Orientable Semiconductor Container And Orientation System For Semiconductor Container

Abstract

An oriented semiconductor container provided by the present invention is suitable for an isosceles rectangular reticle pod and comprises a pod and an orientation assembly disposed on the bottom of said pod. The orientation assembly is configured to cooperate with a drive unit of a load port when the pod is placed on a load port and to rotate the pod from a first direction to a second direction according to a drive stroke provided by the drive unit. The present invention further provides an orientation system for a semiconductor container. Through cooperation between the orientation assembly and the drive unit, the orientation assembly rotates the isosceles rectangular reticle pod from a first direction to a second direction according to a drive stroke provided by the drive unit.

Description

Technology Field

[0001] The present invention relates to a semiconductor container, and more specifically, to an oriented semiconductor container and a semiconductor container orientation system for accommodating the semiconductor container. Background Technology

[0002] As the size of the reticle increases from 6 inches × 6 inches to 6 inches × 12 inches, the large anomalous rectangular reticle transport pods developed to load these enlarged anomalous rectangular reticles have a long side and a short side. In response to the enlarged anomalous rectangular shape of the reticle and the size of the reticle pod, the transport equipment and processing steps for the reticle transport pod must also be replanned and adjusted. For example, when a reticle pod is transported to a processing machine (e.g., an exposure unit) by an Overhead Hoist Transport (OHT) system, the anomalous rectangular reticle pod needs to be positioned in a specific orientation according to existing machine limitations or process requirements in order to enter the exposure unit. For example, before entering the exposure unit, the anomalous rectangular reticle pod is positioned at the load port so that the short side of the reticle pod faces the exposure unit. However, the load ports of current loaders lack orientation capabilities, so the reticle pod can only enter the exposure unit in a specific direction when transported to the exposure unit. Therefore, to improve the precision and space utilization of the exposure device, it is necessary to configure an additional automated machine within the exposure device to change the orientation of the non-asymmetric rectangular reticle pod. The problem to be solved

[0003] Considering the above problem, the present invention provides an oriented semiconductor container suitable for an isosceles rectangular reticle pod. An orientation assembly is placed at the bottom of the reticle pod. Since the reticle pod is driven to rotate by driving the reticle pod by a drive unit to achieve the orientation function, the problem of orientation mismatch between the long side / short side of the reticle inside the machine and the OHT system is resolved. means of solving the problem

[0004] More specifically, the oriented semiconductor container provided by the present invention is suitable for an isosceles rectangular reticle pod and comprises a pod and an orientation assembly disposed on the bottom of said pod. The orientation assembly is configured to cooperate with a drive unit of a load port when the pod is placed in a load port. The orientation assembly rotates the pod from a first direction to a second direction according to a drive stroke provided by the drive unit.

[0005] Based on the above concept, the orientation assembly includes a rotary seat, and the drive unit is located at or near the loading position of the load port, so that when the pod is in the loading position, the pod comes into contact with the drive unit and rotates in the same direction as the loading movement stroke of the pod.

[0006] Based on the above concept, the pod includes an outer pod for receiving an inner pod, the inner pod is intended to maintain an isosceles rectangular reticle, and the outer pod includes a door composed of an orientation assembly. When the outer pod rotates in cooperation with the drive unit of the load port, the inner pod received in the outer pod can rotate together with the orientation assembly to change orientation.

[0007] Based on the above concept, the pod includes an outer pod for accommodating an inner pod, and the inner pod includes a base composed of an orientation assembly. When the base rotates in cooperation with the drive unit of the load port, an isosceles rectangular reticle placed in the inner pod rotates together with respect to the orientation setting assembly to change orientation.

[0008] Based on the above concept, the rotary seat is rotatably connected to the bottom of the pod by a bearing.

[0009] Based on the above concept, the bottom of the pod consists of at least one positioning groove that cooperates with and is positioned by at least one set of positioning pins of the load port.

[0010] Based on the above concept, the rotation angle from the first direction to the second direction is 90 degrees or more.

[0011] Based on the above concept, the orientation assembly includes a gear disc, the drive unit is a rack, the gear disc and the rack are meshed with each other, and the gear disc rotates the pod from a first direction to a second direction according to the drive stroke provided by the rack.

