Coating apparatus and article manufacturing method

Abstract

A coating device for applying a droplet to a substrate comprises a plurality of heads configured to discharge a droplet, a conveying mechanism configured to convey the plurality of heads in a first direction such that one of the plurality of heads is positioned in a first region and another of the plurality of heads is positioned in a second region, a moving mechanism configured to move one of the plurality of heads between a first region and a coating region, and an injection mechanism configured to inject the substrate in a first direction so that a droplet is applied to the substrate by the head positioned in the coating region among the plurality of heads, wherein at least a portion of the second region is positioned on the injection mechanism.

Description

Technology Field

[0001] The present disclosure relates to a coating apparatus and a method for manufacturing an article. Background Technology

[0002] Japanese Patent Publication No. 2006-187758 discloses a droplet dispensing device for drawing droplets on a workpiece, such as a glass substrate. The droplet dispensing device includes a droplet dispensing section, two maintenance sections, a table, a first moving section, a second moving section, and a plurality of carriages. The first moving section includes a base extending in the X direction, a slide member driven in the X direction by a linear motor on the base, and a table driven in the X direction by a linear motor on the slide member, wherein the workpiece is held by the table. The first moving section has an overall shape that is long in the X direction. The second moving section extends in the Y direction orthogonal to the first moving section and moves each carriage along the Y direction.

[0003] As described in Japanese Patent Publication No. 2006-187758, in a configuration where a second moving part extending in the Y direction is positioned on a first moving part extending in the X direction, the space above the first moving part cannot be effectively used.

[0004] The present disclosure provides a coating device having a configuration advantageous for effectively using space.

[0005] The present disclosure provides a coating device for applying a droplet to a substrate, wherein the device comprises: a plurality of heads configured to discharge a droplet; a conveying mechanism configured to convey the plurality of heads in a first direction such that one of the plurality of heads is positioned in a first region and another of the plurality of heads is positioned in a second region; a moving mechanism configured to move one of the plurality of heads between the first region and the coating region; and an injection mechanism configured to inject the substrate in a first direction so that a droplet is applied to the substrate by the head positioned in the coating region among the plurality of heads, wherein at least a portion of the second region is positioned on the injection mechanism.

[0006] Further features of the present disclosure will become clear from the following description of embodiments with reference to the accompanying drawings. The following description of embodiments is given by way of example. Brief explanation of the drawing

[0007] FIG. 1 is a perspective view schematically illustrating the configuration of a coating device according to the first to fourth embodiments. FIG. 2 is a cross-sectional view schematically illustrating the configuration of a coating device according to a first embodiment. FIG. 3 is a cross-sectional view schematically illustrating the configuration of a coating device according to a first embodiment. FIG. 4 is a cross-sectional view schematically illustrating the configuration of a coating device according to a first embodiment. FIG. 5 is a cross-sectional view schematically illustrating the configuration of a coating device according to a first embodiment. FIG. 6 is a cross-sectional view schematically illustrating the configuration of a coating device according to a first embodiment. FIG. 7 is a cross-sectional view schematically illustrating the configuration of a coating device according to a first embodiment. FIG. 8 is a cross-sectional view schematically illustrating the configuration of a coating device according to a first embodiment. FIG. 9 is a cross-sectional view schematically illustrating the configuration of a coating device according to a first embodiment. FIG. 10 is a cross-sectional view schematically illustrating the configuration of a coating device according to a second embodiment. FIG. 11 is a cross-sectional view schematically illustrating the configuration of a coating device according to a second embodiment. FIG. 12 is a cross-sectional view schematically illustrating the configuration of a coating device according to a second embodiment. FIG. 13 is a cross-sectional view schematically illustrating the configuration of a coating device according to a second embodiment. FIG. 14 is a cross-sectional view schematically illustrating the configuration of a coating device according to a second embodiment. FIG. 15 is a cross-sectional view schematically illustrating the configuration of a coating device according to a second embodiment. FIG. 16 is a cross-sectional view schematically illustrating the configuration of a coating device according to a second embodiment. FIG. 17 is a cross-sectional view schematically illustrating the configuration of a coating device according to a second embodiment. FIG. 18 is a cross-sectional view schematically illustrating the configuration of a coating device according to a third embodiment. FIG. 19 is a cross-sectional view schematically illustrating the configuration of a coating device according to a third embodiment. FIG. 20 is a cross-sectional view schematically illustrating the configuration of a coating device according to a fourth embodiment. FIG. 21 is a cross-sectional view schematically illustrating the configuration of a coating device according to a fourth embodiment. FIG. 22 is a cross-sectional view schematically illustrating the configuration of a coating device according to a fourth embodiment. The attached drawings included in and constituting part of this specification serve to illustrate embodiments of the present disclosure and to explain the principles of the embodiments together with the description. Specific details for implementing the invention

