Positioning Jig for Optical Diagnosis of Triple Thermal Plasma and Triple Thermal Plasma Reactor Comprising the Same

Abstract

The present invention relates to a method for fixing an optical lens to a plasma reactor to measure the optical characteristics of a plasma jet formed in the reaction space of a plasma reactor, and comprises a triple plasma optical diagnostic position adjustment jig device, a reactor body having a reaction space formed therein and a viewing window formed to which the triple plasma optical diagnostic position adjustment jig device can be fixed, and a triple torch unit mounted on the reactor body to spray three plasma jets into the reaction space from different directions. The optical lens coupled to the position adjustment jig device for triple plasma optical diagnosis measures the positional light emission characteristics of the plasma jet injected into the reaction space. Therefore, by configuring the jig device to be precisely adjustable so that light emitted from the plasma jet inside the plasma reactor can be precisely collected through an optical lens, it has the effect of improving the optical diagnostic accuracy of the plasma, the reliability of experimental repeatability, and ease of operation.

Description

Technology Field

[0001] The present invention relates to a position control jig device for triple plasma optical diagnosis and a triple thermal plasma reactor including the same. Background Technology

[0002] In thermal plasma systems, various physical and chemical reactions occur under conditions of high temperatures and reactive gases. Analyzing the optical properties of the plasma jet is essential to evaluate the performance of such systems and optimize operating conditions.

[0003] Generally, optical emission spectroscopy (OES) is utilized, and for this purpose, precise positional control of optical lenses is required to effectively collect light emitted from the plasma and transmit it to an analysis device.

[0004] Previously, optical lenses, such as optical fibers or collimating lenses, were installed on temporary supports or fixtures, or jigs unsuitable for the system structure were used. These jigs resulted in misalignment, vibration, and bending of the optical lenses. This led to distortion of diagnostic signals and reduced measurement reproducibility. In particular, optical fibers were sensitive to external shocks due to their structural flexibility, easily bending even under minimal force.

[0005] In addition, for triple thermal plasma systems, precise diagnosis is required at the 'triple point' where the three plasma jets converge; in such environments, a jig is necessary to precisely adjust and fix the horizontal and vertical positions of the sensor. Prior art literature

[0006] Republic of Korea Published Patent No. 10-2024-0139322 (Published Sep. 23, 2024) Republic of Korea Registered Patent No. 10-2747365 (Published Dec. 26, 2024) The problem to be solved

[0007] The present invention provides a jig device that can be adjusted in vertical and horizontal directions and precisely fixes an optical lens to a viewing window of a reactor body to measure the light emission characteristics of a plasma jet formed in the reaction space of a plasma reactor. means of solving the problem

[0008] A position adjustment jig device for triple plasma optical diagnosis according to one embodiment of the present invention is for fixing an optical lens to a plasma reactor to measure the optical characteristics of a plasma jet formed in the reaction space of a plasma reactor, and comprises a mounting part that can be fixed to a viewing window of the plasma reactor, a main body part that is coupled to the mounting part so as to be linearly movable and can move closer to or further away from the viewing window depending on the direction of movement, and a lens support part that is coupled to the main body part so as to be linearly movable and can move closer to or further away from the center of the viewing window depending on the direction of movement and to which the optical lens can be attached.

[0009] The above-described triple plasma optical diagnostic position adjustment jig device may further include a scale portion arranged along the longitudinal direction of the main body portion and measuring the position of the lens support portion to which the optical lens is coupled.

[0010] The above-mentioned mounting portion is arranged along the circumferential direction of the above-mentioned viewing window, and both ends of the above-mentioned main body portion can be connected to the arranged mounting portion.

[0011] The above mounting part may include a screw part that can be fastened around the viewing window, a coupling part that is connected to the screw part and has a flat surface and can be coupled to a hand tool, and a slide part that is connected to the coupling part and coupled so that the main body part can move in a straight line.

[0012] The lens support may include a support body that penetrates the main body and can move linearly along the longitudinal direction of the main body, has a through-hole, and can be coupled to the optical lens, and a nut member coupled to the support body to fix the support body to the main body.

[0013] The above triple plasma optical diagnostic position adjustment jig device may further include a holder part that is coupled to the mounting part, faces the main body part, and supports a cable connected to the optical lens.

[0014] The above-described triple plasma optical diagnostic position adjustment jig device may further include a fixing part coupled to the mounting part to limit the main body part from moving in a straight line.

