to the patent also plays a role.

[0009] This prior art, which was unpublished at the time of filing this disclosure, is in particular the subject of the prior art application DE 10 2018 127 394 A1, which was unpublished at the time of filing the priority-establishing application of this disclosure, and of the German patent applications DE 10 2019 120 076.8, DE 10 2019 121 137.9, DE 10 2019 121 028.3, DE 10 2018 127 394.0 and DE 10 2020 119 414.5, which were unpublished at the time of filing this disclosure, and of the international patent applications PCT / DE 2020 / 100 648 and PCT / DE 2020 / 100 827, which were unpublished at the time of filing this disclosure. This unpublished prior art of the German patent applications DE 10 2019 German patent applications 120 076.8, DE 10 2019 121 137.9, DE 10 2019 121 028.3, DE 10 2018 127 394 A1 and DE 10 2020 119 414.5 and international patent application PCT / DE 2020 / 100 648 form an entire part of this disclosure. This is particularly evident in document DE 10 2020 119 414.Section 5 describes a comprehensive state of the art to which reference is made here. This state of the art, which was unpublished at the time of filing this document, is described using the following: Figures 1 to 4 explained.

[0010] When quantum dots are mentioned in this document, this can refer in particular to a paramagnetic center (NV1) and / or a cluster of such paramagnetic centers (NV1) in the form of a plurality (NVC) of paramagnetic centers (NV1) and / or a plurality of such clusters. Preferably, NV centers in diamond are used as the paramagnetic centers. Thus, when quantum dots are mentioned, this can refer in particular to an NV center and / or a cluster of such NV centers in the form of a plurality of NV centers and / or a plurality of such clusters. Dense clusters of paramagnetic centers (NV1), i.e., preferably of NV centers, are particularly preferred.

[0011] Figure 1The schematically simplified cross-sectional view shows an exemplary housing according to DE 10 2020 119 414.5 or PCT / DE 2020 / 100 648 for an exemplary sensor system. The housing comprises a base (BO), walls (WA), and a cover (DE). The cover (DE) in this example is... Figure 1 The housing wall (WA) is attached to the upper edge of the housing wall (WA) using an exemplary fourth adhesive (GL4). Preferably, the housing wall (WA) and the housing base (BO) form a so-called pre-molded open-cavity housing with one cavity (CAV), into which the electronic, magnetic, and optical functional elements of the sensor system can be installed before the housing cover (DE) is glued on. Such a pre-molded open-cavity housing is preferably manufactured by injection molding using thermosets and fillers.

[0012] A lead frame is typically cast into the base (BO) of the pre-molded open-cavity housing. This lead frame is structured to form several lead frame islands (LF1, LF2, LF3, LF4). After the lead frame is separated following overmolding, these islands are mechanically held in place and electrically insulated from each other by the injection-molded base (BO) material. This separation step of the lead frame, known as the trim-and-form step, is also used to modify the shape of the terminals. In this case, these are the first lead frame island (LF1) and the fourth lead frame island (LF4).

[0013] In the exemplary system, an integrated circuit (IC) is attached to the second lead-frame island (LF2), which here serves as a so-called die paddle, by means of a preferably electrically conductive second adhesive (GL2).

[0014] In the example of the Figure 1The integrated circuit (IC) includes a light-sensitive first radiation receiver (PD1). It is also conceivable to integrate the light-sensitive first radiation receiver (PD1) separately as a discrete component into the cavity (CAV) of the package and connect it to the integrated circuit (IC), for example, via bond wires.

[0015] A first pump radiation source (PL1) is preferably electrically conductively attached to the third lead-frame island (LF3) by means of a third adhesive (GL3).

[0016] The third lead frame island (LF3) is, in the example of the Figure 1 The integrated circuit (IC) is connected to the IC using a first bond wire (BD1). In this example, the Figure 1 An exemplary electrical connection was established between the back of the first pump radiation source (PL1) and the integrated circuit (IC).

[0017] A second connection of the first pump radiation source (PL1) is shown in the example of the Figure 1 A second bond wire (BD2) is also connected to the integrated circuit (IC). This enables the integrated circuit (IC) to supply and control the first pump radiation source (PL1) with electrical energy.

[0018] Depending on the control input from the integrated circuit (IC), the first pump radiation source (PL1) emits pump radiation (LB1a). A reflector (RE) is located on the underside of the housing cover (DE). The reflector (RE) can also be part of the housing cover (DE). For example, the surface of the underside of the housing cover (DE) can have a suitable surface texture. This could be, for example, a roughening, polishing, chamfering, or another optical functional element, or the like. The cover (DE) can also be made of a particularly reflective material, such as a suitable molding compound. The housing cover (DE) is preferably made of a white material.At a minimum, the material of the housing cover (DE) should have a spectral property such that it effectively reflects the radiation from the first pump radiation source (PL1) and / or the fluorescence radiation (FL) of the quantum dot, particularly the paramagnetic center (NV1) or, more specifically, the plurality (NVC) of paramagnetic centers (NV1). For example, if the first pump radiation source (PL1) emits green light, a green or white reflector (RE) is particularly advantageous. The pump radiation (LB1a) emitted by the first pump radiation source (PL1) is reflected by this reflector (RE) and directed as reflected pump radiation (LB1b) onto at least one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1).

[0019] The paramagnetic center (NV1) or a plurality of paramagnetic centers (NVC) are preferably located in a sensor element, which is not designated with a separate reference numeral here for the sake of simplicity. Preferably, the paramagnetic center (NV1) is a defect center in a crystal, wherein the crystal represents the sensor element as defined in this document. A sensor element can itself consist of several sensor elements, i.e., for example, several crystals. The plurality (NVC) of paramagnetic centers (NV1) can be a defect center in one or more crystals, wherein the crystal or crystals represent the sensor element as defined in this document. In the case of multiple crystals, it is advantageous if the multiple crystals are bonded together to form the sensor element.Such a binder can be optically transparent plastic, glass, or the like. The binder should be sufficiently transparent for the pump radiation wavelength (LB1a, LB1b) and the fluorescence wavelength (FL). Preferably, the crystal is a diamond crystal or the crystals are diamond crystals. The defect center is preferably an NV center in a diamond crystal. The defect centers are preferably NV centers. In this document, NV centers are defined as nitrogen defect centers in diamond. The use of other defect centers, such as SiV centers, is conceivable. Reference is made here to the standard work by Alexander M. Zaitsev, "Optical Properties of Diamond," published by Springer, in which numerous diamond defect centers are named. However, the NV center is particularly well-researched and especially suitable due to its optical properties.For the purposes of this document, the paramagnetic center (NV1) can also be multiple defect centers in a single crystal and / or an assembly of multiple crystals with multiple defect centers, i.e., a plurality (NVC) of paramagnetic centers (NV1). Particularly preferably, the defect centers are arranged so close together in terms of distance or in such a high spatial density that they are coupled to one another. This coupling can occur, for example, through stimulated emission, absorption, and via magnetic moments of the electron configuration of the defect centers. This results in collective effects. The defect centers are particularly preferably arranged in the form of regular, and especially preferably, periodic structures.This can be achieved by electrically charging the defect centers or their precursor structures during the manufacturing process, causing them to repel each other and thus arrange themselves, at least in locally limited areas, in the form of a superlattice through electrostatic attraction. Of course, a superlattice structure can also be achieved through focused ion implantation. (Bernd Burchard et al., "NM Scale Resolution Single Ion Implantation Into Diamond for Quantum Dot Production", Diamond 2004 Conference Riva del Garda: Generation of a superlattice without coupling between the lattice points, and B. Burchard, J. Meijer, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, "Generation of single color centers by focused nitrogen implantation" Appl. Phys. Lett. 87, 261909 (2005); https: / / doi.org / 10.1063 / 1.2103389.) )

[0020] For example, the paramagnetic center (NV1) can be a plurality (NVC) of paramagnetic centers (NV1) in the form of several, preferably coupled, NV centers in a diamond crystal and / or several diamonds with multiple NV centers, which are also preferably coupled. The preferred coupling or interaction of the NV centers preferably occurs through stimulated emission and absorption and / or via magnetic coupling.

[0021] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) receives at least part of the reflected pump radiation (LB1b) and subsequently emits fluorescence radiation (FL), which is in the Figure 1(Not shown for clarity.) Fluorescence radiation (FL), optionally the pump radiation (LB1a), and the reflected pump radiation (LB1b) typically strike a first optical filter (F1). The first optical filter (F1) preferably allows only the fluorescence wavelength (λfl) of the fluorescence radiation (FL) to pass through. The first optical filter (F1) is preferably opaque to the pump radiation wavelength (λpmp) of the pump radiation (LB1a) and / or the reflected pump radiation (LB1b) and / or attenuates it to such an extent that it can be considered substantially blocked for the intended purpose and can be neglected in a first, preferably linear, approximation. The fluorescence radiation (FL) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) then irradiates a first radiation receiver (PD1), which is preferably part of the integrated circuit (IC).The first radiation receiver (PD1) can also be built separately from the integrated circuit (IC) and is then electrically connected to the integrated circuit (IC) in a suitable manner, for example via additional bond wires.

[0022] In the example of the Figure 1 The first filter (F1) is mechanically connected to the integrated circuit (IC) by means of a radiation-transparent adhesive (GL1). The adhesive (GL1) is essentially transparent to fluorescence radiation (FL). This means that the adhesive (GL1) attenuates the fluorescence radiation (FL), if at all, only to such an extent that it is negligible for the intended purpose of the device. In the example of the Figure 1The first optical filter (F1) is located in the radiation path between the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) and the first radiation receiver (PD1). In this example, the first adhesive (GL1) couples Figure 1 The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) optically interacts with the first radiation receiver (PD1). This coupling refers in the example of the Figure 1 on the fluorescence radiation (FL). The first optical filter (F1) decouples the first pump radiation source (PL1) from the first radiation receiver (PD1) to the extent necessary for the intended purpose. For control engineering reasons, a basic optical coupling may be desirable, which is not considered here initially.

[0023] The sensor element with the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) is in the example of the Figure 1mechanically connected to the first optical filter (F1) by means of a fastening device (GE).

[0024] The fastening element (GE) is preferably transparent to the pump radiation (LB1a) or the reflected pump radiation (LB1b) of the first pump radiation source (PL1) so that the pump radiation (LB1a) of the first pump radiation source (PL1) or the reflected pump radiation (LB1b) can reach the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) in the sensor element.

[0025] The use of a compensation radiation source (PLK) that emits compensation radiation (KS) and radiates it into the first radiation receiver (PD1) will be described later. If compensation radiation (KS) is used to adjust an optical operating point of the first radiation receiver (PD1), the mounting element (GE) is preferably transparent to the compensation radiation wavelength (λ ks ) of the compensation radiation (KS) or to any reflected compensation radiation (KS2) from the compensation radiation source (PLK), so that the compensation radiation (KS) from the compensation radiation source (PLK) or the reflected compensation radiation (KS2) can reach the first radiation receiver (PD1).

[0026] The fastening element (GE) is preferably transparent to the fluorescence radiation (FL, FL1) or any reflected fluorescence radiation (FL2) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) that may occur depending on the design, so that the fluorescence radiation (FL, FL1) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) or the reflected fluorescence radiation (FL2) can reach the first radiation receiver (PD1).

[0027] As already described, the paramagnetic center (NV1) in the sensor element is preferably at least one NV center in at least one diamond crystal, wherein the at least one diamond crystal represents the sensor element. The plurality (NVC) of paramagnetic centers (NV1) is preferably a plurality of NV centers in one or more diamonds, in particular nanodiamonds. Further bond wires (BD3) establish additional electrical connections. Some of the electrical connections relate to the terminals of the exemplary housing. In the example of the Figure 1 The connections of the example enclosure are represented by the first leadframe island (LF1) and the fourth leadframe island (LF4). For simplicity, not all necessary bond wire connections are shown.

[0028] Figure 2 represents a simplification of Figure 1 in contrast to the Figure 1The first optical filter (F1) and the first adhesive (GL1) are missing. Instead, the sensor element with the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) is directly mechanically and optically connected to the first radiation receiver (PD1) by means of the mounting element (GE). There are two usage scenarios for this: a) The first pump radiation source (PL1) is active at first times (T1) and emits the pump radiation (LB, LB1a) at these first times (T1). This is indicated by a logic level of 1 in the Figures 3a, 3b, 4a, 4b, 5b , 6a, 6b , 7b This is illustrated by example. The first pump radiation source (PL1) is not active at second times (T2) and does not emit any pump radiation (LB, LB1a) during these second times (T2). The first times (T1) and the second times (T2) alternate in the Figures 3a, 3b , 4a, 4bconsecutively. The first tenses (T1), the second tenses (T2), and the third tenses (T3) alternate in the Figure 5b , 6a, 6b and 7b consecutively. This is indicated by a logical level of 0 in the Figures 3a, 3b, 4a, 4b, 5b , 6a, 6b and 7bThis is illustrated by example. In this scenario, the fluorescence radiation (FL, FL1) is preferably evaluated only at second time points (T2). This is possible because the fluorescence radiation (FL, FL1) has a phase shift relative to the pump radiation (LB, LB1a) of a fluorescence phase shift time (ΔTFL). When using an NV center as a paramagnetic center (NV1) or a plurality of NV centers as a plurality (NVC) of paramagnetic centers (NV1), this phase shift of a fluorescence phase shift time (ΔTFL) is typically on the order of 1 ns. The evaluation of the receiver output signal (S0) of the first radiation receiver (PD1) is illustrated by the exemplary measurement signal (MES), which serves only for clarification. Figures 3a, 3b, 4a, 4b, 5b , 6a, 6b and 7bThis is illustrated. Here, an example logic level of 1 for the measurement signal (MES) signifies, for instance, an evaluation of the signal received by the first radiation receiver (PD1), and an example logic level of 0 signifies, for instance, no evaluation of the signal received by the first radiation receiver (PD1). In the example of the Figure 4a and Figure 4bThis evaluation of the signal received by the first radiation receiver (PD1) only takes place at second times (T2). At these second times (T2), only the afterglow of the fluorescence radiation (FL, FL1) of the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) in the sensor element, for example, the NV center in one or more diamonds, is detected. With correct phase alignment, the signal of the pump radiation (LB, LB1a) is not detected and is thus separated from the fluorescence signal of the fluorescence radiation (FL). b) In the event that the sensor element has a plurality (NVC) of paramagnetic centers (NV1) in a high density of paramagnetic centers (NV1) and a suitable, sufficient thickness, the sensor element itself can serve as the first optical filter (F1) since its absorption of the pump radiation (LB, LB1a, LB1b) is sufficient to prevent the pump radiation (LB, LB1a, LB1b) from reaching the first radiation receiver (PD1).For example, if the sensor element is a diamond with a multitude of NV centers as a multitude (NVC) of paramagnetic centers (NV1), this diamond appears red. With sufficient density of the NV centers and sufficient thickness of the diamond, it allows sufficiently little or even no green pump radiation (LB, LB1a, LB1b) from the pump radiation source (PL1), such as a green LED or a green laser, to pass through for the application.

[0029] Figure 3aThis represents when the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated in relation to the activity of the first pump radiation source (PL1). A logical 1 of the example measurement signal (MES) indicates that the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated, and a logical 0 of the example measurement signal (MES) indicates that the receiver output signal (S0) of the first radiation receiver (PD1) is not evaluated. The [unclear text] Figure 3a The illustrated measurement signal (MES) is for illustrative purposes only. The technical implementation of the proposal may differ, without altering the underlying technical effect.

[0030] The first pump radiation source (PL1) in the example is the Figure 3a Active at the first time (T1) and emits pump radiation (LB, LB1a). This is represented by an exemplary logical value of 1 in the Figure 3afor the intensity of the pump radiation (LB, LB1a).

[0031] The first pump radiation source (PL1) in the example is the Figure 3a At the second time (T2) it is not active and essentially emits no pump radiation (LB, LB1a). This is represented by an exemplary logical value of 0 in the Figure 3a for the intensity of the pump radiation (LB, LB1a).

[0032] The pump radiation (LB, LB1a, L1b) irradiates at least partially the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element. Therefore, the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) emits fluorescence radiation (FL, FL1). This occurs with a time delay. For a single NV center in diamond as the paramagnetic center (NV1) in a sensor element, or for a plurality of NV centers as a plurality (NVC) of paramagnetic centers (NV1) in a sensor element, this delay is on the order of 1 ns. Therefore, the signal of the fluorescence radiation (FL, FL1) is phase-shifted relative to the signal of the pump radiation (LB, LB1a, L1b) by a fluorescence phase shift time (ΔTFL).

[0033] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) are in the example of the Figure 3aThus, they become active at a time shift compared to the first times (T1) and emit fluorescence radiation (FL, FL1). This is represented by an exemplary, arbitrary logical value of 1 in the Figure 3a The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0034] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) are in the example of the Figure 3a Thus, at the second time points (T2), they are not active and therefore do not emit fluorescence radiation (FL, FL1). This is represented by an arbitrary, exemplary logical value of 0 in the Figure 3a The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0035] In the example of the Figure 3aThe evaluation of the receiver output signal (S0) of the first radiation receiver (PD1) takes place at initial times (T1). The measurement signal (MES), which serves for clarification, has the logical, arbitrary value 1 at these initial times (T1). Therefore, in measurement systems with this timing scheme, Figure 3a Separation of the pump radiation signal (LB, LB1a) from the fluorescence radiation signal (FL, FL1) can only be achieved by a first optical filter (F1) or by a filtering effect of the sensor element with a plurality (NVC) of paramagnetic centers (NV1).

[0036] Figure 3bThis represents when the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated in relation to the activity of the first pump radiation source (PL1) and the activity of a compensation radiation source (PLK). Here, a logical 1 of the example measurement signal (MES) again indicates that the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated. A logical 0 of the example measurement signal (MES) indicates that the receiver output signal (S0) of the first radiation receiver (PD1) is not evaluated. The [unclear text] Figure 3b The illustrated measurement signal (MES) is for illustrative purposes only. The technical implementation of the proposal may differ, without altering the underlying technical effect.

[0037] The first pump radiation source (PL1) in the example is the Figure 3bActive at the first time (T1) and emits pump radiation (LB, LB1a). This is represented by an exemplary logical value of 1 in the Figure 3b for the intensity of the pump radiation (LB, LB1a).

[0038] The first pump radiation source (PL1) in the example is the Figure 3b At the second time (T2) and at the third time (T3) it is not active and does not emit pump radiation (LB, LB1a). This is represented by an example logical value of 0 in the Figure 3b for the intensity of the pump radiation (LB, LB1a).

[0039] The compensation radiation source (PLK) in this example is the Figure 3b It is active at the second time (T2) and then emits compensation radiation (KS). This is represented by an exemplary logical value of 1 in the Figure 3b for the intensity of the compensation radiation (KS).

[0040] The compensation radiation source (PLK) in this example is the Figure 3bAt the first time (T1) it is not active and then does not emit any compensation radiation (KS). This is represented by an example logical value of 0 in the Figure 3b for the intensity of the compensation radiation (KS).

[0041] The pump radiation (LB, LB1a, LB1b) irradiates at least partially the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element. Therefore, the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) emits fluorescence radiation (FL, FL1). This occurs with a time delay. For a single NV center in diamond as the paramagnetic center (NV1) in a sensor element, or for a plurality of NV centers in one or more diamonds as the plurality (NVC) of paramagnetic centers (NV1), this delay is on the order of 1 ns. Therefore, the signal of the fluorescence radiation (FL, FL1) is phase-shifted relative to the signal of the pump radiation (LB, LB1a) by a fluorescence phase shift time (ΔTFL).

[0042] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) is in the example of the Figure 3bThus, it becomes active at a time shift compared to the first times (T1) and emits fluorescence radiation (FL, FL1). This is represented by an exemplary, arbitrary logical value of 1 in the Figure 3b The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example. The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) is represented in the example of the Figure 3b Thus, it is not active at the second time (T2) and therefore does not emit fluorescence radiation (FL, FL1). This is represented by an arbitrary, example logical value of 0 in the Figure 3b The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0043] The compensation radiation (KS) preferably does not interact with the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1).

[0044] In the example of the Figure 3bThe evaluation of the receiver output signal (S0) of the first radiation receiver (PD1) takes place again at initial times (T1). The measurement signal (MES), which serves for clarification, has the logical, arbitrary value 1 at these initial times (T1). Therefore, in measurement systems with this timing scheme, the Figure 3b Separation of the pump radiation signal (LB, LB1a) from the fluorescence radiation signal (FL, FL1) can only be achieved by a first optical filter (F1) or by a filtering effect of the sensor element with the paramagnetic centers (NV1) or with the multitude (NVC) of paramagnetic centers (NV1).

[0045] Figure 4aThis represents when the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated in relation to the activity of the first pump radiation source (PL1). A logical 1 of the example measurement signal (MES) indicates that the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated, and a logical 0 of the example measurement signal (MES) indicates that the receiver output signal (S0) of the first radiation receiver (PD1) is not evaluated. The [unclear text] Figure 4a The illustrated measurement signal (MES) is for illustrative purposes only. The technical implementation of the proposal may differ, without altering the underlying technical effect.

[0046] The first pump radiation source (PL1) in the example is the Figure 4a Active at the first time (T1) and emits pump radiation (LB, LB1a). This is represented by an exemplary logical value of 1 in the Figure 4afor the intensity of the pump radiation (LB, LB1a).

[0047] The first pump radiation source (PL1) in the example is the Figure 4a At the second time (T2) it is not active and does not emit pump radiation (LB, LB1a). This is represented by an example logical value of 0 in the Figure 4a for the intensity of the pump radiation (LB, LB1a).

[0048] The pump radiation (LB, LB1a) irradiates at least partially the paramagnetic center (NV1) of the sensor element or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element. Therefore, the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) emits fluorescence radiation (FL, FL1). This occurs with a time delay. For a single NV center in diamond as the paramagnetic center (NV1) in a sensor element, or for a plurality of NV centers in one or more diamonds as the plurality (NVC) of paramagnetic centers (NV1), this delay is on the order of 1 ns. Therefore, the signal of the fluorescence radiation (FL, FL1) is phase-shifted relative to the signal of the pump radiation (LB, LB1a) by a fluorescence phase shift time (ΔTFL).

[0049] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) are in the example of the Figure 4aThus, they are active at a time shift compared to the first times (T1) and emit fluorescence radiation (FL, FL1) at a time shift compared to the first times (T1). This is represented by an exemplary, arbitrary, logical value of 1 in the Figure 4a The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0050] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) are in the example of the Figure 4a Thus, they are not active at the second time (T2) and therefore do not emit fluorescence radiation (FL, FL1) at the second time (T2). This is represented by an arbitrary, exemplary logical value of 0 in the Figure 4a The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0051] In the example of the Figure 4a The evaluation of the receiver output signal (S0) of the first radiation receiver (PD1) is carried out in contrast to the Figure 3a However, now at second times (T2). The measurement signal (MES), which serves for clarification, has the logical, arbitrary value 1 at these second times (T2). Therefore, in measurement systems with this timing scheme, the Figure 4a a separation of the pump radiation signal (LB, LB1a) from the fluorescence radiation signal (FL, FL1) in contrast to the Figure 3a This can also be achieved without a first optical filter (F1) and without a filtering effect of the sensor element with the paramagnetic centers (NV1) or with clusters of paramagnetic centers (NV1), each with a multitude (NVC) of paramagnetic centers (NV1). However, only the portion of the fluorescence radiation (FL, FL1) that falls within the second time interval (T2) is detected. This can result in reduced sensitivity.

[0052] Figure 4bThis represents when the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated in relation to the activity of the first pump radiation source (PL1) and the activity of a compensation radiation source (PLK). Here, a logical 1 of the example measurement signal (MES) again means that the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated, and a logical 0 of the example measurement signal (MES) means that the receiver output signal (S0) of the first radiation receiver (PD1) is not evaluated. The [unclear text] Figure 4b The illustrated measurement signal (MES) serves only for illustrative purposes. The technical implementation of the proposal may differ, without altering the underlying technical effect.

[0053] The first pump radiation source (PL1) in the example is the Figure 4bActive at the first time (T1) and emits pump radiation (LB, LB1a). This is represented by an exemplary logical value of 1 in the Figure 4b for the intensity of the pump radiation (LB, LB1a).

[0054] The first pump radiation source (PL1) in the example is the Figure 4b At the second time (T2) it is not active and does not emit pump radiation (LB, LB1a). This is represented by an example logical value of 0 in the Figure 4b for the intensity of the pump radiation (LB, LB1a).

[0055] The compensation radiation source (PLK) in this example is the Figure 4b It is active at the second time (T2) and then emits compensation radiation (KS). This is represented by an exemplary logical value of 1 in the Figure 4b for the intensity of the compensation radiation (KS).

[0056] The compensation radiation source (PLK) in this example is the Figure 4bAt the first time (T1) it is not active and then does not emit any compensation radiation (KS). This is represented by an example logical value of 0 in the Figure 4b for the intensity of the compensation radiation (KS).

[0057] The pump radiation (LB, LB1a) irradiates at least partially the paramagnetic center (NV1) of the sensor element or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element. Therefore, the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) emits fluorescence radiation (FL, FL1). This occurs with a time delay. For a single NV center in diamond as the paramagnetic center (NV1) in a sensor element, or for a plurality of NV centers in one or more diamonds as the plurality (NVC) of paramagnetic centers (NV1), this delay is on the order of 1 ns. Therefore, the signal of the fluorescence radiation (FL) is phase-shifted relative to the signal of the pump radiation (LB, LB1a) by a fluorescence phase shift time (ΔTFL).

