Method for manufacturing a liquid dispensing head

Abstract

The present invention provides a piezoelectric actuator with high actuator position accuracy and reduced power concentration, a liquid discharge head, and a method for manufacturing the liquid discharge head. [Solution] The piezoelectric actuator according to the embodiment has a first groove and a plurality of actuator rows arranged on both sides of the first groove. The actuator row has a piezoelectric element having a plurality of stacked piezoelectric bodies and a plurality of internal electrodes, and a plurality of second grooves arranged between adjacent plurality of piezoelectric elements, and a groove-internal electrode layer that conducts to the internal electrodes constituting a common electrode is formed at the bottom of the first groove.

Claims

1. It has a first groove and a plurality of actuator rows arranged on both sides of the first groove, The actuator array comprises a piezoelectric element having a plurality of stacked piezoelectric bodies and a plurality of internal electrodes, and a plurality of second grooves disposed between adjacent plurality of the piezoelectric elements. A piezoelectric actuator is provided in which a groove-internal electrode layer is formed at the bottom of the first groove, which is electrically connected to the internal electrode constituting a common electrode.

2. The piezoelectric actuator according to claim 1, further comprising a wiring electrode layer connected to the groove electrode layer and extending to the side of the piezoelectric element opposite to the side where the first groove is located.

3. The piezoelectric actuator according to claim 2, wherein the wiring electrode layer has a surface electrode layer formed on the surface of the base or an internal electrode layer formed within the piezoelectric element.

4. A piezoelectric actuator according to any one of claims 1 to 3, A support member for supporting the piezoelectric actuator, A diaphragm that vibrates in the thickness direction due to vibration in the stacking direction of the piezoelectric element, It has a plurality of pressure chambers facing the diaphragm, The plurality of second grooves extend in a second direction perpendicular to or intersecting the first direction, which is the stacking direction, and divide each actuator row into a plurality of piezoelectric elements arranged in a third direction perpendicular to or intersecting the first and second directions. The first groove extends in the third direction, A liquid dispensing head wherein the depth dimension of the first groove along the first direction is deeper than the depth dimension of the second groove, and the dimension of the first groove in the depth direction is five times or less the dimension in the width direction perpendicular to the depth direction of the groove.

5. A laminated piezoelectric member, in which multiple piezoelectric layers and an internal electrode layer are stacked in a first direction, is joined to a base. Multiple second grooves are formed in the laminated piezoelectric member along a second direction perpendicular to or intersecting the first direction, thereby dividing one side of the laminated piezoelectric member in the first direction into multiple sections in the third direction. A first groove is formed in the laminated piezoelectric member along a third direction perpendicular to or intersecting the first and second directions, thereby dividing the laminated piezoelectric member into multiple parts in the second direction. A method for manufacturing a liquid dispensing head, comprising forming an in-groove electrode layer on the bottom surface of the first groove, which is conductive to the internal electrode layer that serves as a common electrode for a plurality of divided piezoelectric elements.

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