Method of peeling epilayers

IL66801A0Inactive Publication Date: 1982-12-31COOK MELVIN S

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Patent Information

Application Number: IL66801
Authority / Receiving Office: IL · IL
Patent Type: Applications
Current Assignee / Owner
Priority Date: 1981-12-21
Filing Date: 1982-09-14
Publication Date: 1982-12-31
Estimated Expiration: Not applicable · inactive patent

Application Information

Patent Timeline

21 Dec 1981

Priority

14 Sep 1982

Application

IL66801

31 Dec 1982

Publication

IL66801A0

IPC: C30B33/00; H01L31/04; H10P14/24

CPC: C30B33/00; Y10S117/915

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