[0058] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) are in the example of the Figure 4bThus, they become active at a time shift compared to the first times (T1) and emit fluorescence radiation (FL, FL1). This is represented by an exemplary, arbitrary logical value of 1 in the Figure 4b The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0059] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) are in the example of the Figure 4b Thus, at the second time points (T2), they are not active and therefore do not emit fluorescence radiation (FL, FL1). This is represented by an arbitrary, exemplary logical value of 0 in the Figure 4b The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0060] The compensation radiation (KS) preferably does not interact with the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1).

[0061] In the example of the Figure 4bThe evaluation of the receiver output signal (S0) of the first radiation receiver (PD1) now takes place in contrast to the timing scheme of the Figure 3b at second times (T2). The measurement signal (MES), which serves to clarify the data, has a different timing at these second times (T2) than the time scheme of the Figure 3b the logical, arbitrary value 1. Therefore, in measurement systems with this time scheme, the Figure 4b a separation of the signal of the pump radiation (LB, LB1a) from the signal of the fluorescence radiation (FL, FL1) can be achieved even without a first optical filter (F1) and without a filtering effect of the sensor element with the paramagnetic centers (NV1) or the clusters with each a plurality (NVC) of paramagnetic centers (NV1). Weiterentwicklung des unveröffentlichten Stands der Technik

[0062] Figure 5bThis represents when the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated in relation to the activity of the first pump radiation source (PL1) and the activity of a compensation radiation source (PLK). Here, a logical 1 of the example measurement signal (MES) again means that the receiver output signal (S0) of the first radiation receiver (PD1) is evaluated, and a logical 0 of the example measurement signal (MES) means that the receiver output signal (S0) of the first radiation receiver (PD1) is not evaluated. The [unclear text] Figure 5b The illustrated measurement signal (MES) serves only for illustrative purposes. The technical implementation of the proposal may differ, without altering the underlying technical effect.

[0063] The first pump radiation source (PL1) in the example is the Figure 5bActive at the first time (T1) and emits pump radiation (LB, LB1a). This is represented by an exemplary logical value of 1 in the Figure 5b for the intensity of the pump radiation (LB, LB1a).

[0064] The first pump radiation source (PL1) in the example is the Figure 5b At the second time (T2) and at the third time (T3) it is not active and does not emit pump radiation (LB, LB1a). This is represented by an example logical value of 0 in the Figure 5b for the intensity of the pump radiation (LB, LB1a).

[0065] The compensation radiation source (PLK) in this example is the Figure 5b It is active at third times (T3) and then emits compensation radiation (KS). This is represented by an exemplary logical value of 1 in the Figure 5b for the intensity of the compensation radiation (KS).

[0066] The compensation radiation source (PLK) in this example is the Figure 5bIt is not active at the first times (T1) and second times (T2) and therefore does not emit any compensation radiation (KS). This is represented by an example logical value of 0 in the Figure 5b for the intensity of the compensation radiation (KS).

[0067] The pump radiation (LB, LB1a) irradiates at least partially the paramagnetic center (NV1) of the sensor element or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element. Therefore, the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) emits fluorescence radiation (FL, FL1). This occurs with a time delay. For an NV center in diamond as the paramagnetic center (NV1) in a sensor element, or for a plurality of NV centers in one or more diamonds as the plurality (NVC) of paramagnetic centers (NV1), this delay is on the order of 1 ns. Therefore, the signal of the fluorescence radiation (FL, FL1) is phase-shifted relative to the signal of the pump radiation (LB, LB1a) by a fluorescence phase shift time (ΔTFL).

[0068] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) are in the example of the Figure 5bThus, they become active at a time shift compared to the first times (T1) and emit fluorescence radiation (FL, FL1). This is represented by an exemplary, arbitrary logical value of 1 in the Figure 5b The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0069] The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) are in the example of the Figure 5b Thus, they are not active at the second time (T2) and the third time (T3) and therefore do not emit fluorescence radiation (FL, FL1). This is represented by an arbitrary, exemplary logical value of 0 in the Figure 5b The intensity of the fluorescence radiation (FL, FL1) is illustrated by way of example.

[0070] The compensation radiation (KS) preferably does not interact with the paramagnetic center (NV1) or with the plurality (NVC) of paramagnetic centers (NV1).

[0071] In the example of the Figure 5b The evaluation of the receiver output signal (S0) of the first radiation receiver (PD1) now takes place in contrast to the time scheme of the Figure 3b at second times (T2). The measurement signal (MES), which serves to clarify the data, has a different timing at these second times (T2) than the time scheme of the Figure 3b the logical, arbitrary value 1.

[0072] However, the compensation by the compensation radiation (KS) now takes place at third times (T3), which are different from the second times (T2) and first times (T1).

[0073] Therefore, in measurement systems with this time scheme, the Figure 5bSeparation of the pump radiation signal (LB, LB1a) from the fluorescence radiation signal (FL, FL1) can be achieved even without a first optical filter (F1) and without a filtering effect from the sensor element with the paramagnetic centers (NV1) or with the multitude (NVC) of paramagnetic centers (NV1). In particular, this timing scheme avoids interference of the first radiation receiver (PD1) by the compensation radiation (KS) during the evaluation of the fluorescence radiation (FL, FL1).

[0074] The time schedule of Figure 6a corresponds to the time schedule of Figure 3a with the difference that the measurement signal (MES) corresponds to the signal of the pump radiation (LB, LB1a) shifted by a measurement phase shift time (ΔTM). Figure 6a is therefore a mixture of Figure 3a and Figure 4a .

[0075] The time schedule of Figure 6b corresponds to the time schedule of Figure 3bwith the difference that the measurement signal (MES) corresponds to the signal of the pump radiation (LB, LB1a) shifted by a measurement phase shift time (ΔTM). Figure 6b is therefore a mixture of Figure 3b and Figure 4b .

[0076] The time schedule of Figure 7b corresponds to the time schedule of Figure 5b with the difference that the measurement signal (MES) corresponds to the signal of the pump radiation (LB, LB1a) shifted by a measurement phase shift time (ΔTM).

[0077] The Figure 8This schematically simplified representation depicts a particularly simple evaluation system for the fluorescence radiation (FL) of the paramagnetic center (NV1) of the sensor element or the plurality (NVC) of paramagnetic centers (NV1) of the sensor system. Preferably, there are multiple paramagnetic centers (NV1) and multiple sensor elements. In a particularly preferred embodiment, the sensor element is a diamond and the paramagnetic center (NV1) is an NV center. In another exemplary embodiment, the sensor element comprises one or more diamonds and a plurality (NVC) of paramagnetic centers (NV1), with NV centers again being preferred as the paramagnetic centers (NV1).In another exemplary variant, the sensor element is a plurality of diamonds, which are preferably connected to form a sensor element, and the paramagnetic center (NV1) is a plurality (NVC) of paramagnetic centers (NV1), where NV centers are also preferred as paramagnetic centers (NV1).

[0078] In a typical configuration, the system comprises a first pump radiation source (PL1), at least one paramagnetic center (NV1) in at least one sensor element and / or a plurality (NVC) of paramagnetic centers (NV1) in at least one sensor element, and an evaluation circuit, here in the form of an integrated circuit (IC). The first pump radiation source (PL1) is modulated and energized by the transmit signal (S5) of a signal generator (G). When using NV centers in diamond as paramagnetic centers (NV1), the first pump radiation source (PL1) is preferably a green light source that can cause the paramagnetic center, for example, an NV center (NV1), to emit typically red fluorescence radiation (FL) by means of its pump radiation (LB). In particular, green laser diodes and LEDs are well suited as pump radiation sources (PL1) in this case.

[0079] In the case of NV centers in diamond, a laser diode of type Osram PLT5 520B, for example, is suitable as a first pump radiation source (PL1) with a pump radiation wavelength (λpmp) of 520 nm. When using NV centers as paramagnetic centers (NV1), the pump radiation (LB) of the first pump radiation source (PL1) should have a pump radiation wavelength (λpmp) in the wavelength range of 400 nm to 700 nm, and / or preferably 450 nm to 650 nm, and / or preferably 500 nm to 550 nm, and / or preferably 515 nm to 540 nm. Pump radiation (LB) of this type is referred to here as "green" pump radiation (LB). When using NV centers, a wavelength of 532 nm is clearly preferred as the pump radiation wavelength (λpmp) of the pump radiation (LB). 520 nm has also been used successfully.For cost reasons, the first pump radiation source (PL1) is preferably a light-emitting diode or a laser, which will be referred to collectively as LEDs for simplicity in the following. It is conceivable to use other light sources, such as organic light-emitting diodes (OLEDs) or electroluminescent devices, as pump radiation sources (PL1). However, the use of LEDs as pump radiation sources (PL1) is currently clearly more advantageous.

[0080] The first pump radiation source (PL1) emits pump radiation (LB) depending on the transmitted signal (S5). In the case of NV centers as paramagnetic centers (NV1), this pump radiation (LB) is predominantly green light.

[0081] This pump radiation (LB) causes the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) to emit fluorescence radiation (FL), which depends on the pump radiation (LB) directed onto the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) and typically on the magnetic flux density (B) at the location of the respective paramagnetic center (NV1) and possibly other physical parameters.

[0082] Other physical parameters besides the magnetic flux density (B), which could possibly be measured in this way using the intensity (I fl ) of the fluorescence radiation (FL) of the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1), would be, for example, electric flux density D, acceleration a, gravitational field strength g, pressure P, temperature 9, rotational speed ω, oscillation frequency of mechanical parts (beams), position, intensity of ionizing radiation, etc.

[0083] By recording a value corresponding to the intensity of the fluorescence radiation (FL) and / or a value of the fluorescence phase shift time (ΔTFL), a value can thus be determined as a measured value for one or more of these physical quantities.

[0084] When using multiple paramagnetic centers (NV1) in the form of a plurality (NVC) of paramagnetic centers (NV1), if the density of these multiple paramagnetic centers (NV1) in the sensor element is very high, two or more paramagnetic centers (NV1) of the plurality (NVC) of paramagnetic centers (NV1) can couple with each other. It has been shown that this can lead to coupling effects. If, at the same time, the intensity of the pump radiation (LB) at the location of the paramagnetic centers (NV1) of the plurality (NVC) of paramagnetic centers (NV1) is very high, the interaction with a magnetic flux density (B) at the location of the paramagnetic center (NV1) or the plurality of paramagnetic centers (NV1) is enhanced. This is particularly advantageous when using NV centers in diamond as paramagnetic centers (NV1).Preferably, when using NV centers in diamond as paramagnetic centers (NV1), the sensor element is a diamond with a high NV density, and preferably a diamond artificially produced using high-pressure-high-temperature processes, with a content of NV centers as paramagnetic centers (NV1) in a concentration range of 0.1 ppm to 500 ppm, preferably more than 50 ppm, better than 100 ppm, and better than 200 ppm. In this respect, the fluorescence radiation (FL) does not necessarily depend linearly on the intensity of the incident pump radiation (LB). However, for small amplitudes, the dependence can be linearized.

[0085] In the example of the Figure 8The sensor element with the paramagnetic centers (NV1) is made sufficiently thick, and the total number of paramagnetic centers (NV1) in the pump radiation (LB) beam path is chosen to be so large (as a plurality (NVC) of paramagnetic centers (NV1) that, due to the absorption of the pump radiation (LB) by the paramagnetic centers (NV1) of the plurality (NVC) of paramagnetic centers (NV1) of the sensor element, practically no pump radiation (LB) reaches the first radiation receiver (PD1) downstream in the beam path. Thus, in this example, the sensor element with the paramagnetic centers (NV1) in the pump radiation (LB) beam path acts like a first optical filter (F1) that separates the pump radiation (LB) signal from the fluorescence radiation (FL) signal. Therefore, in this example, assuming a sufficient number of paramagnetic centers (NV1) in the pump radiation (LB) beam path, a first optical filter (F1) is no longer necessary.It can therefore be the time schedule of the . Figure 3a be applied.

[0086] The first radiation receiver (PD1) receives the signal of the fluorescence radiation (FL) of the paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element, as well as the signal of the unfiltered components of the pump radiation (LB) - provided the arrangement is not perfect in this respect - and generates the receiver output signal (S0) from the total signal as a function of the signal of the intensity of the fluorescence radiation (FL) of the paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element, as well as the signal of the intensity of the unfiltered components of the pump radiation (LB).

[0087] Preferably, the filtering effect of the sensor element with the paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1) with regard to the filtering of the pump radiation (LB) is designed such that the intensity of the unfiltered components of the pump radiation (LB) can be neglected and can be approximated to zero.

[0088] Preferably, the filtering effect of the sensor element with the paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1) with regard to the filtering of the fluorescence radiation (FL) is designed such that the intensity of the filtered-out components of the fluorescence radiation (FL) can be neglected and can be approximated to zero, so that the fluorescence radiation (FL) is essentially not filtered by the sensor element in a way that is relevant for the function of the system.

[0089] The first radiation receiver (PD1) may include further amplifiers and / or filters and / or other signal processing, which will not be discussed further here for the sake of simplicity.

[0090] A correlator (CORR) correlates the reduced receiver output signal (S1) with the measurement signal (MES). A subtractor (A1) subtracts from the receiver output signal (S0) in the example of the Figure 8 a feedback signal (S6) and thus forms the reduced receiver output signal (S1).

[0091] The correlator's output signal (CORR) is a filter output signal (S4) that indicates how much of the measurement signal (MES), which here is equal to the transmit signal (S5), is contained in the receiver output signal (S0). In the example of the Figure 8 It is used as the output signal (out) of the sensor system.

[0092] In the example of the Figure 8In this example, a synchronous demodulator consisting of a first multiplier (M1) and a filter (TP) performs the actual correlation of the correlator (CORR). However, another processing block, such as a linear optimal filter, can also be used as the correlator (CORR), optimized for the transmitted signal (S5). In the example of the Figure 8 The filter (TP) should be a low-pass filter. The output of the filter (TP) is preferably equipped with a clocked sample-and-hold circuit, which captures and freezes the output value of the filter at the end of a repetition period of the transmit signal (S5) and passes it on as the filter output signal (S4) to the subsequent stages in the signal path.

[0093] The first multiplier (M1) multiplies in the example of the Figure 8The reduced receiver output signal (S1) is combined with the measurement signal (MES), which here is equal to the transmit signal (S5), thus generating the filter input signal (S3). The filter (TP), which in this example is the Figure 8The low-pass filter (TP) filters the filter input signal (S3) to produce the filter output signal (S4). The filter should preferably have an integrating property. The integrating effect of the filter (TP) is the primary function, as it, in conjunction with the sample-and-hold output circuit (not shown, but preferably used), forms a time integral over the duration of one transmission signal period of the transmit signal (S5) over the product of the measurement signal (MES), here equal to the transmit signal (S5), on the one hand, and the reduced receiver output signal (S1), on the other. This corresponds to a scalar product in the so-called L2 form of the reduced receiver output signal (S1) and the measurement signal (MES). Thus, the first multiplier (M1) and the preferably integrating filter (TP) mathematically define a scalar product and therefore a Hilbert space or at least a Banach space.The vectors within this Banach space are the signals. Since only a finite number of measurement signals can be used, it is generally a Banach space. The second multiplier (M2) reconstructs the amplified portion of the measurement signal (MES) in the receiver output signal (S0) as a feedback signal (S6) by multiplying the filter output signal (S4) with the measurement signal (MES), which here is equal to the transmit signal (S5). If the gain of the filter (TP) is very high, the reduced receiver output signal (S1) then contains almost no portion of the measurement signal (MES). The reduced receiver output signal (S1) is then typically, ideally, approximately a DC signal. Of course, the system still exhibits control errors and system noise, which are not considered here and are neglected.

[0094] Instead of scalar product formation using the first multiplier (M1) and the integrating filter (TP), other scalar products of other scalar product formation devices can also be used. They only need to provide a Banach space for signals.

[0095] The value of the filter output signal (S4) and thus of the output signal (out) therefore represents a measured value for the intensity of the current fluorescence radiation (FL).

[0096] Since the fluorescence radiation (FL) from the intensity of the pump radiation (LB) and / or the magnetic flux density (B) at the location of the at least one paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) and / or the distance from the first pump radiation source (PL1) to the at least one paramagnetic center (NV1) or to the plurality (NVC) of paramagnetic centers (NV1) and / or the distance from the at least one paramagnetic center (NV1) or from the plurality (NVC) of paramagnetic centers (NV1) to the first radiation receiver (PD1) and / or the transmittance of the optical path between the first pump radiation source (PL1) and the at least one paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) for the pump radiation (LB) and / or the transmittance of the optical path between the at least one paramagnetic center (NV1) ora multitude (NVC) of paramagnetic centers (NV1) and the first radiation receiver (PD1) for the fluorescence radiation (FL) and / or in certain cases also from the crystal orientation of the sensor element, for example the diamond crystal in the case of NV centers as paramagnetic centers (NV1), relative to the direction of the magnetic flux density (B) and / or possibly from one or more other physical parameters such as the electric flux density D, the acceleration a, the gravitational field strength g, the rotational speed Ω, oscillation frequencies ω, the modulation of electromagnetic radiation, the intensity of ionizing radiation, the temperature ϑ, . Depending on the value, it is possible to use the filter output signal (S4) as a sensor output signal (out), which signals the measured value, for example, via its magnitude, for one of these values, if the other values ​​can be kept constant.

[0097] The resulting time schedule corresponds to that of the Figure 3a .

[0098] The Figure 9 corresponds to Figure 8 where a measurement phase shift unit (ΔTm) delays the transmitted signal (S5) by a measurement phase shift time (ΔTM) relative to the measurement signal (MES). The resulting timing scheme corresponds to that of the Figure 6a .

[0099] The Figure 10 corresponds to Figure 8 where an inversion unit (INV) inverts the transmitted signal (S5) to create the measurement signal (MES). The resulting timing scheme corresponds to that of the Figure 4a .

[0100] Figure 11 corresponds to Figure 8The difference is that the sensor element with the paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1) no longer includes the function of the first optical filter (F1). Therefore, a first optical filter (F1) is inserted into the optical path of the fluorescence radiation (FL) to prevent pump radiation (LB) from the first pump radiation source (PL1) from reaching the first radiation receiver (PD1). The first optical filter (F1) is preferably essentially transparent to radiation with the fluorescence wavelength (λFL) of the fluorescence radiation (FL) and essentially opaque to radiation with the pump radiation wavelength (λpmp) of the pump radiation (LB) from the first pump radiation source (PL1).If a compensation radiation (KS) is used (discussed later), the first optical filter (F1) is preferably substantially transparent to radiation of the compensation radiation wavelength (λ ks ) of the compensation radiation (KS) of the compensation radiation source (PLK), provided that the compensation radiation (KS) must pass through the first optical filter (F1) on its way to the first radiation receiver (PD1).

[0101] For the purposes of this document, a characteristic is considered to be "essentially" present if the remaining deviations from the characteristic in question are not relevant and / or can be disregarded for the intended purpose and / or the actual use.

[0102] An exemplary second aperture (BA2) prevents, in the example of the Figure 11 also that pump radiation (LB) from the first pump radiation source (PL1) reaches the first radiation receiver (PD1) directly.

[0103] Combinations of Figure 11 are particularly familiar with the systems of Figures 8 to 10 possible.

[0104] The Figure 12 largely corresponds to the Figure 11 with the difference that no first subtractor (A1) is provided that subtracts the feedback signal (S6) from the receiver output signal (S0) and thus forms the reduced receiver output signal (S1). In the case of the Figure 12Rather, a compensation radiation source (PLK) emits compensation radiation (KS) into the first radiation receiver (PD1). In the first radiation receiver (PD1), the fluorescence radiation (FL), the compensation radiation (KS), and the parasitic components of the pump radiation (LB) that are transmitted through the first optical filter (F1) are superimposed, generally with a summation. Typically, the components of the pump radiation (LB) that are transmitted through the first optical filter (F1) can be neglected when considering the system behavior.

[0105] Since a negative intensity of the compensation radiation (KS) would correspond to an impossible negative energy, a DC component is added to the feedback signal (S6) by an offset device (OF), thus generating an offset feedback signal (S7).

[0106] The DC component is transformed into the frequency spectrum of the measurement signal (MES) by the subsequent multiplication of the reduced receiver output signal (S1) in the first multiplier (M1) with the measurement signal (MES), which here is equal to the transmit signal (S5). With a suitable filter design (TP), for example as a low-pass filter, it filters out this non-0 Hz signal component from the filter input signal (S3), which is the output signal of the first multiplier (M1), or preferably attenuates it to such an extent that it can be neglected in the analysis presented here.

[0107] Preferably, the gain of the filter (TP) is chosen to be very high and negative.

[0108] Due to the negative sign of the filter's gain (TP), which is in the Figure 12As indicated by a small circle at the filter output (TP), the signal content of the feedback signal (S6) is again subtracted from the signal content of the fluorescence radiation (FL). Thus, in this configuration, the receiver output signal (S0) is equal to the reduced receiver output signal (S1). The advantage is that the first radiation receiver (PD1) can always be operated at the same optical operating point.

[0109] An optional first barrier (BA1) prevents the compensation radiation source (PLK) from directly irradiating the at least one sensor element with the at least one paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1). Between the first barrier (BA1) and the second barrier (BA2), there may, for example, be a window within a combined barrier consisting of the first barrier (BA1) and the second barrier (BA2), as in the example of... Figure 12in the form of the first optical filter (F1). The preferred properties of the first optical filter (F1) have already been discussed several times.

[0110] The first transmission path for the pump radiation (LB) from the first pump radiation source (PL1) to the at least one sensor element with at least one paramagnetic center (NV1) or with a plurality (NVC) of paramagnetic centers (NV1) is preferably known and constant in its properties.

[0111] The second transmission path for the fluorescence radiation (FL) from the at least one sensor element with at least one paramagnetic center (NV1) or with the plurality (NVC) of paramagnetic centers (NV1) is preferably known and constant in its properties.

[0112] The third transmission path for the compensation radiation (KS) from the compensation radiation source (PLK) to the first radiation receiver (PD1) is preferably known and constant in its properties.

[0113] The Figure 13 corresponds to Figure 12 with the difference that the compensation radiation source (PLK) is not controlled and instead the first pump radiation source (PL1) is now controlled.

[0114] The Figure 14 corresponds to Figure 12 The difference is that the first optical filter (F1) is also passed through by the compensation radiation (KS). For the control to function, the first optical filter (F1) must be transparent to the compensation radiation wavelength (λ KS ) of the compensation radiation (KS).

[0115] In the case of the at least one diamond as a sensor element and the at least one NV center in this at least one diamond as a paramagnetic center (NV1) or a plurality of NV centers as a plurality (NVC) of paramagnetic centers (NV1), the compensation radiation wavelength (λ ks ) of the compensation radiation (KS) is preferably longer than the fluorescence wavelength (λ fl ) of the fluorescence radiation (FL) and preferably longer than the pump radiation wavelength (λ pmp ) of the pump radiation (LB).

[0116] In the case of the at least one diamond as a sensor element and the at least one NV center in this at least one diamond as a paramagnetic center (NV1) or a plurality of NV centers as a plurality (NVC) of paramagnetic centers (NV1), the fluorescence wavelength (λ fl ) of the fluorescence radiation (FL) is preferably shorter than the compensation radiation wavelength (λ ks ) of the compensation radiation (KS) and preferably longer than the pump radiation wavelength (λ pmp ) of the pump radiation (LB).

[0117] Preferably, the compensation radiation is infrared electromagnetic radiation. Most preferably, the compensation radiation source (PLK) is an infrared diode or an infrared laser diode.

[0118] Figure 15This figure shows an exemplary dependence of the intensity of the fluorescence radiation (FL) of a plurality (NVC) of NV centers in diamond, used as a plurality (NVC) of paramagnetic centers (NV1) in a plurality of sensor elements, as a function of a magnetic flux density (B) in Tesla (unit symbol T). The vertical axis shows the measured intensity of the fluorescence radiation (FL) of such an array of multiple NV centers in a plurality of small nanodiamonds and is arbitrarily normalized to an arbitrary intensity value.

[0119] The horizontal trend in the range below 10 mT is due to limitations of the measurement setup used.

[0120] Importantly, the shape of this curve is not direction-dependent due to the use of differently oriented nano-diamonds as a multitude of differently oriented sensor elements. Therefore, the sensors described here do not need to be aligned for use. This is crucial for mass production and CMOS compatibility, as it eliminates the alignment step required in other technologies.

[0121] Essentially, the curve can be approximated in large areas by a falling exponential curve with an offset.

[0122] According to current understanding, the decrease in the intensity of the fluorescence radiation (FL) with increasing flux density (B) is related to the coupling of several NV centers.

[0123] This coupling of the paramagnetic centers (NV1), especially the NV centers, leads to a sensitivity of the intensity of the fluorescence radiation (FL) of the paramagnetic centers (NV1) to a change in the magnetic flux density (B), even during decalibration. It is therefore important that at least two, preferably at least four, preferably at least eight, preferably at least 20, preferably at least 40, preferably at least 100, preferably at least 200, preferably at least 400, preferably at least 1000 paramagnetic centers (NV1) – here NV centers in diamond – are coupled to achieve this effect. Accordingly, it is advisable to implement measures to couple at least two, preferably at least four, preferably at least eight, preferably at least 20, preferably at least 40, preferably at least 1000, preferably at least 200, preferably at least 400, preferably at least 1000 paramagnetic centers (NV1).

