Vibration actuator and vibration display device

Abstract

To achieve a thinner design while outputting a variety of suitable vibrations to provide diverse tactile sensations. [Solution] The device comprises a first and second planar body made of magnetic material and arranged opposite each other; a third planar body made of magnetic material and arranged between the first and second planar bodies; a plate-shaped electromagnet portion having a magnetic pole portion, a flat plate-shaped coil surrounding the magnetic pole portion, and a substrate portion connected to the coil, and arranged on the other planar body opposite one of the first and third planar bodies; another electromagnet portion configured similarly to the electromagnet portion, and arranged on the other planar body opposite one of the second and third planar bodies; and an elastic support portion that supports the third planar body so as to be movable in the opposite direction relative to the first planar body. The magnetic force generated by energizing the multiple coils causes at least two of the first, second, and third planar bodies to be displaced and vibrate so as to be closer together.

Description

Technical Field

[0001] The present invention relates to a vibration actuator and a vibration presentation device including the same.

Background Art

[0002] Conventionally, a configuration has been known in which vibration is imparted by a vibration actuator as a contact operation feeling (a feeling of contacting and operating) to the fingertip or the like of an operator who has contacted a display screen displayed on a touch panel which is a sensing panel (Patent Document 1).

[0003] Patent Document 1 discloses a portable terminal device in which a vibration actuator is attached to the back surface of a touch panel via a vibration transmission portion. In the vibration actuator of this device, a mover is disposed in a housing fixed to the vibration transmission portion so as to be reciprocally movable along a guide shaft disposed perpendicular to the touch panel. The vibration actuator imparts vibration to the fingertip contacting the touch panel via the vibration transmission portion by causing the mover to collide with the housing in response to an operation on the touch panel.

Prior Art Documents

Patent Documents

[0004]

Patent Document 1

Summary of the Invention

Problems to be Solved by the Invention

[0005] By the way, in the vibration actuator of Patent Document 1, since the guide shaft for guiding the reciprocating movement of the mover is disposed perpendicular to the display surface of the touch panel, the device itself has a length perpendicular to the display surface, that is, a thickness. Therefore, in this configuration, a layout space of a predetermined thickness is required on the back surface side of the touch panel, and there is a problem that the portable terminal device including the touch panel itself becomes large and it is difficult to miniaturize and thin down.

[0006] As such devices become smaller and thinner, there is a desire for the vibration actuators themselves to be made smaller and thinner, as well as for the users operating the devices to be provided with a variety of operating sensations through various vibrations, including larger, high-amplitude vibrations.

[0007] The objective of the present invention is to provide a vibration actuator and vibration presentation device that can output a variety of suitable vibrations while achieving a thin profile, thereby providing a diverse range of tactile sensations. [Means for solving the problem]

[0008] The vibration actuator of the present invention is A magnetic material comprising a first planar body and a second planar body arranged opposite each other, A third planar body containing a magnetic material is disposed between the first planar body and the second planar body, A plate-shaped electromagnet portion having a magnetic pole portion, a flat plate-shaped coil surrounding the magnetic pole portion, and a substrate portion connected to the coil, and positioned on the other planar body opposite one of the first planar body and the third planar body, Another electromagnet portion configured similarly to the electromagnet portion, wherein the other electromagnet portion is positioned on the other planar body opposite to one of the planar bodies of the second planar body and the third planar body, An elastic support portion that supports the third planar body so as to be movable relative to the first planar body in an opposing direction, Equipped with, The configuration is such that at least two of the first, second, and third planar bodies are displaced and vibrated in proximity to each other by the magnetic force generated by energizing the multiple coils.

[0009] The vibration presentation device of the present invention is The vibration actuator with the above configuration is placed on the back surface of the operating surface and is driven in response to operations on the operating surface. [Effects of the Invention]

[0010] According to the present invention, while achieving thinning, various suitable vibrations are output to impart a diverse operating feeling.

Brief Description of the Drawings

[0011] [Figure 1] FIG. 1 is an external perspective view of a vibration actuator according to Embodiment 1 of the present invention. [Figure 2] FIG. 2 is a sub-assembly view of the same vibration actuator. [Figure 3] FIG. 3 is a partially exploded view of the same vibration actuator. [Figure 4] FIG. 4 is a cross-sectional view taken along line A-A of FIG. 1. [Figure 5] FIG. 5 is a schematic cross-sectional view showing the main part configuration of the vibration actuator. [Figure 6] FIG. 6 is a schematic cross-sectional view showing an example of the operation of the main part configuration of the vibration actuator during energization. [Figure 7] FIG. 7 is a schematic cross-sectional view showing an example of the operation of the main part configuration of the vibration actuator during energization. [Figure 8] FIG. 8 is a schematic cross-sectional view showing an example of the operation of the main part configuration of the vibration actuator during energization. [Figure 9] FIG. 9 is a schematic cross-sectional view showing an example of the operation of the main part configuration of the vibration actuator during energization. [Figure 10] FIGS. 10A, 10B, and 10C are diagrams showing an example of an operation signal input to the coil. [Figure 11] FIG. 11 is a diagram for explaining an example of the operation of the vibration actuator according to the operation signals input to a plurality of coils. [Figure 12] FIGS. 12A, 12B, 12C, and 12D are schematic diagrams showing the operation of the vibration actuator corresponding to the operation signals shown in FIG. 11. [Figure 13] FIGS. 13A, 13B, 13C, and 13D are schematic diagrams showing the operation of the vibration actuator corresponding to the operation signals shown in FIG. 11. [Figure 14]Figures 14A and 14B are schematic diagrams showing the operation of the vibration actuator corresponding to the operation signal shown in FIG. 11. [Figure 15] FIG. 15 is a sub-assembly diagram of the vibration actuator according to a modification of Embodiment 1 of the present invention. [Figure 16] FIG. 16 is a sub-assembly diagram of the vibration actuator according to Embodiment 2 of the present invention. [Figure 17] FIG. 17 is a sub-assembly diagram of the vibration actuator according to Embodiment 3 of the present invention. [Figure 18] Figures 18A and 18B are diagrams showing the attachment state of the vibration actuator to the vibration presentation device. [Figure 19] FIG. 19 is an external perspective view of the vibration actuator according to Embodiment 4 of the present invention. [Figure 20] FIG. 20 is a sub-assembly diagram of the vibration actuator. [Figure 21] FIG. 21 is a schematic cross-sectional view showing the main part configuration of the vibration actuator. [Figure 22] FIG. 22 is a sub-assembly diagram of the vibration actuator according to Embodiment 5 of the present invention. [Figure 23] FIG. 23 is a schematic cross-sectional view showing the main part configuration of the vibration actuator according to Embodiment 5. [Figure 24] FIG. 24 is a schematic cross-sectional view showing the main part configuration of the vibration actuator according to Embodiment 6 of the present invention. [Figure 25] FIG. 25 is a diagram for explaining the operation in the vibration presentation device provided with the vibration actuator. [Figure 26] FIG. 26 is a diagram showing a modification of the vibration presentation device provided with the vibration actuator.

MODE FOR CARRYING OUT THE INVENTION

[0012] Hereinafter, each embodiment of the present invention will be described in detail with reference to the drawings.

[0013] In each embodiment described here, a Cartesian coordinate system (X,Y,Z) is used for explanation. The figures described later also use the same Cartesian coordinate system (X,Y,Z). In the following, when the vibration actuator is applied to a vibration presentation device (which may also be called an operation input device) to which an operator contacts and inputs information, the lengths in the X, Y, and Z directions correspond to the width, depth, and height of the vibration presentation device.

[0014] Furthermore, the positive Z-direction is the direction that provides vibration feedback to the operator and is referred to as the "planar side" (or "upper side"), while the negative Z-direction is the direction in which the operator applies pressure when operating and is referred to as the "bottom side" (or "lower side"). In addition, the "radial direction" is synonymous with the XY direction centered on the central axis along the Z-direction in the coil of the vibration actuator and is also referred to as the direction along the plate surface. In each component constituting the vibration actuator, the surface on the "planar side" (or "upper side") is referred to as the "front surface" (or "upper surface"), and the surface on the "bottom side" (or "lower side") is referred to as the "back surface" (or "lower surface"). When the posture of the vibration actuator or vibration presentation device changes, the interpretation should be modified according to the change in posture. Furthermore, the interpretation should be modified according to the posture in which the vibration actuator is mounted on the vibration presentation device.

[0015] (Embodiment 1) <Overall configuration of the vibration actuator 10> Figure 1 is an external perspective view of a vibration actuator according to Embodiment 1 of the present invention, and Figure 2 is a sub-assembly drawing of the same vibration actuator. Figure 3 is a partially exploded view of the same vibration actuator, and Figure 4 is a cross-sectional view taken along line AA in Figure 1.

[0016] The vibration actuator 10 of this embodiment is a small, thin vibration actuator that can obtain a variety of vibrations by using multiple electromagnet parts (coils and cores).

[0017] The vibration actuator 10 is used, for example, in a vibration presentation device 500 (see trackpad shown in Figure 25) which has an operating device (see pad body 510 shown in Figure 25 in this embodiment) as an operating surface (vibration presentation part) that is touched and operated by the operator.

[0018] The vibration actuator 10 vibrates the operating device, thereby providing the operator with a tactile sensation (also called "tactile sensation" or "force sensation") when operating the device, depending on the application and usage conditions of the device.

