Electrode structure, and method for manufacturing thereof

Abstract

An electrode structure and a method for manufacturing the same are disclosed. An electrode structure according to one embodiment of the present invention comprises an arc portion having a serpentine structure in which arcs bent in a curved shape are alternately arranged, and a reinforcing portion formed at the center of each arc of the arc portion, wherein the center of each arc of the arc portion where the reinforcing portion is formed is formed to be thicker or wider than other parts of the arc portion to provide reinforcement treatment.

Description

Technology Field

[0001] The present invention relates to an electrode structure and a method for manufacturing the same, and more specifically, to an electrode structure having an efficient serpentine structure that relieves stress concentration and a method for manufacturing the same. Background Technology

[0002] Stretchable sensors possess geometric flexibility, making them highly versatile for use in various fields. Stretchable sensors are widely used in wearable devices for monitoring heart and physiological signals, as well as in the biomedical field.

[0003] The serpentine structure used in stretch sensors (devices) consists of a pattern of alternating curved arcs and serves to connect two or more components.

[0004] The serpentine structure stretches along with the stretchable sensor substrate as it is stretched, providing flexibility. For example, the serpentine structure can be used in wearable devices to maintain flexible connections so that wires do not break in response to body movements.

[0005] However, when uniaxial strain is applied to a stretchable sensor substrate having a serpentine structure, stress concentration may occur at the center of the interconnected arcs.

[0006] In a serpentine structure, the center of the arc is subjected to the greatest stress, leading to concentrated deformation and a high likelihood of structural damage.

[0007] In addition, if stress concentration persists during the repetitive deformation process, the durability of the sensor may be reduced due to fatigue, and electrical characteristics may change or uniform signal transmission may be difficult due to the stress concentration. Prior art literature

[0008] Korean Registered Patent No. 10-2692452 (Title of Invention: Expansion / Shrinkage Carbon Veil Constantan Sensor, Registration Date: August 1, 2024) The problem to be solved

[0009] The objective of the present invention is to solve these conventional problems by providing an electrode structure that relieves stress concentration by reinforcing the center of each arc of an arc portion having a serpentine structure in which arcs are alternately arranged, and a method for manufacturing the same.

[0010] The problems of the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by a person skilled in the art from the description below. means of solving the problem

[0011] To solve the above-mentioned problem, an electrode structure according to one aspect of the present invention comprises an arc portion having a serpentine structure in which arcs bent in a curved shape are alternately arranged, and a reinforcing portion formed at the center of each arc of the arc portion, wherein the center of each arc of the arc portion where the reinforcing portion is formed is formed to be thicker or wider than other parts of the arc portion to provide reinforcement treatment.

[0012] The reinforcing part can be formed of a material with greater tensile strength compared to other parts of the arc part.

[0013] The reinforcing part can be formed of a material different from other parts of the arc part by varying the ratio of mixing one or more of PEDOT:PSS, carbon nanotubes, silver nanowires, gold nanowires, and graphene with the polymer.

[0014] The reinforcing part may be characterized by being superimposed printed using an electrohydrodynamic printing method.

[0015] Each arc center of the arc portion formed with a reinforcing portion is arranged to be separated from the flexible sensor substrate, and other parts of the arc portion excluding the arc center are arranged to be adhered to the flexible sensor substrate, so that it can be manufactured into a three-dimensional structure.

[0016] Each arc center of the arc section where the reinforcement is formed can have a fractal structure that replicates the serpentine structure.

[0017] Each arc center of the arc portion formed with a reinforcing portion can have a three-dimensional coil structure.

[0018] A method for manufacturing an electrode structure according to another aspect of the present invention comprises: an arc portion forming step of forming an arc portion having a serpentine structure in which arcs bent in a curved shape are alternately arranged on a film; a reinforcement portion forming step of forming a reinforcement portion by additionally overlapping and printing a set number of times to reinforce the center of each arc of the arc portion; a coating step of uniformly coating a PDMS (Polydimethylsiloxane) solution poured onto a film; a curing step of curing for a set temperature and time; a transfer step of transferring the shape of the serpentine structure to PDMS; and a wiring step of cutting the transferred shape of the serpentine structure to a set size and then wiring.

[0019] In the reinforcement formation step, the reinforcement may be characterized by being superimposed on the printed area of ​​the arc portion.