[0012] The present invention further provides an orientation system for a semiconductor container suitable for an isosceles rectangular reticle pod. The orientation system for a semiconductor container comprises: a receiving track configured to receive and transport an isosceles rectangular reticle pod from a load port; an orientation assembly disposed on the bottom of the isosceles rectangular reticle pod; and a driving unit disposed on the load port or the receiving track, wherein the orientation assembly cooperates with the driving unit to cause the orientation assembly to rotate the isosceles rectangular reticle pod from a first direction to a second direction according to a driving stroke provided by the driving unit.

[0013] Based on the above concept, an elevator base for transporting an isosceles rectangular reticle pod on a load port is further included.

[0014] Based on the above concept, the orientation assembly includes a rotary seat, and the drive unit is positioned at the loading position of the load port so that an anomalous rectangular reticle pod contacts the drive unit, and when the anomalous rectangular reticle pod is positioned at the loading position, the anomalous rectangular reticle pod rotates in the same direction as the loading movement stroke of the anomalous rectangular reticle pod.

[0015] Based on the above concept, the orientation assembly includes a rotary sheet, and the drive unit is positioned on an incoming track leading to an exposure device so that when the non-uniform rectangular reticle pod or the rotary sheet comes into contact with the drive unit, the non-uniform rectangular reticle pod or the rotary sheet rotates in a direction along the incoming movement stroke of the non-uniform rectangular reticle pod.

[0016] Based on the above concept, the rotation angle from the first direction to the second direction is 90 degrees or more.

[0017] Based on the above concept, the orientation assembly comprises a connecting rod and a rotary disk coupled to the connecting rod, wherein the connecting rod is connected to the bottom of an anomalous rectangular reticle pod and is configured to contact a drive unit to rotate the anomalous rectangular reticle pod.

[0018] Based on the above concept, the orientation assembly is a gear disk, the drive unit is a rack, the gear disk and the rack are meshed with each other, and the gear disk rotates an isosceles rectangular reticle pod from a first direction to a second direction according to the drive stroke of the rack. Effects of the invention

[0019] Included in the contents of the present invention. Brief explanation of the drawing

[0020] FIG. 1 is a perspective view of an isosceles rectangular reticle pod of the present invention. FIG. 2 is an exploded view of the non-equilateral rectangular reticle pod of the present invention. FIGS. 3a to 3c are schematic diagrams of a rotation process according to an embodiment of the present invention. FIG. 4 is a cross-sectional view of the base of an isosceles rectangular reticle pod according to an embodiment of the present invention. FIGS. 5a to 5c are schematic diagrams of a rotation process according to another embodiment of the present invention. FIG. 6 is a cross-sectional view of the base of an isosceles rectangular reticle pod according to another embodiment of the present invention. FIGS. 7a to 7d are schematic diagrams of the steps of unloading an orientation system for a semiconductor container at a load port of the present invention and moving toward a track. FIGS. 8a to 8d are schematic diagrams of the step of changing the orientation in the incoming track of the orientation system for a semiconductor container according to the present invention. Specific details for implementing the invention

[0021] The term "pod" as described in the present invention generally refers to a pod that accommodates a reticle and is not limited to a single pod, dual pod, external pod, or internal pod.

[0022] In the present invention, the term "load port" generally refers to a device that transfers a pod from a first environment of a system to a second environment, for example, a device that transfers it from an atmospheric environment to a low-pressure environment. The "load port" may include a drive device for moving the pod, for example, a vertical elevator or a horizontal moving conveyor belt. In some configurations, the drive device for the "load port" may extend into the system, and thus the part of the "load port" that extends into the system may also be part of the "load port."

[0023] The term "drive stroke" as described in the present invention refers to the process in which a stationary drive unit contacts a moving pod, and in this process, the drive unit interacts with the pod (e.g., dynamically contacts). The drive unit indicates a state in which it is relatively stationary compared to the moving pod and does not necessarily mean that the drive unit is completely stationary.

[0024] The term "feeding position" as described in the present invention refers to the starting position of a pod intended to enter a "feeding track," and may be a position at a load port, a position within a system cavity connected to a load port, or a position between a load port and a system cavity. In the present invention, the term "feeding track" generally refers to a track for transporting pods to a system cavity, for example, a horizontal conveyor belt or a vertical elevator leading to an exposed cavity.

[0025] The term "removal zone" as described in the present invention refers to an area at the bottom of the pod, and this area is an area that does not interfere with the operation of other mechanisms at the bottom of the pod (e.g., dynamic coupling slots or dynamic coupling pins).

