Positioning apparatus

Abstract

A positioning device for determining the position of a substrate (9) comprises: a support member having a Y roller (41) that supports the substrate (9) from below while movable in the Y direction, which is the positioning direction; a first pressing member (51) facing a first end (921) of the substrate (9); a second pressing member (61) facing a second end (922) of the substrate (9); a first moving mechanism (52) that moves the first pressing member (51) toward the first end (921) to bring the first pressing member (51) into contact with the first end (921) and move the second end (922) toward the second pressing member (61), and then separates the first pressing member (51) from the first end (921); and a second pressing member By moving (61) toward the second end (922), a second moving mechanism (62) is provided to bring the second pressing member (61) into contact with the second end (922) and move the second end (922) to a predetermined reference position.

Description

Technology Field

[0001] [Reference to related applications]

[0002] The present application claims the benefit of priority from Japanese patent application JP2025-34643 filed on March 5, 2025, and all disclosures of said application are incorporated herein.

[0003] The present invention relates to a technique for determining the position of a substrate. Background Technology

[0004] Conventionally, before introducing a substrate into a device for forming a fine pattern or performing processing on a substrate on which a fine pattern is formed, an operation to determine the position of the substrate, that is, an operation to align the position of the substrate to a predetermined position, is performed. The determination of the position of the substrate is typically carried out by placing the substrate between a pair of positioning members, fixing the position of one of the positioning members, and moving the other positioning member toward the substrate to sandwich the substrate between the pair of positioning members. For example, in Japanese Patent Publication No. 2004-165524, the substrate on the conveying path is aligned to a desired position by sandwiching it between a substrate width aligning means from a direction perpendicular to the conveying direction.

[0005] However, if a substrate is sandwiched between positioning members, there is a risk that the substrate may deform if its rigidity is low. Additionally, if the error in the substrate's external shape is large, there is a risk that a substrate may not be able to be sandwiched even if the movement amount of the positioning member is adjusted. The problem to be solved

[0006] The present invention aims to determine the position of a substrate without relying on the precision of the substrate's external shape and without applying a large force to the substrate, and is directed toward a positioning device. means of solving the problem

[0007] An aspect 1 of the present invention is a positioning device for determining the position of a substrate having a micro pattern formed thereon or having a micro pattern formed thereon, comprising: a support member that supports the substrate from below in a position movable in a positioning direction perpendicular to a first end of the substrate and parallel to the main surface of the substrate; a first pressing member facing the first end of the substrate; a second pressing member facing the second end parallel to the first end of the substrate; a first moving mechanism that moves the first pressing member toward the first end to bring the first pressing member into contact with the first end, moves the second end toward the second pressing member to a position where it does not contact the second pressing member, and then separates the first pressing member from the first end; and after the first pressing member is separated from the first end, moves the second pressing member toward the second end, thereby It is equipped with a second moving mechanism that contacts a second pressing member with the second end to move the second end to a predetermined reference position.

[0008] According to the present invention, the position of a substrate can be determined without applying a large force to the substrate.

[0009] An embodiment 2 of the present invention is a positioning device of embodiment 1, wherein the support member is provided with a plurality of rollers that can rotate about an axis perpendicular to the positioning direction while in contact with the lower surface of the substrate.

[0010] Aspect 3 of the present invention is a positioning device of Aspect 2, wherein, while supported by the support member, the height direction position of the first end of the substrate is higher than the height direction position of the second end.

[0011] Aspect 4 of the present invention is a positioning device of Aspect 2 or 3, wherein some of the rollers of the plurality of rollers have greater rotational resistance than other rollers.

[0012] Aspect 5 of the present invention is a positioning device of Aspect 4, wherein an auxiliary roller contacts the part of the roller, and a mutual pushing force acts between the part of the roller and the auxiliary roller.

