Method and system for co-deposited diamond-like carbon coatings

Abstract

This invention provides a method for producing a co-deposited diamond-like carbon coating and a protective coating. [Solution] The protective coating comprises a bottom layer substantially comprising a first material and an top layer substantially comprising diamond-like carbon. Between the bottom layer and the top layer, there is a mixed layer comprising the first material and diamond-like carbon in various concentrations.

Description

Technical Field

[0001]

[0001] The present disclosure generally relates to methods and systems for co-deposited diamond-like carbon coatings.

Background Art

[0002]

[0002] Aspects of the present disclosure relate to methods and systems for co-deposited diamond-like carbon coatings. Various problems may exist in conventional solutions for diamond-like carbon coatings. In this regard, conventional systems and methods for diamond-like carbon coatings can be costly, cumbersome, and / or inefficient.

[0003]

[0003] The limitations and disadvantages of conventional systems and methods will become apparent to those skilled in the art upon comparison of such approaches with certain aspects of the present method and system described in the remainder of the present disclosure with reference to the drawings.

Summary of the Invention

[0004]

[0004] Methods and systems for co-deposited diamond-like carbon coatings are shown and / or described in connection with at least one of the drawings, and are more fully set forth in the claims.

[0005]

[0005] These and other advantages, aspects and novel features of the present disclosure, as well as details of illustrated embodiments thereof, will be more fully understood from the following description and drawings.

Brief Description of the Drawings

[0006]

[0006] Various features and advantages of the present disclosure can be more readily understood by reference to the following detailed description taken in conjunction with the accompanying drawings, in which like reference numerals indicate like structural elements. [Figure 1]

[0007] Figure 1 is an exemplary block diagram showing a protective coating according to an embodiment of the present patent disclosure. [Figure 2]

[0008] Figure 2 is a schematic cross-sectional view of a protective coating according to an embodiment of the present patent disclosure. [Figure 3]

[0009] Figure 3 is a flowchart showing an exemplary method for forming a protective coating according to an embodiment of the present patent disclosure. [Modes for carrying out the invention]

[0007]

[0011] The following discussion provides various examples of methods and systems for co-deposited diamond-like carbon coatings. Such examples are non-limiting, and the appended claims should not be limited to the specific examples disclosed. In the following discussion, the terms “example” and “for example” are not limiting.

[0008]

[0012] The figures illustrate general configurations, and descriptions and details of known features and techniques may be omitted to avoid unnecessarily obscuring this disclosure. In addition, elements in the drawings are not necessarily drawn to scale. For example, the dimensions of some elements in the figures may be exaggerated compared to others to aid in understanding the examples discussed in this disclosure. The same reference number in different figures indicates the same element.

[0009]

[0013] The term "or" means any one or more items in a list joined by "or". For example, "x or y" means any element from the set of three elements {(x), (y), (x,y)}. Another example is "x, y or z" which means any element from the set of seven elements {(x), (y), (z), (x,y), (x,z), (y,z), (x,y,z)}.

[0010]

[0014] The terms “equipped,” “equipped,” “equipped,” and / or “included” are “unrestricted” terms that specify the presence of the described feature but do not exclude the presence or addition of one or more other features.

[0011]

[0015] Terms such as “first,” “second,” etc., may be used herein to describe various elements, and these elements should not be limited by these terms. These terms are used solely to distinguish one element from another. Thus, for example, the first element discussed herein may be referred to as the second element without departing from the teachings of this disclosure.

[0012]

[0016] Unless otherwise specified, the term “combined” may be used to describe two elements that are in direct contact with each other, or two elements that are indirectly connected by one or more other elements. For example, when element A is combined with element B, element A may be in direct contact with element B, or it may be indirectly connected to element B by an intervening element C. Similarly, the terms “above” or “on top” may be used to describe two elements that are in direct contact with each other, or two elements that are indirectly connected by one or more other elements.

[0013]

[0017] This patent disclosure relates to applications of a material known as diamond-like carbon (DLC) coating. The name "diamond-like carbon" may be used to illustrate some of its properties and structural similarities to natural diamond in terms of high hardness, low friction, and wear resistance. DLC may also be referred to as "hard carbon." However, a key characteristic that distinguishes DLC from natural diamond may be the amorphous nature of DLC, resulting in a combination of sp2 (graphite-like) and sp3 (diamond-like) bonded carbon atoms.

