Inspection equipment

Abstract

The present invention provides an inspection device that can more accurately detect the temperature of an object being inspected, in a detection device that can transmit data related to the detection results to a computer. [Solution] The inspection device comprises a heat transfer plate that makes surface contact with the object to be inspected with its first main surface, a magnet unit that attracts the object to be inspected from the second main surface side of the heat transfer plate by magnetic force, a temperature detection sensor that makes line or surface contact with the second main surface of the heat transfer plate to detect the temperature of the heat transfer plate, and a communication unit that can transmit data related to the temperature of the heat transfer plate to a computer by wire or wireless connection.

Description

[Technical Field]

[0001] The present invention relates to an inspection device, and particularly relates to an inspection device that collects information related to the temperature of an object to be inspected. [Background Art]

[0002] Conventionally, various sensors have been used as inspection devices for inspecting the state of products and production equipment at product production sites. Some of these sensors are used by being attached to a predetermined portion of an object to be inspected by the adsorption action of a magnet. As such a sensor, for example, an integrated vibration and temperature sensor that detects the vibration and temperature of an object to be inspected, disclosed in Patent Document 1, is known.

[0003] In the sensor of Patent Document 1, a frame-shaped magnet is arranged on the side of the case that comes into contact with the surface to be measured, and a temperature sensor is arranged at the center of the frame-shaped magnet. This sensor is brought close to the object to be measured (object to be inspected), and adsorbs the object to be measured with the frame-shaped magnet, so that it is attached to the object to be measured. Then, an operator detects vibration and temperature while the sensor is attached to the object to be measured. [Prior Art Documents] [Patent Documents]

[0004] [Patent Document 1] Japanese Patent Laid-Open No. 10-227700 [Summary of the Invention] [Problem to be Solved by the Invention]

[0005] However, the above-described conventional sensors have room for improvement from the viewpoint of more accurately detecting the temperature of the object to be inspected. Furthermore, the above-described conventional sensors also have room for improvement from the viewpoint of detecting the temperature of the object to be inspected in a shorter time.

[0006] Therefore, the object of the present invention is to provide an inspection device that can more accurately detect the temperature of an object being inspected, in a detection device that can transmit data related to the detection results to a computer. [Means for solving the problem]

[0007] One aspect of the present invention for solving the above-mentioned problems is an inspection device comprising: a heat transfer plate that makes surface contact with an object to be inspected with its first main surface; a magnet unit that attracts the object to be inspected from the second main surface side of the heat transfer plate by magnetic force; a temperature detection sensor that makes line or surface contact with the second main surface of the heat transfer plate and detects the temperature of the heat transfer plate; and a communication unit that can transmit data regarding the temperature of the heat transfer plate to a computer by wire or wireless means.

[0008] This type of inspection device places the heat transfer plate on the side of the object being inspected relative to the magnetic field, making it possible to arrange a heat transfer plate with a large planar spread (a wide first main surface). As a result, the heat transfer plate can be brought into contact with a wide area of ​​the object being inspected. By detecting the temperature of such a heat transfer plate, it becomes possible to detect the temperature of the object being inspected more accurately.

[0009] Preferably, the communication unit is capable of wirelessly transmitting data relating to the temperature of the heat transfer plate to a computer.

[0010] In this context, when workers carry inspection equipment to inspect various pieces of equipment in production sites, wiring does not get in the way, and it is not always necessary to carry a computer, making the work easier.

[0011] Preferably, the magnet portion is cylindrical and has an internal space, and the temperature sensing sensor is mostly housed in the internal space.

[0012] This configuration is desirable for making the entire inspection device more compact.

[0013] Preferably, the system includes a vibration detection unit for detecting vibrations of the object to be inspected, and the vibration detection unit is provided so as to face the second main surface of the heat transfer plate via the magnet unit.

[0014] In this manner, it is possible to detect vibrations in addition to the temperature of the object being inspected, while making the entire inspection device compact without unnecessarily increasing its size.

[0015] Preferably, the communication unit is capable of transmitting data related to vibrations detected by the vibration detection unit to a computer via wired or wireless means.

[0016] Under these circumstances, managing data related to the vibration of the object being inspected becomes easier.

[0017] Preferably, the vibration detection unit has a vibration sensor within the housing, and the communication unit is provided within the housing.

[0018] This configuration is preferable for making the entire inspection device more compact.

[0019] Preferably, the vibration sensor is a capacitive vibration sensor.

