Methods and apparatus for chemical substance delivery
The manifold system with angled and parallel inlets addresses the challenge of delivering incompatible chemicals in semiconductor manufacturing by ensuring safe and efficient chemical delivery to the reaction chamber.
Patent Information
- Application Number
- JP2025284902
- Authority / Receiving Office
- JP · JP
- Patent Type
- Applications
- Current Assignee / Owner
- Priority Date
- 2024-12-31
- Filing Date
- 2025-12-26
- Publication Date
- 2026-07-13
AI Technical Summary
Semiconductor manufacturing systems face challenges in delivering multiple incompatible chemicals through a common manifold, which can lead to safety issues and inefficiencies.
A manifold system with separate inlets and a dome-shaped region that separates and angles the inlets to prevent mixing of incompatible chemicals, using a transport tube with angled and parallel inlets to ensure safe and efficient delivery.
Ensures safe and efficient delivery of incompatible chemicals to a reaction chamber, preventing mixing and enhancing process control in semiconductor manufacturing.
Smart Images
Figure 2026116845000001_ABST
Abstract
Description
Technical Field
[0001] The present disclosure generally relates to methods and apparatus for chemical delivery. More specifically, the present disclosure relates to flowing vapors from a plurality of containers into a reaction chamber via a manifold having separate inlets that enable the vapors from each container to be separated from one another.
Background Art
[0002] Some semiconductor manufacturing systems have a manifold for delivering chemicals to a reaction chamber. In some cases, multiple chemicals that are incompatible with each other need to pass through a common manifold.
Summary of the Invention
Means for Solving the Problems
[0003] Various embodiments of the present technology may provide an apparatus for chemical delivery, comprising a transport tube including a dome-shaped region connected to an end of a hollow cylinder, a first inlet coupled to the transport tube and in fluid communication with the transport tube, a second inlet coupled to the transport tube and in fluid communication with the transport tube, and a third inlet coupled to the transport tube and in fluid communication with the transport tube, wherein the first inlet, the second inlet, and the third inlet are arranged along a common plane.
[0004] According to one aspect, the apparatus comprises a transport tube including a dome-shaped region connected to an end of a hollow cylinder, a first inlet coupled to the transport tube and in fluid communication with the transport tube, a second inlet coupled to the transport tube and in fluid communication with the transport tube, and a third inlet coupled to the transport tube and in fluid communication with the transport tube, wherein the first, second, and third inlets are arranged along a common plane.
[0005] In one embodiment of the above apparatus, the first inlet is angled with respect to the common plane.
[0006] In one embodiment of the above apparatus, the first inlet is parallel to the common plane.
[0007] In one embodiment of the above apparatus, the second inlet is angled with respect to the common plane.
[0008] In one embodiment of the above apparatus, the second inlet is parallel to the common plane.
[0009] In one embodiment of the above-described apparatus, the third inlet is angled with respect to the common plane.
[0010] In one embodiment of the above apparatus, the third inlet is parallel to the common plane.
[0011] In one embodiment of the above-described apparatus, the first, second, and third inlets are arranged around a hollow cylinder at different angles to each other.
[0012] In one embodiment of the above-described apparatus, the first and second inlets are positioned at a 90-degree angle to each other.
[0013] In one embodiment of the above-described apparatus, the first and third inlets are positioned at 135 degrees from each other.
[0014] In one embodiment of the above-described apparatus, the first, second, and third inlets are located below the dome-shaped region.
[0015] In yet another embodiment, the apparatus comprises a transport pipe including a dome-shaped region coupled to the end of a hollow cylinder; a first inlet connected to the transport pipe and in fluid communication with the transport pipe, and angled upward toward the dome-shaped region; a second inlet connected to the transport pipe and in fluid communication with the transport pipe, and angled upward toward the dome-shaped region; and a third inlet connected to the transport pipe and in fluid communication with the transport pipe, and angled upward toward the dome-shaped region, wherein the first, second, and third inlets are arranged around the transport pipe at different angles to each other.
[0016] In one embodiment of the above-described apparatus, the first, second, and third inlets are arranged along a common plane.
[0017] In one embodiment of the above-described apparatus, the first and second inlets are positioned at 90 degrees from each other, and the first and third inlets are positioned at 135 degrees from each other.
[0018] In one embodiment of the above-described apparatus, the second and third inlets are positioned at 135 degrees from each other.
