Current direction switching control device and current direction detection system
The current direction switching control device simplifies and stabilizes the switching of the magnetic lens coil current direction in semiconductor chip electron beam defect detection, addressing operational challenges and power overload through a 'soft switching' mechanism.
Patent Information
- Authority / Receiving Office
- KR · KR
- Patent Type
- Patents
- Current Assignee / Owner
- 동방 징위옌 엘렉트론 컴퍼니 리미티드
- Filing Date
- 2024-06-20
- Publication Date
- 2026-07-15
AI Technical Summary
The mechanical method for switching the current direction of a magnetic lens coil in semiconductor chip electron beam defect detection is cumbersome and prone to power overload, affecting system operation.
A current direction switching control device comprising a first and second power supply circuit, a relay, and a control circuit, which allows the load circuit to conduct with either the first or second power supply circuit, simplifying the switching process and preventing power overload through a 'soft switching' method.
The solution enables convenient and safe switching of the current direction of the magnetic lens coil, improving operational stability and safety by avoiding power overload and mechanical issues.
Smart Images

Figure 112024067022614-PAT00001_ABST
Abstract
Description
Technology Field
[0001] This application relates to the field of circuit technology, and in particular to a current direction switching control device and a current direction detection system. Background Technology
[0002] With the advancement of the semiconductor chip industry, the application of semiconductor chips in various industrial fields is becoming increasingly common. To ensure the quality of semiconductor chips, electron beam defect detection is generally performed, and in this process, the current direction of the magnetic lens coil must be switched multiple times.
[0003] In related technologies, the current direction of a magnetic lens coil can be switched using a mechanical method; however, this method is cumbersome to operate and may cause problems such as power overload, which significantly affects the operation of the entire system. Accordingly, a method to simplify the switching of the current direction of the magnetic lens coil is very important. The problem to be solved
[0004] The present application provides a current direction switching control device and a current direction detection system. means of solving the problem
[0005] According to a first aspect of the present application, a current direction switching control device is provided, wherein the current direction switching control device comprises a first power supply circuit, a second power supply circuit, a relay, a load circuit, and a control circuit; the current direction of the first power supply circuit is opposite to the current direction of the second power supply circuit; the relay is connected to the load circuit, the first power supply circuit, and the second power supply circuit; and the control circuit is connected to the relay to control the relay such that the load circuit conducts with the first power supply circuit or the load circuit conducts with the second power supply circuit.
[0006] In some embodiments, the first power supply circuit is connected to the first contact, second contact, third contact, and fourth contact of the relay; the second power supply circuit is connected to the first contact, second contact, fifth contact, and sixth contact of the relay; the load circuit is connected to the first contact and second contact of the relay; and the control circuit is connected to the control coil of the relay; wherein the control circuit is configured to control the first contact and third contact of the relay to conduct and the second contact and fourth contact to conduct, so that the load circuit conducts with the first power supply circuit; or, the control circuit is configured to control the first contact and fifth contact of the relay to conduct and the second contact and sixth contact to conduct, so that the load circuit conducts with the second power supply circuit.
[0007] In some embodiments, the current direction switching control device further includes a power switch; the power switch is connected to the first power supply circuit and the second power supply circuit to supply power to the first power supply circuit and the second power supply circuit; and the control terminal of the power switch is connected to the control circuit to control the control circuit to conduct or disconnect.
[0008] In some embodiments, a switch tube is installed in the control circuit, the gate of the switch tube is connected to the control terminal of the power switch, the drain of the switch tube is connected to the relay, and the source of the switch tube is used for grounding; when the power switch is triggered, the control terminal of the power switch is configured to send a first control signal to the switch tube to control the switch tube to conduct, thereby supplying power to the control coil of the relay; and when the power switch is not triggered, the control terminal of the power switch is configured to send a second control signal to the switch tube to control the switch tube to shut off, thereby cutting off the power supply to the control coil of the relay.
[0009] In some embodiments, the switch tube is a MOS tube.
[0010] In some embodiments, a light-emitting diode is installed in the control circuit; the input terminal of the light-emitting diode is connected to the control terminal of the power switch, the output terminal of the light-emitting diode is used for grounding, and the light-emitting diode is configured to conduct and emit light when the power switch is triggered.
