Front opening unified pod for containing for containing square substrates and circular substrates

Abstract

The front-opening integrated pod includes a shell, door flanks, and a support unit. The shell includes an upper panel, a lower panel, a rear panel, and two side panels connected to each other. The upper, lower, rear, and side panels together provide an interior space that includes a front opening. The door flanks are operable to close the front opening. The support unit includes two side racks attached to the side panels in the interior space and a rear rack attached to the rear panel in the interior space.

Description

Technology Field

[0001] The present invention relates to a semiconductor, and more specifically, to a front-opening integrated pod capable of holding a square substrate and a circular substrate. Background Technology

[0002] Substrates, such as wafers or glass substrates, are placed in pods during storage or transport in the manufacturing process to maintain the quality of the semiconductor products made into substrates. For example, a front-opening unified pod ("FOUP") is used to hold circular wafers. A panel-type FOUP is used to hold square panels.

[0003] FOUPs cannot be used to hold square panels. Panel-type FOUPs cannot be used to hold circular wafers. As a result, different pods must be used for different substrates. Therefore, the cost of purchasing different pods is relatively high, and using different pods is cumbersome.

[0004] Therefore, the present invention aims to eliminate or at least alleviate the problems encountered in the prior art.

[0005] The main objective of the present invention is to provide a FOUP capable of holding a square substrate and a circular substrate.

[0006] To achieve the above purpose, the front-opening integrated pod comprises a shell, a door flank, and a support unit. The shell comprises an upper panel, a lower panel, a rear panel, and two side panels connected to each other. The upper, lower, rear, and side panels together provide an interior space that includes a front opening. The door flank is operable to close the front opening. The support unit comprises two side racks attached to the side panels in the interior space and a rear rack attached to the rear panel in the interior space.

[0007] In another aspect, the side rack and the rear rack each include pins for supporting square and circular substrates.

[0008] Other objects, advantages, and features of the present invention will become apparent from the following detailed description with reference to the accompanying drawings. Brief explanation of the drawing

[0009] The present invention will be explained through a detailed description of embodiments with reference to the drawings. FIG. 1 is an exploded view of a FOUP according to one embodiment of the present invention. Figure 2 is another exploded view of the FOUP shown in Figure 1. Fig. 3 is a front view of the FOUP shown in Fig. 1. Figure 4 is a perspective view of the side rack of the FOUP shown in Figure 1. Fig. 5 is a perspective view of the rear rack of the FOUP shown in Fig. 1. Figure 6 is an enlarged partial cross-sectional view of the side rack shown in Figure 4. FIG. 7 is a partial perspective view of a side rack of a FOUP according to another embodiment of the present invention. FIG. 8 is a partial perspective view of the rear rack of a FOUP according to another embodiment of the present invention. FIG. 9 is a partial perspective view of a side rack of a FOUP according to another embodiment of the present invention. FIG. 10 is an enlarged cross-sectional view of a side rack taken along line 10-10 shown in FIG. 9. FIG. 11 is a partial perspective view of a side rack of a FOUP according to another embodiment of the present invention. FIG. 12 is an enlarged cross-sectional view of a side rack taken along line 12-12 shown in FIG. 11. FIG. 13 is a partial perspective view of a side rack of a FOUP according to another embodiment of the present invention. FIG. 14 is an enlarged cross-sectional view of a side rack taken along line 14-14 shown in FIG. 13. FIG. 15 is a cross-sectional view of the FOUP shown in FIG. 1 including a square substrate. FIG. 16 is a cross-sectional view of the FOUP shown in FIG. 1 including a circular substrate. Specific details for implementing the invention

[0010] Referring to FIGS. 1 through 6, a front-opening integrated pod ("FOUP") according to a first embodiment of the present invention comprises a shell (10), a door flank (20), and a support unit (30). The FOUP is operable to hold a substrate (100), such as a square substrate (100b) (Fig. 15) and a circular substrate (100a) (Fig. 16).

[0011] The shell (10) includes an upper panel (11), a lower panel (12), a rear panel (13), and two side panels (14). The rear panel (13) is positioned between the upper panel (11) and the lower panel (12) and connected, and the side panels (14) are likewise connected. The upper panel (11), lower panel (12), rear panel (13), and side panels (14) together define an internal space (15) that includes a front opening (16). A substrate (100) can be inserted into the internal space (15) through the front opening (16) or moved within the internal space (15). Preferably, a handle (17) that can be operated by a robot (not shown) is formed on the upper panel (11).