[0019] The vibration actuator 10 is a flat or thin plate-shaped vibration actuator, with the Z-direction and -Z-direction being the thickness directions, and the direction perpendicular to the surface of the planar vibration actuator. The vibration actuator 10 is positioned on the back side of the operating device in the thickness direction (direction perpendicular to the surface), so as to enable the operating device to vibrate.

[0020] The vibration actuator 10 includes a magnetic core (first planar body) 30, an elastic support part 60 and an electromagnet part 20, a weight 90, a magnetic yoke (third planar body) 80, a weight 92, an elastic support part 62 and an electromagnet part 22, and a magnetic core (second planar body) 32. In the vibration actuator 10, the elastic support part 60 and electromagnet part 20, the weight 90, the magnetic yoke 80, the weight 92, the elastic support part 62 and an electromagnet part 22, and the magnetic core 32 are stacked in that order on the magnetic core 30.

[0021] The magnetic pole portion 34, the substrate portion 40, and the coil 50 constitute the electromagnet portion 20, while the magnetic pole portion 36, the substrate portion 42, and the coil 52 constitute the other electromagnet portion 22.

[0022] Each of the electromagnet sections 20 and 22 is positioned between two planar bodies (between the magnetic core 30 and the magnetic yoke 80, and between the magnetic core 32 and the magnetic yoke 80).

[0023] The electromagnet sections 20 and 22, together with these two planar bodies, each constitute a vibration unit. The multiple vibration units have movable parts relative to the magnetic cores 30 and 32, which are made of the same magnetic yoke 80 and weights 90 and 92.

[0024] The vibration actuator 10 is a vibration unit in which the magnetic core 30 and magnetic yoke 80, and the magnetic core 32 and magnetic yoke 80, respectively, can move relative to each other in the Z direction by energizing the respective coils 50 and 52, and vibration is generated by these movements.

[0025] The vibration actuator 10 is configured such that the electromagnets 20 and 22, mounted on magnetic cores 30 and 32, have their coils 50 facing each other and are offset by 90 degrees around the coil axis, sandwiching the movable part from above and below.

[0026] The electromagnet section 22, magnetic core 32, magnetic pole section 36, substrate section 42, coil 52, elastic support section 62, and weight 92 have the same configuration as the electromagnet section 20, magnetic core 30, magnetic pole section 34, substrate section 40, coil 50, elastic support section 60, and weight 90. Therefore, the electromagnet section 20, magnetic core 30, magnetic pole section 34, substrate section 40, coil 50, elastic support section 60, and weight 90 will be described, and a detailed explanation of similar configurations will be omitted.

[0027] <Magnetic core 30 (first planar body), magnetic core 32 (second planar body)> The magnetic core 30 is a flat magnetic material, and the outer edge of the magnetic core 30 is surrounded by the elastic support portion 60 on its outside. The magnetic core 32 is formed in the same way as the magnetic core 30.

[0028] On the outer periphery of the magnetic core 30, one pair of opposite sides is provided with a notch 302 to accommodate the movable side connection portion 603 of the elastic support portion 60, and the other pair of opposite sides is provided with a plate-shaped projection 304 that protrudes outward from each opposite side.

[0029] The notches 302 and plate-shaped protrusions 304 in the magnetic core 30 are formed on the outer circumference of the magnetic core 30, on adjacent sides.

[0030] A portion of the elastic support portion 60 (core-side connection portion 605) is fixed to the plate-shaped projection 304. The plate-shaped projection 304 has a window portion 305 into which the extension portion 404 of the base portion 40 is inserted to prevent interference with the elastic support portion 60, and a fixing hole 308 that is fixed to the object to be attached (for example, the housing of a product) via a fastening member such as a screw. The notch portion 302 and the plate-shaped projection 304 may be formed only on one of the opposite sides of each pair of opposite sides. Furthermore, it can be said that the pair of plate-shaped projections 304 symmetrically support the elastic support portion 60 with respect to the coil 50.

[0031] The magnetic core 30 is formed from a magnetic material such as silicon steel sheet or SECC (Steel Electrolytic Cold Commercial). When used as a movable part, the magnetic core 30 also functions as a weight.

[0032] <Electromagnet section 20 (magnetic pole section 34, substrate section 40, coil 50)> The electromagnet section 20 includes a magnetic pole section 34 formed in the shape of a thin plate and excited to magnetize in the thickness direction (Z direction), a coil 50, and a substrate section 40. The electromagnet section 20 is arranged on a magnetic core 30.

[0033] The magnetic pole portion 34 is a flattened magnetic material whose radial length is longer than its thickness, and is formed, for example, in the shape of a disc. The magnetic pole portion 34 is integrally provided on the magnetic core 30, inside the coil 50, and connected to the magnetic core 30. Together with the magnetic core 30, the magnetic pole portion 34 constitutes the core of the electromagnet.

[0034] When the coil 50 is energized, the magnetic pole portion 34 is magnetized together with the magnetic core 30, and both its front and back surfaces become magnetic pole surfaces where magnetic flux flows in the vertical direction, i.e., in the thickness direction.

[0035] The coil 50 is formed in a flat, annular shape, with a radial length longer than its thickness. The coil 50 is arranged on the magnetic core 30 via a substrate portion 40. The coil 50 is positioned to surround the magnetic pole portion 34, and the axis of the coil 50 is aligned with the axis of the magnetic pole portion 34. Since the coil 50 is an annular shape and does not have edges that are prone to variation, it is a coil with stable characteristics and high manufacturability.

[0036] The coil 50 can be constructed in any way as long as it is thin (flat) and annular in shape, for example, it may be made of UEW (polyurethane enameled copper wire).

[0037] The coil 50 is connected to the wiring of the circuit board 40 by the coil windings at both ends. The coil 50 may be a conventionally wound coil such as an air-core coil in which the coil windings (UEW) at both ends lead out from the inside of the annular coil body, or it may be a so-called alpha winding in which the coil windings at both ends protrude from the outer circumference of the coil body.

[0038] The substrate portion 40 supplies power to the coil 50 via a wiring portion connected to it. The substrate portion 40 is formed in a film shape. The substrate portion 40 is, for example, a flexible printed circuit board (FPC), and is constructed by providing conductive copper foil on a polyimide (Pl) film, with a low-elasticity design to avoid affecting the characteristics of the spring that forms the elastic support portion 60.

[0039] The substrate portion 40 has a substrate body 402 with an opening 403 and an extension portion 404 extending from a part of the outer circumference of the substrate body 402. The wiring portion is arranged across the substrate body 402 and the extension portion 404, and the wiring portion connects a coil 50 on the substrate body 402 to a land 441 at the tip of the extension portion 404. The coil 50 is electrically connected to an external device via the land 441.

[0040] The substrate body 402 is fully mounted on the magnetic core 30 with the magnetic pole portion 34 positioned within the opening 403. The opening 501 of the coil 50 is located corresponding to the opening 403. The substrate body 402 has an insulating film and functions as an insulator that insulates the magnetic core 30 and the coil 50 by being interposed between them.

[0041] The extension portion 404 is positioned to extend outward along the lower surface of the magnetic core 30, passing through the window portion 305. As a result, the extension portion 404 passes across the elastic support portion 60 connected to the plate-shaped projection portion 304 without interfering with it, and is led out to the outside of the vibration actuator 10. Furthermore, since the extension portion 404 passes through the window portion 305, the substrate portion 40 is positioned relative to the magnetic core 30.

[0042] The substrate section 40 is a flexible printed circuit board (FPC) and has both insulating and conductive functions to the coil 50 (through the wiring section). Therefore, dielectric breakdown can be avoided, the routing of the wiring supplying power to the coil can be improved, and coil wire breakage can be suppressed. In addition, when connecting using connectors, etc., the connection can be made easily.

[0043] <Elastic support part 60> The elastic support section 60 elastically supports the magnetic core 30 and the magnetic yoke 80 by connecting them so that they can move relative to each other. Specifically, the elastic support section 60 is positioned outside the coil 50 and connects the magnetic core 30 and the weight 90.

[0044] The elastic support portion 60 has a predetermined thickness (thickness in the Z direction) and is arranged in layers between the magnetic core 30 and the weight 90 in the thickness direction (Z direction). The predetermined thickness ensures the length of relative movement between the magnetic core 30 and the magnetic yoke 80 (weight 90).

[0045] The elastic support portion 60 is a flat, plate-shaped frame formed of SUS or the like, which is elastically deformable, and is, for example, a leaf spring.

[0046] The elastic support portion 60 has an opening 601 and is formed in a rectangular frame shape surrounding the magnetic core 30 and the coil 50. It is positioned outside the magnetic core 30 and elastically deforms in the thickness direction (Z direction) on the outside. In other words, the frame-shaped portion of the elastic support portion 60, formed by the edges 602 and 604 located outside the magnetic core 30, is elastically deformable in the Z direction. The deformation of the frame-shaped portion of the elastic support portion 60, specifically the deformation that brings both the magnetic core 30 and the weight 90 closer together, causes the magnetic core 30 and the weight 90, or in other words, the magnetic core 30 and the magnetic yoke 80, to move closer together and further apart.

