Pendulum valve

Abstract

This invention provides a pendulum valve that can switch between a vacuum-blocked state and a flow-through state, without reducing viscous flow conductance. [Solution] The pendulum valve 100 includes a valve body 5 that can move between an intersection position with respect to the flow path H connecting a first opening 12a and a second opening 12b, a closed position of the first opening, and an outer position outside the flow path; a rotational drive unit 21 that rotates the valve body between the intersection position and the outer position; a continuous flow path cylindrical member 80 that forms part of the flow path connecting the first opening and the second opening and is movable along the flow path; and a cylindrical extension / retraction drive unit 700 that makes the continuous flow path cylindrical member operable along the flow path between a retracted position in which the valve body can rotate between the intersection position and the outer position, an extended closed position in which the valve body in the closed position is pressed to enable the closure of the first opening, and an extended connecting position in which the continuous flow path cylindrical member connects the first opening and the second opening and maintains airtightness of the flow path.

Description

[Technical Field]

[0001] The present invention relates to a pendulum valve. [Background Art]

[0002] Conventionally, pendulum valves for high-vacuum evacuation have been used in semiconductor manufacturing apparatuses and FPD manufacturing apparatuses. The applicants of the present application have made improvements as described in patent documents. [Prior Art Documents] [Patent Documents]

[0003] [Patent Document 1] Japanese Patent No. 6864040 [Patent Document 1] Japanese Patent No. 5690220 [Summary of the Invention] [Problem to be Solved by the Invention]

[0004] In such a pendulum valve, a retraction space for retracting the valve plate is formed so as to intersect with the flow path. Conventionally, use in a substantially vacuum atmosphere has been assumed. However, improvements in performance in atmospheric atmosphere or low-vacuum atmosphere are being studied. For example, problems are examined in the case where a pendulum valve is applied to a system having a cycle that repeats opening to atmosphere and evacuation at high frequency.

[0005] As one of the above problems, when a conventional pendulum valve is used in a viscous flow pressure region such as an atmospheric atmosphere or a low-vacuum atmosphere, the retraction space affects the fluid flowing through the flow path, which may potentially cause a decrease in viscous flow conductance. In addition, for conventional pendulum valves premised on use in high vacuum, the sealing portion and other components are over-specification, and there has been a demand to provide the valve with a simpler structure and at lower cost.

[0006] This invention has been made in view of the above circumstances and aims to achieve the following objectives. 1. To provide a pendulum valve that does not experience a decrease in viscous flow conductance even when used in the viscous flow pressure region. 2. Optimize for systems that perform high-frequency exhaust. [Means for solving the problem]

[0007] (1) A pendulum valve according to one aspect of the present invention is A valve body having a first opening and a second opening located on the same flow path, A valve body that is movable between the intersecting position of the flow path line connecting the first opening and the second opening, the closed position of the first opening, and an external position outside the flow path line, A rotational drive unit that rotates the valve body between the intersection position and the outer position, A continuous flow channel cylindrical member that constitutes a part of the flow channel connecting the first opening and the second opening and is movable along the flow channel, A cylindrical extension / retraction drive unit that enables the continuous flow channel cylindrical member to move along the flow channel between a retracted position in which the valve body is rotatable between the intersection position and the outer position, an extended closed position in which the valve body in the closed position is pressed to enable the closure of the first opening, and an extended connecting position in which the continuous flow channel cylindrical member connects the first opening and the second opening to maintain airtightness of the flow channel, Equipped with, This resolved the above issues. (2) The pendulum valve of the present invention, in the above (1), When the valve body moves from the aforementioned intersection position to the aforementioned closed position, the end of the continuous flow channel member abuts against and presses against the valve body. It is possible. (3) The pendulum valve of the present invention, in the above (1), When viewed in the direction of the flow path, the inner diameter of the end of the continuous flow path member facing the first opening is equal to the inner diameter of the first opening. It is possible. (4) The pendulum valve of the present invention, in the above (1), The aforementioned cylindrical extension / retraction drive unit is The aforementioned continuous flow channel cylindrical member is extended and retracted by an extendable drive cylinder, A drive pressure generating mechanism connected to the aforementioned telescopic drive cylinder and operating the aforementioned telescopic drive cylinder, Having It is possible. (5) The pendulum valve of the present invention, in the above (1), The continuous flow channel member has a diameter-uniformizing portion that moves integrally in the direction of the flow channel while making the inner diameter of the flow channel uniform, It is possible. (6) The pendulum valve of the present invention, in the above (1), The valve body is, A valve plate that can abut and close the peripheral edge of the first opening at the closed position, and is movable between the intersection position and the closed position, A rotating shaft that allows the valve plate to rotate between the aforementioned intersection position and the aforementioned outer position, A valve plate movement restricting unit supports the valve plate so that it can move between the intersection position and the closed position with respect to the rotation axis, Having It is possible. (7) The pendulum valve of the present invention, in the above (1), The first opening has a first opening sealing portion that seals the peripheral edge of the first opening and the valve body or the continuous flow tube member, The first opening seal portion is, The peripheral edge of the first opening and At the extended connecting position, the end of the continuous flow channel member that abuts against the peripheral edge of the first opening, The peripheral edge of the sealing surface of the valve body that abuts the peripheral edge of the first opening in the closed position, Placed in It is possible. (8) The pendulum valve of the present invention, in the above (1), The aforementioned continuous flow tube member is A closing cylinder portion that forms the flow path connecting the first opening and the second opening and closes off from the surroundings, a second opening seal portion that seals between the peripheral edge portion of the second opening of said valve body and said flow path continuous cylindrical member, comprising: wherein said second opening seal portion is provided on an outer peripheral surface of said closed cylindrical portion, this is possible. (9) The pendulum valve of the present invention, as defined in (1) above, said flow path continuous cylindrical member: a closed cylindrical portion that constitutes said flow path connecting said first opening and said second opening and closes the flow path from the periphery, and a flange portion formed radially outward at an end portion close to said first opening in an axial direction of said closed cylindrical portion, this is possible. (10) The pendulum valve of the present invention, as defined in (1) above, said flow path continuous cylindrical member: a diameter uniformizing portion that moves integrally in the flow path direction while uniformizing an inner diameter dimension of said flow path, a second opening seal portion that seals between the peripheral edge portion of the second opening of said valve body and said flow path continuous cylindrical member, comprising: wherein said second opening seal portion is formed on said diameter uniformizing portion, this is possible.

[0008] (1) A pendulum valve according to one aspect of the present invention, a valve box having a first opening and a second opening located on the same flow path line; a valve body capable of moving between an intersecting position relative to said flow path line connecting said first opening and said second opening, a closing position of said first opening, and an outer position outside said flow path line; a rotary drive portion that rotationally drives said valve body between said intersecting position and said outer position; a flow path continuous cylindrical member that constitutes a part of the flow path connecting said first opening and said second opening and is movable along said flow path; A cylindrical extension / retraction drive unit that enables the continuous flow channel cylindrical member to move along the flow channel between a retracted position in which the valve body is rotatable between the intersection position and the outer position, an extended closed position in which the valve body in the closed position is pressed to enable the closure of the first opening, and an extended connecting position in which the continuous flow channel cylindrical member connects the first opening and the second opening to maintain airtightness of the flow channel, Equipped with, This resolved the above issues.

[0009] In the above configuration, the cylindrical extension drive unit sets the continuous flow tube member to the retracted position, the rotation drive unit rotates the valve body to the intersection position, and the cylindrical extension drive unit extends the continuous flow tube member to contact the valve body. When the continuous flow tube member is further extended in this state, it presses against the valve body. The continuous flow tube member and the valve body move together as a single unit while in contact, and the continuous flow tube member reaches the extended closed position, and the valve body reaches the closed position. This makes it possible to put the pendulum valve into a vacuum closed state. In this vacuum closed state, the pendulum valve can maintain vacuum airtightness at the first opening with the valve body. Therefore, the first opening of the pendulum valve can be sealed and a sealed state can be maintained. Furthermore, when the continuous flow tube member is retracted by the tube extension / retraction drive unit from the vacuum-closed state, the continuous flow tube member and the valve body move together in contact, and the valve body moves away from the first opening. When the valve body reaches the intersection position, the continuous flow tube member and the valve body move away from each other, the valve body stops at the intersection position, and the continuous flow tube member continues to retract further. The continuous flow tube member reaches the retracted position and stops. In this state, the valve body is rotated outward from the intersection position by the rotation drive unit. The continuous flow tube member is extended again by the tube extension / retraction drive unit, and the continuous flow tube member is brought into contact with the first opening. The continuous flow tube member stops at the extended contact position. As a result, the pendulum valve can be configured to have a flow channel connection state in which the first opening and the second opening are connected as a flow channel by the continuous flow tube member. In this flow channel connection state, the pendulum valve can allow a viscous fluid such as air to flow along the flow channel from the second opening to the first opening. A pendulum valve can switch between a flow path open state and a vacuum-blocked state. In other words, a pendulum valve can switch between a flow path open under low pressure and a flow path blocked under a vacuum atmosphere.

[0010] Furthermore, the term "flow path line" refers to the flow direction of the fluid flowing through the flow path and the flow region space where the flow exists, when a flow path is formed between the first and second openings. This means that even if the first and second openings are not connected by a continuous flow path cylindrical member, the corresponding space between the first and second openings is considered a flow path. In addition, the direction of the flow path line is represented by the direction along the centerline of the flow path, especially when the flow path shape is complex. In this case, the first and second openings may be eccentric in the direction of the flow path. Also, the first and second openings may not be parallel to each other. Furthermore, the external position is not specified as long as it is outside the area that forms the flow path and in a position where the valve body can rotate by the rotary drive unit; it can be any other position that does not obstruct the shielding of the flow path by the valve body. The rotational drive unit and the cylindrical extension drive unit have different driving directions relative to the valve body.

[0011] (2) The pendulum valve of the present invention, in the above (1), When the valve body moves from the aforementioned intersection position to the aforementioned closed position, the end of the continuous flow channel member abuts against and presses against the valve body. It is possible.

[0012] In the above configuration, the end of the continuous flow channel member abuts against and presses against the valve body, allowing the valve body, which is between the intersection position and the closed position, to move along the flow channel. Therefore, the continuous flow channel member and the valve body can be driven by the same drive mechanism, reducing the number of parts. Furthermore, since the rotary drive unit only rotates the valve body and does not move the valve body in the flow direction, the drive mechanism can be simplified.

[0013] (3) The pendulum valve of the present invention, in the above (1), When viewed in the direction of the flow path, the inner diameter of the end of the continuous flow path member facing the first opening is equal to the inner diameter of the first opening. It is possible.

[0014] In the above configuration, when the flow path is in communication, the inner surface of the continuous flow path cylindrical member at the extended connection position and the inner surface of the first opening are almost flush, and the viscous flow conductance of the viscous flow through the pendulum valve can be reduced when the flow path is in communication. Moreover, the continuous flow path cylindrical member defines the contour of the flow path and can be sealed to prevent the viscous flow from flowing out of the continuous flow path cylindrical member.

[0015] (4) The pendulum valve of the present invention, in the above (1), The aforementioned cylindrical extension / retraction drive unit is The aforementioned continuous flow channel cylindrical member is extended and retracted by an extendable drive cylinder, A drive pressure generating mechanism connected to the aforementioned telescopic drive cylinder and operating the aforementioned telescopic drive cylinder, Having It is possible.

