Static electricity visualization system

Abstract

An electrostatic visualization system is provided that can visually confirm the level of measured electrostatic charge. The electrostatic visualization system includes a first measuring unit that measures the level of electrostatic charge detected at a first position of a measurement target and includes a first mark; a shooting unit that captures the measurement target to generate a captured image; a Time of Flight (TOF) camera that measures the distance to the measurement target and generates a distance image that visualizes distance information; a processor that recognizes the first mark in the captured image and calculates the coordinates of the first mark on the captured image; and an output unit that outputs an electrostatic visualization image that visualizes the level of electrostatic charge measured by the first measuring unit on the distance image generated by the TOF camera in a first mode, wherein the electrostatic visualization image includes a color corresponding to the level of electrostatic charge measured by the first measuring unit on the coordinates of the first mark on the distance image.

Description

Technology Field

[0001] The present invention relates to an electrostatic visualization system. Background Technology

[0002] Static electricity is formed when electric charges generated by charging accumulate because they cannot be discharged due to the high resistance of the surface of the charged body; this is one of the critical problems that must be solved to improve yield in semiconductor manufacturing processes utilizing insulating substrates.

[0003] Static electricity, generated by various causes, is a primary cause of particle defects that accumulate on substrates during the manufacturing process. When discharge occurs due to static electricity, the electric potential reaches levels of hundreds or thousands of volts. Substrates on which highly integrated chips are formed can be severely affected, potentially leading to device destruction, even by charging potentials of only tens of volts. Consequently, there is an increasing need to measure and control the static electricity generated in substrate processing equipment. The problem to be solved

[0004] The problem that the present invention aims to solve is to provide an electrostatic visualization system capable of visually confirming the level of measured electrostatic charge.

[0005] The problems of the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0006] One aspect of the electrostatic visualization system of the present invention for achieving the above objective comprises: a first measuring unit that measures an electrostatic level detected at a first position of a measurement target and includes a first mark; a shooting unit that photographs the measurement target to generate a captured image; a Time of Flight (TOF) camera that measures the distance to the measurement target and generates a distance image that visualizes distance information; a processor that recognizes the first mark in the captured image and calculates the coordinates of the first mark on the captured image; and an output unit that, in a first mode, outputs an electrostatic visualization image that visualizes the electrostatic level measured by the first measuring unit on the distance image generated by the TOF camera, wherein the electrostatic visualization image includes a color corresponding to the level of electrostatics measured by the first measuring unit on the coordinates of the first mark on the distance image.

[0007] The above TOF camera and the above imaging unit are positioned in the same location.

[0008] The processor receives the distance image from the TOF camera and the electrostatic level measured by the first measuring unit, and generates the electrostatic visualization image by displaying a color corresponding to the electrostatic level measured by the first measuring unit on the coordinates of the first mark in the distance image.

[0009] The processor calculates the three-dimensional coordinates of the first mark on the distance image using the distance information calculated from the distance image and the coordinates of the first mark calculated by the processor, and the output unit outputs the three-dimensional coordinates of the first mark.

[0010] The output unit outputs a graph of the change in the electrostatic level measured by the first measuring unit for a certain period of time in the second mode.

[0011] The output unit, in the third mode, outputs a color corresponding to the level of static electricity measured by the first measuring unit on the coordinates of the first mark on the image captured by the capturing unit.

[0012] The first measuring unit transmits the measured electrostatic level data to the processor via wireless communication.

[0013] The first measuring unit includes a display unit that directly outputs the measured electrostatic level as a numerical value.

[0014] The electrostatic level detected at a second location of the measurement target is measured, and the second measuring unit including a second mark is further included, the shooting unit recognizes the second mark, the processor calculates the coordinates of the second mark on the captured image, and the electrostatic visualization image further includes a color corresponding to the level of electrostatics measured by the second measuring unit on the coordinates of the second mark on the distance image, and the first mark and the second mark have different shapes.

