Gate valve

Abstract

A gate valve is provided that reduces the generation of particles or the deterioration of a seal member by contacting a seal member disposed on the valve body from a direction perpendicular to the opening surface without performing a oscillating motion of the valve body with respect to the opening of the processing section. The valve has a movable body that operates integrally with the valve body and a conversion mechanism that moves the movable body in each direction perpendicular to the opening surface and a direction intersecting the perpendicular direction. The conversion mechanism comprises a first operating mechanism that moves in the intersecting direction and moves the movable body in the intersecting direction, and a second operating mechanism that moves the movable body in the perpendicular direction. The operation by the second operating mechanism is performed by including an operation by additional movement in the intersecting direction of the first operating mechanism while the movement of the movable body in the intersecting direction is restricted.

Description

Technology Field

[0001] The present invention relates to a gate valve that seals an opening communicating with a processing unit of a processing device that performs vacuum processing. Background Technology

[0002] Conventionally, various gate valves have been proposed for sealing openings that communicate with processing devices, such as chambers or load lock devices, for processing electronic components such as semiconductor wafers or liquid crystal substrates.

[0003] Among these, there is a method in which a valve body that opens and closes the valve opening is oscillated by a linkage mechanism and tightly pressed against the opening surface formed when the valve is closed, thereby maintaining a hermetic state within the processing device.

[0004] For example, Patent Document 1 discloses a gate valve having a oscillating frame rotatably connected to the tip of an arm constituting a linkage mechanism through a pivot point in the middle section, and a valve body connected to the upper part of the oscillating frame, wherein by oscillating the oscillating frame through the pivot point, the valve body is moved closer and moved apart at a predetermined angle of deviation with respect to the peripheral surface of the opening which is the opening surface of the opening communicating with the processing section. Prior art literature

[0005] Patent Document 1 WO 2000 / 075542A The problem to be solved

[0006] However, according to the above-described conventional gate valve, when the valve is closed, the valve body is moved at a predetermined offset angle relative to the opening surface, so the seal member made of an elastic material such as rubber installed on the valve body slides relative to the opening surface. Furthermore, as the seal member slides relative to the opening surface, a shear force is generated on the seal member in a direction parallel to the opening surface. Thus, the frictional force or shear force caused by the sliding of the seal member during the closed valve was likely to cause the generation of particles or the deterioration of the seal member (deterioration of seal performance).

[0007] The present invention aims to provide a gate valve that reduces the generation of particles caused by perturbation or the deterioration of a seal member caused by shear force by realizing separate movements of moving in and out to a position opposite to the opening and moving in and out to the opening surface without performing a oscillating movement of the valve body with respect to an opening surface that communicates with a processing unit, and by contacting a seal member disposed on the valve body from a direction perpendicular to the opening surface. means of solving the problem

[0008] To solve the above problem, the present invention relates to a gate valve that seals an opening formed in a processing unit of a processing device for performing vacuum processing by pressing a valve body equipped with a sealing member against the opening surface, wherein the gate valve comprises a movable body that operates integrally with the valve body, a conversion mechanism that moves the movable body in each direction perpendicular to the opening surface and a cross direction intersecting the perpendicular direction, and a transmission mechanism that transmits power from a driving source to the conversion mechanism, wherein the conversion mechanism moves in the cross direction and comprises a first operating mechanism that moves the movable body in the cross direction and a second operating mechanism that moves the movable body in the perpendicular direction, and the operation by the second operating mechanism includes an operation by additional movement of the first operating mechanism in the cross direction while the movement of the movable body in the cross direction is restricted.

[0009] In addition, the present invention relates to a gate valve that seals an opening formed on an opening surface communicating with a processing unit of a processing device for performing vacuum processing by pressing a valve body equipped with a sealing member, the gate valve comprises: a housing; a vertical moving body maintained in the housing and movable in a vertical direction relative to the opening surface; and a vertical motion mechanism installed between the housing and the vertical moving body. The vertical moving body comprises a moving body that operates integrally with the valve body; a lifting body that moves together with the moving body in a cross direction that intersects the vertical direction; a driving source that moves the lifting body in the cross direction; and a lifting motion mechanism installed between the lifting body and the moving body. The lifting body is configured to be movable in the cross direction in a first operating area in which it moves together with the moving body in the cross direction through the lifting motion mechanism, and in a second operating area in which it additionally moves in the cross direction by operating the vertical motion mechanism while the movement of the moving body in the cross direction is restricted. The vertical motion mechanism is configured such that, in conjunction with the movement of the lifting body in the cross direction in the second operating area, the vertical It is to move the moving body in the aforementioned vertical direction. Effects of the invention

[0010] According to the present invention, in a gate valve, the generation of particles or the deterioration of the seal member can be reduced. Brief explanation of the drawing