[0011] In some embodiments, the control circuit further includes a power supply and a discharge branch circuit; the discharge branch circuit is connected in parallel with the control coil of the relay and is connected to the switch tube, and the power supply is connected to the control coil of the relay and the discharge branch circuit.
[0012] In some embodiments, a diode and a discharge resistor are installed in the discharge branch circuit, one end of the discharge resistor is connected to the control coil of the relay, and the other end of the discharge resistor is connected to the input terminal of the diode.
[0013] According to a second aspect of the present application, a current direction detection system is provided, wherein the current direction detection system comprises a current direction detection device and a current direction switching control device according to any one aspect described above; the current direction detection device is connected to a load circuit of the current direction switching control device and is used to detect the current direction of the load circuit.
[0014] According to a third aspect of the present application, a semiconductor detection device is provided, wherein the semiconductor detection device comprises a magnetic lens coil and a current direction switching control device according to any one aspect described above; and the load circuit is connected to the magnetic lens coil. Effects of the invention
[0015] In summary, the current direction switching control device, current direction detection system, and semiconductor detection device provided in the present application have at least the following beneficial effects: The current direction switching control device may include a first power supply circuit, a second power supply circuit, a relay, a load circuit, and a control circuit, and accordingly, by controlling the relay so that the load circuit conducts with the first power supply circuit or conducts with the second power supply circuit, the current direction can be switched through the first power supply circuit and the second power supply circuit, making operation simple and easy and improving the convenience of switching the current direction of the magnetic lens coil. Brief explanation of the drawing
[0016] To more clearly explain the specific embodiments of the present application or the technical methods of the prior art, the drawings used to describe the specific embodiments or prior art will be briefly introduced below. Of course, the drawings in the following description are some embodiments of the present application, and those skilled in the art can obtain other drawings based on these drawings without creative effort. FIG. 1 is a schematic diagram of a current direction switching control device provided by an embodiment of the present application. FIG. 2 is a schematic diagram of a current direction switching control device provided by an embodiment of the present application. FIG. 3 is a schematic diagram of a current direction switching control device provided by an embodiment of the present application. FIG. 4 is a schematic diagram of a current direction detection device provided by an embodiment of the present application. FIG. 5 is a schematic diagram of a current direction detection device provided by an embodiment of the present application. FIG. 6 is a schematic diagram of a timing diagram provided by an embodiment of the present application. Specific details for implementing the invention
[0017] To further clarify the above and other features and advantages of the present application, the present application is described further together with the drawings attached below. It should be understood by those skilled in the art that the specific embodiments presented herein are for illustrative purposes only and are not limiting.
[0018] In the following description, various specific details are explained to provide a thorough understanding of the present application. However, it will be apparent to those skilled in the art that specific details are not necessary to carry out the present application. In other cases, well-known steps or operations will not be described in detail to avoid obscuring the present application.
[0019] It should be noted that the current direction switching control device provided in this application can be applied to any scenario requiring current direction switching. For convenience of explanation, this application will be described using an application to a magnetic lens coil as an example, and this should not be used as a limitation to the current direction switching control device provided in this application.
[0020] The present application provides a semiconductor detection device, wherein the semiconductor detection device comprises a magnetic lens coil and a current direction switching control device, wherein the current direction switching control device is connected to the magnetic lens coil.
[0021] Generally, because the design of components within a circuit differs, a mechanical method is typically used to switch the current direction of a magnetic lens coil when it is necessary to switch the current direction. However, this method is cumbersome to operate and may cause problems such as power overload, which significantly affects the operation of the entire system. Therefore, in the embodiment of the present application, a current direction switching control device is provided to improve the stability of the semiconductor device and to simplify the process of switching the magnetic lens coil current. Through the current direction switching control device, the current direction of the magnetic lens coil can be conveniently switched. The current direction switching control device provided in the present application will be described in detail below with reference to FIG. 1.
[0022] Referring to FIG. 1, the present application provides a current direction switching control device, wherein the current direction switching control device may include a first power supply circuit, a second power supply circuit, a relay, a load circuit, and a control circuit.
[0023] Here, the current direction of the first power supply circuit may be opposite to the current direction of the second power supply circuit, and the relay may be connected to the load circuit, the first power supply circuit, and the second power supply circuit, and the control circuit may be connected to the relay to control the relay so that the load circuit conducts with the first power supply circuit or conducts with the second power supply circuit.