[0124] This coupling can also be achieved via optical and / or electronic functional elements of the integrated circuit (IC) and / or via optical functional elements of the housing.

[0125] Another variant of the proposed sensor system relates to a sensor system and / or quantum technology system, hereinafter also referred to simply as the sensor system, in which the sensor system comprises a sensor element and / or quantum technology device element and in which the sensor system includes a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1) in the material of this sensor element and / or quantum technology device element. The sensor system of Figure 16 essentially corresponds to the sensor system of Figure 8 In contrast to the sensor system of the Figure 8 The sensor system indicates Figure 16a stabilization of the flux density (B) at the location of the paramagnetic center (NV1) by means of the magnetic field of a compensation coil (LC).

[0126] The sensor system again comprises a first pump radiation source (PL1) for pump radiation (LB), preferably in the form of an LED or a laser, and a first radiation receiver (PD1). The pump radiation (LB) has a pump radiation wavelength (λpmp). The pump radiation (LB) causes the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) to emit fluorescence radiation (FL) with a fluorescence wavelength (λfl). The first radiation receiver (PD1) is preferably sensitive to the fluorescence wavelength (λfl). The first pump radiation source (PL1) for pump radiation (LB) emits the pump radiation (LB). The sensor system is designed, in particular by means of optical functional elements, such that the pump radiation (LB) is directed onto the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1).Furthermore, the sensor system is preferably designed, particularly by means of optical functional elements, such that the fluorescence radiation (FL) irradiates the first radiation receiver (PD1). The special feature of the variant presented here is that the sensor system comprises means, in particular a controller (RG) and / or a compensation coil (LC) and / or an optionally additional or replacing permanent magnet, to maximize the change in the intensity of the fluorescence radiation (FL) when the value of the magnetic flux density (B) changes or when the value of any other of the aforementioned physical parameters changes at the location of the paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1), with respect to the respective application.by subtracting or adding a quasi-static component of the magnetic flux (B), by subtracting and / or adding a coil current supplied by the controller (RG), the total magnetic flux density (B) at the location of the paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1) in the direction of an operating point in the curve of the . Figure 15 relocated, which has an optimized distance to the point of maximum sensitivity. This exploits the fact that the paramagnetic centers (NV1) of a plurality (NVC) of paramagnetic centers (NV1) (in the case of the Figure 15 These are NV centers in diamond) that couple at sufficiently high local density to paramagnetic centers (NV1) at the locus of the multitude (NVC) of paramagnetic centers (NV1), thus generating collective effects of groups of paramagnetic centers (NV1). These lead to the modulation of the sensitivity.

[0127] If this operating point adjustment of the magnetic flux density (B) is carried out using a compensation coil (LC), it is advantageous to energize this coil with an electric current derived from the measured value of the magnetic flux density (B), i.e., the filter output signal (S4) of the filter (TP). The corresponding operating point control signal (S9) is preferably derived from the filter output signal (S4) by the controller (RG). Preferably, the controller (RG) has a low-pass characteristic or, better yet, an integrating characteristic. It is therefore preferably a PI controller or a substantially functionally equivalent controller. The control by the controller (RG) is then preferably carried out with a first time constant τ1, while the compensation control by means of the filter (TP) is carried out with a second time constant τ2.A first output signal (out) represents the short-term changes of a magnetic flux density alternating field with the value of the magnetic flux density (B), while a second output signal (out") represents the long-term changes or the current quasi-static operating point of the sensor system. For this to be possible, the first time constant τ₁ of the controller (RG) is preferably larger than the second time constant τ₂ of the filter (TP). Thus, preferably: (τ₁ > τ₂).

[0128] Figure 17 This shows the setup of an exemplary sensor system (NVMS) based on a microcomputer (µC). In this example, the Figure 17The microcontroller (µC) controls the first pump radiation source (PL1). This generates the pump radiation (LB). The pump radiation (LB) acts on the paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1). Preferably, the paramagnetic centers (NV1) are at least one, preferably several NV centers, i.e., a plurality (NVC) of paramagnetic centers (NV1), in at least one or more sensor elements, preferably one or more diamonds.

[0129] The paramagnetic centers (NV1) generate fluorescence radiation (FL) at the location of each paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1), depending on the magnetic flux density (B) and the intensity of the pump radiation (LB) at the location of each paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1). This fluorescence radiation acts on the first radiation receiver (PD1). Its signal is, in the example of the Figure 17 The signal is acquired by an analog-to-digital converter (ADC) and fed to the microcontroller (µC). The microcontroller (µC) then preferably controls the first pump radiation source (PL1) depending on the signal from the analog-to-digital converter (ADC). The signal of the first pump radiation source (PL1) can also be static and / or quasi-static. Preferably, the microcontroller (µC) emulates a system according to the Figures 8 to 14 and 16 .

[0130] From the value that the analog-to-digital converter (ADC) delivers to the microcontroller (µC), the microcontroller determines a measured value. The microcontroller (µC) then preferably outputs this measured value via a first output signal (out). In the case of using a microcontroller (µC), the first output signal (out) is preferably a signal via a [missing information - likely a specific input or output]. Figure 17 The data bus (DB), not shown separately, to which the microcomputer (µC) is connected.

[0131] This measurement can depend on, among other things, the following parameters: from the intensity of the pump radiation (LB) reaching the paramagnetic center (NV1), and thus from the transmission properties of the transmission path from the first pump radiation source (PL1) to the paramagnetic center (NV1) and the magnetic flux density (B) at the location of the at least one paramagnetic center (NV1) and the transmission properties of the transmission path from the at least one paramagnetic center (NV1) to the first radiation receiver (PD1) and in certain cases also from the crystal orientation of the sensor element, for example the diamond crystal in the case of NV centers as paramagnetic centers (NV1), relative to the direction of the magnetic flux density (B) and possiblyfrom one or more other physical parameters, such as the electric flux density D, the acceleration a, the gravitational field strength g, the rotational speed Ω, oscillation frequencies ω, the modulation of electromagnetic radiation, the intensity of ionizing radiation, the temperature ϑ. .

[0132] This means the measured value can reflect reflectivities, transmittances, distances, magnetic flux densities, and other physical parameters that influence these transmission paths and the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1). Preferably, the respective sensor system (NVMS) is designed such that, apart from the parameter to be measured, all other influencing factors are kept essentially constant.

[0133] Figure 18Figure 1 shows the combination of one of the previously described or derived sensor systems (NVMS), comprising at least one paramagnetic center (NV1), with two or three exemplary Helmholtz coil pairs. The paramagnetic center (NV1) is preferably again at least one NV center in at least one diamond. If there is a plurality (NVC) of paramagnetic centers (NV1), the sensor system (NVMS) preferably again comprises one or more sensor elements, which preferably again comprise the plurality (NVC) of paramagnetic centers (NV1). Preferably, it is an array of nano-diamonds of different orientations with NV centers as paramagnetic centers (NV1).

[0134] Preferably, a system forms according to the Figure 17 the basis for controlling the Helmholtz coil pairs.

[0135] When coils are mentioned here, this refers to components that generate magnetic fields. These can be, for example, inductors, which are typically implemented as copper windings or windings of electrically conductive wires on a coil former or the like. The coils mentioned below (L2 to L7) can also be permanent magnets (PM1, PM2) or comprise inductors and / or permanent magnets. Details of the magnetic circuits, such as magnetic cores, etc., have been omitted to keep the presentation simple. In this context, reference is made to the book Küpfmüller, Kohn, "Theoretische Elektrotechnik und Elektronik" (Theoretical Electrical Engineering and Electronics), Springer 1993, Chapter 3, with particular emphasis on Chapter 3, Section I 25. However, the disclosure includes the typical elements of magnetic circuits, such as air gaps, ferromagnetic yokes, ferrite cores, permanent magnets, etc.However, it is also conceivable to use the device, as shown, as a purely air system without magnetic yokes.

[0136] In the example of the Figure 18a A seventh coil (L7) and a third coil (L3) form the first Helmholz coil pair. The seventh coil (L7) and the third coil (L3) are preferably connected in series so that they carry the same current. The first axis (AS1) of the first Helmholz coil, the seventh coil (L7), and the third axis (AS3) of the third Helmholz coil, the third coil (L3), are preferably aligned in the same direction and preferably identical. In the example of the Figure 18 They are drawn slightly offset for illustrative purposes only.

[0137] In the example of the Figure 18aA second coil (L2) and a fourth coil (L4) form the second Helmholz coil pair. The second coil (L2) and the fourth coil (L4) are preferably connected in series so that they carry the same current. The second axis (AS2) of the second Helmholz coil (L2) and the fourth axis (AS4) of the fourth Helmholz coil (L4) are preferably aligned in the same direction and preferably identical. In the example of the Figure 18 They are drawn slightly offset for illustrative purposes only.

[0138] The first axis (AS1) and third axis (AS3) are preferably perpendicular to the second axis (AS2) and fourth axis (AS4). In the example of the Figure 18 They are drawn slightly offset for illustrative purposes only.

[0139] In the example of the Figure 18aA fifth coil (L5) and a sixth coil (L6) form the third Helmholz coil pair. The fifth coil (L5) and the sixth coil (L6) are preferably connected in series so that they carry the same current. The fifth axis (AS5) of the fifth Helmholz coil (L5) and the sixth axis (AS6) of the sixth Helmholz coil (L6) are preferably aligned in the same direction and preferably identical. In the example of the Figure 18 They are drawn slightly offset for illustrative purposes only.

[0140] The first axis (AS1) and third axis (AS3) are preferably perpendicular to the fifth axis (AS5) and sixth axis (AS6).

[0141] The second axis (AS2) and fourth axis (AS4) are preferably perpendicular to the fifth axis (AS5) and sixth axis (AS6).

[0142] The fifth axis (AS5) and sixth axis (AS6) are therefore preferably perpendicular to the plane spanned by the first axis (AS1) and third axis (AS3) on the one hand and the second axis (AS2) and fourth axis (AS4) on the other.

[0143] The device can have only two coil pairs or only one coil pair instead of three coil pairs ([L3, L7], [L4, L2], [L5, L6]). Of course, further coil pairs can be provided if necessary. The axes of these additional coil pairs (not shown here) are preferably tilted at an angle other than 90° relative to the axis of one or more coil pairs.

[0144] Instead of coil pairs, single coils can also be used, wherein the paramagnetic center (NV1) and / or the plurality (NVC) of paramagnetic centers (NV1) and / or the quantum dot (NV1) is preferably located at the point on the coil axis in the plane of the coil or at least in the vicinity of this point. One, two, or three of the coil pairs can thus be replaced by a single coil each.

[0145] The microcomputer (µC) of the Figure 17 This can now be achieved by changing the current supply, in this example, the Figure 18 For example, three pairs of Helmholtz coils compensate for an external magnetic field acting on the sensor system (NVMS) or the paramagnetic center (NV1) from any direction. In principle, the three pairs of Helmholtz coils, for example, thus have the following properties: Figure 18 the function of the compensation coil (LC) of the Figure 16 , where the microcomputer (µC) performs the function of the controller (RG) of the Figure 16 in this example.

[0146] An exemplary procedure for controlling the magnetic flux (B) of the compensation magnetic field generated by the coil pairs (L2 to L7) can be as follows: In a first step, the microcomputer (µC) adjusts the first coil current of the first Helmholz coil pair (L7, L3) so that the fluorescence radiation (FL) of the paramagnetic center (NV1) of the sensor system (NVMS) reaches a first maximum.

[0147] In a second step, the microcomputer (µC) adjusts the second coil current of the second Helmholtz coil pair (L2, L4) so ​​that the fluorescence radiation (FL) of the paramagnetic center (NV1) of the sensor system (NVMS) reaches a second maximum.

[0148] In a third step, the microcomputer (µC) adjusts the third coil current of the third Helmholtz coil pair (L5, L6) so that the fluorescence radiation (FL) of the paramagnetic center (NV1) of the sensor system (NVMS) reaches a third maximum.

[0149] As mentioned above, instead of coil pairs, individual coils can also be used for this method.

[0150] Essentially, after regulation by the compensation coil system, the magnetic flux density (B) at the location of the paramagnetic center (NV1) is preferably compensated to zero or at least regulated to a minimum in magnitude.

[0151] The value of the first coil current of the first Helmholz coil pair (L7, L3) then represents a first value B1 of the magnetic flux density (B) in a first direction, here the x-direction.

[0152] The value of the second coil current of the second Helmholz coil pair (L2, L4) then represents a second value B2 of the magnetic flux density (B) in a second direction, here the y-direction.

[0153] The value of the third coil current of the third Helmholz coil pair (L5, L6) then represents a third value B3 of the magnetic flux density (B) in a third direction, here the z-direction.

[0154] The 3-tuple consisting of the first value B1 of the magnetic flux density (B), the second value B2 of the magnetic flux density (B), and the third value B3 of the magnetic flux density (B) then represents a vector that represents the vector of the magnetic flux density (B).

[0155] In addition to the first value B1, second value B2 and third value B3 of the magnetic flux density (B), the measuring system can also transmit this vector in its entirety or in parts as a measured value.

[0156] In Figure 18bThe third Helmholtz coil pair (L5, L6) is replaced by a pair of permanent magnets (PM1, PM2). These are preferably designed to generate a homogeneous bias field in the region of the paramagnetic center (NV1) or in the region of the multitude (NVC) of paramagnetic centers within the sensor system (NVMS). This allows an optimal operating point for the magnetic flux density (B) with maximum sensitivity to be determined.

[0157] Figure 19 The system gives Figure 17 extended by a control of the Helmholtz coil pairs ([L3, L7], [L4, L2], [L5, L6]) of the Figure 18The microcontroller (µC) controls coil drivers, which are preferably integrated with the microcontroller (µC) into the sensor system (NVMS). These drivers generate the respective coil current of the Helmholtz coil pairs ([L3, L7], [L4, L2], [L5, L6]). The Helmholtz coil pairs generate the 1D-2D or 3D-B field. The sensor system can also be used for one-dimensional measurement of only one magnetic field component using only one Helmholtz coil pair, i.e., by means of 1D-B field generation; or for two-dimensional measurement of only two magnetic field components using only two non-parallel and preferably perpendicular Helmholtz coil pairs, i.e., by means of 2D-B field generation; or for three-dimensional measurement of three magnetic field components using three non-parallel and preferably perpendicular Helmholtz coil pairs, i.e., by means of 3D-B field generation. The measurement procedure is simplified in the case of 1D-B field generation or...corresponding to the 2D-B field generation by omitting the optimization of the coil current of the missing Helmholz coil pairs.

[0158] The magnetic flux density (B) generated by the Helmholtz coil pairs ([L3, L7], [L4, L2], [L5, L6]) and the permanent magnets (PM1, PM2) then acts on the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS). This effect is detected, for example, by the microcontroller (µC) via the measuring section, and the control of the Helmholtz coil pairs ([L3, L7], [L4, L2], [L5, L6]) is adjusted accordingly. The system can, of course, also be built analogously to one or more of the previously presented systems or to a prior art system.

[0159] The system discussed here can potentially be simplified, albeit at the cost of reduced performance. For example, in certain cases, single coils could be used instead of Helmholtz coil pairs. The latter would result in field inhomogeneities, which could potentially have an impact.

[0160] Figure 20 shows the detection of a ferromagnetic object (FOB) by the sensor system (NVMS) of the Figure 1 Ideally, all components of the sensor system (NVMS) should be non-ferromagnetic. Furthermore, the currents within the sensor system should be as low as possible to avoid distorting the measurement result.

[0161] When the ferromagnetic object (FOB) is brought close to the sensor system (NVMS), the magnetic flux density (B) at the location of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS) typically changes. This, in turn, changes the intensity of the fluorescence radiation (FL) or the fluorescence phase shift time (ΔTFL) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1), and thus the corresponding measurement value detected by the sensor system (NVMS). The sensor system (NVMS) can therefore be used to measure the distance (d FOB) to a magnetized object, in this case the ferromagnetic object (FOB). Changes in the shape of the ferromagnetic object (FOB) can also be detected. Furthermore, a change in the magnetization of the ferromagnetic object and / or the magnetic flux (B) generated by the ferromagnetic object (FOB) can be detected.This can be achieved, for example, by exceeding the Curie point through an increase in temperature. Similarly, the material properties of dia- and / or paramagnetic materials occupying the position of the ferromagnetic object (FOB) can be determined when a device generating a magnetic flux density, such as a permanent magnet and / or a current-carrying coil, interacts with the dia- and / or paramagnetic materials occupying the position of the ferromagnetic object (FOB). The magnetic flux density (B) of the device generating the magnetic flux density (B) should permeate the location of the paramagnetic center (NV1) or the location of the plurality (NVC) of paramagnetic centers (NV1).

[0162] In Figure 21 is the cover of the sensor system (NVMS) of the Figure 1The membrane is designed as a mechanically vibrating, ferromagnetic membrane (ME). An object (Obj) emits sound waves as acoustic waves (AW). These can be, for example, one or more ultrasound waves reflected by the object (Obj). A reflected ultrasound wave is typically a transmitted acoustic wave (ASW) reflected by the object (Obj), which in turn originates from an ultrasound transmitter or an ultrasound transmission system (USS).

[0163] These sound waves displace the ferromagnetic membrane (ME) in the example of the Figure 21in mechanical vibrations. These mechanical vibrations modify the magnetic flux density (B) at the location of the paramagnetic center (NV1) in the form of a vibrational component of the value of the magnetic flux density (B) at the location of the paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1). These vibrations of the value of the magnetic flux density (B) lead to a vibration in the value of the intensity of the fluorescence radiation (FL) and / or a vibration in the value of the fluorescence phase shift time (ΔTFL). These vibrations are therefore detected by the sensor system (NVMS). The sensor system (NVMS) of the Figure 21 It therefore works like a microphone. In the simplest case, the time course of a first output signal (out) of the sensor system (NVMS) then reflects the Figure 21The sensor system records the temporal evolution of the sound pressure level of the acoustic wave (AW), possibly with a phase shift. The diaphragm (ME) is preferably made of an elastic material. The measured values ​​determined by the sensor system (NVMS) typically correspond to the position or displacement of the diaphragm (ME) at the time of measurement.

[0164] The process pathway is such that the acoustic oscillation of the acoustic wave (AW) is converted in a first step into a mechanical oscillation of the membrane (ME), and in a second step into an oscillation of the magnetic flux density (B) due to the magnetization of the membrane (ME). Then, in a third step, the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) converts this into an oscillation of the intensity of the fluorescence radiation (FL) and / or an oscillation of the fluorescence phase shift time (ΔTFL). Finally, in a fourth step, the first radiation receiver (PD1) converts this into an oscillation of the value of the receiver output signal (S0). In an optional fifth step, the previously described further processing can then take place, which is particularly evident in the aforementioned measured value of the Figure 16 and 19or may result in a value of a first output signal (out).

[0165] In Figure 22 A usage scenario for a microphone will be defined according to the Figure 21 As shown, an ultrasonic transmitter (USS), for example mounted in the bumper of a vehicle (Kfz), emits an ultrasonic signal, which is an acoustic transmission wave (ASW). After a travel time of d2 over a distance, this signal reaches the object (Obj) and is reflected there. The sensor system (NVMS), e.g., one corresponding to the Figure 21The system detects the reflected sound signal in the form of an acoustic wave (AW), in this case the ultrasound signal, using its paramagnetic center (NV1) or using a plurality (NVC) of paramagnetic centers (NV1), and converts the measured values ​​of the membrane position (ME), determined at various times, or the simple or multiple time derivatives and / or integrations of the measured values ​​of this position, into a data stream that may be filtered in other ways. This data stream preferably corresponds essentially to the respective sound pressure or to other extracted measured values. For example, the distance d2 can be extracted, estimated, and output.

[0166] This data stream is then preferably compressed by the microcomputer (µC) or a corresponding device and transferred to a higher-level computer system, where it is preferably decompressed and combined and / or converted with measurement data streams and measured values ​​from other sensors, for example other ultrasonic sensors and / or LIDAR sensors and / or radar sensors and / or Halios sensors and / or electrostatic sensors by means of sensor fusion to create new measured values.

[0167] Preferably, the higher-level computer system executes an artificial intelligence program. Most preferably, the higher-level computer system executes an emulation of a neural network model. In this context, reference is made to the still unpublished international patent application PCT / EP2020 / 056727, the full disclosure of which forms part of the disclosure presented here.

[0168] A higher-level computer system is thus proposed that executes a neural network model, wherein the neural network model comprises network nodes organized into network layers, and wherein each network node of the neural network has input and output parameters, and wherein at least one, preferably several, input parameters of network nodes are either an input parameter of the neural network model or an output parameter of another network node of the neural network model, and wherein at least one, preferably several, output parameters of a network node are either an output parameter of the neural network model or an input parameter of another neural network node, and wherein a network node in which an output parameter is an output parameter of the neural network model does not have an input parameter that is an input parameter of the neural network model, and wherein a network node,where an input parameter is an input parameter of the neural network model, no output parameter is an output parameter of the neural network model, and where no network node of the neural network, where an output parameter is an output parameter of the neural network model, has an input parameter that is an output parameter of a network node where an input parameter is an input parameter of the neural network model. The input parameters of a network node of the neural network model are linked within a network node to the output parameters of that neural network node by means of a link function for that neural network node. Preferably, this link function is highly nonlinear. The properties of the link function depend on link function parameters.which are preferably specific to the respective network node. The linking function can differ from network node to network node. The linking function parameters are determined and trained in a training process. The description here describes a neural network with at least three layers.

[0169] It is now proposed that at least one, preferably several, input parameters of the neural network model executed by the higher-level computing unit depend on a parameter of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1). Such a parameter could, for example, be the value of the intensity of the fluorescence radiation (FL) and / or the value of the fluorescence phase shift time (ΔTFL).

[0170] The use of such artificial intelligence methods and procedures is of particular importance for autonomous driving and / or the operation of complex systems and / or the operation of devices in potentially complex environments.

[0171] Preferably, one of the systems presented here determines, for example, a distance (d2) between the vehicle (V) and an object (Obj) in the direction of the vehicle's (V) movement. This information is preferably used by the driver or a fully automated system to change the direction of movement and / or speed and / or acceleration or other vehicle parameters. Thus, an operating parameter of the vehicle (V) depends on the fluorescence radiation (FL) of a quantum dot (NV1), a paramagnetic center (NV1), a plurality (NVC) of paramagnetic centers (NV1), or one or more NV centers in the sensor system (NVMS). An example of such an operating parameter would be the vehicle's speed and / or acceleration and / or rotation or direction.

[0172] Figure 23 shows a sensor system of Figure 21in a simplified installation situation in the bumper of an exemplary vehicle (motor vehicle) - here a motor vehicle, for example the vehicle (motor vehicle) of Figure 22 A vehicle (motor vehicle) can also be another mobile device and / or a robot or a missile or a projectile or a watercraft or a floating or diving object.

[0173] The sensor system is preferably mounted on a circuit board, a printed circuit board (PCB), for example by soldering. In the example of the Figure 23 The housing of the sensor system (NVMS) preferably has a non-magnetic cover, as is the case, for example, in the Figure 18 depicted.

[0174] The ferromagnetic membrane (ME) is now located on the outside of the bumper. This has the advantage that the bumper can be painted over without having to keep the sound inlet window open, which is a significant aesthetic benefit. Preferably, the bumper is made of non-magnetic material to avoid interfering with the sensor system (NVMS).

[0175] Figure 24 shows a typical process for operating an ultrasonic measurement system with a sensor system (NVMS) with at least one sensor element with at least one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1).

[0176] In a first step (1), an ultrasonic transmitter (USS) emits an ultrasonic wave as an acoustic transmission wave (ASW). In a second step (2), one or more objects (Obj) reflect the acoustic transmission wave (ASW) as a reflected ultrasonic wave in the form of a reflected acoustic wave (AW). The reflected ultrasonic wave, i.e., the reflected acoustic wave (AW), causes a membrane (ME) with a ferromagnetic sub-device to vibrate in a third step (3). This vibrating membrane (ME) with the ferromagnetic sub-device causes a modulation of the magnetic flux density (B) at the location of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS) in a fourth step (4). In a fifth step (5), the modulation of the magnetic flux density (B) at the location of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS) changesIn a sixth step (6), a first radiation receiver (PD1) of the sensor system (NVMS) detects this modulation of the fluorescence radiation (FL), in particular the modulation of the intensity of the fluorescence radiation (FL) and / or the modulation of the fluorescence phase shift time (ΔTFL), as a receiver output signal (S0). In a seventh step (7), an evaluation circuit generates one or more measured values ​​from this, preferably a temporal sequence of measured values, which are then preferably transmitted, in whole or in part, or after compression, for example to a higher-level computer system and optionally decompressed and used for other purposes in the higher-level computer system or in the sensor system (NVMS) itself.

[0177] The method can also be applied to normal sound and infrasound.

[0178] Figure 25 a sensor system shows accordingly Figure 1 as an RF receiver for electromagnetic high-frequency radiation. Use as a receiver in radar systems, particularly in the aforementioned vehicles and in stationary devices, is conceivable. Use as a broadband receiver is also conceivable.