[0020] This configuration allows for accurate detection of vibrations from an object being inspected, even at a distance from the object itself.

[0021] The aspects described above can be dependent on each other, refer to some of their components, or substitute for some of their components, as long as they fall within the technical scope of the present invention. [Effects of the Invention]

[0022] According to the present invention, a detection device capable of transmitting data related to the detection results to a computer can be provided, and an inspection device capable of more accurately detecting the temperature of an object to be inspected can be provided. [Brief explanation of the drawing]

[0023] [Figure 1] It is a perspective view schematically showing an inspection apparatus according to an embodiment of the present invention. [Figure 2] It is a view schematically showing the apparatus main body of Figure 1, wherein (a) is a side view, (b) is a rear view, and (c) is a front view. [Figure 3] It is a cross-sectional view schematically showing the apparatus main body of Figure 2. [Figure 4] It is a cross-sectional view schematically showing the lid of Figure 1. [Figure 5] It is a perspective view schematically showing an inspection apparatus according to an embodiment different from that of Figure 1. DETAILED DESCRIPTION OF THE INVENTION

[0024] Hereinafter, embodiments of the present invention will be described in detail.

[0025] The inspection apparatus 1 of the first embodiment is a portable inspection apparatus (measuring instrument) that is carried and used by an operator. As shown in Figure 1, the inspection apparatus 1 comprises an apparatus main body 2 and a lid 3 detachably formed on a front side of the apparatus main body 2.

[0026] As shown in Figure 2 and Figure 3, the apparatus main body 2 comprises a housing 10 and a heat transfer plate 11, and is formed by attaching the heat transfer plate 11 to a part of the housing 10. As shown in Figure 3, the apparatus main body 2 is formed by accommodating an operation button 20, a first substrate member 21, a battery holder 22, a second substrate member 23, a vibration sensor 24 (vibration detecting unit), a temperature sensor 25 (temperature detecting sensor), a magnet 26 (magnet unit) and a heat insulating plate 27 in the housing 10. In the following description, unless otherwise specified, the relationship of "front and rear" is described with the heat transfer plate 11 side as the front side, and the opposite side of the operation button forming portion 10c (which will be described in detail later) as the rear side.

[0027] As shown in Figure 1 and Figure 2, the housing 10 comprises a first housing forming piece 10a, a second housing forming piece 10b, and an operation button forming portion 10c.

[0028] The first housing-forming piece 10a, as shown in Figure 3, is a metal member with a substantially cylindrical outer shape, and is a member that forms the front (lower in Figure 3) portion of the housing 10, which is the side facing the object to be inspected during inspection. In detail, the first housing-forming piece 10a is a metal member that is not magnetic, and in this embodiment, it is a member mainly made of aluminum. The first housing-forming piece 10a has a flange portion 30 and a first engaging portion 31 (details to be described later) on its outer rear portion, and these are arranged in this order from the front. The flange portion 30 is a projection that protrudes outward and is continuous in an annular shape.

[0029] The first housing-forming piece 10a has a front space 35, a partition wall 36, and a rear space 37 inside. The front space 35 is a space capable of accommodating a magnet 26, etc., and has an opening at the front and a recessed area at the rear. The partition wall portion 36 is a flat plate-shaped portion having thickness in the front-rear direction, located at the boundary between the front space portion 35 and the rear space portion 37, and is a wall portion that separates them. One main surface of the partition wall portion 36, the front surface, forms the bottom portion of the front space portion 35, and the other main surface, the rear surface, forms the bottom portion of the rear space portion 37. In this embodiment, the partition wall portion 36 has a sensor insertion hole 36a that penetrates the partition wall portion 36 in the thickness direction. The rear space 37 is a recessed area that has an opening at the rear and is recessed at the front.

[0030] The second housing-forming piece 10b is a cylindrical member made of resin, and in this embodiment, it is a member mainly made of AES resin. This second housing-forming piece 10b is a cylindrical member that is longer in the front-rear direction than the first housing-forming piece 10a, and has a second engaging portion 40 on its front inner circumferential surface.

[0031] In this embodiment, both the first engaging portion 31 and the second engaging portion 40 are helically extending threaded portions. When the first engaging portion 31 and the second engaging portion 40 engage, the first housing forming piece 10a and the second housing forming piece 10b are connected in a separable state. The first engaging portion 31 and the second engaging portion 40 are not limited to this configuration; for example, one may be a rounded projection and the other a recess capable of accommodating at least a portion of such projection. The first engaging portion 31 and the second engaging portion 40 should be connected in a separable manner when they engage with each other, thereby connecting the first housing forming piece 10a and the second housing forming piece 10b.