[0013] Aspect 6 of the present invention is a positioning device for determining the position of a substrate on which a fine pattern is formed or on which a fine pattern is formed, comprising: a conveying mechanism that supports the substrate from below and conveys the substrate in a conveying direction perpendicular to one end of the substrate and parallel to the main surface of the substrate; a positioning member disposed in a conveying area of ​​the substrate and capable of withdrawing from the conveying area; a withdrawal mechanism for withdrawing the positioning member from the conveying area; and a control unit that, while the positioning member is withdrawn from the conveying area, conveys the substrate to one side of the conveying direction by the conveying mechanism to pass the positioning member, positions the positioning member in the conveying area, and conveys the substrate to the other side of the conveying direction by the conveying mechanism to bring the substrate into contact with the positioning member.

[0014] The above-described purpose and other purposes, features, modes, and advantages are revealed by the detailed description of the invention below with reference to the attached drawings. Brief explanation of the drawing

[0015] Figure 1 is a plan view showing a simplified drawing system. Figure 2 is a plan view showing the main structure of a positioning device. FIG. 3A is a right-side view showing the main structure of a positioning device. FIG. 3B is a right-side view showing the main structure of a positioning device. Figure 4 is a drawing showing the control unit of a positioning device. Figure 5 is a diagram showing the flow of operation of a positioning device. FIG. 6A is a simplified drawing showing a positioning device during operation. FIG. 6B is a simplified drawing showing a positioning device during operation. FIG. 6C is a simplified drawing showing a positioning device during operation. FIG. 7A is a simplified drawing showing a positioning device during operation. FIG. 7B is a simplified drawing showing a positioning device during operation. FIG. 7C is a simplified drawing showing a positioning device during operation. FIG. 7D is a simplified drawing showing a positioning device during operation. FIG. 7E is a simplified drawing showing a positioning device during operation. Figure 8 is a drawing showing a double roller. Specific details for implementing the invention

[0016] FIG. 1 is a simplified plan view showing a drawing system (100) including a positioning device (1) related to an embodiment of the present invention. The drawing system (100) comprises a positioning device (1), a drawing device (101), and an output device (102). The positioning device (1) functions as an input device. In FIG. 1, the X direction and the Y direction are horizontal directions perpendicular to each other, and the Z direction is an up-down direction perpendicular to the X direction and the Y direction.

[0017] A substrate (9) is, for example, a printed circuit board, and a fine pattern is formed on the substrate (9) in a drawing device (101). The upper surface of the substrate (9) is the surface of a photosensitive material, and the drawing device (101) emits spatially modulated light toward the substrate (9) and draws a pattern on the photosensitive material by moving the irradiation position of the light. The substrate (9) is transported by a conveyor from left to right (+X) in FIG. 1 as indicated by arrow 901 and is brought into a positioning device (1). In FIG. 1, the external shape of the substrate (9) is shown as a solid line or a dotted line, but in reality, the substrate (9) moves through the internal space of the cover of the positioning device (1), the drawing device (101), and the outgoing device (102).

[0018] In the positioning device (1), the X-direction and Y-direction positions of the substrate (9) are determined. Specifically, the X-direction and Y-direction positions of the reference point are determined by using the upper left vertex of the substrate (9) as a reference point. After positioning, the substrate (9) is lifted by adsorbing its upper surface by the adsorption part of a conveying device (not shown), transferred upward to the holding part (111) of the drawing device (101), and placed on the holding part (111). The substrate (9) is adsorbed and held from below by the holding part (111).

[0019] The substrate (9) moves in the (+Y) direction as indicated by the arrow (902) together with the holding part (111), and a pattern is drawn by the drawing part (not shown). When the drawing is completed, the substrate (9) moves in the (-Y) direction and returns to its original position, and the adsorption by the holding part (111) is released. Then, the upper surface is adsorbed by the adsorption part of the transport device, the substrate (9) is lifted, transported upward to the discharge device (102), and placed on the conveyor inside the discharge device (102). The substrate (9) is transported in the (+X) direction from the left to the right in FIG. 1 as indicated by the arrow (903) and is sent out to the outside of the discharge device (102).

[0020] FIG. 2 is a plan view showing the main structure of a positioning device (1), and FIG. 3A and FIG. 3B are right-side views showing the main structure of a positioning device (1). FIG. 2, FIG. 3A and FIG. 3B show the main structure of the positioning device (1) in an appropriately simplified manner. The positioning device (1) has an X-direction conveying mechanism (11), an X-direction reference mechanism (12), a Y-direction roller mechanism (13), a first pressurizing mechanism (14), and a second pressurizing mechanism (15).