[0016] In the above configuration, the continuous flow channel member is extended and retracted by the telescopic drive cylinder located in the valve body and the drive pressure generating mechanism located outside the valve body, thereby enabling switching between opening the flow channel by the continuous flow channel member and closing the first opening by the valve body.

[0017] (5) The pendulum valve of the present invention, in the above (1), The continuous flow channel member has a diameter-uniformizing portion that moves integrally in the direction of the flow channel while making the inner diameter of the flow channel uniform, It is possible.

[0018] In the above configuration, the diameter uniformization section prevents the recess, which serves as the retraction position for the continuous flow channel member, from being exposed to the flow channel. This allows the continuous flow channel member and the diameter uniformization section to define the contour of the flow channel flush with the surface, thereby reducing the viscous flow conductance in the viscous flow through the pendulum valve.

[0019] (6) The pendulum valve of the present invention, in the above (1), The valve body is, A valve plate that can abut and close the peripheral edge of the first opening at the closed position, and is movable between the intersection position and the closed position, A rotating shaft that allows the valve plate to rotate between the aforementioned intersection position and the aforementioned outer position, A valve plate movement restricting unit supports the valve plate so that it can move between the intersection position and the closed position with respect to the rotation axis, Having It is possible.

[0020] In the above configuration, the valve plate can be moved between the intersection position and the valve closing position solely by the expansion and contraction of the continuous flow tube member. At the same time, the continuous flow tube member can move the valve plate without interfering with the valve plate movement restricting part. As a result, with a simple configuration, both the opening of the flow path by the continuous flow tube member and the closing of the first opening by the valve plate can be switched on and off. The movable valve plate portion at the outer position may have a different distance from the first opening compared to the intersection position in the flow path direction connecting the first and second openings. For example, the distance from the first opening to the movable valve plate portion can be larger at the outer position compared to the intersection position. Similarly, the axial direction of the rotation axis may be different from the direction along the flow path. The movable valve plate portion works in cooperation with the continuous flow path cylinder member to close the pendulum valve.

[0021] (7) The pendulum valve of the present invention, in the above (1), The first opening has a first opening sealing portion that seals the peripheral edge of the first opening and the valve body or the continuous flow tube member, The first opening seal portion is, The peripheral edge of the first opening and At the extended connecting position, the end of the continuous flow channel member that abuts against the peripheral edge of the first opening, The peripheral edge of the sealing surface of the valve body that abuts the peripheral edge of the first opening in the closed position, Placed in It is possible.

[0022] In the above configuration, by providing a first opening seal portion at the end of the continuous flow channel member at the extended connection position and at the sealing surface of the valve body at the closed position, which are locations that abut the periphery of the first opening, the first opening can be sealed at both the extended connection position of the continuous flow channel member and the closed position of the valve body. This makes it possible to achieve the necessary sealing state when switching between the communication of the flow channel by the continuous flow channel member and the closure of the first opening by the valve plate, with a simple configuration.

[0023] (8) The pendulum valve of the present invention, in the above (1), The aforementioned continuous flow tube member is A closing cylinder portion that forms the flow path connecting the first opening and the second opening and closes off from the surroundings, The valve body has a second opening sealing portion that seals the peripheral edge of the second opening and the continuous flow channel cylindrical member, It has, The second opening seal portion is provided on the outer circumferential surface of the closing cylinder portion. It is possible.

[0024] In the above configuration, the second opening seal portion can maintain a tight seal between the second opening and the closing cylinder portion, which extends and retracts from the second opening toward the first opening. Moreover, since the end of the closing cylinder portion adjacent to the second opening does not move away from the second opening, the second opening seal portion can maintain a tight seal between the second opening and the closing cylinder portion regardless of the position of the continuous flow cylinder member in the flow direction.

[0025] (9) The pendulum valve of the present invention, in the above (1), The aforementioned continuous flow tube member is A closing cylinder portion that forms the flow path connecting the first opening and the second opening and closes off from the surroundings, The closing cylindrical portion has a flange portion formed radially outward at the end adjacent to the first opening in the axial direction, It is possible.

[0026] In the above configuration, when the closing cylinder portion extends or retracts from the second opening toward the first opening, the cylinder extension / retraction drive unit presses or pulls the flange portion, thereby changing the position of the continuous flow cylinder member. Furthermore, the cylinder extension drive unit can also be connected to the flange section.

[0027] (10) The pendulum valve of the present invention, in the above (1), The aforementioned continuous flow tube member is A diameter uniformizing section moves integrally in the direction of the flow path while making the inner diameter dimension of the flow path uniform, The valve body has a second opening sealing portion that seals the peripheral edge of the second opening and the continuous flow channel cylindrical member, It has, The second opening seal portion is formed in the diameter uniformization portion. It is possible.

[0028] In the above configuration, The diameter equalization section moves integrally with the closing cylinder section, which expands and contracts from the second opening toward the first opening. Therefore, the second opening seal section can maintain a tight seal between the second opening and the diameter equalization section. Moreover, the second opening seal section can maintain a tight seal between the second opening and the diameter equalization section regardless of the position of the continuous flow cylinder member in the flow direction. [Effects of the Invention]

[0029] According to the present invention, it is possible to provide a pendulum valve in which the viscous flow conductance does not decrease even when used in the viscous flow pressure region, and it is possible to optimize a pendulum valve designed for high vacuum, which is over-specced, for the viscous flow pressure region. [Brief explanation of the drawing]

[0030] [Figure 1] This is a front view along the flow path showing a first embodiment of the pendulum valve according to the present invention. [Figure 2]This is a schematic cross-sectional view intersecting a flow path, showing a first embodiment of the pendulum valve according to the present invention. [Figure 3] This is a schematic diagram showing the drive mechanism in the first embodiment of the pendulum valve according to the present invention. [Figure 4] This is a process diagram showing the operation of the first embodiment of the pendulum valve according to the present invention. [Figure 5] This is a process diagram showing the operation of the first embodiment of the pendulum valve according to the present invention. [Figure 6] This is a process diagram showing the operation of the first embodiment of the pendulum valve according to the present invention. [Figure 7] This is a schematic cross-sectional view showing a second embodiment of the pendulum valve according to the present invention. [Figure 8] This is a schematic cross-sectional view showing a third embodiment of the pendulum valve according to the present invention. [Figure 9] This is a schematic cross-sectional view showing a fourth embodiment of the pendulum valve according to the present invention. [Figure 10] This is a schematic cross-sectional view showing a fifth embodiment of the pendulum valve according to the present invention. [Figure 11] This is a schematic cross-sectional view showing a sixth embodiment of the pendulum valve according to the present invention. [Figure 12] This is a schematic cross-sectional view showing a seventh embodiment of the pendulum valve according to the present invention. [Modes for carrying out the invention]

[0031] Hereinafter, a first embodiment of the pendulum valve according to the present invention will be described with reference to the drawings. Furthermore, in the figures used in the following explanation, the dimensions and proportions of each component have been appropriately altered from those of the actual components in order to make them recognizable in the drawings. The technical scope of the present invention is not limited to the embodiments described below, and various modifications can be made without departing from the spirit of the invention.

[0032] Figure 1 is a front view along the flow path showing the pendulum valve in this embodiment. Figure 2 is a schematic cross-sectional view intersecting the flow path showing the pendulum valve in this embodiment. In the figures, reference numeral 100 denotes the pendulum valve. The pendulum valve 100 according to this embodiment is a pendulum-type slide valve.

[0033] As shown in Figures 1 and 2, the pendulum valve 100 according to this embodiment comprises a valve body 10, a valve element 5, a rotating shaft 20, a rotating drive unit 21, a cylindrical extension / retraction drive unit 700, and a continuous flow path cylindrical member 80.

[0034] The valve body 10 includes a sealing plate 11a, a sealing plate 11b, and a connecting portion 11c. A first opening 12a is formed in the sealing plate 11a, penetrating in the thickness direction. A second opening 12b is formed in the sealing plate 11b, penetrating in the thickness direction. The sealing plates 11a and 11b face each other. In this embodiment, the sealing plates 11a and 11b are substantially parallel. The sealing plates 11a and 11b are spaced apart from each other in the thickness direction.

[0035] The first opening 12a is on the vacuum side. The first opening 12a may be on the lower pressure side compared to the second opening 12b side. The second opening 12b is on the atmospheric side. The second opening 12b may be on the high-pressure side compared to the first opening 12a. The valve body 5 can be placed in the space between the sealing plate 11a and the sealing plate 11b. Note that the inside of the valve body 10 does not necessarily have to be sealed from the outside. The connecting portion 11c connects the sealing plate 11a and the sealing plate 11b. The connecting portion 11c is positioned so as not to obstruct the movement of the valve body 5, as will be described later. The connecting portion 11c may be formed integrally with the sealing plate 11a and / or the sealing plate 11b. The portion of the connecting portion 11c that is located around the movable valve plate portion 54, which will be in the outer position O-Out as will be described later, may be assembled separately from the sealing plate 11a and the sealing plate 11b.

[0036] Between the sealing plate 11a and the sealing plate 11b, a flow path H is formed, connecting the first opening 12a and the second opening 12b. In the flow path H, the valve body 5 closes or opens positions that are outside the valve body 10 relative to the first opening 12a and positions that are inside the valve body 10 relative to the first opening 12a. In the flow path H, the position outside the valve body 10 beyond the second opening 12b and the position inside the valve body 10 beyond the first opening 12a are always in communication and open. The area outside the valve body 10 beyond the first opening 12a may be a vacuum atmosphere. The area inside the valve body 10 beyond the first opening 12a is approximately a viscous fluid atmosphere such as air.

[0037] The flow path H is a virtual region connecting the first opening 12a and the second opening 12b. The outer circumferential shape of the flow path H is defined by the inner circumferential surface of the continuous flow path cylindrical member 80, as will be described later. The flow path H can be continuous with the outside of the first opening 12a and the outside of the second opening 12b. A flow channel pipe 14a is connected to the valve body 10 beyond the first opening 12a. The diameter of the flow channel pipe 14a is approximately equal to the diameter of the first opening 12a. A flow channel pipe 14b is connected to the valve body 10 beyond the second opening 12b. The diameter of the flow channel pipe 14b is approximately equal to the diameter of the second opening 12b.

[0038] The rotating shaft 20 has an axis. The axis of the rotating shaft 20 extends along the direction of the flow path H. The rotating shaft 20 supports the valve body 5 so that it can rotate around its axis relative to the valve casing 10. The rotating shaft 20 rotatably supports the valve body 5 between an outward position (retracted position; valve open position) O-Out, which is outside the flow path H, and an intersecting position (shielding preparation position) O-Unlock (see Figures 4 and 5). Viewed in the direction of the flow path H, in the outward position O-Out, the valve body 5 does not overlap with the first opening 12a and the second opening 12b. Viewed in the direction of the flow path H, in the valve closed position O-Unlock, the valve body 5 overlaps with the first opening 12a and the second opening 12b.

[0039] In the external position O-Out, the valve body 5 is outside the flow path H (see Figure 4). In the external position O-Out, the valve body 5 retracts from the first opening 12a, creating an open state that allows communication with the flow path H. At the crossover position O-Unlock, the valve body 5 enters a state of readiness to close the first opening 12a.