[0008] Hereinafter, embodiments will be described in detail with reference to the attached drawings. It should be noted that the following embodiments are not intended to limit the scope of the claims. Although many features are described in the embodiments, not all of these features are required, and many of these features may be appropriately combined. Additionally, in the attached drawings, the same or similar components are assigned the same reference number, and redundant descriptions thereof are omitted.

[0009] FIG. 1 is a perspective view schematically illustrating the configuration of a coating device (100) according to a first embodiment. FIG. 2 to 9 are cross-sectional views schematically illustrating the configuration and operation of a coating device (100) according to a first embodiment. In this specification and drawings, the configuration of each component, the mutual positional relationship between components, and the direction of movement of each component will be described under an XYZ coordinate system. The XY plane in the XYZ coordinate system is parallel to the horizontal plane. The directions parallel to the X-axis, Y-axis, and Z-axis of the XYZ coordinate system are the X-axis direction, the Y-axis direction, and the Z-axis direction. The X-axis direction includes the positive and negative directions of the X-axis, the Y-axis direction includes the positive and negative directions of the Y-axis, and the Z-axis direction includes the positive and negative directions of the Z-axis. In the following description, the first direction is the Y-axis direction, and the second direction is the X-axis direction.

[0010] A coating device (100) applies a droplet to a substrate (1). Applying a droplet to a substrate (1) means placing the droplet at a target location or target area of ​​the substrate (1). The droplet may consist of a liquid containing an organic material. The droplet is sometimes called ink. The organic material is a material used to form an organic film of, for example, an organic EL (OLED) display. The organic film may be, for example, one of a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, and an electron injection layer. A manufacturing process for an organic EL display may include the step of forming an organic film, such as a hole injection layer, a hole transport layer, a light-emitting layer, an electron transport layer, or an electron injection layer, on a substrate.

[0011] The coating device (100) includes a plurality of heads (111a, 111b) configured to apply droplets. In the following description, it should be noted that matters common to the heads (111a, 111b) will be described as heads (111). Additionally, if heads (111a and 111b) are described separately, they will be described as heads (111a) and heads (111b). In the coating device (100) according to the first embodiment, when a coating process is being performed to apply droplets to a substrate (1) using one of the heads (111), maintenance can be performed on another head (111) among the heads (111). Accordingly, according to the coating device (100) of the first embodiment, it is possible to suppress the idle time for performing maintenance and to operate the coating device (100) with high operational efficiency.

[0012] The coating device (100) may include a conveying mechanism (120) that conveys a plurality of heads (111) in a first direction (Y-axis direction) such that one of the plurality of heads (111) is placed in a first area (R1) and another of the plurality of heads (111) is placed in a second area (R2). The coating device (100) may also include a moving mechanism (130) that moves one of the plurality of heads (111) between the first area (R1) and the coating area (R3). The coating device (100) may also include an injection mechanism (140) that injects the substrate (1) in a first direction (Y-axis direction) so that a droplet is applied to the substrate (1) (each target location of the substrate) by the head (111) placed in the coating area (R3) among the plurality of heads (111). At least a portion of the second region (R2) may be positioned over the injection mechanism (140). This configuration is advantageous for effectively utilizing space. The moving mechanism (130) is, for example, an elevating mechanism. The first region (R1) is positioned, for example, over the coating region (R3) (in the positive direction of the Z-axis).