[0015] The above-mentioned fixed part may include a first stopper coupled to the mounting part and in contact with the back surface of the main body part, and a second stopper coupled to the mounting part and in contact with the front surface of the main body part and the first stopper.

[0016] The second stopper may include a stopper block that is coupled to the mounting portion and can move linearly along the mounting portion and has at least a portion cut open, and a lever that is coupled to the stopper block and can tighten the cut portion of the stopper block.

[0017] A triple thermal plasma reactor according to one embodiment of the present invention comprises a triple plasma optical diagnostic position control jig device, a reactor body having a reaction space formed therein and a viewing window formed therein to which the triple plasma optical diagnostic position control jig device can be fixed, and a triple torch unit mounted on the reactor body to spray three plasma jets into the reaction space from different directions.

[0018] The optical lens coupled to the position adjustment jig device for triple plasma optical diagnosis described above can measure the positional light emission characteristics of the plasma jet injected into the reaction space.

[0019] In the main body, a slide hole is formed along the length direction to which the lens support is coupled so as to be linearly movable, and a through hole may be formed to be coupled to the mounting part.

[0020] A sub-slide hole is formed adjacent to the slide hole in the main body, and an optical fiber is located in the slide hole, and a laser optical fiber can be located in the sub-slide hole. Effects of the invention

[0021] According to an embodiment of the present invention, by configuring a jig device to be precisely adjustable so that light emitted from a plasma jet inside a plasma reactor can be precisely collected through an optical lens, the optical diagnostic accuracy of the plasma, the repeatability of the experiment, and the convenience of operation are improved.

[0022] According to an embodiment of the present invention, through a structure capable of precisely adjusting the vertical and horizontal alignment of an optical lens, the light of a plasma jet inside a plasma reactor can be accurately measured, thereby increasing the optical diagnostic accuracy of a thermal plasma jet.

[0023] According to an embodiment of the present invention, the position of the lens support can be quantitatively verified through the scale, allowing the optical lens to be set to the same position between experimenters or between repeated experiments, thereby improving the reliability of measurement data and experimental repeatability.

[0024] According to an embodiment of the present invention, by arranging the mounting portion along the circumferential direction of the viewing window and connecting the main body portion at both ends, installation flexibility and structural fixing stability for various reactor types can be secured, thereby ensuring the versatility and stability of the jig device.

[0025] According to an embodiment of the present invention, precise fastening to a viewing window is possible through a mounting part composed of a screw part, a coupling part, and a slide part, and the movement of the optical lens is guided in a straight line, thereby increasing the alignment accuracy of the optical lens and improving measurement stability.

[0026] According to an embodiment of the present invention, the lens support is composed of a support body and a nut member, so the position of the optical lens is fixed simply and accurately, and is maintained without displacement during the experiment, thereby improving the convenience of maintenance of the jig device and the precision of light collection.

[0027] According to an embodiment of the present invention, by providing a holder portion that stably supports a cable connected to an optical lens, optical loss and signal distortion caused by bending or vibration of the cable can be prevented, thereby improving the quality and reliability of the measurement signal.

[0028] According to an embodiment of the present invention, the fixing part coupled to the mounting part prevents excessive movement of the main body part, thereby controlling the optical lens to move safely only within a positional range, which has the effect of preventing mechanical damage during the experiment and ensuring stability of the measurement position.

[0029] According to an embodiment of the present invention, by configuring the first and second stoppers, the range of movement of the main body equipped with an optical lens can be precisely limited in both directions, thereby enabling the same position to be maintained during repeated measurements and improving the precision of the experimental results.

[0030] According to an embodiment of the present invention, the second stopper, composed of a stopper block and a tightening lever, can be positioned and fixed without a tool, allowing a field worker to easily set a restricted position, thereby improving user convenience and experimental flexibility.

[0031] According to an embodiment of the present invention, a triple thermal plasma reactor, comprising a position control jig device for triple plasma optical diagnosis, a reactor body, and a triple torch unit, can accurately measure the light emission characteristics of a plasma jet, thereby enabling high-precision diagnosis of plasma reaction characteristics and improving experimental efficiency and analytical reliability.