[0026] The terms “rotary seat” and “rotary disk” as described in the present invention refer to two different implementation elements of an orientation assembly as illustrated in FIGS. 4 and FIGS. 6, respectively. More specifically, the “rotary seat” and the “rotary disk” are individually rotatably connected to the bottom of the pod by different means.

[0027] The oriented semiconductor container of the present invention comprises a pod and an orientation assembly (132) (described in detail below) disposed on the bottom of the pod. The orientation assembly (132) is configured to cooperate with a drive unit (5) when the pod is placed in a load port. The orientation assembly (132) rotates the pod from a first direction to a second direction according to a drive stroke provided by the drive unit (5).

[0028] Referring to FIGS. 1 and FIGS. 2, a perspective view and an exploded view of an isosceles rectangular reticle pod of the present invention are respectively illustrated. The present invention provides an oriented semiconductor container suitable for an isosceles rectangular reticle pod (100).

[0029] An anisotropic reticle pod (100) comprises an outer pod (10) and an inner pod (20) that is accommodated in the outer pod (10). The outer pod (10) comprises a door (13) and an outer lid (11), which can interlock to form a receiving space that accommodates the inner pod (20). The outer lid (11) has a handle (113) so that it can be easily gripped or moved. The inner pod (20) comprises a base (23) and an upper lid (21), which can interlock to form a receiving space that accommodates the reticle (R). Anisotropic rectangular reticle pod (100) has a long side and a short side.

[0030] In the present invention, the orientation assembly (132) may be placed on the bottom of the outer pod (10) and / or inner pod (20), for example, on the door (13) and / or base (23). In the drawing below, an example is illustrated in which the orientation assembly (132) is placed on the door (13); however, the orientation assembly (132) is not limited to being placed only on the door (13).

[0031] Referring to FIGS. 3a through 3c, a schematic diagram of the rotation process of an oriented semiconductor container according to an embodiment of the present invention is illustrated. Depending on the loading movement stroke of the semiconductor container, a driving unit (5) located at or near the loading position of the load port (7) provides a driving stroke to the semiconductor container to rotate the semiconductor container. In this embodiment, as the oriented semiconductor container moves from the load port (7) to the cavity (9), the driving unit (5) comes into contact with the semiconductor container and, accordingly, rotates the semiconductor container from a first direction to a second direction. In this embodiment, the load port (7) is configured to transport the semiconductor container and the semiconductor container faces the opening of the load port (7) and the cavity (9) next to the long side of the semiconductor container. In another embodiment, the load port (7) may also be configured so that the semiconductor container faces the opening of the load port (7) and the cavity (9) next to the short side of the semiconductor container.

[0032] Referring to FIG. 4, a cross-sectional view of a door (13) according to one embodiment of the present invention is shown. An orientation assembly (132) is positioned at the bottom of the door (13). More specifically, the door (13) includes a sheet (131) and an orientation assembly (132), and a receiving chamber (1311) is provided at the bottom of the sheet (131), and the orientation assembly (132) is positioned in the receiving chamber (1311) to prevent interference with mechanical parts.

[0033] The orientation assembly (132) is rotatably connected to the seat (131). The orientation assembly (132) includes a rotary seat (1321) and a connecting rod (1323). The connecting rod (1323) is formed in the rotary seat (1321) and is fixedly connected to the rotary seat (1321). The orientation assembly (132) further includes a bearing (1325), and the rotary seat (1321) is rotatably connected to the seat (131) by the bearing (1325). More specifically, the bearing (1325) sleeves the connecting rod (1323) and is positioned between the connecting rod (1323) and the seat (131) to allow the rotary seat (1321) to rotate relative to the seat (131). The connecting rod (1323) and the rotary seat (1321) may be formed integrally or may be formed by fixedly joining multiple components. In another embodiment, the orientation assembly (132) may include a damping assembly to prevent excessive rotation between the seat (131) and the rotary seat (1321). In another embodiment, the bearing (1325) may be configured to provide a minimum amount of rotation, for example, 5 degrees or 15 degrees, to control the resolution of rotation.