[0047] The elastic support section 60 has a movable part side connection section 603 on each of a pair of parallel sides 602, and these movable part side connection sections 603 join the weight 90 fixed to the magnetic yoke 80 in a stacked state in the Z direction. Specifically, the movable part side connection sections 603 of the elastic support section 60 are connected to the movable part connection section 902 of the weight 90, and the weight is suspended between the movable part side connection sections 603 of the pair of sides 602. As a result, the elastic support section 60 elastically supports the movable part side at a pair of opposite sides, so it can be supported in a well-balanced manner and vibrated stably.

[0048] Furthermore, the elastic support portion 60 has core-side connection portions 605 on each of the pair of side portions 602 adjacent to another pair of side portions 604, and the core-side connection portions 605 are joined to the plate-shaped protrusions 304 of the magnetic core 30 in a stacked state in the Z direction. The elastic support portion 60 is connected to the magnetic core 30 by a plurality of core-side connection portions 605 that protrude inward from equally spaced portions in the frame-like body, and is connected to the weight 90 by movable-side connection portions 603, which are other portions equally spaced from the core-side connection portions 605.

[0049] The movable part-side connecting portion 603 and the core-side connecting portion 605 are plate-like parts (plate-like pieces) that protrude inward from the edges 602 and 604 that constitute the frame-like portion of the elastic support portion 60. The movable part-side connecting portion 603 and the core-side connecting portion 605 are connected to the movable part joint portion 902 and the plate-like projection portion 304 of the elastic support portion 60 by contacting each other's surfaces in the Z direction.

[0050] The movable part-side connection part 603 and the core-side connection part 605 are positioned 90 degrees apart from each other within the rectangular frame-shaped elastic support part 60, and are configured to have the same length and width. This eliminates the need to determine the orientation of the elastic support part 60 during assembly, thereby improving ease of assembly.

[0051] Furthermore, since the elastic support part 60 is a frame-like structure, the spring length can be increased, ensuring stable assembly. Also, because the elastic support part 60 has a one-piece structure, the precision of the parts can be improved.

[0052] The elastic support portion 60 is positioned between the weight 90 and the magnetic core 30. This space, that is, the thickness of the elastic support portion 60, becomes the gap that defines the gap between the weight 90 and the electromagnet portion 20, i.e., the maximum movable range of the magnetic yoke 80. Note that the thickness of each component refers to the "length in the Z direction". Since the elastic support portion 60, the weight 90, and the magnetic pole portion 34 are positioned between the magnetic core 30, which is a flat plate, and the magnetic yoke 80, the gap is set, for example, by the thickness of the weight 90 + the thickness of the elastic support portion 60 - the thickness of the magnetic pole portion 34.

[0053] The elastic support portion 60 deforms in the layer between the magnetic core 30 and the weight 90. The elastic support portion 60 supports one of the weight 90 and the electromagnet portion 20 in a balanced manner perpendicular to the opposing direction (vibration direction) relative to the other, and moves freely from one to the other.

[0054] Furthermore, as shown in Figure 4, the elastic support portion 60 is located in approximately the same layer as the coil 50 and the magnetic pole portion 34. Therefore, compared to a configuration in which the elastic support portion 60 is laminated on the coil 50 and the magnetic pole portion 34, the thickness can be reduced, resulting in an overall thinner design. The elastic support portion 60 is positioned so as not to interfere with the magnetic core 30 on which the coil 50 and the magnetic pole portion 34 are arranged, and deforms and displaces in the Z direction.

[0055] Furthermore, the elastic support portion 60, for example, when the movable portion moves relative to the electromagnet portion 20, has a spring constant K spThe displacement and natural frequency of the movable part can be determined by these settings, and the resonant frequency can also be adjusted. Furthermore, when the movable part is driven (moved), that is, when power is supplied to the coil 50, displacement occurs, creating a mechanical tactile sensation.

[0056] <Weight 90> The weight 90 is intended to increase the weight of the movable part and to secure a gap that constitutes the movable range of the elastic support part 60. The weight 90 is placed on the lower surface 802 of the magnetic yoke 80 and has a predetermined length (thickness) in the vertical direction, and separates the magnetic yoke 80 and the electromagnet part 20 in the vertical direction.

[0057] The weight 90 is a frame-shaped plate, for example, formed in the shape of a rectangular frame. The weight 90 is attached to the lower surface 802 of the magnetic yoke 80 and joined to the elastic support 60 via a pair of parallel opposite sides of movable joints 902. The movable joints 902 have holes for connecting to the elastic support 60 and are formed to protrude outward on each of the pair of opposite sides.

[0058] The movable joint portion 902 of the weight 90 is connected to the movable-side connection portion 603 of the elastic support portion 60, thereby suspending the weight 90 between the movable-side connection portions 603, and the elastic support portion 60 is deformably connected to the weight 90 on its outer circumference.

[0059] The weight 90 has a recess 904 on a side opposite to the side on which the movable joint 902 is formed. The recess 904 prevents interference with the core-side connection 605 of the elastic support 60, which moves in the vertical direction (Z direction).

[0060] As shown in Figure 4, the weight 90 is formed, for example, into a square-shaped frame corresponding to the outer shape of the magnetic yoke 80. The weight 90 is interposed between the magnetic yoke 80 and the elastic support portion 60.

[0061] The weight 90 has a shape that avoids the coil 50 when the magnetic yoke 80 is displaced due to the deformation of the elastic support portion 60. The weight 90 is positioned outside the magnetic pole portion 34 and the coil 50, surrounding the portion of the magnetic yoke 80 that becomes the magnetic pole surface (the central portion of the lower surface 802 facing the magnetic pole portion 34).

[0062] The weight 90 separates the magnetic yoke 80 and the magnetic core 30 due to its vertical length (thickness). The thickness of the weight 90, together with the elastic support portion 60 and the magnetic pole portion 34, forms a gap between the magnetic yoke 80 and the coil 50 and the magnetic pole portion 34.

[0063] As a result, the elastic support portion 60 can move to the same layer as the magnetic core 30, increasing the range of motion. This allows the range of motion of the movable part in the vibration actuator 10 to be sufficiently set, resulting in desirable vibration characteristics. This air gap is similarly formed in the vibration units of each embodiment described later.

[0064] The weight 90 has a predetermined thickness that becomes part of the deformation region of the elastic support portion 60, and separates the elastic support portion 60 and the magnetic yoke 80 in the thickness direction (Z direction). In addition, the weight 90 separates the electromagnet portion 20, i.e., the magnetic core 30, coil 50 and magnetic pole portion 34, and the magnetic yoke 80 in the vibration direction (vertical direction, Z direction).

[0065] The weight 90 is formed from a high-precision steel sheet, such as an austenitic spring stainless steel strip manufactured by cold rolling. Although the weight 90 is made of a non-magnetic material, it may be made of either a magnetic or non-magnetic material, and can form the magnetic circuit of the vibration actuator 10.

[0066] Furthermore, in each embodiment, the weight 90 can increase the degree of freedom of the elastic member, such as the leaf spring used in the elastic support part 60, depending on the design.

[0067] Since weight 90 is made of plate material, it is possible to use plate material with a thickness that makes it easy to set precise dimensions, thereby improving the accuracy of the gap. Furthermore, weight 90 may be made of a high-density material, in which case the weight of the movable part will increase, and the vibrations generated will increase. Also, when weight 90 is used as a weight for the movable part, the natural frequency of the movable part can be set by adjusting its weight.

[0068] <Magnetic yoke (third-faced body) 80> The magnetic yoke 80 is positioned opposite the electromagnet 20 and is provided to be movable relative to the electromagnet 20 in a direction toward proximity. The magnetic yoke 80 is integrally provided with the weight 90 and functions as a movable part relative to the magnetic core 30. The vibration actuator generates vibrations as the magnetic yoke 80 moves.

[0069] The magnetic yoke 80 faces the magnetic pole portion 34 and the coil 50 above on its lower surface 802. The magnetic yoke 80 is a rectangular plate-shaped planar body, for example, a square-shaped planar body in plan view. The magnetic yoke 80 is joined to the elastic support portion 60 by a fixed portion 804 formed in the central part of a pair of opposing sides, together with the weight 90 (movable portion joint portion 902) on its lower surface 802.

[0070] The magnetic yoke 80 faces the magnetic pole portion 34 on a surface and is attracted to the magnetic pole portion 34 by the magnetic attractive force (magnetic force) generated between it and the magnetic pole portion 34 when the coil 50 is energized. The magnetic yoke 80 is also positioned facing the magnetic core 30 and is attracted to the magnetic core 30 by the magnetic attractive force generated between it and the outer periphery of the magnetic pole portion 34.

[0071] The magnetic yoke 80 is composed of a single plate-shaped magnetic material and has high flatness. The magnetic yoke 80 may be formed from a soft magnetic material such as silicon steel sheet, permalloy, or ferrite. Alternatively, the magnetic yoke 80 may be formed from electromagnetic stainless steel, sintered material, MIM (metal injection molded) material, laminated steel sheet, SECC (electro-galvanized steel sheet: Steel Electrolytic Cold Commercial), etc. It is particularly preferable that the magnetic yoke 80 be composed of silicon steel sheet or SECC.

[0072] Since the magnetic yoke 80 is a flat plate-like body with high flatness, it can be positioned opposite the entire magnetic pole surface of the magnetic pole portion 34 with equally spaced gaps, improving the precision of the gap surface and allowing the magnetic attractive force between it and the electromagnet portion 20 to be effectively exerted.

[0073] The magnetic yoke 80 can be modified to adjust the airflow path within its internal space by changing its shape.