[0021] The X conveying mechanism (11) conveys the substrate (9) in the X direction, which is the conveying direction. The conveying direction is perpendicular to the (-X) side end of the substrate (9) and also parallel to the main surface of the substrate (9). The X conveying mechanism (11) has a plurality of X rollers (21), as shown in FIGS. 2 and FIGS. 3A. Each X roller (21) rotates around an axis (22) that faces the Y direction, which is perpendicular to the conveying direction and also parallel to the main surface of the substrate (9). The plurality of axes (22) are arranged in the X direction. A plurality of X rollers (21) are arranged on each axis (22). The substrate (9) is conveyed in the conveying direction while being supported from below by the plurality of X rollers (21).

[0022] As shown in FIG. 2, the X conveying mechanism (11) has a motor (23) and a magnet gear group (24) which is a non-contact power transmission device. In FIG. 2, the cover of the magnet gear group (24) is shown as a long, narrow rectangle. As the motor (23) rotates, each axis (22) rotates through the magnet gear group (24), and the X roller (21) rotates. As a result, the substrate (9) located on the plurality of X rollers (21) moves in the (+X) direction and the (-X) direction.

[0023] The X reference mechanism (12) has an X position determining member (31) shown in FIG. 2 and a retraction mechanism (see reference numeral 32 in FIG. 6A) located below the X position determining member (31). The X position determining member (31) is a position determining member used to determine the position of the substrate (9) in the X direction. In the example of FIG. 2, the X position determining member (31) has a plurality of pins (311) facing the Z direction, and in the X position determining member (31), these pins (311) are connected by a long member in the Y direction from below. The plurality of pins (311) are raised and lowered simultaneously by the retraction mechanism. The X position determining member (31) may be composed of a plurality of members. In this case, the plurality of members may be raised and lowered individually.

[0024] The retraction mechanism is, for example, an air cylinder. Various other mechanisms, such as electric actuators, may be employed as the retraction mechanism. A plurality of pins (311) advance and retract upward from between the X rollers (21) arranged in two dimensions. A plurality of pins (311) are arranged in the Y direction and are positioned at the (-X) side end of the set of X rollers (21) arranged in two dimensions. The X position determining member (31) (pins (311)) may be positioned between the plurality of X rollers (21) as shown in FIG. 2, or may be positioned at the (-X) side of the arrangement of the plurality of X rollers (21).

[0025] The Y roller mechanism (13) has a plurality of Y rollers (41), as shown in FIG. 2 and FIG. 3A. Each Y roller (41) rotates around an axis facing the X direction. Each Y roller (41) is positioned between X rollers (21), as shown in FIG. 3A, and is arranged in two dimensions as shown in FIG. 2. In FIG. 3A, for ease of understanding, the Y rollers (41) are drawn ahead of the rotation axis of the X rollers (21). Also, as shown in FIG. 3A, two Y rollers (41) are positioned above and below on the (+Y) side, but these rollers will be described later.

[0026] In the Y roller mechanism (13), as shown in FIG. 3A, each Y roller (41) is supported on the upper end of a support rod (42) that protrudes upward from the lower end. The lower end of the support rod (42) is fixed to a support base (43), and the support base (43) is raised by a lifting mechanism (44), such as a cylinder. The lifting mechanism (44) is, for example, an air cylinder. Various other mechanisms, such as electric actuators, may be employed as the lifting mechanism (44). Although FIG. 3A depicts the lifting mechanism (44) as two cylinders, it may be one cylinder. In FIG. 3A, the upper end of the Y roller (41) is located lower than the upper end of the X roller (21), and the lower surface of the substrate (9) contacts only the X roller (21). In this state, the main surface of the substrate (9) is parallel to the X direction and the Y direction.