[0019] In yet another embodiment, the system includes a reaction chamber; a manifold fluidly communicating with the reaction chamber and located upstream of the reaction chamber, the manifold comprising a dome-shaped region connected to the first end of a hollow cylinder; a manifold comprising a first inlet connected to the transport pipe and fluidly communicating with the transport pipe, a second inlet connected to the transport pipe and fluidly communicating with the transport pipe, and a third inlet connected to the transport pipe and fluidly communicating with the transport pipe, wherein the first, second, and third inlets are located below the dome-shaped region and are arranged around the hollow cylinder at different angles to each other.
[0020] In one embodiment of the system described above, the first and second inlets are positioned at 90 degrees from each other, and the first and third inlets are positioned at 135 degrees from each other.
[0021] In one embodiment of the system described above, the second and third inlets are positioned at a 135-degree angle to each other.
[0022] In one embodiment of the system described above, each of the first, second, and third entrances is angled upward toward the dome-shaped region.
[0023] In one embodiment of the system described above, the first, second, and third inlets are arranged along a common plane.
[0024] This technology can be more fully understood by referring to the detailed description in connection with the following exemplary drawings. In the following figures, like elements and steps throughout the figures are denoted with like reference numerals.
Brief Description of the Drawings
[0025] [Figure 1] FIG. 1 is a diagram typically showing a system according to an embodiment of the present technology. [Figure 2] FIG. 2 is a cross-sectional view of a manifold according to multiple embodiments of the present technology. [Figure 3] FIG. 3 is a cross-sectional view of a manifold according to multiple embodiments of the present technology. [Figure 4] FIG. 4 is a top view of a manifold according to multiple embodiments of the present technology.
Modes for Carrying Out the Invention
[0026] This technology can be described from the perspective of the components of functional blocks and various processing steps. Such functional blocks can be realized by any number of components configured to perform a specific function and achieve various results. For example, this technology can use various gas lines, valves, controllers, reaction chambers, containers, and susceptors.
[0027] Referring to FIG. 1, an exemplary system 100 may be configured to include a reaction chamber 105 configured to perform processing on an object to be processed, such as a substrate (e.g., a wafer). For example, the reaction chamber 105 may be configured to perform heating, deposition, etching, polishing, ion implantation, and / or other processing on the object to be processed. In some embodiments, the reaction chamber 105 may be configured to perform a moving function, a vacuum sealing function, and an exhaust function. In some embodiments, the reaction chamber 105 may be configured to perform various semiconductor manufacturing processes, such as atomic layer deposition (ALD) processing or chemical vapor deposition (CVD) processing.
[0028] In various embodiments, the system 100 may further include a gas distribution system for delivering vapor to the reaction chamber 105. In an exemplary embodiment, the gas distribution system may include a manifold 115 that is in fluid communication with the reaction chamber 105. The gas distribution system may further include a plurality of gas lines connected to the manifold 115. For example, the plurality of gas lines may include a first gas line 125, a second gas line 135, and a third gas line 145.
[0029] In various embodiments, the system 100 may further include a first vessel 120 configured to contain a chemical substance (i.e., a precursor). The first vessel 120 may be configured to hold a solid or liquid chemical substance and may further be configured to convert the solid or liquid into vapor. The first vessel 120 may be fluidly connected to the manifold 115 and the reaction chamber 105 via a first gas line 125.
[0030] The system 100 may further include a second vessel 130 configured to contain a chemical substance (i.e., a precursor). The second vessel 130 may be configured to hold a solid or liquid chemical substance, and may further be configured to convert the solid or liquid into vapor. The second vessel 130 may be fluidly connected to the manifold 115 and the reaction chamber 105 via a second gas line 135.
[0031] The system 100 may further include a third vessel 140 configured to contain a chemical substance (i.e., a precursor). The third vessel 140 may be configured to hold a solid or liquid chemical substance, and may further be configured to convert the solid or liquid into vapor. The third vessel 140 may be fluidly connected to the manifold 115 and the reaction chamber 105 via a third gas line 145.
[0032] In various embodiments, each of the containers 120, 130, and 140 may contain a different chemical substance. Furthermore, one container may contain an inert gas such as argon or nitrogen. In some cases, two containers may contain chemical substances that are incompatible with each other or that may cause safety problems if exposed to each other. Therefore, the gas lines delivering various chemical substances to the manifold 115 are separated and isolated from each other.