[0015] Another aspect of the electrostatic visualization system of the present invention for achieving the above objective comprises: a first measuring unit including a first mark that measures an electrostatic level detected at a first position of a measurement target; a shooting unit that captures the measurement target and generates a captured image; a TOF camera positioned at the same location as the shooting unit and measuring the distance to the measurement target; a processor that recognizes the first mark in the captured image and calculates the coordinates of the first mark on the captured image; and an output unit that outputs an electrostatic visualization image that visualizes the electrostatic level measured by the first measuring unit on the captured image generated by the shooting unit, wherein the electrostatic visualization image includes a color corresponding to the level of electrostatics measured by the first measuring unit on the coordinates of the first mark on the captured image, the processor calculates the three-dimensional coordinates of the first mark using the coordinates of the first mark and the distance to the measurement target measured by the TOF camera, and the output unit outputs the three-dimensional coordinates of the first mark.

[0016] Specific details of other embodiments are included in the detailed description and drawings. Brief explanation of the drawing

[0017] FIG. 1 is a conceptual diagram illustrating an electrostatic visualization system according to one embodiment of the present invention. Figure 2 is a diagram illustrating a TOF camera. FIGS. 3 to 5 are drawings for explaining an electrostatic visualization system according to an embodiment of the present invention. FIGS. 6 and 7 are drawings for explaining the operation of an electrostatic visualization system according to an embodiment of the present invention. FIG. 8 is a diagram illustrating the operation of an electrostatic visualization system according to one embodiment of the present invention. FIG. 9 is a drawing for explaining an electrostatic visualization system according to one embodiment of the present invention. FIG. 10 is a drawing for explaining an electrostatic visualization system according to one embodiment of the present invention. Specific details for implementing the invention

[0018] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The advantages and features of the present invention, and the methods for achieving them, will become clear by referring to the embodiments described below in detail together with the accompanying drawings. However, the present invention is not limited to the embodiments disclosed below but can be implemented in various different forms. These embodiments are provided merely to ensure that the disclosure of the present invention is complete and to fully inform those skilled in the art of the scope of the invention, and the present invention is defined only by the scope of the claims. Throughout the specification, the same reference numerals refer to the same components.

[0019] When elements or a layer are referred to as being "on" or "on" another element or layer, it includes not only being directly on top of the other element or layer but also cases where another layer or element is interposed in between. On the other hand, when an element is referred to as being "directly on" or "directly on," it indicates that no other element or layer is interposed in between.

[0020] Spatially relative terms such as "below," "beneath," "lower," "above," and "upper" may be used to facilitate the description of the relationship between one element or component and another, as illustrated in the drawings. Spatially relative terms should be understood as encompassing different orientations of the element during use or operation, in addition to the orientations illustrated in the drawings. For example, if an element illustrated in the drawings is flipped, the element described as "below" or "beneath" of another element may be placed "above" of that other element. Therefore, the exemplary term "below" may encompass both the lower and upper directions. Elements may also be oriented in other directions, and accordingly, spatially relative terms may be interpreted according to the orientation.

[0021] Although terms such as "first," "second," etc. are used to describe various elements, components, and / or sections, it goes without saying that these elements, components, and / or sections are not limited by these terms. These terms are used merely to distinguish one element, component, or section from another. Accordingly, it goes without saying that the first element, first component, or first section mentioned below may be a second element, second component, or second section within the technical scope of the present invention.

[0022] The terms used herein are for describing the embodiments and are not intended to limit the invention. In this specification, the singular form includes the plural form unless specifically stated otherwise in the text. As used herein, "comprises" and / or "comprising" do not exclude the presence or addition of one or more other components, steps, actions, and / or elements to the mentioned components, steps, actions, and / or elements.

[0023] Unless otherwise defined, all terms used in this specification (including technical and scientific terms) may be used in a meaning that is commonly understood by those skilled in the art to which the present invention pertains. Additionally, terms defined in commonly used dictionaries are not to be interpreted ideally or excessively unless explicitly and specifically defined otherwise.

[0024] Hereinafter, embodiments of the present invention will be described in detail with reference to the attached drawings. In describing with reference to the attached drawings, identical or corresponding components are given the same reference number regardless of the drawing symbols, and redundant descriptions thereof will be omitted.

[0025] FIG. 1 is a conceptual diagram illustrating an electrostatic visualization system according to an embodiment of the present invention. FIG. 2 is a drawing illustrating a TOF camera.

[0026] Referring to FIG. 1, an electrostatic visualization system (1) according to one embodiment includes a measuring unit (100), a mark (110), a Time of Flight (TOF) camera (210), a shooting unit (220), a processor (300), and an output unit (400).