[0074] Furthermore, the magnetic yoke 80 is connected to the elastic support portion 62, along with the weight 92 on the upper surface 803, by a central fixing portion 806 formed on the other pair of sides.

[0075] <Weight 92, substrate 42, elastic support 62, magnetic core 32> The assembly of the weight 92, substrate portion 42, elastic support portion 62, electromagnet portion 22, and magnetic core 32 is the same as the assembly of the weight 90, substrate portion 40, elastic support portion 60, electromagnet portion 20, and magnetic core 30, and is constructed by stacking them in the same manner from the magnetic core 32 side.

[0076] The weight 92, substrate 42, elastic support 62, electromagnet 22, and magnetic core 32 are arranged in a manner that is symmetrical vertically with respect to the weight 90, substrate 40, elastic support 60, electromagnet 20, and magnetic core 30, with respect to the magnetic yoke 80. In addition, the weight 92, substrate 42, elastic support 62, electromagnet 22, and magnetic core 32 are arranged rotated 90 degrees around the central axis of the vibration actuator 10.

[0077] Specifically, the weight 92 is positioned on the upper surface 803 of the magnetic yoke 80, at a 90-degree angle to the weight 90 relative to the magnetic yoke 80, with respect to the central axis of the vibration actuator 10, and is fixed to the fixed part 806 via the movable part joint 902. The movable part joint 902 of the weight 92 is fixed to the pair of opposite sides to which the movable part joint 902 of the weight 90 is joined, and to the adjacent pair of opposite sides.

[0078] An elastic support portion 62 is positioned on the weight 92, and is connected to the movable portion side connection portion 603 of the elastic support portion 62 by a movable portion joint portion 902.

[0079] A magnetic core 32, which has a coil 52 and a magnetic pole portion 36 (see Figures 4 and 5) arranged on it, is connected to the elastic support portion 62, similar to the elastic support portion 60.

[0080] <Operation of the vibration actuator 10> Figure 5 is a diagram illustrating the operation of a vibration actuator. In the vibration actuator 10, when no power is supplied to the coils 50 and 52, a magnetic attractive force is generated between the magnetic poles 34 and 36 and the magnetic cores 30 and 32 and the magnetic yoke 80. As a result, the magnetic yoke 80 and magnetic core 32 move closer to or further away from the magnetic core 30.

[0081] Furthermore, the magnetic core 32 is movable only relative to the magnetic yoke 80, and can move toward the magnetic core 30 together with the magnetic yoke 80.

[0082] When the magnetic yoke 80 and magnetic core 32 move, the amount of air in the internal space between the magnetic core 30 and the magnetic yoke 80, and between the magnetic yoke 80 and the magnetic core 32, fluctuates in the vibration actuator 10 (see black arrow).

[0083] When the magnetic core 30 and the magnetic yoke 80 approach each other, or when the magnetic yoke 80 and the magnetic core 32 approach each other, the air in the internal space between the magnetic core 30 and the magnetic yoke 80, and the air in the internal space between the magnetic yoke 80 and the magnetic core 32 is compressed. The compressed air is released to the outside (indicated by the black arrow). By adjusting the amount of this compressed air released, the vibration actuator 10 is able to dampen vibrations.

[0084] Furthermore, when the magnetic core 30 and the magnetic yoke 80 are separated, or when the magnetic yoke 80 and the magnetic core 32 are separated, air flows in from the outside into the internal space between the magnetic core 30 and the magnetic yoke 80, and into the internal space between the magnetic yoke 80 and the magnetic core 32. This releases the compressed state of the air within the internal space.

[0085] <Example of vibration actuator operation> Figures 6 to 9 are schematic cross-sectional views showing an example of the operation of the main components of a vibration actuator when energized.

[0086] The vibration actuator 10 increases the magnetic attractive force in the magnetic circuit by using multiple coils 50 and 52. Furthermore, since the vibration actuator 10 uses multiple elastic support parts 60 and 62 (for example, leaf springs), by setting the spring constant and movable part weight described later, it becomes a multi-resonant actuator having two or more resonance points.

[0087] <Activate one of the vibration units (energize one of the coils)> In a vibration actuator, for example, as shown in Figure 6, when the vibration actuator 10 is moved by energizing the coil 52 on the movable part side, a magnetic field is formed from the magnetic pole part 36 toward the magnetic yoke 80, and magnetic flux flows. As a result, the magnetic yoke 80 is attracted to the upper magnetic pole part 36 (indicated by the solid arrow in the center).

[0088] Furthermore, magnetic flux flows from the weight 92 on the magnetic yoke 80 to the magnetic core 32 (indicated by the solid arrows on the left and right). As a result, the weight 92 is attracted to the magnetic core 32. At the same time, magnetic flux (indicated by the dashed arrow) also flows to the magnetic pole section 34 and magnetic core 30 through the magnetic yoke 80 and weight 90, generating a magnetic attractive force between them.

[0089] In this way, by energizing the coil 52 on the movable part side, the movable part on the magnetic core 30, which functions as a fixed part, moves toward the magnetic core 30.

[0090] This means that regardless of the direction of current flow to the coil 52, the magnetic core 32 and magnetic yoke 80 move toward the magnetic core 30. In other words, the magnetic force generated by the current flow to the multiple coils 50 and 52 causes at least two of the planar bodies of the magnetic core (first planar body) 30, magnetic core (second planar body), and magnetic yoke (third planar body) 80 to be displaced and vibrate toward each other.

[0091] When the magnetic attraction state is released, the magnetic core 32 and magnetic yoke 80 are displaced in a direction away from the magnetic core 30.

[0092] Furthermore, in the vibration actuator 10, for example, when the vibration actuator 10 is moved by energizing the coil 50 on the stationary side, as shown in Figure 7, a magnetic field is formed from the magnetic pole portion 34 toward the magnetic yoke 80, and magnetic flux flows. That is, due to the magnetic attractive force generated from the magnetic pole portion 34, the magnetic yoke 80 approaches the magnetic pole portion 34 (see the solid arrow in the center). As a result of this, magnetic poles are generated in the magnetic yoke 80, magnetic flux flows to the magnetic core 32, and the magnetic core 32 approaches the magnetic yoke 80 (see the dashed arrow in the center). Also, magnetic flux flows from the weight 90 below the magnetic yoke 80 to the magnetic core 30 (solid arrows on the left and right). As a result, the weight 92 is attracted to the magnetic core 32. At this time, magnetic flux (dashed arrows) also flows to the magnetic pole portion 34 and magnetic core 30 through the magnetic yoke 80 and weight 90, and a magnetic attractive force is generated between them.

[0093] Regardless of the direction of current supply to the coil 50 on the fixed side, the magnetic yoke 80 and magnetic core 32 move toward the magnetic core 30. When the magnetic attraction state is released, the magnetic core 32 and magnetic yoke 80 are displaced toward the magnetic core 30.

[0094] <Both sides of the vibration unit are made functional (both coils are energized)> The case in which both of the multiple vibration units in the vibration actuator 10 are energized is described below. When both of the multiple vibration units are driven, both coils 50 and 52 are energized.

[0095] In the vibration actuator 10, for example, as shown in Figure 8, even when the direction of current supply to the coils 50 and 52 is different, a magnetic field is generated from the inner magnetic pole portions 34 and 36 of the coils 50 and 52, respectively, which are positioned above and below the magnetic yoke 80, toward the magnetic yoke 80.

[0096] Furthermore, this generates a magnetic field from the weight 90 below the magnetic yoke 80 toward the magnetic core 30, and a magnetic field from the weight 92 above the magnetic yoke 80 toward the magnetic core 32.

[0097] As a result, the movable parts, the magnetic core 32 and the magnetic yoke 80, move (become movable) towards the fixed part, the magnetic core 30.

[0098] In this energized driving method, the direction of the magnetic field from the magnetic cores 30 and 32 to the magnetic yoke 80 becomes the same pole (for example, the north pole), and they collide at the magnetic yoke 80, causing the magnetic flux to spread along the upper and lower surfaces 803 and 802 of the magnetic yoke 80.

[0099] Therefore, the magnetic weights 90 and 92 placed on the outer circumference of the magnetic yoke 80 can generate magnetic attraction across the entire surface of the magnetic yoke 80 by reducing the gap between them and the opposing surfaces of the magnetic cores 30 and 32. This suppresses the phenomenon of component distortion during operation caused by the reduced rigidity resulting from the thinning of the device.

[0100] As shown in Figure 9, when the direction of current supply to coils 50 and 52 in the vibration actuator 10 is the same, a magnetic field is generated from the inner magnetic pole portions 34 and 36 of coils 50 and 52, respectively, which are positioned above and below the magnetic yoke 80, toward the magnetic yoke 80. As a result, the upper and lower surfaces 803 and 802 of the magnetic yoke 80 collide with different magnetic poles.

[0101] For example, the magnetic pole portion 34 on the magnetic core 30 becomes the south pole, and the magnetic pole portion 36 on the magnetic core 32 becomes the north pole. Also, a flow of magnetic flux from the magnetic core 30 is generated at the weight 90 below the magnetic yoke 80, and a magnetic field is generated from the weight 92 above the magnetic yoke 80 toward the magnetic core 32.

