AlN Heater for Semiconductor Wafer and Manufacturing Method Thereof

A double coating layer of MoSi₂/YSZ and SiC/BN on AlN heaters addresses the durability and corrosion issues, improving resistance to thermal and mechanical stress and enhancing heat transfer efficiency.

KR102998318B1Active Publication Date: 2026-08-03BOBOO HI TECH
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Patent Information

Application Number
KR1020240189995
Authority / Receiving Office
KR · KR
Patent Type
Patents
Current Assignee / Owner
Filing Date
2024-12-18
Publication Date
2026-08-03
Estimated Expiration
2044-12-18

AI Technical Summary

Technical Problem

AlN heaters used in semiconductor wafer processing suffer from surface damage and plasma uniformity defects due to reaction with corrosive gases like NF3 and ClF3, leading to aluminum fluoride contamination and reduced durability.

Method used

A double coating layer is applied to the AlN heater, comprising a first layer of molybdenum disilicide (MoSi₂) and yttria-stabilized zirconia (YSZ) followed by a second layer of silicon carbide (SiC) and boron nitride (BN), formed through plasma coating and chemical vapor deposition, to enhance corrosion resistance and thermal stability.

Benefits of technology

The coating layers significantly improve the AlN heater's durability and resistance to thermal and mechanical stress, preventing peeling and cracking, while efficiently blocking corrosive gases and enhancing heat transfer.

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Abstract

The present invention relates to an AlN heater for semiconductor wafers used in a wafer processing chamber and a method for manufacturing the same. Specifically, the invention relates to an AlN heater and a method for manufacturing the same, wherein a composition comprising yttria-stabilized zirconia (ZrO₂(Y₂O₃-stabilized)) and molybdenum disilicide (MoSi₂) is plasma-coated onto the surface of a heater made of a ceramic material. According to an embodiment of the present invention, by forming a high-density coating layer with a multilayer structure on the surface of the heating element of an AlN heater, the deterioration of the heating element due to long-term use can be minimized and resistance to thermal and mechanical stress can be increased, and the nano-composite coating layer (second coating layer) composed of SiC and BN acts as a perfect barrier against corrosive gases such as NF₃ and ClF₃, thereby extending the lifespan of the heating element in high temperature and corrosive environments.
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