[0020] In the arc formation step, when printing using an electrohydrodynamic printing method, the arc can be printed using PEDOT:PSS.

[0021] In the reinforcement formation step, when printing using an electrohydrodynamic printing method, the reinforcement can be superimposed with a material different from other parts of the arc by varying the ratio of mixing one or more of PEDOT:PSS, carbon nanotubes, silver nanowires, gold nanowires, and graphene with the polymer.

[0022] In the transfer stage, the center of each arc of the arc portion can be kept away from the PDMS, and other parts excluding the arc center can be adhered to the PDMS to form a three-dimensional structure. Effects of the invention

[0023] According to the electrode structure and the method for manufacturing the same of the present invention, the following effects are achieved.

[0024] First, by reinforcing the center of each arc of the arc section having a serpentine structure, a stable and efficient structure with relieved stress concentration can be obtained.

[0025] Second, the center of each arc in the arc section can be effectively reinforced by overlapping the printing to be thicker compared to other parts of the arc section.

[0026] Third, the center of each arc of the arc part can be arranged to be separated from the flexible sensor substrate, and other parts of the arc part can be arranged to be adhered to the flexible sensor substrate, thereby allowing for the fabrication of a three-dimensional structure.

[0027] The effects of the present invention are not limited to those mentioned above, and other unmentioned effects will be clearly understood by a person skilled in the art from the description in the claims. Brief explanation of the drawing

[0028] FIG. 1 is a plan view of an electrode structure according to one embodiment of the present invention. Figure 2 is a side view of the electrode structure of Figure 1. Figure 3 illustrates a comparison between the electrode structure of Figure 1 and a conventional electrode structure having a spentine structure. Figures 4 and 5 show examples in which the reinforcing part of the electrode structure of Figure 1 has a fractal structure or a coil structure. FIGS. 6 and FIGS. 7 illustrate a method for manufacturing an electrode structure according to an embodiment of the present invention, as a flowchart and a conceptual diagram, respectively. FIGS. 8 and 9 are illustrated to explain the difference in effect by comparing an electrode structure according to one embodiment of the present invention with a conventional electrode structure having a spentine structure. Specific details for implementing the invention

[0029] The advantages and features of the present invention and the methods for achieving them will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but may be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same components.

[0030] The size or shape of components depicted in the drawings attached to this specification may be exaggerated for clarity and convenience of explanation. It should be noted that identical components in each drawing may be depicted with the same reference numeral. Furthermore, detailed descriptions of functions and configurations of known technology that are deemed to unnecessarily obscure the essence of the invention may be omitted.

[0031] The terms used herein are for describing specific embodiments and are not intended to limit the invention. As used herein, the singular form may include the plural form unless the context clearly indicates otherwise. Furthermore, throughout this specification, when a part is described as "comprising" a certain component, it means that it may include additional components unless specifically stated otherwise.

[0032] When it is stated that one component is "connected" or "connected" to another component, it should be understood that while it may be directly connected or connected to that other component, there may also be other components in between. Conversely, when it is stated that one component is "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between. Other expressions used to describe relationships between components should be interpreted in the same way.

[0033] Terms such as top, bottom, upper surface, lower surface, or upper, lower, used in this specification are used to distinguish relative positions among components. For example, while the upper part of a drawing may be designated as the upper part and the lower part as the lower part for convenience, in practice, the upper part may be designated as the lower part and the lower part as the upper part without departing from the scope of the present invention.

[0034] Terms including ordinal numbers, such as "the first," "the second," etc., as described in this specification may be used to describe various components, but said components are not limited by said terms. These terms are used merely to distinguish that each component is a different component and are not bound by the order of manufacture; furthermore, the names may not match between the detailed description of the invention and the claims.

[0035] All terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the present invention pertains, unless otherwise defined. Terms such as those defined in commonly used dictionaries should be interpreted as having a meaning consistent with their meaning in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this specification.

[0036] The symbols attached to each step are used to identify each step and do not indicate the order of the steps relative to one another; the steps may be performed differently from the specified order unless a specific order is clearly indicated in the context.

[0037] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

[0038] FIG. 1 is a plan view of an electrode structure according to one embodiment of the present invention, and FIG. 2 is a side view of the electrode structure of FIG. 1. FIG. 3 is a comparison of the electrode structure of FIG. 1 and a conventional electrode structure having a spentine structure. FIG. 2 is an enlarged view of a part of the arc portion when unfolded into a line shape to aid understanding.