[0033] In various embodiments, the gas distribution system may further include a plurality of valves, for example, a first valve 150, a second valve 155, and a third valve 160. The first valve 150 may be located in a first gas line 125 between a first vessel 120 and a manifold 115. The second valve 155 may be located between a second vessel 130 and a manifold 115. The third valve 160 may be located between a third vessel 140 and a manifold 115. The valves 150, 155, and 160 may be communicatively coupled to and responsive to a controller (not shown) that operates (turns on and off) the valves.
[0034] Referring to Figures 1 to 4, the manifold 115 may be configured to include a transport pipe 200. The transport pipe 200 may be formed as a hollow cylinder having a side wall 230, a first open end connected to the reaction chamber 105, and an opposing second end. The manifold 115 may further include a dome-shaped region 205 connected to and located at the second end of the transport pipe 200. The dome-shaped region 205 can prevent the accumulation of chemicals at the end of the transport pipe 200.
[0035] The manifold 115 may be further configured to be connected to the transport pipe 200 and to have a plurality of inlets that communicate fluidly with the transport pipe 200. For example, the plurality of inlets may be configured to include a first inlet 210, a second inlet 211, and a third inlet 212. The first inlet 210 may be configured to include a first opening 215(a) connected to the first gas line 125 and a second opening 215(b) that communicates fluidly with the transport pipe 200. The second inlet 211 may be configured to include a first opening 220(a) connected to the second gas line 135 and a second opening 220(b) that communicates fluidly with the transport pipe 200. The third inlet 212 may be configured to include a first opening 225(a) connected to the third gas line 145 and a second opening 225(b) that communicates fluidly with the transport pipe 200.
[0036] In one embodiment, referring to Figure 2, the first, second, and third inlets 210, 211, and 212 may be angled with respect to the side wall 230 of the transport pipe 200. For example, the first inlet 210, the second inlet 211, and the third inlet 212 may be angled upward such that the angle A between the inlet and the side wall 230 is less than 90 degrees.
[0037] In another embodiment, referring to Figure 3, the first, second, and third inlets 210, 211, and 212 may be perpendicular to the side wall 230 of the transport pipe 200. In other words, they are at a 90-degree angle from the side wall 230.
[0038] In various embodiments, referring again to Figures 2 to 4, the second openings 215(b), 220(b), and 225(b) of each respective inlet 210, 211, and 212 may be located below the dome-shaped region 205. In various embodiments, the second openings 215(b), 220(b), and 225(b) are located along a shared virtual plane. In other words, the second openings 215(b), 220(b), and 225(b) are located at the same height along the transport pipe 200.
[0039] In various embodiments, and referring to Figure 4, the first openings 215(a), 220(a), and 225(a) may be arranged at different angles to each other. For example, in an exemplary embodiment, two of the openings, for example, openings 215(a) and 220(a), may be positioned at a first angle T1 from each other. Furthermore, two of the openings, for example, openings 220(a) and 225(a), may be positioned at a second angle T2 from each other, and two of the openings, for example, openings 215(a) and 225(a), may be positioned at a third angle T3 from each other. In some embodiments, the first angle T1 is 90 degrees, and the second and third angles T2 and T3 are 135 degrees.
[0040] In the preceding description, the technology has been described with reference to specific exemplary embodiments. The specific embodiments illustrated and described are illustrative of the technology and its best form and are not intended to limit the scope of the technology in any way. Also, for the sake of brevity, conventional manufacturing, connection, preparation, and other functional aspects of the method and system may not be described in detail. Furthermore, the connection lines shown in various figures are intended to represent exemplary functional relationships and / or processes between various elements. Many alternative or additional functional relationships or physical connections may exist in actual systems.
[0041] This technology has been described with reference to specific exemplary embodiments. However, various modifications and changes can be made without departing from the scope of this technology. This description and drawings are not restrictive but are considered illustrative, and any such modifications are intended to be included within the scope of this technology. Accordingly, the scope of this technology should be determined not merely by the specific embodiments described above, but by the general embodiments described and their legal equivalents. For example, the steps described in one embodiment of a method or process may be performed in any order unless otherwise expressly specified, and are not limited to the express order presented in a particular embodiment. Furthermore, components and / or elements described in one embodiment of any apparatus may be assembled or configured to operate in various ways to produce substantially the same results as in this technology, and are therefore not limited to the specific configurations described in a particular embodiment.
[0042] Benefits, other advantages, and solutions to problems have been described above with reference to specific embodiments. However, any element that may produce or make more prominent any benefit, advantage, solution to a problem, or any particular benefit, advantage, or solution is not to be construed as an important, required, or essential feature or component.