[0179] An object (obj) emits electromagnetic waves (HFW). The object (obj) can reflect electromagnetic waves (HFW) incident upon it or emit them itself. These electromagnetic waves (HFW) interact with the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS). This interaction modulates the fluorescence radiation (FL). This modulation of the fluorescence radiation can involve a modulation of the intensity of the fluorescence radiation (FL) and / or a modulation of the fluorescence phase shift time (ΔTFL).

[0180] Since fluorescent radiation (FL) has a time constant τFL with which it can follow changes in magnetic flux density (B), the reception of electromagnetic waves (HFW) is limited to periods above this time constant τFL. Therefore, the maximum frequency (fHFmax) of undamped reception of electromagnetic waves (HFW) is given by 2πfHFmax = 1 / τFL.

[0181] To receive higher frequencies, a magnetic and / or electromagnetic alternating field of very high frequency f LC can be generated, for example, by a first coil (L1) and / or a resonator or similar device in the immediate vicinity of the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1). This field then superimposes itself on the magnetic alternating field of the incident electromagnetic wave (HFW). This results in two wave components.

[0182] The first wave component has a sum frequency fS that corresponds to the sum of the frequency fHF of the incident electromagnetic wave (HFW) and the frequency fLC of the alternating magnetic field generated by the first coil (L1) and / or a resonator or the like. The paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) cannot follow this first wave component, since for this sum frequency fS: 2πfS > 1 / τFL. This first wave component is ignored if its energy does not correspond to a transition of the paramagnetic center (NV1). Therefore, the paramagnetic center (NV1) typically exhibits low-pass behavior.

[0183] The second wave component has a difference frequency fD that corresponds to the difference between the frequency fHF of the incident electromagnetic wave (HFW) and the frequency fLC of the alternating magnetic field generated by the first coil (L1) and / or a resonator or the like. With a suitable choice of the frequency fLC of the alternating magnetic field generated by the first coil (L1) and / or a resonator or the like, the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) can follow this second wave component if the following holds for this difference frequency fD: 2πfD < 1 / τFL. This second wave component is driven by the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1).The multiple (NVC) of paramagnetic centers (NV1) is converted into a modulation of the fluorescence radiation (FL) modulated with the difference frequency f D. This modulation can be received by the first radiation receiver (PD1) and converted into a first output signal (out) by the integrated circuit (IC). The modulation of the fluorescence radiation (FL) can again involve modulation of the intensity of the fluorescence radiation (FL) and / or modulation of the fluorescence phase shift time (ΔTFL).

[0184] Figure 26 Figure 1 shows a measuring device for the electric current (Im) through a conductor (CON). A torus-shaped or annular yoke (J1) detects the magnetic flux density (B) generated by the electric current (Im) through the conductor (CON). The yoke (J1) has a first air gap (LSP1) in which the sensor system (NVMS) with the paramagnetic center (NV1) or at least the paramagnetic center (NV1) is placed.

[0185] It is a closed magnetic circuit with a first air gap (LSP1).

[0186] The sensor system (NVMS) generates a first measurement signal (MS1) depending on the measured value of the magnetic flux density (B), i.e., depending on the first output signal (out). An exemplary amplifier (AMP) acting as a controller (RG) amplifies this first measurement signal (MS1) to a first control signal on a control signal line (SS1). The amplifier (AMP) can be part of the sensor system (NVMS). The exemplary amplifier (AMP) in the example of the Figure 26 A push-pull stage with a first transistor (TR1) and a second transistor (TR2) connected between a supply voltage line (VDD) at supply voltage potential and a ground potential line (GND) at reference potential. In reality, more complex amplifiers are certainly used.

[0187] Through the control signal line (SS1), an eighth coil current (IL8) then flows into an eighth coil (L8). The control signal line (SS1) thus typically corresponds in function to the operating point control signal (S9) of the Figure 16 The eighth coil (L8), which is the compensation coil (LC) of the Figure 16 Functionally equivalent, this generates an additional excitation in the first yoke (J1) in the form of a magnetic field strength H, which counteracts the magnetic excitation caused by the electric current (I m) flowing through the conductor (CON) to be detected. This reduces the magnetic flux (B) at the location of the paramagnetic center (NV1) or at the location of the multitude (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS) to almost zero, except for control errors and noise, provided the transfer functions of the control system are correctly chosen.

[0188] The sensor system can, for example, include a microcontroller (µC) and an analog-to-digital converter (ADC) and transmit the value of the first measured value signal (MS1) or a control value to a higher-level computer system via a data bus (DB) as a measured value for the value and / or magnitude of the electric current (I m ) through the conductor (CON). For example, the sensor system (NVMS) can, in whole or in part, have a structure as shown in the Figure 16 , 17 and / or exhibit 19. In principle, it is a one-dimensional system with only one coil accordingly. Figure 18 The device of Figure 26 It is particularly suitable for measuring the supply current in electric vehicle batteries and motors or other devices in electric cars and other vehicles and power engineering equipment such as generators, transformers and motors. The device is also suitable for... Figure 26especially suitable for use in measuring currents in overhead power lines and in the supply lines to electrochemical devices such as electrolysis cells and the like.

[0189] In combination with optical waveguides, as in the following Figure 28As shown, the toroidal yoke (J1) with the sensor element and one or more paramagnetic centers (NV1) or a plurality (NVC) of paramagnetic centers (NV1) can, for example, be mounted around a current-carrying conductor at a high electrical potential, while the evaluation device (AWV) is located in the low-voltage area. The sensor element in the first air gap (LSP1) of the yoke (J1), which comprises the one or more paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1), is coupled to the evaluation device (AWV) by means of one or more optical fibers (LWL1, LWL2). This allows for very good galvanic isolation. Preferably, the optical fibers (LWL1, LWL2) are used – see Figure 28In this application, the fibers are encased in insulators, which preferably have circumferential ribs to increase the creepage distance and for moisture protection. The preferred mounting position for these insulators is such that the optical fibers (OF1, OF2) are mounted as vertically as possible.

[0190] The Figure 27 corresponds to Figure 26 with the difference that no ring- or torus-shaped yoke (J1) is provided, since the field lines of the magnetic flux density (B) do not have to be perpendicular to the sensor system (NVMS), as the curve of the Figure 15 unlike sensitivity curves for Hall and AMR sensors, it is not direction-dependent, which is a significant advantage of this device.

[0191] Therefore, the yoke (J1) can be omitted in sensor systems (NVMS) with a paramagnetic center (NV1). However, the yoke (J1) of the Figure 26the advantage that it significantly increases the sensitivity of the sensor system (NVMS).

[0192] The paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) can be separated from the rest of the sensor system (NVMS) if optical functional elements transport the pump radiation (LB) to the sensor element with the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1), i.e., for example, at least one NV center in at least one diamond or a plurality of NV centers in one or more diamonds, which are preferably oriented differently. Conversely, these or other optical functional elements preferably transport the fluorescence radiation (FL) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) to the first radiation receiver (PD1). Preferably, these transmission paths do not exhibit excessive attenuation.

[0193] In the example of the Figure 28 A first optical waveguide (LW1) transports the pump radiation (LB) to the sensor element with the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1), for example, to at least one NV center in at least one diamond or a plurality of NV centers in one or more diamonds, which are preferably oriented differently. A second optical waveguide (LWL2) transports the fluorescence radiation (FL) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) to the first radiation receiver (PD1). In the example of the Figure 28The sensor element, comprising a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1), for example, a diamond with one NV center or a plurality of NV centers in one or more diamonds with preferably different orientations, is mechanically and optically coupled to the first optical waveguide (LWL1) and the second optical waveguide (LWL2) by a mounting means (GE). Preferably, the mounting means (GE) is transparent to radiation with the fluorescence wavelength (λfl) of the fluorescence radiation (FL) and to radiation with the pump radiation wavelength (λpmp) of the pump radiation (LB). Preferably, the first optical waveguide (LWL1) is transparent to radiation with the pump radiation wavelength (λpmp) of the pump radiation (LB). Preferably, the second optical waveguide (LWL2) is transparent to radiation with the fluorescence wavelength (λfl) of the fluorescence radiation (FL).

[0194] The advantage of this sensor system design (NVMS) is that the optical fibers (OF1, OF2) are usually electrically non-conductive or poorly conductive and therefore essentially do not generate a magnetic field or substantially disturb the magnetic field.

[0195] Another advantage of this sensor system design (NVMS) is that the optical fibers (LWL1, LWL2) are generally non-conductive or poorly conductive and therefore do not transfer any interfering heat energy to or from the measurement point. This enables thermal decoupling of the magnetic field measurement and the evaluation electronics.

[0196] Since the optical fibers (OF1, OF2) can be made of chemically largely inert materials, such as glass, the sensor element with the paramagnetic center (NV1) or with the multitude (NVC) of paramagnetic centers (NV1) can then be used in environments with harsh operating conditions. These include, among others, high and low temperatures, radioactive radiation fields, radiation fields with X-rays or gamma rays, areas of high electric field strength, corrosive environments with very high and / or low pH values, salt solutions, abrasive environments, etc.

[0197] For example, the sensor element with the paramagnetic center (NV1) or with the plurality (NVC) of paramagnetic centers (NV1) can be brought into the immediate vicinity of a superconducting magnet and / or a superconducting line in a low-temperature range in order to detect the generated magnetic flux density (B).

[0198] For example, the sensor element with the paramagnetic center (NV1) or with the plurality (NVC) of paramagnetic centers (NV1) can be operated in a high temperature range, for example in induction ovens and / or induction cooktops, to measure the magnetic flux densities (B) and / or current strengths present there.

[0199] It is also conceivable to use it for measuring the piston position in ferromagnetic pistons of internal combustion engines.

[0200] Its use in rocket engines and turbines is also conceivable.

[0201] In particular, its use in hypersonic engines, fusion reactors, or plasma chambers for measuring the magnetic properties of the plasma and / or magnetic field-generating elements and / or for measuring the magnetic flux density (B) within these systems is conceivable. A fusion or plasma reactor, or a hypersonic engine, is thus proposed, comprising a plasma chamber and a magnetic field-generating device that produces a magnetic flux density (B) within the plasma chamber, in which a sensor element with a paramagnetic center (NV1) or...a plurality (NVC) of paramagnetic centers (NV1) within the plasma chamber is arranged within the magnetic field of the magnetic field-generating device, and wherein the sensor element is coupled to an optical device with an evaluation device (AWV), and wherein the evaluation device (AWV) comprises a first pump radiation source (PL1) that can generate pump radiation (LB), and wherein the pump radiation (LB) can excite the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element within the plasma chamber to emit fluorescence radiation (FL) that depends on at least one physical parameter, in particular the magnetic flux density (B), within the plasma chamber, and wherein the evaluation device, in particular by means of a first radiation receiver (PD1), detects the fluorescence radiation (FL) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1).The multiple paramagnetic centers (NV1) are detected (NVC), and the evaluation device (AWV) generates one or more measured values ​​depending on the detected fluorescence radiation (FL). Preferably, one or more operating parameters of the hypersonic engine, fusion reactor, or plasma chamber depend on one or more of these measured values.

[0202] Furthermore, it is conceivable to embed one or more sensor elements (NV1) with one or more paramagnetic centers (NV1) or a multitude (NVC) of paramagnetic centers (NV1), for example one or more nanodiamonds with one or more NV centers in one or more diamonds, in glass as a mounting medium (GE).

[0203] The invention therefore also includes a glass body in which at least one sensor element with at least one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1) is cast.

[0204] Instead of glass, other equivalent materials could certainly be used as fasteners (GE). In particular, potting with transparent plastics is conceivable.

[0205] Furthermore, it is conceivable to place one or more sensor elements with one or more paramagnetic centers (NV1) or a plurality (NVC) of paramagnetic centers (NV1) as sensors for current density measurement in electrochemical cells, accumulators, or batteries. Thus, an electrochemical cell, in particular an accumulator or battery, or an electrolysis device, is proposed, comprising a cell chamber and a magnetic field-generating device that produces a magnetic flux density (B) within the cell chamber, in which a sensor element with a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1) is positioned.a plurality (NVC) of paramagnetic centers (NV1) within the cell chamber is arranged within the magnetic field of the magnetic field-generating device, and wherein the sensor element is coupled to an optical device with an evaluation device (AWV), and wherein the evaluation device (AWV) comprises a pump radiation source (PL1) that can generate pump radiation (LB), and wherein the pump radiation (LB) can excite the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor element within the cell chamber to emit fluorescence radiation (FL) that depends on at least one physical parameter, in particular the magnetic flux density (B) within the cell chamber, and wherein the evaluation device (AWV) can, in particular by means of a first radiation receiver (PD1), detect the fluorescence radiation of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1).The system detects the plurality (NVC) of paramagnetic centers (NV1), and the evaluation device (AWV) generates one or more measured values ​​depending on the detected fluorescence radiation (FL). Preferably, one or more operating parameters of the electrochemical cell, in particular the accumulator or battery, or the electrolysis device, or the cell chamber depend on one or more of these measured values. The cell chamber is typically wholly or partially filled with an electrolyte or a melt. The magnetic field-generating device can also be the electrolyte or another liquid within the cell chamber, through which an electric current flows, thus generating a magnetic field.

[0206] Figure 29Figure 1 shows the placement of one or more sensor elements with one or more paramagnetic centers (NV1) or with a plurality (NVC) of paramagnetic centers (NV1), for example, several preferably differently oriented nanodiamonds with multiple NV centers, in a fluidic conduit (RO). A fluid (FLU) is present in the fluidic conduit (RO), typically moving in one direction. A direct or alternating voltage is applied between a first electrode (EL1) and a second electrode (EL2).

[0207] The first electrode (EL1) is separated from the fluid (FLU) in the fluidic conduit (RO) by a first electrical insulation (IS1).

[0208] The second electrode (EL2) is separated from the fluid (FLU) in the fluidic conduit (RO) by a second electrical insulation (IS2).

[0209] The electric field induces displacement currents in the fluid (FLU), which can be measured using the modulated fluorescence radiation (FL) of the paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1). The corresponding measuring devices have already been described.

[0210] One problem is the resulting double layers and space charge zones.

[0211] Figure 30 shows an electrochemical cell, such as the one in Figure 29The difference is that the first electrode (E1) and the second electrode (E2) are in electrical contact with the fluid (FLU). The fluid (FLU) can be a liquid and / or a gas or a plasma. Mixtures are also possible. This situation is typical in plasma chambers, batteries, accumulators, and electrolysis cells. Thus, the sensor elements with paramagnetic centers (NV1) enable, for the first time, the measurement of the electrical current densities within such electrochemical cells without influencing the fields through the connecting leads. Furthermore, galvanic isolation is possible.

[0212] In the example of the Figure 30 A magnetic flux density (B) is generated by means of a coil (L0). This quantum dot (NV1) to coil (L0) configuration can be found, for example, in fusion reactors, plasma reactors, and hypersonic thrusters.

[0213] Combinations with multiple coils, multiple electrodes, and multiple quantum dots are also possible.

[0214] Figure 31 shows the device of Figure 1supplemented by a second radiation receiver (PD2) and a second sensor element with at least one further second paramagnetic center (NV2) or with a second plurality (NVC2) of second paramagnetic centers (NV2). Preferably, the first sensor element with the first paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) is one or more first diamond crystals with one or more first NV centers. Preferably, these first NV centers couple with each other. Preferably, the second sensor element with the second paramagnetic center (NV2) or the second plurality (NVC2) of second paramagnetic centers (NV2) is one or more second diamond crystals with one or more second NV centers. Preferably, these second NV centers couple with each other. The first sensor element with the first paramagnetic center (NV1) orThe first optical transmission path of the pump radiation (LB) from the pump radiation source (PL1) to the first sensor element with the first paramagnetic center (NV1) or the second plurality (NVC2) of paramagnetic centers (NV2) is preferably designed such that it has approximately the same optical transmission properties as the second optical transmission path from the pump radiation source (PL1) to the second sensor element with the second paramagnetic center (NV2) or the second plurality (NVC2) of paramagnetic centers (NV2).

[0215] The pump radiation source (PL1) therefore irradiates the first sensor element with the first paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) with pump radiation (LB), thus causing the first paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) to emit a first fluorescence radiation (FL1). The first radiation receiver (PD1) receives this first fluorescence radiation (FL1). A barrier (BA) prevents the second paramagnetic center (NV2) or the second plurality (NVC2) of second paramagnetic centers (NV2) from directly radiating the second fluorescence radiation (FL22) it emits into the first radiation receiver (PD1).

[0216] The pump radiation source (PL1) therefore irradiates the second sensor element with the second paramagnetic center (NV2) or the second plurality (NVC2) of second paramagnetic centers (NV2) with pump radiation (LB), thus causing the second paramagnetic center (NV2) or the second plurality (NVC2) of second paramagnetic centers (NV2) to emit second fluorescence radiation (FL22). The second radiation receiver (PD2) receives this second fluorescence radiation (FL22). A barrier (BA) prevents the first paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) from directly radiating the first fluorescence radiation (FL1) it emits into the second radiation receiver (PD2).

[0217] By means of the known spacing of the first sensor element with the first paramagnetic center (NV1) or with the plurality (NVC) of paramagnetic centers (NV1) relative to the second sensor element with the second paramagnetic center (NV2) or with the second plurality (NVC2) of second paramagnetic centers (NV2), a microcomputer (µC), which can be part of the integrated circuit (IC), can, for example, determine a gradient of the magnetic flux density (B) by determining the two measured values ​​of the magnetic flux density (B) using the first sensor element with the first paramagnetic center (NV1) or with the plurality (NVC) of paramagnetic centers (NV1) and using the second sensor element with the second paramagnetic center (NV2) or with the second plurality (NVC2) of second paramagnetic centers (NV2).The microcontroller (µC) calculates the difference between the two measured values ​​and divides this value by the known distance between the first sensor element with the first paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) and the second sensor element with the second paramagnetic center (NV2) or the second plurality (NVC2) of second paramagnetic centers (NV2). This approximates the derivative of the magnetic flux density (B) along the line between the first and second sensor elements. The microcontroller (µC) can then transmit this measured value to a higher-level system, particularly a higher-level computer system, for example, via a data line or data bus (DB).

[0218] Figure 32Your use of multiple sensor systems (NVMS), each comprising at least one sensor element with at least one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1), as a magnetoencephalographic detection system.

[0219] The sensor systems (NVMS) are preferably uniformly distributed on a cap (KP), which is preferably, but not necessarily, rigid. The sensor systems (NVMS) are preferably connected to a data bus (DB), which is preferably common to the sensor systems (NVMS).

[0220] In the case of a rigid cap (KP) (e.g., a helmet), the relative positions of the systems to each other are known. Therefore, spatially resolved information about the brainwaves can be determined from the measured magnetic fields of the brainwaves in the form of magnetic flux density (B) values. This is, of course, also possible for other body parts. For example, it is conceivable to distribute the sensors evenly across a lying surface using a mat, thus enabling whole-body measurement.

[0221] A control unit (ECU) is connected to the data bus (DB). The ECU uses the data bus (DB) to instruct one or more sensor systems (NVMS) to measure the magnetic flux density (B) at the location of the paramagnetic center(s) (NV1) or at the location of the multitude (NVC) of paramagnetic centers (NV1) at a specific time. The ECU receives measured values ​​for the flux density (B) at the location of the paramagnetic center(s) (NV1) or at the location of the multitude (NVC) of paramagnetic centers (NV1) from the sensor systems (NVMS). The ECU processes these measured values.

[0222] Figure 33 This further clarifies the positioning of the sensor systems (NVMS) with the paramagnetic centers (NV1) relative to the brain. Figure 32 dar.

[0223] Are the brainwaves, as in the Figures 32 and 33The data is displayed and captured using multiple sensor systems (NVMS). This allows for analysis and also enables the recognition of the wearer's (KP's) expressions of intent. Figure 32 can be used. In principle, it is not important whether the goal is to recognize an expression of the carrier's will or a temporal-spatial structure of brainwaves for medical purposes.

[0224] Such a device preferably comprises a sensor system or, more preferably, a plurality of sensor systems (NVMS).

[0225] Each of these sensor systems (NVMS) comprises one or more paramagnetic centers (NV1) or a plurality (NVC) of paramagnetic centers (NV1). Preferably, each sensor system (NVMS) includes a pump radiation source (PL1) that irradiates the one or more paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1) with pump radiation (LB), thereby causing them to emit fluorescence radiation (FL). This emission of the pump radiation (LB) is dependent on a transmit signal (S5). A first radiation receiver (PD1) converts a signal component of the fluorescence radiation (FL) signal into a receiver output signal (S0). An evaluation circuit preferably generates the transmit signal (S5). The evaluation circuit preferably correlates the receiver output signal (S0) with the transmit signal (S5) or with a predecessor signal of the transmit signal (S5) from which the transmit signal (S5) may be derived.The sensor system (NVMS) generates a value that reflects, for example, the intensity of the fluorescence radiation (FL) or the fluorescence phase shift time (ΔTFL). This value can be output via a first output signal (out) of the sensor system (NVMS). However, it is advantageous to transmit the value in digital form, for example, via a data bus (DB) using a microcontroller (µC), which can be part of the sensor system (NVMS).

[0226] The device therefore preferably also includes one or more data buses (DB) that forward the data acquired by the sensor systems (NVMS) to an interface of a control and processing unit (IF) of the device.

[0227] The device preferably comprises a holding device that mechanically fixes the sensor systems (NVMS) to the biological object to be measured with sufficient stability. In the case of a human brain to be measured, this holding device is preferably a cap (CP). If animals are to be measured, other holding devices are conceivable and practical, which can be adapted to the head shape of the respective animal in a functionally equivalent manner.

[0228] For the aforementioned pattern recognition, measurements of the magnetic flux density (B) or the aforementioned other physical parameters are recorded at the respective location of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the respective sensor system (NVMS) using a cap (KP) or a corresponding functionally equivalent device with multiple sensor systems (NVMS), each of which has at least one sensor element (NVMS) with at least one or more paramagnetic centers (NV1) or a plurality (NVC) of paramagnetic centers (NV1).

[0229] Preferably, this is done discretely in time at synchronized measurement times. For this purpose, the control and processing unit (IF) of the device sends a start or synchronization command to all sensor systems (NVMS) of the cap (KP) via the preferably shared data bus (DB), for example, by means of a so-called broadcast command. The sensor systems (NVMS) preferably have their own microcontroller (µC) connected to the data bus (DB), which controls and, if necessary, monitors the other devices of the sensor system (NVMS) belonging to this microcontroller (µC). After these microcontrollers (µC) of the associated sensor systems (NVMS) have received the synchronization or start command via the data bus (DB), all sensor systems (NVMS) preferably measure the respective magnetic flux density (B) or the relevant physical parameter at the location of their respective paramagnetic centers (NV1) or NV2 at the same time.at the location of the multitude (NVC) of paramagnetic centers (NV1) of their respective sensor elements.

[0230] The microcontrollers (µC) of the sensor systems (NVMS) then transmit their respective measured values ​​of the magnetic flux density (B) or the relevant physical parameters via the preferably shared data bus (DB) to the control and processing unit (IF). We now describe the acquisition of the magnetic flux density (B) as an example of the acquisition of a physical parameter. Other physical parameters besides the magnetic flux density (B), which may be determined by means of the intensity (Ifl) of the fluorescence radiation (FL) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers and / or a value of the fluorescence phase shift time (ΔTFL) of the fluorescence radiation (FL) of the paramagnetic center (NV1), respectively, are also possible.The numerous (NVC) paramagnetic centers that could be measured in the manner described in this disclosure include, for example, electric flux density D, acceleration a, gravitational field strength g, pressure P, temperature ϑ, rotational speed ω, vibration frequency of mechanical parts (beams), position, intensity of ionizing radiation, etc. By acquiring a value corresponding to the intensity (Ifl) of the fluorescence radiation (FL) and / or a value of the fluorescence phase shift time (ΔTFL), a value can thus be determined as a measured value for one or more of these physical quantities. The following describes, as an example of these physical parameters, the acquisition of the magnetic flux density (B), without limiting the subsequent description to this physical parameter. Explicit reference is made to the technical teaching of PCT DE 2020 100 648, which was unpublished at the time of filing.With n sensor systems (NVMS) and, for example, one acquired physical parameter, the sensor systems (NVMS) of the cap (KP) transmit an n-dimensional measurement vector of the magnetic flux density values ​​(B) at the respective measurement time. By specifying a temporal sequence of measurement times via the control and processing unit (IF), the sensor systems (NVMS) of the cap (KP) transmit a temporal sequence of measurement vectors of the magnetic flux density values ​​(B) or other physical parameters, acquired using the paramagnetic centers (NV1) of the sensor systems (NVMS), to the control and processing unit (IF) at the measurement times of this temporal sequence. The control and processing unit (IF) typically processes this temporal sequence of measurement vectors.This can include integrations, differentiation, and other more complex filtering operations, as known from signal theory, communications engineering, and artificial intelligence. These operations of the control and processing unit (IF) can increase the dimensionality of the data then transmitted to the pattern recognition system. In this way, the control and processing unit (IF) generates a new data stream of processed, vectorial, up-to-date data from the temporal sequence of measurement vectors. These vectors are also referred to as feature vectors in the pattern recognition literature. Thus, feature vectors are generated from multiple measurement data points acquired using one or more paramagnetic centers (NV1) of the sensor systems (NVMS).The control and processing unit (CPU) transmits this new data stream of processed, vectorial, up-to-date data in the form of a stream of feature vectors to a pattern recognition unit (PRU) via a vectorial output data stream (EDS) from the CPU. The pattern recognition unit (PRU) can be part of the control computer (CTC).