[0039] Referring to FIGS. 1 to 3, an electrode structure (100) according to an embodiment of the present invention includes an arc portion (110) having a serpentine structure in which arcs bent in a curved shape are alternately arranged, and a reinforcing portion (120) formed at the center of each arc of the arc portion (110).

[0040] The arc section (110) has a serpentine structure, and arcs that are curved in a curved shape are alternately extended and arranged. Each arc may have a set radius of curvature. The radius of curvature can affect stress distribution and deformation characteristics, and flexibility can be controlled according to its size.

[0041] Each arc is not arranged in a single direction, but alternates between up-and-down and left-and-right directions. This increases elasticity and flexibility, allowing the arc's curvature to unfold or fold to absorb deformation when external force is applied.

[0042] The reinforcing portion (120) is formed at the center of each arc of the arc portion (110), and is a portion formed by additionally overlapping and printing a reinforcing treatment at the center of each arc of the arc portion (110). That is, the center of each arc of the arc portion (110) where the reinforcing portion (120) is formed forms a layer that is thicker or wider than other parts of the arc portion (110) due to the reinforcing portion (120).

[0043] In an embodiment of the present invention, an electrode (structure) can be formed by printing the arc portion (110) and the reinforcing portion (120) using an electrohydrodynamic (EHD) printing method.

[0044] The electrohydrodynamic printing method can print an arc portion (110) having a serpentine structure using PEDOT:PSS (poly(3,4-ethylenedioxythiophene)-polystyrenesulfonic acid). PEDOT:PSS is a material with characteristics such as high electrical conductivity, flexibility, and transparency.

[0045] In another example, an arc portion (110) can be printed using an ink that combines PEDOT:PSS and PVA (polyvinyl alcohol). In this case, the arc portion (110) can be printed with a volume ratio of PEDOT:PSS and PVA ink of 10:1. By printing an arc portion (110) having a serpentine structure with a volume ratio of PEDOT:PSS and PVA ink of 10:1 (optimal ratio), excellent conductivity and structural stability could be maintained. For example, if the volume ratio of PEDOT:PSS and PVA ink is set to 5:1 (less than the optimal ratio), structural problems such as ink spreading and cracking may occur, and if the volume ratio of PEDOT:PSS and PVA ink is set to 15:1 (more than the optimal ratio), a decrease in conductivity may occur.

[0046] Electrohydrodynamic printing is a printing method that uses an electric field to finely spray ink (or conductive material). Unlike conventional inkjet printing, it utilizes an electric field to create precise patterns. Because it enables the fabrication of high-resolution, fine patterns, it is suitable for manufacturing various small electronic devices, such as sensors, electrodes, and biomaterials.

[0047] The thickness and width of the serpentine structure according to an embodiment of the present invention can be measured in the Z-axis and Y-axis directions, respectively. When using an electrohydrodynamic printing method, droplets or ink are deposited while being ejected. With each printing, ink is deposited to a certain height, and if the same area is printed repeatedly, new ink is deposited on top of the previous layer, causing the height (thickness) and width to gradually increase. Therefore, as the number of printing cycles increases, the thickness and width may increase, and the viscosity, drying speed, and surface tension of the material may also affect the final thickness and width.

[0048] The overlapping printing method of the reinforcing part (120) may refer to a method of stacking multiple layers by repeating one or more times on the center of each arc of the arc part (110) using an electrohydrodynamic printing method. Through this, the thickness and width of the serpentine structure of the arc part (110) can be adjusted, or a structure can be formed to have desired electrical and mechanical properties.

[0049] In an embodiment of the present invention, only the necessary part (the center of the arc) of the arc part (110) is reinforced through the reinforcing part (120), thereby increasing the overall thickness and width and reducing material consumption.

[0050] The reinforcing part (120) can be formed of a material with greater tensile strength than other parts of the arc part (110).

[0051] The material for increasing the tensile strength of the reinforcing part (120) may include one or more of a metal-based material, a carbon-based material, and a polymer-based composite material.

[0052] Here, the metal-based material may include one or more of silver nanowires, gold nanowires, copper nanowires, or thin films.