[0014]

[0018] DLC coatings can take the form of amorphous carbon material that can exhibit some of the typical properties of diamond. Amorphous carbon material can exhibit a combination of properties such as high hardness, low coefficient of friction, high wear resistance, high corrosion resistance, and good electrical insulation. Due to the aforementioned properties, DLC coatings can be applied in a variety of applications.

[0015]

[0019] One application of DLC coatings is in the automotive industry, where they are used to coat engine components to reduce friction and wear. DLC's low-friction and high-wear-resistant properties make it a suitable candidate for applications in the biomedical industry, particularly in artificial joint implants, cardiovascular devices, and surgical instruments. DLC coatings may also be desirable for solar panels.

[0016]

[0020] DLC coatings can also be applied in the data storage industry. In addition, they may be used in the fields of electronics and optoelectronics as protective coatings for semiconductors, and in the optics industry as anti-glare / anti-reflective coatings to reduce glare on various materials.

[0017]

[0021] However, DLC coatings generally do not adhere easily to other materials. DLC does not adhere to glass, for example. This can lead to poor adhesion, delamination, and coating / film breakage. DLC coatings adhere to various carbides, carbon-metallic compounds such as silicon carbide, and metalloids such as silicon and germanium. Therefore, a tacking or adhesive layer may be required to bond a DLC coating to another coating. For example, a germanium layer can be used as an adhesive layer between a zinc selenide layer and a DLC coating. For example, the thickness of such an adhesive layer may be 2 to 10 nanometers. In general, the adhesive layer can be of any thickness desirable to support the optical, physical, or mechanical properties of the manufactured item. In some cases, an additional adhesive layer may not be necessary because the DLC coating may adhere to the layer to which it is deposited.

[0018]

[0022] Depending on the application, some properties of the adhesive layer may be undesirable. For example, germanium may be opaque to certain wavelengths in the visible light spectrum, which may be undesirable depending on the application.

[0019]

[0023] Certain chemicals used in industrial manufacturing processes can attack the adhesive layer, potentially causing the DLC coating to peel, delaminate, or break. Therefore, depending on the application, it may be advantageous to bond the DLC coating without using an adhesive layer.

[0020]

[0024] In the field of optics, DLC coatings are sometimes valued for their anti-reflective properties. Anti-reflective coatings can be essential in optical applications because they increase the transmission of light through lenses, reducing glare and unwanted reflections. When used appropriately, DLC coatings can also be used to improve reflectivity.

[0021]

[0025] Applying DLC ​​coatings to optical components such as lenses, prisms, windows, or semiconductors can reduce the amount of reflected light, potentially improving the optical performance of these components. The amorphous structure of DLC coatings can arise from a hybridization of sp2 and sp3 carbon bonds, which may contribute to anti-reflective properties by mitigating the phase shift of light waves passing through the optical component.

[0022]

[0026] Another advantage of DLC coatings in the optics industry is their high durability. Unlike conventional anti-reflective coatings, which are prone to scratches and damage, DLC coatings boast high hardness and abrasion resistance, significantly extending the lifespan of optical components. Furthermore, the high corrosion resistance of DLC coatings can prevent damage to optical components from environmental factors.

[0023]

[0027] As shown with reference to FIG. 1, FIG. 1 is a block diagram illustrating a protective coating 100 according to some embodiments of the present disclosure. The protective coating 100 may comprise a bottommost layer 110 and a topmost layer 120. The protective coating 100 may also comprise a mixed layer 130 between the bottommost layer 110 and the topmost layer 120.

[0024]

[0028] The bottommost layer 110 may substantially comprise only the first material 112. As will be apparent to those skilled in the art, the term "only" may refer to the bottommost layer 110 that substantially comprises the first material, however, as may be reasonably expected in industrial manufacturing processes, such as for example the semiconductor and / or optical industry, the bottommost layer 110 may comprise certain contaminants, defects, material residues and the like.