[0027] The measuring unit (100) may be installed on the measurement target (T). The measuring unit (100) may be placed on the surface of the measurement target (T). One or multiple measuring units (100) may be installed on the measurement target (T).

[0028] The measuring unit (100) can measure the level of static electricity detected at a location installed on the surface of the measurement target (T). In FIG. 1, the measurement target (T) is depicted as a device for processing substrates, but the embodiment is not limited thereto. For example, the measurement target (T) on which the measuring unit (100) is installed may include industrial equipment other than a substrate processing device.

[0029] The measuring unit (100) may include an electrostatic sensor to measure the electrostatic level of the measurement target (T). The electrostatic sensor may measure the electrostatic level at a single point or in a single area of ​​the measurement target (T). The type of electrostatic sensor is not limited and may include any electrostatic sensor that is currently commercialized or may be commercialized in the future as technology advances.

[0030] The measuring unit (100) may include one or more electrostatic sensors. When the measuring unit (100) includes one electrostatic sensor, each color displayed in the electrostatic visualization image output by the output unit (400) may appear as a single dot.

[0031] When one measuring unit (100) includes a plurality of electrostatic sensors, each color displayed in the electrostatic visualization image output by the output unit (400) can be represented as an area.

[0032] The measuring unit (100) can transmit data regarding the level of the measured static electricity to the processor (300). In some embodiments, the measuring unit (100) can transmit data regarding the level of the measured static electricity to the processor (300) via wireless communication. For example, the measuring unit (100) can transmit data regarding the level of the measured static electricity to the processor (300) via Bluetooth.

[0033] The measuring unit (100) may include a mark (110). Specifically, the mark (110) may be attached to the surface of the measuring unit (100). The mark (110) may be recognized by the capturing unit (220) to indicate the location of the measuring unit (100).

[0034] The mark (110) can be attached to and detached from the measuring unit (100). According to an embodiment, the measuring unit (100) with the mark (110) attached and the measuring unit (100) without the mark (110) attached may be installed on the measurement target (T). Since the measuring unit (100) without the mark (110) attached is not recognized by the shooting unit (220), the level of static electricity measured by the measuring unit (100) without the mark (110) attached may not be visually displayed in the image output by the output unit (400). At this time, the measuring unit (100) without the mark (110) attached can output the level of static electricity measured directly as a numerical value to the display unit including the measuring unit (100).

[0035] In FIG. 1, the mark (110) is depicted as having a star shape, but the embodiment is not limited thereto. The shape of the mark (110) can be varied according to the embodiment. For example, the mark (110) may have a square or a circle shape.

[0036] The measuring unit (100) may include a display unit (120). The display unit (120) may be placed on the front of the measuring unit (100) together with a mark (110). The measuring unit (100) may output the level of static electricity measured through the display unit (120). The display unit (120) may include a display unit. Specifically, the measuring unit (100) may output the level of static electricity measured at an installed location as a numerical value through the display unit included in the measuring unit (100).

[0037] The TOF camera (210) can measure the distance to the measurement target (T) by photographing the measurement target (T). Specifically, the TOF camera (210) can measure the distance between the measurement unit (100) installed on the measurement target (T) and the TOF camera (210). The TOF camera (210) can measure the distance between the measurement unit (100) and the TOF camera (210) and provide it to the processor (300).

[0038] The TOF camera (210) can measure the distance from the installed location to the measurement target (T) and generate a distance image using the distance information. The distance image may include an image with different colors displayed depending on the distance from the TOF camera (210) to the measurement target (T).

[0039] For example, referring to FIGS. 1 and 2, a portion of a measurement target (T) separated from a TOF camera (210) by a first distance (D1) may be displayed in a first color in the distance image. A portion of a measurement target (T) separated from a TOF camera (210) by a second distance (2) greater than the first distance (D1) may be displayed in a second color in the distance image. A portion of a measurement target (T) separated from a TOF camera (210) by a third distance (D3) greater than the first distance (D1) and the second distance (D2) may be displayed in a third color in the distance image. Each of the first to third colors may include colors with different saturation. Alternatively, the first to third colors may include colors with different brightness.