[0053] Carbon-based materials may include one or more of graphene, carbon nanotubes, and nanodiamond composite materials.

[0054] Polymer-based composite materials may include one or more of polyimide (PI), PDMS and silver nanoparticle composites, and PDMS and carbon nanotube composites.

[0055] The reinforcing part (120) can be formed of a material different from other parts of the arc part (110) by mixing one or more of PEDOT:PSS, carbon nanotubes, silver nanowires, gold nanowires and graphene with a polymer at different ratios.

[0056] Here, carbon nanotubes (CNT) possess excellent strength and flexibility. Carbon nanotubes are cylindrical nanomaterials in which atoms are arranged in a hexagonal structure; possessing high electrical and thermal conductivity and mechanical strength, they can be utilized in electronic materials, composite materials, etc. Silver nanowires (Ag nanowires) possess high electrical conductivity and mechanical strength. Silver nanowires are thin, long materials composed of silver (Ag) with a nanometer-sized diameter; they possess excellent conductivity and transparency and can be used in transparent electrodes, flexible displays, etc.

[0057] The reinforcing part (120) is provided to be separated from the flexible sensor substrate, and other parts of the arc part (110) excluding the reinforcing part (120) (non-reinforcing area) are provided to be adhered to the flexible sensor substrate so as to be manufactured into a three-dimensional structure.

[0058] Since the reinforcing part (120) is not attached to the flexible sensor substrate, stress is not concentrated even during repeated deformation (stretching, bending), so the possibility of cracking or damage can be reduced. In addition, when the arc part (110) stretches during stretching, the reinforcing part (120) is not fixed, so cracking or disconnection of the electrode can be prevented.

[0059] Through this 3D structural design, the durability, flexibility, mechanical stability, and electrical performance of the stretchable sensor can all be improved.

[0060] Referring to FIG. 3(a), in the conventional electrode structure (10) having a serpentine structure, when a uniaxial strain that stretches in only one direction is applied to a flexible sensor substrate, a crack may occur due to a stress concentration phenomenon at the center of the interconnected arcs. As such, in a serpentine structure, the center of the arc receives the greatest stress, causing deformation to concentrate, and there is a high possibility of structural damage occurring.

[0061] Referring to FIG. 3(b), in order to resolve the aforementioned conventional problems, in an embodiment of the present invention, an arc portion (110) is printed using an electrohydrodynamic printing method, and then each arc portion (110) is additionally printed with an overlapping number of times to form a reinforcing portion (120), thereby reinforcing each arc portion (110).

[0062] The arc portion (110) may have a serpentine structure printed using an electrohydrodynamic printing method. A reinforcing portion (120) may be formed by additionally overlapping printing one or more times at the center of each arc of the arc portion (110). Thus, at the center of each arc of the arc portion (110) where the reinforcing portion (120) is formed, overlapping printing is performed to form a printed layer that is thicker or wider than other parts.

[0063] In this way, by reinforcing the center of each arc of the arc portion (110) where stress concentration occurs, even if uniaxial deformation is applied to the flexible sensor substrate in only one direction, stress concentration is relieved, preventing cracks from occurring and allowing for a stable structure.

[0064] Figures 4 and 5 show examples in which the reinforcing part of the electrode structure of Figure 1 has a fractal structure or a coil structure.

[0065] Referring to FIGS. 4 and FIGS. 5, each arc center of the arc portion (110) in which the reinforcing portion (120) described above in another example is formed may have a fractal structure (121) that replicates the serpentine structure of the arc portion (110).

[0066] The fractal structure (121) distributes stress over a wider area, so structural stability can be maintained even after long-term use.

[0067] In another example, each arc center of the arc portion (110) in which the reinforcing portion (120) is formed may have a coil structure (122).

[0068] The coil structure (122) has excellent elastic recovery power that allows it to easily return to its original shape even after stretching, and maintains constant electrical characteristics without the connection between electrodes being broken during stretching. The coil structure (122) provides higher elasticity and elastic recovery power, making it suitable for environments where it stretches or contracts significantly.

[0069] FIGS. 6 and FIGS. 7 illustrate a method for manufacturing an electrode structure according to an embodiment of the present invention, as a flowchart and a conceptual diagram, respectively. In the following, redundant details described above will be omitted as much as possible.