[0040] In the pendulum valve 100, the valve body 5 operates in two stages between an outward position (O-Out) and a valve-closed position (O-Unlock). The rotating shaft 20 performs a rotational motion, which is a single-stage operation relative to the valve body 5. The rotating shaft 20 switches the position of the valve body 5 between inside the flow path H and outside the flow path H. The rotating shaft 20 functions as a position switching part for the valve body 5. The rotating shaft 20 does not move in the axial direction. The rotary drive unit 21 reciprocates the valve body 5. The rotary drive unit 21 rotates the rotating shaft 20. By rotating the rotating shaft 20, the valve body 5 can reciprocate between the outer position O-Out and the intersecting position O-Unlock (see Figures 4 and 5). The rotary drive unit 21 can be configured to include the rotating shaft 20.

[0041] The valve body 5 consists of a neutral valve section 51, a valve frame section 53, and a movable valve plate section (movable valve section) 54. The neutral valve section 51 is connected to the rotating shaft 20. The neutral valve section 51 is fixed to the rotating shaft 20. When viewed in the direction along the flow path H, or in a plan view in the schematic cross-sectional view of Figure 2, the neutral valve section 51 is located near the center between the outer position O-Out and the intersection position O-Unrock. The neutral valve section 51 rotates integrally with the rotating shaft 20 around its axis. At all positions, from the outer position O-Out to the intersection position O-Unrock and the valve closed position O-Rock, the neutral valve section 51 maintains a position near the center between the sealing plate 11a and the sealing plate 11b in the direction along the flow path H (see Figures 2, 4 to 6).

[0042] The valve frame 53 is connected to the neutral valve 51. The valve frame 53 is located around the movable valve plate 54. The valve frame 53 is located near the center between the sealing plate 11a and the sealing plate 11b in the direction along the flow path H. The valve frame 53 is fixed to the neutral valve 51. The valve frame 53 maintains a position along the flow path H relative to the neutral valve 51 at all positions between the outer position O-Out, the intersecting position O-Unlock, and the valve closed position O-Rock. The valve frame 53 and the neutral valve 51 constitute a valve plate movement restricting section. The valve plate movement restricting section restricts the movable valve plate 54 to move relative to the rotation axis 20. The valve plate movement restricting section controls the posture of the movable valve plate 54 during its movement between the intersection position O-Unlock and the valve closed position O-Rock (see Figures 2, 4 to 6).

[0043] The movable valve plate portion (movable valve portion) 54 is supported by the valve frame portion 53. The movable valve plate portion 54 can change its position in the flow path direction H relative to the neutral valve portion 51 and the valve frame portion 53 in the valve opening shielding position O-Unlock and the valve closing position O-Rock. At the outer position O-Out, the movable valve plate portion 54 maintains the same central position between the sealing plate 11a and the sealing plate 11b in the flow path H direction as the neutral valve portion 51 and the valve frame portion 53. At the intersection position O-Unlock, the movable valve plate portion 54 maintains the same central position between the sealing plate 11a and the sealing plate 11b in the flow path H direction as the neutral valve portion 51 and the valve frame portion 53. At the intersection position O-Unlock, the movable valve plate portion 54 obstructs the flow path H.

[0044] The movable valve plate portion 54 is slidable relative to the valve frame portion 53 in the flow path H direction. The movable valve plate portion 54 is slidable relative to the valve frame portion 53 in the flow path H direction between the intersection position O-Unrock and the valve closed position O-Rock (see Figures 2, 4 to 6). The movable valve plate portion 54 is movable relative to the valve frame portion 53 in the flow path H direction. The movable valve plate portion 54 is movable from the intersection position O-Unrock towards the valve closed position O-Rock so that the sealing surface 54a approaches the sealing plate 11a in the flow path H direction. The movable valve plate portion 54 maintains its posture during movement between the intersection position O-Unrock and the valve closed position O-Rock. In other words, the movable valve plate portion 54 maintains a state in which the normal of the sealing surface 54a is aligned with the flow path H direction during movement between the intersection position O-Unrock and the valve closed position O-Rock.

[0045] The movable valve plate portion 54 can be tightly sealed with the inner surface 10a of the sealing plate 11a located around the first opening 12a when the valve is closed in the O-Rock position, with the sealing surface 54a in contact with the inner surface 10a of the sealing plate 11a. A first opening valve seal portion (valve plate seal packing) 31a may be provided as a first opening seal portion 31 on either the sealing surface 54a of the movable valve plate portion 54 or the inner surface 10a of the sealing plate 11a. The first opening valve seal portion 31a can seal the space between the inner surface 10b of the sealing plate 11a located around the first opening 12a and the sealing surface 54a of the movable valve plate portion 54.

[0046] Figure 3 is a schematic diagram showing the cylinder extension / retraction drive unit of the pendulum valve in this embodiment. As shown in Figures 1 to 3, the cylindrical extension drive unit 700 includes a pressing cylinder (extension drive cylinder) 70 and a drive pressure generating mechanism 710.

[0047] Multiple pressing cylinders 70 are embedded in the valve body 10. Multiple pressing cylinders 70 are embedded in the sealing plate 11b. Multiple pressing cylinders 70 are arranged along the circumferential direction of the movable valve plate portion 54. The pressing cylinders 70 are expandable and contractible in the direction along the flow path H. The pressing cylinder 70 can press the continuous flow channel member 80. The pressing cylinder 70 can press the movable valve plate portion 54 via the continuous flow channel member 80. The continuous flow channel member 80 will be described later.

[0048] The pressing cylinder 70 can press the movable valve plate portion 54 at the intersection position O-Unlock in a direction that seals it. The pressing cylinder 70 can extend along the flow path H in the direction from the sealing plate 11a to the sealing plate 11b. The pressing cylinder 70 can extend along the flow path H in the direction that approaches the sealing plate 11a. The pressing cylinder 70 is an extendable cylinder that can press the movable valve plate portion 54 to the valve closed position O-Rock. The pressing cylinder 70 is a biasing part that biases the movable valve plate portion 54 when extended. The pressing cylinder 70 is a biasing part that biases the continuous flow path cylindrical member 80 when extended.

[0049] The pressing cylinder 70 can retract along the flow path H in the direction from the sealing plate 11a toward the sealing plate 11b. The pressing cylinder 70 can retract in a direction that weakens the pressing force against the movable valve plate portion 54 in the valve closed position O-Rock. The pressing cylinder 70 can retract the continuous flow path cylindrical member 80.

[0050] The pressing cylinder 70 can retract until the movable valve plate portion 54 moves from the valve closed position O-Rock to the crossing position O-Unrock. The pressing cylinder 70 can retract in the direction away from the movable valve plate portion 54 at the crossing position O-Unrock. The pressing cylinder 70 can retract in the direction away from the movable valve plate portion 54 at the crossing position O-Unrock. The pressing cylinder 70 can retract until the continuous flow channel member 80 is approximately flush with the sealing plate 11b. The pressing cylinder 70 can retract to the extent that the valve body 5 is rotatably separated between the outer position O-Out and the crossing position O-Unrock.

[0051] The pressing cylinder 70 can bias the movable valve plate portion 54 toward the first opening 12a in the flow path H direction at the intersection position O-Unrock, between the intersection position O-Unrock and the valve closed position O-Rock, and at the valve closed position O-Rock. At the valve closed position O-Rock, the pressing cylinder 70 presses the movable valve plate portion 54, enabling the valve plate seal packing (first opening valve seal portion) 31a to make close contact with the inner surface 10b of the valve body 10 and / or the sealing surface 54a of the movable valve plate portion 54. The pressing cylinder 70 moves by pressing around the movable valve plate portion 54 at the intersection position O-Unrock in the flow path H direction via the flow path continuous cylindrical member 80. The flow path H is closed (blocked) by the moved movable valve plate portion 54.

[0052] Multiple pressing cylinders 70 are extendable and retractable along the flow path H. The extension and retraction axes of the multiple pressing cylinders 70 are parallel to each other. The extension and retraction range of the multiple pressing cylinders 70 in the direction along the flow path H is the same for all of them. Multiple pressing cylinders 70 can simultaneously press the movable valve plate portion 54 via the continuous flow path cylindrical member 80. Multiple pressing cylinders 70 can simultaneously move away from the movable valve plate portion 54. Multiple pressing cylinders 70 are all capable of the same extension and retraction operation.

[0053] Multiple pressing cylinders 70 are all connected to a drive pressure generating mechanism 710. The pressing cylinders 70 can be driven to extend and retract in response to the operating pressure applied by the working fluid. The operating pressure is applied to the pressing cylinders 70 by the drive pressure generating mechanism 710.

[0054] The pressing cylinder 70 has a fixed part 71, a movable part (piston) 72, and a biasing member, which is an extension spring (compression spring) 73. The pressing cylinder 70 can be a so-called normally push type. The pressing cylinder 70 can be configured to extend when no driving pressure is applied. The fixed portion 71 is embedded in the sealing plate 11b. The piston 72 is extendable and retractable relative to the fixed portion 71. The extension spring 73 biases the piston 72 in the direction of extension. As a result, the pendulum valve 100 is a so-called normally sealed valve. When operating pressure is supplied from the drive pressure generating mechanism 710, the piston 72 retracts, overcoming the biasing force of the extension spring 73.

[0055] The drive pressure generating mechanism (compressed air generating unit) 710 is connected to the pressing cylinder 70 by piping 712. The drive pressure generating mechanism 710 supplies and discharges a working fluid such as compressed air to the pressing cylinder 70. The drive pressure generating mechanism 710 can increase and decrease the working pressure by supplying and discharging working fluid to the pressing cylinder 70. The drive pressure generating mechanism 710 can apply working pressure to multiple pressing cylinders 70 simultaneously. The drive pressure generating mechanism 710 can drive multiple pressing cylinders 70 simultaneously. The drive pressure generating mechanism 710 may have means for switching the working pressure, such as a pressure valve 711. The pressure valve 711 is provided in the piping 712. The drive pressure generating mechanism 710 supplies compressed air (driving gas) to the pressing cylinder 70. The drive pressure generating mechanism 710 can also supply drive pressure in common with the rotary drive unit 21.

[0056] Figure 4 is a process diagram showing the operation of the valve body and the continuous flow tube member in the pendulum valve of this embodiment. Figure 5 is a process diagram showing the operation of the valve body and the continuous flow tube member in the pendulum valve of this embodiment. Figure 6 is a process diagram showing the operation of the valve body and the continuous flow tube member in the pendulum valve of this embodiment. The continuous flow channel member 80 has a closure section 81 and a flange section 82.

[0057] The continuous flow channel member 80 is cylindrical. The continuous flow channel member 80 can connect the first opening 12a and the second opening 12b. The continuous flow channel member 80 can form the outer circumference of the flow channel H between the sealing plates 11a and 11b. The cross-sectional shape of the continuous flow channel member 80 is equal to the cross-sectional shape of the flow channel H. The continuous flow channel member 80 is movable along the flow channel H. The continuous flow channel member 80 is expandable and contractible along the flow channel H. The continuous flow channel member 80 is expandable and contractible relative to the sealing plate 11b. The continuous flow channel member 80 can abut against the sealing plate 11a.

[0058] The closure cylinder portion 81 has a pressing end 81a and a retracted end 81b. The closure cylinder portion 81 is shaped to conform to the outer circumference of the flow path H connecting the first opening 12a and the second opening 12b. The thickness dimension of the closure cylinder portion 81 can be made equal all around. The thickness dimension of the closure cylinder portion 81 can be made equal in the axial direction along the flow path H.

