Ozone generator

Abstract

The present invention provides an ozone generator capable of detecting ozone gas concentrations of 1 ppm or less while suppressing detection errors during rapid changes in humidity, and controlling the operation of the ozone generator based on the detection results. [Solution] The ozone generator 100 includes a control unit 80 that controls the ozone generator 3 and an ozone sensor 10 that detects the concentration of ozone gas. The ozone sensor 10 has a gas permeable part (e.g., a substrate 13), a working electrode 14, a counter electrode 15, and an electrolyte (e.g., an electrolyte solution 20) that contacts the working electrode 14 and the counter electrode 15, and the fluctuation range of the output current when dry air with a dew point temperature of -40°C is passed through the gas permeable part in an environment with a temperature of 23°C and a humidity of 50%, is 2 μA or less. The control unit 80 controls the operation of the ozone generator 3 based on the detection result of the ozone sensor 10.

Claims

1. A passage connecting the intake port and the exhaust port, Ozone generators that produce ozone, A control unit for controlling the ozone generator, An ozone generator comprising an ozone sensor for detecting the concentration of ozone gas, The ozone sensor comprises a gas permeable section with air permeability, a working electrode in contact with the gas that has permeated the gas permeable section, a counter electrode, and an electrolyte in contact with the working electrode and the counter electrode, and is an electrochemical ozone sensor for detecting ozone gas with a concentration of 1 ppm or less, wherein the fluctuation range of the output current is 2 μA or less when dry air with a dew point temperature of -40°C is passed through the gas permeable section in an environment with a temperature of 23°C and a humidity of 50%, The control unit controls the operation of the ozone generator based on the detection results of the ozone sensor. Ozone generator.

2. A blower that sends gas into the flow path toward the exhaust port, It comprises a second blower provided separately from the aforementioned blower, The second blower is capable of blowing gas taken in from outside the ozone generator toward the gas permeable portion of the ozone sensor. The ozone generator according to claim 1.

3. The ozone sensor is positioned upstream of the ozone generator. The ozone generator according to claim 1.

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