[0070] Referring to FIGS. 6 and 7, an arc portion forming step (S601) is performed in which an arc portion (110) having a serpentine structure in which arcs are alternately arranged in a curved shape is printed on a film (202) using an electrohydrodynamic printing method.

[0071] The film (202) may include a PET (Polyethylene Terephthalate) film that has good durability and excellent chemical stability.

[0072] When printing using an electrohydrodynamic printing method, an arc portion (110) can be printed using PEDOT:PSS. A serpentine structure can be formed by finely spraying PEDOT:PSS ink using an electric field through the nozzle of the printing device (210). The arc portion (110) can be printed once, or in other examples, it can be printed two or more times in a superimposed manner.

[0073] Next, a reinforcement forming step is performed (S611) to form a reinforcement part (120) by additionally overlapping printing a set number of times to reinforce each arc center of the arc part (110).

[0074] In the reinforcement formation step (S611), a reinforcement part (120) can be formed by additionally overlaying printing one or more times on the center of each arc of the arc part (110) among the printed parts of the arc part (110). To do this, ink to be used to form the reinforcement part (120) can be sprayed one or more times only on the center of each arc of the arc part (110) using an electric field by the nozzle of the printing device (210).

[0075] At this time, when printing using an electrohydrodynamic printing method, the reinforcing part (120) can be superimposed with a material different from other parts (non-reinforced areas) of the arc part (110) by mixing one or more of PEDOT:PSS, carbon nanotubes, silver nanowires, gold nanowires, and graphene with a polymer at different ratios.

[0076] Next, a PDMS (Polydimethylsiloxane) solution is poured onto the film, and then a coating step is performed to uniformly coat it using a spin coater (220, Spin Coater) (S621).

[0077] Next, a curing treatment is performed using an oven for a set temperature and time, and a transfer step is performed so that the reinforced serpentine structure is transferred to PDMS (230) (S631).

[0078] Here, the oven may include a convection oven, and, for example, can perform a curing treatment on the PDMS (230) coated area at 70°C for 2 hours.

[0079] In the transfer step (S631), each arc center of the arc portion (110) can be separated from the PDMS (230), and other parts (non-reinforced areas) excluding the arc center can be bonded to the PDMS (230) to form a three-dimensional structure.

[0080] In order to separate each arc center of the arc portion (110) from the PDMS (230), the reinforcing portion (120) area may be surface-treated for each arc center of the arc portion (110) before the PDMS (230) is cured to reduce adhesion with the PDMS (230). In another embodiment, a temporary sacrificial layer may be formed under the reinforcing portion (120) to prevent bonding with the PDMS, and the sacrificial layer may be removed (e.g., dissolved in a solution or heat-treated) so that the reinforcing portion (120) remains separated from the surface of the PDMS (230).

[0081] Afterwards, a wiring processing step is performed in which the transferred serpentine structure is cut to a set size and then wired (S641).

[0082] As described above, after the reinforced serpentine structure (also called a pattern) is transferred to PDMS (230), the batch-produced patterns can be cut into, for example, square shapes.

[0083] In the wiring processing step (S641), wiring (240) processing can be performed using a copper wire and silver paste. The silver paste may include a conductive paste containing fine silver (Ag) particles.

[0084] In this way, according to the embodiment of the present invention described above, each arc center of the arc portion (110) having a serpentine structure is reinforced to have a stable and efficient electrode structure with reduced stress concentration.

[0085] In another embodiment, instead of using the transfer process described above in the method for manufacturing the electrode structure, the surface of the PDMS may be plasma treated, and the arc portion (110) and the reinforcing portion (120) may be printed directly onto the PDMS to produce the electrode structure (100).

[0086] The electrode structure (100) according to an embodiment of the present invention can be applied to biomedical devices, wearable devices, etc., including electromyography (EMG) and electrocardiography (ECG) measuring devices.

[0087] FIGS. 8 and 9 are illustrated to explain the difference in effect by comparing an electrode structure according to one embodiment of the present invention with a conventional electrode structure having a spentine structure.

[0088] Referring to FIG. 8(a), when stretching occurs in which the length increases or the shape is deformed due to an external force (tensile force, pressure, etc.) applied to the sensor substrate (PDMS), a large crack of a size that affects structural stability occurs at the center of the arc.

