Rotor unit with improved cover and balance weights

Abstract

The present invention provides a rotor device with an improved cover equipped with a balance weight, which is installed in a turbomolecular vacuum pump and helps to avoid dust accumulation and center of gravity imbalance that may occur when the turbomolecular vacuum pump rotates at high speed. [Solution] The device includes a rotating shaft 20, one end of which is provided on the turbomolecular vacuum pump 10; a rotor body 30 connected to the other end of the rotating shaft and having a fastening space 40 at the end corresponding to the rotating shaft; and a cover 50. The cover includes a connecting unit 60, one end of which is provided on one end of the rotating shaft; a reinforcing unit 80 connected to the other end of the connecting unit that faces the rotating shaft; and a weight unit 70 provided on the connecting unit and located between the reinforcing unit and the rotating shaft.

Description

Technical Field

[0001] The present invention relates to an improved rotor device with a cover provided with weights for balance adjustment, and more particularly to an improved rotor device with a cover provided with weights for balance adjustment provided in a turbo molecular vacuum pump.

Background Art

[0002] In semiconductor manufacturing, turbo molecular vacuum pumps play a very important role and are mainly used in each manufacturing process that requires a high vacuum, because the semiconductor manufacturing process needs to be carried out in a highly controlled environment to ensure the stability and accuracy of the process. Turbo molecular vacuum pumps are often used in scenarios such as chemical vapor deposition, physical vapor deposition, photolithography, and etching in semiconductor manufacturing. Turbo molecular vacuum pumps can not only ensure the stability and accuracy of the manufacturing process in the above scenarios, but also effectively control the concentration of trace gases in the manufacturing process by virtue of their high exhaust speed and high vacuum degree, so as to achieve higher production quality and yield. However, when used in the above various environments, the operating speed of the pump is very high and the structure is compact, so there is a risk of dust deposition. When sucking in gas containing dust, fine particles may deposit on the internal structure. Excessive dust deposition may affect the vacuum efficiency of the pump and the balance of the rotor, and may even cause failures.

[0003] Currently, common practices to prevent dust accumulation include regular maintenance or maintaining the cleanliness of the environment as much as possible. Some manufacturers further pre-treat the gas, filtering it using a pre-pump or filter before it enters the molecular pump to reduce particle ingress. While these methods can mitigate the rate of dust accumulation, dust accumulation still occurs if cleaning is not performed for extended periods or if the vacuum pump is operated for long periods. To address this, some manufacturers design covers that can enclose the rotor openings, which can effectively prevent dust accumulation. However, many of these fastening methods still result in vibration or shifts in the center of gravity during high-speed rotor rotation. If this is not detected early, wear and even loosening can occur between the cover and the rotor, potentially leading to failure or damage.

[0004] Therefore, designing a device that can avoid dust accumulation at the rotor opening of a turbomolecular vacuum pump while suppressing the imbalance of its center of gravity and maintaining sufficient stability is an urgent issue that the industry must address. [Overview of the project] [Means for solving the problem]

[0005] The object of this invention is to overcome the above-mentioned drawbacks and provide an improved rotor device with a cover equipped with a balance weight. The device includes a rotating shaft, one end of which is provided on a turbomolecular vacuum pump; a rotor body connected to the other end of the rotating shaft and having a fastening space at the end corresponding to the rotating shaft; and a cover. The cover includes a connecting unit, one end of which is provided on one end of the rotating shaft; a reinforcing unit connected to the other end of the connecting unit opposite the rotating shaft; and a weight unit provided on the connecting unit and located between the reinforcing unit and the rotating shaft. By using this improved rotor device with a cover equipped with a balance weight, it is possible to avoid dust accumulation and center of gravity imbalance that may occur during high-speed operation of the turbomolecular vacuum pump.

[0006] In the improved rotor device with a cover equipped with the aforementioned balance adjustment weight, the weight unit is provided with a plurality of weight grooves.

[0007] In the improved rotor device with a cover equipped with the aforementioned weights for balance adjustment, the multiple weight grooves accommodate the weights and can be adjusted to match the balance of the rotor, thereby enabling stable high-speed operation.

[0008] In the improved rotor device with a cover equipped with the aforementioned balance adjustment weight, the weight unit is further provided with a screw-type fixing member located at the bottom of the weight unit.

[0009] In the improved rotor device with a cover equipped with the aforementioned balance adjustment weight, the cover is further provided with a reinforcing unit located at the bottom of the cover and connected to the connecting unit.

[0010] In the improved rotor device with a cover equipped with the aforementioned balance adjustment weight, the connecting unit has at least one fixing groove.

[0011] In the improved rotor device with a cover equipped with the aforementioned balance adjustment weight, the rotor body has a fastening space at the end facing the rotation axis.

[0012] In the improved rotor device with a cover equipped with the aforementioned balance adjustment weight, the weight unit is an aluminum alloy weight unit. The weight unit is manufactured from an aluminum alloy material.

