Organic solvent regeneration apparatus, substrate processing system, and organic solvent regeneration method

Abstract

This technology provides a way to easily transfer a mixture of organic solvent and water from a substrate processing device into a recovery tank while reducing the amount of organic solvent waste. [Solution] The organic solvent regeneration device 5 comprises a recovery tank Tk1, an exhaust pipe 551, an exhaust valve 552, a circulation unit 60, a separation pipe 71, and a control unit 9. Organic solvent and water flow into the recovery tank Tk1 through the recovery pipe 51. The exhaust pipe 551, which is equipped with an exhaust valve 552, is connected to the recovery tank Tk1. The control unit 9 opens the exhaust valve 552 for at least a portion of the inflow period during which at least one of water and organic solvent flows into the recovery tank Tk1 through the recovery pipe 51, and closes the exhaust valve 552 for at least a portion of the separation operation period during which the mixed liquid is circulated in the circulation unit 60 to separate water from the mixed liquid.

Description

[Technical Field]

[0001] The present disclosure relates to an organic solvent regenerating apparatus, a substrate processing system, and an organic solvent regenerating method. [Background Art]

[0002] Patent Document 1 discloses an IPA recovery system. The IPA recovery system recovers water-containing IPA (isopropyl alcohol) discharged from a processing unit that processes substrates. The IPA recovery system includes a storage tank, a circulation pipe, a pump, and a dehydration unit. The storage tank is supplied with water-containing IPA from the processing unit. The circulation pipe is connected to the storage tank, and returns the water-containing IPA from the storage tank back to the storage tank. The pump is provided in the circulation pipe, and feeds the water-containing IPA from the upstream end to the downstream end of the circulation pipe. The dehydration unit is provided in the circulation pipe. The dehydration unit includes a concentration chamber, a permeation chamber, and a separation membrane that partitions the concentration chamber and the permeation chamber. The concentration chamber is inserted into the circulation pipe. The separation membrane allows water from the concentration chamber to pass through to the permeation chamber, and does not allow IPA to pass through.

[0003] The recovery system circulates the water-containing IPA through a circulation path including the storage tank and the circulation pipe. Through this circulation, the water-containing IPA passes through the concentration chamber of the dehydration unit. Water in the water-containing IPA passes through the separation membrane and flows into the permeation chamber, whereby the IPA concentration of the circulating water-containing IPA increases. That is, through this circulation, water-containing IPA with a high IPA concentration is stored in the storage tank. The water-containing IPA in the storage tank is supplied again to the processing unit. This makes it possible to reduce the amount of IPA discarded.

[0004] In Patent Document 1, an air supply pipe and an exhaust pipe are connected to the storage tank. While gas is supplied to the storage tank through the air supply pipe, the gas inside the storage tank is discharged to the outside through the exhaust pipe. The pressure inside the storage tank is maintained constant by a relief valve provided in the exhaust pipe. [Prior Art Literature] [Patent Literature]

[0005] [Patent Document 1] Japanese Patent Publication No. 2017-41505 [Overview of the project] [Problems that the invention aims to solve]

[0006] Inside the storage tank, IPA vapor is generated from the hydrated IPA. Since the gas inside the storage tank is discharged to the outside through the exhaust pipe, this IPA vapor is also discharged to the outside through the exhaust pipe. This results in a problem of a large amount of IPA being discarded.

[0007] On the other hand, if the exhaust piping is kept closed at all times, a problem arises in that it becomes difficult for water-containing IPA from the treatment unit to flow into the storage tank.

[0008] Therefore, the present disclosure aims to provide a technology that can easily flow a mixture of organic solvent and water from a substrate processing apparatus into a recovery tank while reducing the amount of organic solvent waste. [Means for solving the problem]

[0009] The organic solvent regeneration apparatus comprises: a recovery tank into which organic solvent and water discharged from a substrate processing apparatus that processes substrates flow through a recovery pipe and which stores a mixture of the organic solvent and water; an exhaust pipe connected to the recovery tank; an exhaust valve provided in the exhaust pipe; a circulation pipe connected to the recovery tank; a circulation section provided in the circulation pipe and including a membrane separator for separating water from the mixture; a separation pipe connected to the membrane separator through which the water separated by the membrane separator flows; and a control unit that opens the exhaust valve during at least a portion of the inflow period in which at least one of the water and the organic solvent flows into the recovery tank through the recovery pipe, and closes the exhaust valve during at least a portion of the separation operation period in which the mixture is circulated in the circulation section and water is separated from the mixture.

[0010] The substrate processing system comprises an organic solvent regeneration device and a substrate processing device.

[0011] The organic solvent regeneration method comprises opening an exhaust valve provided in an exhaust pipe connected to a recovery tank during at least a portion of the inflow period in which at least one of the organic solvent and water discharged from a substrate processing apparatus that processes substrates flows into a recovery tank through a recovery pipe, and closing the exhaust valve during at least a portion of the separation operation period in which the mixture is circulated in a circulation section, which includes a membrane separator provided in the circulation pipe and stores a mixture of the organic solvent and water in the recovery tank, and a separation operation is performed to separate the water from the mixture. [Effects of the Invention]

[0012] This method allows for easy flow of a mixture of organic solvent and water from the substrate processing equipment into a recovery tank, while also reducing the amount of organic solvent waste. [Brief explanation of the drawing]

[0013] [Figure 1] Figure 1 is a schematic diagram showing an example of the configuration of a substrate processing system including an organic solvent regeneration device according to the first embodiment. [Figure 2] Figure 2 is a block diagram schematically showing an example of the configuration of the control unit. [Figure 3] Figure 3 is a timing chart showing an example of the opening and closing of the recovery valve and exhaust valve. [Figure 4] Figure 4 is a schematic diagram showing an example of the organic solvent regeneration system during the inflow period. [Figure 5] Figure 5 is a schematic diagram showing an example of an organic solvent regeneration system during separation operation. [Figure 6] Figure 6 is a schematic diagram showing an example of the configuration of an organic solvent regeneration apparatus according to the second embodiment. [Figure 7] Figure 7 is a flowchart showing an example of pressure control during separation operation. [Figure 8] FIG. 8 is a diagram schematically illustrating an example configuration of an organic solvent regeneration apparatus according to a third embodiment. [Figure 9] FIG. 9 is a diagram schematically illustrating an example configuration of a substrate processing apparatus. [Figure 10] FIG. 10 is a flowchart illustrating an example operation of an organic solvent regeneration apparatus according to a fourth embodiment. [Figure 11] FIG. 11 is a timing chart illustrating an example operation of a substrate processing system according to a fourth embodiment. MODE FOR CARRYING OUT THE INVENTION

[0014] Hereinafter, embodiments will be described in detail with reference to the drawings. In the drawings, for the purpose of facilitating understanding, dimensions and numbers of respective parts are exaggerated or simplified as necessary. Parts having similar configurations and functions are denoted by the same reference numerals, and overlapping descriptions are omitted in the following description.

[0015] Further, in the following description, even if ordinal numbers such as "first" or "second" are used, these terms are used for convenience to facilitate understanding of the content of the embodiments, and do not limit the order that may be implied by these ordinal numbers.

[0016] When an expression indicating a relative or absolute positional relationship (e.g., "in one direction", "along one direction", "parallel", "perpendicular", "center", "concentric", "coaxial", etc.) is used, unless otherwise specified, the expression not only strictly represents the positional relationship, but also represents a state relatively displaced in terms of angle or distance within a tolerance or a range where equivalent functions can be obtained. When an expression indicating an equal state (e.g., "identical", "equal", "homogeneous", etc.) is used, unless otherwise specified, the expression not only quantitatively represents a strictly equal state, but also represents a state where a difference exists within a tolerance or a range where equivalent functions can be obtained. When an expression indicating a shape (e.g., "quadrangular shape", "cylindrical shape", etc.) is used, unless otherwise specified, the expression not only geometrically represents the shape strictly, but also represents a shape having, for example, irregularities, chamfers, etc. within a range where equivalent effects can be obtained. When an expression "comprising", "including", "provided with", "containing" or "having" one component is used, the expression is not an exclusive expression that excludes the presence of other components. When the expression "at least any one of A, B and C" is used, the expression includes only A, only B, only C, any two of A, B and C, and all of A, B and C.

[0017] <First Embodiment> FIG. 1 is a diagram schematically showing an example of the configuration of a substrate processing system 100 including an organic solvent regeneration apparatus 5 according to the first embodiment.

[0018] The substrate processing system 100 includes a substrate processing apparatus 1, an organic solvent regeneration apparatus 5, and a control unit 9. The substrate processing apparatus 1 is a processing apparatus that performs wet processing on a substrate W. The substrate processing apparatus 1 may be a single-wafer type processing apparatus that processes substrates W one by one, or may be a batch type processing apparatus that processes a plurality of substrates W collectively. In the example of FIG. 1, a single-wafer type processing apparatus is schematically illustrated.

[0019] The substrate W is, for example, a semiconductor wafer, a substrate for liquid crystal displays, an organic electroluminescence (EL) substrate, a flat panel display (FPD) substrate, an optical display substrate, a magnetic disk substrate, an optical disk substrate, a magneto-optical disk substrate, a photomask substrate, or a solar cell substrate. The substrate W has a thin, flat shape. In the following, it is assumed that the substrate W is a semiconductor wafer. As an example, the substrate W is a silicon substrate. The substrate W has, for example, a disc shape. The diameter of the substrate W is, for example, about 300 mm, and the thickness of the substrate W is, for example, about 0.5 mm or more and about 3 mm or less.