[0102] In this current application, opposite poles collide on the front and back surfaces of the magnetic yoke 80, causing the magnetic flux to concentrate on the surfaces of the magnetic pole portions 34 and 36, thereby generating a stronger magnetic attraction force. As a result, the movable parts, the magnetic core 32 and the magnetic yoke 80, move (become movable) towards the fixed part, the magnetic core 30.

[0103] In the vibration actuator 10, if the magnetic core 32 is a fixed part, then the magnetic core 30 becomes a movable part together with the magnetic yoke 80. The direction of movement due to the energization of the coils 50 and 52 is the opposite direction to that shown in Figure 9. The magnetic core 30 moves together with the magnetic yoke 80 and moves towards the magnetic core 32 side.

[0104] Figures 10A, 10B, and 10C show examples of operating signals input to a coil. In Figures 10A, 10B, and 10C, voltage, current, and displacement correspond to each other, and the displacement is the displacement of the movable part (magnetic yoke 80 or magnetic core 32) due to the supplied drive current pulse.

[0105] When controlling vibration in the vibration actuator 10, the vibration may be controlled by inputting pulse signals to the coils 50 and 52.

[0106] For example, the signals shown in Figures 10A to 10C illustrate an example of controlling a vibration actuator using pulse signals. In particular, Figure 10C shows an example of a signal supplied to shorten the damping period of vibration caused by the main drive pulse.

[0107] Figure 10A shows the behavior of the vibration actuator when a single drive current pulse is input. When a single pulse signal is input to the coil, the magnetic poles 34 and 36 are excited via the coil, and the movable part of the magnetic yoke 80 or magnetic core 32 is displaced so as to be pulled downward by magnetic attraction.

[0108] Next, when the current is turned off, the magnetic attraction force is released, and the movable part rises and displaces due to the reaction force of the elastic support (spring). This causes vibration. The tactile sensation that this vibration imparts to the user is referred to as a weak feeling.

[0109] Figure 10B shows the behavior of the vibration actuator when two drive current pulses are input. In this control, the first pulse is input, and the second pulse is input at the timing of the maximum displacement of the movable part caused by the first pulse input. This increases the amplitude (G value) of the movable part, maximizing the amplitude. This allows for the application of a stronger vibration and the presentation of tactile sensation. Figure 10C shows that the drive current pulses are input to the coil as two sets of two pulses.

[0110] After the first two pulses are input to maximize the amplitude of the movable part, a second set of two drive current pulses is input during the vibration after the current is turned off. This interrupts the vibration afterglow and provides a crisp, clean vibration. As a result, the drive current pulses in Figure 10C function as brake pulse signals, attenuating the vibration caused by the current pulses.

[0111] This allows for a variety of vibration variations. Furthermore, since each signal can be input to multiple coils 50 and 52, it is possible to generate even more diverse vibrations and, for example, present a variety of tactile sensations.

[0112] The vibration actuator 10 achieves cost reduction while generating various vibrations by using multiple units with the same component configuration, such as by increasing the weight of the movable parts, strengthening the magnetic circuit, and improving the control method. Furthermore, by making the magnetic yoke 80 a movable part, the spring constant can be increased along with the increase in the weight of the movable part.

[0113] In the vibration actuator 10, the flexible substrate, which is the substrate portion 40, is led out from the magnetic core 30 attached to the opposing surface. As a result, when the connection destination is the opposing surface, the flexible substrate does not hinder the movement of the movable part during operation.

[0114] Figure 11 is a diagram illustrating an example of the operation of a vibration actuator in response to operating signals input to multiple coils, and Figures 12 to 14 are schematic diagrams showing the operation of the vibration actuator corresponding to the operating signals shown in Figure 11. Figures 12 to 14 illustrate the operation of a vibration actuator driven at the timing of input of operating signals (application of drive voltage) to coils A and B shown in Figure 11, using the main components shown in Figure 5. Coils A and B shown in Figure 11 correspond to coils 50 and 52 of the vibration actuator 10 shown in Figures 12 to 14.

[0115] Specifically, Figures 12A to 14B correspond to the timings (1) to (10) in Figure 11 when the operating signal was input (driving voltage was applied) to coils A and B.

[0116] Furthermore, in the coils A and B to which the operating signal (drive voltage) shown in Figure 11 is input, and in the corresponding coils 50 and 52 in Figures 12 to 14, hatching is used to illustrate the state in which current is flowing through the coils (energized state). Also, in the energized state shown with hatching, if the current flowing through coils A and B (coils 50 and 52) is reversed, the corresponding coils are shown with the hatching direction changed. In Figures 12 to 14, the "movement of the movable part," the reaction force of the elastic support parts 60 and 62 generated by the movement of the movable part (referred to as the "spring reaction force"), and the "magnetic attraction force" are each indicated by arrows, and the difference in magnitude of each is indicated by the size of the arrows. Also, in Figures 12A, 12B, 12C, 12D, 13A, 13B, 13C, 13D, 14A, and 14B, the elastic support parts 60 and 62 are omitted for convenience.

[0117] The vibration actuators 10 described in Figures 11 to 14 each have their upper magnetic cores 32 fixed to the touchpad, which is the target of vibration application in the vibration presentation device, and are suspended from the underside of the touchpad as vibration actuators. Furthermore, coils A and B shown in Figure 11 (coils 50 and 52 in Figures 12 to 14) are not connected and are controlled by independently applied drive voltages.

[0118] The vibration actuator 10 can drive the movable part using the magnetic attraction force of the two vibration units as well as the reaction force of the elastic support parts 60 and 62. Using the magnetic attraction force of the two vibration units, together with the spring reaction force, it is possible to attract objects in the same direction or to separate them by making their attraction repelling each other.

[0119] In Figure 11, the non-driven state (state of timing (1)) when the coils are not energized corresponds to the state of coils A and B (non-energized state) to which (1) is directed. The state of the vibration actuator 10 corresponding to this timing (1) is the initial state in which the magnetic yoke 80 is located at the initial position D, as shown in Figure 12A.

[0120] In the vibration actuator 10 shown in FIG. 12A, the weight of the movable part M magnetically attracted by the vibration unit having the electromagnet part 22 is heavier than the weight of the movable part m magnetically attracted by the vibration unit having the electromagnet part 20 (weight of movable part M > weight of movable part m). The resonance frequency F0 of the movable part M and the resonance frequency f0 of the movable part m may be such that F0 < f0, or the spring constant may be adjusted to make F0 = f0.

[0121] When a current is simultaneously passed in the same direction through both coils A and B with respect to the vibration actuator 10 in the initial state (timing (2)), the vibration actuator 10 starts magnetic attraction as shown in FIG. 12B.

[0122] In the vibration actuator 10 shown in FIG. 12B, magnetic attraction forces are generated in the same direction (here, downward) between each of the vibration units of the electromagnet parts 20 and 22 and the magnetic yoke 80, and the movable part including the magnetic yoke 80 and the magnetic core 30 moves toward the magnetic core 32 side (see "movement of the movable part"). Along with this movement, an "elastic reaction force" that biases downward is generated in the elastic support part not shown in the figure. That is, it drives to attract the movable part toward the magnetic core 32 side.

[0123] Next, by stopping the energization of coils A and B as shown in timing (3), the vibration actuator 10 controls the vibration aftertaste of the movable part when the coil energization is stopped, as shown in FIG. 12C. At this time, in the energization state T1 of coils A and B shown in FIG. 11, the energization of coil A is stopped first and then the energization of coil B is stopped, but it is not limited to this.

[0124] In the energization state T1 (the same applies to T2 to T5), it is preferable to adjust the timing according to the movement of the movable part so that the movements of the vibration unit having the electromagnet part 22 and the vibration unit having the electromagnet part 20 end simultaneously.

[0125] In the vibration actuator 10, the movable part M, which is moved by the electromagnet 22, is heavier than the movable part m (see Figure 12A), which is moved by the electromagnet 20. Therefore, in order to make the displacement of the movable part M and the displacement of the movable part m the same, it is necessary to attract the movable part M for a longer distance than the movable part m, which is lighter in weight.

[0126] In the energized state T1, in order to equalize the displacement, the energization of coil A, which magnetically attracts the movable part m, is stopped first, and the energization of coil B is extended to increase the magnetic attraction time of the movable part M. The timing of starting and stopping the energization of the coils may be controlled accordingly by adjusting the resonant frequencies of both coils F0 = f0, and the energization of coils A and B may be stopped simultaneously.

[0127] At timing (4), although no current is supplied to coils A and B, inertia causes an overshoot even after the voltage application to coils A and B ends, and as shown in Figure 12D, the movable parts (magnetic yoke 80, magnetic core 30, electromagnet part 20) are in the position closest to the magnetic core 32. That is, the movable part M (see Figure 12A) moved by the electromagnet part 22 and the movable part m moved by the lower electromagnet part 20 are attracted to the magnetic core 32 by magnetic attraction and are in the lowest position, where the spring reaction force on each is at its maximum.

[0128] At timing (5), when the spring reaction force is at its maximum, current is simultaneously passed through coils A and B in opposite directions to drive multiple vibration units (corresponding to electromagnet sections 20 and 22) simultaneously. At timing (5), as shown in Figure 13A, in addition to the spring reaction force on the movable part M, the energization of coils A and B causes the electromagnet sections 20 and 22 to face each other with like poles, generating a magnetic repulsive force that causes them to repel each other.