[0013] The injection mechanism (140) may include a stage (142) for holding a substrate (1), and a driving mechanism (144) for moving the stage (142) along a movement path (MP) parallel to a first direction (Y-axis direction). In an orthogonal projection (plan view) onto an XY plane, the first region (R1) and the second region (R2) are spaced apart in the first direction (Y-axis direction). It is preferable that the size of the plurality of heads (111) in the second direction (X-axis direction) orthogonal to the first direction (Y-axis direction) is larger than the size of the substrate (1) held by the injection mechanism (140) in the second direction. This configuration is advantageous for reducing the time required to apply droplets to multiple target locations on the substrate (1).

[0014] In the second area (R2), maintenance may be performed on the head (111) among the plurality of heads (111) that is placed in the second area (R2). Maintenance may include, for example, at least one of cleaning, inspection, and replacement. The coating device (100) may include a cleaning unit (161) that cleans the head (111) among the plurality of heads (111) that is placed in the second area (R2). The coating device (100) may include an inspection unit (162) that inspects the head (111) among the plurality of heads (111) that is placed in the second area (R2).

[0015] FIG. 2 schematically illustrates a state in which cleaning is performed by a cleaning unit (161) on a head (111a) positioned in a second region (R2) among a plurality of heads (111). Cleaning by the cleaning unit (161) may include aspirating liquid from a plurality of nozzles of the head (111). Alternatively, cleaning by the cleaning unit (161) may include removing foreign matter attached to the head end surface and / or wiping the head end surface by supplying cleaning liquid to the head end surface using a plurality of nozzles. In the coating device (100), when the cleaning unit (161) cleans the head (111a), a droplet may be applied to the substrate (1) using the head (111b). FIG. 3 schematically illustrates a state in which an inspection is performed by an inspection unit (162) on a head (111a) positioned in a second region (R2) among a plurality of heads (111). In the coating device (100), when the inspection unit (162) inspects the head (111a), a droplet can be applied to the substrate (1) using the head (111b).

[0016] The cleaning unit (161) and the inspection unit (162) may form a maintenance unit (152) that performs maintenance on the head (111) placed in the second region (R2) among the plurality of heads (111). The maintenance unit (152) may be formed by at least one maintenance element of the cleaning unit (161) and the inspection unit (162), may be replaced by another maintenance element, or may have other maintenance elements added.

[0017] The coating device (100) may include a second conveying mechanism (150) that moves the maintenance unit (152) in a first direction (Y-axis direction). The second area (R2) may include a first section (Z1) and a second section (Z2). In this case, the first area (R1) may be positioned between the first section (Z1) and the second section (Z2). The first section (Z1) and the second section (Z2) are spaced apart in the first direction (Y-axis direction). The second conveying mechanism (150) may be configured to allow the maintenance unit (152) to be positioned in either the first section (Z1) or the second section (Z2).

[0018] The inspection unit (162) can inspect, for example, whether a droplet is discharged from the nozzle of the head (111). The inspection unit (162) may include a measuring unit (163) for measuring the characteristics of the head (111) placed in a second region (R2) within a plurality of heads (111). The measuring unit (163) may measure, for example, at least one of the discharge velocity of the droplet from the nozzle of the head (111), the volume of the droplet from the nozzle of the head (111), the discharge angle of the droplet from the nozzle of the head (111), and the landing position of the droplet from the nozzle of the head (111). The measuring unit (163) is useful for reducing variations in coating characteristics caused by individual differences in the head (111) and temporal changes in the characteristics of the head (111). The measuring unit (163) may include, for example, at least one of a camera, an interferometer, and a phase Doppler measuring device. The coating device (100) may further include a processor (190) for generating correction data to control the operation of a head (111) for applying a droplet to a substrate (1) of a coating area (R3) measured by the measuring unit (163), based on the measurement result by the measuring unit (163).

