Micromechanical force measuring unit

Abstract

A micromechanical force measuring unit (10) comprising: a frame (1), a swinging part (2) extending along the indentation direction (Z) and provided with a socket (21) at a front end that mates with a nanoindentation head (40), two front springs (31) and two rear springs (32) connecting the swinging part (2) to the frame (1), wherein the two front springs (31) are connected to the socket (21) closer to the swinging part (2) than the two rear springs (32), wherein the two front springs (31) are arranged opposite each other on two opposite sides of the swinging part (2), and the two rear springs (32) are arranged opposite each other on two opposite sides of the swinging part (2), wherein the frame (1), the swinging part (2), the two front springs (31) and the two rear springs (32) are arranged in one piece is designed, characterized in that the two front springs (31) and the two rear springs (32) each consist of a plurality of spring plates of equal size and parallel to each other,the extension of the spring plates perpendicular to the indentation direction (Z) is at least five times their extension in the indentation direction (Z), the spring plates are located one behind the other along the indentation direction (Z) and are connected to each other in an accordion-like manner along their edges on opposite sides, alternating between plates, and the individual springs (31, 32) are connected at one end to the swing part (2) freely moving in the indentation direction (Z) inside the frame (1), and at the other end they are rigidly attached to the frame (1).,