[0011] FIG. 1 is a perspective view showing the external configuration of a semiconductor manufacturing apparatus equipped with a gate valve according to one embodiment of the present invention. FIG. 2 is an external perspective view of a gate valve according to one embodiment of the present invention. FIG. 3 is a perspective view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 4 is an exploded perspective view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 5 is a partially enlarged perspective view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 6 is a front view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 7 is a front view showing the configuration of a vertical moving body of a gate valve according to one embodiment of the present invention. FIG. 8 is a front view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 9 is a front view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 10 is a side view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 11 is a side view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 12 is a side view showing the internal configuration of a gate valve according to one embodiment of the present invention. FIG. 13 is a front view showing another configuration example of a support configuration of a guide member according to one embodiment of the present invention. FIG. 14 is a partially enlarged cross-sectional view showing the internal configuration of a gate valve according to one embodiment of the present invention. Specific details for implementing the invention

[0012] Hereinafter, an embodiment of the gate valve according to the present invention will be described in detail based on the drawings. In addition, unless a specific direction is determined in the following description, the closing side (left side in FIG. 10) where the valve body of the gate valve seals the opening is designated as the front side or front side, and the opposite side (right side in FIG. 10) is designated as the rear side or back side. Based on this, the left and right sides in FIG. 9 are designated as the left and right sides, the upper side in FIG. 9 is designated as the upper side or upper side, and the lower side in FIG. 9 is designated as the lower side or bottom side.

[0013] [1. Schematic Configuration of the Gate Valve]

[0014] The gate valve (A) according to the present embodiment is equipped with a mechanism that performs the opening and closing operation of a valve body (23) that seals the opening (A10) by pressing it against the opening surface (A100) of an opening (A10) that communicates with the processing unit of a processing device that performs vacuum processing. As shown in FIG. 1, the gate valve (A) is installed in a configuration between a processing device used for semiconductor manufacturing, for example, a load lock device (B) that raises the vacuum level to a predetermined value and a processing device (C) that processes a wafer in a vacuum.

[0015] The gate valve (A) according to the present embodiment is a so-called square gate valve having a valve box (A1) that accommodates a valve body (23) and a housing (1) that is installed downwardly in the valve box (A1), as shown in FIGS. 1 and 2(a).

[0016] The valve box (A1) has openings (A10, A10') that communicate with the processing parts of each device B and C, corresponding to the opening (B10) of the load lock device (B) and the opening (C10) of the processing device (C), respectively. The housing (1) houses a valve body operating mechanism that operates the valve body (23) to open and close the openings (A10, A10').

[0017] The gate valve (A) moves the valve body (23) vertically to the opening surface (A10) which serves as the inlet / outlet port for the wafer, and, as shown in FIG. 14, presses the seal member (23a), made of an elastic material provided in the valve body (23) described later, against the opening surface (A100) to crush it. By doing so, the gate valve (A) is configured to seal the opening (A10). In the gate valve (A), the opening (A10) communicating with the opening (B10) of the load lock device (B) is formed by penetrating a horizontally elongated hole when viewed from the front of the valve box (A1), as shown in FIG. 2(a).

[0018] Additionally, the gate valve (A) may be a so-called door valve that excludes the valve box (A1), as shown in FIG. 2(b). In this case, the gate valve (A) is arranged and installed so as to be close to or separated from the opening (B10) of the load lock device (B) or the opening (C10) of the processing device (C) by moving the valve body (23) in a vertical direction.

[0019] The valve body (23) is a plate-shaped member with a transversely elongated shape that is slightly larger than the opening (A10, B10, C10). The valve body (23) has one plate surface that is a contact surface that contacts the outer circumferential surface forming the opening surface of the opening (A10, B10, C10). As shown in FIG. 2(b), FIG. 4 and FIG. 14, a seal member (23a) made of an elastic material is attached to the contact surface of the valve body (23).

[0020] The seal member (23a) is, for example, an annular (continuous) member having a circular cross-sectional shape. As shown in FIGS. 14(a) to FIGS. 14(c), the seal member (23a) is installed in a surrounding groove (23b) formed on the contact surface of the valve body (23) along the outer edge of the valve body (23), so as to protrude a predetermined height from the contact surface of the valve body (23) toward the opening surface (A100). In addition, the seal member (23a) is pressed and crushed against the opening surface (A100) by the vertical movement of the valve body (23) at the closing position (P3) described later.

[0021] Here, the vertical direction in which the valve body (23) moves is a direction in which the valve body (23) is moved closer to or further away from the opening surface (A100) between the facing position (P20) and the closing position (P3) described later with respect to the facing direction of the opening surface (A100), while maintaining a state in which the plate surface of the valve body (23) and the opening surface (A100) are parallel to each other as shown in FIGS. 11–12, FIGS. 14(b), and FIGS. 14(c). The vertical direction in which the valve body (23) moves in this embodiment is a horizontal direction (front-back direction) perpendicular to the opening surface (A100) which is a vertical plane.