[0019] The processor (190) may be formed by, for example, a PLD (Programmable Logic Device) such as an FPGA (Field Programmable Gate Array), an ASIC (Application Specific Integrated Circuit), a general-purpose or dedicated computer with a program installed, or a combination of some or all of these. The processor (190) may be formed as a controller that controls the operation of the coating device (100) by controlling the components of the coating device (100), or it may be provided independently of the controller.

[0020] The coating device (100) may further include a second measuring unit (171) for measuring a head (111) that is maintained by a moving mechanism (130) among a plurality of heads (111). The processor (190) may generate correction data for controlling the operation of the head (111) that applies a droplet to the substrate (1) in the coating area (R3) based on the measurement results by the measuring unit (163) and the second measuring unit (171). The second measuring unit (171) may measure, for example, at least one of the position and orientation of the head (111) maintained by the moving mechanism (130). This is useful for reducing variations in coating characteristics caused by positioning errors of the head (111) that exists in a state where the head (111) placed in the first area (R1) by the conveying mechanism (120) is maintained by the moving mechanism (130).

[0021] A plurality of heads (111), a return mechanism (120), a moving mechanism (130), an injection mechanism (140), a second return mechanism (150), and a maintenance unit (152) may be disposed in the internal space of the chamber (180). The internal space of the chamber (180) may be divided into a first layer and a second layer by a separation panel (185) having an opening (OP) configured to place a selected head (111) within a plurality of heads (111) in a first area (R1) and a coating area (R3). An injection mechanism (140) may be disposed in the first layer. A return mechanism (120), a moving mechanism (130), an injection mechanism (140), a second return mechanism (150), and a maintenance unit (152) may be disposed in the second layer. In the chamber (180), a gate (183) configured to transport a substrate (1) from the outer space of the chamber (180) to the inner space, or to transport a substrate (1) from the inner space to the outer space. A substrate (1) processed by a prior process is transported from the gate (183), and the transfer of the substrate (1) to the scanning mechanism (140) can be performed from the gate (183) side of the first layer. Additionally, the position of the substrate (1) can be measured by a measuring device (not shown), and the mutual positional relationship between the substrate (1) and the scanning mechanism (140) can be adjusted. Thus, space is required in the Y-axis direction of the first layer, and arranging the transport mechanism (120) to extend in the Y direction is useful for utilizing space.

[0022] The coating device (100) may be configured to allow the head (111) placed in the second region (R2) among the plurality of heads (111) to be exchanged with another head (e.g., a new head or a recycled head). The exchange of the head (111) may be performed by a robot (not shown) or an operator. The chamber (180) is provided with an access part (181, 182) (e.g., a door) used to access the internal space from the external space of the chamber (180), and the head (111) may be exchanged with another head through the access part (181, 182).

[0023] The operation of replacing the head (111b) used to apply a droplet to the substrate (1) with the head (111a) will be described exemplarily below. First, as schematically illustrated in FIG. 4, the head (111b) placed in the coating area (R3) can be moved to the first area (R1) by a moving mechanism (130). Next, as schematically illustrated in FIG. 5, the head (111b) placed in the first area (R1) can be moved to the second section (Z2) of the second area (R2) by a return mechanism (120). Additionally, the maintenance part (152) placed in the first section (Z1) of the second area (R2) can be moved to the second section (Z2) of the second area (R2) by a second return mechanism (150). Additionally, the head (111a) placed in the first section (Z1) of the second area (R2) can be moved to the first area (R1) by a return mechanism (120). Next, as schematically illustrated in FIG. 6, the head (111a) placed in the first area (R1) can be moved to the coating area (R3) by a moving mechanism (130).

[0024] At this time, the second measuring unit (171) can measure the state of the head (111a) maintained by the moving mechanism (130). Additionally, the processor (190) can generate correction data to control the operation of the head (111a) applying a droplet to the substrate (1) in the coating area (R3) based on the measurement results by the measuring unit (163) and the second measuring unit (171). Thus, the operation of exchanging the head (111b) with the head (111a) can be completed. In this state, the application of a droplet to the substrate (1) can be performed using the head (111a) placed in the coating area (R3).