[0012] Preferably, the upper panel (11), lower panel (12), rear panel (13), and side panel (14) are manufactured as a single piece. In another embodiment, the shell (10) includes a rear opening (not shown). The rear opening is closed by attaching the rear panel (13) to the upper panel (11), lower panel (12), and side panel (14). The rear opening is opened by removing the rear panel (13) from the upper panel (11), lower panel (12), and side panel (14).

[0013] The door flank (20) is operable to close the front opening (16). The door flank (20) is equipped with a latch mechanism (23) that can be operated to lock the door flank (20) to the shell (10) and thereby close the front opening (16). The door flank (20) has an inner surface (22) to which a substrate holder (25) is attached. The substrate holder (25) includes a plate spring (28). Each plate spring (28) is operable to press the edge of the substrate (100). The plate spring (28) is formed according to the circular substrate (100a) or the square substrate (100b). In another embodiment, each plate spring (28) may include a groove (not shown) for receiving the edge of the corresponding substrate (100).

[0014] The support unit (30) includes two side racks (31) and one rear rack (35). Each side rack (31) is attached to the inner surface of the corresponding side panel (14) so ​​that the side rack (31) is inserted into the internal space (15). The rear rack (35) is attached to the inner surface of the rear panel (13) so that the rear rack (35) is inserted into the internal space (15). The side racks (31) and the rear rack (35) together support the substrate (100) horizontally.

[0015] It should be noted that the side rack (31) can be replaced with the same rack as the rear rack (35). That is, the support unit (30) includes three racks (35). It should be noted that the rear rack (35) can be replaced with the same rack as the side rack (31). That is, the support unit (30) includes three racks (31).

[0016] Referring to FIGS. 4 and 6, each side rack (31) includes a pin (41) and a tab (43). The pin (41) extends horizontally. Two adjacent pins (41) are separated from each other by a gap (42) of depth (D). Each pin (41) includes an upper surface (411) and a lower surface (412). The upper surface (411) of each pin (41) is intended to contact the lower surface of the substrate (100). Preferably, each tab (43) extends from the middle portion of the edge of the corresponding pin (41).

[0017] Referring to FIG. 5, the rear rack (35) includes a chamber (36), two conduits (37) communicating with the chamber (36), and a slot (39) communicating with the chamber (36). The slot (39) is formed in the front panel of the rear rack (35). Two valves (38) (Fig. 2) are mounted on the lower panel (14). Each valve (38) communicates with the corresponding conduit (37) when the rear rack (35) is attached to the rear panel (13). Thus, air can enter the internal space (15) from outside the shell (10) through the valve (38), conduit (37), chamber (36), and slot (39).

[0018] Preferably, the rear rack (35) includes a row of side pins (41) and a row of middle pins (41). A slot (39) is located between the corresponding pin (41) of each side row and the corresponding pin (41) of the middle row. Each pin (41) of the first side row, the corresponding pin (41) of the middle row, and the corresponding pin (41) of the second side row are arranged on the same horizontal line. A tab (43) is formed on each pin (41) of the middle row.

[0019] When in use, each pin (41) of the first side rack (31), the corresponding pin (41) of the second side rack (31), and the pin (41) of the corresponding line of the rear rack (35) together support the substrate. Tab (43)

[0020] Referring to FIGS. 7 and 8, according to a second embodiment of the present invention, each pin (41) of each side rack (31) includes a groove (44) that follows a part of a circle, and likewise each pin (41) in the middle row of the rear rack (35). Each groove (44) is useful for accommodating a part of the circular substrate (100a).

[0021] Referring to FIGS. 9 and 10, there is a side rack (31) according to a third embodiment of the present invention. The third embodiment is identical to the second embodiment except that each pin (41) has two bosses (45) formed outside the groove (44) and two bosses formed inside the groove (44). The bosses (45) outside the groove (44) are for contacting a square substrate (100b). The bosses (45) inside the groove (44) are for contacting a circular substrate (100a). The bosses (45) inside the groove (44) do not extend beyond the upper surface (411) of each pin (41).