[0059] The pressing end 81a faces the sealing plate 11a. The pressing end 81a can contact the sealing plate 11a. The pressing end 81a is parallel to the inner surface 10a of the sealing plate 11a. The pressing end 81a has an annular plane. The pressing end 81a, in contact with the inner surface 10a, can seal the periphery of the first opening 12a. The pressing end 81a may be provided with a first opening cylinder seal portion (cylinder end seal packing) 31b as the first opening seal portion 31. The first opening cylinder seal portion 31b can seal the space between the inner surface 10b of the sealing plate 11a located around the first opening 12a and the continuous flow cylinder member 80. The first opening cylinder seal portion 31b corresponds to the first opening valve seal portion 31a of the movable valve plate portion 54. The inner diameter of the pressing end 81a is the same as the inner diameter of the first opening 12a. When the pressing end 81a contacts the sealing plate 11a, the inner circumferential surface of the closing cylinder portion 81 and the inner circumferential surface of the first opening 12a become flush.

[0060] The retracted end 81b is located outward from the inner surface 10b of the sealing plate 11b. In other words, regardless of the expansion and contraction position of the continuous flow channel cylindrical member 80, the retracted end 81b is located further away from the sealing plate 11a in the direction of the flow channel H than the inner surface 10b of the sealing plate 11b. The retracted end 81b moves through the retracted portion 11f formed in the sealing plate 11b. The retracted portion 11f is formed in the sealing plate 11b as a recess along the outer circumferential surface of the closing cylindrical portion 81. The retracted portion 11f is larger in diameter than the inner circumferential surface of the second opening 12b which becomes the flow channel H. The retracted portion 11f opens to the inner circumferential surface of the second opening 12b which becomes the flow channel H. The retracted portion 11f opens to the inner surface 10b of the sealing plate 11b which becomes the flow channel H.

[0061] A second opening seal portion 32 is formed on the outer circumferential surface of the closing cylinder portion 81 at a position close to the retracted end portion 81b. The second opening seal portion 32 may be provided on either the outer circumferential surface of the closing cylinder portion 81 or the retracted portion 11f. The second opening seal portion 32 seals the space between the outer circumferential surface of the closing cylinder portion 81 and the retracted portion 11f. The second opening seal portion 32 maintains the seal between the outer circumferential surface of the closing cylinder portion 81 and the retracted portion 11f regardless of the position where the continuous flow channel cylinder member 80 expands or contracts. The inner diameter of the retracted end 81b is the same as the inner diameter of the second opening 12b. When the pressing end 81a is furthest from the sealing plate 11a, and the retracted end 81b is furthest from the sealing plate 11a within the retracted section 11f, the inner circumferential surface of the closing cylinder section 81 and the inner circumferential surface of the second opening 12b become flush.

[0062] The flange portion 82 is provided on the outer circumference of the closing cylinder portion 81, which is close to the pressing end portion 81a. The outer circumference of the closing cylinder portion 81 is enlarged in diameter for the flange portion 82. The surface of the flange portion 82 that is close to the sealing plate 11a is flush with the pressing end portion 81a. The surface of the flange portion 82 that is close to the sealing plate 11a comes into contact with the sealing plate 11a at the same time as the pressing end portion 81a comes into contact with the sealing plate 11a. The first opening cylinder seal portion 31b may be provided on either the pressing end portion 81a or the surface of the flange portion 82 that is close to the sealing plate 11a. The outer diameter of the flange portion 82 is smaller than the outer diameter of the movable valve plate portion 54. The outer diameter of the flange portion 82 is larger than the inner diameter of the first opening 12a.

[0063] The flange portion 82 is pressed against the pressing cylinder 70 on the side adjacent to the sealing plate 11b. Alternatively, the flange portion 82 may be connected to the pressing cylinder 70 on the side adjacent to the sealing plate 11b. When the flange portion 82 is pressed against the pressing cylinder 70, the continuous flow channel member 80 extends from the sealing plate 11b toward the sealing plate 11a. The flange portion 82 moves along the flow channel H in accordance with the expansion and contraction movement of the pressing cylinder 70. The flange portion 82 is formed integrally with the closing channel portion 81. The flange portion 82 and the closing channel portion 81 move together as a single unit.

[0064] The flange portion 82, with its surface adjacent to the sealing plate 11b, abuts against the inner surface 10b of the sealing plate 11b at the most retracted position of the continuous flow channel member 80. The pressing end 81a is closer to the sealing plate 11a in the flow channel H direction than the inner surface 10b of the sealing plate 11b when the continuous flow channel member 80 is in the most retracted position of the sealing plate 11b. The pressing end 81a may be positioned such that it is flush with the inner surface 10b of the sealing plate 11b when the continuous flow channel member 80 is most retracted relative to the sealing plate 11b. In this case, a recess for housing the flange portion 82 can be formed on the inner surface 10b of the sealing plate 11b.

[0065] The continuous flow channel cylindrical member 80 is extended and retracted relative to the sealing plate 11b by the cylindrical extension / retraction drive unit 700. As shown in Figures 2, 4 to 6, the continuous flow channel cylindrical member 80 is movable along the flow channel H between an extended connecting position, an extended closing position, and a retracted position. At the extended connection position, the extended closure position, and the retracted position, the continuous flow channel cylindrical member 80 has different lengths of extension and retraction from the sealing plate 11b. Here, the extension and retraction length is the length of the continuous flow channel cylindrical member 80 in the direction along the flow channel H from the inner surface 10b of the sealing plate 11b. The movement of the continuous flow channel cylindrical member 80 between the extended connection position, the extended closure position, and the retracted position is performed by the cylindrical extension and retraction drive unit 700.

[0066] In the extended connection position, as shown in Figure 2, the continuous flow channel member 80 protrudes the most from the sealing plate 11b along the flow channel H. In the extended connection position, the continuous flow channel member 80 protrudes the most from the sealing plate 11b along the flow channel H compared to the extended closure position. In the extended connection position, the pressing end 81a abuts against the inner surface 10a of the sealing plate 11a. In the extended connection position, the pressing end 81a may press against the inner surface 10a of the sealing plate 11a. In the extended connection position, the continuous flow channel member 80 connects the first opening 12a and the second opening 12b. In the extended connection position, the continuous flow channel member 80 forms the outer circumference of the flow channel H between the sealing plate 11a and the sealing plate 11b. In the extended connection position, the continuous flow channel member 80 connects the flow channel H between the first opening 12a and the second opening 12b. In the extended connection position, the valve body 5 is in the outer position O-Out. In the extended connection position, the valve body 5 is located outside the flow path H.

[0067] In the extended closed position, as shown in Figure 6, the continuous flow channel member 80 protrudes from the sealing plate 11b along the flow channel H. In the extended closed position, the pressing end 81a is not in direct contact with the inner surface 10a of the sealing plate 11a. In the extended closed position, the movable valve plate portion 54 is sandwiched between the pressing end 81a and the inner surface 10 of the sealing plate 11a. In the extended closed position, the pressing end 81a may press against the movable valve plate portion 54. In the extended closed position, the sealing surface 54a of the movable valve plate portion 54 is in contact with the inner surface 10a of the sealing plate 11a. In the extended closed position, the first opening 12a is closed by the first opening valve seal portion 31a of the movable valve plate portion 54 that is in contact with the inner surface 10a of the sealing plate 11a. In the extended closed position, the movable valve plate portion 54 is in the closed position O-Rock.

[0068] In the contracted position, as shown in Figures 4 and 5, the continuous flow channel member 80 is most contracted relative to the sealing plate 11b. In the contracted position, the pressing end 81a is furthest away from the inner surface 10a of the sealing plate 11a. In the contracted position, the flange portion 82 abuts against the inner surface 10b of the sealing plate 11b. Furthermore, in the degraded position, the valve body 5 can reciprocate and rotate between the outer position O-Out and the crossing position O-Unlock.

[0069] When the continuous flow channel cylindrical member 80 extends from the retracted position (Figure 4) to the extended closed position (Figure 6), the flange portion 82 is first pressed by the pressing cylinder 70 of the cylindrical extension / retraction drive unit 700. Here, the closed cylindrical portion 81 moves in the direction of the flow channel H along the retracted portion 11f. In other words, the outer circumferential surfaces of the retracted portion 11f and the closed cylindrical portion 81 restrict the direction and posture of movement of the continuous flow channel cylindrical member 80 during extension and retraction. The outer circumferential surfaces of the retracted portion 11f and the closed cylindrical portion 81 are the movement restricting portions of the continuous flow channel cylindrical member 80.

[0070] Here, we assume that the movable valve plate portion 54 is located at the intersection position O-Unlock, as shown in Figure 5. When the continuous flow channel member 80 extends, the pressing end 81a comes into contact with the movable valve plate portion 54. The pressing end 81a presses against the movable valve plate portion 54. As a result, the continuous flow channel member 80 and the movable valve plate portion 54 move along the flow channel H in a direction approaching the sealing plate 11a while in contact with each other. At this time, the outer circumferential contour of the flange portion 82, when viewed in the direction of the flow channel H, is inside the inner circumferential contour of the valve frame portion 53. Therefore, the flange portion 82 does not press against the valve frame portion 53 and does not interfere with the valve frame portion 53. The valve frame portion 53, the neutral valve portion 51, and the rotating shaft 20 do not move together with the movable valve plate portion 54.

[0071] The movable valve plate portion 54 moves along the flow path H from the intersection position O-Unlock to the valve closing position O-Rock while in contact with the continuous flow path cylindrical member 80. In this state, the pressing end 81a and the movable valve plate portion 54 are sealed by the first opening cylinder seal portion 31b. In this embodiment, this seal separates the internal space surrounded by the movable valve plate portion 54 and the continuous flow path cylindrical member 80 from the internal space of the flow path pipe 14b with respect to the internal space of the flow path pipe 14a blocked by the movable valve plate portion 54. Furthermore, the internal space sandwiched between the sealing plates 11a and 11b radially outward of the continuous flow path cylindrical member 80 and the internal space of the flow path pipe 14b are separated from the internal space of the flow path pipe 14a blocked by the movable valve plate portion 54.

[0072] Subsequently, as shown in Figure 6, the sealing surface 54a of the movable valve plate portion 54 comes into contact with the inner surface 10a of the sealing plate 11a. In this state, the pressing end 81a further presses the movable valve plate portion 54. As a result, the continuous flow channel member 80 and the movable valve plate portion 54 are pressed against the inner surface 10a of the sealing plate 11a while in contact with each other. In this state, the sealing surface 54a of the movable valve plate portion 54 and the inner surface 10a of the sealing plate 11a are sealed by the first opening valve seal portion 31a. The movable valve plate portion 54 then enters the valve closed position O-Rock.

[0073] As a result, the first opening 12a is blocked off at a position closer to the flow channel 14a than the movable valve plate 54, and at a position closer to the sealing plate 11b than the movable valve plate 54. The first opening 12a becomes shielded.

[0074] When the continuous flow channel member 80 moves in a contracted position from an extended closed position that shields the first opening 12a to a contracted position, first, the pressure on the flange portion 82 is released by the pressing cylinder 70 which is driven to contract. Furthermore, the flange portion 82 moves in a direction that approaches the sealing plate 11b as the pressing cylinder 70 contracts. At the same time, the movable valve plate portion 54 moves in a direction that approaches the sealing plate 11b while in contact with the continuous flow channel member 80. The movable valve plate portion 54 moves along the flow channel H from the valve closed position O-Rock to the intersection position O-Unrock while in contact with the continuous flow channel member 80. When the movable valve plate portion 54 reaches the intersection position O-Unrock, the pressing end 81a and the movable valve plate portion 54 separate.