[0025] Additionally, as schematically illustrated in FIG. 6, cleaning can be performed by the cleaning unit (161) on the head (111b) positioned in the second section (Z2) of the second region (R2) among the plurality of heads (111). Next, as schematically illustrated in FIG. 7, inspection can be performed by the inspection unit (162) on the head (111b) positioned in the second section (Z2) of the second region (R2) among the plurality of heads (111). The cleaning of the head (111b) by the cleaning unit (161) can be performed in parallel with a coating operation in which a droplet is applied to the substrate (1) using the head (111a) positioned in the coating region (R3). Additionally, inspection of the head (111b) by the inspection unit (162) can be performed in parallel with a coating operation in which a droplet is applied to the substrate (1) using the head (111a) placed in the coating area (R3). That is, maintenance of the head (111b) by the maintenance unit (152) can be performed in parallel with a coating operation in which a droplet is applied to the substrate (1) using the head (111a) placed in the coating area (R3).

[0026] FIG. 8 schematically illustrates a state in which a head (111b) positioned in the second section (Z2) of the second region (R2) among a plurality of heads (111) is exchanged through an access part (182). FIG. 9 schematically illustrates a state in which a head (111a) positioned in the first section (Z1) of the second region (R2) among a plurality of heads (111) is exchanged through an access part (181).

[0027] With reference to FIGS. 10 to 17, the configuration and operation of a coating device (100) according to a second embodiment will be described below. Any matters not described regarding the coating device (100) according to the second embodiment may be described in the first embodiment. In the second embodiment, a plurality of heads (111) include a head (111a) and a head (111b). In the second area (R2), a first maintenance unit (152a) configured to perform maintenance of the head (111a) and a second maintenance unit (152b) configured to perform maintenance of the head (111b) may be disposed. More specifically, the first maintenance unit (152a) may be disposed in the first section (Z1) of the second area (R2), and the second maintenance unit (152b) may be disposed in the second section (Z2) of the second area (R2). The first maintenance unit (152a) and the second maintenance unit (152b) may have the same configuration as the maintenance unit (152) of the first embodiment. The first maintenance unit (152a) may be returned by the first return mechanism (150a), and the second maintenance unit (152b) may be returned by the second return mechanism (150b). Note that the coating device (100) may be configured not to include the first return mechanism (150a) and the second return mechanism (150b).

[0028] In the state illustrated in FIG. 10, the process of cleaning the head (111a) by the cleaning unit (161) of the first maintenance unit (152a) can be performed in parallel with the process of applying a droplet to the substrate (1) using the head (111b). In the state illustrated in FIG. 11, the process of inspecting the head (111a) by the inspection unit (162) of the first maintenance unit (152a) can be performed in parallel with the process of applying a droplet to the substrate (1) using the head (111b). This inspection may include measurement by the measuring unit (163) provided to the inspection unit (162) of the first maintenance unit (152a).

[0029] The operation of replacing the head (111b) used to apply a droplet to the substrate (1) with the head (111a) will be described exemplarily below. First, as schematically illustrated in FIG. 12, the head (111b) placed in the coating area (R3) can be moved to the first area (R1) by a moving mechanism (130). Next, as schematically illustrated in FIG. 13, the head (111b) placed in the first area (R1) can be moved to the second section (Z2) of the second area (R2) by a return mechanism (120). Additionally, the head (111a) placed in the first section (Z1) of the second area (R2) can be moved to the first area (R1) by a return mechanism (120). Next, as schematically illustrated in FIG. 14, the head (111a) placed in the first area (R1) can be moved to the coating area (R3) by the moving mechanism (130).

