Safety device for the X-ray optical system of an X-ray fluorescence analyzer.

Abstract

The present invention relates to a safety device for an X-ray optical system (19) of an X-ray fluorescence analyzer (11), comprising a housing (34) in which the X-ray optical system (19) is at least partially positioned, a mounting shoe (36) to which at least one exit opening (43) of the X-ray optical system (19) is associated, a fixing device (37) positioned on the opposite side of the mounting shoe (36) from the housing (34) and fastened to a control device (31) of the X-ray fluorescence analyzer (11), wherein the X-ray optical system (19) is fixedly positioned to the mounting shoe (36) and / or the housing (34), and the X-ray optical system (19) is displaceable relative to the fixing device (37).

Description

Technical Field

[0001] The present invention relates to a safety device for an X-ray optical system of a fluorescent X-ray analyzer.

Background Art

[0002] A fluorescent X-ray analyzer equipped with an X-ray source is known from German Patent Application Publication No. 102022105838. The X-rays generated by the X-ray source are irradiated onto the measurement object through the X-ray optical system. The fluorescent X-ray radiation generated by the measurement object is detected by a detector and then analyzed. The X-ray optical system is held by an adjustment device by a safety device. The adjustment device enables adjustment of the X-ray optical system in a plane perpendicular to the beam axis. The safety device includes a fixing element for fixing the safety device to the adjustment device. On the opposite side of the fixing element, the safety device includes a mounting shoe, and an exit opening of the X-ray optical system is arranged within this mounting shoe.

Summary of the Invention

Problems to be Solved by the Invention

[0003] The present invention proposes a safety device for an X-ray optical system of a fluorescent X-ray analyzer, and an object thereof is to enable the X-ray optical system to be mounted in a collision-protected state.

Means for Solving the Problems

[0004] This problem is solved by a safety device for an X-ray optical system of a fluorescent X-ray device. The safety device includes a housing in which the X-ray optical system is at least partially arranged, a mounting shoe to which an exit opening of the X-ray optical system is assigned, and a fixing device arranged on the opposite side of the mounting shoe with respect to the housing and capable of being fastened to an adjustment device of the fluorescent X-ray analyzer. The X-ray optical system is firmly arranged in the mounting shoe and / or the housing and is displaceable with respect to the fixing device. This configuration has the advantage of allowing relative movement of the X-ray optics system to the fixed device, so that the X-ray optics system is protected by the safety device in the event of a collision, i.e., when the mounting shoe is placed on the object being measured. This displaceable mounting of the X-ray optics system to the fixed device allows the X-ray optics system to perform immersion movement or displacement movement relative to the fixed device. This prevents damage to the X-ray optics system when the mounting shoe is placed on the object being measured. Preferably, such an X-ray optical system has a focal length of less than 2 mm, i.e., the distance between the exit aperture of the X-ray optical system and the surface of the object to be measured is less than 2 mm. In such an X-ray fluorescence analyzer, a very short working distance is advantageously set between the X-ray optical system and the object to be measured, which enables better lateral resolution at the measurement spot of the object to be measured. Due to the short distance, there is an increased risk of collision between the mounting shoe and the object to be measured as the X-ray optical system moves toward the object to be measured. However, the safety device according to the present invention houses the X-ray optical system in a manner that protects it from collision.

[0005] According to a preferred embodiment of the safety device, the housing is fixed to a fixing device, and the mounting shoe is configured to be displaceable relative to the housing. In this case, the X-ray optical system is preferably securely connected to the mounting shoe, and as a result, in the event of a collision with an object to be measured, the mounting shoe is supported to be movable relative to the housing and the fixing device together with the X-ray optical system.

[0006] Alternatively, the housing may be displaceable relative to the fixing device, and the mounting shoe may be displaceable relative to the housing. In this case as well, the X-ray optics are preferably securely connected to the mounting shoe. Alternatively, the X-ray optics can be securely mounted to the housing. In the event of a potential collision, the X-ray optics can be displaced relative to the fixing device, thereby displacing the mounting shoe and housing simultaneously or sequentially.

[0007] In a more preferred alternative embodiment, the housing is displaceable relative to the fixing device, and the mounting shoe is configured to be fixed to or firmly connected to the housing. In this embodiment, the X-ray optical system may be fixed within the housing, fixed to the mounting shoe, or fixed to both. In the event of a collision, the housing displaces relative to the fixing device.

