Laser processing equipment
The laser processing apparatus uses detection units and a control unit to identify defects in optical components, addressing productivity issues by pinpointing the source of output changes and reducing equipment shutdowns.
JP7888390B2Active Publication Date: 2026-07-13DISCO CORP
Patent Information
- Application Number
- JP2022118969
- Authority / Receiving Office
- JP · JP
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2022-07-26
- Publication Date
- 2026-07-13
- Estimated Expiration
- 2042-07-26
AI Technical Summary
Technical Problem
Current laser processing equipment faces challenges in identifying the cause of processing defects due to contamination or voltage issues in optical modulators, leading to decreased productivity from extended equipment shutdowns.
Method used
A laser processing apparatus with detection units inside and outside the laser oscillator, an electro-optic modulation element, and a control unit to compare and determine output changes, identifying defects in specific components.
Benefits of technology
Facilitates easy identification of defect causes, enhancing productivity by reducing downtime and improving processing accuracy.
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Smart Images
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Abstract
To provide a laser processing device which can easily specify a cause when defective machining occurs.SOLUTION: A laser processing device includes a laser oscillator 30, an output adjustment unit 40 having an electrooptical modulation element 41 for rotating a polarization direction of a laser beam 21 and a polarization element 44 permeating only the laser beam 21 in a predetermined polarization direction, a first detection unit 22 for detecting the output of the laser beam 21 inside the laser oscillator 30, a second detection unit 23 for detecting the output of the laser beam 21 between the electrooptical modulation element 41 and the polarization element 44, and a control part, wherein the control part has a storage part for storing a reference output detected by the respective detection units in a normal device state, a comparison part for comparing the output at a predetermined timing with the reference output, and a determination part 93 for determining presence / absence of output change on the basis of the result compared by the comparison part, and specifying a part where output change occurs, when determining that there is the output change.SELECTED DRAWING: Figure 2
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Citation Information
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