[0030] At this time, the second measuring unit (171) can measure the state of the head (111a) maintained by the moving mechanism (130). Additionally, the processor (190) can generate correction data to control the operation of the head (111a) applying a droplet to the substrate (1) in the coating area (R3) based on the measurement results by the measuring unit (163) and the second measuring unit (171). Thus, the operation of exchanging the head (111b) with the head (111a) can be completed. In this state, the application of a droplet to the substrate (1) can be performed using the head (111a) placed in the coating area (R3).

[0031] Additionally, as schematically illustrated in FIG. 14, cleaning can be performed on the head (111b) placed in the second section (Z2) of the second area (R2) by the cleaning unit (161) of the second maintenance unit (152b). Next, as schematically illustrated in FIG. 15, inspection can be performed on the head (111b) placed in the second section (Z2) of the second area (R2) among the plurality of heads (111) by the inspection unit (162) of the second maintenance unit (152b).

[0032] Cleaning of the head (111b) by the cleaning unit (161) of the second maintenance unit (152b) can be performed in parallel with a coating operation in which a droplet is applied to the substrate (1) using the head (111a) placed in the coating area (R3). In addition, inspection of the head (111b) by the inspection unit (162) of the second maintenance unit (152b) can be performed in parallel with a coating operation in which a droplet is applied to the substrate (1) using the head (111a) placed in the coating area (R3). That is, maintenance of the head (111b) by the maintenance unit (152) can be performed in parallel with a coating operation in which a droplet is applied to the substrate (1) using the head (111a) placed in the coating area (R3).

[0033] FIG. 16 schematically illustrates a state in which a head (111a) placed in the first section (Z1) of the second area (R2) is exchanged through an access part (181). FIG. 17 schematically illustrates a state in which a head (111b) placed in the second section (Z2) of the second area (R2) is exchanged through an access part (182).

[0034] With reference to FIGS. 18 and 19, the configuration and operation of the coating device (100) according to the third embodiment will be described below. Any matters not described regarding the coating device (100) according to the third embodiment may be described in the first or second embodiment. In the third embodiment, the coating area (R3) includes a first position (P1) where the head (111a) is positioned so that a droplet is applied to the substrate (1) by the head (111a), and a second position (P2) where the head (111b) is positioned so that a droplet is applied to the substrate (1) by the head (111b). The first position (P1) and the second position (P2) are different positions, particularly different positions with respect to the first direction (Y-axis direction). The third embodiment is advantageous for reducing the stroke of the conveying mechanism (120).

[0035] With reference to FIGS. 20 to 22, the configuration and operation of a coating device (100) according to a fourth embodiment will be described below. Any matters not described regarding the coating device (100) according to the fourth embodiment may be described in accordance with the descriptions of the first to third embodiments. In the fourth embodiment, the coating device (100) includes three heads (111a, 111b, 111c). Note that the coating device (100) may include four or more heads (111). In the state shown in FIG. 20, the heads (111a, 111b) are placed in the first section (Z1) of the second region (R2), and the head (111c) is placed in the coating region (R3). In the state illustrated in FIG. 21, the head (111a) is placed in the first section (Z1) of the second region (R2), the head (111b) is placed in the coating region (R3), and the head (111c) is placed in the second section (Z2) of the second region (R2). In the state illustrated in FIG. 22, the head (111a) is placed within the coating region (R3), and the heads (111b, 111c) are placed within the second section (Z2) of the second region (R2).

[0036] A method for manufacturing an article, such as an organic EL (OLED) display, using a coating device (100) will be described below by way of example. The method for manufacturing an article may include a coating step of applying a droplet to a substrate (1), such as a glass substrate or a resin substrate, by means of a coating device (100), for example, and a processing step of processing the substrate (1) that has undergone the coating step to obtain an article. The processing step may include, for example, a step of forming a dry film by drying the droplet applied to the substrate (1) in the coating step, and a step of forming an organic film by baking the dry film. The processing step may also include a step of forming an upper electrode on the organic film and a step of forming a sealing film covering the upper electrode. The method for manufacturing an article may also include, prior to the coating step, a step of forming a driving circuit on the substrate (1) and a step of forming a lower electrode on the driving circuit.