[0032] The operation button forming portion 10c is an elastically deformable portion (elastic portion) made of an elastic material such as rubber. In other words, the operation button forming portion 10c is elastically deformed when a part of it is pressed forward by the user, and returns to its original shape when the pressure is released. In this embodiment, the operation button forming portion 10c is formed integrally (inseparably) with the rear portion of the second housing forming piece 10b, and is a substantially hemispherical portion that covers the rear portion of the second housing forming piece 10b. Furthermore, as shown in Figures 2(b) and 3, the operation button forming portion 10c of this embodiment has a rear projection 43 at its rear end. The rear projection 43 is a projection that protrudes to the rear and is continuous in an annular (ring-shaped) manner.

[0033] The internal space of this housing portion 10 is a space formed by the integration of the internal space of the first housing forming piece 10a (front space portion 35, sensor insertion hole 36a, rear space portion 37), the internal space of the second housing forming piece 10b, and the space inside the operation button forming portion 10c.

[0034] The heat transfer plate 11 is a metal plate-shaped member, and in this embodiment, it is a copper disc-shaped member with thickness in the front-to-back direction. That is, the heat transfer plate 11 is a non-magnetic material (more specifically, a member formed from a metal that is completely non-magnetic), and is a member made from a metal that has higher thermal conductivity than metals such as aluminum (first housing forming piece 10a). The heat transfer plate 11 has a first main surface 11a that is exposed to the outside and a second main surface 11b located on the opposite side.

[0035] In this embodiment, the heat transfer plate 11 is attached to the housing portion 10 by appropriate means such as press-fitting to the front end portion of the first housing forming piece 10a. In this embodiment, the heat transfer plate 11 is fixed to the housing portion 10 with the first main surface 11a and a part of the side surface (a part of the end surface located between the two main surfaces, and a part of the outer circumferential surface) exposed to the outside.

[0036] The operation button 20 is a push-button switch provided on the first substrate member 21, and pressing it starts the inspection device 1 to inspect the object to be inspected. In this embodiment, the operation button 20 is positioned adjacent to the inside of the operation button forming section 10c. Therefore, when the user presses the operation button forming section 10c forward, the operation button forming section 10c elastically deforms, and the operation button 20 is pressed by the operation button forming section 10c.

[0037] The first substrate member 21 is a control board and has a microcomputer that enables various calculations, information storage, and transmission and reception of signals with external devices. In other words, the inspection device 1 of this embodiment has a calculation unit that performs various calculations, a storage unit that stores various information, and a communication unit that transmits and receives information with external devices.

[0038] In detail, the first circuit board member 21 is provided with a power switch 48, a wireless communication module 49 (communication unit), and a pairing button 50 (communication unit) as elements. In this embodiment, a BLE module is used for the wireless communication module 49. The pairing button 50 is an element for pairing to perform wireless communication with an external device. That is, the first circuit board member 21 can transmit information (data) to the wireless communication module 49 and / or transmit information from the wireless communication module 49 when the pairing button 50 is activated.

[0039] In other words, the inspection device 1 of this embodiment has a communication unit comprising a wireless communication module 49 and a pairing button 50. The communication unit is capable of sending and receiving information with external devices (external tablets, desktop PCs, and other computers) via Bluetooth® communication. Furthermore, the communication unit only needs to be able to communicate wirelessly (short-range wireless communication) with external devices, and is not limited to Bluetooth® communication; it may also be able to communicate wirelessly using other communication methods (communication technologies). For example, the wireless communication module 49 described above may be a Wi-Fi module, and the communication unit may be able to communicate wirelessly with external devices using the Wi-Fi standard. In addition, the communication unit may be able to communicate wirelessly with external devices using multiple communication methods, and when communicating wirelessly with one external device, it may select one of the multiple communication methods to communicate wirelessly.

[0040] The battery holder 22 comprises a holder body 22a and a battery cover 22b. The holder body 22a has a recess (fitting portion) that holds the battery D1 in place (detailed illustration is omitted). In other words, the battery holder 22 is in a state where the battery D1 is fitted into the recess of the holder body 22a and the battery cover 22b is attached to the holder body 22a. At this time, the battery cover 22b covers a portion of the battery D1 in the longitudinal direction (the portion between both terminals) from the outside, and functions as a retaining means to prevent (suppress) the battery D1 from unintentionally falling out of the holder body 22a.