[0024] Here, both the first power supply circuit and the second power supply circuit can supply power to the load circuit, and when power is supplied to the load circuit using the first power supply circuit, the current flowing through the magnetic lens coil is opposite in direction to the current flowing through the magnetic lens coil when power is supplied to the load circuit using the second power supply circuit.
[0025] It can be understood that the load circuit can be connected to the magnetic lens coil. When the load circuit conducts with the first power supply circuit, the current flowing through the load circuit and the magnetic lens coil is a first direction current, and at this time, the first input terminal of the switch unit of the detection device can receive the first direction current; when the load circuit conducts with the second power supply circuit, the current flowing through the load circuit and the magnetic lens coil is a second direction current, and at this time, the second input terminal of the switch unit of the detection device can receive the second direction current. Accordingly, in the embodiment of the present application, the state of the relay is controlled through the control circuit to implement conduction between the load circuit and the first power supply circuit or conduction between the load circuit and the second power supply circuit, thereby switching the direction of the current. Since this switching method is simple and easy to operate, the switching of the current direction of the magnetic lens coil can be implemented more conveniently.
[0026] In an embodiment of the present application, the current direction switching control device may include a first power supply circuit, a second power supply circuit, a relay, a load circuit, and a control circuit, and by controlling the relay so that the load circuit conducts with the first power supply circuit or conducts with the second power supply circuit, the current direction can be switched through the first power supply circuit and the second power supply circuit, making operation simple and easy and improving the convenience of switching the current direction of the magnetic lens coil.
[0027] It can be understood that the relay further includes multiple contacts and control coils, and based on FIG. 1, a current direction switching control device provided by the present application is further described with reference to FIG. 2.
[0028] Here, the first power supply circuit can be connected to the first, second, third, and fourth contacts of the relay, the second power supply circuit can be connected to the first, second, fifth, and sixth contacts of the relay, the load circuit can be connected to the first and second contacts of the relay, and the control circuit can be connected to the control coil of the relay.
[0029] As shown in FIG. 2, here, connection point "3" of the relay is the first contact, connection point "7" is the second contact, connection point "2" is the third contact, connection point "6" is the fourth contact, connection point "4" is the fifth contact, and connection point "8" is the sixth contact.
[0030] Here, the load circuit may include the first load interface and the second load interface of FIG. 2 or FIG. 3, and may be connected to a magnetic lens coil and a relay.
[0031] Here, when the first power supply circuit is conducted, the direction of current flow at this time may be in the order of the third contact "2", the first contact "3", the second load interface, the magnetic lens coil, the first load interface, the second contact "7", and the fourth contact "6". When the second power supply circuit is conducted, the direction of current flow at this time may be in the order of the sixth contact "8", the second contact "7", the first load interface, the magnetic lens coil, the second load interface, the first contact "3", and the fifth contact "4". That is, when the first contact and the third contact are conducted and the second contact and the fourth contact are conducted, the load circuit may be conducted with the first power supply circuit; and when the first contact and the fifth contact are conducted and the second contact and the sixth contact are conducted, the load circuit may be conducted with the second power supply circuit.
[0032] Accordingly, in an embodiment of the present application, the control circuit may be configured to control the first and third contacts of the relay to conduct and the second and fourth contacts to conduct, so that the load circuit conducts with the first power supply circuit; or, the control circuit may be configured to control the first and fifth contacts of the relay to conduct and the second and sixth contacts to conduct, so that the load circuit conducts with the second power supply circuit. Accordingly, by controlling the conducted contacts within the relay through the control circuit, conduction between the load circuit and the first power supply circuit or conduction between the load circuit and the second power supply circuit can be realized, thereby allowing the load circuit to conduct with different power supply circuits and switching the direction of the current. Since this method is simple and easy to operate, switching the direction of the current can be implemented more conveniently.
[0033] Optionally, the current direction switching control device may further include a power switch.
[0034] Here, the power switch is connected to the first power supply circuit and the second power supply circuit to supply power to the first power supply circuit and the second power supply circuit, and the control terminal of the power switch is connected to the control circuit and can be used to control the conduction or interruption of the control circuit.
[0035] Here, the power switch may have various states, such as a triggered state and an untriggered state, and the present application is not limited thereto.