[0037] Although the present disclosure has been described with reference to the embodiments, it should be understood that the present disclosure is not limited to the disclosed embodiments. The scope of the subsequent claims shall be interpreted in the broadest manner to include all such variations and equivalent structures and functions.

Claims

Claim 1 A coating device for applying a droplet to a substrate, comprising: a plurality of heads configured to discharge the droplet; a conveying mechanism configured to convey the plurality of heads in a first direction such that one of the plurality of heads is positioned in a first region and another of the plurality of heads is positioned in a second region; a moving mechanism configured to move one of the plurality of heads between the first region and the coating region; and an injection mechanism configured to inject the substrate in the first direction such that the droplet is applied to the substrate by the head positioned in the coating region among the plurality of heads, wherein at least a portion of the second region is positioned above the injection mechanism. Claim 2 A device according to claim 1, wherein the injection mechanism comprises a stage configured to hold the substrate, and a driving mechanism configured to move the stage along a movement path parallel to the first direction, and at least a portion of the second region is positioned on the movement path. Claim 3 A device according to claim 1, wherein, in a plan view, the first region and the second region are spaced apart in the first direction. Claim 4 A device according to claim 1, wherein, while the substrate is maintained by the injection mechanism, the size of a plurality of heads in a second direction orthogonal to the first direction is larger than the size of the substrate in the second direction. Claim 5 A device according to claim 1, wherein in the second region, maintenance is performed on the head among the plurality of heads that is positioned in the second region. Claim 6 In claim 5, the device further comprises a cleaning unit configured to clean the head disposed in the second region among the plurality of heads. Claim 7 In paragraph 5, the device further comprises an inspection unit configured to inspect the head positioned in the second region among the plurality of heads. Claim 8 In claim 7, the device comprises a measuring unit configured to measure the characteristics of the head positioned in the second region among the plurality of heads. Claim 9 In claim 8, the device further comprises a processor configured to generate correction data for controlling the operation of applying the droplet to the substrate within the coating area by the head measured by the measuring unit, based on the result of the measurement by the measuring unit. Claim 10 The apparatus according to claim 8 further comprises: a second measuring unit configured to measure the head maintained by the moving mechanism among the plurality of heads; and a processor configured to generate correction data for controlling the operation of applying the droplet to the substrate within the coating area by the head based on the measurement results by the measuring unit and the second measuring unit. Claim 11 In claim 10, the device wherein the second measuring unit measures at least one of the position and posture of the head maintained by the moving mechanism. Claim 12 In paragraph 5, the device wherein, in the second region, the head among the plurality of heads disposed in the second region can be exchanged. Claim 13 A device according to claim 5, wherein the plurality of heads includes a first head and a second head, and in the second area, a first maintenance unit configured to perform maintenance of the first head and a second maintenance unit configured to perform maintenance of the second head are disposed therein. Claim 14 A device according to claim 1, further comprising: a maintenance unit configured to perform maintenance on the head positioned in the second region among the plurality of heads; and a second conveying mechanism configured to move the maintenance unit in the first direction. Claim 15 A device according to claim 14, wherein the second area comprises a first section and a second section, the first area is positioned between the first section and the second section, and the second conveying mechanism is configured to allow a maintenance section to be positioned in either the first section or the second section. Claim 16 In paragraph 1, the above-mentioned moving mechanism is a lifting mechanism, a device. Claim 17 In paragraph 16, the device wherein the first region is located at a position above the coating region. Claim 18 An apparatus according to claim 1, wherein the plurality of heads includes a first head and a second head, and the coating area includes a first position in which the first head is positioned so that the droplet is applied to the substrate by the first head, and a second position in which the second head is positioned so that the droplet is applied to the substrate by the second head, wherein the first position and the second position are different. Claim 19 A method for manufacturing an article, comprising: a step of applying a droplet to a substrate by a coating device specified in any one of claims 1 to 18; and a step of processing the substrate that has undergone the application step to obtain an article.

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