Rectifier board
JP1829131SActive Publication Date: 2026-06-15NUFLARE TECH INC
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Patent Information
- Application Number
- JP2025024205D
- Authority / Receiving Office
- JP · JP
- Patent Type
- Designs
- Current Assignee / Owner
- Filing Date
- 2025-12-01
- Publication Date
- 2026-06-15
- Estimated Expiration
- 2050-12-01
Abstract
This item is a rectifier plate installed in semiconductor manufacturing equipment and the like to suppress the accumulation of by-products and other substances on the liner components inside the furnace.
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