[0008] Preferably, a guide is provided between the housing and the mounting shoe, and the guide particularly includes at least one linear guide. Preferably, two linear guides are provided. This allows for smooth sliding movement between the housing and the mounting shoe with reduced tilting.

[0009] Advantageously, the linear guide is designed as either a sliding bearing or a rolling bearing. In particular, in the case of a sliding bearing, a sliding bearing bush is provided, and in the case of a rolling bearing, a linear ball bearing is provided, in both cases the pin is guided in a displaceable manner. This linear guide can be designed with a small component volume and therefore can be designed to be lightweight.

[0010] Advantageously, a reset element is provided between the housing and the mounting shoe, thereby allowing the mounting shoe to be positioned at its end position relative to the housing after displacement in the direction of the housing. Such a reset element allows the mounting shoe to automatically return to its defined end position relative to the housing after displacement. Alternatively, gravity may move the support shoe to its end position after sliding in the direction of the housing. The end position is understood to be the maximum distance between the mounting shoe and the housing. This allows the contact shoe to traverse its maximum stroke path in the event of a collision with the object being measured.

[0011] The reset element can be advantageously designed as an energy storage element. In particular, a compression spring can be provided. Alternatively, compressed air or another medium such as helium can be supplied. The helium supply can be advantageously used simultaneously to flush (clean) the exit aperture of the X-ray optical system afterward.

[0012] According to a more preferred embodiment of the present invention, the guide between the housing and the fixing device is designed as at least one linear guide. This can also enable embodiments that operate smoothly in a small configuration volume.

[0013] In particular, the linear guide between the housing and the fixing device is provided in the form of a guide bush that is firmly connected to the housing and can be displaced relative to the fixing device. The X-ray optical system can be easily fixed within such a guide bush by clamps or the like.

[0014] A further reset element can be provided between the housing and the fixing device, thereby allowing the housing to be moved to an end position relative to the fixing device. As a result, the housing can be reliably positioned at the end position, which is the maximum distance between the housing and the fixing device, as the end position or start position. Alternatively, the reset element may be omitted, and the housing may be moved to the end position together with the mounting shoe by its own weight.

[0015] In order to mount the X-ray optical system in a collision-protected state in the safety device, it is preferable to position the exit opening of the X-ray optical system flush with the mounting surface of the mounting shoe, which is provided with a through-opening, or to position it set back inward. For example, the exit opening of the X-ray optical system can be positioned set back 1 mm from the contact surface of the mounting shoe.

[0016] Advantageously, a total indentation depth of 0.5 mm or more is provided between the mounting shoe and / or housing and the fixing device.

[0017] Advantageously, the X-ray optics are clamped within a mounting shoe or housing, or held in place by screw connections. Other detachable fastening means are also possible. This allows for simple and secure mounting. Furthermore, the X-ray optics can be easily replaced.

[0018] The present invention and other advantageous embodiments, as well as further embodiments thereof, are described and explained in more detail below with reference to the examples shown in the drawings. Features as understood from the description and drawings can be used individually or in any combination in accordance with the present invention. [Brief explanation of the drawing]

[0019] [Figure 1] This is a schematic side view of an X-ray fluorescence analyzer. [Figure 2] This is a schematic top view of the safety device for an X-ray fluorescence analyzer. [Figure 3]It is a schematic cross-sectional view of the safety device along line III-III of FIG. 2. [Figure 4] It is a schematic cross-sectional view of the safety device along line IV-IV of FIG. 2. [Figure 5] It is a perspective exploded view of an alternative safety device of FIG. 2. [Figure 6] It is a schematic side view of the safety device according to FIG. 5. [Figure 7] It is a schematic cross-sectional view along line VI-VI of FIG. 6.

Mode for Carrying Out the Invention

[0020] FIG. 1 schematically shows a simplified fluorescence X-ray analyzer 11. This fluorescence X-ray analyzer 11 includes an X-ray source 12 designed as an X-ray tube 14, for example. This X-ray tube 14 includes a glow cathode 16, from which electrons are emitted and accelerated toward the anode by the applied acceleration voltage U. B There, the electrons are decelerated and X-rays 18 are generated. The wavelength range of the X-rays 18 depends on the acceleration voltage U, and the acceleration voltage U can usually be within a range of, for example, 10 kV, particularly 50 kV. The anode material can be, for example, tungsten or molybdenum. B The X-rays 18 are focused by the X-ray optical system 19 and directed toward the measurement object 21. The measurement object 21 can be placed on the measurement table 25 or positioned and arranged on the measurement table 25. The measurement object 21 can have, for example, a coating 22 or a layer system. At the measurement spot 24 on the surface or inside of the measurement object 21, the X-ray radiation 18 is incident on the measurement object 21, fluorescence X-ray radiation 26 is generated, and detected by a detector 27 (for example, a semiconductor detector). For example, by evaluating the detected energy spectrum, the material composition of the coating 22 or the measurement object 21 and / or the thickness of at least one layer of the coating 22 can be determined. B The anode material can be, for example, tungsten or molybdenum