[0129] The movable parts (magnetic yoke 80, magnetic core 30, electromagnet part 20) are controlled to move by accelerating downwards (accelerator control). Specifically, the force that moves the movable parts downward due to the spring reaction force of two elastic support parts (not shown) is combined with the magnetic repulsion force due to the opposing like poles of the electromagnet parts 20 and 22.

[0130] As a result, the magnetic yoke 80, magnetic core 30, and electromagnet 20 move downward, while at the same time, the electromagnet 20 and magnetic core 30 move further downward away from the magnetic yoke 80.

[0131] At the timing (6) when the current to coils A and B is stopped, as shown in Figure 13B, each vibration unit generates a spring reaction force from an elastic support part (not shown) that biases its respective movable part upward, and a magnetic attraction force that moves them apart.

[0132] At the timing when the current to coils A and B is stopped (7), as shown in Figure 13C, the magnetic yoke 80 and magnetic core 30 are at their furthest distance from the magnetic core 32, and the spring reaction force of the elastic support parts (not shown) that elastically support each of them is at its maximum. In other words, in Figure 13C, the movable part (mainly the magnetic core 30) is in an overshoot state due to inertia, the magnetic yoke 80 and magnetic core 30 are beyond their initial positions, and the elastic support parts (springs) are fully extended.

[0133] Next, the magnetic yoke 80 and magnetic core 30 are moved toward the magnetic core 32 by spring reaction force and magnetic attraction force, while simultaneously applying a brake to this movement. This control generates a vibration different from the vibration that is dampened by free vibration from the timing (7) state, and is a control that provides a vibration that presents a so-called crisp tactile sensation.

[0134] Specifically, in the state shown at timing (7), coil B is energized at timing (8) in order to lift the heavier movable part (movable part including the magnetic yoke 80 and magnetic core 30) first. The timing of energizing coils A and B can be controlled according to the adjustment of the movable parts M and m and their respective co-occurring frequencies F0 and f0, and simultaneous energization is also possible. In the vibration actuator 10 in the state of timing (8), as shown in Figure 13D, the magnetic attraction force of the electromagnet 22 generates a force that moves the magnetic yoke 80 and magnetic core 30 toward the magnetic core 32 side (upper side) from the state in Figure 13C, along with a spring reaction force toward the two magnetic cores 32 side (upper side).

[0135] Next, the movement and free vibration of the movable parts (magnetic yoke 80, magnetic core 30, etc.) are dampened in order to stop the movement that attracts them to the magnetic core 32.

[0136] This braking involves applying a current to coil A in the opposite direction to coil B, as shown in timing (9), thereby braking the movement of the movable part toward the magnetic core 32 side (upward side), as shown in Figure 14A, in other words, applying a magnetic repulsion brake. As a result, in the vibration actuator 10 at timing (10), the movable part moving upward is suddenly braked, so that it returns to the initial position D as shown in Figure 14B without damping the free vibration, and a crisp vibration can be produced.

[0137] Furthermore, in each vibration unit of the vibration actuator 10, the multiple electromagnet parts 20 and 22, each having magnetic pole parts 34 and 36 respectively, exhibit individual differences (differences in eigenvalues) depending on the applied voltage. In this case as well, this can be addressed by adjusting the weight of the movable parts M and m and the resonant frequencies F0 and f0 shown in Figure 12A.

[0138] <Variation> Figure 15 is a sub-assembly diagram of a vibration actuator according to a modified example of Embodiment 1 of the present invention. Figure 15 is a view of the vibration actuator 10A from above.

[0139] In the vibration actuator 10, the multiple electromagnet sections 20 and 22 are provided on the magnetic cores 30 and 32, respectively. However, the configuration is not limited to this, and they may be placed anywhere as long as each is positioned to function.

[0140] For example, as shown in Figure 15, the magnetic poles 34 and 36 of the electromagnets 20 and 22 may be provided on the lower surface 802 and upper surface 803 of the magnetic yoke 80, which is positioned between the magnetic cores 30 and 32. The vibration actuator 10A differs from the vibration actuator 10 only in the arrangement of the magnetic poles 34 and 36. A view of the vibration actuator 10A from below is the same as Figure 15, but with the positions of the components reversed vertically.

[0141] In other words, in this vibration actuator 10A, the magnetic core 30 is assembled to the weight 90 (see Figure 5) on the lower surface 802 of the magnetic yoke 80 via an elastic support portion 60, and the magnetic pole portion 34 is positioned inside the coil 50 on the magnetic core 30 side, spaced apart from the magnetic core 30.

[0142] Furthermore, the magnetic core 32, which is provided with the substrate portion 42 and the coil (see coil 52 in Figure 3), is assembled to the weight 90 via the elastic support portion 62, and the magnetic pole portion 36 is positioned inside the coil (not shown) on the magnetic core 32 side, spaced apart from the magnetic core 32.

[0143] The configuration of the vibration actuator 10A will be explained with reference to Figure 5. In the configuration of the vibration actuator 10 shown in Figure 5, the magnetic poles 34 and 36 are moved vertically, respectively, and are positioned on the lower surface 802 and upper surface 803 of the magnetic yoke 80. As a result, the vibration actuator 10A can have the same function as the vibration actuator 10.

[0144] In addition, in the vibration actuator 10A, as explained with reference to the configuration in Figure 5, the internal spaces formed between the magnetic poles 34 and 36 of the electromagnets 20 and 22 and the coils 50 and 52, respectively, between the magnetic cores 30 and 32, are labyrinthine in shape, repeatedly bending in a Z-shape.

[0145] In other words, the vibration actuator 10A has a labyrinthine internal space between the magnetic core 30 and the magnetic yoke 80, and between the magnetic yoke 80 and the magnetic core 32, and the magnetic yoke 80 has labyrinthine air vents on its upper and lower surfaces 803 and 802. This allows the vibration actuator 10A to dampen vibrations when it moves. The vibration actuator 10A can dampen vibrations more effectively and significantly than the vibration actuator 10.

[0146] (Embodiment 2) Figure 16 is a sub-assembly diagram of a vibration actuator according to Embodiment 2 of the present invention. In the configuration of the vibration actuator 10, each of the multiple electromagnet parts 20 and 22 is provided on magnetic cores 30 and 32 that can function as fixed parts, but the configuration is not limited to this.

[0147] As shown in Figure 16, the vibration actuator 10B may be configured to have the components provided on the upper and lower surfaces of the magnetic yoke 80, which is the movable part. In the vibration actuator 10B shown in Figure 16, the elastic support portion 60 is placed on the magnetic core 30, and the core-side connection portion 605 is connected to the plate-shaped projection 304 of the magnetic core 30.

[0148] Similarly, in the magnetic core 32, the core-side connection portion 605 of the elastic support portion 62 is connected to the plate-shaped projection portion 304 of the magnetic core 32. The elastic support portion 60 and the elastic support portion 62 are placed facing each other, and a magnetic yoke 80 is positioned between them with electromagnet portions 20 and 22 and weights 90 and 92 attached to its upper and lower surfaces 803 and 802, respectively.

[0149] An electromagnet section 20 (a base section 40, a magnetic pole section (not shown), and a coil) is attached to the lower surface of the magnetic yoke 80, with the coil (corresponding to the coil 50 shown in Figures 2 and 3, though not shown) facing downwards. Also on the lower surface, a weight 90 is fixed to the extension 404 of the base section 40, surrounding the coil (not shown). The weight 90 is fixed to the movable part side connection 603 of the elastic support section 60 together with the fixed part 804 of the magnetic yoke 80 via a movable part joint 902 that is spaced apart in the Y direction.

[0150] On the upper surface 803 of the magnetic yoke 80, the electromagnet section 22 (magnetic pole section 36, substrate section 40, coil 52) is positioned to overlap with the electromagnet section 20 on the lower surface. As a result, the extension sections 404 are arranged to extend outside the magnetic pole yoke 80 while overlapping each other.

[0151] Weight 92 is positioned around the coil 52, rotated 90 degrees from weight 90. The movable joint 902 of weight 92 is connected to the movable side connection 603 of the elastic support 62 to which the magnetic core 32 is fixed.

[0152] In the vibration actuator 10B, the wiring for the coils 50 and 52 can be routed externally from the movable magnetic yoke 80, which is positioned between the magnetic cores 30 and 32.

[0153] (Embodiment 3) Figure 17 is a sub-assembly diagram of a vibration actuator according to Embodiment 3 of the present invention. As shown in the vibration actuator 10C in Figure 17, in the vibration actuator 10, the electromagnet 22 may be replaced with a magnetic core 32 and placed on the magnetic yoke 80.

[0154] In the vibration actuator 10C shown in Figure 17, a magnetic yoke 80 is provided, connected to a magnetic core 30 on which an electromagnet 20 is located, via an elastic support 60 and a weight 90. The magnetic pole 36, substrate 42, and coil 52, which constitute the electromagnet 22, are arranged on the upper surface of this magnetic yoke 80. The magnetic pole 36 faces the weight 92 and the magnetic core 32, which is positioned opposite to it via the elastic support 62.

[0155] Figures 18A and 18B show the mounting state of the vibration actuator to the vibration display device. Figure 18A shows a suspended type that is mounted while suspended from the object to be mounted, while Figure 18B shows a configuration that connects to both the mounting surface and the opposing surface of the object to be mounted.