[0040] The shooting unit (220) can photograph the measurement target (T). Specifically, the shooting unit (220) can photograph the measurement target (T) on which the measurement unit (100) is installed.

[0041] The shooting unit (220) can transmit an image of the measurement target (T) to the processor (300). If the size of the captured image data transmitted by the shooting unit (220) to the processor (300) is large, the shooting unit (220) can transmit the image of the measurement target (T) to the processor (300) via wired communication.

[0042] The TOF camera (210) and the shooting unit (220) can be installed at the same location. That is, the TOF camera (210) and the shooting unit (220) can be spaced apart from the measurement target (T) by the same distance in the same direction. By installing the TOF camera (210) and the shooting unit (220) at the same location, the coordinates of the mark (110) calculated by the processor (300) using the captured image provided by the shooting unit (220) can be applied on the distance image generated by the TOF camera (210). That is, the coordinates of the mark (110) in the image captured by the TOF camera (210) and the coordinates of the mark (110) in the image captured by the shooting unit (220) can match each other.

[0043] The processor (300) can generate an electrostatic visualization image that visually displays the level of electrostatics measured by the measuring unit (100).

[0044] The processor (300) may receive data on the level of static electricity measured by the measuring unit (100) from the measuring unit (100). The processor (300) may receive an image of the measurement target (T) captured by the shooting unit (220) from the shooting unit (220). The processor (300) may receive a distance image generated by the TOF camera (210) from the TOF camera (210).

[0045] The processor (300) can recognize a mark (110) included in an image provided by the capturing unit (220). For example, the processor (300) may include a hardware accelerator that implements an algorithm for recognizing the mark (110), and the processor (300) can recognize the mark (110) through the said algorithm.

[0046] The processor (300) can calculate the coordinates of the recognized mark (110) in the image provided by the shooting unit (220). The coordinates of the mark (110) calculated by the processor (300) can represent the location of the measuring unit (100) to which the mark (110) is attached. The processor (300) can calculate the three-dimensional coordinates of the mark (110) using the distance information with the measurement target (T) included in the distance image provided by the TOF camera (210) and the coordinates of the mark (110) recognized in the image provided by the shooting unit (220).

[0047] The processor (300) can set the mode of the output unit (400). Specifically, the processor (300) can control the output unit (400) to change the image output by switching the first mode, second mode, and third mode of the output unit (400).

[0048] The processor (300) can determine the color to be displayed in the electrostatic visualization image using the level of electrostatics provided by the measuring unit (100). Specifically, the processor (300) can generate an electrostatic visualization image by determining a color corresponding to the level of electrostatics measured by the measuring unit (100) and displaying the determined color on a distance image provided by the TOF camera (210). Alternatively, the processor (300) can generate an electrostatic visualization image by determining a color corresponding to the level of electrostatics measured by the measuring unit (100) and displaying the determined color on a captured image provided by the capturing unit (220). This will be explained in detail below with reference to FIGS. 3 to 5.

[0049] The output unit (400) can output an electrostatic visualization image provided by the processor (300). The output unit (400) can output an electrostatic visualization image in which colors representing the level of electrostatic measured by the measurement unit (100) are displayed on the coordinates of the mark (110) of the measurement unit (100) in a distance image generated by the TOF camera (210) or a captured image in which the measurement target (T) is captured by the shooting unit (220). The output unit (400) can output the three-dimensional coordinates of the mark (110) provided by the processor (300). The output unit (400) can change the output image according to the mode set by the processor (300). This will be explained in detail below with reference to FIGS. 6 to 9.

[0050] FIGS. 3 to 5 are drawings for explaining an electrostatic visualization system according to an embodiment of the present invention.

[0051] Referring to FIGS. 3 to 5, the color chart may include colors corresponding to the level of static electricity measured by the measuring unit (100). That is, the processor (300) may determine a color corresponding to the level of static electricity provided by the measuring unit (100) according to the color chart, and display the determined color on a static electricity visualization image output by the output unit (400).

[0052] For example, referring to FIG. 3, the first color chart can match the level of static electricity with the color when the entire range of the level of static electricity measured by the measuring unit (100) is from -20000V to +20000V and the entire range of the level of static electricity is divided into four level sections.