[0032] According to an embodiment of the present invention, by additionally mounting a laser optical fiber in addition to an optical fiber, the user can directly visually confirm the measurement location. This allows for intuitive identification of the point where the measurement is taking place, and in particular, since the laser point precisely aligns with the triple point of the measurement point, it has the effect of precisely confirming the vertical position. Brief explanation of the drawing

[0033] FIG. 1 is a schematic diagram showing a triple thermal plasma reactor according to one embodiment of the present invention. FIG. 2 is a perspective view showing the triple plasma optical diagnostic position adjustment jig device of FIG. 1. Fig. 3 is a side view of Fig. 2. Fig. 4 is an exploded view of Fig. 2. FIG. 5 is a cross-sectional view showing the state in which a lens support is coupled to the main body. FIG. 6 is a front view showing another embodiment of the main body part of FIG. 2. Specific details for implementing the invention

[0034] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings so that those skilled in the art can easily implement the present invention. However, the present invention may be embodied in various different forms and is not limited to the embodiments described herein. Throughout the specification, similar parts are denoted by the same reference numerals.

[0035] The triple plasma optical diagnostic position control jig device according to an embodiment of the present invention can be applied to a triple thermal plasma reactor, which is an embodiment of the present invention. Therefore, the following description will focus on the plasma reactor to which the triple plasma optical diagnostic position control jig device is applied.

[0036] Then, a plasma reactor according to one embodiment of the present invention will be described with reference to FIGS. 1 to 5.

[0037] First, referring to Figure 1, the plasma reactor (1) according to the present embodiment includes a reactor body (10), a triple toy part (20), and a triple plasma optical diagnostic position adjustment jig device (30), and an optical lens (2) for measuring the light emission characteristics of a plasma jet formed in the reaction space (11) of the plasma reactor (1) is precisely fixed to the viewing window (12) of the reactor body (10) and can be adjusted in the vertical and horizontal directions.

[0038] The reactor body (10) is formed with a sealed structure to accommodate high-temperature, high-energy gas in a plasma state, and a reaction space (11) is formed inside. The reactor body (10) is made of a material with excellent heat resistance and chemical resistance.

[0039] The triple toy unit (20) is positioned on the upper surface of the reactor body (10) and can simultaneously spray plasma jets toward the reaction space (11) from different directions. Each triple toy unit (20) ionizes gases such as argon, nitrogen, and hydrogen through a high voltage or high frequency power source to generate high-temperature plasma and sprays it at high speed.

[0040] The plasma jet formed at this time intersects in the reaction space (11), and a triple point is formed, which is a high-temperature region where thermal energy is concentrated. At the triple point, plasma reactions occur intensively, and this can be utilized to perform various processes such as heat treatment, sintering, surface modification, material synthesis, or plasma analysis of the sample.

[0041] A viewing window (12) is formed around the perimeter of the reactor body (10) to allow observation of the reaction space (11). The viewing window (12) includes a viewing window flange (121) that protrudes from the reactor body (10) and has an internal opening, and a window (122) positioned inside the opening of the viewing window flange (121). The triple point can be observed through the viewing window (12).

[0042] The detailed configuration of the reactor body (10) and the triple toy part (20) is the same as that of a known plasma reactor, so a detailed description is omitted.

[0043] Next, a position adjustment jig device (30) for triple plasma optical diagnosis will be described with further reference to FIGS. 2 to 5.

[0044] The triple plasma optical diagnostic position adjustment jig device (30) according to the present embodiment includes a mounting part (31a, 31b), a main body part (32), and a lens support part (34), and is installed in a viewing window (12) to precisely support an optical lens (2) for verifying a plasma jet injected into a reaction space (11). The triple plasma optical diagnostic position adjustment jig device (30) may further include a fixing part (33), a scale part (35), and a holder part (36).

[0045] The mounting portion (31a, 31b) includes a screw portion (311), a coupling portion (312), and a slide portion (313) and can be fixed to the viewing window (12). The screw portion (311), the coupling portion (312), and the slide portion (313) are integrally formed as a single member.

[0046] A screw thread is formed on the outer circumference of one end of the mounting portion (31a, 31b) to form a screw portion (311).

[0047] The connecting portion (312) is adjacent to the screw portion (311) and a portion of it is formed as a flat surface (312a). The flat surface (312a) is formed by flattening a portion of the circumference of the mounting portions (31a, 31b). The flat surface (312a) is formed at intervals along the circumferential direction of the connecting portion (312). Common hand tools such as spanners and wrenches can be attached to the flat surface (312a).