[0036] It can be understood that when the power switch is not triggered, the control circuit is cut off and the power switch can supply power to the first power supply circuit; when the power switch is triggered, the control circuit can conduct, and at this time, the power switch can supply power to the second power supply circuit. Therefore, if it is necessary to switch the current direction, the conduction state of the control circuit can be changed by changing the state of the power switch, so that the switching of the current direction can be implemented.
[0037] It can be understood that when the power switch is triggered, the power supply to the circuit can be cut off, and then a control signal is sent through the control terminal of the power switch to conduct the control circuit, thereby conducting the second power supply circuit and switching the direction of the current. By first cutting off the power through the power switch, the stability of the circuit can be further ensured, and risk can be reduced.
[0038] Optionally, a switch tube may be installed in the control circuit, the gate of the switch tube may be connected to the control terminal of the power switch, the drain of the switch tube may be connected to a relay, and the source of the switch tube may be used for grounding. Accordingly, in an embodiment of the present application, when the power switch is triggered, the control terminal of the power switch may be configured to send a first control signal to the switch tube to control the switch tube to conduct, thereby supplying power to the control coil of the relay; and when the power switch is not triggered, the control terminal of the power switch may be configured to send a second control signal to the switch tube to control the switch tube to shut off, thereby cutting off the power supply to the control coil of the relay.
[0039] Optionally, the switch tube may be a metal oxide semiconductor field-effect transistor (MOS tube).
[0040] Here, the first control signal may be a high-level signal, and the second control signal may be a low-level signal. Accordingly, when the control terminal of the power switch sends a high-level signal, the switch tube may be conducted, and thus power is supplied to the control coil of the relay, and the second power supply circuit may be conducted. When the control terminal of the power switch sends a low-level signal, the switch tube may be cut off, at which time power supply to the control coil of the relay is cut off and the first power supply circuit is conducted, but the present application is not limited thereto.
[0041] Optionally, the control circuit may further include a DC power supply such as 24V, 12V, or 30V, and the present application is not limited thereto.
[0042] For example, in the schematic diagram shown in FIG. 3, the switch tube is an NMOS tube, the gate of the NMOS tube is connected to the control terminal of the power switch, the drain of the NMOS tube can be connected to a relay, and the source of the NMOS tube can be used for ground.
[0043] Here, due to the presence of a DC power supply, when a first control signal, i.e., a high level signal, is sent from the control terminal of the power switch, the gate of the NMOS tube is at a high potential and the source is at a low potential, and the NMOS tube is conducted, and power is supplied to the control coil of the relay, at this time, the first contact "3" and the fifth contact "4" of the relay are conducted, and the second contact "7" and the sixth contact "8" are conducted, i.e., the second power supply circuit is conducted, at this time, the current of the magnetic lens coil flows from the first load interface to the second load interface.
[0044] When the second control signal, i.e., a low level signal, is sent from the control terminal of the power switch, the gate of the NMOS tube is at a low potential, the NMOS tube is cut off and becomes off, and the power supply to the control coil of the relay is cut off. At this time, the first contact "3" and the fifth contact "4" of the relay are cut off, and the second contact "7" and the sixth contact "8" are cut off, and the relay contacts return to the default state, i.e., the first contact "3" and the third contact "2" of the relay are conducted, and the second contact "7" and the fourth contact "6" are conducted, i.e., the first power supply circuit is conducted, and at this time, the current of the magnetic lens coil flows from the second load interface to the first load interface.
[0045] Accordingly, in an embodiment of the present application, the conduction of the switch tube is controlled by a control signal of the power switch, thereby changing the power supply circuit that is conducted. That is, by first performing a power off operation through the power switch to cut off the power of the first power supply circuit and the second power supply circuit in the circuit, situations such as power overload that may occur due to a mechanical "hard switching" can be prevented. That is, by switching the current direction of the magnetic lens coil through a "soft switching" method, the switching of the current direction is performed more conveniently and safely. This not only simplifies the process but also improves the safety of each component in the circuit.
[0046] Optionally, a light-emitting diode may also be installed in the control circuit.
[0047] Here, the input terminal of the light-emitting diode can be connected to the control terminal of the power switch, and the output terminal of the light-emitting diode can be used for ground; the light-emitting diode is configured to conduct and emit light when the power switch is triggered.
[0048] For example, in the circuit illustrated in FIG. 3, when the power switch is triggered, the control terminal of the power switch can output a first control signal, i.e., a high-level signal, and at this time, the light-emitting diode (D40) can conduct and emit light. Therefore, whether the power switch is successfully triggered can be further verified based on the state of the light-emitting diode (D40), and thus the safety of the circuit is further guaranteed.