[0020] The substrate processing apparatus 1 supplies various processing liquids to the substrate W and performs processing on the substrate W according to the type of processing liquid. An example of the specific configuration of the substrate processing apparatus 1 will be outlined in the fourth embodiment, but for example, the substrate processing apparatus 1 supplies pure water (deionized water) and an organic solvent to the substrate W. As an example, the substrate processing apparatus 1 supplies pure water to the substrate W, and then supplies an organic solvent. By supplying pure water to the substrate W, the substrate processing apparatus 1 can wash away any objects adhering to the substrate W (either solids such as particles or liquids such as chemical solutions) with pure water. Next, by supplying an organic solvent to the substrate W, the substrate processing apparatus 1 can replace the liquid adhering to the substrate W from pure water to the rinsing liquid. The organic solvent is, for example, an organic solvent that is more volatile than pure water or an organic solvent with low surface tension, and a specific example is IPA (isopropyl alcohol). Next, the substrate processing apparatus 1 dries the substrate W. When the substrate W is dried, an organic solvent with high volatility or low surface tension is adhering to the substrate W. Therefore, the substrate processing apparatus 1 can dry the substrate W more quickly, or while avoiding the collapse of the patterns on the substrate W.

[0021] The mixture of organic solvent and water used to process the substrate W is discharged from the substrate processing apparatus 1 to the organic solvent regeneration apparatus 5 through the recovery pipe 51. In other words, the recovery pipe 51 connects the substrate processing apparatus 1 and the organic solvent regeneration apparatus 5. The substrate processing apparatus 1 is installed, for example, on an upper floor (above the floor) of the factory, and the organic solvent regeneration apparatus 5 is installed, for example, on a lower floor (below the floor) of the factory.

[0022] The organic solvent regeneration device 5 performs a separation operation to separate water from the mixture and increase the concentration of the organic solvent in the mixture. A detailed example of the configuration of the organic solvent regeneration device 5 and a detailed example of the separation operation will be described later. In the following, the concentration of the organic solvent in the mixture will also be referred to as the solvent concentration.

[0023] The control unit 9 controls the substrate processing system 100. In other words, the control unit 9 controls the various configurations of the substrate processing apparatus 1 and the organic solvent regeneration apparatus 5. Figure 2 is a schematic block diagram showing an example of the configuration of the control unit 9. The control unit 9 is an electronic circuit and includes, for example, an arithmetic processing unit 91 and a memory unit 92. In the specific example in Figure 2, the arithmetic processing unit 91 and the memory unit 92 are interconnected via a bus 93. The arithmetic processing unit 91 is, for example, a CPU (Central Processor Unit). The memory unit 92 may include a non-temporary memory unit (e.g., ROM (Read Only Memory)) 921 and a temporary memory unit (e.g., RAM (Random Access Memory)) 922. The non-temporary memory unit 921 may store, for example, a program that defines the processing to be executed by the control unit 9. By executing this program, the arithmetic processing unit 91 enables the control unit 9 to execute the processing defined in the program. Of course, some or all of the processing performed by the control unit 9 may be performed by hardware such as dedicated logic circuits.

[0024] As shown in Figure 2, the control unit 9 may be electrically connected to the storage unit 94. The storage unit 94 is a non-temporary storage unit and may be, for example, a memory or a hard disk.

[0025] As shown in Figure 1, the organic solvent regeneration device 5 includes a recovery tank Tk1, a circulation unit 60, a separation pipe 71, and a gas discharge unit 55.

[0026] The downstream end of the recovery piping 51 is connected to the recovery tank Tk1. The mixed liquid discharged from the substrate processing apparatus 1 flows into the recovery tank Tk1 through the recovery piping 51. The recovery tank Tk1 stores the mixed liquid. The recovery tank Tk1 is a sealed tank. In the example in Figure 1, a recovery valve 52 is provided in the recovery piping 51. The recovery valve 52 is controlled by the control unit 9, which switches the opening and closing of the recovery piping 51.

[0027] Since the mixture of organic solvent and water used to treat the substrate W flows into the recovery tank Tk1, the solvent concentration in the mixture in the recovery tank Tk1 is initially low. Hereafter, the solvent concentration of the mixture before the separation operation will also be referred to as the initial concentration. For example, the initial concentration may be 80% or less, 70% or less, or 60% or less. The initial concentration may be even lower.

[0028] The gas discharge section 55 discharges the gas in the recovery tank Tk1 to an external exhaust system (e.g., the exhaust system of a factory utility). The gas discharge section 55 includes a first exhaust pipe 551 (corresponding to an exhaust pipe) and an exhaust valve 552. The upstream end of the first exhaust pipe 551 is connected to the recovery tank Tk1. In the example in Figure 1, the upstream end of the first exhaust pipe 551 is connected to the ceiling of the recovery tank Tk1. The upstream port of the first exhaust pipe 551 opens above the liquid level of the mixed liquid in the recovery tank Tk1. The exhaust valve 552 is provided on the first exhaust pipe 551. The exhaust valve 552 is controlled by the control unit 9, which switches the opening and closing of the first exhaust pipe 551.

[0029] The control unit 9 opens the exhaust valve 552 for at least a portion of the inflow period during which at least one of the pure water and organic solvent from the substrate processing apparatus 1 flows into the recovery tank Tk1 through the recovery pipe 51. Figure 3 is a timing chart showing an example of the opening and closing of the recovery valve 52 and the exhaust valve 552. During the recoverable period TC when the recovery valve 52 is open, the mixed liquid discharged from the substrate processing apparatus 1 can flow into the recovery tank Tk1. In other words, during the recoverable period TC, the mixed liquid flows into the recovery tank Tk1 through the recovery pipe 51 during the period when the substrate processing apparatus 1 discharges the mixed liquid into the recovery pipe 51. This period corresponds to the inflow period. In the example in Figure 3, the control unit 9 keeps the exhaust valve 552 open for the entire recoverable period TC. Therefore, in the example in Figure 3, the exhaust valve 552 is open for the entire inflow period. Although separation operation is also shown in Figure 3, separation operation will be described in detail later.

[0030] Figure 4 is a schematic diagram illustrating an example of the organic solvent regeneration apparatus 5 during the inflow period. In the figure, pipes through which fluid flows are shown with thick lines, and open valves are shown with black-filled valves. In the example in Figure 4, the recovery valve 52 is open. Therefore, when the substrate processing apparatus 1 discharges the mixed liquid into the recovery pipe 51, the mixed liquid can flow into the recovery tank Tk1 through the recovery pipe 51. As the mixed liquid flows into the recovery tank Tk1, the amount of mixed liquid stored in the recovery tank Tk1 increases over time. Conversely, the volume of gas space occupied by gas in the recovery tank Tk1 decreases over time. However, in the example in Figure 4, the exhaust valve 552 is also open. Therefore, the gas in the recovery tank Tk1 is discharged through the first exhaust pipe 551. Thus, the pressure increase in the recovery tank Tk1 due to the inflow of the mixed liquid into the recovery tank Tk1 can be mitigated or avoided. Therefore, the mixed liquid can easily flow into the recovery tank Tk1.

[0031] Referring to Figure 1, the organic solvent regeneration device 5 may include a storage volume sensor Sn2. The storage volume sensor Sn2 measures the amount of mixed liquid stored in the recovery tank Tk1 and outputs an electrical signal indicating the measurement result to the control unit 9. The storage volume sensor Sn2 may also be a liquid level sensor that detects the height of the liquid level of the mixed liquid in the recovery tank Tk1. The control unit 9 may perform a separation operation when the amount of mixed liquid stored in the recovery tank Tk1 exceeds a predetermined standard recovery amount.

[0032] The circulation unit 60 includes a circulation pipe 61 and a membrane separator 62. The circulation pipe 61 is connected to the recovery tank Tk1. The circulation pipe 61 is the pipe that returns the mixed liquid from the recovery tank Tk1 to the recovery tank Tk1. In other words, the upstream and downstream ends of the circulation pipe 61 are connected to the recovery tank Tk1. The recovery tank Tk1 and the circulation pipe 61 form a circulation path through which the mixed liquid circulates. In the example in Figure 1, the upstream end of the circulation pipe 61 is connected to the bottom of the recovery tank Tk1, and the downstream end of the circulation pipe 61 is connected to the top of the recovery tank Tk1.

[0033] In the example shown in Figure 1, a liquid delivery unit 63 is provided in the circulation piping 61. The liquid delivery unit 63 delivers the processed liquid from the upstream end to the downstream end of the circulation piping 61. The liquid delivery unit 63 is, for example, a liquid delivery pump and is controlled by the control unit 9. The liquid delivery pump may be, for example, a magnetic levitation pump.

[0034] In the example shown in Figure 1, a circulation valve 64 is provided in the circulation piping 61. The circulation valve 64 is controlled by the control unit 9 to switch the opening and closing of the circulation piping 61. In the example shown in Figure 1, the circulation valve 64 is located on the downstream end side of the circulation piping 61 relative to the liquid supply unit 63.

[0035] The membrane separator 62 is installed in the circulation piping 61 and separates water from the mixed liquid. Specifically, the membrane separator 62 includes a casing, and within the casing, it includes a first path 62a, a second path 62b, and a separation membrane 62c. The first path 62a is interposed in the circulation piping 61 and constitutes part of the circulation path of the circulation section 60. Therefore, the mixed liquid passes through the first path 62a. The separation membrane 62c separates the first path 62a and the second path 62b. The separation membrane 62c is a membrane that allows water from the mixed liquid to pass from the first path 62a to the second path 62b and almost completely blocks the organic solvent. In this way, the membrane separator 62 separates water from the mixed liquid.