[0075] Subsequently, the continuous flow channel member 80 moves backward toward the retracted position. At this time, the outer surfaces of the retracted portion 11f and the closing tube portion 81 restrict the direction and posture of the continuous flow channel member 80's retracted movement. When the flange portion 82 comes into contact with the sealing plate 11b, the continuous flow channel member 80 reaches the retracted position, as shown in Figure 5.

[0076] When the continuous flow channel cylindrical member 80 extends from the retracted position to the extended connecting position, the flange portion 82 is first pressed by the pressing cylinder 70 of the cylindrical extension / retraction drive unit 700. Similarly, the closed cylindrical portion 81 moves in the direction of the flow channel H along the retracted portion 11f. The outer surfaces of the retracted portion 11f and the closed cylindrical portion 81 restrict the extension movement of the continuous flow channel cylindrical member 80.

[0077] Here, as shown in Figure 4, when the movable valve plate portion 54 is at the outer position O-Out, as the continuous flow channel cylindrical member 80 extends, the pressing end portion 81a does not come into contact with the movable valve plate portion 54, and the continuous flow channel cylindrical member 80 passes the extended closed position. Subsequently, the pressing end portion 81a moves further along the flow channel H in a direction that approaches the sealing plate 11a.

[0078] Subsequently, when the continuous flow channel member 80 reaches the extended connection position, the pressing end 81a comes into contact with the inner surface 10a of the sealing plate 11a. In this state, the pressing end 81a further presses against the inner surface 10a of the sealing plate 11a. As a result, the continuous flow channel member 80 is pressed against the inner surface 10a of the sealing plate 11a, as shown in Figure 2.

[0079] In this state, the pressing end 81a and the inner surface 10a of the sealing plate 11a are sealed by the first opening cylinder seal portion 31b. The continuous flow channel cylinder member 80 and the first opening 12a are sealed. At this time, the retracted end 81b remains inside the retracted portion 11f. The space between the outer surface of the closing cylinder portion 81 and the retracted portion 11f is sealed by the second opening seal portion 32. Therefore, the closing cylinder portion 81 and the inner surface 10b of the sealing plate 11b are sealed by the second opening seal portion 32. The continuous flow channel cylinder member 80 and the second opening 12b are sealed.

[0080] As a result, the flow path H between the first opening 12a and the second opening 12b is sealed by the continuous flow path cylindrical member 80. The flow path H between the first opening 12a and the second opening 12b is connected by the continuous flow path cylindrical member 80. In addition, the flow path H between the first opening 12a and the second opening 12b is isolated from the outside by the continuous flow path cylindrical member 80. The outer circumference of the flow path H is formed by the continuous flow path cylindrical member 80 between the sealing plates 11a and 11b. The internal space sandwiched between the sealing plates 11a and 11b radially outward of the continuous flow path cylindrical member 80 is separated from the internal spaces of the flow path pipes 14a and 14b.

[0081] The pendulum valve 100 according to this embodiment can switch between a flow channel communication state, where a viscous fluid such as air flows from flow channel 14b to flow channel 14a, and a vacuum-closed state, where the inside of flow channel 14a, which is closed by the movable valve plate portion 54 pressed by the flow channel communication cylinder member 80 in the extended-closed position, is reduced pressure or a vacuum. In other words, the pendulum valve 100 can switch between communication and closure of the flow channel H.

[0082] The operation of the pendulum valve 100 will be explained below.

[0083] First, as shown in Figure 2, we assume a state where the flow channel pipe 14a and the flow channel pipe 14b are connected by a continuous flow channel member 80. The space between the first opening 12a and the second opening 12b is sealed as a flow channel H by the continuous flow channel member 80. The flow channel H is continuous between the first opening 12a and the second opening 12b by the continuous flow channel member 80. In this case, a viscous fluid such as air can flow from the second opening 12b and the flow channel pipe 14b to the first opening 12a and the flow channel pipe 14a. In this state, Continuous flow channel cylindrical member 80; extension connection position Movable valve plate part 54; Outer position O-Out That is the case.

[0084] Furthermore, in the cylindrical extension drive unit 700, the pressing cylinder 70, which is supplied with operating pressure from the drive pressure generating mechanism 710, is in an extended state. The piston 72 is pressing against the flange portion 82. The pressing end portion 81a is pressing against the inner surface 10a of the sealing plate 11a, which forms the periphery of the first opening 12a. In the continuous flow tube member 80, the first opening cylinder seal portion 31b seals the space between the first opening 12a and the inner surface 10a of the sealing plate 11a, which forms the periphery of the first opening 12a. In the continuous flow tube member 80, the second opening seal portion 32 seals the space between the second opening 12b and the inner surface 10b of the sealing plate 11b, which forms the periphery of the second opening 12b. This state represents the flow path communication state of the pendulum valve 100.

[0085] Next, the flow of viscous fluid in the flow path H is stopped. The supply of viscous fluid from the flow path pipe 14b and the second opening 12b is stopped. The atmosphere in the valve body 10 becomes, for example, an atmospheric atmosphere. In this state, the cylinder extension drive unit 700 stops supplying operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70. Alternatively, the cylinder extension drive unit 700 directs the operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70 in the retraction direction. As a result, the pressing cylinder 70 moves from the extended state of the piston 72 to the retraction direction. Consequently, the pressing force from the piston 72 to the flange portion 82 of the continuous flow channel member 80 weakens. Furthermore, the continuous flow channel member 80 begins to move so that the flange portion 82 approaches the second opening 12b.

[0086] At this time, the valve body 5 does not move from the outer position O-Out. The continuous flow tube member 80 moves along the flow path H so that the flange portion 82 approaches the second opening 12b. When the flange portion 82 comes into contact with the inner surface 10b of the sealing plate 11b which forms the periphery of the second opening 12b, the cylinder extension drive unit 700 stops supplying operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70. Then the continuous flow tube member 80 reaches the retracted position. The continuous flow tube member 80 stops moving in the direction of the flow path H.

[0087] In this state, the space between sealing plate 11a and sealing plate 11b is in communication with the inside of the flow pipe 14a via the first opening 12a. Similarly, the space between sealing plate 11a and sealing plate 11b is in communication with the inside of the flow pipe 14b via the second opening 12b. The retracted end 81b of the continuous flow pipe member 80 remains inside the retracted section 11f. The closed pipe section 81 of the continuous flow pipe member 80 is housed inside the retracted section 11f. In this state, it is not assumed that viscous fluid will flow through it.

[0088] In this state, as shown in Figure 4, Flow channel continuous cylindrical member 80; retracted position Movable valve plate part 54; Outer position O-Out Furthermore, in the cylindrical extension drive unit 700, the pressing cylinder 70, whose operating pressure supply from the drive pressure generating mechanism 710 has been stopped, is in a retracted state. The piston 72 is not pressing against the flange portion 82.

[0089] Next, the rotation drive unit 21 rotates the rotating shaft 20. As the rotating shaft 20 rotates, the valve body 5 moves from the outer position O-Out to the crossing position O-Unlock. Then, as shown in Figure 5, Flow channel continuous cylindrical member 80; retracted position Movable valve plate section 54; crossing position O-Unlock This is the result.

[0090] Next, the cylinder extension drive unit 700 starts supplying operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70. Alternatively, the cylinder extension drive unit 700 applies operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70 in the extension direction. As a result, the pressing cylinder 70 moves from a retracted state to an extension direction. Consequently, the piston 72 presses against the flange portion 82 of the continuous flow tube member 80. The continuous flow tube member 80 begins to move in a direction in which the flange portion 82 approaches the first opening 12a. In this state, the valve body 5, specifically the movable valve plate portion 54, is not in contact with the flange portion 82.

[0091] As the piston 72 continues to extend due to the extension drive unit 700, the continuous flow tube member 80 continues to move so that the flange portion 82 is close to the movable valve plate portion 54. The continuous flow channel member 80 has its pressing end 81a in contact with the movable valve plate portion 54 and continues to move toward the first opening 12a. The valve body 5 has its movable valve plate portion 54 pressed by the pressing end 81a. Consequently, the valve body 5 has its movable valve plate portion 54 move from the intersection position O-Unlock toward the first opening 12a.

[0092] Furthermore, as the piston 72 continues to extend due to the cylindrical extension drive unit 700, the valve body 5 moves, and the movable plate valve plate portion 54 moves closer to the first opening 12a. The valve body 5 moves its movable valve plate portion 54 to the valve closed position O-Rock. The valve body 5 moves so that the sealing surface 54a comes into contact with the inner surface 10a of the sealing plate 11a, which forms the periphery of the first opening 12a. The movable valve plate portion 54 that has come into contact with the inner surface 10a of the valve body 5 stops moving. At the same time, the continuous flow tube member 80 stops moving.

[0093] In this state, the piston 72 further presses the flange portion 82. As a result, the movable valve plate portion 54 is pressed toward the inner surface 10a of the sealing plate 11a which forms the periphery of the first opening 12a. The first opening valve seal portion 31a of the movable valve plate portion 54 seals the space between the first opening 12a and the movable valve plate portion 54. The pressing end 81a of the continuous flow channel member 80 is pressed toward the movable valve plate portion 54. The first opening tube seal portion 31b of the continuous flow channel member 80 seals the space between the movable valve plate portion 54 and the movable valve plate portion 54. The retracted end 81b of the continuous flow channel member 80 remains inside the retracted portion 11f. The second opening seal portion 32 of the continuous flow channel member 80 seals the space between the inner surface 10b of the sealing plate 11b which forms the periphery of the second opening 12b and the sealing plate 11b.

[0094] With sufficient sealing provided by the first opening valve seal portion 31a, the drive by the cylinder extension drive unit 700 is stopped. The pressure on the flange portion 82 by the piston 72 is maintained. In this state, as shown in Figure 6, Flow channel continuous cylindrical member 80; extended closure position Movable valve plate section 54; valve closed position O-Rock That is the case.

[0095] In this state, the movable valve plate 54 seals the inside of the flow channel 14a from the first opening 12a. The inside of the sealed flow channel 14a can be a vacuum atmosphere or a reduced-pressure atmosphere. In contrast, the inside of the flow channel 14b from the second opening 12b can maintain an atmospheric atmosphere or a viscous fluid atmosphere.

[0096] Furthermore, the space between the sealing plate 11a and the sealing plate 11b in the valve body 10 is separated from the flow path H portion by the closing cylinder portion 81. In other words, the space in the valve body 10 is separated into the inside of the flow path pipe 14a from the first opening 12a, the outside of the closing cylinder portion 81 between the sealing plate 11a and the sealing plate 11b, and the inside of the flow path pipe 14b from the second opening 12b, which is in communication with the flow path H which is inside the closing cylinder portion 81.

[0097] Here, the atmosphere inside the flow tube 14a from the first opening 12a is, for example, a vacuum atmosphere or a reduced-pressure atmosphere. The atmosphere outside the closed cylinder portion 81 between the sealing plate 11a and the sealing plate 11b is, for example, an atmospheric atmosphere. The atmosphere inside the flow tube 14b from the second opening 12b, which communicates with the flow path H which is inside the closed cylinder portion 81, is, for example, an atmospheric atmosphere. This state represents the vacuum-blocked state of the pendulum valve 100.