[0049] Optionally, the control circuit may further include a power supply and a discharge branch circuit.
[0050] Here, the discharge branch circuit is connected in parallel to the control coil of the relay and can be connected to the switch tube, and the power supply can be connected to the control coil of the relay and the discharge branch circuit.
[0051] Here, the discharge branch circuit prevents component damage caused by excessive current, as the control coil can be discharged when changing from a power supply state to a power cut state.
[0052] Optionally, a diode and a discharge resistor may be installed in the discharge branch circuit, one end of the discharge resistor may be connected to the control coil of the relay, and the other end of the discharge resistor may be connected to the input terminal of the diode.
[0053] For example, in the circuit illustrated in Fig. 3, when a low-level signal is sent from the control terminal of the power switch, the NMOS tube is blocked, thereby controlling the power supply to the coil to be cut off, and at this time, discharge can be performed through the discharge resistor (R145) and diode (D34) of the discharge branch circuit.
[0054] Accordingly, in the embodiments of the present application, by using a discharge branch circuit, circuit damage caused by excessive instantaneous discharge current can be prevented, and the safety of the current direction switching control device can be ensured.
[0055] It can be understood that additional registers may be installed in the circuit to improve the safety of the circuit and facilitate debugging of the circuit. For example, registers (R138), (R141), (R142), (R143), (R147), (R148), (R139), (R150), (R314), (R156), etc. of FIG. 2 or FIG. 3.
[0056] In addition, capacitors may be installed in the circuit for filtering to further reduce interference. For example, interference can be reduced by performing filtering by installing capacitors (C129), capacitor (C130), capacitor (C137), capacitor (C141), and capacitor (C147) of the circuit shown in FIG. 2 or FIG. 3.
[0057] It should be noted that in actual application, the resistors or capacitors of the circuit may be adjusted as needed. For example, the installation location of the resistors or capacitors may be adjusted, or the number of resistors or capacitors installed may be adjusted, for example, by increasing the number of resistors or capacitors, decreasing the number of resistors or capacitors, or not installing resistors or capacitors, and the present application is not limited thereto. Optionally, embodiments of the present application may also provide a current direction detection system, said detection system may include a current direction detection device and a current direction switching control device according to any one of the above embodiments.
[0058] Here, the current direction detection device is connected to the load circuit of the current direction switching control device and can detect the current direction of the load circuit.
[0059] It can be understood that when current switching is required, the current direction of the load circuit can be detected first using a current direction detection device, and then the switching can be performed. Alternatively, the success of the current direction switching can be determined by detecting the current direction of the load circuit after performing the switching, thereby further improving the reliability and accuracy of the circuit.
[0060] In an embodiment of the present application, the current direction of a magnetic lens coil is switched through a current direction switching control device, and then the switched current direction is detected through a current direction detection device to determine whether the current direction switching was successful, thereby maximally ensuring the reliability and accuracy of the magnetic lens current direction switching.
[0061] Referring to FIG. 4, a current direction detection device provided by an embodiment of the present application will be described.
[0062] Here, the current direction detection device may include a switch unit, an operational amplifier unit, and a control unit.
[0063] Here, the first input terminal of the switch unit can receive a first direction current through a magnetic lens coil, and the second input terminal of the switch unit can also receive a second direction current through a magnetic lens coil, the first output terminal of the switch unit can be connected to the first input terminal of the operational amplifier unit, the second output terminal of the switch unit can be connected to the second input terminal of the operational amplifier unit, and the output terminal of the operational amplifier unit can be connected to a control unit.
[0064] Here, the first direction current may be a current flowing in from the first input terminal of the switch unit, and the second direction current may be a current flowing in from the second input terminal of the switch unit, and the present application is not limited thereto.
[0065] In addition, the operational amplifier unit may be any type of operational amplifier, and the present application does not limit its specifications, types, etc. The first input terminal of the operational amplifier unit may be an inverting input terminal, and the second input terminal may be a non-inverting input terminal, and the present application does not limit it thereto.
[0066] Additionally, the control unit may be a microcontroller unit (MCU) or any other type of processor, but the present application is not limited thereto.