[0156] As shown in Figure 18A, when the vibration actuator 10C is fixed in a suspended state to the mounting object (mounting surface) in the device, vibration is applied to the mounting surface by indirect drive. On the other hand, as shown in Figure 18B, when the vibration actuator 10C is positioned between the mounting surface and the opposing surface in the device, vibration is applied directly to the mounting surface.

[0157] (Embodiment 4) Figure 19 is an external perspective view of a vibration actuator according to Embodiment 4 of the present invention, and Figure 20 is a sub-assembly drawing of the same vibration actuator. Figure 21 is a schematic cross-sectional view showing the main components of the same vibration actuator.

[0158] In the vibration actuator 10, a configuration having multiple elastic support parts 60 is used, but the configuration is not limited to this, as long as it has electromagnet parts 20 and 22.

[0159] The vibration actuator 10D shown in Figures 19 to 21 has the same basic configuration as the vibration actuator 10, but the elastic support part has a single sheet with multiple electromagnet parts 20 and 22.

[0160] Compared to the vibration actuator 10, the vibration actuator 10D has the same configuration up to the magnetic core (first planar body) 30, elastic support part 60 and electromagnet part 20, weight 90 and magnetic yoke (third planar body) 80, but the laminated structure above that is different.

[0161] An electromagnet section 22, that is, a substrate section 42, a magnetic pole section 36, and a coil 52, is arranged on the upper surface 803 of the magnetic yoke 80, and a weight 92 is arranged so as to surround the coil 52.

[0162] Weight 92 is fixed to the magnetic yoke 80 at a different position from weight 90, rotated 90 degrees relative to weight 90, via the movable joint 902.

[0163] The magnetic core 32 is fixed to the weight 92 in a stacked state.

[0164] In this configuration, the magnetic core 30 is fixed and attached to the mounting surface to which it is to be installed. The electromagnet 22 functions as a movable part connected to the magnetic core 30 via the elastic support part 60, in addition to the magnetic yoke 80, magnetic core 32, and weights 90 and 92. These features allow for an increase in the weight of the movable parts, and since it is driven by two electromagnets 20 and 22, high vibration can be achieved. Furthermore, since there is only one elastic support part 60, costs can be reduced. Furthermore, the vibration actuator 10D may be used with the magnetic core 32 inverted relative to the magnetic core 30. Alternatively, the magnetic core 32 may be mounted on the magnetic yoke 80 after being rotated 90 degrees together with the weight 90.

[0165] (Embodiment 5) Figure 22 is a sub-assembly diagram of a vibration actuator according to Embodiment 5 of the present invention, and Figure 23 is a schematic cross-sectional view showing the main components of the vibration actuator according to Embodiment 5.

[0166] In the configuration of the vibration actuator 10, for example, air holes may be provided to connect the internal spaces between the magnetic core 30 and the magnetic yoke 80, and between the magnetic yoke 80 and the magnetic core 32.

[0167] The vibration actuator 10E shown in Figures 22 and 23 has a configuration in which an opening 800 is provided in the center of the magnetic yoke 80 in the vibration actuator 10.

[0168] Because there is an opening 800 in the center, the heights of the magnetic poles 34 and 36, which are positioned opposite each other above and below the magnetic yoke 80, can be increased, bringing them closer together through the opening 800 and shortening the gap, thereby increasing the magnetic attraction or repulsion force. In addition, the drive area of ​​the movable part can be secured.

[0169] Furthermore, in a structure where the magnetic yoke 80 is made of a magnetic material to generate magnetic attraction, if the magnetic yoke 80 is made non-magnetic, the magnetic flux will not pass through the non-magnetic yoke but will instead magnetically attract or repel each other at the magnetic poles of the opposing surfaces of the magnetic pole parts 34 and 36, thereby driving the movable part. Also, by utilizing the magnetic repulsion between the magnetic pole parts 34 and 36, the initial direction of movement can be changed, the timing of the drive control can be accelerated, and the crispness of the tactile sensation can be increased. This configuration can also be applied to vibration actuators of other embodiments formed in a similar manner.

[0170] Figure 24 is a schematic cross-sectional view showing the main components of a vibration actuator according to Embodiment 6 of the present invention. In the configuration of the vibration actuator 10, for example, the magnetic yoke 80 may be omitted.

[0171] The vibration actuator 10F shown in Figure 24 is a configuration in which the magnetic yoke 80 of the vibration actuator 10 is removed, and the weights 92, 92 that are fixed to the upper and lower surfaces of the magnetic yoke 80 are fixed together to form a single unit.

[0172] In the vibration actuator 10F, weights 90 and 92 are integrally positioned between the magnetic cores 30 and 32, respectively, connected via elastic support parts (not shown) between the magnetic cores 30 and 32, and one of the magnetic cores 30 and 32 moves due to the magnetic attraction or repulsion force between them.

[0173] The vibration actuators 10, 10A to 10E can be connected to a vibration presenter that receives a user's pressing operation via one of the magnetic cores 30 and 32, which are provided with an electromagnet 20.

[0174] Furthermore, since it has multiple movable parts and the weight of the movable parts can be efficiently increased by sharing materials, it is possible to secure sufficient weight for the movable parts without using high-density materials, thereby reducing costs.

[0175] The vibration actuator uses multiple electromagnet units 20 and 22 to control the movement of multiple movable parts (magnetic yoke 80, magnetic core 32). The direction of movement can be changed by utilizing the repulsion of the magnetic field by adjusting the direction of application to multiple coils 50 and 52 or the winding direction of coils 50 and 52.

[0176] Thus, the vibration actuator 10 is formed in the shape of a flat plate, and one of the electromagnet part 20 and the movable part is made the movable part and moves in one direction in the stacking direction (thickness direction) toward the fixed part, which is the other part. In addition, the vibration actuator 10 generates vibration by moving the two adjacent parts toward each other in the opposite direction by the reaction force of the elastic support part 60.

[0177] The vibration actuator 10 vibrates the mounting surface of an object to be mounted, such as a touch panel or other operating surface that is operated by a user, and the mounting surface is mounted to the product housing in a way that allows it to vibrate.

[0178] <Driving principle of vibration actuator 10> The driving principle of the vibration actuator 10 is briefly described below. The vibration actuator 10 can also be driven by generating a resonance phenomenon using pulses with the following equations of motion and circuit equations. Note that the operation is not resonant driving, but rather expresses the feeling of operation on the trackpad (see Figure 25) as a vibration presentation device 500, and is driven by inputting current pulses (one or more) via a control unit (not shown). Alternatively, the vibration actuator 10 may be driven by inputting a sinusoidal or cosine wave voltage to the coil 50 by supplying power from an AC power source as the current supplied to the coil 50 via the control unit, thereby causing the movable part to vibrate. Preferably, an AC voltage is applied to the vibration actuator 10, and the vibration actuator 10 generates vibration when a sinusoidal drive signal is input.

[0179] In the vibration actuator 10, if the electromagnet 20 is fixed to the housing as a fixed surface, and all members that are supported to vibrate freely relative to it are movable parts, the movable parts perform reciprocating motion based on equations (1) and (2). Furthermore, if the electromagnet 20 is a movable part, and the movable part has a fixed surface, and is fixed to the housing at the fixed surface, the same reciprocating motion is performed by swapping the movable parts and satisfying equations (1) and (2).

[0180]

number

[0181]

number

[0182] That is, the mass m [kg], displacement x (t) [m], and thrust constant K in the vibration actuator 10. f [N / A], current i(t)[A], spring constant K sp The voltage [N / m], damping coefficient D [N / (m / s)], etc., can be appropriately changed within the range that satisfies equation (1). Also, voltage e(t) [V], resistance R [Ω], inductance L [H], and back electromotive force constant K e [V / (rad / s)] can be changed as appropriate within the range that satisfies equation (2).

[0183] Thus, the vibration in the vibration actuator 10 is due to the mass m of the movable part and the spring constant K of the metal spring (a leaf spring in this embodiment) that serves as the elastic support part 60. sp This is determined by [the specified parameters]. Furthermore, the vibration generated by the vibration actuator 10 can be changed by the input voltage (for example, a pulse, sinusoidal, or cosine waveform voltage).

[0184] In this embodiment, the actuator drive signal corresponds to a drive current pulse (also referred to as a "current pulse") supplied to the coil 50 as a drive current that drives the movable part and the operating device. In the vibration actuator 10, when a current pulse is supplied to the coil 50, the movable part moves toward the electromagnet 20 in one direction due to the magnetic attraction force between the electromagnet 20 and the movable part, undergoing mechanical displacement, stopping the supply, and then vibrating freely. The resulting vibration is then applied to the operating device. The elastic support 60 can control the displacement due to the magnetic attraction force and the free vibration period.

[0185] Furthermore, the actuator drive signal is generated by inputting a signal from a detection unit that detects the operator's operation. The detection unit may, for example, use a pressure sensor that senses the pressure applied by the operator as a pressure signal and converts that pressure signal into an electrical signal for output. Alternatively, the detection unit may be a capacitive type, or a proximity sensor that detects the position of the operator's finger (the object being pressed) by detecting the capacitive coupling between the operator's finger and the finger used to press the vibration prompter.

[0186] When the vibration actuator 10 is used, for example, in a vibration presentation device, it is desirable that it provides a crisp and suitable tactile sensation and force feedback when the operator touches and operates the device, thereby generating vibrations to provide a tactile sensation. In response to this, the vibration actuator 10 has an air vent to greatly reduce the damping of vibrations after operation in order to improve tactile sensation and force feedback. As a result, the so-called lingering vibrations after the vibration is generated (also called "vibration resonance") subside, making the intensity of the tactile sensation clearer and providing a crisp tactile sensation.