[0041] The battery D1, positioned in place by the battery holder 22, functions as the power supply for the inspection device 1, supplying power to various internal components (internal parts) of the inspection device 1, such as the first circuit board member 21 and the second circuit board member 23.

[0042] The second substrate member 23 has a microcomputer and can transmit information to the first substrate member 21 via wiring members (not shown) or wireless communication means.

[0043] The vibration sensor 24 is a sensor attached to the second substrate member 23 and is capable of detecting information regarding the vibration of the object being inspected. In detail, the vibration sensor 24 is a 3-axis (X-axis, Y-axis, Z-axis) acceleration sensor that detects information regarding vibration in each of the three axes and is a capacitive sensor that can output the amount of vibration of the object being inspected as an electrical signal proportional to the acceleration of the vibration.

[0044] In this embodiment, the vibration sensor 24 is positioned at a location behind the magnet 26. Specifically, the vibration sensor 24 is located behind the second main surface 11b of the heat transfer plate 11, and is positioned opposite the second main surface 11b with multiple components such as the heat insulating plate 27, the magnet 26, and the partition wall 36 in between.

[0045] The temperature sensor 25 is a sensor capable of detecting information regarding the temperature of the heat transfer plate 11, and in this embodiment, a thermocouple is used. This temperature sensor 25 is a contact-type sensor that detects (measures) the temperature by directly contacting a part of it (the heat-sensing part) with the object. Furthermore, this temperature sensor 25 is a sensor capable of outputting information regarding the detected temperature as an electrical signal.

[0046] The magnet 26 is a permanent magnet, and in this embodiment, a neodymium magnet is used. In other words, the magnet 26 has a stronger magnetic force per unit volume and a stronger attractive force compared to general-purpose magnets such as ferrite magnets.

[0047] The magnet 26 of this embodiment has a short cylindrical shape and has a member placement hole 26a (internal space) in the center portion that penetrates the magnet 26 in the thickness direction. That is, this member placement hole 26a has openings on the front and rear surfaces and is a hole that extends between them. More specifically, this magnet 26 is a short cylindrical member in which the length in the radial direction (left-right direction in Figure 3) is longer than the length in the longitudinal direction (front-back direction, up-down direction in Figure 3).

[0048] The heat insulating plate 27 is a component formed from a material with low thermal conductivity, such as resin, and has lower thermal conductivity than the heat transfer plate 11. It is also a non-magnetic plate-shaped component. In detail, the insulation plate 27 is a disc-shaped member having thickness in the front-to-back direction, and a member insertion hole 27a is provided in its central portion. The member insertion hole 27a has openings on the front main surface and the rear main surface of the insulation plate 27, and is a through hole that penetrates the insulation plate 27 in the thickness direction. In detail, the member insertion hole 27a penetrates the central portion of the insulation plate 27.

[0049] As shown in Figure 3, the inspection device 1 of this embodiment has a heat transfer plate 11, an insulating plate 27, and a magnet 26 arranged in that order from the front side (downward side in Figure 3). The second main surface 11b of the heat transfer plate 11 is in surface contact with one main surface of the insulating plate 27. The other main surface of the insulating plate 27 is in surface contact with the front surface of the magnet 26. The insulating plate 27 is interposed between the heat transfer plate 11 and the magnet 26, suppressing the transfer of heat from the heat transfer plate 11 to the magnet 26 and functioning as a spacer member to separate them. The insulating plate 27 and the magnet 26 are housed in the front space 35 of the first housing forming piece 10a.

[0050] Furthermore, in the inspection device 1 of this embodiment, the member insertion hole 27a, the member placement hole 26a, and the sensor insertion hole 36a are arranged in a front-to-back direction, forming a series of communication holes. The temperature sensor 25 is placed within this communication hole, and more specifically, the majority (more than half) of the temperature sensor 25 is placed within the member placement hole 26a. In addition, a portion (heat-sensing part) of the temperature sensor 25 is in direct contact with the part of the heat transfer plate 11 to be inspected (in this embodiment, the part near the center when viewed from the rear).