[0022] Referring to FIGS. 11 and 12, there is a side rack (31) according to a fourth embodiment of the present invention. The fourth embodiment is identical to the second embodiment except for two points. First, the boss (45) is an elongated boss. Second, the elongated boss (46) extends from the corresponding elongated boss (45). Each elongated boss (46) includes a chamber (47) at one end so that the edge of the substrate (100) can easily move past the elongated boss (46) to the elongated boss (45). The elongated boss (46) reduces the total contact area between the edge of the substrate (100) and each side rack (31).

[0023] Referring to FIGS. 13 and 14, there is a side rack (31) according to a fifth embodiment of the present invention. The fifth embodiment is identical to the third embodiment except that, instead of each pin (41), each tab (43) has a groove (48) formed therein corresponding to a portion of the edge of each circular substrate (100a). Each circular substrate (100a) has a diameter (W1). Each square substrate (100b) has a width (W2). For example, the diameter (W1) of each square substrate (100a) is 300 mm, and the width (W2) of each square substrate (100b) is 310 mm. The distance between the two side racks (31) is 310 mm, corresponding to the width (W2) of each square substrate (100b) (Fig. 15). The distance between the edge of each pin (41) of the side rack (31) and the edge of the corresponding pin (41) of the other side rack (31) is 300 mm, which corresponds to the diameter (W1) of each circular substrate (100b).

[0024] The present invention has been described by way of illustrative examples. Those skilled in the art can derive various modifications from the examples without departing from the scope of the invention. Accordingly, the examples should not limit the scope of the invention as defined in the claims.

Claims

Claim 1 A front-opening integrated pod comprising a shell (10) including an upper panel (11), a lower panel (12), a rear panel (13), and two side panels (14) connected to each other, wherein the upper, lower, rear, and side panels (11, 12, 13, 14) together provide an interior space (15) including a front opening (16); a door flank (20) closing the front opening (16); and a support unit (30) including two side racks (31) attached to the side panels (14) in the interior space and a rear rack (35) attached to the rear panel (13) in the interior space (15). Claim 2 In claim 1, the side rack (31) and the rear rack (35) each include separate pins (41), and the pins (41) of one of the side racks (31), the corresponding pins (41) of the remaining side racks (31), and the corresponding pins (41) of the rear rack (35) are each arranged along the same horizontal line, forming a front-opening integrated pod. Claim 3 In claim 2, each pin (41) includes a groove (44) in the middle portion that corresponds to the edge portion of the circular substrate (100a), and the groove (44) of the pin (41) arranged along each horizontal line accommodates the corresponding edge portion of the circular substrate (100a), forming a front-open integrated pod. Claim 4 In claim 1, each of the side rack (31) and the rear rack (35) comprises separate pins (41), each of the pins (41) of one of the side racks (31), the corresponding pins (41) of the remaining side racks (31), and the corresponding pins (41) of the rear rack (35) are arranged along the same horizontal line, each of the pins (41) comprises a groove (44) in the middle portion along the edge portion of the circular substrate (100a), and the grooves (44) of the pins (41) arranged along each horizontal line accommodate the edge portion of the corresponding circular substrate (100a), forming a front-opening integrated pod. Claim 5 In claim 2, each pin (41) comprises a tab (43) extending from the middle portion, forming a front-opening integrated pod. Claim 6 In claim 5, each pin (41) comprises an upper surface extending higher than the upper surface of the tab (43), forming a front-opening integrated pod. Claim 7 In claim 2, each pin (41) is a front-opening integrated pod including a boss (45). Claim 8 In claim 2, the rear rack (35) comprises a chamber (36), a conduit (37) communicating with the chamber (36), and a slot (39) communicating with the chamber (36), and air can enter the internal space (15) through the conduit (37), the chamber (36), and the slot (39), forming a front-opening integrated pod. Claim 9 In claim 1, one of the side rack and the rear rack (35) comprises a first and second side pin row (41) and a middle pin row (41), and each of the pins (41) of the first side row, the corresponding pins (41) of the second side row, and the corresponding pins (41) of the middle row are arranged along a horizontal line, forming a front-opening integrated pod.

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