[0043] The terms “comprises” and “comprising,” or any variation thereof, are intended to mean non-exclusive inclusion, and that a process, method, article, composition, or apparatus comprising the listed elements may include not only those elements listed, but also other elements not expressly listed or specific to such process, method, article, composition, or apparatus. In addition to those not specifically listed, other combinations and / or modifications of the above-mentioned structures, arrangements, uses, proportions, elements, materials, or components used in the practice of this art may be changed or otherwise specifically adapted to a particular environment, manufacturing specification, design parameter, or other operating requirement without deviation from their general principles.
[0044] The present technology has been described above with reference to exemplary embodiments. However, variations and modifications may be made to the exemplary embodiments without departing from the scope of the present technology. These and other changes or modifications are intended to be within the scope of the present technology as expressed in the following claims.
Claims
1. It is a device, A transport pipe including a dome-shaped region connected to the end of a hollow cylinder, A first inlet connected to the transport pipe and in fluid communication with the transport pipe, A second inlet is connected to the transport pipe and is in fluid communication with the transport pipe, It comprises a third inlet connected to the transport pipe and in fluid communication with the transport pipe, An apparatus in which the first inlet, the second inlet, and the third inlet are arranged along a common plane.
2. The apparatus according to claim 1, wherein the first entrance is angled with respect to the common plane.
3. The apparatus according to claim 1, wherein the first inlet is parallel to the common plane.
4. The apparatus according to claim 1, wherein the second entrance is angled with respect to the common plane.
5. The apparatus according to claim 1, wherein the second inlet is parallel to the common plane.
6. The apparatus according to claim 1, wherein the third entrance is angled with respect to the common plane.
7. The apparatus according to claim 1, wherein the third inlet is parallel to the common plane.
8. The apparatus according to claim 1, wherein the first inlet, the second inlet, and the third inlet are arranged around the hollow cylinder at different angles to each other.
9. The apparatus according to claim 1, wherein the first inlet and the second inlet are arranged at a 90-degree angle to each other.
10. The apparatus according to claim 1, wherein the first inlet and the third inlet are arranged at an angle of 135 degrees to each other.
11. The apparatus according to claim 1, wherein the first entrance, the second entrance, and the third entrance are located below the dome-shaped region.
12. It is a device, A transport pipe including a dome-shaped region connected to the end of a hollow cylinder, A first inlet is connected to the transport pipe and is in fluid communication with the transport pipe, and is angled upward toward the dome-shaped region, A second inlet is connected to the transport pipe and is in fluid communication with the transport pipe, and is angled upward toward the dome-shaped region, It comprises a third inlet connected to the transport pipe and in fluid communication with the transport pipe, and angled upward toward the dome-shaped region, An apparatus in which the first inlet, the second inlet, and the third inlet are arranged around the transport pipe at different angles to each other.
13. The apparatus according to claim 12, wherein the first inlet, the second inlet, and the third inlet are arranged along a common plane.
14. The apparatus according to claim 12, wherein the first inlet and the second inlet are arranged at a 90-degree angle to each other, and the first inlet and the third inlet are arranged at a 135-degree angle to each other.
15. The apparatus according to claim 14, wherein the second inlet and the third inlet are arranged at an angle of 135 degrees to each other.
16. It is a system, Reaction chamber and A manifold that is in fluid communication with the reaction chamber and is located upstream of the reaction chamber, A transport pipe having a dome-shaped region connected to the first end of a hollow cylinder, A first inlet connected to the transport pipe and in fluid communication with the transport pipe, A second inlet is connected to the transport pipe and is in fluid communication with the transport pipe, A third inlet is connected to the transport pipe and is in fluid communication with the transport pipe, A system comprising a manifold, wherein the first inlet, the second inlet, and the third inlet are located below the dome-shaped region and are arranged around the hollow cylinder at different angles to each other.
17. The system according to claim 16, wherein the first inlet and the second inlet are arranged at a 90-degree angle to each other, and the first inlet and the third inlet are arranged at a 135-degree angle to each other.
18. The system according to claim 17, wherein the second inlet and the third inlet are arranged at an angle of 135 degrees to each other.
19. The system according to claim 16, wherein each of the first entrance, the second entrance, and the third entrance is angled upward toward the dome-shaped region.
20. The system according to claim 16, wherein the first entrance, the second entrance, and the third entrance are arranged along a common plane.