[0051] As shown in Figure 1, the lid 3 is a component that is attached to the front side of the main body 2 of the inspection device 1 when the device is not in use. The lid 3 is generally a cylindrical component with a bottom, and in detail, as shown in Figure 4, it has a main body housing section 55, a lid-side partition wall section 56, and a component arrangement section 57, which are arranged in this order from the main body 2 side (upper side in Figure 4) when attached. That is, the main body housing section 55 and the component arrangement section 57 are located on both sides of the flat plate-shaped lid-side partition wall section 56.

[0052] The main body housing section 55 has an opening on the device body section 2 side and is a recessed area that is recessed in the direction away from the device body section 2 (downward in Figure 4). This main body housing section 55 is the part in which the front portion of the device body section 2 (the portion in front of the flange section 30, see Figure 1) is housed when not in use.

[0053] The component arrangement section 57 is formed by placing the suction suppression member 59 in a recess formed on the opposite side of the main body housing section 55 in the longitudinal direction (front-to-back direction when installed) and embedding it in resin. In other words, the component arrangement section 57 is formed by housing the suction suppression member 59 and the resin mass 60 in a recess that is recessed toward the main body housing section 55. The adsorption suppression member 59 is a generally disc-shaped member formed from a magnetic material, and in this embodiment, it is a disc-shaped member made of iron. The resin mass 60 is a solidified mass of resin.

[0054] In this embodiment, the lid 3 is configured in such a way that when attached to the main body 2 of the device, the magnet 26 (see Figure 3) attracts the attraction suppression member 59. This prevents the problem of the magnet 26 mistakenly attracting external magnetic materials when the inspection device 1 is not in use.

[0055] Next, the procedure for inspecting an object to be inspected using the inspection device 1 of this embodiment will be described.

[0056] First, the user turns on the power switch 48 (see Figure 3) of the inspection device 1. In this embodiment, the inspection device 1 has the power switch 48 located inside the housing 10, which prevents the power switch 48 from being unintentionally turned off during use or transport. At this time, the operator may also operate the pairing button 50 or the like as needed to enable the transmission and reception of signals with an external device (external computer).

[0057] Next, the user brings the heat transfer plate 11 into surface contact with a predetermined part of the machine to be inspected, such as a piece of equipment at the production site (detailed illustration is omitted). As shown in Figure 3, the inspection device 1 of this embodiment has a structure in which the entire heat transfer plate 11 is positioned on the side of the object to be inspected (lower side in Figure 3) than the magnet 26. Therefore, regardless of the size and shape of the magnet 26, a heat transfer plate 11 with a large main surface area (first main surface 11a) can be used. As a result, the inspection device 1 of this embodiment can bring the heat transfer plate 11 into surface contact with a wide area of ​​the object to be inspected.

[0058] In this way, by bringing the heat transfer plate 11 into surface contact with the object to be inspected, the magnet 26 attracts the object to be inspected, and the inspection device 1 is attached to the object to be inspected. As described above, the inspection device 1 of this embodiment uses a magnet 26 with strong magnetic force and strong attracting force, so the magnet 26 can attract the object to be inspected even when the heat insulating plate 27 and the heat transfer plate 11 are in between.

[0059] Next, the user presses the operation button forming section 10c toward the heat transfer plate 11 side (the side of the object to be inspected). This presses the operation button 20, and the inspection device 1 starts the inspection operation (detection operation and measurement operation). Note that pressing the operation button forming section 10c may be done at the same time as attaching the inspection device 1 to the object to be inspected, or before attaching the inspection device 1 to the object to be inspected. The inspection device 1 then transmits the vibration information and temperature information of the object being inspected, acquired through the inspection operation, to an external device (an external computer such as a tablet or desktop PC). With this, the inspection of the object being inspected is completed.

[0060] The inspection device 1 of the above-described embodiment may display information indicating the mounting direction of the inspection device 1 to the object to be inspected on the side surface of the housing portion 10 (first housing forming piece portion 10a, second housing forming piece portion 10b). For example, when the inspection device 1 is in the position shown in Figure 2(a), an arrow pointing downward may be written on the side surface of the flange portion 30 as information indicating the mounting direction. This information may be displayed by attaching a label or the like with the information written on it, or by engraving it on the target part (for example, the side surface of the flange portion 30).

[0061] Although the vibration sensor 24 in the above-described embodiment is a capacitive type sensor, the vibration sensor 24 may be non-contact or contact type. In other words, the vibration sensor 24 may be of any type other than capacitive, such as overcurrent type, optical type, frequency change type, piezoelectric type, electrodynamic type, or servo type. The vibration sensor 24 only needs to be able to detect (acquire) information regarding the vibration of the object being inspected. Furthermore, if the vibration sensor 24 is a contact type, the placement position of the vibration sensor 24 may be changed as appropriate.