[0013] In the improved rotor device with a cover equipped with the aforementioned balance adjustment weight, a plurality of fixing members are provided at the bottom of the fastening space.

[0014] In the improved rotor device with a cover equipped with the aforementioned balance adjustment weights, the multiple weight grooves are all the same in size and spacing. [Brief explanation of the drawing]

[0015] [Figure 1] This is a side cross-sectional view of an improved rotor device with a cover equipped with a balance adjustment weight according to the present invention. [Figure 2] This is a perspective view of an improved rotor device with a cover equipped with a balance adjustment weight according to the present invention. [Figure 3] This is a schematic side view of an improved rotor device with a cover equipped with a weight for balance adjustment according to the present invention. [Modes for carrying out the invention]

[0016] The present invention will be further described below with reference to the drawings and embodiments.

[0017] In the improved rotor device with a cover and balance weight according to the present invention, the basic principles of the structure or other housing methods used will be understood by those skilled in the art, and therefore a complete explanation will not be provided below. Furthermore, the drawings referenced in the following description are schematic diagrams showing the structure related to the features of the present invention, and are not drawn in complete accordance with the actual dimensions, nor is it necessary to do so, and this is stated hereby made clear.

[0018] Figure 1 is a schematic diagram of an improved rotor device 1 with a cover equipped with a balance adjustment weight according to the present invention, Figure 2 is a perspective view of the cover 50 according to the present invention, and Figure 3 is a schematic diagram of the combination of the cover 50 and the weight unit 70 according to the present invention.

[0019] The improved rotor device 1 with a cover and balance weights includes a rotating shaft 20 with one end provided on a turbomolecular vacuum pump 10, a rotor body 30 connected to the other end of the rotating shaft 20 and having a fastening space 40 at the end facing the rotating shaft 20, and a cover 50, the cover 50 including a connecting unit 60 with one end provided on one end of the rotating shaft 20, a reinforcing unit 80 connected to the other end of the connecting unit 60 facing the rotating shaft 20, and a weight unit 70 provided on the connecting unit 60 and located between the reinforcing unit 80 and the rotating shaft 20.

[0020] For example, when attempting to machine a rotor device 1 with an improved cover equipped with a balance weight, the turbomolecular vacuum pump 10 is started, which drives the rotating shaft 20 to rotate, which in turn drives the rotor body 30 to rotate, thereby achieving a vacuum exhaust function. The connecting unit 60 is then connected to the rotating shaft 20, the weight unit 70 is placed in the fastening space 40, and finally the reinforcing unit 80 at the bottom of the cover 50 is connected to the connecting unit 60, thereby bringing the cover 50 into contact with the top of the rotor body 30 and completely covering the opening of the fastening space 40. This prevents granular dust generated during machining from accumulating in the fastening space 40. The above is merely an example and is not limited thereto.

[0021] Preferably, the weight unit 70 is further provided with a plurality of weight grooves 701, for example, when a turbomolecular vacuum pump is in operation, its rotor device operates at high speed, and if the attached associated dust cover is not properly secured or the weight distribution is unbalanced, wear or loosening of the associated parts may occur, potentially causing damage to the equipment. Therefore, before operation, the user can place weights in the weight grooves 701 according to different conditions and the coupling angle of the equipment, and the formula for the moment of inertia

number

[0022] Preferably, the weight unit 70 is further provided with a screw-type fixing member 702 provided on the bottom side of the weight unit 70. When attaching the screw-type fixing member 702, first, fix it at a predetermined height of the connecting unit 60, and the actual height can be adjusted according to the usage scenario. Next, connect the weight unit 70 to the connecting unit 60. The upper part of the screw-type fixing member 702 has a reverse-thread screw in the direction opposite to the operating direction of the rotor device. The reverse-thread screw can be screwed with the female screw at the bottom of the weight unit 70. Thereby, when the rotor device operates, the weight unit 70 and the screw-type fixing member 702 can achieve the function of reinforcing the fixation and providing stability because the direction of the screw is opposite to the operating direction.

[0023] Preferably, the cover 50 is further provided with a reinforcing unit 80 located at the bottom of the cover 50 and connected to the other end facing the rotation axis 20 of the connecting unit 60. After attaching the connecting unit 60 and the weight unit 70 to the fastening space 40, tighten the cover 50 to cover the fastening space 40. Similarly, the connecting unit 60 and the reinforcing unit 80 each have a reverse-thread screw and a female screw in the direction opposite to the operating direction of the rotor device. When the cover 50 is tightened most, the reinforcing unit 80 engages with the corresponding snap-fit structure in the fastening space 40, thereby achieving the effect of reinforcing and stabilizing the cover.

[0024] [[ID=!1]] Preferably, the connecting unit 60 has at least one fixing groove 601. When attaching the improved cover-equipped rotor device 1 with the balance-adjusting weight, one end of the connecting unit 60 needs to be provided at the end of the rotating shaft 20 facing the turbo molecular vacuum pump 10. And since the connecting unit 60 is a cylinder, in order to ensure that the connecting unit 60 is fixed tightly enough, the installer can hold this part with a tool through the fixing groove 601. After ensuring that there is a sufficiently stable frictional force on the surface, by tightening the connecting unit 60 to the rotating shaft 20, the function of tightly fastening is achieved.