[0053] Accordingly, when the processor (300) determines the color included in the electrostatic visualization image according to the first color chart, if the level of electrostatics measured by the measuring unit (100) corresponds to the first level (LV1) of the first color chart, the processor (300) can display the first color (C1) on the coordinates of the mark (110) included by the measuring unit (100) in the distance image provided by the TOF camera (210) or the captured image provided by the capturing unit (220). If the level of electrostatics measured by the measuring unit (100) corresponds to the second level (LV2) of the first color chart, the processor (300) can display the second color (C2) on the coordinates of the mark (110) included by the measuring unit (100) in the distance image provided by the TOF camera (210) or the captured image provided by the capturing unit (220).

[0054] Likewise, when the level of static electricity measured by two measuring units (100) at different locations corresponds to the third level (LV3) and fourth level (LV4) of the first color chart, the processor (300) can display the third color (C3) and fourth color (C4), respectively, on the coordinates of the mark (110) included by the measuring unit (100) in the distance image provided by the TOF camera (210) or the captured image provided by the capturing unit (220).

[0055] For another example, referring to FIG. 4, the second color chart can match the level of static electricity with the color when the entire range of the level of static electricity measured by the measuring unit (100) is from -10000V to +10000V and the entire range of the level of static electricity is divided into four level sections.

[0056] Accordingly, when the processor (300) determines the color included in the electrostatic visualization image according to the second color chart, if the level of electrostatics measured by the measuring unit (100) corresponds to the fifth level (LV5) of the second color chart, the processor (300) may display the fifth color (C5) on the coordinates of the mark (110) included by the measuring unit (100) in the distance image provided by the TOF camera (210) or the captured image provided by the capturing unit (220). If the level of electrostatics measured by the measuring unit (100) corresponds to the sixth level (LV6) of the second color chart, the processor (300) may display the sixth color (C6) on the coordinates of the mark (110) included by the measuring unit (100) in the distance image provided by the TOF camera (210) or the captured image provided by the capturing unit (220).

[0057] Likewise, when the level of static electricity measured by two measuring units (100) at different locations corresponds to the 7th level (LV7) and 8th level (LV8) of the second color chart, the processor (300) can display the 7th color (C7) and 8th color (C8), respectively, on the coordinates of the mark (110) included by the measuring unit (100) in the distance image provided by the TOF camera (210) or the captured image provided by the capturing unit (220).

[0058] For another example, referring to FIG. 5, the third color chart can match the level of static electricity with the color when the total range of the level of static electricity measured by the measuring unit (100) is from -20000V to +20000V and the total range of the level of static electricity is divided into three level intervals.

[0059] Accordingly, when the processor (300) determines the color included in the electrostatic visualization image according to the third color chart, if the level of electrostatics measured by the measuring unit (100) corresponds to the first level (LV1) of the third color chart, the processor (300) may display the ninth color (C9) on the coordinates of the mark (110) included by the measuring unit (100) in the distance image provided by the TOF camera (210) or the captured image provided by the capturing unit (220). If the level of electrostatics measured by the measuring unit (100) corresponds to the second level (LV2) of the third color chart, the processor (300) may display the tenth color (C10) on the coordinates of the mark (110) included by the measuring unit (100) in the distance image provided by the TOF camera (210) or the captured image provided by the capturing unit (220).

[0060] FIGS. 3 to 5 illustrate cases where the level range of the total static electricity measured by the measuring unit (100) is classified into four or three level sections, but the embodiments are not limited thereto. Depending on the level range of the total static electricity measured by the measuring unit (100), the number of sections dividing the level range of the total static electricity may vary according to the embodiments.

[0061] As the number of intervals dividing the total static electricity level range increases, the number of colors corresponding to each interval also increases, so the distribution of static electricity levels can be specifically confirmed through the static electricity visualization video.

[0062] FIGS. 6 and 7 are drawings for explaining the operation of an electrostatic visualization system according to an embodiment of the present invention.

[0063] Referring to FIGS. 6 and 7, the color appearing on the image of the measurement target (T) output by the output unit (400) may change depending on the level of static electricity measured by the first to fifth measurement units (101-105).

[0064] The first to fifth measuring sections (101-105) may each include the first to fifth marks (111-115) and the first to fifth display sections (121-125).