[0034] The bottom of the non-asymmetric rectangular reticle pod (100) includes at least one set of positioning grooves (1327) that are positioned in cooperation with at least one set of positioning pins of the load port. In this embodiment, the positioning grooves (1327) are placed on the bottom of the rotary sheet (1321) to better cooperate with the positioning pins and increase the stability of the non-asymmetric rectangular reticle pod (100) being transported or loaded.

[0035] Referring again to FIGS. 3a through 3c, the drive unit (5) of the anisotropic rectangular reticle pod (100) and the orientation assembly (132) cooperate to rotate the anisotropic rectangular reticle pod (100) from a first direction to a second direction during transport. Referring to FIG. 3a, a schematic diagram of the anisotropic rectangular reticle pod (100) positioned in a load port (7) is shown. The anisotropic rectangular reticle pod (100) may be placed on a transport base (not shown), and a positioning groove (1327) is positioned in the load port (7) by a positioning pin (not shown) so that the anisotropic rectangular reticle pod (100) can be safely seated or transported. At this time, the long side of the anisotropic rectangular reticle pod (100) is in a first direction facing the opening of the load port (7).

[0036] Referring to FIG. 3b, as the isosceles rectangular reticle pod (100) moves from the load port (7) to the cavity (9), the drive unit (5) located at or near the load port (7) provides a drive stroke to rotate the isosceles rectangular reticle pod (100) according to the movement stroke of the load port. More specifically, as the isosceles rectangular reticle pod (100) moves from the load port (7) to the cavity (9), the positioning groove (1327) of the rotary seat (1321) is fixed to the positioning pin of the load port (7), so the rotary seat (1321) is rotated relative to the seat (131) by the drive unit (5) in contact with the isosceles rectangular reticle pod (100). The rotation angle is 90 degrees or more. In this embodiment, the driving unit (5) is configured to apply a horizontal force when the non-uniform rectangular reticle pod (100) moves along a horizontal line by contacting the non-uniform rectangular reticle pod (100), and the horizontal force and the rotation axis form a torque to drive the non-uniform rectangular reticle pod (100) to rotate. The driving unit (5) may contact any part of the non-uniform rectangular reticle pod (100), for example, an outer pod (10) or an inner pod (20), but is not limited thereto.

[0037] Finally, referring to FIG. 3c, the anisotropic rectangular reticle pod (100) continues to move into the cavity (9), and according to the incoming movement stroke of the anisotropic rectangular reticle pod (100), the driving unit (5) comes into contact with the anisotropic rectangular reticle pod (100) until the anisotropic rectangular reticle pod (100) is positioned in a second direction toward the opening of the load port (7) with the short side of the anisotropic rectangular reticle pod; that is, the orientation operation of rotating the anisotropic rectangular reticle pod (100) from the first direction to the second direction is completed. Thus, the anisotropic rectangular reticle pod (100) can then more easily enter another machine to prevent undesirable effects on process efficiency. More preferably, the driving unit (5) is configured to limit the rotational amplitude of the non-asymmetric rectangular reticle pod (100) to prevent excessive rotation of the non-asymmetric rectangular reticle pod (100) during the process of contacting and pressing the non-asymmetric rectangular reticle pod (100). For example, the driving unit (5) may have a guide surface. In another embodiment, at least one driving unit (5) may be provided; for example, a first driving unit is responsible for the rotation of the non-asymmetric rectangular reticle pod (100), and a second driving unit is responsible for preventing excessive rotation of the non-asymmetric rectangular reticle pod (100).

[0038] Referring to FIGS. 5a to 5c, a schematic diagram of the rotation process of an oriented semiconductor container according to another embodiment of the present invention is illustrated. This embodiment is identical to the previously described embodiment, and a driving unit (5) located at or near the loading position of the load port (7) according to the loading movement stroke of the semiconductor container provides a driving stroke to the semiconductor container to change the direction of the semiconductor container. The difference is that in this embodiment, as the oriented semiconductor container moves from the load port (7) to the cavity (9), the driving unit (5) comes into contact with the orientation assembly of the semiconductor container and, accordingly, rotates the semiconductor container from the first direction to the second direction.

[0039] Referring to FIG. 6, a cross-sectional view of a door (13) according to one embodiment of the present invention is shown. An orientation assembly (132) is positioned at the bottom of the door (13). More specifically, the door (13) includes a seat (131) and an orientation assembly (132), and a receiving chamber (1311) is provided at the bottom of the seat (131), and the orientation assembly (132) is positioned in the receiving chamber (1311) to rotatably connect the orientation assembly (132) and the seat (131).