[0067] It can be understood that, in the case of an operational amplifier, if the potential value of the non-inverting input terminal is greater than the potential value of the inverting input terminal, the output signal of the operational amplifier's output terminal may be a high-level signal, for example, "1". If the potential value of the inverting input terminal is greater than the potential value of the non-inverting input terminal, the output signal of the operational amplifier's output terminal may be a low-level signal, for example, "0". The present application is not limited thereto.
[0068] Accordingly, in an embodiment of the present application, the control unit can determine whether the current of the switch unit is a first-direction current or a second-direction current based on the output signal of the output terminal of the operational amplifier unit.
[0069] For example, if the output signal of the output terminal of the operational amplifier is "1", the control unit may determine that the current potential value of the non-inverting input terminal of the operational amplifier is greater than the potential value of the inverting input terminal; that is, the current direction of the switch unit is determined to be the first direction current flowing in from the first input terminal, and accordingly, the current of the magnetic lens coil is determined to be equal to the first direction current. If the output signal of the output terminal of the operational amplifier is "0", the control unit may determine that the potential value of the inverting input terminal of the operational amplifier is greater than the potential value of the non-inverting input terminal; that is, the current direction of the switch unit is determined to be the second direction current flowing in from the second input terminal, and accordingly, the current of the magnetic lens coil is determined to be equal to the second direction current, and the present application is not limited thereto.
[0070] Accordingly, in an embodiment of the present application, the control unit first determines the current direction of the switch unit based on the output signal of the output terminal of the operational amplifier unit, and then determines the current direction of the magnetic lens coil based on the current direction of the switch unit. This process is relatively simple, and by simplifying the process of determining the current direction and saving time, the efficiency of determining the current direction of the magnetic lens coil is improved.
[0071] In an embodiment of the present application, the current direction detection device may include a switch unit, an operational amplifier unit, and a control unit, and the control unit can determine the current direction of the switch unit based on the output signal of the output terminal of the operational amplifier unit to determine the current direction of the magnetic lens coil, and this method is relatively simple and simplifies the operation process, thereby improving the efficiency of determining the current direction of the magnetic lens coil.
[0072] It is understandable that in the actual implementation process, a first switch element and a second switch element may be installed in the switch unit, and based on FIG. 4, the current direction detection device provided by the present application is further described with reference to FIG. 5.
[0073] FIG. 5 is a current direction detection device provided by an embodiment of the present application.
[0074] Here, the first connection terminal of the first switch element can be connected to the second input terminal of the switch unit, the second connection terminal of the first switch element can be connected to the second output terminal of the switch unit, the second input terminal of the switch unit can be connected to the first output terminal of the switch unit, the first connection terminal of the second switch element can be connected to the first input terminal of the switch unit, and the second connection terminal of the second switch element can be connected to the first output terminal of the switch unit.
[0075] Optionally, the first switch element and the second switch element may both be diodes, and the first switch element and the second switch element may be connected in antiparallel.
[0076] As can be seen in FIG. 5, the first connection terminal of the first switch element (D45) is connected to the second input terminal "2" of the switch unit, and the second connection terminal of the first switch element (D45) can be connected to the second output terminal "2" of the switch unit, and the second input terminal "2" of the switch unit can be connected to the first output terminal "1" of the switch unit, and the first connection terminal of the second switch element (D46) can be connected to the first input terminal "1" of the switch unit, and the second connection terminal of the second switch element (D46) can be connected to the first output terminal "1" of the switch unit, and the first input terminal "1" of the switch unit is connected to the second output terminal "2" of the switch unit.
[0077] Optionally, when the first input terminal of the switch unit receives a first direction current, the second switch element conducts, the potential of the second output terminal of the switch unit is higher than the potential of the first output terminal of the switch unit, the potential of the non-inverting input terminal of the operational amplifier unit is higher than the potential of the inverting input terminal, and the operational amplifier unit can be used to output a high level. When the second input terminal of the switch unit receives a second direction current, the first switch element conducts, the potential of the second output terminal of the switch unit is lower than the potential of the first output terminal of the switch unit, the potential of the non-inverting input terminal of the operational amplifier unit is lower than the potential of the inverting input terminal, and the operational amplifier unit can be used to output a low level.