[0036] The separation membrane 62c may be a zeolite membrane, an organic separation membrane, or a CNT (carbon nanotube) separation membrane. The zeolite membrane may be, for example, a tetrahedral (SiO4) membrane. 4- ) and (AlO4) 5- The membrane has a crystalline structure in which the elements are interconnected. Organic separation membranes are, for example, organic membranes such as polyvinyl alcohol, chitosan, and polyimide. CNT separation membranes are, for example, membranes obtained by adding carbon nanotubes to a membrane such as polyamide. Alternatively, a two-dimensional material may be used as the material for the separation membrane 62c. The two-dimensional material is a material composed of one atomic layer, and may be, for example, molybdenum sulfide (MoS2), or a composite atomic layer compound of an early transition metal (such as titanium or vanadium) and a light element (carbon or nitrogen). Alternatively, a MOF (Metal Organic Frameworks) material or a carbon material (for example, graphene or graphene oxide) may be used as the material for the separation membrane 62c. Here, a zeolite membrane is used as the separation membrane 62c.

[0037] The separation pipe 71 is connected to the membrane separator 62, and the water separated by the membrane separator 62 flows through it. Specifically, the upstream end of the separation pipe 71 is connected to the second path 62b of the membrane separator 62. Therefore, water that has passed through the separation membrane 62c flows into the separation pipe 71. Hereafter, the fluid separated from the mixed liquid by the membrane separator 62 will also be called the separated fluid. The separated fluid mainly contains water. The separated fluid may contain small amounts of organic solvent.

[0038] In the example shown in Figure 1, a pressure reducing pump 75 is provided. The pressure reducing pump 75 reduces the pressure in the second path 62b through the separation piping 71. In the example shown in Figure 1, a separation tank Tk2 is provided in the separation piping 71. The separated fluid separated by the membrane separator 62 flows into the separation tank Tk2. The separation tank Tk2 stores the separated fluid. Hereafter, the portion of the separation piping 71 between the membrane separator 62 and the separation tank Tk2 will also be referred to as the piping portion 711, and the portion downstream of the separation tank Tk2 will also be referred to as the piping portion 712. In the example shown in Figure 1, the upstream end of the piping portion 711 is connected to the second path 62b, and the downstream end of the piping portion 711 is connected to the ceiling of the separation tank Tk2. The downstream opening of the piping portion 711 is above the liquid level of the separated fluid inside the separation tank Tk2. In the example shown in Figure 1, the upstream end of the piping portion 712 is connected to the bottom of the separation tank Tk2.

[0039] In the example shown in Figure 1, the upstream end of the pressure reducing pipe 74 is also connected to the separation tank Tk2. For example, the upstream end of the pressure reducing pipe 74 is connected to the ceiling of the separation tank Tk2. The upstream port of the pressure reducing pipe 74 opens above the liquid level of the separation fluid inside the separation tank Tk2. A pressure reducing pump 75 is connected to the pressure reducing pipe 74. The pressure reducing pump 75 is controlled by the control unit 9. When the pressure reducing pump 75 is activated, the gas in the second path 62b of the membrane separator 62 is drawn to the pressure reducing pump 75 through the piping section 711, the separation tank Tk2, and the pressure reducing pipe 74 in that order. As a result, the pressure in the second path 62b of the membrane separator 62 decreases, and the water in the mixed liquid in the first path 62a is drawn more effectively into the second path 62b through the separation membrane 62c.

[0040] In the example shown in Figure 1, a separation valve 721 is provided in the piping portion 711 of the separation pipe 71. The separation valve 721 is controlled by the control unit 9 to switch the opening and closing of the piping portion 711. In the example shown in Figure 1, a separation valve 722 is provided in the piping portion 712 of the separation pipe 71. The separation valve 722 is controlled by the control unit 9 to switch the opening and closing of the piping portion 712.

[0041] In the example shown in Figure 1, a temperature controller 65 is provided in the circulation piping 61. The temperature controller 65 adjusts the temperature of the mixed liquid flowing through the circulation piping 61. For example, the temperature controller 65 may include a heater. The heater may be an electrically resistive heater with a heating wire, an optical heater that emits heating light (e.g., infrared rays), or an electronic cooling unit with a Peltier element. By heating the mixed liquid with the temperature controller 65, a high-temperature mixed liquid can be introduced into the membrane separator 62. Since the velocity of molecules in the mixed liquid is higher at higher temperatures, water molecules in the high-temperature mixed liquid can easily pass through the separation membrane 62c. Therefore, the membrane separator 62 can separate the separation fluid from the mixed liquid with higher efficiency. The temperature controller 65 is controlled by a control unit 9. The control unit 9 controls the temperature controller 65 so that the temperature of the mixed liquid is within a temperature range suitable for separation operation.

[0042] In the example shown in Figure 1, the membrane separator 62 is located on the downstream end side of the circulation piping 61 relative to the circulation valve 64. Also in the example shown in Figure 1, the temperature controller 65 is located on the upstream end side of the circulation piping 61 relative to the membrane separator 62. As a result, since the temperature controller 65 is located on the inflow side of the membrane separator 62, the temperature of the mixed liquid flowing into the membrane separator 62 can be adjusted with greater precision. As a specific example, the temperature controller 65 may be located between the circulation valve 64 and the membrane separator 62.

[0043] When the mixture is heated by the temperature controller 65, more vapor from the mixture can flow through the circulation piping 61. In other words, more water vapor and organic solvent vapor can flow through the circulation piping 61. As a result, water vapor can pass through the separation membrane 62c of the membrane separator 62 and flow into the separation piping 71. In other words, the separated fluid may contain water vapor.

[0044] Therefore, as shown in Figure 1, a cooler 73 may be provided in the piping portion 711 of the separation piping 71. Separation fluid flows into the cooler 73. The cooler 73 cools the separation fluid and condenses it. The cooler 73 may include, for example, a heat exchanger (not shown) and a refrigerant supply source (not shown) that supplies refrigerant to the heat exchanger. The heat exchanger has a separation path through which the separation fluid passes and a refrigerant path through which the refrigerant passes. The separation fluid in the separation path is cooled by heat exchange with the refrigerant in the refrigerant path. The refrigerant supply source cools the refrigerant flowing in from the heat exchanger and supplies the cooled refrigerant to the heat exchanger. The refrigerant supply source may be, for example, a heat pump. The separation fluid (i.e., separation liquid) condensed in the cooler 73 is supplied to the separation tank Tk2 and stored in the separation tank Tk2.

[0045] The control unit 9 controls the various components of the organic solvent regeneration device 5 to perform separation operation. Figure 5 is a schematic diagram showing an example of the organic solvent regeneration device 5 during separation operation. In the example in Figure 5, the control unit 9 opens the circulation valve 64 and the separation valve 721, and operates the temperature controller 65, the liquid supply unit 63, the cooler 73, and the pressure reducing pump 75 to perform separation operation. Due to this circulation, the mixed liquid continues to pass through the membrane separator 62. The pressure reducing pump 75 reduces the pressure in the second path 62b, so mainly water (including water vapor) in the mixed liquid is drawn from the first path 62a through the separation membrane 62c to the second path 62b. As a result, the membrane separator 62 continues to separate the separation fluid (mainly water) from the mixed liquid, and the separation fluid continues to be discharged through the separation piping 71. Therefore, the solvent concentration of the mixed liquid in the circulation path increases over time.

[0046] In the example shown in Figure 1, the organic solvent regeneration device 5 includes a concentration sensor Sn1. The concentration sensor Sn1 measures the solvent concentration of the mixed liquid and outputs an electrical signal indicating the measurement result to the control unit 9. In the example shown in Figure 1, the concentration sensor Sn1 is installed in the circulation piping 61. As a specific example, the concentration sensor Sn1 is installed on the downstream end side of the circulation piping 61 relative to the membrane separator 62. The concentration sensor Sn1 measures the solvent concentration of the mixed liquid flowing through the circulation piping 61. Since the solvent concentration of the mixed liquid flowing through the circulation piping 61 is approximately equal to the solvent concentration of the mixed liquid in the recovery tank Tk1, the concentration sensor Sn1 can indirectly measure the solvent concentration of the mixed liquid in the recovery tank Tk1. The control unit 9 may stop the separation operation when the solvent concentration measured by the concentration sensor Sn1 becomes equal to or greater than the target concentration. As a result, a mixed liquid with a solvent concentration equal to or greater than the target concentration is stored in the recovery tank Tk1. Hereafter, the mixed liquid with a solvent concentration equal to or greater than the target concentration will also be referred to as the concentrated liquid.

[0047] The control unit 9 closes the exhaust valve 552 for at least a portion of the separation operation period TD during which the separation operation is performed. This reduces the amount of organic solvent vapor discharged to the outside through the first exhaust pipe 551 during the separation operation. Therefore, the amount of organic solvent waste can be reduced. In the example in Figure 3, the control unit 9 closes the exhaust valve 552 for the entire separation operation period TD (see also Figure 5). This further reduces the amount of organic solvent vapor discharged during the separation operation.

[0048] Furthermore, as shown in Figure 3, the control unit 9 may close the recovery valve 52 during the separation operation period TD. The control unit 9 may close the recovery valve 52 for the entire separation operation period TD. This makes it possible to avoid situations in which a mixture with a low solvent concentration flows into the recovery tank Tk1 during the separation operation.

[0049] If the recovery valve 52 and exhaust valve 552 are closed for the entire separation operation period TD, the circulation path formed by the recovery tank Tk1 and the circulation piping 61 will be sealed for the entire separation operation period TD. Therefore, the mixed liquid will circulate through the sealed circulation path for the entire separation operation period TD. This minimizes the amount of organic solvent vapor discharged.