[0040] The orientation assembly (132) includes a rotary disk (1321) and a connecting rod (1323) coupled to the rotary disk (1321). The connecting rod (1323) extends downward from the center of the receiving chamber (1311) of the seat (131) and penetrates the rotary disk (1321), causing the connecting rod (1323) to come into contact with the driving unit (5) to rotate the non-uniform rectangular reticle pod (100). The orientation assembly (132) further includes a bearing (1325) that sleeves the connecting rod (1323) and is positioned between the connecting rod (1323) and the rotary disk (1321) to allow the rotary disk (1321) to rotate relative to the seat (131). A gear disc (13231) is provided at the opposite end of the seat (131) of the connecting rod (1323) to cooperate with the driving unit (5). The connecting rod (1323) and the seat (131) may be formed as a single unit or may be formed by a fixed connection of multiple components.

[0041] The bottom of the non-construent rectangular reticle pod (100) includes at least one set of positioning grooves (1327) that are positioned in cooperation with at least one set of positioning pins of the load port (7), and a gear disc (13231) is placed in the removal zone of the positioning grooves (1327) to prevent interference with other structures. In this embodiment, the positioning grooves (1327) are placed on the bottom of a rotary disc (1321) to better cooperate with the positioning pins and increase the stability of the non-construent rectangular reticle pod (100) being transported or brought in.

[0042] Referring to FIGS. 5a through 5c, the drive unit (5) of the anisotropic rectangular reticle pod (100) and the orientation assembly (132) cooperate to rotate the anisotropic rectangular reticle pod (100) from a first direction to a second direction during transport. First, referring to FIG. 5a, a schematic diagram of the anisotropic rectangular reticle pod (100) positioned in a load port (7) is shown. The anisotropic rectangular reticle pod (100) is placed on a transport base (not shown), and a positioning groove (1327) is positioned by a positioning pin (not shown) of the transport base so that the anisotropic rectangular reticle pod (100) is safely seated or transported. At this time, the anisotropic rectangular reticle pod (100) has its long side facing the opening of the load port (7) in the first direction.

[0043] Referring to FIG. 5b, as the isomorphic rectangular reticle pod (100) moves from the load port (7) to the cavity (9), the drive unit (5) located at or near the load port (7) provides a drive stroke to rotate the isomorphic rectangular reticle pod (100) according to the incoming movement stroke. More specifically, as the isomorphic rectangular reticle pod (100) moves from the load port (7) to the cavity (9), the positioning groove (1327) of the rotary disk (1321) is fixed to the positioning pin of the load port (7), so that the seat (131) is driven to rotate relative to the rotary disk (1321) by the drive unit (5) in contact with the isomorphic rectangular reticle pod (100). In this embodiment, the driving unit (5) is a rack, and the gear disk (13231) and the rack are engaged with each other, and the gear disk (13231) rotates the non-constructural rectangular reticle pod (100) from a first direction to a second direction according to the driving stroke provided by the rack. The rotation angle is 90 degrees or more.

[0044] Finally, referring to FIG. 5c, the non-asymmetric rectangular reticle pod (100) continues to move toward the cavity (9), at which point the drive unit (5) does not come into contact with the non-asymmetric rectangular reticle pod (100). Depending on the incoming movement stroke of the non-asymmetric rectangular reticle pod (100), the non-asymmetric rectangular reticle pod (100) is eventually positioned in a second direction with its short side facing the opening of the load port (7), thereby completing the change of orientation of the non-asymmetric rectangular reticle pod (100). Thus, the non-asymmetric rectangular reticle pod (100) can then more easily enter another machine to prevent undesirable effects on process efficiency.

[0045] The present invention further provides an orientation system for a semiconductor container suitable for an anisotropic rectangular reticle pod (100). The orientation system for a semiconductor container comprises: a receiving track configured to receive and transport an anisotropic rectangular reticle pod (100) from a load port (7); an orientation assembly (132) disposed on the bottom of the anisotropic rectangular reticle pod (100); and a driving unit (5) disposed on the load port (7) or the receiving track. Through cooperation between the orientation assembly (132) and the driving unit (5), the orientation assembly (132) rotates the anisotropic rectangular reticle pod (100) from a first direction to a second direction according to a driving stroke provided by the driving unit (5).