[0027] FIG. 3B is a drawing showing the state in which the Y roller (41) (and the support rod (42) and support base (43)) are raised by the lifting mechanism (44). The top of the Y roller (41) is positioned above the top of the X roller (21), and the bottom surface of the substrate (9) comes into contact only with the Y roller (41). The position of the top of the Y roller (41) is highest on the (-Y) side and gradually decreases toward the (+Y) direction. Because of this, the substrate (9) is tilted and supported by the Y roller (41). The actual tilt is extremely slight, and the main surface of the substrate (9) is parallel to the X direction and substantially parallel to the Y direction. FIG. 3B emphasizes the tilt of the substrate (9).

[0028] The substrate (9) can be moved in the Y direction (or nearly the Y direction when considering the inclination) while supported by a plurality of Y rollers (41). As described below, positioning of the substrate (9) in the Y direction is performed in this state. The plurality of Y rollers (41) are rollers that can rotate around an axis perpendicular to the positioning direction (Y direction) while in contact with the lower surface of the substrate (9). The positioning direction is perpendicular to the ends of the (+Y) side (and -Y) side) of the substrate (9) and also parallel to the main surface of the substrate (9). The plurality of Y rollers (41) and the support rods (42) or support bases (43) that support them are support parts that support the substrate (9) from below while it is movable in the positioning direction.

[0029] The first pressure mechanism (14) has a first pressure member (51) shown in FIG. 2 and FIG. 3A, and a first moving mechanism (52) located below the first pressure member (51) as shown in FIG. 3A. In the example of FIG. 2, the first pressure member (51) has a plurality of pins (511) facing in the Z direction, and these pins (511) are connected downward in the first pressure member (51). The plurality of pins (511) move simultaneously in the Y direction by the first moving mechanism (52). The first pressure member (51) may be composed of a plurality of members. In this case, the plurality of members may move individually in the Y direction. When the substrate (9) is supported by a plurality of Y rollers (41), the first pressing member (51) faces the (-Y) side end of the substrate (9) (hereinafter also referred to as the "first end") in the Y direction.

[0030] The first moving mechanism (52) is, for example, a mechanism in which a motor is connected to a ball screw. Various other mechanisms such as a linear motor or an air cylinder may be employed as the first moving mechanism (52). A plurality of pins (511) are arranged in the X direction and can move in the Y direction between X rollers (21) arranged in two dimensions. The upper end of the pin (511), which is the upper end of the first pressing member (51), protrudes upward above the upper end of the raised Y roller (41) shown in FIG. 3B, and preferably protrudes upward above the upper surface of the substrate (9) on the Y roller (41).

[0031] The second pressure mechanism (15) has a second pressure member (61) shown in FIG. 2 and FIG. 3A, and a second moving mechanism (62) located below the second pressure member (61) as shown in FIG. 3A. In the example of FIG. 2, the second pressure member (61) is a plate member perpendicular to the Y direction. As shown in FIG. 3B, when the substrate (9) is supported by a plurality of Y rollers (41), the second pressure member (61) faces the (+Y) side end of the substrate (9) (hereinafter also referred to as the "second end") in the Y direction. The second end is the end opposite to the first end in the rectangular substrate (9) and is parallel to the first end.

[0032] The second pressurizing member (61) moves in the Y direction by means of the second moving mechanism (62). The second pressurizing member (61) may be composed of multiple members. The second moving mechanism (62) is, for example, an air cylinder. Various other mechanisms, such as electric actuators, may be employed as the second moving mechanism (62). The second pressurizing member (61) is positioned on the side of the (+Y) side of the arrangement of the X roller (21) and the Y roller (41). The upper end of the second pressurizing member (61) protrudes upward above the upper end of the raised Y roller (41) shown in FIG. 3B, and preferably protrudes upward above the upper surface of the substrate (9) on the Y roller (41).

[0033] FIG. 4 is a diagram showing the control unit (8) of the positioning device (1) and its surrounding configuration. The control unit (8) is realized by other configurations such as a general computer system and interface or a dedicated circuit. The control unit (8) controls the operation of the X conveying mechanism (11), the X reference mechanism (12), the Y roller mechanism (13), the first pressing mechanism (14), and the second pressing mechanism (15). The control unit (8) mainly controls the operation of the motor (23) of the X conveying mechanism (11), the retreating mechanism of the X reference mechanism (12), the lifting mechanism (44) of the Y roller mechanism (13), the first moving mechanism (52) of the first pressing mechanism (14), and the second moving mechanism (62) of the second pressing mechanism (15), and receives operation confirmation signals from their actuators. In addition, the control unit (8) also receives a signal from a sensor that detects the position of the substrate (9) in the X-transport mechanism (11).