[0050] Furthermore, the mixed liquid may be discharged from the substrate processing apparatus 1 even during the separation operation period TD. Therefore, the organic solvent regeneration apparatus 5 may include another recovery tank (not shown). Another recovery pipe branched from the recovery pipe 51 may be connected to the other recovery tank. Another recovery valve may be provided in the other recovery pipe. The control unit 9 may open the other recovery valve when the recovery valve 52 is closed. With this, the mixed liquid discharged from the substrate processing apparatus 1 during the separation operation period TD can be recovered in another recovery tank Tk1.

[0051] In the example shown in Figure 1, the organic solvent regeneration device 5 includes a concentrated liquid supply unit 8. The concentrated liquid supply unit 8 supplies the concentrated liquid from the recovery tank Tk1 to the outside. Here, "outside" refers to the outside of the organic solvent regeneration device 5. The concentrated liquid supply unit 8 may also supply the concentrated liquid to the substrate processing device 1. The substrate processing device 1 supplies the concentrated liquid to the substrate W. As a result, the substrate processing system 100 can reuse the organic solvent. In other words, the organic solvent regeneration device 5 contributes to the reduction of organic solvent usage.

[0052] In the example shown in Figure 1, the concentrated liquid supply unit 8 includes a supply pipe 81 and a supply valve 82. In the example shown in Figure 1, the upstream end of the supply pipe 81 is connected to the circulation pipe 61 between the liquid delivery unit 63 and the circulation valve 64. The downstream end of the supply pipe 81 is connected to the outside. The supply valve 82 is provided on the supply pipe 81. The supply valve 82 is controlled by the control unit 9 to switch the opening and closing of the supply pipe 81.

[0053] The control unit 9 opens the supply valve 82 and activates the liquid delivery unit 63 while the concentrated liquid is stored in the recovery tank Tk1. This supplies the concentrated liquid from the recovery tank Tk1 to the outside through the supply pipe 81. At this time, the control unit 9 may stop the circulation of the circulation unit 60. In other words, the organic solvent regeneration device 5 can supply the concentrated liquid to the outside while the separation operation is stopped. The upstream end of the supply pipe 81 may be connected to, for example, the bottom of the recovery tank Tk1. In this case, a separate liquid delivery unit from the liquid delivery unit 63 is provided on the supply pipe 81.

[0054] As described above, the control unit 9 opens the exhaust valve 552 for at least a portion of the inflow period of the recoverable period TC (see also Figure 3). By opening the exhaust valve 552, the mixed liquid discharged from the substrate processing apparatus 1 can flow more easily into the recovery tank Tk1. The period for which the exhaust valve 552 is open may be, for example, more than half of the inflow period, more than 80%, more than 90%, or the entire inflow period.

[0055] On the other hand, the control unit 9 closes the exhaust valve 552 for at least a portion of the separation operation period TD (see also Figure 3). As a result, the organic solvent regeneration device 5 can reduce the amount of organic solvent vapor discharged through the first exhaust pipe 551 during separation operation, thereby reducing the amount of organic solvent waste. The period during which the exhaust valve 552 is closed may be, for example, more than half of the separation operation period TD, more than 80%, more than 90%, or the entirety of the separation operation period TD. If the exhaust valve 552 is closed for the entirety of the separation operation period TD, the organic solvent regeneration device 5 can avoid discharging organic solvent vapor through the first exhaust pipe 551 during separation operation.

[0056] In particular, as in the specific example described above, when the temperature controller 65 heats the mixed liquid, a larger amount of organic solvent vapor flows through the circulation piping 61. If such a large amount of organic solvent vapor is discharged to the outside, the amount of organic solvent waste increases. In other words, the reuse rate of the organic solvent decreases. Therefore, this embodiment is particularly beneficial with the organic solvent regeneration device 5 including the temperature controller 65.

[0057] Furthermore, in the example described above, the recovery valve 52 is closed during the separation operation period TD. Therefore, the organic solvent regeneration device 5 can avoid a situation in which a mixture with a low solvent concentration flows into the recovery tank Tk1 during the separation operation. If the recovery valve 52 and the exhaust valve 552 are closed for the entirety of the separation operation period TD, the organic solvent regeneration device 5 can avoid the discharge of organic solvent vapor from the circulation path during the separation operation.

[0058] <Second Embodiment> During separation operation, the membrane separator 62 continuously separates the separation fluid (mainly water) from the mixed liquid. In other words, the separation fluid branches off from the circulation path and continues to flow into the separation piping 71. Therefore, the amount of mixed liquid circulating through the circulation path (hereinafter also referred to as the circulation volume) decreases over time. Consequently, the gas pressure in the circulation path decreases over time. In other words, the pressure in the recovery tank Tk1 decreases over time. Therefore, the recovery tank Tk1 needs to have pressure resistance that can withstand low pressures. Such a recovery tank Tk1 is expensive.

[0059] Therefore, the second embodiment aims to mitigate or avoid the decrease in pressure in the recovery tank Tk1 in the region below the first reference pressure value.

[0060] Figure 6 is a schematic diagram showing an example of the configuration of an organic solvent regeneration apparatus 5 according to the second embodiment. The organic solvent regeneration apparatus 5 according to the second embodiment differs from the organic solvent regeneration apparatus 5 according to the first embodiment in that it has a gas supply unit 57. The gas supply unit 57 supplies gas to the recovery tank Tk1. The gas includes, for example, an inert gas. The inert gas includes, for example, nitrogen gas and at least one of a noble gas. The noble gas includes, for example, argon gas.

[0061] In the example shown in Figure 6, the gas supply unit 57 includes a first air supply pipe 571 and an air supply valve 572. The downstream end of the first air supply pipe 571 is connected to the recovery tank Tk1. In the example shown in Figure 6, the downstream end of the first air supply pipe 571 is connected to the ceiling of the recovery tank Tk1. The downstream port of the first air supply pipe 571 opens above the liquid level of the mixed liquid inside the recovery tank Tk1. The upstream end of the first air supply pipe 571 is connected to a gas supply source. The gas supply source includes a storage unit (tank) for storing gas (e.g., inert gas). The air supply valve 572 is provided on the first air supply pipe 571. The air supply valve 572 is controlled by the control unit 9 to switch the opening and closing of the first air supply pipe 571. When the air supply valve 572 is open, gas flows through the first air supply pipe 571 towards the recovery tank Tk1 and flows into the recovery tank Tk1. This allows the pressure inside the recovery tank Tk1 to be increased.

[0062] In the example shown in Figure 6, the organic solvent regeneration apparatus 5 includes a pressure sensor Sn3. The pressure sensor Sn3 measures the pressure in the recovery tank Tk1. In the example shown in Figure 6, the pressure sensor Sn3 is installed in the first exhaust pipe 551 upstream of the exhaust valve 552. In other words, the pressure sensor Sn3 is installed between the exhaust valve 552 and the recovery tank Tk1. The pressure sensor Sn3 measures the pressure in the first exhaust pipe 551. Since the pressure in the pipe portion of the first exhaust pipe 551 upstream of the exhaust valve 552 is approximately equal to the pressure in the recovery tank Tk1, the pressure sensor Sn3 can indirectly measure the pressure in the recovery tank Tk1.

[0063] Figure 7 is a flowchart showing an example of pressure control during separation operation. For example, the control unit 9 starts pressure control at the same time as the separation operation begins. In other words, the control unit 9 performs pressure control in parallel with the separation operation. In pressure control, first, the pressure sensor Sn3 measures the pressure in the recovery tank Tk1 (step S1: pressure measurement step). The pressure sensor Sn3 outputs the measured pressure to the control unit 9.

[0064] Next, the control unit 9 determines whether the measured pressure measured by the pressure sensor Sn3 is less than the first reference pressure value (step S2: pressure determination step). The first reference pressure value is a value greater than the lower limit of the specified pressure range of the recovery tank Tk1, and is set in advance, for example. Data indicating the first reference pressure value is stored in the storage unit 94, for example.

[0065] When the measured pressure is equal to or greater than the first reference pressure value, the control unit 9 determines whether or not to terminate the pressure control (step S8: termination determination step). If it determines to terminate the pressure control, the control unit 9 terminates the pressure control. The control unit 9 may terminate the pressure control, for example, in response to the termination of the separation operation. As a specific example, the control unit 9 may terminate the separation operation and pressure control when the solvent concentration of the mixed liquid is equal to or greater than the target concentration. On the other hand, if the control unit 9 determines in step S8 that it does not yet terminate the pressure control, step S1 is executed again.

[0066] In step S2, if the measured pressure is less than the first reference pressure value, the gas supply unit 57 begins supplying gas to the recovery tank Tk1 (step S3: gas supply start step). Specifically, the control unit 9 opens the air supply valve 572. As a result, gas is supplied from the gas supply source to the recovery tank Tk1 through the first air supply pipe 571. The pressure inside the recovery tank Tk1 rises in proportion to the amount of gas supplied. In other words, the gas supply unit 57 supplies gas at a flow rate that causes the pressure inside the recovery tank Tk1 to rise.

[0067] Next, the pressure sensor Sn3 measures the pressure inside the recovery tank Tk1 (step S4: pressure measurement step). The pressure sensor Sn3 outputs the measured pressure to the control unit 9.

[0068] Next, the control unit 9 determines whether the measured pressure measured by the pressure sensor Sn3 is equal to or greater than the second reference pressure value (step S5: pressure determination step). The second reference pressure value is set to a value greater than the first reference pressure value. The second reference pressure value is set to less than the upper limit of the specified pressure range of the recovery tank Tk1. Data indicating the second reference pressure value is stored, for example, in the storage unit 94.

[0069] When the measured pressure is less than the second reference pressure value, the control unit 9 determines whether or not to terminate the pressure control, similar to step S8 (step S6: termination determination step). If the control unit 9 determines that it is not yet time to terminate the pressure control, step S4 is executed again. If it determines that it is time to terminate the pressure control, the control unit 9 terminates the pressure control.