[0048] The slide portion (313) is adjacent to the connecting portion (312) and is formed in a cylindrical shape. The surface of the slide portion (313) is formed smoothly to minimize frictional resistance during linear motion and ensure straightness.

[0049] The mounting parts (31a, 31b) are formed as a pair and are fastened to the screw groove (121a) through the screw part (311), and are arranged on the same line at a certain distance. The mounting parts (31a, 31b) protrude from the upper and lower sides of the viewing window (12), respectively. The mounting parts (31a, 31b) fastened to the screw groove (121a) protrude from the viewing window (12) and form a right angle.

[0050] The mounting portions (31a, 31b) are firmly fastened by a hand tool that is coupled to the flat surface (312a) when fastened. Since the mounting portions (31a, 31b) are fastened to the screw groove (121a) in a screw manner, they are maintained stably even against external shocks or vibrations, thereby increasing the reliability of the fastening.

[0051] The main body (32) is formed in the shape of a rectangular block overall. Through holes (321) are formed at both ends in the longitudinal direction of the main body (32). Mounting parts (31a, 31b) are inserted into and pass through the through holes (321). The perimeter of the through holes (321) is processed to be smooth and uniform, just like the surface of the slide part (313). The main body (32) can move in a straight direction along the slide part (313). As a result, the main body (32) can adjust the distance from the viewing window (12).

[0052] A slide hole (322) is formed in the center of the main body (32) along the longitudinal direction, connecting the front and back surfaces. Here, the back surface is the surface facing the viewing window (12) when the main body (32) is combined with the mounting parts (31a, 31b).

[0053] The fixing part (33) includes a first stopper (331) and a second stopper (332) and is coupled to the upper and lower mounting parts (31a, 31b) respectively to fix the position of the main body part (32) that has moved in a straight line.

[0054] The first stopper (331) is formed in a ring shape and is positioned along the circumference of the mounting portions (31a, 31b). The first stopper (331) is located between the main body portion (32) and the coupling portion (312). A fixing means, such as a headless bolt, is fastened to the first stopper (331). The headless bolt firmly secures the first stopper (331) to the mounting portions (31a, 31b) so that it does not unnecessarily rotate or detach. The first stopper (331) is in contact with the back surface of the main body portion (32) at the upper and lower mounting portions (31a, 31b). The first stopper (331) restricts the linear movement of the main body portion (32) or stably secures a position reference.

[0055] The second stopper (332) is connected to the upper and lower mounting parts (31a, 31b) respectively to fix the position of the main body (32) that has moved in a straight line. The second stopper (332) connected to the upper mounting part (31a) is in close contact with the front of the main body (32), and the second stopper (332) connected to the lower mounting part (31b) is in close contact with the first stopper (331).

[0056] The second stopper (332) includes a stopper block (332a) and a lever (332c).

[0057] The stopper block (332a) is formed in a ring shape and surrounds the outer circumference of the mounting portions (31a, 31b). The stopper block (332a) has a structure in which a portion is cut, and the cut portion (332b) is formed in an open state connecting the inner circumference and the outer circumference of the stopper block. Through the cut portion (332b), the stopper block can function in a form that allows for elastic deformation or tightening operation. With the cut portion (332b) open, the stopper block (332a) can slide within the mounting portions (31a, 31b).

[0058] One side of the stopper block (332a) coupled to the upper mounting part (31a) is in close contact with the front of the main body part (32), and the stopper block (332a) coupled to the lower mounting part (31b) is in close contact with the first stopper (331).

[0059] The lever (332c) is fastened to the cut portion (332b) of the stopper block (332a) to tighten or loosen the opened portion of the cut portion (332b). The lever (332c) is fastened to the stopper block (332a) and consists of a bolt portion that tightens the cut portion (332b) and a handle connected to the bolt portion for gripping. By operating the handle, the bolt You can tighten or loosen wealth, and This allows the degree of opening of the incision (332b) to be controlled.

[0060] When the lever (332c) is tightened to tighten the open portion of the cut portion (332b), the stopper block (332a) is pressed against the outer circumference of the mounting portion (31a, 31b), and the stopper block (332a) is fixed to the mounting portion (31a, 31b) so that it does not slide or rotate. Accordingly, the main body portion (32) fixed by the stopper block (332a) is maintained in the same position it moved to from the mounting portion (31a, 31b), and linear movement is restricted.

[0061] The lens support (34) includes a support body (341) and a nut member (342) and is coupled to the main body (32) so as to be able to move in a straight line, and fixes the optical lens (2).

