Turbomolecular vacuum pump and deposit monitoring method

Abstract

A turbomolecular vacuum pump (1) comprising a stator (2), a rotor (3) configured to rotate within the stator (2) so as to drive the gases to be pumped into a gas flow path interposed between the stator (2) and the rotor (3), and at least one capacitive deposition sensor (30), characterized in that a sensing head of the capacitive deposition sensor (30) is arranged in the stator (2) at the rear of a dielectric interface (34) of the capacitive deposition sensor (30) forming a portion of the internal wall in the flow path of the pumped gases. (Shorthand figure: Figure 1)

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