[0098] Next, the pressure reduction inside the flow channel 14a is released. The atmosphere inside the flow channel 14a becomes, for example, an atmospheric atmosphere. Subsequently, the cylinder extension / retraction drive unit 700 stops supplying operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70. Alternatively, the cylinder extension / retraction drive unit 700 directs the operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70 in the retraction direction. As a result, the pressing cylinder 70 moves from the extended state of the piston 72 to the retraction direction.

[0099] Consequently, the pressure exerted on the continuous flow channel member 80 by the piston 72 against the flange portion 82 weakens. The continuous flow channel member 80 begins to move so that the flange portion 82 is close to the second opening 12b. At the same time, the pressure exerted on the valve body 5 by the flange portion 82 against the movable valve plate portion 54 weakens. The valve body 5 begins to move so that the movable valve plate portion 54 is close to the second opening 12b. As a result, the seal between the sealed surface 54a of the movable valve plate 54 and the first opening 12a, provided by the first opening valve seal portion 31a, is released. The seal between the movable valve plate 54 and the pressing end portion 81a, provided by the first opening valve seal portion 31a, is also released.

[0100] When the movable valve plate portion 54 of the valve body 5 moves to the intersection position O-Unlock, the movable valve plate portion 54 does not move any further in the flow path H direction relative to the valve frame portion 53. The valve body 5 stops when the movable valve plate portion 54 is at the intersection position O-Unlock. In contrast, the flow path continuous cylinder member 80 continues to move so that the flange portion 82 is close to the second opening 12b. The flange portion 82 moves away from the movable valve plate portion 54. Furthermore, even after the movable valve plate portion 54 stops at the intersection position O-Unlock, the flow path continuous cylinder member 80 continues to move so that the flange portion 82 is close to the second opening 12b.

[0101] When the flange portion 82 comes into contact with the inner surface 10b of the sealing plate 11b, which forms the periphery of the second opening 12b, the cylinder extension drive unit 700 stops supplying operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70. As a result, the continuous flow tube member 80 stops moving in the direction of the flow path H. In this state, as shown in Figure 5, Flow channel continuous cylindrical member 80; retracted position Movable valve plate section 54; crossing position O-Unlock That is the case. In this state, the space between sealing plate 11a and sealing plate 11b is in communication with the inside of the flow pipe 14a via the first opening 12a. The space between sealing plate 11a and sealing plate 11b is in communication with the inside of the flow pipe 14b via the second opening 12b. The retracted end 81b of the continuous flow pipe member 80 remains inside the retracted section 11f. The closed pipe section 81 of the continuous flow pipe member 80 is housed inside the retracted section 11f. In this state, it is not assumed that viscous fluid will flow through it.

[0102] Next, the rotation drive unit 21 rotates the rotating shaft 20. As the rotating shaft 20 rotates, the valve body 5 moves from the intersecting position O-Unlock to the outward position O-Out. In this state, as shown in Figure 4, Flow channel continuous cylindrical member 80; retracted position Movable valve plate part 54; Outer position O-Out That is the case.

[0103] Next, the cylinder extension drive unit 700 starts supplying operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70. Alternatively, the cylinder extension drive unit 700 applies operating pressure from the drive pressure generating mechanism 710 to the pressing cylinder 70 in the extension direction. As a result, the pressing cylinder 70 moves from a retracted state to an extension direction. Consequently, the piston 72 presses against the flange portion 82 of the continuous flow tube member 80. The continuous flow tube member 80 begins to move in a direction in which the flange portion 82 approaches the first opening 12a.

[0104] As the piston 72 continues to extend due to the cylindrical extension drive unit 700, the continuous flow channel cylindrical member 80 comes into contact with the inner surface 10a of the sealing plate 11a, which is the periphery of the first opening 12a, at the pressing end 81a. The flange portion 82 of the continuous flow channel cylindrical member 80 stops moving. In this state, if the piston 72 continues to extend by the cylindrical extension drive unit 700, the inner surface 10a of the sealing plate 11a, which forms the periphery of the first opening 12a, is pressed by the pressing end 81a.

[0105] With sufficient sealing by the first opening valve seal portion 31a, the drive by the cylinder extension drive unit 700 is stopped. The pressure on the flange portion 82 by the piston 72 is maintained. The continuous flow channel member 80 has the first opening cylinder seal portion 31b sealing the space between the first opening cylinder seal portion 31b and the inner surface 10a of the sealing plate 11a which forms the periphery of the first opening 12a. The continuous flow channel member 80 has the second opening seal portion 32 sealing the space between the second opening 12b and the inner surface 10b of the sealing plate 11b which forms the periphery of the second opening 12b. In this state, Continuous flow channel cylindrical member 80; extension connection position Movable valve plate part 54; Outer position O-Out As shown in Figure 2, the pendulum valve 100 returns to a state of continuous flow.

[0106] In this embodiment, the pendulum valve 100 rotates its rotating shaft 20 in a direction intersecting the direction of the flow path H, driven by the rotary drive unit 21. As the rotating shaft 20 rotates, the neutral valve section 51, which is fixed to the rotating shaft 20, also rotates. Simultaneously, the movable valve plate section 54 connected to the neutral valve section 51 rotates integrally with the neutral valve section 51. During this rotation, the movable valve plate section 54 does not slide in the thickness direction, which is the direction of the flow path H. As the valve body 5 rotates, the movable valve plate 54 moves in a pendulum motion between an outer position O-Out where no flow path H is provided and an intersecting position O-Unrock which is considered to be the position corresponding to the first opening 12a and which shields the flow path H.

[0107] The drive pressure generating mechanism 710 can operate when the valve body 5 is in the valve opening shielding position O-Unlock. The drive pressure generating mechanism 710 does not operate when the valve body 5 is not in the crossing position O-Unlock, that is, when the valve body 5 is in the rotational position range up to the crossing position O-Unlock, including the outward exit position O-Out.

[0108] In an embodiment of the present invention, the pendulum valve 100 has a plurality of press cylinders 70 driven by a drive pressure generating mechanism 710 that can extend and retract toward a movable valve plate portion 54 at the intersection position O-Unlock. When the pressing cylinder 70 of the pendulum valve 100 is not in extension operation, the movable valve plate portion 54 maintains the central position of the valve body 10 in the flow path direction H. Between the intersection position O-Unlock and the valve closing position O-Rock, when multiple pressing cylinders 70 come into contact with the movable valve plate portion 54 at the intersection position O-Unlock, the position of the movable valve plate portion 54 in the flow path H direction relative to the valve frame portion 53 can be changed.

[0109] Furthermore, a biasing portion (neutral biasing portion) may be provided between the valve frame portion 53 and the movable valve plate portion 54, which biases the movable valve plate portion 54 toward the central position of the valve body 10 in the flow path direction H relative to the valve frame portion 53. The thickness dimension of the valve frame 53 and the movable valve plate 54 in the flow path direction H can be adjusted by the pressing cylinder 70 and the biasing portion (neutral biasing portion) of the valve frame 53.

[0110] In this embodiment, the pendulum valve 100 is capable of moving the continuous flow channel cylindrical member 80 between the extended contact position, the extended closed position, and the retracted position along the flow channel H by the pressing cylinder 70 of the cylinder extension / retraction drive unit 700. Moreover, by pressing the movable valve plate portion 54 with the pressing end 81a of the continuous flow channel cylindrical member 80, the movement of the continuous flow channel cylindrical member 80 between the extended contact position, the extended closed position, and the retracted position can be performed by only one drive unit, the cylinder extension / retraction drive unit 700, and at the same time, the movement of the movable valve plate portion 54 between the intersection position O-Unlock and the valve closed position O-Rock can be performed. At the same time, the pendulum valve 100 can seal the inside of the flow channel 14a from the first opening 12a when in a vacuum-closed state. In this case, the inside of the valve body 10 does not need to be vacuum-sealed.

[0111] Furthermore, the pendulum valve 100 maintains a sealed state by separating the flow path H from the outside of the flow path continuous cylindrical member 80, by having the flow path continuous member 80 in the extended connection position and the movable valve plate portion 54 in the outer position O-Out, thereby maintaining a sealed state. In particular, the flow path H can be separated from the space outside the flow path continuous cylindrical member 80 within the valve body 10, thereby maintaining a sealed state.

[0112] By maintaining this interconnected flow path, the viscous flow conductance in the separated flow path H does not increase even when the pendulum valve 100 is used under viscous flow pressure conditions. At the same time, it is possible to suppress the generation of turbulence in flow path H. By improving the conductance, the pendulum valve 100 according to this embodiment can reduce pressure loss. By improving pressure loss, it is possible to reduce the energy consumption in the entire flow path where the pendulum valve 100 is installed. The pendulum valve, which is over-specified for high vacuum applications, can be optimized for the viscous flow pressure region. In this embodiment, the cylindrical extension / retraction drive unit 700 drives the continuous flow channel cylindrical member 80 by compressed air supply, but is not limited to this. For example, the continuous flow channel cylindrical member 80 may be driven by hydraulic pressure supply or by power supply.

[0113] A second embodiment of the pendulum valve according to the present invention will be described below with reference to the drawings. Figure 7 is a schematic cross-sectional view showing the pendulum valve in this embodiment. The difference in this embodiment from the first embodiment described above is the diameter uniformization section. Other components corresponding to the first embodiment described above are denoted by the same reference numerals and their descriptions are omitted. Note that some components are not shown in Figure 7.

[0114] As shown in Figure 7, the pendulum valve 100 of this embodiment has a diameter uniformization section 88. The diameter equalization section 88 is connected to the inner circumference of the closed cylinder section 81. The diameter equalization section 88 is connected to the inner circumference of the retracted end 81b of the closed cylinder section 81. The diameter equalization section 88 is a cylindrical member. The outer diameter of the diameter equalization section 88 is equal to the inner diameter of the closed cylinder section 81. The diameter equalization section 88 has a smaller thickness dimension than the closed cylinder section 81. In the flow path direction H, the end of the diameter equalization section 88 that is close to the first opening 12a is closer to the pressing end 81a than the retracted end 81b. In the flow path direction H, the end of the diameter equalization section 88 that is close to the second opening 12b is closer to the second opening 12b than the retracted end 81b.

[0115] The inner circumferential surface of the diameter uniformization section 88 is smooth enough not to increase the viscous flow conductance in the viscous flow through the flow path H. The end of the diameter uniformization section 88 adjacent to the first opening 12a in the direction of the flow path H is chamfered or enlarged in diameter so as not to increase the molecular flow conductance relative to the inner circumferential surface of the closed cylinder section 81. The end of the diameter uniformization section 88 adjacent to the second opening 12b in the direction of the flow path H is chamfered or enlarged in diameter so as not to increase the molecular flow conductance relative to the inner circumferential surface of the second opening 12b.

[0116] The diameter equalization section 88 is attached to the closure section 81. Therefore, when the continuous flow channel member 80 moves, the diameter equalization section 88 moves together with the closure section 81.

[0117] When the continuous flow channel member 80 is in the extended connecting position, the diameter equalization section 88 covers the retracted section 11f. When the continuous flow channel member 80 is in the extended closed position, the diameter equalization section 88 covers the retracted section 11f. When the continuous flow channel member 80 is in the contracted position, the diameter equalization section 88 covers the retracted section 11f. Therefore, the retracted section 11f is covered without being affected by the position of the continuous flow channel member 80 in the direction of the flow channel H. In other words, the retracted section 11f is isolated and closed off by the diameter equalization section 88 from the flow channel H which is inside the second opening 12b.