[0025] Preferably, there is a fastening space 40 at the end of the rotor body 30 facing the rotating shaft 20. During the operation of the turbo molecular vacuum pump 10, since the environment and the gas used are different, there is still a possibility that fine dust or particles may be generated. If the dust or particles fall into the fastening space 40, since the cover 50 is in close contact with the upper part of the fastening space 40, it can effectively prevent the fallen dust or particles from scattering outside the fastening space 40 again due to the disturbance of the air flow during operation. Thereby, the contamination or damage to the processed product can be reduced.

[0026] Preferably, the weight unit 70 is a weight unit made of an aluminum alloy. Due to the lightweight and high-strength characteristics of the aluminum alloy, the weight unit 70 can withstand the torque generated by high-speed operation. Also, due to its corrosion-resistant characteristics, it can avoid the influence of the difference in pH value caused by the gas generated by different processed products.

[0027] Preferably, a plurality of fixing members 90 for fixing the rotating shaft 20 and the rotor body 30 are provided at the bottom of the fastening space 40. One end of each of the plurality of fixing members 90 is at the bottom of the fastening space 40, and the other end is connected to the rotating shaft 20. Thereby, the rotor body 30 can be fixed to the rotating shaft 20.

[0028] Preferably, the multiple weight grooves 701 are all the same size and spacing, and in the semiconductor industry, when the turbomolecular vacuum pump 10 is in operation, the rotational speed is mainly about 24,000 to 36,000 RPM to achieve a specific vacuum level, and in order to maintain the stability of the parts during this high-speed operation, specific weights can be placed in the multiple weight grooves 701, and the fixed spacing design allows the user to adjust the number or spacing of the weights according to different environments and processed products, thereby adjusting the stability of the angular momentum during operation and achieving the effect of avoiding the center of gravity shift during high-speed operation.

[0029] The foregoing description is merely a preferred embodiment of the present invention and does not limit the scope of the claims of the present invention. Furthermore, since the foregoing description is clear and implementable to those skilled in the art, any other equivalent changes or modifications made without departing from the spirit of the present invention should be included in the claims. [Explanation of symbols]

[0030] 1. Rotor unit with improved cover and balance weights. 10 Turbomolecular Vacuum Pumps 20 Rotation axis 30 Rotor body 40 Space for fastening 50 Covers 60 connecting units 601 Fixed groove 70 weight units 701 Weight groove 702 Screw-type fixing member 80 Reinforcement Unit 90 Fixing member

Claims

1. An improved rotor device with a cover and a balance weight provided on a turbomolecular vacuum pump (10), comprising: a rotating shaft (20) with one end provided on the turbomolecular vacuum pump (10); a rotor body (30) connected to the other end of the rotating shaft (20) and having a fastening space 40 at the end facing the rotating shaft (20); and a cover (50), wherein the cover (50) comprises a connecting unit (60) with one end provided on one end of the rotating shaft (20); a reinforcing unit (80) connected to the other end of the connecting unit (60) facing the rotating shaft (20); and a weight unit (70) provided on the connecting unit (60) and located between the reinforcing unit (80) and the rotating shaft (20), characterized in that it comprises a balance weight and an improved rotor device with a cover.

2. The rotor device with an improved cover equipped with a balance adjustment weight according to claim 1, characterized in that the weight unit (70) is provided with a plurality of weight grooves (701).

3. The rotor device with an improved cover equipped with balance adjustment weights according to claim 2, characterized in that the plurality of weight grooves (701) accommodate weights and adjust them to match the balance of the rotor, thereby achieving stable high-speed operation.

4. The rotor device with a cover and a balance adjustment weight according to claim 2, further comprising a screw-type fixing member (702) provided at the bottom of the weight unit (70).

5. The rotor device with an improved cover and balance adjustment weight according to claim 1, characterized in that the reinforcing unit (80) is located at the bottom of the cover (50).

6. The rotor device with an improved cover equipped with a balance adjustment weight according to claim 1, characterized in that the connecting unit (60) has at least one fixing groove (601).

7. The rotor device with an improved cover equipped with a balance adjustment weight according to claim 1, characterized in that the rotor body (30) has a fastening space (40) at the end facing the rotation axis (20).

8. The rotor device with an improved cover and a balance adjustment weight according to claim 2, characterized in that the weight unit (70) is made of an aluminum alloy material.

9. The rotor device with an improved cover equipped with a balance adjustment weight according to claim 1, characterized in that a plurality of fixing members (90) are provided at the bottom of the fastening space (40).

10. The rotor device with an improved cover equipped with a balance adjustment weight according to claim 2, characterized in that the plurality of weight grooves (701) are all the same in size and spacing.

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