[0034] FIG. 5 is a diagram showing the flow of operation of a positioning device (1). The operation shown in FIG. 5 is realized by the control unit (8) controlling the X conveying mechanism (11), X reference mechanism (12), Y roller mechanism (13), first pressing mechanism (14), and second pressing mechanism (15).

[0035] First, as shown in FIG. 6A, when the X position determining member (31) is lowered, that is, when the X position determining member (31) is withdrawn from the conveying area of ​​the substrate (9), the X roller (21) of the X conveying mechanism (11) rotates so that the substrate (9) is conveyed in the (+X) direction (one side of the conveying direction) as indicated by the arrow (91) (step S11). The “conveying area” of the substrate (9) is an area (space) through which the substrate (9) being conveyed passes, and if an object exists in this area, it is an area that interferes with the substrate (9) being conveyed.

[0036] When the substrate (9) passes over the X position determining member (31) and this is detected by a sensor (e.g., a photoelectric sensor) that is not shown, the substrate (9) stops, and the X position determining member (31) is raised by the retreat mechanism (32) as shown in FIG. 6B (step S12). As a result, the pin (311) of the X position determining member (31) is positioned in the return area of ​​the substrate (9). Additionally, the fact that the substrate (9) passes over the X position determining member (31) may be detected by other means, for example, based on the rotational speed of the motor (23).

[0037] After that, the X roller (21) of the X conveying mechanism (11) rotates in the reverse direction, so that the substrate (9) is conveyed in the (-X) direction (the other side of the conveying direction) as indicated by the arrow (92) in Fig. 6C. When the (-X) side end (911) of the substrate (9) comes into contact with the pin (311) of the X position determining member (31), the rotation of the X roller (21) stops (step S13). Thus, the end (911) of the substrate (9) (i.e., one side of the rectangle) is positioned at the reference position in the X direction.

[0038] Next, as shown in FIG. 3B, the Y roller (41) is raised by the lifting mechanism (44), and the substrate (9) is supported by the Y roller (41) (Step S14). In this state, the first pressing member (51) is moved in the (+Y) direction by the first moving mechanism (52). That is, from the state shown in FIG. 7A, the first pressing member (51) moves toward the first end (921) on the (-Y) side of the substrate (9). As a result, as shown in FIG. 7B, the first pressing member (51) contacts the first end (921) of the substrate (9), and the substrate (9) is pressed in the (+Y) direction (Step S15), and the second end (922) on the (+Y) side moves toward the second pressing member (61). The movement of the substrate (9) is smoothly guided by the Y roller (41).

[0039] As shown in FIG. 7B, the substrate (9) moves toward the second pressure member (61) to a position where the second end (922) does not come into contact with the second pressure member (61). By doing so, the second end (922) of the substrate (9) comes close to the second pressure member (61). "Coming close" to the second end (922) the second pressure member (61) means that in step S16 described later, the second pressure member (61) is at a distance where it can press the second end (922). After that, as shown in FIG. 7C, the first pressing member (51) is moved in the (-Y) direction by the first moving mechanism (52), and the first pressing member (51) is separated from the first end (921) of the substrate (9).

[0040] When moving in the Y direction, the substrate (9) comes into contact with the pin (311) of the X position determining member (31). The pin (311) is a roller pin that can rotate about an axis facing the Z direction, and oscillation is suppressed even when the substrate (9) comes into contact with the pin (311) and moves in the Y direction.

[0041] Next, from the state shown in FIG. 7C, the second pressure member (61) moves in the (-Y) direction by the second moving mechanism (62). That is, the second pressure member (61) moves toward the second end (922) of the substrate (9). As a result, as shown in FIG. 7D, the second pressure member (61) contacts the second end (922) of the substrate (9), and the substrate (9) is pressed in the (-Y) direction (step S16). By moving the second pressure member (61) precisely to a predetermined position, the second end (922) of the substrate (9) moves to a predetermined reference position in the Y direction. In step S16, the first end (921) does not come into contact with the first pressure member (51).

