Atomic force microscope

The AFM design with a deformable sample holder and integrated detector improves spatial resolution and reduces costs by eliminating the need for sensor-equipped probes, facilitating operation in various media.

EP3999860B1Active Publication Date: 2026-07-08PARIS SCI & LETTRES +3
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Patent Information

Application Number
EP2020743111
Authority / Receiving Office
EP · EP
Patent Type
Patents
Current Assignee / Owner
Priority Date
2019-07-16
Filing Date
2020-07-16
Publication Date
2026-07-08
Estimated Expiration
2040-07-16

AI Technical Summary

Technical Problem

Existing atomic force microscopes (AFMs) face limitations in spatial resolution due to probe size, mechanical properties, and fragility, and are complex to operate in environments other than air, leading to high costs and frequent probe replacement.

Method used

An AFM design featuring a deformable sample holder with a macroscopic size and high bending stiffness, integrated with a detector to measure probe interactions, allowing for probe-less operation and simplified operation in various media.

Benefits of technology

Enhances spatial resolution and reduces costs by reusing the sample holder, enabling efficient surface evaluation in diverse environments without sensor-equipped probes.

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Abstract

The present invention relates to an atomic force microscope for evaluating a surface of a sample, comprising a sample holder, having a first zone suitable for receiving the sample mounted in a stationary manner, a probe having a tip able to be positioned facing the surface of the sample, the microscope being configured to allow an adjustment of a position of the tip relative to the surface, and a support, the sample holder having at least one second zone, separate from the first zone and stationary relative to the support, the sample holder being deformable so as to allow a relative movement of the first zone with respect to the second zone, and the microscope comprising a detector able to detect a movement of the first zone relative to the second zone.
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Citation Information

Patent Citations

  • Deformable object`s e.g. lever, characteristics e.g. mechanical characteristics, measuring method for micro or nanofabrication process metrology field, involves resonance frequency of oscillator contacting object

    FR2887986A1

  • Atomic force microscope for small samples having dual-mode operating capability

    US5253516A