[0070] On the other hand, if the measured pressure in step S5 is equal to or greater than the second reference pressure value, the gas supply unit 57 stops supplying gas (step S7: gas supply stop step). Specifically, the control unit 9 closes the air supply valve 572. This stops the supply of gas from the gas supply source to the recovery tank Tk1. Next, the control unit 9 executes step S8.

[0071] As described above, in the second embodiment, when the pressure in the recovery tank Tk1 during separation operation falls below the first reference pressure value, the gas supply unit 57 supplies gas to the recovery tank Tk1. Therefore, the organic solvent regeneration device 5 can avoid further pressure drops in the recovery tank Tk1. This allows the organic solvent regeneration device 5 to increase the pressure in the recovery tank Tk1. Consequently, an inexpensive tank with low pressure resistance can be used as the recovery tank Tk1. Thus, the manufacturing cost and size of the recovery tank Tk1 can be reduced.

[0072] The air supply valve 572 may also be an auto pressure controller. Alternatively, an auto pressure controller may be provided separately from the air supply valve 572 in the first air supply piping 571. The auto pressure controller adjusts the pressure in the recovery tank Tk1 to a predetermined pressure range.

[0073] <First reference pressure value> The first reference pressure value may be set higher than standard atmospheric pressure. In other words, the first reference pressure value may be positive pressure. This allows the organic solvent regeneration device 5 to maintain a positive pressure in the recovery tank Tk1 during separation operation. As a result, the organic solvent regeneration device 5 can maintain a higher boiling point for the mixed liquid in the circulation path during separation operation.

[0074] According to this, the temperature controller 65 can adjust the temperature of the mixed liquid to a higher temperature within the range below the boiling point. Therefore, the organic solvent regeneration device 5 can increase the temperature of the mixed liquid and thus increase the amount of vapor in the mixed liquid while avoiding boiling of the mixed liquid in the circulation path. Consequently, the organic solvent regeneration device 5 can perform separation in the membrane separator 62 with higher efficiency. Specifically, the organic solvent regeneration device 5 can improve the rate at which the solvent concentration in the mixed liquid increases.

[0075] <Third Embodiment> The third embodiment aims to more reliably avoid a drop in pressure within the recovery tank Tk1.

[0076] Figure 8 is a schematic diagram showing an example of the configuration of the organic solvent regeneration apparatus 5 according to the third embodiment. The organic solvent regeneration apparatus 5 according to the third embodiment differs from the organic solvent regeneration apparatus 5 according to the second embodiment in terms of the configuration of the gas supply unit 57.

[0077] In the example shown in Figure 8, the gas supply unit 57 further includes a second air supply pipe 573 and a relief valve 574. The downstream end of the second air supply pipe 573 is connected to the recovery tank Tk1. In the example shown in Figure 8, the downstream end of the second air supply pipe 573 is connected to the ceiling of the recovery tank Tk1. The downstream port of the second air supply pipe 573 opens above the liquid level of the mixed liquid inside the recovery tank Tk1. The upstream end of the second air supply pipe 573 is connected to, for example, the outside air space (for example, the interior of a factory). The relief valve 574 is provided on the second air supply pipe 573. The relief valve 574 switches the opening and closing of the second air supply pipe 573. The relief valve 574 automatically opens when the pressure inside the recovery tank Tk1 is below a first set pressure value and automatically closes when the pressure inside the recovery tank Tk1 is greater than the first set pressure value. The first set pressure value is set to a value lower than the first reference pressure value and higher than the lower limit of the specified pressure range of the recovery tank Tk1. This relief valve 574 is not controlled by the control unit 9. Specifically, the relief valve 574 includes a valve seat and a valve body that receives a first force corresponding to the pressure in the recovery tank Tk1. The first force acts on the valve body in a direction toward the valve seat. A second force also acts on the valve body in a direction toward away from the valve seat. When the pressure in the recovery tank Tk1 is greater than the first set pressure value, the first force is greater than the second force, and the valve body is pressed against the valve seat. As a result, the relief valve 574 closes. On the other hand, when the pressure in the recovery tank Tk1 falls below the first set pressure value, the first force becomes less than the second force, and the valve body moves toward away from the valve seat. As a result, the relief valve 574 opens. When the relief valve 574 opens, air is supplied to the recovery tank Tk1 through the second air supply pipe 573. This increases the pressure inside the recovery tank Tk1. Therefore, a further decrease in the pressure inside the recovery tank Tk1 can be avoided.

[0078] As described above, in the third embodiment, a second air supply pipe 573 and a relief valve 574 are provided. With this configuration, even if an abnormality occurs in the air supply valve 572, or if an abnormality occurs in the control function of the air supply valve 572 by the control unit 9, the relief valve 574 will automatically open when the pressure in the recovery tank Tk1 falls below the first set pressure value. Therefore, the organic solvent regeneration device 5 can more reliably prevent further pressure drops in the recovery tank Tk1.

[0079] Furthermore, the control unit 9 may stop the separation operation when the pressure measured by the pressure sensor Sn3 is less than or equal to the first set pressure value.

[0080] In the example described above, the gas supply unit 57 supplies air to the recovery tank Tk1 through the second air supply pipe 573. Here, the cleanliness of the gas supplied to the recovery tank Tk1 through the first air supply pipe 571 may be higher than the cleanliness of the air supplied to the recovery tank Tk1 through the second air supply pipe 573. The indicator of cleanliness here can be, for example, the number of particles contained in the gas. The fewer the number of particles in the gas, the higher the cleanliness.

[0081] According to this, when the pressure in the recovery tank Tk1 is less than the first reference pressure value and greater than the first set pressure value, the control unit 9 continues the separation operation while supplying cleaner gas to the recovery tank Tk1 from the gas supply unit 57. As a result, the organic solvent regeneration device 5 can continue the separation operation while mitigating or avoiding contamination of the mixed liquid in the circulation path.

[0082] On the other hand, when the pressure in the recovery tank Tk1 falls below the first set pressure value, the relief valve 574 opens and the control unit 9 stops the separation operation. When the relief valve 574 opens, less clean air is supplied to the recovery tank Tk1. This supply of air prevents further pressure drops in the recovery tank Tk1. A filter to capture impurities in the air may be provided in the second air supply pipe 573. This allows for the supply of cleaner air to the recovery tank Tk1. However, if a malfunction occurs in the filter, less clean air may flow into the recovery tank Tk1. For this reason, the control unit 9 may stop the separation operation when the pressure in the recovery tank Tk1 falls below the first set pressure value. This avoids unnecessary separation operations that would involve the influx of less clean air.

[0083] In the example shown in Figure 8, the gas discharge section 55 further includes a second exhaust pipe 553 and a relief valve 554. The upstream end of the second exhaust pipe 553 is connected to the recovery tank Tk1, and the downstream end of the second exhaust pipe 553 is connected to an external exhaust system. In the example shown in Figure 8, the upstream portion of the first exhaust pipe 551 is also used for the upstream portion of the second exhaust pipe 553, and the downstream portion of the first exhaust pipe 551 is also used for the downstream portion of the second exhaust pipe 553.

[0084] The relief valve 554 is installed in the second exhaust pipe 553 and switches the opening and closing of the second exhaust pipe 553. In the example in Figure 8, the relief valve 554 is installed in the portion of the second exhaust pipe 553 that is not shared with the first exhaust pipe 551. The exhaust valve 552 is installed in the portion of the first exhaust pipe 551 that is not shared with the second exhaust pipe 553. The relief valve 554 automatically opens when the pressure in the recovery tank Tk1 is equal to or greater than the second set pressure value, and automatically closes when the pressure in the recovery tank Tk1 is less than the second set pressure value. The second set pressure value is set to be higher than the second reference pressure value and lower than the upper limit of the specified pressure range of the recovery tank Tk1. For example, the relief valve 554 includes a valve seat and a valve body that receives a third force corresponding to the pressure in the recovery tank Tk1. The third force acts on the valve body in a direction away from the valve seat. A fourth force also acts on the valve body in a direction toward the valve seat. When the pressure in the recovery tank Tk1 is below the second set pressure value, the third force is smaller than the fourth force, and the relief valve 554 is closed. When the pressure in the recovery tank Tk1 rises to or above the second set pressure value, the third force becomes larger than the fourth force, and the relief valve 554 opens. As a result, the gas in the recovery tank Tk1 is discharged to the outside through the second exhaust pipe 553, and the pressure in the recovery tank Tk1 decreases. Therefore, further increases in the pressure in the recovery tank Tk1 can be more reliably avoided.

[0085] <Fourth Embodiment> The configuration of the organic solvent regeneration apparatus 5 according to the fourth embodiment is the same as the configuration of the organic solvent regeneration apparatus 5 according to the first to third embodiments. In the fourth embodiment, the organic solvent regeneration apparatus 5 performs a pre-temperature control operation, which will be described below, immediately before the separation operation. That is, the pre-temperature control operation is an operation in which the pressure reducing pump 75 is stopped and the temperature controller 65 is operated while the mixed liquid is circulated in the circulation section 60. As a result, the organic solvent regeneration apparatus 5 can heat the mixed liquid while circulating it through the circulation path with the separation function of the membrane separator 62 substantially stopped. In other words, the organic solvent regeneration apparatus 5 can heat the mixed liquid even before the separation operation.