[0025]

[0029] The topmost layer 120 may comprise only diamond-like carbon 122. As will be apparent to those skilled in the art, the term "only" may refer to the topmost layer 120 that substantially comprises diamond-like carbon 122, however, as may be reasonably expected in industrial manufacturing processes such as the semiconductor and / or optical industry, the topmost layer 120 may comprise certain contaminants, defects, material residues and the like.

[0026]

[0030] The mixed layer 130 may comprise, in a mixed material 132, the first material 112 and diamond-like carbon 122. A ratio of an amount of the first material 112 to an amount of the diamond-like carbon 122 in the mixture 132 may decrease to zero within the mixed layer 130 as a separation distance from the bottommost layer 110 increases.

[0027]

[0031] In some embodiments, the first material 112 may be a metal or a dielectric. In some embodiments, the first material 112 may be any coating material other than diamond-like carbon. In some embodiments, the first material 112 may be ytterbium, fluoride, zinc sulfide, copper, silicon, germanium, diamond, glass, silicon carbide, or zinc selenide. In some embodiments, the diamond-like carbon 122 may comprise sp2-bonded carbon atoms and sp3-bonded carbon atoms. In some embodiments, this ratio may decrease monotonically. In some embodiments, this ratio may decrease from about 20 / 1, 10 / 1, or 5 / 1.

[0028]

[0032] Figure 2 shows an exemplary cross-section of the coating according to the present disclosure. It shows a bottom layer 110 comprising the first material 112 (indicated by a square) and an top layer 120 comprising diamond-like carbon 122 (indicated by a circle). Furthermore, it shows a mixed layer 130 comprising exemplary layers 130a, 130b, and 130c. The exemplary mixed layer 130 represents different ratios of the first material 112 to the diamond-like carbon 122. For example, 130a represents a ratio of 9 / 3 = 3:1 of the first material 112 to the diamond-like carbon 122, 130b represents a ratio of 6 / 6 = 1:1 of the first material 112 to the diamond-like carbon 122, and 130c represents a ratio of 3 / 9 = 1:3 of the first material 112 to the diamond-like carbon 122. Figure 2 shows how the concentration of the first material 112 decreases and the concentration of diamond-like carbon 122 increases in the mixed layer 130 as the distance from the bottom layer 110 increases. Layers 130a, 130b, and 130c can be associated with a mixture 132 of the first material 112 and diamond-like carbon 122 that changes (depending on the distance from the bottom layer 110).

[0029]

[0033] As will be apparent to those skilled in the art, Figure 2 is an illustrative schematic diagram. In practice, the number of layers is not discrete, and the dimensions of the layers and the ratios shown are merely illustrative of the applicable concept.

[0030]

[0034] Therefore, in the mixed layer 130, the first material 112 and diamond-like carbon 122 are mixed in varying proportions, as in a diffusion process. By establishing such a structure, the top layer 120 and the bottom layer 110 can adhere to each other via the mixed layer 130. In this sense, the mixed layer 130 is not a discrete layer like the top layer 120 and the bottom layer 110, but rather the top layer 120 and the bottom layer 110 are mixed or intertwined with each other. For example, in such a case, there is no need to add a third material, such as germanium, as an adhesive layer between the top layer 120 and the bottom layer 130.

[0031]

[0035] Figure 3 is a flowchart illustrating a method according to several embodiments of the present disclosure. In some embodiments, in step 210, the method may comprise depositing a bottom layer 110 using a first material 112. For example, the deposit of the bottom layer 110 may occur at an initial rate of, for example, 10 angstroms / second. It will be obvious to those skilled in the art that the deposit rate is merely illustrative and not limiting. After the bottom layer 110 has reached a desired thickness, in step 230, co-deposit of diamond-like carbon 122 may be initiated, i.e., diamond-like carbon 122 may be deposited simultaneously with the first material 112 to initiate the formation of a mixed layer 130 containing a mixture 132. For example, diamond-like carbon 122 may be deposited at 2 angstroms / second. As will be obvious to those skilled in the art, the deposit rate is merely illustrative and not limiting.