[0021] The X-rays 18 are focused by the X-ray optical system 19 and directed toward the measurement object 21. The measurement object 21 can be placed on the measurement table 25 or positioned and arranged on the measurement table 25. The measurement object 21 can have, for example, a coating 22 or a layer system. At the measurement spot 24 on the surface or inside of the measurement object, the X-ray radiation 18 is incident on the measurement object 21, fluorescence X-ray radiation 26 is generated, and detected by a detector 27 (for example, a semiconductor detector). For example, by evaluating the detected energy spectrum, the material composition of the coating 22 or the measurement object 21 and / or the thickness of at least one layer of the coating 22 can be determined.

[0022] Furthermore, the X-ray fluorescence analyzer 11 may include an optical device 29. This optical device 29 may be provided to confirm and position the object to be measured 21 relative to the measurement position. This may also include video observation. An adjustment device 31 is provided to position and hold the X-ray optical system 19 in the X-ray fluorescence analyzer 11. This adjustment device 31 may be detachably attached to a further component 32 of the X-ray fluorescence analyzer 11. In the example of the embodiment, the component 32 may be a so-called shutter. A safety device 33 for the X-ray optical system 19 is preferably provided below the adjustment device 31. In the example of the embodiment, the X-ray optical system 19 is designed as a polycapillary. The X-ray optical system 19 is aligned with the beam axis of the X-ray 18. Preferably, the beam axis of the X-ray 18 is on the Z-axis. The adjustment device 31 allows the X-ray optical system 19 to move in a plane perpendicular to the beam axis of the X-ray 18, i.e., the Z-axis. In particular, the adjustment device 31 enables adjustment in the XY plane so that the beam axis of the X-ray optical system 19 coincides with the beam axis of the X-ray 18, and especially so that the two are coaxial.

[0023] The safety device 33 comprises a housing 34, in which the X-ray optical system 19 is at least partially arranged. A mounting shoe 36 is located at the lower end of the housing 34. The exit opening 43 of the X-ray optical system 19 is associated with the mounting shoe 36. A fixing device 37 is provided on the opposite side of the mounting shoe 36. This fixing device 37 is connected to the housing 34. This fixing device 37 is used to hold and fix the safety device 33 to the adjustment device 31.

[0024] Figure 2 shows a schematic top view of the safety device 33 shown in Figure 1. The surface extent of the mounting shoe 36 is advantageously larger than the outer circumference of the housing 34. However, the surface extent may be the same size as the housing 34, or smaller. A receptacle 38 is shown on the housing 34, and the detector 27 may be mounted on this receptacle 38. This appearance in Figure 2 shows that the X-ray optical system 19 is guided through a through-aperture 35 in the housing 34.

[0025] Figure 3 shows a schematic cross-sectional view along line III-III in Figure 2. The contact shoe 36 has a contact surface 39 on its underside. A through opening 42 is provided in this contact surface 39, and the exit opening 43 of the X-ray optical system 19 is aligned with the through opening 42. Preferably, the exit opening 43 of the X-ray optical system 19 is positioned set back relative to the through opening 42 of the mounting shoe 36. In the example of the embodiment, the X-ray optical system 19 is housed by two elements 44, 45 that are placed one inside the other and fixed and held in place by the mounting shoe 36. For example, element 44 may be made of plastic such as POM. The other element 45 may be made of plastic, metal, or other material. Alternatively, only one of the two elements 44, 45 may be provided. The X-ray optical system 19 may be clamped directly to the opening 42 of the mounting shoe 36.

[0026] For example, element 45 may be configured as a receptacle for the X-ray optical system 19 and at the same time as a guide, so as to be slidably received in the guide portion of the housing 34 within the through aperture 42.

