Improved Manufacturing Process for a Microelectromechanical System with Multiple Cavities at Different Pressures and Related Microelectromechanical System
IT202500003309A1Pending Publication Date: 2026-08-20STMICROELECTRONICS INT NV
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Patent Information
- Application Number
- IT102025000003309
- Authority / Receiving Office
- IT · IT
- Patent Type
- Applications
- Current Assignee / Owner
- Filing Date
- 2025-02-20
- Publication Date
- 2026-08-20
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