[0062] Although the inspection device 1 in the above-described embodiment is capable of transmitting and receiving information with external devices via wireless communication, the present invention is not limited to this, and for example, as shown in the inspection device 101 in Figure 5, it may also be possible to transmit and receive information with external devices via wired communication.

[0063] The inspection device 101 of the second embodiment has a communication cable 149, as shown in Figure 5. The communication cable 149 extends from inside the housing 110 of the inspection device 101 to the outside and has a connector at its tip in the direction of extension. The communication cable 149 of this embodiment has a USB (Universal Serial Bus) connector at its tip, and by connecting the USB connector to an external computer, it becomes possible to send and receive information between the inspection device 101 and the external computer. In other words, the inspection device 101 is capable of wired communication (communication via direct wired connection) with an external computer in accordance with the USB standard.

[0064] In this embodiment, the inspection device 1 has a plate-shaped portion that is part of the housing portion 110, which functions as a heat transfer plate portion 111 (heat transfer plate). This heat transfer plate portion 111 is a plate-shaped portion that has an annular (ring-shaped) form when viewed from the front. That is, the heat transfer plate in the present invention is not limited to a plate-shaped member that is formed separately from the housing portion 10 and attached to the housing portion 10, but may also be a plate-shaped portion that forms part of the housing portion 110. In this case, the temperature sensor 25 may be in contact with an appropriate portion on the inner main surface of the heat transfer plate portion 111. That is, the temperature sensor 25 does not necessarily have to be in contact with a portion near the center when viewed from the back (plan view with the thickness direction as the line of sight) of the heat transfer plate portion 111.

[0065] Furthermore, the inspection device 101 may have an opening on the front surface (outer main surface) of the heat transfer plate portion 111 and a recessed hole 113 that is recessed toward the rear. In other words, the inspection device 101 may have a hole 113 with an opening in the part that comes into contact with the object to be inspected during the detection operation. The hole 113 may be a fastening element placement hole in which at least a part of a fastening element (for example, the head of a screw) for fixing an internal member to the housing 110 is placed, or it may be a member placement hole in which a member such as a temperature sensor is placed. In this embodiment, the inspection device 101 also has a magnet (not shown) located behind the entire heat transfer plate section 111.

[0066] In the embodiments described above, the components can be freely substituted or added between each embodiment, as long as they fall within the technical scope of the present invention. [Explanation of symbols]

[0067] 1,101 Inspection device 10,110 Enclosure 11 Heat transfer plate 11a 1st main surface 11b 2nd principal surface 23. Vibration sensor (vibration detection unit) 24 Temperature Sensor (Temperature Detection Sensor) 26 Magnet (magnetic part) 26a Member placement hole (internal space) 49 Wireless communication module (communication unit) 50. Pairing button (communication unit) 111 Heat transfer plate section (heat transfer plate)

Claims

1. A heat transfer plate that makes surface contact with the object to be inspected, A magnetic unit that attracts the object to be inspected from the second main surface side of the heat transfer plate by magnetic force, A temperature sensing sensor that makes line or surface contact with the second main surface of the heat transfer plate and detects the temperature of the heat transfer plate, An inspection device comprising a communication unit capable of transmitting data relating to the temperature of the heat transfer plate to a computer via wired or wireless means.

2. The inspection apparatus according to claim 1, wherein the communication unit is capable of transmitting data relating to the temperature of the heat transfer plate to a computer wirelessly.

3. The aforementioned magnet part is cylindrical and has an internal space, The inspection apparatus according to claim 1 or 2, wherein the temperature sensing sensor is largely housed in the internal space.

4. The system includes a vibration detection unit that detects vibrations of the object to be inspected, The inspection apparatus according to claim 1, wherein the vibration detection unit is provided so as to face the second main surface of the heat transfer plate via the magnet unit.

5. The inspection apparatus according to claim 4, wherein the communication unit is capable of transmitting data relating to vibrations detected by the vibration detection unit to a computer via wired or wireless means.

6. The vibration detection unit has a vibration sensor inside the housing. The inspection apparatus according to claim 4 or 5, wherein the communication unit is provided within the housing.

7. The inspection apparatus according to claim 6, wherein the vibration sensor is a capacitive vibration sensor.

Images