[0078] Accordingly, if the control unit determines that the output signal of the output terminal "6" of the operational amplifier is a high-level signal "1", it can determine that the current potential of the non-inverting input terminal is higher than the potential of the inverting input terminal, and at this time, current flows in from the first input terminal of the switch unit and flows out to the first output terminal, that is, the second switch element (D46) conducts, and accordingly, it can additionally determine that the current of the magnetic lens coil and the current of the second switch element (D46) remain equal. If the control unit determines that the output signal of the output terminal "6" of the operational amplifier is a low-level signal "0", it can determine that the current potential of the inverting input terminal is higher than the potential of the non-inverting input terminal, and at this time, current flows in from the second input terminal of the switch unit and flows out to the second output terminal, that is, the first switch element (D45) conducts, and accordingly, it can additionally determine that the current of the magnetic lens coil remains equal to the current of the first switch element (D45).
[0079] Accordingly, in an embodiment of the present application, the control unit can determine the conduction state of the first switch element and the second switch element according to the output signal of the output terminal of the operational amplifier unit, and then determine the current direction of the magnetic lens coil based on the conduction state of the first switch element and the second switch element, and since this has a simple structure, low cost, and easy operation, it improves the efficiency of current direction detection.
[0080] Optionally, the detection device may further include a first protection circuit and a second protection circuit.
[0081] Here, the first output terminal of the switch unit can be connected to the first input terminal of the operational amplifier unit through the first protection circuit, and the second output terminal of the switch unit can be connected to the second input terminal of the operational amplifier unit through the second protection circuit.
[0082] Optionally, the first protection circuit may include a first register, a second register, a third register, and a first capacitor, and / or the second protection circuit may include a fourth register, a fifth register, a sixth register, and a second capacitor.
[0083] For example, in the schematic diagram illustrated in FIG. 5, the first protection circuit may include a first resistor (R217), a second resistor (R218), a third resistor (R221), and a first capacitor (C197). The second protection circuit may include a fourth resistor (R219), a fifth resistor (R220), a sixth resistor (R222), and a second capacitor (C74).
[0084] It should be noted that the components of the current direction detection device may be adjusted as needed, for example, resistors and capacitors may be added or removed, and the present application is not limited thereto.
[0085] Optionally, the output terminal of the operational amplifier unit may be connected to an oscilloscope, and thus, by determining the current level value according to the waveform value of the oscilloscope, the current direction of the magnetic lens can be determined, thereby enabling the detection of the current direction of the magnetic lens coil, and the present application is not limited thereto.
[0086] Optionally, the current direction switching control device may further include a digital-to-analog converter (DAC), and the DAC may be used to convert a digital signal into an analog signal in the form of current, voltage, or charge. Accordingly, in an embodiment of the present application, a control signal sent from the control terminal of the power switch can be received through the DAC, and the control signal can be converted into an analog signal and transmitted to the control circuit.
[0087] Optionally, to further ensure the safety and reliability of current direction switching, a predetermined delay time may be set when current direction switching is required; simultaneously, due to the series of delay time settings, control is performed more logically and switching efficiency is further increased.
[0088] Here, the delay time may be a preset value such as 20 milliseconds (ms), 10ms, 100ms, etc., and the present application is not limited thereto.
[0089] For example, in the timing diagram shown in Fig. 6, the current direction of the load circuit can be detected first through a current direction detection device to read the current direction of the magnetic lens coil. Next, the DAC can maintain the original value or any non-zero value, that is, output a high level, and in this process, the DAC is not set to zero.
[0090] When the next current direction needs to be switched, the circuit's power switch can be cut off; that is, by first performing a power-off operation through the power switch, the power to the first and second power supply circuits of the circuit can be cut off, thereby improving the safety of each component within the circuit.
[0091] A predetermined delay time may be set, for example, after 20ms, the DAC is set to 0 and the relay is switched. To ensure the relay is successfully switched, the power supply may be delayed by 10ms. A subsequent delay time (for example, a 200ms delay) may be set, after which the target value of the DAC can be set. The current direction is read again, the DAC maintains its original value or a non-zero value, and the aforementioned operation is repeated, the present application is not limited thereto.
[0092] To clearly illustrate the circuit diagram, the connection relationships between each functional unit and the power supply may not be specifically illustrated in FIG. 1, FIG. 2, FIG. 3, FIG. 4, FIG. 5, and FIG. 6, and it should be noted that the description herein is merely schematic and should not be used as a limitation to the present application.
