Device and method for projecting a plurality of charged particle beams
IL328408APending Publication Date: 2026-07-01ASML NETHERLANDS BV +8
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Patent Information
- Application Number
- IL328408
- Authority / Receiving Office
- IL · IL
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-11-21
- Filing Date
- 2026-05-13
- Publication Date
- 2026-07-01
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