[0027] The cross-sectional view in Figure 4 shows a guide 46 for displaceably receiving the mounting shoe 36 relative to the housing 34. Figure 4 is a cross-sectional view along line IV-IV in Figure 2. The guide 46 is designed as a rolling bearing. In particular, a linear ball bearing 47 is provided, which is fixed and held in the housing 34. A pin 48 is fixed in the mounting shoe 36. This pin 48 can be fixed in place, for example, by screw connection or press-fit. The two linear ball bearings 47 are preferably arranged vertically to guide the contact shoe 36 relative to the housing 34 without tilting. Furthermore, an additional guide 46 may be provided on the side opposite to the through opening 42 in the housing 34. Advantageously, the additional guide 46 also consists of linear ball bearings 47 and a pin 48. With such an arrangement, the mounting shoe 36 is mounted so as not to tilt or slide relative to the housing 34.

[0028] The contact shoe 36 is positioned at the starting position relative to the housing 34 and at its lower end position, as shown in Figure 4. This lower end position of the mounting shoe 36 can be achieved independently by the weight of the mounting shoe 36 and the X-ray optical system mounted inside or on the mounting shoe 36. The lower end position of the mounting shoe 36 relative to the housing 34 corresponds to the distance between the housing 34 and the mounting shoe 36, which allows for the maximum stroke path.

[0029] In the embodiment shown in Figure 4, a reset element 51 is further provided to take the end position. This reset element 51 is supported on one side by the housing 34 and is configured to act on the pin 48 on the other side, so that a reset operation to the end position is performed after the mounting shoe 36 is displaced or plunged in the direction of the housing 34.

[0030] In this embodiment, the housing 34 is configured to be fixed and held by the fixing device 37. For example, a screw connection can be provided to connect the fixing device 37 to the housing 34.

[0031] Figure 5 shows an exploded view of an alternative embodiment of the safety device 33. Figure 6 shows a schematic side view of the safety device 33 according to Figure 5. Figure 7 shows a schematic cross-sectional view along line VI-VI in Figure 6.

[0032] This safety device 33 also comprises a mounting shoe 36, a housing 34, and a fixing device 37. In this embodiment, the housing 34 is designed to be displaceable relative to the fixing device 37. Furthermore, in contrast to the embodiment of the safety device 33 shown in Figures 1 to 4, the X-ray optical system 19 is configured to be fixed and held within the housing 34. In this case, it is not necessary to fix and hold the lower end of the X-ray optical system to the mounting shoe 36. Rather, in this embodiment, the mounting shoe 36 is displaceable relative to the exit opening 43 of the X-ray optical system 19. This results in the following structure.

[0033] The guide 46 between the housing 34 and the mounting shoe 36, as described in the above embodiments shown in Figures 1 to 4, can also be provided in this case. A second guide 49, comprising a linear ball bearing 47 and a pin 48, is provided to displaceably receive the housing 34 relative to the fixing device 37. These linear ball bearings 47 are, for example, press-fitted into the fixing device 37. One end of the pin 48 is press-fitted into the housing 34, and the other end is guided into the linear ball bearing 47. This second guide 49 can be designed in the same way as the guide 46.

[0034] A guide bush 54 is provided in the housing 34 to accommodate the X-ray optical system 19. The X-ray optical system 19 is positioned within the guide bush 54 and is preferably held by clamps or screws. The guide bush 54 is then fixed within the through-opening 35 of the housing 34. This can be achieved by clamps, screws, etc. The guide bush 54 has an outer circumference through which it is guided to be displaceable within the fixing device 37. In the embodiment shown in Figure 7, a reset element 51 is positioned between the fixing device 37 and the guide bush 54. This allows the housing 34 to be returned to its start or end position after displacement movement in the direction of the fixing device 37. A clamp or screw element 55 is provided to fix the reset element 51 within the through-opening of the fixing device 37 and fastened to (or inside) the through-opening of the fixing device 37.

[0035] Alternatively, the reset element 51 may be omitted, and the housing 34, mounting shoe 36, and X-ray optical system 19 may move independently to their respective end positions due to their own weight.

[0036] The total indentation depth of the mounting shoe 36 and housing 34 into the fixing device 37 may be the same as in the embodiment of the safety device 33 shown in Figures 1 to 4. The indentation depth of the mounting shoe 36 into the housing 34 and the indentation depth of the housing 34 into the fixing device 37 can be the same. Alternatively, they may be at different ratios. When a collision occurs between the safety device 33 and the object to be measured 21, the contact shoe 36 and housing 34 can be displaced simultaneously in the direction of the fixing device 37. This can also be done sequentially. In the latter case, it is preferable that multiple reset elements 51 are configured to cooperate with each other.