[0086] Incidentally, before the separation operation, the recovery valve 52 is open, and the mixed liquid can flow into the recovery tank Tk1. In other words, the organic solvent regeneration device 5 performs a pre-temperature control operation with the recovery valve 52 open. To put it another way, the organic solvent regeneration device 5 performs a pre-temperature control operation in a recoverable state, allowing the mixed liquid discharged from the substrate processing device 1 to flow into the recovery tank Tk1. To put it another way, the organic solvent regeneration device 5 performs a pre-temperature control operation for at least a portion of the recoverable period TC. It can also be said that the recoverable period TC is the period during which the amount stored in the recovery tank Tk1 falls below the standard recovery amount.

[0087] As described above, the organic solvent regeneration device 5 performs a preliminary temperature control operation in parallel with the recovery operation in which the mixed liquid from the substrate processing device 1 is recovered in the recovery tank Tk1. Therefore, in the separation operation after the recovery operation, the temperature of the mixed liquid can be raised more quickly to a temperature range suitable for separation.

[0088] Next, the opening and closing of the exhaust valve 552 during pre-temperature control operation will be described. As described in the first embodiment, if the exhaust valve 552 is open during the inflow period when at least one of the pure water and the organic solvent flows into the recovery tank Tk1, the mixed liquid can easily flow into the recovery tank Tk1.

[0089] On the other hand, during pre-temperature control operation, the temperature controller 65 heats the mixture. As a result, the amount of organic solvent vapor in the circulation path increases. However, if the exhaust valve 552 is always open, the organic solvent vapor in circulation is constantly discharged to the outside through the first exhaust pipe 551. As a result, the amount of organic solvent vapor discharged through the first exhaust pipe 551 during pre-temperature control operation becomes large.

[0090] Now, the substrate processing apparatus 1 does not necessarily continuously discharge the mixed solution while processing the substrate W. For example, if the substrate processing apparatus 1 is a single-wafer processing apparatus and supplies chemical solution, pure water, and organic solvent to the substrate W in this order, the substrate processing apparatus 1 will discharge the chemical solution and not the mixed solution during the period when the substrate processing apparatus 1 is supplying the chemical solution. Also, the substrate processing apparatus 1 will discharge the pure water and not the organic solvent during the period when the substrate processing apparatus 1 is supplying the organic solvent.

[0091] Therefore, the control unit 9 opens the exhaust valve 552 during at least a portion of the inflow period in which the mixed liquid flows into the recovery tank Tk1 during the pre-temperature control operation period. The control unit 9 also closes the exhaust valve 552 during at least a portion of the non-inflow period in which the mixed liquid does not flow into the recovery tank Tk1 during the pre-temperature control operation period. The specific configuration and specific operation example of the substrate processing apparatus 1 and the specific operation example of the organic solvent regeneration apparatus 5 will be described below in this order.

[0092] Figure 9 is a schematic diagram showing an example of the configuration of a substrate processing apparatus 1. In the example of Figure 9, the substrate processing apparatus 1 includes a plurality of processing units 4. Each processing unit 4 wet processes a substrate W. In the example of Figure 9, each processing unit 4 is a single-wafer processing apparatus that processes one substrate W at a time. In the example of Figure 9, the plurality of processing units 4 are stacked vertically. In this case, the plurality of processing units 4 constitute a tower TW. In the example of Figure 9, processing unit 4a, processing unit 4b, and processing unit 4c are shown as the plurality of processing units 4. In the example of Figure 9, processing units 4a, processing unit 4b, and processing unit 4c constitute a tower TW. Although one tower TW is shown in the example of Figure 9, multiple towers TW may be provided adjacent to each other in the horizontal direction.

[0093] Processing units 4a to 4c may have the same configuration. In the example in Figure 9, only the configuration of processing unit 4a is shown.

[0094] The processing unit 4 includes a substrate holding section 10, a discharge section 20, and a guard 30. The substrate holding section 10 holds the substrate W in a horizontal position and rotates the substrate W around a rotation axis Q1. Here, a horizontal position means that the thickness direction of the substrate W is aligned with the vertical direction. The rotation axis Q1 is an axis that passes through the center of the substrate W and is aligned with the vertical direction. Such a substrate holding section 10 may also be called a spin chuck. The substrate holding section 10 may be a spin chuck of the mechanical chuck type, suction chuck type, or electrostatic chuck type.

[0095] The discharge unit 20 sequentially discharges multiple types of processing liquids toward the main surface of the substrate W held by the substrate holding unit 10. For example, the discharge unit 20 discharges a chemical solution, pure water, and an organic solvent onto the substrate W in this order. The discharge unit 20 includes a nozzle 21. In the example shown in Figure 9, the discharge unit 20 includes a nozzle 21c for the chemical solution, a nozzle 21w for pure water, and a nozzle 21i for the organic solvent. Nozzle 21c is connected to a chemical solution supply source via a supply pipe 22c, nozzle 21w is connected to a pure water supply source via a supply pipe 22w, and nozzle 21i is connected to a solvent tank Tk3 via a supply pipe 22i. A supply valve 23c is provided on the supply pipe 22c, a supply valve 23w is provided on the supply pipe 22w, and a supply valve 23i is provided on the supply pipe 22i.

[0096] In the example shown in Figure 9, the supply pipe 22i is equipped with a liquid delivery unit 24i, a temperature controller 25i, and a filter 26i. The liquid delivery unit 24i is a liquid delivery pump that delivers organic solvent from the solvent tank Tk3 to the nozzle 21i. The temperature controller 25i adjusts the temperature of the organic solvent flowing through the supply pipe 22i. The temperature controller 25i is, for example, a heater. The filter 26i captures impurities in the organic solvent flowing through the supply pipe 22i.

[0097] Solvent tank Tk3 is connected to an organic solvent supply source via a replenishment pipe 27i. A replenishment valve 28i is provided in the replenishment pipe 27i. When the replenishment valve 28i opens, the organic solvent is supplied to solvent tank Tk3 through the replenishment pipe 27i.

[0098] In the example shown in Figure 9, the solvent tank Tk3 is connected to the downstream end of the supply pipe 81 of the organic solvent regeneration device 5. In this structure, the concentrated liquid from the organic solvent regeneration device 5 is supplied to the solvent tank Tk3 through the supply pipe 81.

[0099] In the example shown in Figure 9, the processing unit 4 includes a nozzle movement drive unit 211 that moves each nozzle 21. The nozzle movement drive unit 211 moves the nozzles 21 between a processing position and a standby position. The processing position is the position where the nozzles 21 discharge the processing liquid toward the substrate W, for example, a position perpendicular to the center of the substrate W. The standby position is the position where the nozzles 21 do not discharge the processing liquid toward the substrate W, for example, a position radially outside the substrate W. The nozzle movement drive unit 211 includes, for example, a motor.

[0100] When the discharge unit 20 discharges the processing liquid onto the main surface of the rotating substrate W, the processing liquid that lands on the main surface of the substrate W is affected by the centrifugal force accompanying the rotation of the substrate W and flows radially outward. The processing liquid then splashes outward from the periphery of the substrate W. As the processing liquid flows over the main surface of the substrate W, processing is performed on the substrate W according to the type of processing liquid.

[0101] The guard 30 has a cylindrical shape that surrounds the substrate holding portion 10 and catches the processing liquid splashed from the periphery of the substrate W. In the example shown in Figure 9, multiple guards 30 are arranged concentrically. Each guard 30 moves up and down between an upper position and a lower position by a guard lifting drive unit 31. The upper position is when the upper end of the guard 30 is above the substrate W held by the substrate holding portion 10. When the guard 30 is in the upper position, it catches the processing liquid splashed from the periphery of the substrate W. The lower position is when the upper end of the guard 30 is below the substrate W held by the substrate holding portion 10. Multiple guards 30 may be used depending on the type of processing liquid. The guard lifting drive unit 31 includes, for example, a motor.

[0102] A cup 32 is provided below each guard 30. The processing liquid received by each guard 30 flows down into the cup 32 and is collected in the cup 32. Each cup 32 is connected to the upstream end of its respective recovery piping. For example, the cup 32 for organic solvents is connected to the upstream end of the recovery piping 51. In the example in Figure 9, the cup 32 for organic solvents is the innermost cup 32, and the guard 30 for organic solvents is the innermost guard 30.

[0103] The control unit 9 controls various configurations of the processing unit 4 based on the recipe information to perform processing on the substrate W. The recipe information is information indicating the processing content for the substrate W, and includes, for example, the discharge time of the chemical solution, the discharge time of the pure water and the discharge time of the organic solvent, the position of the guard 30 at each timing, and the rotation speed of the substrate W at each timing. The recipe information is stored, for example, in the storage unit 94.

[0104] For example, first, the control unit 9 rotates the substrate W around the rotation axis Q1 using the substrate holding unit 10. The substrate holding unit 10 may continue rotating the substrate W until the processing of the substrate W is complete. Then, the discharge unit 20 discharges the chemical solution onto the substrate W. Specifically, the control unit 9 moves the nozzle 21c to the processing position using the nozzle movement drive unit 211, raises the chemical solution guard 30 to the upper position using the guard lifting drive unit 31, and opens the supply valve 23c. As a result, the nozzle 21c discharges the chemical solution toward the main surface of the rotating substrate W, and chemical treatment (e.g., etching) is performed on the main surface of the substrate W. Chemical solution scattered from the periphery of the substrate W during the chemical treatment is caught by the chemical solution guard 30. Then, the control unit 9 terminates the chemical treatment in response to the elapsed time of chemical solution discharge.

[0105] Next, the discharge unit 20 discharges pure water. Specifically, the control unit 9 moves the nozzle 21w to the processing position using the nozzle movement drive unit 211, raises the guard 30 for pure water to the upper position using the guard lifting drive unit 31, and opens the supply valve 23w. As a result, the nozzle 21w discharges pure water, and the chemical solution on the main surface of the substrate W is washed away by the pure water (rinsing process). Thus, the processing liquid on the main surface of the substrate W is replaced from the chemical solution to the rinsing liquid. Pure water that splashes from the periphery of the substrate W can be caught by the guard 30 for pure water. Then, the control unit 9 terminates the rinsing process in response to the elapsed time of pure water discharge.