[0187] Furthermore, each vibration actuator 10A to 10F defines the vibration amplitude of the magnetic member or core in the space formed between the electromagnet and the magnetic core or magnetic yoke (first, second, or third planar body) by the spring constant of the elastic support. The vibration amplitude of the magnetic member or core in the space formed between the electromagnet and the magnetic member or core is defined by the thickness of the elastic body.

[0188] Furthermore, in the vibration actuators 10, 10A to 10F, whether the magnetic cores 30 and 32 are fixed or movable is determined by the magnetic core fixed to the housing, so either is acceptable. Also, the magnetic cores 30 and 32 may be fixed to both the mounting surface and the opposing surface, or they may be mounted so as to be suspended from the mounting surface. In addition, the type and timing of the drive signals to each coil 50 and 52 can be changed as appropriate, allowing for vibration damping or vibration amplification and continuation. As a result, the vibration actuators 10, 10A to 10F can output a variety of suitable vibrations while achieving a thin profile, providing a diverse range of operating sensations.

[0189] Furthermore, in each vibration actuator, if the elastic body (plate-shaped elastic part) is a rectangular frame-shaped elastic body (frame) as shown in the vibration actuator 10 of the embodiment, the elastic body may support the core part on one opposite side and be connected to a magnetic yoke on the other opposite side. That is, the first planar body and the third planar body may be connected at a point offset by 90° via the elastic support part.

[0190] <Vibration prompting device (contact type input device) 500> Figure 25 is a diagram illustrating the operation of a vibration presentation device equipped with the same vibration actuator, and Figure 26 is a diagram showing a modified example of the vibration presentation device equipped with the same vibration actuator.

[0191] The vibration feedback device 500 is, for example, a trackpad used as a pointing device in place of a mouse in a laptop computer or the like.

[0192] The trackpad, which functions as a vibration feedback device 500, is positioned in a rectangular opening 540 provided in the casing of a laptop computer or the like. The trackpad has a plate-shaped pad body 510 that is traced with a finger for contact operation, a vibration actuator 10 positioned on the back surface of the pad body 510, and a frame portion 520 that partitions the opening 540 surrounding the vibration actuator 10.

[0193] The trackpad uses a vibration actuator 10 to provide tactile vibrations when the pad body 510 is touched, such as by tracing or tapping it with a finger. The vibration actuator 10 may be replaced with any of the vibration actuators 10A to 10F.

[0194] The vibration actuator 10 in the trackpad has a magnetic core 32 attached to the back surface of the pad body 510, and directly drives the pad body 510 to impart vibration to the user. Specifically, as shown in Figures 25 and 26, the back surface of the magnetic core 30 is fixed as a fixed surface to the bottom surface 530 of the opening 540 of the housing, and the movable part is fixed to the back surface of the pad body 510. The pad body 510 is positioned so as to close the opening 540 at the top of the opening 540. The pad body 510 is supported by a frame portion 520 that partitions the housing via a cushioning material 550.

[0195] The pad body 510 is fixed to the movable part via double-sided tape or the like as a fastening material. In addition, in the configuration of the vibration presentation device 500, the vibration actuator 10 may be mounted to indirectly drive the pad body 510 via the magnetic core 32 to apply vibration. The movable part including the magnetic core 32 may move by performing contact operations such as tracing or tapping the pad body 510 with a finger, thereby generating vibrations.

[0196] When the pad body 510 is touched by a finger, such as by tracing or tapping it, a pressure sensor (detection unit) (not shown) may detect this operation, and the vibration actuator 10 may be driven based on the signal from this pressure sensor.

[0197] Specifically, the vibration feedback device 500 vibrates when an object such as the operator's fingertip comes into contact with the trackpad body 510 and is operated. In response, the vibration actuator 10 is driven to vibrate. This vibration provides the operator with a tactile sensation. For example, if the operation involves pressing a switch, the device can provide the sensation of pressing the switch.

[0198] Furthermore, since the vibration actuator 10 is positioned on the back of the pad body 510, vibration can be directly applied to provide a superior tactile sensation. In addition, because the vibration actuator 10 is a thin, flat plate, it does not occupy a large amount of space in the mounted vibration presentation device (contact-type input device) 500, thereby improving the design of the contact-type input device.

[0199] Furthermore, the vibration actuator 10 may, for example, provide various types of tactile sensations to the trackpad in response to the displayed image operated by the user, such as when an electronic device equipped with a trackpad has a display unit such as an LCD. The vibration actuator 10 may also generate vibrations to provide the tactile sensation of a mechanical switch corresponding to the image being touched and operated. Examples of mechanical switches include tactile switches, alternate switches, momentary switches, toggle switches, slide switches, rotary switches, DIP switches, rocker switches, etc. In the case of push-type switches, the tactile sensations of switches with different degrees of pressure can also be provided.

[0200] Thus, the vibration presentation device 500 of this embodiment realizes realistic tactile sensations, such as the feel of a switch, through realistic tactile sensations based on load detection. It goes without saying that the vibration actuators 10A to 10F are driven by the same driving principle as the vibration actuator 10.

[0201] In the vibration presentation device 500, the vibration actuator 10 is positioned between the pad body 510 and the bottom surface 530, and the magnetic cores 32 and 30 are attached to the pad body 510 and the bottom surface 530 respectively, thus providing vibration by so-called direct drive. However, the device is not limited to this configuration. Alternatively, one of the magnetic cores 30 and 32 may be fixed to the back surface of the pad body 510 and suspended, providing vibration by indirect drive.

[0202] The vibration feedback device 500 has a configuration that is advantageous for the corners of the touchpad. For example, when it is mounted in the center on the back of the pad body 510, the load applied to the furthest point, especially the corner of the mounting surface, is the load that causes the elastic support part (spring) to twist the most. In this way, the torsional rigidity is increased, which allows the pad body 510 to be pushed down while remaining parallel to the bottom surface (opposing surface) 530, and the difference in tactile sensation within the surface is reduced. [Industrial applicability]

[0203] The vibration actuator and vibration feedback device according to the present invention have the effect of providing a variety of suitable vibrations while being made thinner, thereby providing a diverse range of tactile sensations, and are useful for use in applications such as PCBs, trackpads, and control panels. [Explanation of Symbols]

[0204] 10, 10A, 10B, 10C, 10D, 10E, 10F Vibration actuator, 20, 22 Electromagnet section, 30 Magnetic core (first planar body), 32 Magnetic core (second planar body), 34, 36 Magnetic pole section, 40, 42 Substrate section, 50, 52 Coil, 60, 62 Elastic support section, 80 Magnetic yoke (third planar body), 90 Weight (first weight), 92 Weight (second weight), 302 Notch, 304 Plate-shaped projection, 305 Window section, 308 Fixing hole, 402 Substrate body, 403, 501, 540, 601, 800 Opening, 404 Extension, 441 Land, 500 Vibration feedback device, 510 Pad body, 520 Frame, 530 Bottom, 550 Cushioning material, 603 Movable part side connection, 604 Edge, 605 Core side connection (connecting piece), 607 Positioning part, 802 Bottom surface, 804, 806 Fixing parts, 902 Movable part joint, 904 Recess

Claims

1. A magnetic material comprising a first planar body and a second planar body arranged opposite each other, A third planar body containing a magnetic material is disposed between the first planar body and the second planar body, A plate-shaped electromagnet portion having a magnetic pole portion, a flat plate-shaped coil surrounding the magnetic pole portion, and a substrate portion connected to the coil, and positioned on one of the first planar body and the third planar body opposite the other planar body, Another electromagnet component configured similarly to the electromagnet component, wherein the other electromagnet component is positioned on the other planar body opposite to one of the planar bodies of the second planar body and the third planar body, An elastic support portion that supports the third planar body so as to be movable relative to the first planar body in an opposing direction, Equipped with, The magnetic force generated by energizing the multiple coils causes at least two of the first, second, and third planar bodies to be displaced and vibrate so that they are in close proximity to each other. Vibration actuator.

2. The third planar body is supported by other elastic support parts so as to be movable relative to the second planar body in the direction opposite to the second planar body, The electromagnet portion is fixed to the first planar body, and the other electromagnet portion is fixed to the second planar body. The vibration actuator according to claim 1.

3. The third planar body comprises a rectangular plate-shaped yoke and Multiple weights are arranged on the upper and lower surfaces of the yoke, It has, Each of the aforementioned weights is connected to the elastic support portion and the other elastic support portion so as to be movable in the opposing direction by the deformation of the elastic support portion and the other elastic support portion. The vibration actuator according to claim 2.

4. The elastic support portion is a rectangular frame surrounding the first planar body, connected to the first planar body by a pair of connecting pieces protruding inward from opposite sides of the frame, and connected to the other opposite side in which a first weight, one of the plurality of weights, disposed on the lower surface of the yoke, is suspended. The other elastic support portion is formed in the same manner as the elastic support portion and is connected to a second weight disposed on the upper surface of the yoke by connecting pieces on opposite sides that are spaced apart in a direction perpendicular to the first weight. The vibration actuator according to claim 3.

5. Claim 1: A vibration actuator is positioned on the back surface of the operating surface and is driven in response to an operation on the operating surface. Vibration presentation device.

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