[0042] By the above operation, the (-X) side end and the (+Y) side end of the substrate (9), that is, the left end (911) and the upper end (second end) (922) of the substrate (9) in FIG. 2, are positioned at a predetermined reference position. As shown in FIG. 7E, the second pressing member (61) is moved in the (+Y) direction by the second moving mechanism (62) and returns to its original position, and the second pressing member (61) is separated from the second end (922) of the substrate (9).

[0043] After that, the Y roller (41) is lowered by the lifting mechanism (44), and the substrate (9) is placed on the X roller (21) (Step S17). As previously explained, the substrate (9) is lifted by being adsorbed on its upper surface by the adsorption part of the conveying device (not shown) in the drawing system (100) of FIG. 1, and is transported upward to the holding part (111) of the drawing device (101) and placed on the holding part (111) (Step S18). In the positioning device (1), the X positioning member (31) is lowered and is in a state waiting for the next substrate (9) to be brought into the positioning device (1) (Step S19).

[0044] As described above, in the positioning device (1), positioning of the substrate (9) in the X and Y directions can be performed without inserting the substrate (9). This allows the position of the substrate (9) to be determined without applying a large force to the substrate (9). As a result, damage such as deformation to the substrate (9) is prevented. In addition, positioning of the substrate (9) can be performed without relying on the precision of the external shape of the substrate (9). Regarding positioning in the X direction, by retracting the X positioning member (31), positioning of the end of the substrate (9) on the (-X) side can be performed even if the direction of entry of the substrate (9) is the (+X) direction. In addition, when positioning in the Y direction, the Y roller (41) rotates so that the substrate (9) can be positioned while suppressing oscillation.

[0045] In the positioning device (1), the Y roller (41) is made to rotate very smoothly. Therefore, in the positioning device (1), when the Y-direction positioning of the substrate (9) is performed by the second pressing member (61), two measures are taken to prevent the substrate (9) from moving excessively due to inertia. With these measures, the Y-direction positioning of the substrate (9) can be reliably performed.

[0046] The first measure is to arrange the Y rollers (41) in the Y direction while tilting them so that, as shown in FIG. 3B, the substrate (9) is supported by the Y roller mechanism (13), and the position of the Y roller (41) on the side of the first pressing member (51) is slightly higher than the position of the Y roller (41) on the side of the second pressing member (61). As a result, while the substrate (9) is supported by the Y roller mechanism (13), the height direction position of the end on the (-Y) side is higher than the height direction position of the end on the (+Y) side. Consequently, when the Y direction position of the substrate (9) is determined by the second pressing member (61), the substrate (9) is prevented from moving excessively due to inertia.

[0047] The second measure is to provide resistance to the rotation of the Y rollers (41) by arranging two Y rollers (41) vertically on the (+Y) side, as shown in FIG. 3A. FIG. 8 is a drawing showing vertically arranged Y rollers (41) (hereinafter referred to as "double rollers (45)"). The upper Y roller of the double rollers (45) is labeled with the symbol 41a, and the lower Y roller is labeled with the symbol 41b. Hereinafter, the lower roller (41b) that does not directly support the substrate (9) is referred to as an "auxiliary roller."

[0048] In each Y roller (41 (41a, 41b)), a resin layer (412) is formed on the outer circumference of a cylindrical member (411) that rotates around an axis facing the X direction. In the double roller (45), the Y roller (41a) and the auxiliary roller (41b) come into contact, and a pushing force acts between the Y roller (41a) and the auxiliary roller (41b). That is, the center-to-center distance between the Y roller (41a) and the Y roller (41b) is slightly smaller than the diameter of the Y roller (41). As a result, the resin layer (412) of the Y roller (41a, 41b) undergoes slight elastic deformation at the point of contact, and slight resistance is generated to the rotation of the Y roller (41a, 41b).