[0065] The first to fifth marks (111-115) attached to the first to fifth measuring parts (101-105) installed at different locations of the measurement target (T) may each have different shapes. For example, the first mark (111) may have a star shape, and the second mark (112) may have a circle shape. Similarly, the third to fifth marks (113-115) may all have different shapes.

[0066] Since the first to fifth marks (111-115) attached to the first to fifth measuring parts (101-105) each have different shapes, the processor (300) recognizes the first to fifth marks (111-115) and calculates the coordinates of the first to fifth marks (111-115) respectively, thereby calculating the positions of the different first to fifth measuring parts (101-105).

[0067] The processor (300) can select a first color chart to determine a color corresponding to the level of static electricity provided by the measuring unit (100).

[0068] Since the level of static electricity measured by the first measuring unit (101) corresponds to the first level (LV1), the processor (300) can determine the first color (C1) appearing at the first position (P1), which is the coordinate of the first mark (111), in the captured image provided by the capturing unit (200). Accordingly, the output unit (400) can output a static electricity visualization image in which the first color (C1) is displayed at the first position (P1) on the distance image generated by the TOF camera (210).

[0069] Since the level of static electricity measured by the second measuring unit (102) corresponds to the fourth level (LV4), the processor (300) can determine the fourth color (C4) appearing at the second position (P2), which is the coordinate of the second mark (112), in the captured image provided by the capturing unit (200). Accordingly, the output unit (400) can output a static electricity visualization image in which the fourth color (C4) is displayed at the second position (P2) on the distance image generated by the TOF camera (210).

[0070] Since the level of static electricity measured by the third measuring unit (103) corresponds to the third level (LV3), the processor (300) can determine the third color (C3) appearing at the third position (P3), which is the coordinate of the third mark (113), in the captured image provided by the capturing unit (200). Accordingly, the output unit (400) can output a static electricity visualization image in which the third color (C3) is displayed at the third position (P3) on the distance image generated by the TOF camera (210).

[0071] Since the level of static electricity measured by the fourth measuring unit (104) corresponds to the third level (LV3), the processor (300) can determine the third color (C3) that appears at the fourth position (P4), which is the coordinate of the fourth mark (114), on the distance image generated by the TOF camera (210). Accordingly, the output unit (400) can output a static electricity visualization image in which the third color (C3) is displayed at the fourth position (P4) in the static electricity visualization image. That is, even if the third measuring unit (103) and the fourth measuring unit (104) are installed at different locations on the measurement target (T), if the level of static electricity measured by the third measuring unit (103) and the fourth measuring unit (104) at each location is the same, the output unit (400) can output the locations where the third measuring unit (103) and the fourth measuring unit (104) are installed in the static electricity visualization image with the same color.

[0072] Since the level of static electricity measured by the fifth measuring unit (105) corresponds to the fourth level (LV4), the processor (300) can determine the fourth color (C4) that appears at the fifth position (P5), which is the coordinate of the fifth mark (115), on the distance image generated by the TOF camera (210). Accordingly, the output unit (400) can output a static electricity visualization image in which the fourth color (C4) is displayed at the fifth position (P5) in the static electricity visualization image. That is, even if the second measuring unit (102) and the fifth measuring unit (105) are installed at different locations on the measurement target (T), if the level of static electricity measured by the second measuring unit (102) and the fifth measuring unit (105) at each location is the same, the output unit (400) can output the locations where the second measuring unit (102) and the fourth measuring unit (105) are installed in the static electricity visualization image with the same color.

[0073] The processor (300) can control the output unit (400) to output an electrostatic visualization image generated by the processor (300) by switching the mode of the output unit (400) to a first mode. Specifically, in the first mode, the output unit (400) can output an electrostatic visualization image in which a color corresponding to the electrostatic level measured at the coordinates of a mark calculated by the processor (300) is displayed on a distance image generated by the TOF camera (210). That is, in the first mode, the output unit (400) can output an electrostatic visualization image in which a color corresponding to the electrostatic level measured at the coordinates of a mark calculated by the processor (300) is displayed on a distance image in which the color is expressed differently depending on the distance between the measurement target (T) and the TOF camera (210). At this time, the color representing the distance information between the TOF camera (210) and the measurement target (T) and the color representing the electrostatic level measured at the coordinates of the first to fifth (111-115) may be different from each other. For example, the color representing the distance information between the TOF camera (210) and the measurement target (T) may include a grayscale color, and the color representing the electrostatic level measured at the coordinates of the first to fifth (111-115) may include a color scale color other than a grayscale color. Referring to FIG. 7, the color appearing on the surface of the measurement target (T) and the first to fifth colors (C1-C5) displayed at the first to fifth positions (P1-P5) may include different types of colors.