[0231] The pattern recognition system (NN), which, for example, can execute a neural network model on the pattern recognition system's computer system to recognize patterns in the received feature vectors, preferentially assigns the processed vector data (i.e., the feature vectors) transmitted from the control and processing unit (IF) to the pattern recognition system to pre-recorded or predefined vector prototype datasets from a prototype database of the pattern recognition system. The prototypes are preferably feature vectors that are obtained, for example, by classification using classification programs from previously recorded feature vector datasets of known, manually evaluated situations. For further information, see the book by Francisco Herrera, Francisco Charte, Antonio J. Rivera, and Maria J. del Jesus, "Multilabel Classification: Problem Analysis, Metrics and Techniques," Springer, 22nd edition.Reference is made to April 2018, ISBN-13: 978-3319822693. This prototype database primarily comprises the processed, vector-based, previously recorded data of the prototypical situations, whose pre-recorded feature vectors represent the prototypes in the prototype database. Each prototype, i.e., each prototypical feature vector, is assigned a symbol specific to that prototype in the prototype database. The control and processing unit (IF) transmits the current feature vectors as processed, vector-based, and up-to-date data. The processed, vector-based, and up-to-date data is available as feature vectors. The prototypes are available in the form of prototypical feature vectors as previously recorded prototypical, vector-based data.If a prototype, i.e., a prototypical feature vector, is detected by the pattern recognition system (NN) in this processed, vectorial, and current data by comparing this processed, vectorial, current data with this prototypical, vectorial, previously recorded data, then a symbol for this detected prototype—that is, the detected prototypical vectorial and previously recorded data vector—is transmitted by the pattern recognition system (NN) to a control computer (CTR). This transmission to the control computer (CTR) occurs, for example, via an output data stream (MDS) of the prototypes detected by the pattern recognition system (NN). Parameters, such as the probability of the presence of such a prototype, can also be transmitted along with the symbols for the detected prototypes.

[0232] The pattern recognition system (NN) preferentially executes a pattern recognition program using a computer system of the pattern recognition system (NN). This can be a neural network, an HMM recognizer, or a Petri net.

[0233] The control computer (CTR) preferably controls the control and processing unit (IF) by means of a line and / or a data bus (IFL) and receives status data and other data from the control and processing unit (IF) via this route.

[0234] The control computer (CTR) preferably controls the pattern recognizer (NN) via a line and / or a data bus (NNL) and may receive status data and other data from the pattern recognizer (NN) via this route.

[0235] Depending on the symbol representing the recognized prototype, the control computer (CTR) can, for example, output signals via loudspeakers (LS), displays and screens (DSP), or control actuators (AKT) such as motors, heaters, solenoids, etc., or devices such as vehicles, robots, missiles, floating and diving objects, weapon systems, computer interfaces, etc. The control computer (CTR) can, of course, also be controlled via input devices such as keyboards, etc., which are not shown for simplicity. The control computer (CTR) can also have further data interfaces, which can be wired and / or wireless. In particular, the control computer (CTR) can be connected to the internet or another data network or another computer, possibly via a quantum-cryptographically encrypted data transmission link.This means that the exemplary output units such as loudspeakers (LS), displays (DSP) and actuators (AKT) or controlled devices may be located wholly or partially remotely from the cap carrier (KP).

[0236] For example, it is conceivable to control robots and / or other devices in the immediate vicinity of the cap wearer (CP) or at a distance from him in this way.

[0237] It is conceivable that several people could generate control commands for a device in this way. Before the control commands are passed on to the device, a higher-level processing unit can capture and evaluate them. One evaluation method, for example, is averaging the commands or blocking further control commands for the duration of the execution of the first captured command. After evaluation, the higher-level processing unit passes the selected control command, which it has chosen by whatever method, to the device to be controlled, which then executes this command.

[0238] The system of Figure 34 In the broadest sense, it represents a neurointerface for controlling computer systems and devices and their outputs, whereby the computer system can be integrated into a computer system network with computers that in turn have input and output devices, actuators and sensors.

[0239] Instead of controlling computer systems, a system of the same topology can be used to record the brain response of the cap wearer (CP) to typically predefined stimuli, which are applied to the cap wearer (CP) by, for example, a loudspeaker (LS), a screen (DSP), or another actuator (AKT). This data can then be displayed in a processed form on a second screen, transmitted to other computers in a network, or classified using a pattern recognition system (NN). This makes the system suitable for medical examinations. In principle, it is a magnetoencephalograph, but instead of the SQUID sensors commonly used in the prior art, sensor systems (NVMS) with one or more sensor elements, each with one or more paramagnetic centers (NV1), are employed.Preferably, the sensor elements and the paramagnetic centers are one or more diamonds with one or more NV centers. If the sensor elements each have several paramagnetic centers (NV1), these paramagnetic centers (NV1) are preferably coupled to each other within a sensor element. Coupling of the paramagnetic centers (NV1) across sensor elements is also conceivable.

[0240] In Figure 35 The proposed sensor systems (NVMS) are arranged across a surface instead of on a cap (KP). For example, the sensor systems (NVMS) can be arranged within a roll-out mat, a stretcher, a bed, a couch, a chair, etc. The example of Figure 35 This is only intended to illustrate that other body parts of humans or animals, the entire human body, entire animal bodies and / or other objects can also be used with the methodology of Figure 34 and orders in accordance with the Figure 34 can be examined and / or classified.

[0241] The actuators (AKT) can be designed so that they can act back on the animal, or the human, or on other devices.

[0242] For example, it is conceivable to detect and analyze biological currents in an animal's body, potentially relating them to the results of other sensors and additional data, and then using actuators (AKT) to influence the animal in order to elicit appropriate behavior. For instance, using GPS data and mobile data communication (e.g., via mobile phones), animals could be instructed to travel a specific distance and / or remain in a particular location, thus enabling the delivery of objects from point A to point B. A similar approach based on brain states is possible with humans, for example, to alert them to dangers or to administer medication fully automatically. It is therefore conceivable to implement fully automated medication administration based on these magnetically detected biological currents, for example, to prevent seizures.

[0243] Figure 36 Figure 1 abstractly shows a simplified device for pattern recognition using paramagnetic centers (NV1) or clusters of paramagnetic centers (NV1), where a cluster is understood to be a plurality (NVC) of paramagnetic centers (NV1). In the example of the Figure 36 Six sensor systems (NVMS) are described as examples, each with one or more paramagnetic centers (NV1) or a plurality (NVC) of paramagnetic centers (NV1). Their first output signal (out) is coupled via a data bus (DB) to a control and processing unit (IF). Preferably, the sensor systems (NVMS) include a microcontroller (µC) connected to the data bus (DB) via an interface. In this case, the first output signal (out) is preferably a digital signal. Each sensor system (NVMS) in the example comprises... Figure 36An evaluation device (EWD). The EWD generates pump radiation (LB) with which it irradiates one or more paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1). The one or more paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1) emit fluorescence radiation (FL), which the EWD detects and evaluates. Depending on the fluorescence radiation (FL), the EWD generates a first output signal (out) with a value. This value is sent via the data bus (DB) from the respective sensor system (NVMS) to the control and processing unit (IF). The IF generates a vector output data stream (VDS) from the multiple received measured values. In the example of the Figure 36This vector data stream is only four-dimensional. Typically, the data stream will have a different dimensionality, usually a higher dimensionality. In the example of the Figure 36 The pattern recognition system (NN) executes a neural network model with three layers of neural network nodes. In reality, the number of layers and the number of nodes within the layers will differ. Preferably, a computer system within the pattern recognition system (NN) executes an artificial intelligence program as a higher-level computer system. Most preferably, the higher-level computer system of the pattern recognition system (NN) executes an emulation of a neural network model. In this context, reference is again made to the still unpublished international patent application PCT / EP2020 / 056727, the full disclosure of which forms part of the disclosure presented here.

[0244] A higher-level computer system is proposed that executes a neural network model. This neural network model comprises network nodes organized into network layers. Each network node of the neural network has input and output parameters. At least one, preferably several, input parameters of a network node are either an input parameter of the neural network model or an output parameter of another network node within the neural network model. At least one, preferably several, output parameters of a network node are either an output parameter of the neural network model or an input parameter of another neural network node. A network node whose output parameter is an output parameter of the neural network model has no input parameter that is an input parameter of the neural network model.A network node where an input parameter is an input parameter of the neural network model has no output parameter that is an output parameter of the neural network model. No network node of the neural network where an output parameter is an output parameter of the neural network model has an input parameter that is an output parameter of another network node where an input parameter of that other network node is an input parameter of the neural network model. The input parameters of a network node of the neural network model are linked within that network node to the output parameters of that neural network node by means of a linking function for that particular neural network node. Preferably, this linking function is highly nonlinear.The properties of the linking function depend on linking function parameters, which are preferably specific to the respective network node. The linking function can differ from network node to network node. The linking function parameters are determined and trained in a training process. The description here describes a neural network with at least three layers, as found in the [reference to a specific example]. Figure 36 is symbolically represented as a neural network model within the pattern recognition system (NN).

[0245] It is now proposed that at least one, preferably several, input parameters of the neural network model executed by the pattern recognition (NN)'s higher-level computing unit depend on a parameter of the paramagnetic centers (NV1) or the plurality (NVC) of paramagnetic centers (NV1) in the respective sensor systems (NVMS). Such a parameter could, for example, be the value of the fluorescence radiation intensity (FL) and / or the value of the fluorescence phase shift time (ΔTFL).

[0246] The use of such artificial intelligence methods and procedures is of particular importance for autonomous driving and / or the operation of complex systems and / or the operation of devices in potentially complex environments or as described in the Figures 32 to 35For the implementation of a neuro-interface, a symbol generator (SMBG), which can be part of the program executed by the pattern recognition (NN) computer system, generates a sequence of symbols in the form of an output data stream (MDS) of the prototypes recognized by the pattern recognition (NN), depending on the output parameters of the neural network model. Here, the pattern recognition (NN) preferably transmits only the symbols as representatives of the recognized prototypical feature vectors from the prototype database.

[0247] To enable the neural network of the pattern recognition (NN) to recognize these prototypical feature vectors from the prototype database, the neural network model is stimulated in a training phase using these prototypical feature vectors as input vectors. The output parameters of the neural network model are compared with predefined values, and the linking parameters of the linking function of the neural network nodes are modified according to the learning algorithm until the error rate in recognizing the training data sets falls below a predefined threshold. The neural network trained in this way can then be used for pattern recognition. Similarly, methods of machine learning and deep learning can be employed. For an example, see the textbook by Charu C. Aggarwal, "Neural Networks and Deep Learning: A Textbook," Springer; 1st ed. 2018 edition (13th edition).September 2018). The methods described therein are an integral part of the disclosure presented here.

[0248] Figure 37 shows a simple device for detecting the orientation of the Earth's magnetic field using three sensor systems (NVMS1, NVMS2, NVMS3) with paramagnetic centers (NV1) or a respective plurality (NVC) of paramagnetic centers (NV1).

[0249] Figure 37 Figure 1 shows a preferably ferromagnetic, rotationally symmetric yoke (JK1, JK2, JK3, JV) forming the core of the device, with a preferably odd rotational symmetry. Figure 37 An example of threefold rotational symmetry is shown.

[0250] The exemplary yoke (JK1, JK2, JK3, JV) includes an annular sub-yoke (JK1, JK2, JK3). This annular sub-yoke (JK1, JK2, JK3) is in the example of the Figure 37subdivided into a first yoke segment (JK1), a second yoke segment (JK2), and a third yoke segment (JK3) by means of three air gaps (LSP1, LSP2, LSP3).

[0251] The first air gap (LSP1) is located between the first yoke segment (JK1) and the third yoke segment (JK3). The second air gap (LSP2) is located between the second yoke segment (JK2) and the first yoke segment (JK1). The third air gap (LSP3) is located between the third yoke segment (JK3) and the second yoke segment (JK2). In the example of the Figure 37 The three air gaps (LSP1, LSP2, LSP3) cause a threefold rotational symmetry of the ring-shaped partial yoke (JK1, JK2, JK3).

[0252] A connecting yoke (JV) has the same rotational symmetry about the same axis of rotation as the partial yoke (JK1, JK2, JK3). In the example of the Figure 37The Y-shaped connecting yoke (JV) exhibits threefold rotational symmetry about the same axis of rotation as the threefold rotationally symmetric sub-yokes (JK1, JK2, JK3). In the example of the... Figure 37 from three exemplary bridges that establish a magnetic connection between the three exemplary partial yokes (JK1, JK2, JK3) each other, wherein this magnetic connection preferably runs over the location of the axis of symmetry of the rotational symmetry.

[0253] Each of the three exemplary sub-yokes (JK1, JK2, JK3) is assigned a bridge. This bridge preferably establishes the magnetic contact at a symmetry point of the respective sub-yoke (JK1, JK2, JK3) so that the magnetic path within the sub-yoke is the same in both directions away from the contact point. Preferably, three sensor systems (NVMS1, NVMS2, NVMS3) with sensor elements having paramagnetic centers (NV1) are inserted into each of the three bridges such that the magnetic flux (B) within the respective bridges flows through the respective paramagnetic centers (NV1), or the respective clusters of paramagnetic centers (NV1) in the form of a plurality (NVC) of paramagnetic centers (NV1) of the corresponding sensor systems (NVMS1, NVMS2, NVMS3).This can be ensured, for example, by an air gap in each of the three bridges, into which one of the three sensor systems (NVMS1, NVMS2, NVMS3) and / or the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the respective sensor system (NVMS1, NVMS2, NVMS3) is inserted.

[0254] This enables the respective sensor systems (NVMS1, NVMS2, NVMS3) to detect the magnetic flux (B) within each of the three bridges. The three sensor systems (NVMS1, NVMS2, NVMS3) then determine three measured values ​​of the respective magnetic flux density (B) at each measurement time.

[0255] Depending on the orientation of this arrangement to an external magnetic field with an external magnetic flux density (B), for example, the Earth's magnetic field, the resulting ferromagnetic spider, formed by the ferromagnetic, rotationally symmetric yoke (JK1, JK2, JK3, JV), is permeated differently by the magnetic field in the form of the external magnetic flux density (B). This causes the three values ​​of the exemplary three-dimensional vector measurement signals from the three sensor systems (NVMS1, NVMS2, NVMS3) to differ depending on the orientation of the device in the magnetic field. Such a vector measurement signal can be used, for example, for controlling vehicles, robots, missiles, ships, etc., and for navigation.

[0256] Figure 38Figure 1 shows an exemplary slot sensor. The exemplary slot sensor has a magnetic circuit with a first air gap (LSP1). An exemplary sensor system (NVMS) and a first permanent magnet (PM1) for excitation of the magnetic circuit are inserted into the magnetic circuit. The sensor system (NVMS) has at least one sensor element with at least one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1). The paramagnetic centers (NV1) are preferably NV centers in one or more diamonds.

[0257] The magnetic flux (B) generated by the first permanent magnet (PM1) also flows through the sensor system (NVMS) and thus through the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1).

[0258] If a material of an object or a device component of an application device is now introduced into the first air gap (LSP1), the magnetic flux (B) changes at the location of the paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1) of the sensor element of the sensor system (NVMS), which is detected by the sensor system (NVMS) as a result of the changing fluorescence radiation (FL) of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) and can be reported to higher-level computer systems, for example via a data bus (DB) or another first output signal (out).Preferably, a sensor system (NVMS) therefore has only three connections: a connection to an operating voltage line (VDD) at operating voltage potential, a connection to a reference potential line (GND) at reference potential, and a first output signal (out), which can be an analog or digital signal, or a unidirectional or bidirectional data bus connection.

[0259] Figure 39 shows the slot sensor of the Figure 38The device consists of a toothed rail, preferably made of ferromagnetic material, inserted into the first air gap (LSP1). When the toothed rail is moved forward or backward, the magnetic flux (B) at the location of the paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS) of the slot sensor changes more or less periodically with the entry and exit of the teeth of the toothed rail from the first air gap (LSP1). This change is detected by the associated sensor system (NVMS) as a result of the changing fluorescence radiation (FL) and, if necessary, transmitted to a higher-level computer system. In this way, a position can be determined, e.g., by counting the teeth.

[0260] Figure 40 shows further details of the slot sensor of the Figures 38 and 39 and its magnetic circuit with a toothed rail made of ferromagnetic material.

[0261] Figure 41shows again the slot sensor with a toothed rail made of ferromagnetic material.

[0262] Figure 42This simplified figure shows the dependence of the magnetic flux density (B) in the air gap at the location of the paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1) of the sensor element of the sensor system (NVMS) as a function of the distance (ab) of the axis of symmetry (ms) of the tooth of a toothed rail made of ferromagnetic material from the point of symmetry (m) of an otherwise symmetrically constructed slot sensor. In this example, the slot sensor serves as an exemplary switching element that enables position detection as a function of the position of a toothed rail relative to the slot sensor by means of switching signals.For this purpose, the output signal of the sensor system (NVMS) is preferably amplified or modified before output using a nonlinear function, resulting in a more or less digital switching function, and the first output signal (out) essentially has only a first state and a second state, the second state of the first output signal (out) being different from the aforementioned first state of the first output signal (out). For example, the first state can be assigned a first voltage level at the first output signal (out) relative to a reference potential (GND), while the second state of the first output signal (out) can be assigned a second voltage level at the first output signal (out) relative to the reference potential (GND), which is different from the first potential.

[0263] We now assume that the toothed rail is moved, for example, from left to right by the slot sensor. We also assume that more than one output signal is generated by the nonlinear switching function.

[0264] If the axis of symmetry (ms) of the tooth of the toothed rail is located at point a, a preferably adjustable second threshold value (SW2) is undershot and the sensor system (NVMS) outputs an exemplary first switching signal, for example on a first output signal (out).

[0265] If the axis of symmetry (ms) of the tooth of the toothed rail is located at point b, a preferably adjustable first threshold value (SW1) is undershot and the sensor system (NVMS) outputs an exemplary second switching signal, for example on a second output signal (out").

[0266] If the axis of symmetry (ms) of the tooth of the toothed rail is located at point c, the preferably adjustable first threshold value (SW1) is exceeded and the sensor system (NVMS) outputs an exemplary third switching signal, for example on a third output signal.

[0267] If the axis of symmetry (ms) of the tooth of the toothed rail is located at point d, the preferably adjustable second threshold (SW2) is exceeded and the sensor system (NVMS) outputs an exemplary fourth switching signal, for example on a fourth output signal.

[0268] To distinguish the direction of movement, the sensor system (NVMS) preferably determines the time derivative of the magnetic flux density (B) and determines the direction of movement and the position of the tooth rail from the magnetic flux density (B) and the rate of change of the magnetic flux density dB / dt, and preferably outputs this via a data bus (DB), via which the output signals, for example in time-division multiplexing, are also signaled.

[0269] Figure 43 Figure 1 shows a top view of an exemplary slot sensor with a sensor system (NVMS) comprising a sensor element with one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1). The tapered shape of the first permanent magnet (PM1) (possibly with a yoke) increases the sensor's resolution.

[0270] Figure 44shows the positioning of the tooth rail made of ferromagnetic material within a slot sensor with a sensor system (NVMS) with a sensor element with a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1).

[0271] Figure 45Figure 1 shows a rotationally symmetric toothed rail made of ferromagnetic material for use in a slot sensor with a sensor system (NVMS) having a sensor element with one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1). In this toothed rail, the teeth are arranged perpendicular to the disk plane. Using this toothed rail, rotation angles of the rotationally symmetrical toothed rail relative to a sensor system (NVMS) with a sensor element having one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1) can be determined.

[0272] Figure 46Figure 1 shows a rotationally symmetric toothed rail made of ferromagnetic material for use in a slot sensor with a sensor system (NVMS) having a sensor element with one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1). In this toothed rail, the teeth are arranged in the plane of the disk. Using this toothed rail, rotation angles of the rotationally symmetrical toothed rail relative to a sensor system (NVMS) with a sensor element having one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1) can be determined.

[0273] Figure 47 shows an exemplary current measuring device for very small currents.

[0274] An electromagnet is energized via its terminals with the current to be detected, generating a magnetic excitation H that excites a magnetic circuit. In this example, the magnetic circuit comprises the electromagnet's adjustable core, a yoke, and an air gap. The yoke serves to close the magnetic circuit. A sensor system (NVMS) with a sensor element having a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1) is inserted into the air gap. This sensor system provides an output signal whose value corresponds to the magnetic flux density (B) at the location of the paramagnetic center (NV1) or at the location of the plurality (NVC) of paramagnetic centers (NV1) of the sensor element of the sensor system (NVMS). Alternatively, only the sensor element with the paramagnetic center (NV1) can be used instead of the entire sensor system (NVMS).The multiple paramagnetic centers (NV1) are inserted into the air gap, and the paramagnetic center (NV1) or multiple paramagnetic centers (NV1) are then optically coupled to an evaluation device (AWV) at another location, for example, via optical means such as optical fibers, mirrors, lenses, and the like. Such separation has the advantages of improved galvanic isolation and, if applicable, improved thermal isolation. However, we assume here, for the sake of argument, that the sensor system (NVMS) is completely housed within the air gap. The connections (NVMS connections) of the sensor system (NVMS) supply the sensor system (NVMS) with electrical power and enable communication between a higher-level computer system (not shown) and the sensor system (NVMS) with the sensor element containing the paramagnetic center (NV1) or multiple paramagnetic centers (NV1).The sensor system (NVMS) can output measured values ​​of the magnetic flux density (B) and / or derived values, such as a calculated value of the electric current through the windings of the electromagnet. Since the inductance of the electromagnet is known due to its known construction, the sensor system (NVMS) and / or the higher-level computer system can determine the value of the electric current through the electromagnet based on the measured value of the magnetic flux density (B). To prevent interference, the housing is preferably sealed with a housing cap. This housing and the housing cap are preferably made of a soft magnetic material, e.g., micro-metal, for magnetic field shielding. A magnetic, adjustable core, designed as a screw, allows for calibration of the excitation electromagnet during manufacturing.

[0275] Figure 48This illustrates the use of the sensor system (NVMS) in a microswitch. A tactile element is mounted, for example, to rotate around an axis of rotation within housing part A of the microswitch and within housing part B. Housing part A and housing part B together form the housing for the mechanism. A spring returns the tactile element to its original or rest position after actuation. A lever with a lever bearing transmits the mechanical actuation movement to the tactile element, causing it to rotate slightly around the axis of rotation when actuated. A permanent magnet is embedded in the tactile element. The magnetic field of this permanent magnet is detected by the sensor system (NVMS).Preferably, the sensor system (NVMS) again has three connections: a first connection for the positive supply voltage, a second connection for the negative supply voltage and a connection for a first output signal (out) or alternatively a uni- or bidirectional data bus (DB) for outputting the measured values ​​or a switching signal derived therefrom.

[0276] Figure 49 shows an exemplary usage situation of a microswitch accordingly Figure 48 A machine, for example a copier, a printing press, a packaging machine, or the like, is monitored by means of the microswitch of the Figure 48 The presence of a specific material, such as a foil, sheet of metal, paper web, textile, or similar item, in the machine at a predetermined position. If this material is absent, the switch is activated, initiating a fault process, such as a shutdown or signaling.

[0277] Figure 50Figure 1 shows a different usage scenario. The sensor system (NVMS) is housed together with a bias permanent magnet in a cylinder, for example made of thermoplastic or thermoset plastic. Auxiliary components, such as support capacitors and filter elements, such as integration capacitors, etc., are also housed there. Preferably, a flexible circuit board (not shown) – preferably, for example, a Kapton film with conductive traces – is used for mounting the sensor system (NVMS) and the auxiliary components. Preferably, the housing is sealed against moisture, etc. A ferromagnetic body in the vicinity of the sensor system thus configured distorts the magnetic field lines and thus leads to a change in the magnetic flux density (B) through the paramagnetic center (NV1).the multitude (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS) that can be detected by this sensor system (NVMS) and transmitted via the connections to a higher-level computer system.

[0278] Figure 51 demonstrates the use of the sensor system (NVMS) of the Figure 50 for measuring the angle of rotation and / or the angle of rotation position using a gear.

[0279] Figure 52 illustrates the measurement of the position or rotational angle position through teeth and grooves with a sensor accordingly Figure 50 In the example of the Figure 52It is assumed that the sensor system (NVMS) performs non-linear output signal shaping of the first output signal (out). If the measured value of the sensor system (NVMS) exceeds a predetermined and / or programmable threshold, the sensor system (NVMS) switches its output signal between a first logical value (1) and a second logical value (0), which is different from the first logical value (1), and signals this switch via the first output signal (out) or via a data bus (DB).

[0280] Figure 53 shows a rotary encoder based on the use of the sensor system (NVMS) of the Figure 50 , where the permanent magnet of Figure 50 is not absolutely necessary.

[0281] A magnetized coding disk is mounted on the shaft of the electric motor being monitored. The coding disk is not mechanically encoded, but magnetically, preferably by sectored permanent magnetization. Changes in the magnetic flux density (B) resulting from a change in the motor's angle of rotation are detected by the sensor system (NVMS) and, if necessary, counted relative to an arbitrary or otherwise determined zero point. In the simplest case, the sensor system (NVMS) outputs only a count pulse when the direction of the magnetic flux (B) changes.