[0106] Next, the discharge unit 20 discharges the organic solvent. Specifically, the control unit 9 moves the nozzle 21i to the processing position using the nozzle movement drive unit 211, raises the guard 30 for the organic solvent to the upper position using the guard lifting drive unit 31, and opens the supply valve 23i. As a result, the nozzle 21i discharges the organic solvent, and the pure water on the main surface of the substrate W is washed away by the organic solvent (organic solvent treatment). Thus, the processing liquid on the main surface of the substrate W is replaced from the chemical solution to the rinsing liquid. The pure water and organic solvent scattered from the periphery of the substrate are caught by the guard 30 for the organic solvent. The pure water and organic solvent are recovered into the recovery tank Tk1 through the cup 32 and the recovery piping 51. The control unit 9 terminates the organic solvent treatment in response to the elapsed time of organic solvent discharge.

[0107] Next, the processing unit 4 dries the substrate W. Specifically, the control unit 9 increases the rotation speed of the substrate holding unit 10 (so-called spin drying). During this drying period, the guard 30 for the organic solvent remains in the upper position and catches the organic solvent scattered from the periphery of the substrate W. Therefore, even during the drying period, the organic solvent is recovered into the recovery tank Tk1 via the recovery piping 51.

[0108] In the example described above, during the solvent phase when the nozzle 21i is discharging the organic solvent, initially the organic solvent washes away the pure water on the main surface of the substrate W, causing the pure water and organic solvent to splash from the periphery of the substrate W and be caught by the organic solvent guard 30. Once the organic solvent has washed away almost all of the pure water on the main surface of the substrate W, the guard 30 thereafter receives almost only the organic solvent. During this solvent phase, the pure water and organic solvent received by the guard 30 are discharged through the cup 32 to the recovery pipe 51 and recovered into the recovery tank Tk1 via the recovery pipe 51. Similarly, during the drying phase, the organic solvent received by the organic solvent guard 30 is discharged through the cup 32 to the recovery pipe 51 and recovered into the recovery tank Tk1 via the recovery pipe 51.

[0109] As described above, during the solvent treatment period and the drying period of the processing unit 4 processing the substrate W, the mixed liquid is discharged from the processing unit 4 into the recovery pipe 51, while during other periods, the mixed liquid is not discharged from the processing unit 4 into the recovery pipe 51.

[0110] In the example shown in Figure 9, multiple processing units 4 constituting a single tower TW are connected to a common recovery pipe 51. That is, the organic solvent cups 32 of processing unit 4a, processing unit 4b, and processing unit 4c are all connected to the common recovery pipe 51. In this structure, when pure water and organic solvent are discharged into the recovery pipe 51 from at least one of processing units 4a, 4b, and 4c, the pure water and organic solvent flow into the recovery tank Tk1 through the recovery pipe 51. On the other hand, when neither pure water nor organic solvent is discharged into the recovery pipe 51 from any of processing units 4a, 4b, and 4c, neither pure water nor organic solvent flows into the recovery tank Tk1.

[0111] Therefore, in the fourth embodiment, the control unit 9 opens the exhaust valve 552 during at least a portion of the inflow period in which at least one of the pure water and organic solvent from the substrate processing apparatus 1 flows into the recovery tank Tk1. The control unit 9 also closes the exhaust valve 552 during at least a portion of the non-inflow period in which neither the pure water nor the organic solvent flows into the recovery tank Tk1.

[0112] Figure 10 is a flowchart showing an example of the operation of the organic solvent regeneration apparatus 5 according to the fourth embodiment. Figure 11 is a timing chart showing an example of the operation of the substrate processing system 100 according to the fourth embodiment. Initially, the amount of mixed liquid stored in the recovery tank Tk1 is still less than the standard recovery amount, and the control unit 9 opens the recovery valve 52. In other words, the organic solvent regeneration apparatus 5 is performing a recovery operation in the recovery tank Tk1.

[0113] In the example shown in Figure 10, the organic solvent regeneration device 5 performs a preliminary temperature control operation (step S10) before the separation operation (step S15). More specifically, the control unit 9 closes the separation valve 721 and stops the pressure reducing pump 75, then opens the circulation valve 64 and activates the liquid supply unit 63 and the temperature controller 65. As a result, the mixed liquid circulates through the circulation path and is heated by the temperature controller 65 while the separation function of the membrane separator 62 is not substantially performed. This preliminary temperature control operation is performed in parallel with the recovery operation.

[0114] In the example shown in Figure 10, steps S11 to S14 are executed in parallel with the preliminary temperature control operation. In step S11, the control unit 9 determines whether at least one of the pure water and the organic solvent is being discharged into the recovery piping 51. That is, the control unit 9 determines whether at least one of the pure water and the organic solvent is flowing into the recovery tank Tk1. For example, the control unit 9 may determine that at least one of the pure water and the organic solvent is being discharged into the recovery piping 51 when the guard 30 for the organic solvent is in the upper position in any of the processing units 4. Alternatively, for example, the control unit 9 may determine that the substrate processing apparatus 1 is not discharging both the pure water and the organic solvent into the recovery piping 51 when the guard 30 for the organic solvent is in the lower position in all of the processing units 4.

[0115] When at least one of the pure water and the organic solvent is being discharged into the recovery piping 51, the control unit 9 opens the exhaust valve 552 (step 12). For example, as shown in Figure 11, when the guard 30 for the organic solvent is in the upper position in at least one of the processing units 4a, 4b, and 4c, i.e., during the inflow period T1, the control unit 9 opens the exhaust valve 552. This allows at least one of the pure water and the organic solvent discharged from at least one of the processing units 4a, 4b, and 4c to easily flow into the recovery tank Tk1 through the recovery piping 51, similar to the first embodiment. In the example in Figure 11, the control unit 9 keeps the exhaust valve 552 open for the entire inflow period T1, although it may keep the exhaust valve 552 open for only a portion of the inflow period T1. The period during which the exhaust valve 552 is open may be more than half of the inflow period T1, more than 80%, more than 90%, or the entirety of the inflow period T1.

[0116] On the other hand, if neither pure water nor organic solvent is discharged into the recovery pipe 51 in step S11, the control unit 9 closes the exhaust valve 552 (step 13). For example, as shown in Figure 11, when the guard 30 for the organic solvent is in the lower position in all of the processing units 4a, 4b, and 4c, that is, during the non-inflow period T2, the control unit 9 closes the exhaust valve 552. During the period when the exhaust valve 552 is closed, the vapor of the circulating organic solvent is not discharged to the outside through the first exhaust pipe 551. Therefore, the amount of organic solvent vapor discharged through the first exhaust pipe 551 can be reduced throughout the entire pre-temperature control operation. In the example in Figure 11, the control unit 9 closes the exhaust valve 552 for the entire non-inflow period T2, but it may also close the exhaust valve 552 for only a part of the non-inflow period T2. The period during which the exhaust valve 552 is closed may be more than half of the non-inflow period T2, more than 80%, more than 90%, or the entirety of the non-inflow period T2.

[0117] In step S12 or the next step S14 following step S13, the control unit 9 determines whether or not to start the separation operation. For example, the control unit 9 determines to start the separation operation when the amount of mixed liquid stored in the recovery tank Tk1 is equal to or greater than a predetermined standard recovery amount, and determines not to start the separation operation when the amount stored is still less than the standard recovery amount. If it determines not to start the separation operation, the control unit 9 executes step S11 again.

[0118] If it is determined in step S14 to start the separation operation, the control unit 9 starts the separation operation in step S15. For example, first the control unit 9 closes the recovery valve 52 and the exhaust valve 552. Then the control unit 9 opens the separation valve 721 and circulates the mixed liquid in the circulation unit 60 while operating the pressure reducing pump 75.

[0119] As described above, in the fourth embodiment, the organic solvent regeneration device 5 performs a preliminary temperature control operation in parallel with the recovery operation before the separation operation (step S10). Therefore, after the start of the separation operation, the temperature of the mixed liquid can reach the temperature range suitable for separation at an earlier time. Alternatively, the temperature of the mixed liquid can reach the temperature range at the start of the separation operation. Consequently, the organic solvent regeneration device 5 can raise the solvent concentration of the mixed liquid to above the target concentration at an earlier time.

[0120] Furthermore, during at least a portion of the inflow period T1 of the pre-temperature control operation period, the control unit 9 opens the exhaust valve 552. This makes it easier to allow at least one of the pure water and organic solvent from the substrate processing device 1 to flow into the recovery tank Tk1. Also, during at least a portion of the non-inflow period T2 of the pre-temperature control operation period, the control unit 9 closes the exhaust valve 552. This reduces the amount of organic solvent vapor discharged to the outside through the first exhaust pipe 551 during the pre-temperature control operation.

[0121] Furthermore, the organic solvent regeneration unit 5 does not need to perform pre-temperature control operation for the entire period during which the amount of mixed liquid stored in the recovery tank Tk1 is less than the standard recovery amount. For example, the organic solvent regeneration unit 5 may start pre-temperature control operation when the amount of mixed liquid stored in the recovery tank Tk1 exceeds a standard storage amount which is smaller than the standard recovery amount.

[0122] As described above, the organic solvent regeneration apparatus 5, the substrate processing system 100, and the organic solvent regeneration method have been described in detail. However, the above descriptions are illustrative in all respects, and this disclosure is not limited thereto. Furthermore, the various modifications described above can be applied in combination as long as they do not contradict each other. It is understood that numerous modifications not illustrated can be conceived without falling outside the scope of this disclosure.