[0089] Referring to FIG. 8(b), the electrode structure (100) according to an embodiment of the present invention has a reinforcing treatment at the center of the arc so that even when expansion occurs, cracks do not occur or remain in a negligible, minute size, thereby maintaining structural stability.

[0090] FIG. 9(a) is a graph showing the experimental results of an electrode structure (10) having a conventional spentine structure, and FIG. 9(b) is a graph showing the experimental results of an electrode structure (100) according to an embodiment of the present invention.

[0091] Here, the test was conducted by increasing the strain by 1% increments up to a maximum of 10%, and the point at which cracks occurred was identified by analyzing the change in resistance in the time domain.

[0092] As a result of the experiment, cracking began in the conventional electrode structure (10) at the 60-second mark. The fact that the resistance increased irreversibly at that point indicates that the electrode did not recover to its original state and that the electrical performance deteriorated.

[0093] On the other hand, the electrode structure (100) according to the embodiment of the present invention maintained structural stability, with almost no cracks occurring or only negligible small cracks even when the strain was increased up to 10% during testing.

[0094] As described above, preferred embodiments of the present invention have been illustrated and described with reference to the drawings; however, the present invention is not limited to the specific embodiments described above. Various modifications are possible by those skilled in the art without departing from the essence of the invention as claimed in the patent claims, and such modifications should not be understood individually from the technical spirit or perspective of the present invention. Explanation of the symbols

[0095] 100: Electrode structure 110: Arkbu 120: Reinforcement part 121: Fractal Structure 122: Coil structure 202: Film (PET) 210: Printing device 220: Spin Coater 230: PDMS 240: Wiring

Claims

Claim 1 An electrode structure comprising: an arc section having a serpentine structure in which arcs bent in a curved shape are alternately arranged; and a reinforcing section formed at the center of each arc of the arc section; wherein the center of each arc of the arc section where the reinforcing section is formed is formed to be thicker or wider than other parts of the arc section to provide reinforcement treatment. Claim 2 In claim 1, the reinforcing part is an electrode structure formed of a material having a greater tensile strength than other parts of the arc part. Claim 3 In claim 1, the reinforcing part is an electrode structure formed of a material different from other parts of the arc part by mixing one or more of PEDOT:PSS, carbon nanotubes, silver nanowires, gold nanowires, and graphene with a polymer at different ratios. Claim 4 The electrode structure according to claim 1, wherein the reinforcing part is superimposed printed using an electrohydrodynamic printing method. Claim 5 In claim 1, each arc center of the arc portion formed with the reinforcing portion is arranged to be separated from the flexible sensor substrate, and other parts of the arc portion excluding the arc center are arranged to be adhered to the flexible sensor substrate, thereby forming an electrode structure with a three-dimensional structure. Claim 6 A method for manufacturing an electrode structure according to any one of claims 1 to 5, comprising: an arc portion forming step of forming an arc portion having a serpentine structure in which arcs bent in a curved shape are alternately arranged on a film; a reinforcement portion forming step of forming a reinforcement portion by additionally overlapping and printing a set number of times to reinforce the center of each arc of the arc portion; a coating step of uniformly coating after pouring a PDMS solution onto the film; a curing treatment step of curing for a set temperature and time; a transfer step of transferring the shape of the serpentine structure to the PDMS; and a wiring treatment step of cutting the transferred shape of the serpentine structure to a set size and then wiring. Claim 7 A method for manufacturing an electrode structure according to claim 6, wherein, in the step of forming the reinforcing part, the reinforcing part is superimposed and printed on the printed portion of the arc part. Claim 8 A method for manufacturing an electrode structure according to claim 6, wherein, in the step of forming the arc portion, the arc portion is printed using an electrohydrodynamic printing method, and the arc portion is printed using PEDOT:PSS. Claim 9 A method for manufacturing an electrode structure according to claim 6, wherein, in the step of forming the reinforcement part, when printing using an electrohydrodynamic printing method, the reinforcement part is superimposed and printed with a material different from other parts of the arc part by varying the ratio of mixing one or more of PEDOT:PSS, carbon nanotubes, silver nanowires, gold nanowires, and graphene with the polymer. Claim 10 A method for manufacturing an electrode structure according to claim 6, wherein, in the transfer step, each arc center of the arc portion is kept away from the PDMS, and other portions excluding the arc center are adhered to the PDMS to form a three-dimensional structure.

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