Method for manufacturing a substrate for radio frequency applications

Abstract

Title: Method for manufacturing a substrate for radio frequency applications. The invention relates to a substrate (1) for radio frequency applications comprising, stacked along the z-axis, - a highly resistive support layer (10) having an electrical resistivity greater than or equal to 500 Ω.cm, - a crystalline electron trapping layer (11) having a surface dislocation density (D) greater than or equal to 10⁶ cm⁻², - an oxide layer (12) on the electron trapping layer (11), - a layer of interest (13) on the oxide layer (12). The invention also relates to a method for manufacturing such an RF substrate. Figure for the abstract: Fig. 1E