[0282] Through redundancy and a different angular frequency of the permanent magnetization of the magnetized coding disks of several systems consisting of coding disk and sensor system (NVMS1, NVMS2, NVMS3), the angular resolution and operational reliability can be improved. This is demonstrated in Figure 54 depicted.

[0283] Instead of a rotational movement, a translational movement can also be monitored. A group of permanent magnets is attached to a preferably non-ferromagnetic substrate, and their translational direction is to be detected. In the example of the Figure 55 Several sensor systems (NVMS1, NVMS2, NVMS3, NVMS4) monitor the position of these permanent magnets. In the simplest case of the Figure 56 For many applications, a permanent magnet and a sensor system (NVMS) (not shown in the figures) are sufficient. Due to the long range of the quantum dot-based measurement method of the sensor systems (NVMS1, NVMS2, NVMS3, NVMS4), significantly fewer permanent magnets and sensor systems are required than if Hall sensors were used instead.

[0284] Figure 57 demonstrates an application of the position measurement principle of Figure 55Preferably, the sensor systems (NVMS1 to NVMS4), and thus the periodicity of the locations of the paramagnetic centers (NV1) or the periodicity of the clusters consisting of a plurality (NVC) of paramagnetic centers (NV1), exhibit a first periodicity (P1) along a first straight or uniformly curved line. Preferably, the permanent magnets on the slider whose position is to be determined exhibit a second periodicity (P2) along a second straight or uniformly curved line. Preferably, the first periodicity (P1) deviates slightly from the second periodicity (P2) – e.g., by 0.1% to 5% – so that a moiré pattern is created and the resolution of the system is thus increased.

[0285] This is a device for measuring a position along a line, wherein the line is substantially remapped onto itself when displaced along the line. The device comprises a first body (X1) and a second body (X2). On the first body (X1), paramagnetic centers (NV1) or clusters of multiple paramagnetic centers (NVC) are arranged along and parallel to the line with a first periodicity (P1). Preferably, these paramagnetic centers (NV1) or clusters of multiple paramagnetic centers (NVC) are sub-devices of associated sensor systems (NVMS1 to NVMS4). On the second body (X2), permanent magnets (PM1 to PM4) are arranged along and parallel to the line with a second periodicity (P2).Due to the second periodicity (P2), which differs from the first periodicity (P1), the fluorescence radiation (FL) of the paramagnetic centers (NV1) or clusters of multiple paramagnetic centers (NV1) of the various sensor systems (NVMS1 to NVMS4) is influenced differently at the different locations of the paramagnetic centers (NV1) or clusters of multiple paramagnetic centers (NV1) by a displacement of the second body (X2) relative to the first body (X1) along the aforementioned line in predictably different ways. This redundancy can then be used to calculate the exact position. An evaluation based on the measured values ​​of the sensor systems (NVMS1 to NVMS4) then determines the actual displacement. Preferably, the translational movement is carried out by an actuator along a third straight or uniformly curved line.The first straight or uniformly curved line, the second straight or uniformly curved line, and the third straight or uniformly curved line are preferably essentially parallel to each other. Preferably, the first periodicity (P1) deviates from the second periodicity (P2), resulting in a vernier effect. An evaluation unit evaluates the output signals of the sensor systems (NVMS1 to NVMS4). Optionally, as shown here, the results are displayed or transmitted to a higher-level data processing unit, for example, via a data bus (DB).

[0286] Figure 58 shows an application of an exemplary slot sensor according to one or more of the Figures 37 to 42 for measuring the angle of rotation using differently designed coding discs with windows and teeth of different angular width and / or angular modulation.

[0287] Figure 59This shows a temperature and / or pressure measurement using an exemplary mechanical functional element whose dimensions depend on the pressure and / or temperature. In the example of the Figure 59The bellows can, for example, be filled with a measuring gas that expands or contracts characteristically with temperature changes. This causes the dimensions of the bellows to change with temperature, and thus the magnetic flux (B) through the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS). Similarly, a change in external pressure and / or a change in the internal pressure of the bellows – for example, via a pressure line not shown – leads to a change in the dimensions of the bellows and thus to a change in the magnetic flux (B) through the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS). This change in the magnetic flux (B) through the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the sensor system (NVMS) leads to a change in the fluorescence radiation (FL) of the paramagnetic center (NV1) orthe multitude (NVC) of paramagnetic centers (NV1). This change is detected by the evaluation device (AWV) of the sensor system (NVMS) and preferably transmitted to a higher-level system, for example a computer system, for example via a data bus (DB).

[0288] Figure 60 Figure 1 shows an application of a proposed sensor system (NVMS) for flow measurement. A paddle wheel with magnetic encodings is placed in a fluid transport device. The paddle wheel is preferably shaped such that the fluid flow in the transport device, for example, a tube, causes the paddle wheel to rotate. The rotation of the paddle wheel generates an alternating magnetic field on the permanent magnet-based magnetic encodings, which can be detected by the sensor system (NVMS) and preferably transmitted to a higher-level system, for example, a computer system.

[0289] Figure 61Figure 1 shows another application of a proposed sensor system (NVMS) for flow measurement. A movable body with paramagnetic centers (NV1) is moved in a magnetic field with a flux density (B). The movement of the body reduces the magnetic flux density (B) for the paramagnetic centers (NV1). If the paramagnetic centers (NV1) are irradiated with pump radiation (LB) by an evaluation device (AWV), the fluorescence radiation (FL) of the paramagnetic centers (NV1) changes due to a change in the speed of movement of the body in the magnetic field.It is preferred that the paramagnetic centers (NV1) are homogeneously distributed along the direction of movement of the body, or that the fluorescence radiation (FL) is detected by the evaluation device (AWV) with the same sensitivity during movement, and that the pump radiation (LB) reaches the paramagnetic centers (NV1) with the same intensity during movement. In the example of the... Figure 61A vane wheel with paramagnetic centers (NV1) is presented as an example of such a device. The vane wheel is placed in a fluid transport device. The vane wheel is preferably shaped such that the fluid flow in the transport device, for example, a tube, causes the vane wheel, and thus the paramagnetic centers (NV1) on the vane wheel, to rotate about its axis of rotation. The rotation of the vane wheel reduces the magnetic flux density (B) of the magnetic field of the permanent magnets. The vane wheels provide pulsed modulation of the fluorescence radiation (FL) emitted when a paramagnetic center (NV1) is irradiated with the pump radiation (LB) of the evaluation device (AWV) of the sensor system (NVMS). This occurs whenever a vane blade moves into the position of the evaluation device (AWV) in the example shown. Figure 61This occurs. Typically, the rotational speed modulates the amplitude of the modulation of the fluorescence radiation (FL) intensity. This amplitude and its frequency can be detected by the evaluation unit (EMU) of the sensor system (NVMS) and preferably transmitted to a higher-level system, for example, a computer system.

[0290] Figure 62Figure 1 schematically illustrates the position control of a slide relative to a first sensor system (NVMS1). Depending on the slide's position, a first permanent magnet (PM1), preferably fixed to the slide, generates a position-dependent magnetic flux density (B) at the location of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the first sensor system (NVMS1). A first operational amplifier (OP1) compares the analog voltage output signal of the first sensor system (NVMS1), which is shown here as a preferred example, with a reference voltage value generated by a potentiometer, and generates a drive signal for the linear servomotor. The servomotor then adjusts the slide as the actuator of the control loop until the voltage difference at the inputs of the first operational amplifier (OP1) is zero.

[0291] Figure 63This section presents an exemplary method for digitizing an exemplary analog first output signal (out) of a sensor system (NVMS) with one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1). The exemplary microcontroller (µC) increases the input value of a digital-to-analog converter (DAC) until the value of the output signal of a first operational amplifier (OP1), which compares the output signal of the DAC with the output signal of the sensor system (NVMS) and here acts as a comparator, crosses a threshold value. At the precise moment of this crossing, the input value, increased up to this point, essentially corresponds to the measured value that the microcontroller (µC) can then pass on.

[0292] Figure 64 demonstrates the application of the position measurement principle of the Figure 51 on an exemplary wheel hub with a drum brake in a motor vehicle.

[0293] Figure 65This demonstrates the application of a sensor system (NVMS) for a locking system. The key can have a spatial encoding through its shape and / or magnetization, which is detected by a sensor system (NVMS) with a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1). The spatial encoding can be converted into a temporal encoding if the speed at which the key is inserted into the device is detected at each moment. This can be achieved if the key has, in addition to a fundamental spatial frequency, a carrier spatial frequency for the actual locking information. This is particularly advantageous because a magnetic encoding is not immediately recognizable without knowledge of it. Figure 66Therefore, two rows of sensor systems are provided to detect the spatial modulation of a permanently magnetically excited key. The magnetic excitation can also be introduced within the lock system via a coil. It is also conceivable to use a more complex sensor system with multiple paramagnetic centers (NV1) or multiple clusters, each in the form of a plurality (NVC) of paramagnetic centers (NV1), as quantum dots. For example, when using diamond as the substrate material, the key can be placed between two diamond plates with NV centers as paramagnetic centers (NV1), or as clusters in the form of a plurality (NVC) of paramagnetic centers (NV1). The magnetic and mechanical encoding then results in a scannable fluorescence image of the paramagnetic centers (NV1), which can be compared with a predefined image.If the deviations are smaller than a predefined threshold, the lock can be unlocked. This situation is in . Figure 67 illustrated. In the example of the Figure 67 The quantum dots, in the form of paramagnetic centers (NV array) or clusters (NVC), are arranged in a one- or two-dimensional lattice within a diamond plate and are stimulated and read out, for example, by optical fibers. An evaluation unit (evaluation device (EDD)) processes the different fluorescence signals of the fluorescence radiation (FL) from the various paramagnetic centers (NV1) or the different clusters in the form of a respective multitude (NVC) of paramagnetic centers (NV1) and, if necessary, actuates the closing mechanism.

[0294] Figure 68a shows an exemplary rotary angle sensor with a permanent magnetized coding disk and a sensor system (NVMS). Figure 68b shows an exemplary rotary angle sensor with a coding disk coded with paramagnetic centers (NV1) or clusters of a plurality (NVC) of paramagnetic centers (NV1) and an evaluation device (AWV). The evaluation device (AWV) irradiates the paramagnetic centers (NV1) or the clusters of a plurality (NVC) of paramagnetic centers. Preferably, the device includes a permanent magnet that generates a magnetic flux density of a defined magnitude.

[0295] Both the intensity of the pump radiation (LB) and the strength of the magnetic flux density depend on the rotation angle. By evaluating the fluorescence radiation (FL), the evaluation device (AWV) can deduce the rotation angle position.

[0296] Figure 69Figure 1 shows an exemplary tilt sensor in which a first permanent magnet (PM1) is attached to the end of a preferably damped pendulum and suspended above a sensor system (NVMS) with a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1). Since the magnetic flux density (B) at the location of the sensor system (NVMS) changes depending on the tilt of the system – here, the exemplary suspension of a washing drum of an exemplary washing machine – a tilt angle sensor can be implemented.

[0297] Figure 70This shows an exemplary application of sensor systems (NVMS1, NVMS2, NVMS3) for rotor position determination in electric motors. The exemplary electric motor is shown in a simplified exploded view. A so-called brushless electric motor is shown as an example. The control of the commutation of the exemplary stator coils of the exemplary electric motor is not shown. In the example of the Figure 70Three sensor systems (NVMS1, NVMS2, NVM3) are shown as examples, each with paramagnetic centers (NV1) or clusters of multiple paramagnetic centers (NVC) to detect the position of the permanent magnetized rotor of the example BLDC motor. Theoretically, however, a single sensor system (NVMS) is sufficient if the starting position is known and absolute values ​​of the magnetic flux density (B) and its time derivative are recorded. A control device (not shown) processes the measured values ​​from the three example sensor systems (NVMS1, NVMS2, NVM3) and, after comparing them with target values, generates the commutation signals for the motor drivers, which are typically half-bridges.These half-bridges (not shown) supply the stator coils of the motor's stator with electrical energy depending on these commutation signals and thus depending on the magnetic flux at the location of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) of the respective sensor system (NVMS1, NVMS2, NVMS3). It is important that the paramagnetic centers (NV1) or clusters of a plurality (NVC) of paramagnetic centers (NV1) can be separated from the respective evaluation devices (AWV) of the respective sensor systems (NVMS1, NVMS2, NVMS3) by optical means, such as fiber optic cables, in order to achieve galvanic isolation between the respective sensor element (NVMS1, NVMS2, NVMS3) and the paramagnetic center (NV1) or the cluster of a plurality (NVC) of paramagnetic centers (NV1).

[0298] Such a drive system comprises an electric machine with a stator and with a rotor, in particular a rotor, mounted to move along at least one degree of freedom relative to the stator, wherein the stator has a first magnetic field-generating device and wherein the rotor has a second magnetic field-generating device and wherein at least the first magnetic field-generating device or the second magnetic field-generating device can generate a moving magnetic field with a direction of movement along the degree of freedom of the rotor as a function of a control signal and wherein the machine has a paramagnetic center (NV1) and / or a plurality (NVC) of paramagnetic centers (NV1) and wherein an evaluation device (AWV) irradiates the paramagnetic center and / or the plurality (NVC) of paramagnetic centers (NV1) with pump radiation (LB) and wherein the paramagnetic center and / or the plurality (NVC) of paramagneticThe paramagnetic center (NV1) emits fluorescence radiation (FL) depending on the magnetic flux density (B) at the location of the paramagnetic center (NV1) and / or the plurality (NVC) of paramagnetic centers (NV1), wherein the paramagnetic center (NV1) and / or the plurality (NVC) of paramagnetic centers (NV1) are located on the rotor or the stator, and wherein the evaluation device (AWV) detects the fluorescence radiation (FL) and, depending on the detected fluorescence radiation (FL), generates the control signal. The evaluation device (AWV) can consist of several evaluation devices. An evaluation device can be coupled to a paramagnetic center (NV1) and / or a plurality (NVC) of paramagnetic centers (NV1) by optical means, for example, optical waveguides.

[0299] Figure 71shows further coding options for coding via permanently magnetized coding disks or rotating bodies for measuring the angle of rotation and / or counting revolutions.

[0300] Figure 72 This shows the application of a sensor system for measuring the rotational speed of a conveyor belt's transport roller, and thus for measuring speed. The necessary encoding disc is not explicitly shown here, as it has been mentioned several times previously.

[0301] Figure 73This figure illustrates the use of proposed sensor systems (NVMS1, NVMS2, NVMS3) for determining the position of a piston in a cylinder. For this purpose, the piston can either be permanently magnetized or the magnetic excitation can be supplied externally, for example, by permanent magnets, and the piston can be ferromagnetic. Depending on the piston's position in the cylinder, the magnetic flux through the sensor systems (NVMS1, NVMS2, NVMS3) changes. These systems transmit the measured values ​​to an evaluation system, which determines the position and, if necessary, transmits or otherwise processes the data.

[0302] Figure 74Figure 1 shows a typical procedure for operating a measurement system for measuring electromagnetic waves (HFW) with a sensor system (NVMS) having at least one sensor element with at least one paramagnetic center (NV1) and / or at least one cluster of a plurality (NVC) of paramagnetic centers (NV1). The procedure can, in principle, also be used for other waves if a conversion into an electromagnetic wave (HFW) takes place in a third step (not shown here).

[0303] In a first step (1'), an electromagnetic transmission wave is emitted by a transmitter. In a second step (2'), the electromagnetic transmission wave is reflected by one or more objects (obj) as an electromagnetic wave (HFW) and / or the electromagnetic transmission wave is modified by one or more objects (obj) or the transmission channel into an electromagnetic wave (HFW). The third step, the conversion of an ultrasound signal into an electromagnetic signal, is not necessary here and is therefore omitted. As an example, consider the... Figure 24and referred to the third step (3) there. In the fourth step (4'), the electromagnetic wave (HFW) causes a modulation of the magnetic flux density (B) at the location of the quantum dot (NV1) or the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) or the NV center of the sensor system (NVMS). The modulation of the magnetic flux density (B) at the location of the quantum dot (NV1), the paramagnetic center (NV1), the plurality (NVC) of paramagnetic centers (NV1), or the NV center (NV1) of the sensor system (NVMS) modulates the fluorescence radiation (FL) of the quantum dot (NV1), the paramagnetic center (NV1), the plurality (NVC) of paramagnetic centers (NV1), or the NV center (NV1) of the sensor system (NVMS) in a fifth step (5'). In a sixth step (6'), a first radiation receiver (PD1) of the sensor system (NVMS) detects this modulation of the fluorescence radiation (FL), e.g.as a receiver output signal (S0). In a seventh step (7'), an evaluation circuit and / or evaluation unit generates one or more measured values ​​from the receiver output signal (S0), preferably a temporal sequence of measured values, which are then preferably output, for example, as the first output signal (out) or via a data bus (DB) and are preferably used in whole or in part.

[0304] Figure 75 essentially corresponds to the Figure 1The difference is that the sensor element with the quantum dot (NV1), i.e., for example, a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1), or preferably an NV center (NV1) in diamond as the sensor element, is now directly attached to the first pump radiation source (PL1). This has the advantage that the pump radiation power is now maximized, which maximizes the contrast. The fluorescence radiation (FL) is now redirected to the first radiation receiver (PD1) via optical functional means, here the reflector (RE). Experiments have shown that by maximizing the pump power density in the sensor element, i.e., for example, in the diamond, the contrast in the curve of the Figure 15 can be maximized.

[0305] Figure 76Figure 1 shows a probe (SO) for surveying a borehole (DH) or for measuring the properties of the fluid possibly located in the borehole (DH). The probe (SO) can, for example, have one or more permanent magnets that generate a magnetic field which is deformed by substances in the wall of the borehole (DH) or in the fluid in the borehole near the probe (SO). The Earth's magnetic field can also be used for this purpose. A winch (WI) lowers the probe (SO) into the borehole (DH) on a cable (KA). The cable (KA) mechanically holds the probe (SO). The cable (KA) can include one or more optical fibers that connect a sensor element, e.g., a diamond, with a quantum dot (NV1), preferably comprising a paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NV1), to a remaining sensor system, preferably in the form of an evaluation device (AWV) on the surface. At this point, the following should be noted: Figures 27 to 30It is also possible to integrate an entire sensor system (NVMS) into the probe (SO). Such a sensor system (NVMS) then communicates preferably via wires in the cable (KA) or wirelessly, acoustically or radio-wise, with a higher-level computer system on the surface. In this way, it is possible to measure the aforementioned physical parameters, in particular the magnetic flux density (B) in the borehole (DH), even at very high temperatures and / or in aggressive environments. REFERENCE MARK LIST