[0062] The support body (341) includes a slide body (341a) and a locking projection (341c), and the optical lens (2) is coupled thereto.

[0063] The slide body (341a) is inserted into the slide hole (322) and has both ends protruding toward the front and back of the main body (32). The outer circumference of the slide body (341a) is machined to make surface contact with the circumference of the slide hole (322). The slide body (341a) can move in a straight line along the longitudinal direction of the main body (32) within the slide hole (322). The slide hole (322) guides the straight movement of the slide body (341a).

[0064] The interior of the slide body (341a) is penetrated by a mounting hole (341b) along the longitudinal direction. Screw threads are formed on the inner and outer circumference of one end of the slide body (341a) that protrudes from the front of the main body (32). The optical lens (2) is coupled to the screw threads formed on the inner circumference of the main body (32) and fixed inside the mounting hole (341b), that is, the slide body (341a). The optical lens (2) faces the window (122).

[0065] The stopper (341c) protrudes in a vertical direction from the other end of the slide body (341a) that protrudes toward the rear surface of the main body (32). The stopper (341c) is in close contact with the rear surface of the main body (32). The stopper (341c) prevents the slide body (341a) from moving toward the front of the main body (32) or detaching.

[0066] The nut member (342) is coupled to a thread formed on the outer circumference of one end of the slide body (341a). The nut member (342) is in close contact with the front surface of the main body (32). When the nut member (342) is fastened, the locking projection (341c) is in close contact with the back surface of the main body (32). At this time, the slide body (341a) is fixed without moving within the slide hole (322). With the nut member (342) loosely coupled, the slide body (341a) can move in a straight line within the range of the slide hole (322).

[0067] By moving the position of the main body (32), which moves linearly along the length direction of the mounting part (31a, 31b) to adjust the distance from the window (122), and the lens support part (34), which moves linearly along the length direction of the main body (32) to align with the center of the window (122), the optical lens (2) can be positioned to precisely correspond to the position of the plasma jet formed in the reaction space (11). Accordingly, the accuracy of the plasma focus alignment can be increased, and the precision and stability of the optical system can be improved.

[0068] The scale portion (35) is located on one side of the outer circumference of the main body portion (32) and is positioned along the length direction of the main body portion (32). The scale of the scale portion (35) is marked in millimeters (mm). The scale unit is not limited to millimeters. The scale portion (35) allows the degree of movement of the lens support portion (34) to which the optical lens (2) is attached to be directly measured. The experimenter can accurately determine the current position of the optical lens (2) through the scale portion (35), and through this, precise adjustment of the optical lens (2) and position reproduction are possible.

[0069] The holder portion (36) faces the front of the main body portion (32) and both ends are connected to the upper and lower mounting portions (31a, 31b). The holder portion (36) is connected to the mounting portions (31a, 31b) so as to be detachable with bolts or the like. A support hole (361) is formed in the center of the holder portion (36). A cable (2a) made of optical fiber and connected to an optical lens (2) passes through the support hole (361). At this time, the circumference of the support hole (361) prevents bending of the cable (2a) or optical loss and signal distortion caused by vibration, thereby improving the quality and reliability of the measurement signal.

[0070] The following describes the operation of the triple plasma optical diagnostic position control jig device described above.

[0071] The triple plasma optical diagnostic position adjustment jig device (30) is designed to precisely adjust the position of the optical lens (2) in horizontal and vertical directions to correspond to the accurate position of the plasma jet generated in the reaction space (11). The main body (32) can finely adjust the distance from the window (122) by moving linearly in the horizontal direction along the slide (313) of the mounting part (31a, 31b), and the lens support part (34) can move vertically from the main body (32) so that the optical lens (2) can be aligned with the center of the plasma jet. This dual linear motion structure allows the optical lens (2) to be precisely positioned at the location of the plasma jet in the reaction space (11), thereby contributing to increasing focus alignment accuracy and improving diagnostic reliability.

[0072] In addition, the position adjustment jig device (30) for triple plasma optical diagnosis is provided with a position fixing function so that the position of the adjusted optical lens (2) can be stably maintained. The first and second stoppers (331, 332) are each coupled to the mounting portion and come into close contact with the front and rear surfaces of the main body (32), and act to fix the main body (32) without shaking when it is moved. In particular, the lever (332c) of the second stopper (332) can mechanically restrict the linear movement of the main body (32) by tightening the cut portion (332b) of the stopper block (332a) and pressing it against the outer surface of the mounting portion (31a, 31b), thereby allowing the position set by the experimenter to be maintained precisely.