[0049] By creating resistance to rotation in the double roller (45), the substrate (9) is prevented from moving excessively due to inertia when the Y-direction positioning of the substrate (9) is performed by the second pressing member (61). Also, since no significant friction occurs between the Y roller (41a) and the auxiliary roller (41b), oscillation caused by resistance to rotation is suppressed. In this way, resistance to rotation of the Y roller (41a) is realized in the positioning device (1) through a simple structure. Even when substrates (9) of various sizes are introduced, the (+Y) side end of the substrate (9) is used for positioning, so in the arrangement of the Y roller (41), the double roller (45) is formed only at the (+Y) side end. Also, the number of double rollers (45) only needs to be one or more.

[0050] In FIG. 1, the substrate (9) flows from left to right from the positioning device (1) on the left towards the holding part (111) of the drawing device (101). Hereinafter, this type of transport is referred to as "right flow." In the drawing system (100), the positioning device (1) is placed to the right of the holding part (111), and the output device (102) is placed to the left of the holding part (111) to transport the substrate (9) from right to left. Hereinafter, this type of transport is referred to as "left flow." In the case of left flow, the X-direction positioning of the substrate (9) is completed by simply bringing the substrate (9) that has been transported in the left direction ((-X) direction) into contact with the X-direction positioning member (31) without raising or lowering the X-direction positioning member (31) in the positioning device (1).

[0051] When the positioning device (1) is used for left-hand flow, the retreating mechanism (32) is omitted in the X reference mechanism (12), and the position of the X positioning member (31) (and pin (311)) is fixed relative to the positioning device (1). In this way, the positioning device (1) is designed to be capable of responding to left-hand flow.

[0052] The configuration and operation of the positioning device (1) may be varied.

[0053] In FIG. 6A and FIG. 6B, the X position determining member (31) moves away from the conveying area of ​​the substrate (9) (i.e., the area through which the substrate (9) passes) by descending, but the X position determining member (31) may move away in a direction other than downward by the move-away mechanism (32). For example, it may move away upward. The X position determining member (31) may move away to various positions as long as it does not interfere with the substrate (9) being conveyed in the (+X) direction. The part of the X position determining member (31) that moves forward and backward relative to the conveying area does not have to be in the shape of a pin. As long as it is placed in the conveying area of ​​the substrate (9) and can move away from the conveying area, an X position determining member (31) of various shapes may be employed.

[0054] When the substrate (9) is lifted from the positioning device (1) and placed in the holding part (111) of the drawing device (101), the second pressing member (61) does not withdraw from the substrate (9), and the substrate (9) may be lifted by the suction part of the transport device while the second pressing member (61) is in contact with the substrate (9). In this case, after the substrate (9) is lifted, the second pressing member (61) returns to its original position.

[0055] The structure of the double roller (45) may be used for various other purposes where it is necessary to provide resistance to the rotation of the roller while avoiding oscillation. The method of making the rotational resistance of some Y rollers (41) greater than that of other Y rollers (41) in order to reliably perform positioning of the substrate (9) in the Y direction is not limited to the double roller structure. For example, the rotational resistance in the bearing structure of some Y rollers (41) may be greater than that of other rollers. Rotational resistance may be provided by contacting a friction member to some Y rollers (41). Some Y rollers (41) with increased rotational resistance may be formed at any position that contacts the lower surface of the substrate (9). Preferably, such rollers are formed near the second pressing member (61) where the substrate (9) is reliably present.

[0056] In the positioning device (1), when positioning the substrate (9) in the Y direction, the Y roller mechanism (13) supports the substrate (9) by tilting it slightly to prevent the substrate (9) from moving excessively due to inertia, but this function may be omitted. Also, the double roller (45) may be omitted.

[0057] In the positioning device (1), if only positioning in the X direction is required, the configuration related to positioning in the Y direction may be omitted. Likewise, if only positioning in the Y direction is required, the configuration related to positioning in the X direction may be omitted.