[0118] The diameter uniformization section 88 has a second opening seal section 32b provided on the outer circumferential surface of the end portion that is close to the second opening 12b in the direction of the flow path H. The second opening seal section 32b seals the outer circumferential surface of the diameter uniformization section 88 and the second opening 12b. As a result, the inside of the flow path H does not communicate with the retracted section 11f. In the pendulum valve 100 of this embodiment, when the flow path is in communication state, the inner surface of the valve becomes substantially flush with the viscous fluid flowing through the flow path H in all regions from the upstream flow path pipe 14b to the downstream flow path pipe 14a.

[0119] In the pendulum valve 100 of this embodiment, the diameter uniformization section 88 further reduces the viscous flow conductance in the viscous flow through the flow path H. As a result, even when the pendulum valve 100 is used under viscous flow pressure conditions in a flow path communication state where the continuous flow path cylindrical member 80 is in the extended connection position and the movable valve plate section 54 is in the outer position O-Out, the viscous flow conductance does not increase.

[0120] In this embodiment, the same effects as those of the above-described embodiment can be achieved.

[0121] A third embodiment of the pendulum valve according to the present invention will be described below with reference to the drawings. Figure 8 is a schematic cross-sectional view showing the pendulum valve in this embodiment. The difference in this embodiment from the first and second embodiments described above lies in the continuous flow channel member 80. Other components corresponding to those in the first and second embodiments described above are denoted by the same reference numerals and their descriptions are omitted. Note that some components are not shown in Figure 8.

[0122] As shown in Figure 8, the continuous flow channel member 80 in this embodiment has only a cylindrical closing tube portion 83, and does not have a flange portion 82. Furthermore, in the continuous flow channel member 80, the radial dimension of the closing tube portion 83 is equal to the radial dimension of the pressing end portion 83a over its entire axial length. The radial dimension of the pressing end portion 83a in the closing tube portion 81c is equal to the radial dimension of the pressing end portion 81a including the flange portion 82 in the first and second embodiments. In other words, the radial thickness dimension of the closing tube portion 83 is greater than the radial thickness dimension of the closing tube portion 81 in the first and second embodiments.

[0123] The pressing end 83a is an annular plane. The pressing end 83a is flush with the inner surface 10b of the sealing plate 11b at the most contracted position of the continuous flow channel member 80 relative to the sealing plate 11b. Since the flange portion 82 is not formed, there is no need to form a recess to accommodate the flange portion 82 on the inner surface 10b of the sealing plate 11b. Alternatively, since the flange portion 82 is not formed, the distance between the sealing plate 11a and the sealing plate 11b in the flow channel H direction can be reduced to correspond to the thickness of the flange portion 82. The pressing end 83a presses the movable valve plate portion 54, similar to the pressing end 81a in the first and second embodiments.

[0124] The retracted end portion 83b is located inside the retracted section 11fc. The retracted end portion 83b is movable within the retracted section 11fc in the direction of the flow path H. The retracted end portion 83b is covered by the diameter equalization portion 88. Since no flange portion 82 is formed, the length dimension of the continuous flow path cylindrical member 80 in the direction of the flow path H can be reduced. The radial dimension of the retracted portion 11fc is larger than the radial dimension of the retracted portion 11f, corresponding to the radial thickness dimension of the closed cylinder portion 83. Since the flange portion 82 is not formed, the length dimension of the retracted portion 11fc in the flow path direction H can be reduced.

[0125] Furthermore, a piston 72 is arranged inside the retractable section 11fc so as to be able to extend and retract. A fixed portion 71 of the pressing cylinder 70 is positioned at the end of the retractable section 11fc that is close to the second opening 12b in the direction of the flow path H. In other words, the pressing cylinder 70 is positioned in the retractable section 11fc, which is the gap of the spigot.

[0126] The diameter equalization section 88 covers the retracted section 11fc. In other words, the retracted section 11fc remains isolated and blocked from the flow path H by the diameter equalization section 88. The pressing cylinder 70 is hidden by the diameter equalization section 88. As a result, the piston 72 remains isolated and blocked from the flow path H. The pressing cylinder 70 is not affected by the fluid flowing through the flow path H.

[0127] The piston 72 contacts the retracted end 83b. The piston 72 presses against the retracted end 83b. The piston 72 is connected to the retracted end 83b.

[0128] In this embodiment, the same effects as those of the above-described embodiment can be achieved.

[0129] A fourth embodiment of the pendulum valve according to the present invention will be described below with reference to the drawings. Figure 9 is a schematic cross-sectional view showing the pendulum valve in this embodiment. In this embodiment, the differences from the first and second embodiments described above are the shape of the flow path H, the valve body 5, and the continuous flow path cylindrical member 80, etc. Other components corresponding to the first and second embodiments described above are denoted by the same reference numerals and their descriptions are omitted. Note that there are also components that are not shown in Figure 9.

[0130] In this embodiment, the pendulum valve 100 has a curved flow path H, as shown in Figure 9. Therefore, the first opening 12a and the second opening 12b are not arranged parallel to each other. The curved portion 11bp is connected to the sealing plate 11b. The flow path pipe 14b is connected to the curved portion 11bp on the side opposite to the sealing plate 11b. The axis of the flow path pipe 14b is inclined with respect to the axis of the flow path pipe 14a.

[0131] The continuous flow channel member 80 is curved along the flow channel H. The continuous flow channel member 80 has a curved closing cylindrical portion 81p. The closing cylindrical portion 81p is a curved cylinder with a curved axis. A recess 11p is formed on the inner surface 10b of the sealing plate 11b, which serves as a retraction area for the flange portion 82. The recess 11p is formed around the second opening 12b. The continuous flow channel member 80 moves along the curved flow channel H. Therefore, the length of the recess 11p along the flow channel H varies depending on the circumferential position of the flow channel H.

[0132] The movement trajectory of the continuous flow channel member 80 is curved along the flow channel H. Therefore, the pressing end 81ap moves while curving toward the first opening 12a. At the extended connection position of the continuous flow channel member 80, the plane formed by the pressing end 81ap and the inner surface 10a of the periphery of the first opening 12a are parallel to each other. At the extended connection position of the continuous flow channel member 80, the plane formed by the pressing end 81ap and the inner surface 10a of the periphery of the first opening 12a are in contact with each other.

[0133] In contrast, the plane formed by the pressing end 81ap is inclined with respect to the inner surface 10a of the periphery of the first opening 12a, depending on the expansion and contraction position of the continuous flow channel cylindrical member 80. That is, at the extended and closed position of the continuous flow channel cylindrical member 80, the plane formed by the pressing end 81ap and the inner surface 10a of the periphery of the first opening 12a are inclined relative to each other.

[0134] Furthermore, in the contracted position of the continuous flow channel member 80, the plane formed by the pressing end 81ap and the inner surface 10a of the periphery of the first opening 12a are inclined even more than in the extended closed position. In the contracted position of the continuous flow channel member 80, the plane formed by the pressing end 81ap may or may not be parallel to the inner surface 10b of the periphery of the second opening 12b. The inclination state between the plane formed by the pressing end 81ap and the inner surface 10b of the periphery of the second opening 12b in the contracted position of the continuous flow channel member 80 is determined by the curvature state of the flow channel H.

[0135] The retracted section 11fp is curved along the movement trajectory of the continuous flow channel member 80. The retracted end portion 81b is housed in the retracted section 11fp. Along the movement trajectory of the continuous flow tube member 80, the piston 72p of the pressing cylinder 70 curves and extends. In the case where multiple pressing cylinders 70 are provided around the second opening 12b, the extension and retraction lengths of the piston 72p in each pressing cylinder 70 will be different. The fixing parts 71 are all embedded in the sealing plate 11b.

[0136] To accommodate the curved continuous flow channel member 80, the movable valve plate portion 54 is inclined along the plane formed by the inclined pressing end 81ap at the extended closed position of the continuous flow channel member 80, with the contact surface of the pressing end 81ap inclined with respect to the inner surface 10a of the periphery of the first opening 12a. The sealing surface 54a of the movable valve plate portion 54 is parallel to the inner surface 10a of the periphery of the first opening 12a. In other words, the movable valve plate portion 54 has an uneven thickness. As a result, at the extended closed position of the continuous flow channel member 80, the movable valve plate portion 54 pressed by the pressing end 81ap can maintain a seal with the inner surface 10a of the periphery of the first opening 12a. In the valve closed position O-Rock, the contact surface of the movable valve plate portion 54 with the pressing end 81ap is parallel to the plane formed by the pressing end 81ap in the extended closed position.

[0137] Furthermore, in the valve closed position O-Rock, the movable valve plate portion 54 has a sealing surface 54a on which the first opening valve seal portion 31a is formed, which is parallel to the inner surface 10a of the periphery of the first opening 12a. In the valve closed position O-Rock, the movable valve plate portion 54 can maintain a seal between its sealing surface 54a and the inner surface 10a of the periphery of the first opening 12a. At the intersection position O-Unlock, the sealing surface 54a of the movable valve plate portion 54 is not parallel to the inner surface 10a of the periphery of the first opening 12a.

[0138] As the movable valve plate portion 54 moves between the intersection position O-Unlock and the valve closed position O-Rock, the inclination angle of the sealing surface 54a changes. To allow this movement, the valve body 5 is connected to the valve neutral portion 51 by a valve elastic deformation connecting portion (valve plate spring portion) 52 instead of the valve frame portion 53.

[0139] The valve elastic deformation connecting portion (valve leaf spring portion) 52 does not elastically deform with respect to the rotation of the rotation axis 20p, but it elastically deforms when the movable valve leaf portion 54 is pressed by the pressing end 81ap. The valve leaf spring portion 52 allows the movable valve leaf portion 54 to tilt between the intersection position O-Unlock and the valve closed position O-Rock.

[0140] Here, the tilting movement of the movable valve plate portion 54 means that the direction of the flow path H and the direction normal to the sealing surface 54a of the movable valve plate portion 54 change as the valve moves between the intersection position O-Unlock and the valve closed position O-Rock. The valve plate spring section 52 and the neutral valve section 51 constitute the valve plate movement restricting section. The valve plate movement restricting section restricts the posture of the movable valve plate section 54 during movement between the crossing position O-Unlock and the valve closing position O-Rock.

[0141] Furthermore, the rotation axis 20p is inclined with respect to the rotation axis 20 in the first and second embodiments. The rotation axis 20 was perpendicular to the inner surface 10a of the periphery of the first opening 12a. In contrast, the rotation axis 20p is inclined along the curving direction of the flow path H with respect to the normal to the inner surface 10a of the periphery of the first opening 12a. Note that the rotation axis 20p may not be inclined along the curving direction of the flow path H with respect to the normal to the inner surface 10a of the periphery of the first opening 12a.

[0142] Furthermore, the connecting portion 11c is assembled separately from the sealing plate 11a and sealing plate 11b in the portion that is located around the movable valve plate portion 54, which is in the outer position O-Out. This connecting portion 11c does not need to be sealed, as long as it surrounds the movable valve plate portion 54, which is in the outer position O-Out.

[0143] The pendulum valve 100 according to this embodiment can switch between a flow path open state and a flow path open state, even in a curved flow path H. At the same time, even when the valve 100 is used in a viscous flow pressure state in a curved flow path H, the viscous flow conductance does not increase. Simultaneously, it is possible to suppress the generation of turbulence even in a curved flow path H. By improving the conductance, the pendulum valve 100 according to this embodiment can reduce pressure loss. By improving pressure loss, it is possible to reduce the energy consumption in the entire curved flow path H in which the pendulum valve 100 is installed.