[0073] The lens support (34) is capable of fine position adjustment itself. The slide body (341a) is inserted into the slide hole (322) and can move vertically, and the optical lens (2) is fixed in the mounting hole (341b) formed inside it by a screw connection. A nut member (342) is formed on the front of the slide body (341a), and a locking projection (341c) is formed on the back. As the nut member (342) is tightened, the locking projection (341c) comes into close contact with the back of the main body (32), thereby fixing the entire lens support (34). Conversely, when the nut member (342) is loosely connected, the lens support (34) can move within the slide hole (322), allowing for precise position adjustment of the optical lens (2).

[0074] The experimenter can not only adjust the position of the optical lens (2), but also visually and accurately determine the current position of the optical lens (2) through the scale (35). The scale (35) installed on the side of the main body (32) is marked in mm units, allowing for the quantitative measurement of the amount of movement of the lens support (34), and is useful for reproduction to the same position or for comparative measurement.

[0075] Additionally, the triple plasma optical diagnostic position adjustment jig device (30) is equipped with a holder part (36) to provide stable support for a cable (2a) connected to an optical lens (2). The cable (2a) passes through the support hole (361) of the holder part (36) installed on the front of the main body part (32), and this support structure prevents light loss or signal distortion by suppressing sagging, bending, or vibration of the cable (2a). As a result, the quality and reliability of optical measurement data can be further enhanced.

[0076] Accordingly, the triple plasma optical diagnostic position adjustment jig device (30) is a comprehensive precision diagnostic device that encompasses position adjustment, fixing, visual verification, and signal stabilization of the optical lens (2), and enables high precision and reproducibility to be achieved simultaneously in a plasma diagnostic environment.

[0077] Next, another embodiment of the position adjustment jig device for triple plasma optical diagnosis according to the present invention will be described with reference to FIG. 6.

[0078] Referring to FIG. 6, the position adjustment jig device for triple plasma optical diagnosis according to the present embodiment has most of the components of the embodiment described with reference to FIG. 1 to 5. However, the main body (32) has a different structure.

[0079] In the main body (32) according to the present embodiment, a sub-slide hole (323) is formed adjacent to a slide hole (322). A support member (34) having an optical lens (2) disposed therein can be installed in each of the slide hole (322) and the sub-slide hole (323). Accordingly, an optical fiber can be disposed in the slide hole (322), and a laser optical fiber can be disposed in the sub-slide hole (323). The placement positions of the optical fiber and the laser optical fiber can be interchanged.

[0080] According to the present embodiment, an optical fiber for collecting signals is basically installed, and by additionally installing a separate laser optical fiber, the user can visually confirm the measurement location. The beam irradiated through the laser optical fiber is marked on the surface of the sample, allowing the user to intuitively identify the location where the measurement is being taken through this point.

[0081] The position indicated by the laser is particularly useful in the vertical direction. Since the laser point precisely aligns with the focal point of the actual measurement point, vertical positions such as depth or height can be accurately determined. However, a slight difference occurs in the horizontal direction. This is because the laser optical fiber and the collimating lens do not share the same path as the measurement optical fiber, but are physically positioned at a certain distance apart. Therefore, although the laser point viewed by the user is parallel to the actual measurement point, there is always a horizontal difference between them equal to the distance between the fiber and the lens.

[0082] According to the present embodiment, by additionally mounting a laser optical fiber along with an optical fiber, the user can directly visually confirm the measurement location. This allows for intuitive identification of the point where the measurement is taking place, and in particular, since the laser point precisely aligns with the triple point of the measurement point, the vertical position can be precisely verified.

[0083] Furthermore, since the laser optical fiber and focusing lens are positioned at a constant distance from the measuring optical fiber, the laser mark is horizontally offset from the actual measurement point; however, users can perceive this offset, enabling accurate measurements through correction if necessary. Therefore, by deploying additional laser optical fibers, users can verify the measurement location in advance to reduce errors and improve the reproducibility of repeated measurements, thereby simultaneously ensuring both precision and reliability of the measurement.