[0306] 1. First step: Emitting an acoustic transmission wave (ASW) by a sound transmitter, in particular an ultrasonic transmitter (USS); 1. First step: Emitting an electromagnetic transmission wave by a transmitter; 2. Second step: Reflecting the acoustic transmission wave (ASW) by one or more objects (Obj) as an acoustic wave (AW) and / or modifying the acoustic transmission wave (ASW) by one or more objects (Obj) or the transmission channel to an acoustic wave (AW); 2. Second step: Reflecting the electromagnetic transmission wave by one or more objects (Obj) as an electromagnetic wave (HFW) and / or modifying the electromagnetic transmission wave by one or more objects (Obj) or the transmission channel to an electromagnetic wave (HFW); 3. Third step: The reflected acoustic wave (AW) sets a membrane (ME) with a ferromagnetic sub-device in the third step (3) into vibration; 4. Fourth step: TheIn the fourth step (4), the vibrating membrane (ME) with the ferromagnetic sub-device causes a modulation of the magnetic flux density (B) at the location of the quantum dot (NV1) or the paramagnetic center (NV1) or the NV center of the sensor system (NVMS); 4'fourth step: In the fourth step (4'), the electromagnetic wave (HFW) causes a modulation of the magnetic flux density (B) at the location of the quantum dot (NV1) or the paramagnetic center (NV1) or the NV center of the sensor system (NVMS); 5. Fifth step: The modulation of the magnetic flux density (B) at the location of the quantum dot (NV1) or at the location of the paramagnetic center (NV1) or at the location of the NV center (NV1) of the sensor system (NVMS) modulates the fluorescence radiation (FL) of the quantum dot (NV1) or the paramagnetic center (NV1) or the NV center (NV1) of the sensor system (NVMS); 5. Fifth step: The modulation of the magnetic flux density (B) at the location of the quantum dot (NV1) orAt the location of the paramagnetic center (NV1) or at the location of the NV center (NV1) of the sensor system (NVMS), the fluorescence radiation (FL) of the quantum dot (NV1) or the paramagnetic center (NV1) or the NV center (NV1) of the sensor system (NVMS) is modulated; 6 sixth step: In a sixth step (6), a first radiation receiver (PD1) of the sensor system (NVMS) detects this modulation of the fluorescence radiation (FL), e.g., as a receiver output signal (S0); 6' sixth step: In a sixth step (6'), a first radiation receiver (PD1) of the sensor system (NVMS) detects this modulation of the fluorescence radiation (FL), e.g., as a receiver output signal (S0); 7. Seventh step: In a seventh step (7), an evaluation circuit and / or evaluation unit generates one or more measured values ​​from the receiver output signal (S0), preferably a temporal sequence of measured values, which are then preferably used in whole or in part. 7'Seventh step: In a seventh step (7')An evaluation circuit and / or evaluation unit generates one or more measured values, preferably a temporal sequence of measured values, from the receiver output signal (S0), which are then preferably used in whole or in part. 2D or 3D-B field generation: The 2D or 3D-B field generation comprises all means for generating a two-dimensional or three-dimensional magnetic field. Typically, these are Helmholtz coils (L2 to L7). However, it is conceivable to use other coil configurations instead of Helmholtz coils (L2 to L7), in particular segmented flat coils, to compensate for and / or influence the magnetic flux (B) or at least predetermined components of the magnetic flux (B) at the location of the quantum dot (NV1), the paramagnetic center (NV1), or the NV center (NV1). aPoint to which the toothed rail just reduces the magnetic flux (B) in the air gap of the slot sensor so that the second threshold value (SW2) is reached during a movement of theDental splint from left to right in Figure 41 is undercut; A1 subtractor; ab distance (ab) of the axis of symmetry (ms) of the tooth of a toothed rail from the point of symmetry (m) of an otherwise symmetrically constructed slot sensor in Figure 41 ; ADC analog-to-digital converter; AKT actuator(s); AKT line / data bus for controlling the actuator(s); AMP amplifier; b point to which the toothed rail just reduces the magnetic flux (B) in the air gap of the slot sensor so that the first threshold value (SW1) is reached when the toothed rail moves from left to right Figure 41is undercut; AS1 first axis (AS1) of the first Helmholz coil, the seventh coil (L7); AS2 second axis (AS2) of the second Helmholz coil, the second coil (L2); AS3 third axis (AS3) of the third Helmholz coil, the third coil (L3); AS4 fourth axis (AS4) of the fourth Helmholz coil, the fourth coil (L4); AS5 fifth axis (AS5) of the fifth Helmholz coil, the fifth coil (L5); AS6 sixth axis (AS6) of the sixth Helmholz coil, the sixth coil (L6); ASW acoustic transmit wave. The ultrasonic transmitter (USS) emits an exemplary acoustic transmit wave (ASW), which is modified, for example, at an object (Obj) or in the transmission channel to an acoustic wave (AW) and then by the proposed microphone ( Figure 21) is received. AA Acoustic wave. In the example of Figure 21, the acoustic wave (AW) sets a membrane (ME) with a ferromagnetic sub-device into vibration, so that the resulting oscillation of the magnetic flux density (B) at the location of the quantum dot (NV1) or the paramagnetic center (NV1) or the NV center (NV1) can be detected by the resulting fluctuation of the fluorescence radiation (FL). AWV Evaluation device; B Magnetic flux density; BA Barrier or aperture. In Figure 31The exemplary barrier (BA) prevents crosstalk of the first fluorescence radiation (FL1) from the first quantum dot (NV1) or first paramagnetic center (NV1) or first NV center (NV1) to the second radiation receiver (PD2) and crosstalk of the second fluorescence radiation (FL22) from the second quantum dot (NV2) or second paramagnetic center (NV2) or second NV center (NV2) to the first radiation receiver (PD1); BA1 is the first aperture or barrier. In the example, the first aperture (BA1) prevents... Figure 12 The direct irradiation of the compensation radiation source (PLK) into the quantum dot (NV1) or into the paramagnetic center (NV1) or into the NV center; BA2 second aperture or barrier. The second aperture (BA2) prevents in the examples of Figure 11 and 12the direct radiation from the first pump radiation source (PL1) into the first radiation receiver (PD1); Bground / road surface; B1 first bond wire; B2 second bond wire; B3 third bond wire; Bhousing bottom; cpoint to which the toothed rail just reduces the magnetic flux (B) in the air gap of the slot sensor so that the first threshold value (SW1) is reached when the toothed rail moves from left to right Figure 41is exceeded; CAV cavity; CON electrical conductor; CORR correlator. The correlator (CORR) compares a first signal with a second signal and outputs a result signal whose value is a measure of how closely the first signal matches the second signal. In the simplest case, the correlator (CORR) performs a mathematical function corresponding to a linear form. The two signals are considered as infinite-dimensional vectors whose index is continuous time. The linear form combines these two signals and generates a signal that is itself preferably an element of the vector space from which the signals originate. Preferably, the linear form is a scalar product.In the case of signals, the scalar product can be formed by multiplying the instantaneous value of the first signal by the corresponding instantaneous value of the second signal at the same time for all points in time within a predefined period, for example, the period of the transmitted signal (S5), and then integrating the result of the multiplication over the period. In the example of the... Figure 8This is achieved by a first multiplier (M1), which multiplies the reduced receiver output signal (S1) by the transmit signal (S5). A filter (TP), preferably a low-pass filter, performs the integration. Ideally, a sample-and-hold circuit would be necessary at the output of the filter (TP), which would preferably buffer the filter's output signal (TP) at the end of each period of the transmit signal (S5) until the end of the next period of the transmit signal (S5), thus making the integration unambiguously period-dependent. However, it has been shown that in practice this sample-and-hold circuit is not always necessary, and the resulting error can often be neglected. The filter output signal (S4) of the Figure 8 Thus, the signal whose signal represents the correlation value is the one preferred. The filter (TP) is the one preferred. Figure 8The system is given a large gain to linearize it. In this example, a second multiplier (M2) is used to... Figure 8The reduced receiver output signal (S1), insofar as it contained components of the transmit signal (S5), is reconstructed and subtracted from the receiver output signal (S0). In the stable state, the reduced receiver output signal (S1) then contains almost no components of the transmit signal (S5), while the filter output signal (S4) represents the correlation value between the receiver output signal (S0) and the transmit signal (S5). The correlator (CORR) can also be implemented differently. The important thing is that it determines the component of the transmit signal (S5) in the receiver output signal (S0) as a correlation value. Optimal filters and / or matched filters are also suitable for this purpose. CTR control computer; dPoint to which the toothed rail just reduces the magnetic flux (B) in the air gap of the slot sensor so that the second threshold value (SW2) is reached when the toothed rail moves from left to right Figure 41is exceeded; d2 distance; DE housing cover; DB data bus; DB2 possibly existing second data bus (DB2) to a potentially higher-level system and / or a computer network and / or for connection to the Internet. d FOB distance from the sensor system (NVMS) to a magnetized object, here preferably to a ferromagnetic object (FOB); DH borehole. The borehole (DH) is in the broadest sense a fluidic functional element. It can contain fluids, colloidal solutions, mixtures of liquids, solid materials such as sands and / or dusts, as well as gases. DSP screen; DSPL line / data line (DSPL) for controlling the screen (DSP) or for controlling the display on the screen (DSP) or objects on the screen (DSP); ΔTFL Fluorescence phase shift time of the temporal phase shift between the signal of the modulation of the pump radiation (LB, LB1a) and the signal of the modulation of the fluorescence radiation (FL, FL1).The fluorescence phase shift time thus approximates the afterglow of the fluorescence radiation (FL) of the quantum dots (NV1) or the paramagnetic centers (NV1) or the NV centers (NV1) after the decay of the pump radiation (LB, LB1a); ΔTm measurement phase shift unit. The optional measurement phase shift unit delays the transmitted signal (S5) by a measurement phase shift time (ΔTM) relative to the measurement signal (MES), which is preferentially used for the analysis of the receiver output signal (S0). ΔTM measurement phase shift time (ΔTM) of the temporal phase shift between the signal of the pump radiation modulation (LB, LB1a) and the time periods or points in time of the evaluation of the receiver output signal (S0) of the first radiation receiver (PD1), which depends on the fluorescence radiation (FL, FL1) received by the first radiation receiver (PD1), by the evaluation circuit, for example by the integrated circuit (IC). In the . Figures 3 to 7This corresponds to the time shift between the edges of the pump radiation signal (LB, LB1a) on the one hand and the exemplary measurement signal (MES), which serves for clarification, on the other; EL1 first electrode; EL2 second electrode; F1 first optical filter. The first optical filter (F1) is only necessary if the fluorescence radiation (FL) is to be evaluated at the first time points (T1) at which the pump radiation source (PL1) also emits pump radiation (LB, LB1a). If the fluorescence radiation (FL) is evaluated at the third time point (T3) or the second time point (T2) at which the pump radiation source (PL1) does not emit pump radiation (LB, LB1a), by utilizing the afterglow of the fluorescence radiation (FL), then this first optical filter (F1) is not strictly necessary.The first optical filter (F1) is preferably designed such that it does not allow radiation with the pump radiation wavelength (λ pmp ) of the pump radiation (LB, LB1a) and / or the reflected pump radiation (LB1b) to pass through and allows radiation with the fluorescence radiation wavelength (λ fl ) of the fluorescence radiation (FL) to pass through. If a compensation radiation source (PLK) is provided which also emits compensation radiation (KS) in a summed superimposed manner into the first radiation receiver (PD1) and whose compensation radiation (KS) is to pass through the first optical filter (F1) before striking the first radiation receiver (PD1), then the first optical filter (F1) is preferably designed such that it does not attenuate the light of the compensation radiation source (PLK) for the intended purpose, or does not attenuate it significantly, i.e., it allows radiation with the compensation radiation wavelength (λ ks ) of the compensation radiation (KS) to pass through essentially.Preferably, when using NV centers as quantum dots, the first optical filter (F1) blocks radiation with wavelengths shorter than 600 nm and allows radiation with wavelengths above 600 nm, i.e., shorter than 600 nm, to pass through. When using other types of paramagnetic defects (NV1), these wavelengths are adjusted functionally as needed. The wavelength limit is preferably selected based on the pump radiation wavelength (λpmp) of the pump radiation (LB) from the first pump radiation source (PL1), the fluorescence wavelength (λfl) of the fluorescence radiation (FL) from the quantum dot(s), and the compensation radiation wavelength (λks) of the compensation radiation (KS) from the compensation radiation source (PLK).The wavelength limit is preferably chosen such that the pump radiation wavelength (λpmp) of the pump radiation (LB) of the first pump radiation source (PL1) is not transmitted through the first optical filter (F1), the fluorescence wavelength (λfl) of the fluorescence radiation (FL) of the quantum dot(s) is transmitted through the first optical filter (F1), and the compensation radiation wavelength (λks) of the compensation radiation (KS) of the compensation radiation source (PLK) is transmitted through the first optical filter (F1). FL Fluorescence radiation (FL) emitted by the quantum dot, in particular the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) or the NV center or the plurality of NV centers, when it is irradiated by pump radiation (LB, LB1a) from the first pump radiation source (PL1) and / or by reflected pump radiation (LB1b) with a pump radiation wavelength (λ pmp ).In the case of an NV center in a diamond acting as a paramagnetic center (NV1), the pump radiation (LB1a), and thus preferably the reflected pump radiation (LB1b), is green. The fluorescence radiation (FL) is then typically red. The intensity of the quantum dot's fluorescence radiation (FL) typically depends on the magnitude of the magnetic flux density (B). If the quantum dot is a single paramagnetic center (NV1), for example, a single defect center in a single crystal, or a plurality (NVC) of paramagnetic centers (NV1), the intensity of the fluorescence radiation (FL) at certain magnetic flux densities (B) at the location of the paramagnetic center (NV1) depends on the magnitude of the magnetic flux density (B).The orientation of the multiple (NVC) paramagnetic centers (NV1) also depends on the direction of the magnetic flux density (B) relative to the crystal axis of the crystal in question, and thus relative to the orientation of the defect center (NV1). Preferably, in the case of an NV center in diamond as the paramagnetic center (NV1), the fluorescence radiation is red light with a wavelength of 600 nm to 700 nm, which is longer than the wavelength of the pump radiation (LB, LB1a) and shorter than the wavelength of the compensation radiation (KS, KS1). FL1 is the first fluorescence radiation emitted by the quantum dot, in particular the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) or the NV center or the plurality of NV centers, when it is irradiated by pump radiation (LB, LB1a) from the pump radiation source (PL1) and / or by reflected pump radiation (LB1b) with a pump radiation wavelength (λ pmp ).In the case of a single NV center in a diamond as a paramagnetic center (NV1), or in the case of multiple NV centers in a diamond as multiple (NVC) paramagnetic centers (NV1), the pump radiation (LB1a), and thus preferably the reflected pump radiation (LB1b), is green. The fluorescence radiation (FL) is then typically red. The intensity (Ifl) of the fluorescence radiation (FL) typically depends on the magnitude of the magnetic flux density (B). If the quantum dot is a single paramagnetic center (NV1) in the form of a single defect center in a single crystal, and / or if it is a multiple (NVC) paramagnetic center (NV1) in the form of several defect centers in a single crystal, the intensity (Ifl) of the fluorescence radiation (FL) also depends on the direction of the magnetic flux density (B) relative to the crystal axis at certain magnetic flux densities (B).If a multitude of crystals with different, preferably stochastically distributed, orientations are used, this dependency can be suppressed. Preferably, the first fluorescence radiation (FL1) in the case of an NV center in diamond as a paramagnetic center (NV1), or in the case of a multitude of NV centers in diamond, is red light with a wavelength of 600 nm to 700 nm, which is typically longer than the pump radiation wavelength (λpmp) of the pump radiation (LB, LB1a) (e.g., 520 nm for NV centers) and often shorter than the compensation radiation wavelength (λks) of the compensation radiation (KS). FL2 is reflected fluorescence radiation. For example, the reflector (RE) may reflect the fluorescence radiation (FL, FL1) of the quantum dot, i.e., for example, the paramagnetic center (NV1) or the multitude (NVC) of paramagnetic centers (NV1) or the NV center orThe multiple NV centers reflect the fluorescence radiation (FL, FL1) preferentially towards the first radiation receiver (PD1), which then preferentially receives the fluorescence radiation (FL, FL1) as reflected fluorescence radiation (FL2). Instead of the reflector (RE), other optical functional elements can also be used for optical coupling of the first radiation receiver (PD1) to the quantum dot, e.g., in the form of the paramagnetic center (NV1) or the multiple paramagnetic centers (NV1), or the NV center or multiple NV centers, for example by focusing and / or deflecting the fluorescence radiation (FL, FL1) or, for example, by filtering the fluorescence radiation (FL, FL1) using a first optical filter (F1) to generate the reflected fluorescence radiation (FL2) from the fluorescence radiation (FL, FL1) and receive it by the first radiation receiver (PD1).Preferably, in the case of NV centers as paramagnetic centers (NV1), the reflected fluorescence radiation (FL2) is red light with a wavelength of 600 nm to 700 nm, which is typically longer than the pump radiation wavelength (λpmp) of the pump radiation (LB, LB1a) and often shorter than the compensation radiation wavelength (λks) of the compensation radiation (KS); FL22 Second fluorescence radiation (FL22) emitted by the second quantum dot, in particular in the form of the second paramagnetic center (NV2) or in the form of the second plurality (NVC2) of second paramagnetic centers (NV2) or in the form of the second NV center or in the form of a second plurality of NV centers, when irradiated by pump radiation (LB, LB1a) from the pump radiation source (PL, PL1) and / or by reflected pump radiation (LB1b) with pump radiation wavelength (λ pmp ).In the case of a second NV center in a diamond as a second paramagnetic center (NV2) or in the case of a second plurality of NV centers in one or more diamonds as a second plurality (NVC2) of second paramagnetic centers (NV2), the pump radiation (LB1a) and thus preferably the reflected pump radiation (LB1b) is green. The second fluorescence radiation (FL22) is then typically red. The intensity of the second fluorescence radiation (FL22) typically depends on the magnitude of the magnetic flux density (B).If the second paramagnetic center (NV2) is a single second defect center in a single crystal, the intensity of the second fluorescence emission (FL22) at certain magnetic flux densities (B) typically also depends on the direction of the magnetic flux density (B) relative to the crystal axis and thus on the orientation of the second paramagnetic center (NV2) relative to the direction of the magnetic flux density (B). If the second plurality (NVC2) of second paramagnetic centers (NV2) is a plurality of second defect centers in several, preferably differently and preferably randomly oriented, single crystals, this directional dependence can be suppressed. Preferably, the second fluorescence emission (FL22) is, in the case of an NV center in diamond as the second paramagnetic center (NV2), or...In the case of a plurality of NV centers in diamond, a second plurality (NVC2) of second paramagnetic centers (NV2) emits red light with a wavelength of 600 nm to 700 nm, which is typically longer than the pump radiation wavelength (λpmp) of the pump radiation (LB, LB1a) and shorter than the compensation radiation wavelength (λks) of the compensation radiation (KS); FLU: Fluid. The fluid (FLU) can be a gas, a liquid, or a liquid mixture (e.g., a gas / oil / sand / water mixture such as in boreholes (DH)) or a quasi-gaseous mixture (e.g., a gas permeated with dust). In particular, it can be the electrolyte of an electrochemical device, for example, an electrolysis cell, a fuel cell, a battery, or an accumulator, etc. FOB: Ferromagnetic object; G: Signal generator.The signal generator (G) preferably generates the transmit signal (S5); GE fastening means (GE) with which the sensor element with the quantum dot (NV1), or the paramagnetic center (NV1), or the NV center (NV1) is attached; GL1 first adhesive. In the example of the . Figure 1 The first optical filter (F1) is mechanically connected to the integrated circuit (IC) by means of the radiation-transparent first adhesive (GL1). The first adhesive (GL1) is essentially transparent to fluorescence radiation (FL). This means that the first adhesive (GL1) attenuates the fluorescence radiation (FL), if at all, only to the extent that it is negligible for the intended purpose of the device. In this example, the first adhesive (GL1) couples Figure 1 The paramagnetic center (NV1) is optically coupled to the first radiation receiver (PD1). This coupling refers in the example of the Figure 1on the fluorescence radiation (FL). If compensation radiation (KS) is used, the first adhesive (GI1) couples the compensation radiation source (PLK) to the first radiation receiver (PD1) as an optical element in the optical coupling path between the compensation radiation source (PLK) and the first radiation receiver (PD1). The first adhesive (GL1) is therefore preferably sufficiently transparent for the wavelength of the compensation radiation (KS) when compensation radiation (KS) is used. GL2 is a second adhesive (GL2) for mounting the integrated circuit (IC) on the second lead-frame island (LF2). Preferably, this second adhesive (GL2) is electrically conductive. However, systems with an electrically insulating second adhesive (GL2) are also conceivable. GL3 is a third adhesive (GL3) for mounting the first pump radiation source (PL1) on the third lead-frame island (LF3). Preferably, this third adhesive (GL3) is electrically conductive.However, systems with an electrically insulating third adhesive (GL3) are also conceivable; GL4 fourth adhesive (GL4) for attaching the housing cover (DE) to the housing wall (WA); GND reference potential line (GND) to reference potential; H magnetic field strength or excitation. The magnetic field strength (H) is related to the magnetic flux density (B) via the known material equation of Maxwell's equations; RF window special cover (DE) of the housing that allows the entry of electromagnetic radiation, for example in the form of an electromagnetic wave (HFW), into the housing. The electromagnetic wave (HFW) modulates the fluorescence radiation (FL) of the quantum dot, for example in the form of the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) or the NV center (NV1).the multitude of NV centers, which is detected and evaluated by the sensor system (NVMS); HFW electromagnetic wave; IC integrated circuit; IF control and processing unit; IFL line / data bus (IFL) for controlling the control and processing unit (IF); Ifl intensity (Ifl) of the fluorescence radiation (FL) of the quantum dot; Iks intensity (Iks) of the compensation radiation (KS); INV inversion unit. In the simplest case, the optional inversion unit (INV) inverts the transmitted signal (S5) to the measurement signal (MES), which is preferred for analyzing the receiver output signal (S0). The generation of a measurement signal (MES) complementary to the transmitted signal (S5) according to MES = c - S5, with c as a constant value, is also conceivable. I m electric current (I m ) which flows through the conductor (CON) at least partially in such a way that the magnetic flux density (B) at the location of the quantum dot, i.e. the paramagnetic center (NV1) orThe plurality (NVC) of paramagnetic centers (NV1), or the NV center, or the plurality of NV centers is modified depending on this electric current; I L8 eighth coil current. The eighth coil current flows through the control signal line (SS1) into an eighth coil (L8). I pmp intensity (I pmp ) of the pump radiation (LB); IS1 first electrical insulation; IS2 second electrical insulation; J1 toroidal or ring-shaped yoke; JK1 first yoke segment; JK2 second yoke segment; JK3 third yoke segment; JV connecting yoke; KA cable. The cable (KA) may include electrical lines for supplying electrical, electronic, and electro-optical equipment to the probe (SO) and for signaling between the probe (SO) and a higher-level system on the surface. The cable (KA) may also include optical systems such as optical fibers. The cable (KA) may also include mechanical conductors whose sole purpose is to mechanically hold the probe.Motor vehicle and / or mobile device. This includes all devices not permanently fixed in a location, such as, but not limited to, cars, trucks, construction machinery, mobile machinery, robots, locomotives, tractors, aircraft, satellites, rockets, missiles, missiles, ships, submarines, space stations, etc., as well as devices not necessarily permanently fixed in a location, such as portable or transportable medical equipment, mobile phones and smartphones, laptops, desktop PCs, read / write heads for data storage, magnetometers, measuring equipment, measuring equipment for material testing and the detection of material defects and faults, measuring equipment for borehole surveying, geomagnetic measuring equipment for prospecting, gyrocompasses, compasses and navigation equipment, portable equipment for measuring chemical parameters such as pH value or electrochemical potentials, gas sensors, etc.Exemplary body part for the application of the magnetoencephalographic device. KP cap. The cap (KP) is an exemplary device for the predictable arrangement of multiple sensor systems (NVMS) in a predefined geometry. This arrangement enables magnetoencephalographic evaluation of the sensor data from the sensor systems (NVMS). Instead of a cap (KP), similar devices can be used to examine other body parts or entire human and animal bodies. Implantation of the sensor systems (NVMS) into a body part at predefined locations is also conceivable. In this case, the role of the cap (KP) is taken over by a body part, for example, a bone; KS compensation radiation. The compensation radiation (KS) is emitted by the compensation radiation source (PLK).Preferably, this occurs at second times (T2) that differ from the first times (T1) at which the pump radiation source (PL, PL1) preferentially emits pump radiation (LB, LB1a). If the evaluation of the fluorescence radiation (FL) takes place at third times (T3), then these second times (T2) are also preferably different from these third times (T3). Preferably, the light is infrared with a wavelength greater than the wavelength of the fluorescence radiation (FL) and greater than the wavelength of the pump radiation (LB, LB1a). KS2 is reflected compensation radiation. The reflector (RE) reflects the compensation radiation (KS) from the compensation radiation source (PLK) as reflected compensation radiation preferably towards the first radiation receiver (PD1), which then preferentially receives the compensation radiation (KS) as reflected compensation radiation (KS2).Instead of the reflector (RE), other optical functional elements can also be used for optical coupling of the first radiation receiver (PD1) with the compensation radiation source (PLK), for example, by deflecting and / or focusing / defocusing and / or scattering the compensation radiation (KS) in order to generate the reflected compensation radiation (KS2) from the compensation radiation (KS) and receive it through the first radiation receiver (PD1). Preferably, the reflected compensation radiation (KS2) is infrared light with a wavelength greater than the wavelength of the fluorescence radiation (FL) and greater than the wavelength of the pump radiation (LB, LB1a). A plastic bumper is an example of a vehicle component into which a sensor system (NVMS) can be integrated. Preferably, the component is made of a non-magnetic, i.e., preferably diamagnetic, material.Integration into other vehicle components such as steering wheel, mirror housings, seats, dashboard, battery, wiring harness, window regulator, airbag system, air conditioning, climate control flaps, control elements, navigation system, trunk, doors and flaps, filler necks, level measuring devices, locking systems, etc., is conceivable. λfl is the fluorescence radiation wavelength (λfl) of the fluorescence radiation (FL) of the quantum dot when irradiated with pump radiation (LB) of the pump radiation wavelength (λpmp); λks is the compensation radiation wavelength (λks) of the compensation radiation (KS) of the compensation radiation source (PLK); λpmp is the pump radiation wavelength (λpmp) of the pump radiation (LB, LB1a) of the pump radiation source (PL1); L0 coil. In the example of the... Figure 30 by means of the coil (L0) a magnetic flux density (B); L1 first coil. In the Figure 1The first coil (L1) is integrated as an example flat coil in the integrated microelectronic circuit (IC). L2 is the second coil. The second coil (L2) is the first coil of the second Helmholz coil pair (L2, L4). L3 is the third coil. The third coil (L3) is the second coil of the first Helmholz coil pair (L7, L3). L4 is the fourth coil. The fourth coil (L4) is the second coil of the second Helmholz coil pair (L2, L4). L5 is the fifth coil. The fifth coil (L5) is the first coil of the third Helmholz coil pair (L5, L6). L6 is the sixth coil. The sixth coil (L6) is the second coil of the third Helmholz coil pair (L5, L6). L7 is the seventh coil. The seventh coil (L7) is the first coil of the first Helmholz coil pair (L7, L3). L8 is the eighth coil. LBPump radiation emitted by the first pump radiation source (PL1).The wavelength of the pump radiation (LB) is preferably selected such that it excites the paramagnetic center (NV1) used to emit fluorescence radiation (FL). For example, in the case of an NV center in diamond as the paramagnetic center (NV1), the wavelength is preferably selected such that the pump radiation (LB) is green light. In this context, reference is made to the relevant literature and the cited unpublished German patent applications. Preferably, in the case of an NV center in diamond as the paramagnetic center (NV1), the pump radiation (LB) is green light with a wavelength of 500 nm to 600 nm, preferably 520 nm to 540 nm, preferably 530 nm ± 5 nm, which is shorter than the wavelength of the fluorescence radiation (FL, FL1) and shorter than the wavelength of the compensation radiation (KS). LB1aPump radiation emitted by the first pump radiation source (PL1).The pump radiation wavelength (λpmp) of the pump radiation (LB1a) is preferably selected such that the pump radiation (LB1a) can excite the quantum dot used, i.e., the paramagnetic center (NV1) or the plurality (NVC) of paramagnetic centers (NV1) or the NV center or the plurality of NV centers, to emit fluorescence radiation (FL) with a fluorescence wavelength (λfl). For example, in the case of an NV center in diamond as the paramagnetic center (NV1) or in the case of a plurality of NV centers in diamond as a plurality (NVC) of paramagnetic centers (NV1), the pump radiation wavelength (λpmp) is preferably selected such that the pump radiation (LB1a) is green light. In this context, reference is made to the relevant literature and the cited unpublished German patent applications.Preferably, the pump radiation (LB1a) in the case of an NV center in diamond as a paramagnetic center (NV1) or in the case of a plurality of NV centers in diamond as a plurality (NVC) of paramagnetic centers (NV1) is green light with a pump radiation wavelength (λpmp) of 500 nm to 600 nm, better 520 nm to 540 nm, better 530 nm + / - 5 nm, which is preferably shorter than the fluorescence wavelength (λfl) of the fluorescence radiation (FL, FL1) and often shorter than the compensation radiation wavelength (λks) of the compensation radiation (KS); LB1 reflected pump radiation. The reflector (RE) reflects the pump radiation (LB, LB1a) of the first pump radiation source (PL1) as reflected pump radiation (LB1b) preferentially in the direction of the paramagnetic center (NV1).Instead of the reflector (RE), other optical functional elements can also be used for optical coupling of the paramagnetic center (NV1) with the first pump radiation source (PL1), for example by deflecting and / or focusing and / or scattering the pump radiation (LB, LB1a) in order to generate the reflected pump radiation (LB1b) from the pump radiation (LB, LB1a) and receive it through the quantum dot, e.g., in the form of the paramagnetic center (NV1) or in the form of a plurality (NVC) of paramagnetic centers (NV1) or in the form of the NV center or in the form of a plurality of NV centers, and optionally excite the quantum dot to fluorescence by emitting fluorescence radiation (FL) with a fluorescence wavelength (λfl). Preferably, the reflected pump radiation (LB1b) is, in the case of an NV center in diamond, the paramagnetic center (NV1) or the NV center.In the case of a multitude of NV centers in diamond, a multitude (NVC) of paramagnetic centers (NV1) around green light with a wavelength of 500 nm to 600 nm, better 520 nm to 540 nm, better 530 nm + / - 5 nm, which is typically shorter than the fluorescence radiation wavelength (λfl) of the fluorescence radiation (FL, FL1) and often shorter than the compensation radiation wavelength (λks) of the compensation radiation (KS); LC compensation coil; LF1 first lead-frame island. This serves in the example of the . Figure 1 as a connection pin; LF2 second lead-frame island. This serves in the example as the Figure 1 as a die paddle for the integrated circuit (IC); LF3 third lead-frame island. In this example, this serves the purpose of Figure 1 as a die paddle for the pump radiation source (PL1); LF4 fourth lead-frame island. This serves in the example as the Figure 1as connection pin; LSL loudspeaker / acoustic output unit; LSL line / data bus for controlling the acoustic output unit (LS); LSP1 first air gap; LSP2 second air gap; LSP3 third air gap; LWL1 first optical fiber; LWL2 second optical fiber; µ C microcomputer; m symmetry point. The symmetry point (m) is the point to which the toothed rail in Figure 41 The magnetic flux (B) in the air gap of the slot sensor has just decreased to such an extent that, with further movement of the toothed rail from left to right, the flux density (B) increases again from this point. In this case, the axis of symmetry (ms) of the tooth of the toothed rail is located in Figure 41at the symmetry point of the slot sensor; M1 first multiplier; M2 second multiplier; MDS output data stream (MDS) of the prototypes recognized by the pattern recognition (NN) (prototype = prototypical feature vector of the database); ME membrane; MES exemplary measurement signal (MES) to illustrate when the receiver output signal (S0) of the first radiation receiver (PD1) is preferentially evaluated. In the Figures 3 and 4 An exemplary logical value of 1 for the measurement signal is intended to mean, for example, that the receiver output signal (S0) is being evaluated, and an exemplary logical value of 0 for the measurement signal is intended to mean that the receiver output signal (S0) of the first radiation receiver (PD1) is not being evaluated at these times. Measured value: Measured value generated, provided, and / or transmitted by the computer (µC); ms: Axis of symmetry (ms) of the tooth of the toothed rail in Figure 41; MS1 first measured signal; N magnetic north pole; NN pattern recognizer. The pattern recognizer (NN) is preferably a computer system that executes an algorithm for recognizing patterns in the vector output data stream (VDS) of the control and processing unit (IF). This can be, for example, a neural network, an HMM recognizer, or the like from pattern recognition; NNL line and / or data bus (NNL) for controlling the pattern recognizer (NN); NV1 at least one paramagnetic center (NV1) or at least one quantum dot in a sensor element. The quantum dot is preferably one paramagnetic center (NV1) or a plurality (NVC) of paramagnetic centers (NBV1), or one NV center or a plurality of NV centers. Preferably, the paramagnetic center (NV1) is one or more defect centers in a crystal, wherein the crystal represents the sensor element within the meaning of this document.Preferably, the crystal, i.e., the sensor element, is a diamond crystal. The defect center is preferably an NV center in a diamond crystal. For the purposes of this document, it can also be multiple defect centers in one crystal and / or an assembly of multiple crystals with multiple defect centers. For example, it can be multiple coupled NV centers in one diamond crystal and / or multiple diamonds with multiple NV centers, which preferably interact and are preferably coupled, e.g., through stimulated emission and absorption.Preferably, when using NV centers in diamond as paramagnetic centers (NV1), the sensor element is a diamond with a high NV density, and preferably a diamond artificially produced using high-pressure-high temperature, with a content of NV centers as paramagnetic centers (NV1) in a concentration range of 0.1 ppm to 500 ppm based on the atoms of the diamond. Besides the preferred combination of an NV center as the defect center and a diamond as the sensor element, one or more other defect centers in diamond can also be used. For example, an SiV center, an ST1 center, or an L2 center in diamond. The quantum dot (NV1) can optionally contain a mixture of these defect centers in diamond. Other crystals with different defect centers can also be used if they exhibit magnetic field-dependent fluorescence.NV2 second quantum dot (NV2) and / or second paramagnetic center (NV2) and / or NV center. It is at least one second paramagnetic center (NV2) or at least one second quantum dot (NV2) in a sensor element. Preferably, the paramagnetic center is one or more defect centers in a crystal, the crystal being the sensor element as defined in this document. Preferably, the crystal, i.e., the sensor element, is a diamond crystal. The defect center is preferably an NV center in a diamond crystal. For the purposes of this document, it can also be several defect centers in one crystal and / or an assembly of several crystals with several defect centers. For example, it can be several coupled NV centers in one diamond crystal and / or several diamonds with several NV centers, which, for example,The sensing element preferably interacts and is preferably coupled by stimulated emission and absorption. Preferably, when using NV centers in diamond as paramagnetic centers (NV2), the sensing element is a diamond with a high NV density, and preferably a diamond artificially produced using high-pressure-high-temperature processes, with a content of NV centers as second paramagnetic centers (NV2) in a concentration range of 0.1 ppm to 500 ppm based on the atoms of the diamond. Besides the preferred combination of an NV center as an impurity center and a diamond as the sensing element, one or more other impurity centers in diamond can also be used. For example, an SiV center, an ST1 center, or an L2 center in diamond. The second quantum dot (NV2) can optionally have these impurity centers mixed within the diamond.Other crystals with different defect centers can also be used if they exhibit magnetic field-dependent fluorescence. NVC: Plurality (NVC) of paramagnetic centers (NV1). Preferably, this is a cluster of paramagnetic centers (NV1) that can also comprise an entire crystal of a material of the sensor element; NVC2: Second plurality (NVC2) of second paramagnetic centers (NV2). Preferably, this is a cluster of second paramagnetic centers (NV2) that can also comprise an entire crystal of a material of the sensor element; NVMS: Sensor system.The proposed sensor system comprises at least one sensor element with at least one paramagnetic center (NV1), wherein the sensor system has means to generate a fluorescence emission (FL) of this paramagnetic center (NV1) typically depending on the respective magnetic flux density (B) at the location of the quantum dot of the sensor element in question, i.e., for example, at the location of the respective paramagnetic center (NV1) of the sensor element in question, and means to detect the respective fluorescence emission (FL) and means to process the value of the detected fluorescence emission (FL), in particular the intensity (Ifl) of the fluorescence emission (FL), and / or to transmit it to a higher-level system; NVMS1 first sensor system.The proposed first sensor system (NVMS1) comprises at least one sensor element with at least one quantum dot, i.e., for example, with at least one paramagnetic center (NV1), wherein the first sensor system has means to induce a fluorescence emission (FL) of this paramagnetic center (NV1), typically depending on the respective magnetic flux density (B) at the location of the respective quantum dot of the sensor element, i.e., for example, at the location of the respective paramagnetic center (NV1) of the sensor element, and means to detect the respective fluorescence emission (FL), for example, the intensity (Ifl) of the fluorescence emission (FL), and means to process the value of the detected fluorescence emission (FL) and / or transmit it to a higher-level system; NVMS2 second sensor system.The proposed second sensor system (NVMS2) comprises at least one sensor element with at least one quantum dot, i.e., for example, with at least one paramagnetic center (NV1), wherein the second sensor system (NVMS2) has means to induce a fluorescence emission (FL) of this paramagnetic center (NV1), typically depending on the respective magnetic flux density (B) at the location of the respective quantum dot of the sensor element in question, i.e., for example, at the location of the respective paramagnetic center (NV1) of the sensor element in question, and means to detect the respective fluorescence emission (FL), for example, the intensity (Ifl) of the fluorescence emission (FL), and means to process the value of the detected fluorescence emission (FL) and / or transmit it to a higher-level system; NVMS3 third sensor system.The proposed third sensor system (NVMS3) comprises at least one sensor element with at least one quantum dot, i.e., for example, with at least one paramagnetic center (NV1), wherein the third sensor system (NVMS3) has means to induce a fluorescence emission (FL) of this paramagnetic center (NV1), typically depending on the respective magnetic flux density (B) at the location of the respective quantum dot of the sensor element in question, i.e., for example, at the location of the respective paramagnetic center (NV1) of the sensor element in question, and means to detect the respective fluorescence emission (FL), for example, the intensity (Ifl) of the fluorescence emission (FL), and means to process the value of the detected fluorescence emission (FL) and / or transmit it to a higher-level system; NVMS4 fourth sensor system.The proposed fourth sensor system (NVMS4) comprises at least one sensor element with at least one quantum dot, i.e., for example, with at least one paramagnetic center (NV1), wherein the fourth sensor system (NVMS4) has means for generating a fluorescence emission (FL) of this paramagnetic center (NV1), typically depending on the respective magnetic flux density (B) at the location of the respective quantum dot of the sensor element in question, i.e., e.g., at the location of the respective paramagnetic center (NV1) of the sensor element in question, and means for detecting the respective fluorescence emission (FL), for example, the intensity (Ifl) of the fluorescence emission (FL), and means for processing the value of the detected fluorescence emission (FL) and / or transmitting it to a higher-level system; OE opening in the yoke (J1) of the current measuring device of the . Figure 26(Flux-Gate); Object; OFFset device. The offset device adds a typically positive DC component to the feedback signal (S6), thus generating the offset feedback signal (S7); OP1 first operational amplifier; outermost output signal; out" second output signal; P1 first periodicity; P2 second periodicity; PCB-printed circuit; PD1 first radiation receiver. Preferably, this is a photosensitive component, for example, a photodiode and / or a PIN diode and / or an avalanche photodiode and / or a SPAD photodiode or the like. The first radiation receiver (PD1) may include further amplifiers and / or filters and / or other signal conditioning, which are not discussed further here for the sake of simplicity. It can therefore also be a radiation receiver system; PD2 second radiation receiver.Preferably, this is a light-sensitive component, for example, a photodiode and / or a PIN diode and / or an avalanche photodiode and / or a SPAD photodiode or the like. The second radiation receiver (PD2) may include further amplifiers and / or filters and / or other signal conditioning, which are not discussed further here for the sake of simplicity. It can therefore also be a radiation receiver system; permanent magnetic field. The permanent magnetic field is preferably generated by one or more permanent magnets (PM1, PM2). The permanent magnetic flux B generated, for example, by the one or more permanent magnets (PM1, PM2) acts summatively on the quantum dot (NV1) or the paramagnetic center (NV1) or the NV center (NV1), together with, for example, an external magnetic field; PL pump radiation source. The pump radiation source (PL) excites the quantum dot (NV1), orThe paramagnetic center or NV center (NV1) emits fluorescence radiation (FL) depending on the magnetic flux density (B) at the location of the quantum dot (NV1), the paramagnetic center, or the NV center (NV1). In the case of using NV centers in diamond as quantum dots or as paramagnetic centers (NV1), it is preferably an LED and / or a laser with a wavelength of 535 nm. A wavelength range of typically 500 nm to 600 nm is conceivable and encompassed by the claims when using NV centers in diamond as quantum dots or as paramagnetic centers (NV1); PL1 first pump radiation source (PL1). The first pump radiation source (PL1) excites the quantum dot (NV1), or the paramagnetic center, or the NV center (NV1) to emit fluorescence radiation (FL) depending on the magnetic flux density (B) at the location of the quantum dot (NV1), or the paramagnetic center, or NV center.of the NV center (NV1). In the case of using NV centers in diamond as quantum dots or as paramagnetic centers (NV1), it is preferably an LED and / or a laser with a wavelength of 535 nm. A wavelength range of typically 500 nm to 600 nm is conceivable in the case of using NV centers in diamond as quantum dots or as paramagnetic centers (NV1) and is covered by the claims; PLK compensation radiation source. Preferably, it is an infrared LED, particularly preferably with a wavelength greater than 800 nm; PM1 first permanent magnet; PM2 second permanent magnet; PM3 third permanent magnet; PM4 fourth permanent magnet; RE reflector or other suitable optical functional element or other optical system for directing at least a part of the pump radiation (LB1a) as reflected pump radiation (LB1b) in the direction of the paramagnetic center (NV1).RG controller; ROfluidic line, for example a pipe or a container or a reactor or an electrochemical device or a boiler or a battery container or an accumulator container or a fuel cell or an electrolysis cell or a microfluidic or fluidic functional element, such as a dweller or a heat exchanger or an atomizer or a nozzle or a mixer, etc. The fluidic line (RO) can also be a borehole (DH). In that case, the proposed sensor system (NVMS) can be used for reservoir exploration.; S Magnetic South Pole (S); S0 Receiver Output Signal; S1 Reduced Receiver Output Signal; S3 Filter Input Signal; S3' Additional Filter Input Signal; S4 Filter Output Signal; S4' Additional Filter Output Signal; S5 Transmit Signal; S5' Orthogonal Reference Signal; S6 Feedback Signal; S6' Additional Feedback Signal; S7 Offset Feedback Signal; S8 Complex Feedback Signal; S9 Operating Point Control Signal; SMBG Symbol Generator; SO Probe. The probe (SO) is connected to a cable (KA) in . Figure 74 lowered into the borehole (DH). The cable (KA) can contain one or more optical fibers. The measuring system can be designed so that, according to the Figures 28 to 30The sensor element, for example the diamond crystal, containing the quantum dot (NV1), i.e., the paramagnetic center or the NV center (NV1), is separated from the other sensor system components. This has the advantage that the evaluation electronics (e.g., the integrated circuit (IC)) are not exposed to the extreme conditions in the borehole (DH). However, if these components are adequately protected, they can also be lowered into the borehole (DH) as part of the probe. In this case, the probe (SO) then has not just a sensor element with a quantum dot (NV1), but an entire sensor system (NVMS). In this case, the energy is preferably supplied via the cable (KA). The measurement results are then signaled by the sensor system (NVMS) to an evaluation unit on the surface, for example, via the cable (KA) or wirelessly.The probe (SO) can include actuators such as coils, motors, radiation sources, heaters, cooling devices, magnets, and the like. The probe (SO) can also include additional detectors. The probe (SO) can include a computing unit for controlling these actuators, acquiring detector readings, signaling status and measurement data to a higher-level computer system on the surface, and receiving control data from it. Coil drivers. The coil drivers typically include the control logic and output stages for driving the Helmholtz coils (L2 to L7); SQ power source; SS1 control signal line; STG control unit; SW1 first threshold; SW2 second threshold; T1 first times. At the first times (T1), the first pump radiation source (PL1) is preferentially active. This means that the first pump radiation source (PL1) emits pump radiation (LB, LB1a).If a compensation radiation source (PLK) is used, it is preferably inactive during the first times (T1). This means that the compensation radiation source (PLK) preferably does not emit any compensation radiation (KS) during these first times (T1). Evaluation of the receiver output signal (S0) by the correlator (CORR) is possible at the first times (T1) in some configurations. In this case, a first optical filter (F1) is necessary if the first radiation receiver (PD1) is sensitive to pump radiation (LB, LB1a, LB1b) to shield the first radiation receiver (PD1) from the pump radiation (LB, LB1a, LB1b). The first times (T1) are preferably different from the third times (T3) and the second times (T2). T1'shifted first times.The intensity of the fluorescence radiation (FL) received by the first radiation receiver (PD1) in the form of the receiver output signal (S0) appears in the receiver output signal (S0) at shifted first times (T1'), which are shifted by a fluorescence phase shift time (ΔTFL) relative to the first times (T1). At the first times (T1), the pump radiation source (PL1) is preferentially active. This means that the first pump radiation source (PL1) emits pump radiation (LB, LB1a). The quantum dot (NV1), the paramagnetic center (NV1), or the NV center (NV1) is struck by at least a portion of the pump radiation (LB, LB1a) and emits the fluorescence radiation (FL) with a delay of the fluorescence phase shift time (ΔTFL). In some configurations, evaluation of the receiver output signal (S0) by the correlator (CORR) is possible at the shifted first times (T1').In this case, a first optical filter (F1) is typically necessary if the first radiation receiver (PD1) is sensitive to pump radiation (LB, LB1a, LB1b) in order to shield the first radiation receiver (PD1) from the pump radiation (LB, LB1a, LB1b). The shifted first times (T1') preferably overlap with the first times (T1) and the second times (T2). This may not be the case if the first times (T1) are shorter than the fluorescence phase shift time (ΔTFL). At the second times (T2), the first pump radiation source (PL1) is preferably inactive. This means that the first pump radiation source (PL1) does not emit any pump radiation (LB, LB1a). If a compensation radiation source (PLK) is used, it is preferably inactive at the second times (T2). This means that the compensation radiation source (PLK) preferably does not emit any compensation radiation (KS) during these second times (T2).Evaluation of the receiver output signal (S0) by the correlator (CORR) is possible at the second time points (T2) in some configurations. In this case, a first optical filter (F1) is not necessary to shield the first radiation receiver (PD1) from the pump radiation (LB, LB1a, LB1b), since no pump radiation (LB, LB1a, LB1b) should then be present in the sensor system (NVMS). Therefore, such sensor systems (NVMS) are less expensive but less sensitive. They operate using the afterglow of the quantum dots (NV1) or the paramagnetic centers (NV1) or the NV centers (NV1). The second time points (T2) are preferably different from the first time points (T1) and the third time points (T3). At the third time points (T3), the first pump radiation source (PL1) is preferably inactive. This means that the first pump radiation source (PL1) does not emit any pump radiation (LB, LB1a).If a compensation radiation source (PLK) is used, it is preferentially active during the third time periods (T3). This means that the compensation radiation source (PLK) preferentially emits compensation radiation (KS) during these second time periods (T2). Evaluation of the receiver output signal (S0) by the correlator (CORR) is not possible during the third time periods (T3) because the afterglow of the quantum dots (NV1), paramagnetic centers (NV1), or NV centers (NV1) has already decayed. In this case, the use of compensation radiation (KS) with a compensation radiation wavelength (λks) that is not different from the fluorescence radiation wavelength (λfl) of the fluorescence radiation (FL) or the pump radiation wavelength (λpmp) of the pump radiation (LB, LB1a) is possible. This is not recommended. The third times (T3) should preferably be different from the first times (T1) and the second times (T2). TPFilter.The filter can preferably be designed as a low-pass filter such that it is a linear filter with preferably high gain. Preferably, it already blocks the frequency of the transmitted signal (S0). All higher frequencies are preferably also filtered out. TR1 is the first transistor of the exemplary push-pull stage; TR2 is the second transistor of the exemplary push-pull stage; US is the ultrasonic transmitter or ultrasonic transmission system. The ultrasonic transmitter (USS) emits an exemplary acoustic transmission wave (ASW), which is modified, for example, by an object (Obj) or in the transmission channel to an acoustic wave (AW) and then passed through the proposed microphone ( ). Figure 21) is received. Instead of an ultrasonic transmitter (USS), normal loudspeakers or infrasound transmitters can also be used. VDD Operating voltage line (VDD) at operating voltage potential; VDS Vectorial output data stream (VDS) of the control and processing unit (IF); WA Housing wall; WI Winch. The winch (WI) may be motorized; X1 First body; X2 Second body; Toothed rail. Device with a modulated surface or edge such that, depending on the positioning of the toothed rail, the magnetic flux (B) at the location of the quantum dot (NV1), the paramagnetic center (NV1), or the NV center (NV1) is changed. The toothed rail has protrusions—for example, teeth—and depressions—for example, windows. List of cited works