[0037] According to further alternative embodiments of the safety device 33 shown in Figures 5 to 7, the X-ray optical system 19 may not be fixedly held in the housing 34, but rather fixedly held on or inside the mounting shoe 36, similar to the first embodiment. Nevertheless, the displaceability of the mounting shoe 36 relative to the housing 34 and the displaceability of the housing 34 relative to the fixing device 37 can be maintained.

[0038] Alternatively, based on the safety device 33 shown in Figures 5 to 7, the mounting shoe 36 and housing 34 may be configured to be securely fixed to each other and to be displaceable together with respect to the fixing device 37.

Claims

1. A safety device for the X-ray optical system (19) of a fluorescent X-ray analyzer (11), - A housing (34) in which the X-ray optical system (19) is at least partially arranged, - A mounting shoe (36) to which at least one exit aperture (43) of the X-ray optical system (19) is associated, - A fixing device (37) is positioned on the opposite side of the mounting shoe (36) from the housing (34) and can be fastened to the adjustment device (31) of the X-ray fluorescence analyzer (11), Equipped with, The X-ray optical system (19) is fixedly positioned on the mounting shoe (36) and / or the housing (34), and the X-ray optical system (19) is displaceable relative to the fixing device (37), characterized in that Safety equipment.

2. The safety device according to claim 1, characterized in that the housing (34) is fixedly positioned with respect to the fixing device (37), and the mounting shoe (36) is displaceable with respect to the housing (34).

3. The safety device according to claim 1, characterized in that the housing (34) is displaceable relative to the fixing device (37), and the mounting shoe (36) is displaceable relative to the housing (34).

4. The safety device according to claim 1, characterized in that the housing (34) is displaceable relative to the fixing device (37), and the contact shoe (36) is fixed to the housing (34).

5. The safety device according to any one of claims 1 to 4, characterized in that a guide (46) is provided between the housing (34) and the contact shoe (36), and the guide is preferably configured as at least one linear guide.

6. The safety device according to claim 5, characterized in that the linear guide is configured as a sliding bearing or a rolling bearing, preferably the sliding bearing is configured as a sliding bearing bush, or the rolling bearing is configured as a linear ball bearing (47), and the pin (48) is displaceably guided in the sliding bearing bush or the linear ball bearing (47).

7. The safety device according to any one of claims 1 to 6, characterized in that the mounting shoe (36), the housing (34), or the mounting shoe (36) and the housing (34) are movable toward the fixing device (37) toward the end position by their own weight after displacement toward the fixing device (37).

8. The safety device according to any one of claims 1 to 6, characterized in that at least one reset element (51) is provided between the housing (34) and the mounting shoe (36), and the at least one reset element (51) allows the mounting shoe (36) to be positioned at an end position relative to the housing (34) after displacement movement in the direction of the housing (34).

9. The safety device according to claim 8, characterized in that the reset element (51) is configured as an energy storage element, particularly a compression spring.

10. The safety device according to any one of claims 1 to 9, characterized in that a guide (49) is provided between the housing (34) and the fixing device (37), and the guide is preferably configured as a linear guide.

11. The safety device according to claim 10, characterized in that the guide (49) comprises a guide bush (54) that houses the X-ray optical system (19), is fixedly connected to the housing (34), and is displaceable relative to the fixing device (37).

12. The safety device according to claim 10 or claim 11, characterized in that a reset element (51) is provided between the housing (34) and the fixing device (37), and the reset element (51) allows the housing (34) to move to an end position relative to the fixing device (37).

13. The safety device according to any one of claims 1 to 12, characterized in that the exit opening (43) of the X-ray optical system (19) is located on the same plane as the mounting surface (39) on which the through opening (42) of the mounting shoe (36) is provided, or is located set back from the mounting surface.

14. The safety device according to any one of claims 1 to 13, characterized in that the mounting shoe (36) and / or the housing (34) have a total indentation depth of 0.5 mm or more relative to the fixing device (37).

15. The safety device according to any one of claims 1 to 14, characterized in that the X-ray optical system (19) is fixed and held inside or on the mounting shoe (36) and / or the housing (34) by connection with a clamp or screw.

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