[0084] Although preferred embodiments of the present invention have been described in detail above, the scope of the present invention is not limited thereto, and various modifications and improvements by those skilled in the art using the basic concept of the present invention as defined in the following claims also fall within the scope of the present invention. Explanation of the symbols

[0085] 1: Triple thermal plasma reactor 10: Reactor body 11: Reaction space 12: Viewing window 121: Sight opening flange 121a: Thread groove 122: Genesis 20: Triple Torch Section 30: Position adjustment jig device for triple plasma optical diagnostics 31a, 31b: Mounting part 311: Screw part 312: Joint 312a: Planar 313: Slide part 32: Main body part 321: Through hole 322: Slide hole 33: Fixed part 331: First stopper 332: Second stopper 332a: Stopper block 332b: Incision 332c: Lever 34: Lens support part 341: Support body 341a: Slide body 341b: Mounting hole 341c: Locking tab 342: Nut member 35: Scale section 36: Holder section 361: Support hole 2: Optical lens 2a: Cable

Claims

Claim 1 A triple plasma optical diagnostic position adjustment jig device for fixing an optical lens to a plasma reactor for measuring the optical properties of a plasma jet formed in the reaction space of a plasma reactor, comprising: a mounting part that can be fixed to a viewing window of the plasma reactor; a main body part that is coupled to the mounting part so as to be linearly movable and can move closer to or further away from the viewing window depending on the direction of movement; and a lens support part that is coupled to the main body part so as to be linearly movable and can move closer to or further away from the center of the viewing window depending on the direction of movement and to which the optical lens can be attached. Claim 2 A triple plasma optical diagnostic position adjustment jig device according to claim 1, further comprising a scale portion arranged along the longitudinal direction of the main body portion and measuring the position of the lens support portion to which the optical lens is coupled. Claim 3 A triple plasma optical diagnostic position adjustment jig device according to claim 1, wherein the mounting portion is arranged along the circumferential direction of the viewing window, and both ends of the main body portion are connected to the arranged mounting portion. Claim 4 A triple plasma optical diagnostic position adjustment jig device according to claim 1, wherein the mounting portion comprises a screw portion that can be fastened around the viewing window, a coupling portion connected to the screw portion and having a flat surface and capable of being coupled with a hand tool, and a slide portion connected to the coupling portion and coupled so that the main body portion can move linearly. Claim 5 A triple plasma optical diagnostic position adjustment jig device comprising, in claim 1, a lens support member penetrating the main body part, capable of linear movement along the longitudinal direction of the main body part, having a penetrating interior, and capable of coupling the optical lens, and a nut member coupled to the support body and securing the support body to the main body part. Claim 6 A triple plasma optical diagnostic position adjustment jig device according to claim 1, further comprising a holder portion coupled to the mounting portion, facing the main body portion, and supporting a cable connected to the optical lens. Claim 7 A triple plasma optical diagnostic position adjustment jig device according to claim 1, further comprising a fixing part coupled to the mounting part and fixing the position of the main body part that moves in a straight line. Claim 8 A triple plasma optical diagnostic position adjustment jig device according to claim 7, wherein the fixing part comprises a first stopper coupled to the mounting part and in contact with the rear surface of the main body part, and a second stopper coupled to the mounting part and in contact with the front surface of the main body part and the first stopper. Claim 9 A position adjustment jig device for triple plasma optical diagnosis, wherein the second stopper comprises a stopper block coupled to the mounting portion and capable of moving linearly along the mounting portion, with at least a portion cut open and spread apart, and a lever coupled to the stopper block and capable of tightening the cut portion of the stopper block. Claim 10 A triple plasma optical diagnostic position adjustment jig device according to claim 1, wherein the main body part has a slide hole formed along the longitudinal direction to which the lens support part is coupled so as to be linearly movable, and a through hole formed to which the mounting part is coupled. Claim 11 A position adjustment jig device for triple plasma optical diagnosis according to claim 10, wherein a sub-slide hole is formed adjacent to the slide hole in the main body, an optical fiber is positioned in the slide hole, and a laser optical fiber is positioned in the sub-slide hole. Claim 12 A triple thermal plasma reactor comprising a triple plasma optical diagnostic position control jig device defined in any one of claims 1 to 11, a reactor body having a reaction space formed therein and a viewing window formed therein to which the triple plasma optical diagnostic position control jig device can be fixed, and a triple torch part mounted on the reactor body to spray three plasma jets into the reaction space from different directions, wherein an optical lens coupled to the triple plasma optical diagnostic position control jig device measures the positional light emission characteristics of the plasma jets sprayed into the reaction space.

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