[0046] More specifically, referring to FIGS. 7a through 7d, a schematic diagram of the steps of unloading an isosceles rectangular reticle pod (100) from a load port of the present invention and moving it toward a track is illustrated. First, referring to FIG. 7a, when the isosceles rectangular reticle pod (100) is transferred onto the load port (7), the isosceles rectangular reticle pod (100) is transferred to the load port base (71). At this time, the outer lead (11) is in a firmly fixed state.

[0047] Referring to FIGS. 7b and 7c, the load port base (71) is lowered so that the outer lid (11) of the reticle pod is removed, and the inner pod (20) and the door (13) are lowered together with the load port base (71) to enter the elevator module, and the door (13) presses against the elevator base (73), and the load port base (71) is removed downward to transport the door (13) to the elevator base (73).

[0048] Referring to FIG. 7d, the elevator base (73) carries the inner pod (20) and the door (13), at which point the non-uniform rectangular reticle pod (100) is in a first direction with its long side facing the opening of the load port (7). Next, the non-uniform rectangular reticle pod (100) passes through the track and enters the machine cavity (8).

[0049] Referring to FIGS. 8a through 8d, a schematic diagram of the step of changing the orientation of the orientation system for a semiconductor container in the loading track of the present invention is illustrated. First, referring to FIG. 8a, a plan view of FIG. 7d is illustrated. The elevator base (73) carries the inner pod (20) and the door (13) and moves along the +Y direction within the load port (7), and when it reaches the machine cavity (8), it moves further along the +X direction.

[0050] Referring to FIGS. 8b and 8c, as the isomorphic rectangular reticle pod (100) moves along the +X direction, a drive unit (5) located on the receiving track changes direction in cooperation with an orientation assembly (132). The orientation assembly (132) is placed on the bottom of the door (13). The seat (131) is driven to rotate relative to a rotary disk (1321) by a drive unit (5) in contact with the orientation assembly (132). In this embodiment, the implementation form of FIG. 6 is used. That is, the drive unit (5) is a rack, and the orientation assembly (132) includes a gear disk (13231), and the gear disk (13231) rotates the isomorphic rectangular reticle pod (100) from a first direction to a second direction according to the drive stroke provided by the rack.

[0051] In this embodiment, the driving unit (5) is positioned on the loading track as an example; however, the invention is not limited to this example. The driving unit (5) is positioned at or near the loading location of the load port (7) so that the direction can be changed as the non-isospherical rectangular reticle pod (100) moves along the +Y direction.

[0052] Finally, referring to Fig. 8d, when the orientation assembly (132) is separated from contact with the driving unit (5) according to the incoming movement stroke of the anomalous rectangular reticle pod (100), the anomalous rectangular reticle pod (100) is positioned in a second direction with its short side facing the opening of the exposure device (not shown) into which it intends to enter, and the change of direction is completed.

[0053] It should be noted that although the drawing of the orientation system for a semiconductor container in this embodiment takes the implementation form of FIG. 6 as an example, this does not necessarily mean that the orientation system is suitable only for the implementation form of FIG. 6 and is likewise suitable for the implementation form of FIG. 4. In addition, although the orientation assembly (132) in this embodiment is exemplified as being placed on the door (13), the orientation assembly (132) is not limited to being placed only on the door (13) and may also be placed on the base (23) of the inner pod (20). For example, in the orientation system for a semiconductor container in this embodiment, the orientation assembly (132) may be placed on the base (23) of the inner pod (20), and as shown in FIG. 3a to 3c, the driving unit (5) comes into contact with the inner pod (20) to change the direction of the inner pod (20).

[0054] By using the oriented semiconductor container and the orientation system for the semiconductor container according to an embodiment of the present invention, the pod can be rotated in the same direction as the movement stroke of the incoming pod without additionally transporting the pod to any specific orientation machine. Therefore, the problem of inability to transport between different machines can be solved without causing an undesirable effect on process efficiency. Explanation of the symbols

[0055] 100: Asymmetrical reticle pod 5: Driving unit 7: Load Port 8: Machine Cavity 71: Load Port Base 73: Elevator Base 9: Cavity 10: External pod 11: External Lead 13: Door 131: Sheet 1311: Receiving chamber 20: Interior Ford 132: Orientation Assembly 1321: Rotary seat 1323: Connecting rod 13231: Gear Disc 1325: Bearing 1327: Position setting groove 21: Upper lead 23: Bass