[0074] Additionally, in the first mode, the output unit (400) can output the three-dimensional coordinates of the mark (110) calculated by the processor (300). Accordingly, the location where the level of static electricity confirmed through the static electricity visualization image is output can be identified.

[0075] As described with reference to FIGS. 6 and 7, in a distance image generated by a TOF camera (210) capturing a measurement target (T) in which the level of static electricity is measured through a measurement unit (100), different colors are displayed according to the level of static electricity, thereby allowing detection of the level at which static electricity is emitted for each location of the measurement target (T).

[0076] FIG. 8 is a diagram illustrating the operation of an electrostatic visualization system according to an embodiment of the present invention. For convenience of explanation, the explanation will focus on the differences from the description with reference to FIG. 6 and FIG. 7.

[0077] Referring to FIG. 8, the output unit (400) may not output a distance image generated by the TOF camera (210) or a captured image of the measurement target (T) taken by the shooting unit (220), but may output a graph of the change in the level of static electricity measured by each measuring unit (100) for a certain period of time.

[0078] The processor (300) can control the output unit (400) to output a graph of the change in the level of static electricity over time measured by the measurement unit (100) by switching the mode of the output unit (400) to a second mode.

[0079] In the second mode, the output unit (400) can output a graph of the change in the electrostatic level measured by the first measuring unit (101) at the first location. Through the graph output by the output unit (400) in the second mode, the user can observe the change in the level of electrostatics at the first location of the measurement target (T) where the first measuring unit (101) is installed.

[0080] Likewise, the output unit (400) can output a graph of the change in the electrostatic level measured by the second measurement unit (102) at the second location.

[0081] In FIG. 8, the output unit (400) is shown as outputting a graph of the change in electrostatic level measured by the first measuring unit (101) and the second measuring unit (102), but the embodiment is not limited thereto. For example, the output unit (400) may output only the graph of the change in the electrostatic level measured by the first measuring unit (101). The user may select the measuring unit (100) that measured the electrostatic level indicated by the graph output by the output unit (400). Additionally, depending on the user's selection, the output unit (400) may simultaneously output the graph of the change in the electrostatic level measured by the first to fifth measuring units (101-105) installed on the measurement target (T).

[0082] FIG. 9 is a drawing illustrating an electrostatic visualization system according to an embodiment of the present invention. For convenience of explanation, the differences from the description with reference to FIG. 6 to 8 will be explained in detail.

[0083] Referring to FIG. 9, the output unit (400) can output an electrostatic visualization image in which a color corresponding to the electrostatic level measured by the measurement unit (100) is displayed on a captured image of a measurement target (T) taken by the capturing unit (220).

[0084] The processor (300) can control the output unit (400) to output an electrostatic visualization image based on a captured image of a measurement target (T) captured by the shooting unit (220) by switching the mode of the output unit (400) to a third mode.

[0085] In the third mode, the output unit (400) can output an electrostatic visualization image that displays a color corresponding to the electrostatic level measured by the measurement unit (100) on the coordinates of the mark (110) calculated by the processor (300).

[0086] FIG. 10 is a drawing illustrating an electrostatic visualization system according to an embodiment of the present invention. For convenience of explanation, the differences from the description with reference to FIG. 1 will be explained in detail.

[0087] The electrostatic visualization system may include a measurement unit (100), a TOF camera (210), a shooting unit (220), a processor (300), an output unit (400), an image processing unit (500), and a memory (600).

[0088] The measuring unit (100), TOF camera (210), shooting unit (220), processor (300), and output unit (400) are identical to the measuring unit (100), TOF camera (210), shooting unit (220), processor (300), and output unit (400) described above with reference to FIGS. 1 to 5.

