Rectifier board

JP1829131SActive Publication Date: 2026-06-15NUFLARE TECH INC
0 Cites 0 Cited by

Patent Information

Application Number
JP2025024205D
Authority / Receiving Office
JP · JP
Patent Type
Designs
Current Assignee / Owner
Filing Date
2025-12-01
Publication Date
2026-06-15
Estimated Expiration
2050-12-01
Patent Text Reader

Abstract

This item is a rectifier plate installed in semiconductor manufacturing equipment and the like to suppress the accumulation of by-products and other substances on the liner components inside the furnace.
Need to check novelty before this filing date? Find Prior Art