[0144] In this embodiment, the same effects as those of the above-described embodiment can be achieved.

[0145] A fifth embodiment of the pendulum valve according to the present invention will be described below with reference to the drawings. Figure 10 is a schematic cross-sectional view showing the pendulum valve in this embodiment. The difference in this embodiment from the first to third embodiments described above lies in the continuous flow channel member 80 and other components. Other components corresponding to the first to third embodiments described above are denoted by the same reference numerals and their descriptions are omitted. Note that some components are not shown in Figure 10.

[0146] In this embodiment, the pendulum valve 100, as shown in Figure 10, has a continuous flow path cylindrical member 80 configured as a ring cylinder (extendable drive cylinder). In other words, the continuous flow path cylindrical member 80 has an annular piston 84, corresponding to the closing cylinder portion 83 and piston 72 in the third embodiment.

[0147] The annular piston 84 is expandable and contractible along the flow path H. The annular piston 84 is movable along the flow path H. The annular piston 84 is cylindrical, similar to the closing cylinder portion 83 in the third embodiment. The annular piston 84 has a pressing end 84a at the end adjacent to the first opening 12a. The annular piston 84 has a retractable end 84b at the end adjacent to the second opening 12b. An annular recess 84f is formed on the inner circumferential surface of the annular piston 84. The annular recess 84f can also cover the portion exposed to the flow path H with a configuration similar to the diameter equalization portion 88 for the retractable portion 11f in the second embodiment.

[0148] The pressing end 84a corresponds to the pressing end 81a and others in the first to third embodiments. The retracted end 84b corresponds to the retracted end 81b and others in the first to third embodiments. The pressing end 84a is a plane parallel to the inner surface 10a of the sealing plate 11a. The retracting end 84b is a plane parallel to the inner surface 10b of the sealing plate 11b. The axis of the annular piston 84 extends in the direction along the flow path H. The pressing end 84a presses the movable valve plate portion 54, similar to the pressing end 81a in the first and second embodiments. The retracting end 84b is located inside the retraction portion 11f. The retracting end 84b moves inside the retraction portion 11f. The retraction portion 11f is a recess formed in the sealing plate 11b. The retraction portion 11f opens only to the inner surface 10b of the sealing plate 11b.

[0149] The drive pressure generating mechanism 710 is connected to the retracted section 11f via piping 712. The retracted section 11f also serves as the fixed section 71 in the first to third embodiments. The annular piston 84 and the retracted portion 11f correspond to the pressing cylinder 70 in the first to third embodiments. In other words, in this embodiment, the continuous flow tube member 80 and the retractable section 11f, which are configured as a ring cylinder (extension drive cylinder), also serve as the pressing cylinder 70. The continuous flow tube member 80 constitutes the cylinder extension drive section 700.

[0150] The pendulum valve 100 of this embodiment reduces the number of parts and can achieve the same effects as the embodiments described above.

[0151] A sixth embodiment of the pendulum valve according to the present invention will be described below with reference to the drawings. Figure 11 is a schematic cross-sectional view showing the pendulum valve in this embodiment. The difference in this embodiment from the first and second embodiments described above lies in the cylinder extension drive unit 700. Other components corresponding to those in the first and second embodiments described above are denoted by the same reference numerals and their descriptions are omitted. Note that some components are not shown in Figure 11.

[0152] As shown in Figure 11, the pendulum valve 100 of this embodiment has a cylindrical extension drive unit 700 which, instead of the pressing cylinder 70 of the first and second embodiments, includes a rack 77r, a pinion 77p, and a drive unit 77m.

[0153] The rack 77r is positioned on the outer circumferential surface of the closure cylinder portion 81. The rack 77r is positioned along the flow path H. The rack 77r is positioned on the outer circumferential surface of the closure cylinder portion 81 at a position close to the retracted end portion 81b. Multiple racks 77r may be positioned spaced apart in the circumferential direction of the closure cylinder portion 81. The rack 77r is positioned opposite the inner circumferential surface of the retracted portion 11f. The rack 77r is located inside the retracted portion 11f. The rack 77r is attached integrally with the closure cylinder portion 81.

[0154] The pinion 77p engages with the rack 77r. The pinion 77p is mounted on the sealing plate 11b. The pinion 77p is housed in a recess formed in the sealing plate 11b. The pinion 77p is rotationally driven by the drive unit 77m. The drive unit 77m rotates the pinion 77p by power supply or pressure supply by the working fluid.

[0155] In this embodiment, when the pinion 77p is rotationally driven by the drive unit 77m, the rack 77r moves in the direction of the flow path H. As the rack 77r moves, the closing cylinder portion 81 moves together with the rack 77r in the direction of the flow path H. As a result, the continuous flow path cylinder member 80 expands and contracts in the direction of the flow path H.

[0156] In this embodiment, the same effects as those of the above-described embodiment can be achieved.

[0157] A seventh embodiment of the pendulum valve according to the present invention will be described below with reference to the drawings. Figure 12 is a schematic cross-sectional view showing the pendulum valve in this embodiment. The only difference in this embodiment from the first to third embodiments described above is the connection portion 11c. Other components corresponding to the first to third embodiments described above are denoted by the same reference numerals and their descriptions are omitted. Note that some components are not shown in Figure 12.

[0158] In this embodiment, as shown in Figure 12, the pendulum valve 100 has a connecting portion 11c assembled separately from the sealing plates 11a and 11b. Furthermore, the sealing plate 11a is formed in a flat shape only on the periphery of the first opening 12a and the portion connected to the flow channel 14a. Similarly, the sealing plate 11b is formed only on the periphery of the second opening 12b and the portion connected to the flow channel 14b. In other words, the sealing plates 11a and 11b are positioned only near the flow channel H. The connecting portion 11c has a smaller thickness than the sealing plates 11a and 11b. The connecting portion 11c does not seal the space between the sealing plates 11a and 11b. The connecting portion 11c does not maintain a vacuum seal between the sealing plates 11a and 11b. The connecting portion 11c can be a non-airtight retracted side housing. Here, the retracted side refers to the position outside the movable valve plate portion 54.

[0159] In this embodiment, the pendulum valve 100 has its rotating shaft 20 attached to the sealing plate 11a. This ensures accuracy in the movement position of the valve body 5 and the movable valve plate portion 54 relative to the sealing plate 11a, and reduces the number of constituent materials in the valve body 10 without affecting the sealing state around the flow path H where vacuum airtightness is required. Furthermore, reducing the manufacturing process for the valve body 10 does not degrade valve performance.

[0160] In this embodiment, the same effects as those of the above-described embodiment can be achieved.

[0161] Furthermore, in the present invention, it is also possible to individually select and combine each of the configurations in the above-described embodiments. [Explanation of Symbols]

[0162] 100... Pendulum valve (blocking valve) 5… Valve body 10...Lunchbox 10a,10b…inner surface 11a,11b...Sealed version 11c...Connection part 11f,11fc,11fp...Evacuation section 12a...First opening 12b…Second opening 20…Rotation axis 21... Rotary drive unit 31...First opening seal section 31a...First opening valve seal section 31b...First opening cylinder seal section 32, 32b... Second opening seal section 51...Neutral valve section (valve plate movement restricting section) 53... Valve frame section (valve plate movement restricting section) 54…Movable valve plate section (valve plate, movable valve section) 70…Pressure cylinder (extension drive cylinder) 71…Fixed part 72…Moving part (piston) 73... Extension spring (compression spring) 700...Cylinder telescopic drive unit 710... Drive pressure generation mechanism (compressed air generation unit) 712... Piping (compressed air circuit) 80...Continuous flow channel cylindrical member 81a, 81ap, 83a, 84a... Pressing end 81b, 83b, 84b... Evacuation ends 81,81c,81p,83...Occluded cylinder part 82…Flange section H...flow channel O-Out…outside position O-Unrock...Intersection O-Rock... Valve closure position

Claims

1. A valve body having a first opening and a second opening located on the same flow path, A valve body that is movable between the intersecting position of the flow path line connecting the first opening and the second opening, the closed position of the first opening, and an external position outside the flow path line, A rotational drive unit that rotates the valve body between the intersection position and the outer position, A continuous flow channel cylindrical member that constitutes a part of the flow channel connecting the first opening and the second opening and is movable along the flow channel, A cylindrical extension / retraction drive unit that enables the continuous flow channel cylindrical member to move along the flow path between a retracted position in which the valve body is rotatable between the intersection position and the outer position, an extended closed position in which the valve body in the closed position is pressed to enable the closure of the first opening, and an extended connecting position in which the continuous flow channel cylindrical member connects the first opening and the second opening to maintain airtightness of the flow path, Equipped with, A pendulum valve characterized by the following features.

2. When the valve body moves from the aforementioned intersection position to the aforementioned closed position, the end of the continuous flow channel member abuts against and presses against the valve body. The pendulum valve according to feature 1.

3. When viewed in the direction of the flow path, the inner diameter of the end of the continuous flow path cylindrical member facing the first opening is equal to the inner diameter of the first opening. The pendulum valve according to feature 1.

4. The aforementioned cylindrical extension / retraction drive unit is The aforementioned continuous flow channel cylindrical member is extended and retracted by an extendable drive cylinder, A drive pressure generating mechanism connected to the aforementioned telescopic drive cylinder and operating the aforementioned telescopic drive cylinder, Having The pendulum valve according to feature 1.

5. The continuous flow channel member has a diameter-uniformizing portion that moves integrally in the direction of the flow channel while making the inner diameter of the flow channel uniform, The pendulum valve according to feature 1.

6. The valve body is, A valve plate that can abut and close the peripheral edge of the first opening at the closed position, and is movable between the intersection position and the closed position, A rotating shaft that allows the valve plate to rotate between the aforementioned intersection position and the aforementioned outer position, A valve plate movement restricting unit supports the valve plate so that it can move between the intersection position and the closed position with respect to the rotation axis, Having The pendulum valve according to feature 1.

7. The first opening has a first opening sealing portion that seals the peripheral edge of the first opening and the valve body or the continuous flow tube member, The first opening seal portion is, The peripheral edge of the first opening and At the extended connection position, the end of the continuous flow channel member that abuts against the peripheral edge of the first opening, The peripheral edge of the sealing surface of the valve body that abuts the peripheral edge of the first opening in the closed position, Placed in The pendulum valve according to feature 1.

8. The aforementioned continuous flow channel cylindrical member is A closing cylinder portion that forms the flow path connecting the first opening and the second opening and closes off from the surroundings, The valve body has a second opening sealing portion that seals the peripheral edge of the second opening and the continuous flow channel cylindrical member, It has, The second opening seal portion is provided on the outer circumferential surface of the closing cylinder portion. The pendulum valve according to feature 1.

9. The aforementioned continuous flow channel cylindrical member is A closing cylinder portion that forms the flow path connecting the first opening and the second opening and closes off from the surroundings, The closing cylindrical portion has a flange portion formed radially outward at the end adjacent to the first opening in the axial direction, The pendulum valve according to feature 1.

10. The aforementioned continuous flow channel cylindrical member is A diameter uniformizing section moves integrally in the direction of the flow path while making the inner diameter dimension of the flow path uniform, The valve body has a second opening sealing portion that seals the peripheral edge of the second opening and the continuous flow channel cylindrical member, It has, The second opening seal portion is formed in the diameter uniformization portion. The pendulum valve according to feature 1.

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