[0058] Additionally, a conveying mechanism that does not use an X roller (21) may be employed as the X conveying mechanism (11), and a mechanism that does not use a Y roller (41) may be employed instead of the Y roller mechanism (13). For example, the X conveying mechanism (11) may convey the substrate (9) in the X direction by means of a belt. As the X conveying mechanism (11), various mechanisms may be employed that convey the substrate (9) in a conveying direction perpendicular to one end (the end in the X direction) of the substrate (9) and parallel to the main surface of the substrate (9) while supporting the substrate (9) from below. Instead of the Y roller mechanism (13), other support members that support the substrate (9) from below while being movable in the positioning direction may be employed. For example, multiple support members having a very low friction surface may be employed as support members.

[0059] The drawing device (101) of the drawing system (100) may be a device that performs drawing by means other than light.

[0060] The substrate (9) may be a substrate on which a fine pattern is drawn, or a substrate on which a fine pattern is to be drawn. Here, "fine pattern" may be a pattern generally understood to be fine, but preferably, it refers to a fine pattern such that if the positioning of the substrate (9) is inserted into a pair of positioning members, there is a risk of deformation or other effects occurring in the pattern. Also, the substrate (9) is not limited to a circuit board and may be a substrate for other purposes. The fine pattern is not limited to a circuit pattern and may be, for example, a mask pattern.

[0061] The positioning device (1) may be used as a device for bringing into the inspection device instead of the drawing device (101).

[0062] The configurations in the above embodiments and each variant may be appropriately combined as long as they do not contradict each other.

[0063] Although the invention has been described in detail, the description provided is illustrative and not limiting. Therefore, it can be said that numerous modifications or embodiments are possible without departing from the scope of the invention. Explanation of the symbols

[0064] 1: Positioning device 8 : Control unit 9 : Substrate 11: X return mechanism 13 : Y roller mechanism (support part) 21:X Roller 22 : Congratulations 31 : X position determining member 32 : Escape device 41, 41a : Y roller 41b: Auxiliary roller 51: First pressing member 52: 1st moving mechanism 61: Second pressure member 62: Second moving mechanism 911 : End 921: First section 922: Part 2

Claims

Claim 1 A positioning device for determining the position of a substrate having a micro pattern formed thereon or having a micro pattern formed thereon, comprising: a support member that supports the substrate from below in a state movable in a positioning direction perpendicular to a first end of the substrate and parallel to the main surface of the substrate; a first pressing member facing the first end of the substrate; a second pressing member facing the second end parallel to the first end of the substrate; a first moving mechanism that moves the first pressing member toward the first end to bring the first pressing member into contact with the first end, moves the second end toward the second pressing member to a position where it does not contact the second pressing member, and then separates the first pressing member from the first end; and after the first pressing member is separated from the first end, moves the second pressing member toward the second end to move the second pressing member A positioning device having a second moving mechanism that contacts the second end and moves the second end to a predetermined reference position. Claim 2 A positioning device according to claim 1, wherein the support member comprises a plurality of rollers rotatable about an axis perpendicular to the positioning direction while in contact with the lower surface of the substrate. Claim 3 A positioning device according to claim 2, wherein the height direction position of the first end of the substrate is higher than the height direction position of the second end while supported by the support member. Claim 4 A positioning device according to claim 2 or 3, wherein some of the rollers of the plurality of rollers have greater rotational resistance than other rollers. Claim 5 A positioning device according to claim 4, wherein an auxiliary roller contacts the part of the roller and a mutual pushing force acts between the part of the roller and the auxiliary roller. Claim 6 A positioning device for determining the position of a substrate on which a fine pattern is formed or on which a fine pattern is formed, comprising: a conveying mechanism that supports the substrate from below and conveys the substrate in a conveying direction perpendicular to one end of the substrate and parallel to the main surface of the substrate; a positioning member disposed in a conveying area of ​​the substrate and capable of withdrawing from the conveying area; a withdrawal mechanism for withdrawing the positioning member from the conveying area; and a control unit that, while the positioning member is withdrawn from the conveying area, conveys the substrate to one side of the conveying direction by the conveying mechanism to pass the positioning member, positions the positioning member in the conveying area, and conveys the substrate to the other side of the conveying direction by the conveying mechanism to bring the substrate into contact with the positioning member.

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