[0307] Alexander M. Zaitsev, "Optical Properties of Diamond", published by Springer Verlag Bernd Burchard et. Al., "NM Scale Resolution Single Ion Implantation Into Diamond for Quantum Dot Production", Diamond 2004 Conference Riva del Garda B. Burchard, J. Meijer, M. Domhan, C. Wittmann, T. Gaebel, I. Popa, F. Jelezko, and J. Wrachtrup, "Generation of single color centers by focused nitrogen implantation" Appl. Phys. Lett. 87, 261909 (2005); https: / / doi.org / 10.1063 / 1.2103389 Küpfmüller, Kohn, "Theoretische Elektrotechnik und Elektronik" Springer 1993 Chapter 3 Francisco Herrera, Francisco Charte, Antonio J. Rivera, Maria J. del Jesus, "Multilabel Classification: Problem Analysis, Metrics and Techniques", Springer, April 22, 2018, ISBN-13: 978-3319822693 referenced Charu C. Aggarwal, "Neural Networks and Deep Learning: A Textbook" Springer; 1st edition, September 13, 2018 C. Wang, C. Kurtsiefer, H. Weinfurter, B.Burchard, "Single photon emission from SiV centres in diamond produced by ion implantation" J. Phys. B: At. Mol. Opt. Phys., 39(37), 2006 Björn Tegetmeyer, "Luminescence properties of SiV-centers in diamond diodes" Promotionsschrift, Universität Freiburg, 30.01.2018 Carlo Bradac, Weibo Gao, Jacopo Forneris, Matt Trusheim, Igor Aharonovich, "Quantum Nanophotonics with Group IV defects in Diamond", DOI: 10.1038 / s41467-020-14316-x, arXiv:1906.10992 Rasmus Høy Jensen, Erika Janitz, Yannik Fontana, Yi He, Olivier Gobron, Ilya P. Radko, Mihir Bhaskar, Ruffin Evans, Cesar Daniel Rodriguez Rosenblueth, Lilian Childress, Alexander Huck, Ulrik Lund Andersen, "Cavity-Enhanced Photon Emission from a Single Germanium-Vacancy Center in a Diamond Membrane", arXiv:1912.05247v3 [quant-ph], 25 May 2020 Takayuki Iwasaki, Yoshiyuki Miyamoto, Takashi Taniguchi, Petr Siyushev, Mathias H. Metsch, Fedor Jelezko, Mutsuko Hatano, "Tin-Vacancy Quantum Emitters in Diamond", Phys. Rev. Lett.119, 253601 (2017), DOI: 10.1103 / PhysRevLett.119.253601, arXiv:1708.03576 [quant-ph] Matthew E. Trusheim, Noel H. Wan, Kevin C. Chen, Christopher J. Ciccarino, Ravikar, Ravikar, Eric Maraldishan, Marlaman, Sundararaman. Bersin, Michael Walsh, Benjamin Lienhard, Hassaram Bakhru, Prineha Narang, Dirk Englund, “Lead-Related Quantum Emitters in Diamond” Phys. Freeze. B 99, 075430 (2019), DOI: 10.1103 / PhysRevB.99.075430, arXiv:1805.12202 [quant-ph] OF 10 2018 127 394 A1, OF 10 121 028.3, DE 10 2019 121 137.9, DE 10 2019 130 114.9, DE 10 2020 119 414.5, PCT / DE 2020 / 100 648, PCT / DE 2020 / DE 2028 2017.

Claims

1. A microphone - comprising a quantum dot (NV1), in particular a paramagnetic center (NV1), or in particular with a plurality (NVC) of paramagnetic centers (NV1) and / or with an NV center or with a plurality of NV centers, - comprising a magnetic field-modifying membrane (ME) for coupling the signal of the fluorescence radiation (FL) from the quantum dot (NV1) to an incident acoustic wave (AW), and - comprising means - for detecting the fluorescence radiation (FL) from the quantum dot (NV1), and - for converting the signal of the fluorescence radiation (FL) from the quantum dot (NV1) into a microphone output signal or a functionally equivalent signaling, wherein converting the signal of the fluorescence radiation (FL) from the quantum dot (NV1) includes converting the temporal evolution of the values of the intensity (Ifl) of the fluorescence radiation (FL) from the quantum dot (NV1) and / or converting the temporal evolution of the value of the fluorescence phase shift time (ΔTFL) of the fluorescence radiation (FL) from the quantum dot (NV1), - wherein the microphone output signal or the functionally equivalent signaling depends on the fluorescence radiation (FL) from the quantum dot (NV1), characterized in that - the membrane (ME) comprises a ferromagnetic sub-device.

2. A method for distance measurement or for other surveying of an object (Obj), comprising the steps of - providing one or more microphones according to claim 1; - providing of one or more sound transmitters, in particular one or more ultrasonic transmitters (USS); - emitting a sound wave, in particular an acoustic transmission wave (ASW), via the one or more sound transmitters, in particular one or more ultrasonic transmitters (USS); - modifying a sound wave, in particular an acoustic transmission wave (ASW), into a modified sound wave, in particular an acoustic wave (AW), by one or more objects (Obj) or by an acoustic transmission path between the transmitting sound transmitters and a microphone of the, if applicable, multiple microphones at the end of the acoustic transmission path; - receiving the respective modified sound wave, in particular the acoustic wave (AW), by at least this microphone of the, if applicable, multiple microphones; - processing the microphone output signal from said microphones or said microphones at the end of the acoustic transmission path and inferring one or more characteristics of the one object (Obj) and / or one or more characteristics of the multiple objects and / or one or more characteristics of the transmission path, in particular by a signal evaluation device, - wherein inferring one or more characteristics of the one object (Obj) or the multiple objects may include inferring one of the following characteristics of the one object or the multiple objects: • distance of one or more of the objects (Obj) from the sound transmitter and / or the microphone; • reflectivity of one or more of the objects (Obj); • object class of one or more of the objects (Obj); • integrity of one or more of the objects (Obj); • internal acoustic structure of one or more of the objects (Obj); • orientation of one or more of the objects (Obj); • direction of motion of one or more of the objects (Obj); • motion pattern of one or more of the objects (Obj); • flow velocity and / or flow direction of one or more of the objects (Obj); • density of one or more of the objects (Obj); • material of one or more of the objects (Obj); • temperature of one or more of the objects (Obj); - and wherein inferring one or more characteristics of the transmission path may include, in particular, one of the following characteristics of the transmission path: • length of the transmission path between the sound transmitter and the microphone; • attenuation in the transmission path; • delay in the transmission path; • classification of the transmission path; • integrity of the transmission path; • internal acoustic structure of the transmission path; • orientation of the main intensity of the transmitted sound wave in the transmission path; • direction of motion of one or more of the objects (Obj) and / or of media in the transmission path; • motion pattern of one or more of the objects (Obj) and / or one or more media or fluids in the transmission path; • flow velocity and / or flow direction of one or more of the objects (Obj) and / or media and / or fluids in the transmission path; • density of one or more of the objects (Obj) and / or media and / or fluids in the transmission path; • material of one or more of the objects (Obj) and / or media and / or fluids in the transmission path; • temperature of one or more of the objects (Obj) and / or media and / or fluids in the transmission path;3. A vehicle or mobile device - comprising a microphone according to claim 1, - wherein the quantum dot (NV1) has a quantum dot state, and - comprising means for detecting the quantum dot state, - wherein the quantum dot state depends on the distance between the vehicle (Kfz) or the mobile device and an object (Obj).

4. The vehicle or mobile device - comprising a microphone according to claim 1, - wherein the quantum dot (NV1) has a quantum dot state, and - comprising means for detecting the quantum dot state, - wherein the quantum dot state of the quantum dot depends on the speed of the vehicle (Kfz) or the mobile device.

5. The vehicle or mobile device according to claim 4 - wherein the vehicle (Kfz) or the mobile device comprises a control device configured to regulate or control at least one operating parameter of the vehicle (Kfz) or the mobile device, namely its speed or acceleration as a function of the fluorescence radiation (FL).