[0089] The image processing unit (500) can perform preprocessing on a distance image generated by the TOF camera (210) capturing the measurement target (T) or on a captured image of the measurement target (T) captured by the shooting unit (200). By performing preprocessing, the image processing unit (500) can facilitate the processor (300) in generating an electrostatic visualization image using the distance image or the image of the measurement target (T) and calculating the coordinates of the mark. For example, the image processing unit (500) can perform corrections such as white balance and color adjustment on the initial captured image of the shooting unit (200) to modify, enhance, or improve optical characteristics.

[0090] The memory (600) can store the level of static electricity measured by the measuring unit (100). The memory (600) can store distance information of the measurement target (T) measured by the TOF camera (210). Additionally, the memory (600) can store a color chart used by the processor (300). At this time, the processor (300) can receive the color chart stored in the memory (600) and determine a color corresponding to the level of static electricity measured by the measuring unit (100).

[0091] The memory (600) may include volatile memory or non-volatile memory according to the embodiment. By storing data used or calculated in the electrostatic visualization system in the memory (600), data stored in the memory (600) can be provided upon a user's request. Accordingly, the user can effectively control electrostatics by using the electrostatic level data stored in the memory (600).

[0092] In FIG. 10, the processor (300) and the image processing unit (500) are each shown as separate blocks, but the embodiment is not limited thereto. For example, the processor (300) may include the image processing unit (500).

[0093] Although embodiments of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing its technical concept or essential features. Therefore, the embodiments described above should be understood as illustrative in all respects and not restrictive. Explanation of the symbols

[0094] 100: Measurement section 110: Mark 120: Display unit 210: TOF camera 220: Filming Department 300: Processor 400: Output section

Claims

Claim 1 A first measuring unit that measures an electrostatic level detected at a first position of a measurement target and includes a first mark; a shooting unit that photographs the measurement target to generate a captured image; a Time of Flight (TOF) camera that measures the distance to the measurement target and generates a distance image that visualizes distance information; and a processor that recognizes the first mark in the captured image and calculates the coordinates of the first mark on the captured image. A static electricity visualization system comprising, in a first mode, an output unit that outputs a static electricity visualization image in which the static electricity level measured by the first measuring unit is visualized on the distance image generated by the TOF camera, wherein the static electricity visualization image includes a color corresponding to the static electricity level measured by the first measuring unit on the coordinates of the first mark on the distance image, and receives the distance image from the TOF camera and receives the static electricity level measured by the first measuring unit, and generates the static electricity visualization image in which a color corresponding to the static electricity level measured by the first measuring unit is displayed on the coordinates of the first mark in the distance image, wherein the color representing the distance information between the TOF camera and the measurement target is grayscale and the color corresponding to the measured static electricity level is colorscale. Claim 2 An electrostatic visualization system according to claim 1, wherein the TOF camera and the imaging unit are positioned at the same location. Claim 3 delete Claim 4 An electrostatic visualization system according to claim 1, wherein the processor calculates three-dimensional coordinates of the first mark on the distance image using distance information calculated from the distance image and the coordinates of the first mark calculated by the processor, and the output unit outputs the three-dimensional coordinates of the first mark. Claim 5 In claim 1, the output unit outputs a graph of the change in the electrostatic level measured by the first measuring unit for a certain period of time in a second mode, an electrostatic visualization system. Claim 6 In claim 1, the output unit outputs a color corresponding to the level of static electricity measured by the first measuring unit on the coordinates of the first mark on the captured image generated by the capturing unit in a third mode, an electrostatic visualization system. Claim 7 In claim 1, the electrostatic visualization system wherein the first measuring unit transmits the measured electrostatic level data to the processor via wireless communication. Claim 8 In claim 1, the electrostatic visualization system comprises a first measuring unit that directly outputs the measured electrostatic level as a numerical value. Claim 9 An electrostatic visualization system according to claim 1, wherein the electrostatic level detected at a second location of the measurement target is measured, and further comprises a second measuring unit including a second mark, wherein the capturing unit recognizes the second mark, the processor calculates the coordinates of the second mark on the captured image, and the electrostatic visualization image further comprises a color corresponding to the level of electrostatic measured by the second measuring unit on the coordinates of the second mark on the distance image, and wherein the first mark and the second mark have different shapes. Claim 10 delete

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