[0093] In an embodiment of the present application, the switch unit may include a first switch element and a second switch element, and thus the control unit can determine the conduction state of the first switch element and the second switch element based on the output signal of the output terminal of the operational amplifier unit to determine the current direction of the magnetic lens coil, and the circuit structure is simple, the cost is low, the operation is easy, and the efficiency of current direction detection is improved by simplifying the process of detecting the current direction of the magnetic lens coil.
[0094] It should be understood that each module / unit of the device of the present application may be implemented wholly or partially by software, hardware, firmware, or a combination thereof. Each module / unit may be embedded in or separated from the processor of the electronic device in the form of hardware or firmware, and may also be stored in the memory of the electronic device in the form of software that the processor can call to execute the operation of each module / unit. Each module / unit may be implemented as a separate component or module, or two or more modules / units may be implemented as a single component or module.
[0095] Each technical feature described above may be combined at will. Although not all possible combinations of such technical features have been described, all combinations of such technical features should be deemed to be included in this specification, provided there is no contradiction between them.
[0096] Finally, it should be noted that the above embodiments are used merely to illustrate the technical solutions of this application and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that it is still possible to modify the technical solutions described in the foregoing embodiments or to equivalently substitute some or all of the technical features; and that such modifications or substitutions do not cause the essence of such technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.
Claims
Claim 1 A current direction switching control device comprising a first power supply circuit, a second power supply circuit, a relay, a load circuit, and a control circuit, wherein the current direction of the first power supply circuit is opposite to the current direction of the second power supply circuit; the relay is connected to the load circuit, the first power supply circuit, and the second power supply circuit; and the control circuit is connected to the relay to control the relay so that the load circuit conducts with the first power supply circuit or the load circuit conducts with the second power supply circuit. Claim 2 A current direction switching control device according to claim 1, wherein the first power supply circuit is connected to the first contact, second contact, third contact, and fourth contact of the relay; the second power supply circuit is connected to the first contact, second contact, fifth contact, and sixth contact of the relay; the load circuit is connected to the first contact and second contact of the relay; and the control circuit is connected to the control coil of the relay. Claim 3 The current direction switching control device according to claim 1 further comprises a power switch; the power switch is connected to the first power supply circuit and the second power supply circuit to supply power to the first power supply circuit and the second power supply circuit; and the control terminal of the power switch is connected to the control circuit to control the control circuit to conduct or disconnect. Claim 4 A current direction switching control device according to claim 3, wherein a switch tube is installed in the control circuit, the gate of the switch tube is connected to the control terminal of the power switch, the drain of the switch tube is connected to the relay, and the source of the switch tube is used for grounding; when the power switch is triggered, the control terminal of the power switch is configured to send a first control signal to the switch tube to control the switch tube to conduct, thereby supplying power to the control coil of the relay; and when the power switch is not triggered, the control terminal of the power switch is configured to send a second control signal to the switch tube to control the switch tube to shut off, thereby cutting off the power supply to the control coil of the relay. Claim 5 A current direction switching control device characterized in that, in paragraph 4, the switch tube is a MOS tube. Claim 6 A current direction switching control device according to claim 4, wherein a light-emitting diode is installed in the control circuit; the input terminal of the light-emitting diode is connected to the control terminal of the power switch, the output terminal of the light-emitting diode is used for grounding, and the light-emitting diode is configured to conduct and emit light when the power switch is triggered. Claim 7 A current direction switching control device according to claim 4, wherein the control circuit further comprises a power supply and a discharge branch circuit; wherein the discharge branch circuit is connected in parallel with the control coil of the relay and connected to the switch tube, and the power supply is connected to the control coil of the relay and the discharge branch circuit. Claim 8 A current direction switching control device according to claim 7, wherein a diode and a discharge resistor are installed in the discharge branch circuit, one end of the discharge resistor is connected to the control coil of the relay, and the other end of the discharge resistor is connected to the input terminal of the diode. Claim 9 A current direction detection system comprising a current direction detection device and a current direction switching control device according to any one of claims 1 to 8; wherein the current direction detection device is connected to a load circuit of the current direction switching control device and is used to detect the current direction of the load circuit. Claim 10 A semiconductor detection device, wherein the semiconductor detection device comprises a magnetic lens coil and a current direction switching control device according to any one of claims 1 to 8; and wherein the load circuit is connected to the magnetic lens coil.