Holder for probe station with precise adjustment function and high compatibility

Abstract

The present invention relates to a holder for a probe station having a precise adjustment function and high compatibility.

Description

Technology Field

[0001] The present invention relates to a holder for a probe station having a precise adjustment function and high compatibility. Background Technology

[0002] Probe stations for measuring the electrical characteristics of semiconductor devices require precise signal transmission and analysis. Conventional probe holders have limitations, such as difficulty in height adjustment or support for only specific probe cards. Accordingly, there is a need for a probe holder that supports various card types and allows for easy height adjustment. The problem to be solved

[0003] The problem that the present invention aims to solve is to provide a holder for a probe station having precise adjustment capabilities and high compatibility.

[0004] The problems that the present invention aims to solve are not limited to those mentioned above, and other unmentioned problems will be clearly understood by a person skilled in the art from the description below. means of solving the problem

[0005] A holder for a probe station according to the present invention for solving the above-described problem may be characterized by comprising: an upper body having a step portion formed therein to hold a probe card inside; a lower body spaced downward from the upper body and provided to face the upper body; a height adjustment portion for adjusting the distance between the upper body and the lower body, wherein the height adjustment portion includes a setting screw for adjusting the distance between the upper body and the lower body in a screw manner, and a fastening member for mutually fastening the upper body and the lower body, wherein the fastening member includes a bolt. Effects of the invention

[0006] The holder for the probe station of the present invention provides precise adjustment capabilities and high compatibility compared to existing ones, making it highly useful in the semiconductor and electronic component industries.

[0007] The effects of the present invention are not limited to those mentioned above, and other unmentioned effects will be clearly understood by a person skilled in the art from the description below. Brief explanation of the drawing

[0008] FIG. 1 is a conceptual diagram showing a holder for a probe station of the present invention. Specific details for implementing the invention

[0009] The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the present invention, and the present invention is defined only by the scope of the claims.

[0010] The terms used in this specification are for describing embodiments and are not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise in the text. The terms "comprises" and / or "comprising" used in this specification do not exclude the presence or addition of one or more other components in addition to the components mentioned. Throughout the specification, the same reference numerals refer to the same components, and "and / or" includes each of the mentioned components and all combinations of one or more. Although terms such as "first," "second," etc., are used to describe various components, these components are not limited by these terms. These terms are used merely to distinguish one component from another. Therefore, the first component mentioned below may be the second component within the technical scope of the invention.

[0011] Unless otherwise defined, all terms used herein (including technical and scientific terms) may be used in a meaning commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise.

[0013] Probe stations for measuring the electrical characteristics of semiconductor devices require precise signal transmission and analysis. Conventional probe holders have limitations, such as difficulty in height adjustment or support for only specific probe cards. Accordingly, there is a need for a probe holder that supports various card types and allows for easy height adjustment.

[0015] The holder for a probe station according to the present invention may be characterized by comprising: an upper body having a step portion formed therein to hold a probe card inside; a lower body spaced downward from the upper body and provided to face the upper body; a height adjustment portion for adjusting the distance between the upper body and the lower body, wherein the height adjustment portion includes a setting screw for adjusting the distance between the upper body and the lower body in a screw manner, and a fastening member for connecting the upper body and the lower body to each other, wherein the fastening member includes a bolt.

[0017] The holder for the probe station of the present invention can be implemented in the following manner:

[0018] Holder structure design : High-precision step design to securely fix the probe card, and a hollow internal structure to reduce weight while ensuring robustness.

[0019] Height adjustment mechanism Includes a setting screw and a fine-tuning pin, allowing the user to adjust to the desired height, and maintains a secure fixation even after adjustment.

[0020] Connection method It is designed to firmly secure the upper and lower bodies using a bolt and slide fastening structure, and to allow for adjustment of fastening strength.

[0021] Material properties Stable long-term measurements are possible by using aluminum alloys and high-insulation composite materials that minimize thermal deformation and electrical noise.

[0022] Vibration reduction design It includes a vibration-absorbing pad to enable reliable measurements in low-noise and low-vibration environments, and is designed to maintain uniform contact force with the probe card.

[0023] heat release systemHeat dissipation slots are arranged to release heat generated during continuous measurement processes, thereby minimizing temperature fluctuations.

[0025] Through these technical features, the holder for the probe station of the present invention can provide high efficiency and precision in various semiconductor device analysis and reliability test environments.

[0027] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without altering its technical concept or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive.

Claims

Claim 1 A holder for a probe station characterized by comprising: an upper body having a step portion formed therein to hold a probe card inside; a lower body spaced downward from the upper body and provided to face the upper body; a height adjustment portion for adjusting the distance between the upper body and the lower body, wherein the height adjustment portion includes a setting screw for adjusting the distance between the upper body and the lower body in a screw manner, and a fastening member for connecting the upper body and the lower body to each other, wherein the fastening member includes a bolt.

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