Claims

Claim 1 An oriented semiconductor container suitable for an isosceles rectangular reticle pod, comprising: a pod; and an oriented assembly disposed on the bottom of the pod, wherein the oriented assembly is configured to cooperate with a driving unit when the pod is placed on a load port, and the oriented assembly rotates the pod from a first direction to a second direction according to a driving stroke provided by the driving unit. Claim 2 An oriented semiconductor container according to claim 1, wherein the orientation assembly includes a rotary sheet, and the driving unit is located at or near the loading position of the load port, so that when the pod is located at the loading position, the pod comes into contact with the driving unit and rotates in the same direction as the loading movement stroke of the pod. Claim 3 An oriented semiconductor container according to claim 1, wherein the pod comprises an outer pod for receiving an inner pod, the inner pod is intended for holding an isosceles rectangular reticle, the outer pod comprises a door composed of an orientation assembly, and when the outer pod rotates in cooperation with the drive unit of the load port, the inner pod received in the outer pod can rotate together with the orientation assembly to change orientation. Claim 4 An oriented semiconductor container according to claim 1, wherein the pod comprises an outer pod for receiving an inner pod, the inner pod comprises a base composed of an orientation assembly, and when the base rotates in cooperation with a drive part of a load port, an isosceles rectangular reticle placed in the inner pod rotates together with respect to the orientation assembly to change orientation. Claim 5 In paragraph 2, the rotary seat is an oriented semiconductor container rotatably connected to the bottom of the pod by a bearing. Claim 6 An oriented semiconductor container according to claim 1, wherein the bottom of the pod is composed of at least one positioning groove that cooperates with and is positioned by at least one set of positioning pins of the load port. Claim 7 An oriented semiconductor container according to claim 1, wherein the rotation angle from the first direction to the second direction is 90 degrees or more. Claim 8 An oriented semiconductor container according to claim 1, wherein the orientation assembly includes a gear disk, the driving unit is a rack, the gear disk and the rack mesh with each other, and the gear disk rotates the pod from a first direction to a second direction according to the driving stroke provided by the rack. Claim 9 An orientation system for a semiconductor container suitable for an anisotropic rectangular reticle pod, comprising: a receiving track configured to receive and transport an anisotropic rectangular reticle pod from a load port; an orientation assembly disposed on the bottom of the anisotropic rectangular reticle pod; and a driving unit disposed on the load port or the receiving track, wherein the orientation assembly cooperates with the driving unit to rotate the anisotropic rectangular reticle pod from a first direction to a second direction according to a driving stroke provided by the driving unit. Claim 10 An orientation system for a semiconductor container according to claim 9, further comprising an elevator base configured to transport an isosceles rectangular reticle pod on a load port. Claim 11 An orientation system for a semiconductor container according to claim 9, wherein the orientation assembly includes a rotary sheet, and the driving unit is positioned at the loading position of the load port so that an anomalous rectangular reticle pod contacts the driving unit and, when the anomalous rectangular reticle pod is positioned at the loading position, the anomalous rectangular reticle pod rotates in the same direction as the loading movement stroke of the anomalous rectangular reticle pod. Claim 12 An orientation system for a semiconductor container according to claim 9, wherein the orientation assembly includes a rotary sheet, and the driving unit is located on an intake track leading to an exposure device, such that when the non-asymmetric rectangular reticle pod or the rotary sheet comes into contact with the driving unit, the non-asymmetric rectangular reticle pod or the rotary sheet rotates in the same direction as the intake movement stroke of the non-asymmetric rectangular reticle pod. Claim 13 An orientation system for a semiconductor container according to claim 9, wherein the rotation angle from the first direction to the second direction is 90 degrees or more. Claim 14 An orientation system for a semiconductor container according to claim 9, wherein the orientation assembly comprises a connecting rod and a rotary disk coupled to the connecting rod, and the connecting rod is connected to the bottom of an isosceles rectangular reticle pod and configured to rotate the isosceles rectangular reticle pod by contacting a driving part. Claim 15 An orientation system for a semiconductor container according to claim 9, wherein the orientation assembly is a gear disk, the driving unit is a rack, the gear disk and the rack mesh with each other, and the gear disk rotates an isosceles rectangular reticle pod from a first direction to a second direction according to the driving stroke of the rack.

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