[0123] This disclosure includes the following aspects:

[0124] The first embodiment is an organic solvent regeneration apparatus comprising: a recovery tank into which organic solvent and water discharged from a substrate processing apparatus for processing substrates flow through a recovery pipe and which stores a mixture of the organic solvent and the water; an exhaust pipe connected to the recovery tank; an exhaust valve provided in the exhaust pipe; a circulation pipe connected to the recovery tank; a circulation section provided in the circulation pipe and including a membrane separator for separating water from the mixture; a separation pipe connected to the membrane separator and through which the water separated by the membrane separator flows; and a control unit that opens the exhaust valve for at least a portion of the inflow period in which at least one of the water and the organic solvent flows into the recovery tank through the recovery pipe, and closes the exhaust valve for at least a portion of the separation operation period in which the mixture is circulated in the circulation section and water is separated from the mixture.

[0125] A second embodiment is an organic solvent regeneration apparatus according to the first embodiment, comprising a pressure sensor for measuring the pressure in the recovery tank, a first air supply pipe connected to the recovery tank and through which gas flows toward the recovery tank, and an air supply valve provided in the first air supply pipe, wherein the control unit opens the air supply valve when the pressure in the recovery tank is less than a first reference pressure value during the separation operation.

[0126] A third embodiment is an organic solvent regeneration apparatus according to the second embodiment, wherein the circulation unit further includes a temperature controller for heating the mixed liquid flowing through the circulation piping, the control unit causes the temperature controller to heat the mixed liquid during the separation operation, and the first reference pressure value is equal to or greater than standard atmospheric pressure.

[0127] A fourth embodiment is an organic solvent regeneration apparatus according to the second or third embodiment, comprising a second air supply pipe connected to the recovery tank through which air flows toward the recovery tank, and a relief valve provided in the second air supply pipe that opens when the pressure falls below a set pressure value lower than the first reference pressure value.

[0128] The fifth embodiment is an organic solvent regeneration apparatus according to any one of the first to fourth embodiments, wherein the membrane separator includes a first path interposed in the circulation piping, a second path connected to the separation piping, and a separation membrane separating the first path and the second path, a pressure reducing pump is provided to reduce the pressure in the second path through the separation piping, the circulation unit further includes a temperature controller for heating the mixed liquid flowing through the circulation piping, and the control unit starts the separation operation when the amount of the mixed liquid stored in the recovery tank is equal to or greater than a standard recovery amount, and the mixed liquid in the recovery tank During at least a portion of the recovery period in which the amount of stored is less than the standard recovery amount, the depressurizing pump is stopped and the temperature controller is operated while the mixed liquid is circulated in the circulation section in a preliminary temperature control operation. During the preliminary temperature control operation period in which the preliminary temperature control operation is performed, the exhaust valve is closed during at least a portion of the non-inflow period in which neither the water nor the organic solvent flows into the recovery tank, and the exhaust valve is opened during at least a portion of the inflow period in which at least one of the water and the organic solvent flows into the recovery tank.

[0129] The sixth embodiment is a substrate processing system comprising an organic solvent regeneration apparatus according to any one of the first to fifth embodiments and the substrate processing apparatus.

[0130] A seventh aspect is an organic solvent regeneration method, comprising: opening an exhaust valve provided in an exhaust pipe connected to a recovery tank during at least a portion of the inflow period in which at least one of an organic solvent and water discharged from a substrate processing apparatus for processing substrates flows into a recovery tank through a recovery pipe; and closing the exhaust valve during at least a portion of the separation operation period in which a separation operation is performed to circulate the mixture in a circulation section, which includes a membrane separator provided in the circulation pipe and which stores a mixture of the organic solvent and water in the recovery tank, and separates the mixture from the mixture.

[0131] According to the first, sixth, and seventh embodiments, the exhaust valve is open for at least a portion of the inflow period. When the exhaust valve is open, the gas in the recovery tank is discharged through the exhaust pipe as the mixed liquid flows into the recovery tank. Therefore, the mixed liquid flows easily into the recovery tank. On the other hand, the exhaust valve is closed for at least a portion of the separation operation period. This reduces the amount of circulating organic solvent vapor discharged to the outside through the discharge pipe. Therefore, the amount of organic solvent waste can be reduced.

[0132] According to the second embodiment, during the separation operation, water in the mixed liquid flows from the circulation path into the separation piping, so the pressure in the recovery tank decreases in proportion to the amount of water flowing into the separation piping. However, the control unit opens the air supply valve when the pressure in the recovery tank is below the first reference pressure value. This prevents further pressure drops in the recovery tank.

[0133] According to the third embodiment, the boiling point of the circulating mixture can be raised, so that the temperature of the mixture can be increased while avoiding boiling of the mixture during separation operation. Therefore, the amount of vapor in the circulating mixture can be increased. Consequently, the membrane separator can separate the separation fluid (water vapor) from the mixture more efficiently.

[0134] According to the fourth embodiment, it is possible to more reliably avoid a decrease in the pressure inside the pressure tank in a region lower than the set pressure value.

[0135] According to the fifth embodiment, the exhaust valve is closed for at least a portion of the non-inflow period. This reduces the amount of organic solvent vapor discharged to the outside through the exhaust piping during pre-temperature control operation. On the other hand, the exhaust valve is opened for at least a portion of the inflow period. This facilitates the flow of the mixed liquid into the recovery tank. [Explanation of Symbols]

[0136] 1. Substrate processing device 100 substrate processing systems 5. Organic solvent regeneration device 51 Recovery piping 551 Exhaust piping 552 Exhaust valve 571 First air supply piping 572 Air supply valve 573 Second air supply piping 574 Relief valve 60 Circulation section 61 Circulation piping 62 Membrane separator 62a Route 1 62b Second Route 62c separation membrane 65 Temperature controller 71 Separate piping 75 Pressure Reducing Piping 9. Control Unit Sn3 pressure sensor T1 Inflow Period T2 Non-inflow period Tk1 Recovery Tank W board

Claims

1. Organic solvent and water discharged from a substrate processing apparatus for processing substrates flow in through a recovery pipe, and a recovery tank stores a mixture of the organic solvent and the water. The exhaust piping connected to the recovery tank, An exhaust valve provided in the exhaust piping, A circulation pipe connected to the recovery tank, and a circulation section provided in the circulation pipe, including a membrane separator for separating water from the mixed liquid, A separation pipe connected to the membrane separator, through which the water separated by the membrane separator flows, During at least a portion of the inflow period in which at least one of the water and the organic solvent flows into the recovery tank through the recovery piping, the exhaust valve is opened, and during at least a portion of the separation operation period in which the mixture is circulated in the circulation section to separate the water from the mixture, the control unit closes the exhaust valve. An organic solvent regeneration device equipped with the following features.

2. The organic solvent regeneration apparatus according to claim 1, A pressure sensor for measuring the pressure inside the recovery tank, A first air supply pipe connected to the recovery tank, through which gas flows toward the recovery tank, An air supply valve provided in the first air supply piping and Equipped with, The control unit opens the air supply valve when the pressure in the recovery tank is below a first reference pressure value during the separation operation, in an organic solvent regeneration device.

3. The organic solvent regeneration apparatus according to claim 2, The circulation unit further includes a temperature controller for heating the mixed liquid flowing through the circulation piping, The control unit causes the temperature controller to heat the mixed liquid during the separation operation. An organic solvent regeneration apparatus in which the aforementioned first reference pressure value is equal to or greater than standard atmospheric pressure.

4. An organic solvent regeneration apparatus according to claim 2 or claim 3, A second air supply pipe connected to the recovery tank, through which air flows toward the recovery tank, A relief valve is provided in the second air supply piping and opens when the pressure falls below a set pressure value lower than the first reference pressure value. An organic solvent regeneration device equipped with the following features.

5. An organic solvent regeneration apparatus according to any one of claims 1 to 3, The membrane separator includes a first path inserted into the circulation piping, a second path connected to the separation piping, and a separation membrane that separates the first path and the second path. A pressure reducing pump is provided through the separation piping to reduce the pressure in the second path. The circulation unit further includes a temperature controller for heating the mixed liquid flowing through the circulation piping, The control unit, The separation operation is started when the amount of the mixed liquid stored in the recovery tank is equal to or greater than the standard recovery amount. During at least a portion of the recovery period in which the amount of the mixed liquid stored in the recovery tank is less than the standard recovery amount, a preliminary temperature control operation is performed in which the pressure reducing pump is stopped and the temperature controller is operated while the mixed liquid is circulated in the circulation section. An organic solvent regeneration device, wherein, during the pre-temperature control operation period in which the pre-temperature control operation is performed, the exhaust valve is closed during at least a portion of the non-inflow period in which neither the water nor the organic solvent flows into the recovery tank, and the exhaust valve is opened during at least a portion of the inflow period in which at least one of the water or the organic solvent flows into the recovery tank.

6. An organic solvent regeneration apparatus according to any one of claims 1 to 3, The substrate processing apparatus and A substrate processing system comprising:

7. A method for regenerating organic solvents, During at least a portion of the inflow period in which at least one of the organic solvent and water discharged from the substrate processing apparatus for processing the substrate flows into the recovery tank through the recovery piping, the exhaust valve provided in the exhaust piping connected to the recovery tank is opened. During at least a portion of the separation operation period in which the mixture is circulated in a circulation section that includes a membrane separator provided in the circulation section and stores a mixture of the organic solvent and water in the recovery tank, the exhaust valve is closed, A method for regenerating organic solvents, comprising the following features.

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