[0032]

[0036] In 240, in order to reduce the amount of the first material 112 as co-deposition occurs, the deposition rate of the first material 112 may be decreased over time while keeping the deposition rate of diamond-like carbon 122 constant. Correspondingly, the ratio of deposited first material 112 to deposited diamond-like carbon 122 continues to decrease. When the deposition rate of the first material 112 eventually decreases to zero, only diamond-like carbon 122, and therefore only the DLC coating, may continue to be deposited.

[0033]

[0037] As will be apparent to those skilled in the art, the deposition ratio of the first material 112 to the diamond-like carbon 122 can be varied by increasing, decreasing, or keeping constant the deposition rates of either or both the first material 112 and the diamond-like carbon 122.

[0034]

[0038] In some embodiments, in step 240, the ratio of the first material 112 to the diamond-like material 122 may decrease monotonically. In some embodiments, this ratio may decrease from about 20 / 1, 10 / 1, or 5 / 1 to (ultimately) zero. In some embodiments, deposition may be atomic layer deposition (ALD), chemical vapor deposition (CVD), thin film deposition, physical vapor deposition (PVD), or plasma-assisted chemical vapor deposition (PACVD). In some embodiments, the deposition rate of the first material 112 and / or diamond-like carbon 122 may be, but is not limited to, a deposition rate of 1 to 12 angstroms / second.

[0035]

[0039] This disclosure includes references to specific examples. However, it will be understood by those skilled in the art that various modifications can be made and replaced with equivalents without departing from the scope of this disclosure. In addition, modifications can be made to the disclosed examples without departing from the scope of this disclosure. Thus, this disclosure is not limited to the disclosed examples, and is intended to include all examples included in the appended claims.

Claims

1. A protective coating, wherein the protective coating is The bottom layer contains essentially only the first material, The top layer contains virtually only diamond-shaped carbon, It includes a mixed layer between the bottom layer and the top layer, and the mixed layer is The mixture further comprises a first material and diamond-like carbon, wherein the ratio of the amount of the first material to the amount of diamond-like carbon decreases to zero within the mixed layer as the isolation distance from the bottom layer increases. Protective coating.

2. A protective coating according to claim 1, wherein the first material is a metal or a dielectric.

3. A protective coating according to claim 1, wherein the first material is any coating material other than diamond-like carbon.

4. A protective coating according to claim 1, wherein the first material is ytterbium, fluoride, zinc sulfide, copper, silicon, germanium, diamond, glass, silicon carbide, or zinc selenide.

5. A protective coating according to claim 1, wherein the diamond-like carbon comprises sp2-bonded carbon atoms and sp3-bonded carbon atoms.

6. A protective coating according to claim 1, wherein the ratio is monotonically decreasing.

7. A protective coating according to claim 1, wherein the ratio decreases from about 20 / 1, 10 / 1, or 5 / 1.

8. A method for producing a protective coating, wherein the method is A step of depositing a bottom layer containing essentially only the first material, A step of depositing the top layer containing virtually only diamond-shaped carbon, The step includes depositing a mixed layer between the lowest layer and the uppermost layer, and the step of depositing a mixed layer between the lowest layer and the uppermost layer is The method further includes the step of simultaneously depositing a first material and diamond-like carbon, wherein the ratio of the amount of deposited first material to the amount of deposited diamond-like carbon decreases to zero in the mixed layer as the isolation distance from the bottom layer increases. method.

9. A method according to claim 8, wherein the first material is a metal or a dielectric.

10. A method according to claim 8, wherein the first material is any coating material other than diamond-like carbon.

11. A method according to claim 8, wherein the first material is ytterbium, fluoride, zinc sulfide, copper, silicon, germanium, diamond, glass, silicon carbide, or zinc selenide.

12. A method according to claim 8, wherein the diamond-like carbon comprises sp2-bonded carbon atoms and sp3-bonded carbon atoms.

13. A method according to claim 8, wherein the ratio is monotonically decreasing.

14. A method according to claim 8, wherein the ratio decreases from about 20 / 1, 10 / 1, or 5 / 1.

15. A method according to claim 8, wherein the deposition is atomic layer deposition (ALD), chemical vapor deposition (CVD), thin film deposition, physical vapor deposition (PVD), or plasma-assisted chemical vapor deposition (PACVD).

16. A method according to claim 15, wherein the deposition rate is 1 to 12 angstroms / second.

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