[0022] Additionally, the cross direction in which the valve body (23) moves is a direction that intersects the vertical direction described above when viewed from the side of the gate valve (A), as shown in FIGS. 10–11, FIGS. 14(a), and FIGS. 14(b). Based on the position of the opening (A10) of the opening surface (A100), the valve body (23) is moved closer to or further away from the opening surface (A100) between the opening position (P1) and the facing position (P2) described later with respect to the height direction of the opening surface (A100). The cross direction in which the valve body (23) moves in this embodiment is a vertical direction (a direction orthogonal to the up-down direction and the horizontal direction) that is parallel to the opening surface (A100) in the vertical plane. However, the cross direction in which the valve body (23) moves may be an inclined direction inclined with respect to the vertical direction.

[0023] The valve body (23) of the gate valve (A) of the present embodiment moves in close proximity to the opening surface (A100) or maintains a certain distance from the opening surface (A100) based on the position of the opening surface (A100). Specifically, the valve body operating mechanism housed in the housing (1) is configured so that the valve body (23) traces a right-angled movement trajectory formed by the vertical direction and the orthogonal direction perpendicular thereto.

[0024] In other words, the closing direction of the valve body (23) that closes the opening (A10) is the direction in which the valve body (23) approaches the opening surface (A100) among the directions of the cross direction and the vertical direction. Additionally, the opening direction of the valve body (23) that opens the opening (A10) is the direction in which the valve body (23) moves away from the opening surface (A100) among the directions of the cross direction and the vertical direction.

[0025] As shown in FIGS. 3 and 4, the housing (1) is formed in the shape of a rectangular box with an internal hollow, having a lower wall (10), an upper wall (11), a left wall (12), and a right wall (12). In the central part of the lower wall (10), a support frame insertion hole (10a) is formed to insert a drive source support frame (72) in which a drive source (3) is supported. In addition, in the central part of the upper wall (11) of the housing (1), a shaft insertion hole (11a) is formed to insert a valve body shaft (24) in which a valve body (23) is installed in succession. The shaft insertion hole (11a) is formed to maintain a certain clearance between the valve body shaft (24) and the shaft so that the valve body shaft (24) can move in the vertical direction and the cross direction.

[0026] Inside the housing (1), a valve body operating mechanism is housed to move the valve body (23) in each direction perpendicular and intersecting with respect to the opening surface (A100) of the opening (A10) through the valve body shaft (24).

[0027] As shown in FIGS. 3 to 6, the gate valve (A) is a valve body operating mechanism housed inside a housing (1), and has a movable body (2) that operates integrally with the valve body (23), a conversion mechanism that moves the movable body (2) in each direction perpendicular to the opening surface (A100) and in a direction intersecting the perpendicular direction, and a transmission mechanism (4) that transmits power from a driving source (3) to the conversion mechanism.

[0028] The conversion mechanism comprises a first operating mechanism (5) that moves in a cross direction and moves the movable body (2) in a cross direction, and a second operating mechanism (6) that moves the movable body (2) in a vertical direction. Additionally, the conversion mechanism does not necessarily need to move the movable body (2) at a right angle. That is, as described above, the conversion mechanism moves the movable body (2) individually in a cross direction and a vertical direction by the operation of the first operating mechanism (5) and the second operating mechanism (6). However, if the valve body (23) can be moved vertically close to or away from the opening surface (A100) of the opening (A10) through the movable body (2), the trajectory of the movable body (2) moving in a cross direction and the trajectory of the movable body (2) moving in a vertical direction are not orthogonal, it does not deviate from the technical concept of the present invention.

[0029] A point to note regarding the gate valve (A) according to the present invention is that the operation by the second operating mechanism (6) includes an operation by additional movement in the cross direction of the first operating mechanism (5) while the movement of the moving body (2) in the cross direction is restricted.

[0030] A gate valve (A) that individually and stepwise controls the direction of movement of the valve body (23) by means of the first operating mechanism (5) and the second operating mechanism (6) comprises a housing (1) in which the second operating mechanism (6) is arranged and installed, and a guide member (7) installed to be movable in a vertical direction together with the movable body (2), wherein movement in the cross direction of the housing (1) is restricted. That is, the second operating mechanism (6) is installed in a pre-set position regardless of the movement of the movable body (2) in the cross direction.

[0031] As shown in FIG. 6, the second operating mechanism (6) comprises a support member (92) supported by the housing (1), a engaging member (90) engaged with a guide member (7), and an input member (91) engaged with or disengaged from the first operating mechanism (5). The guide member (7) comprises a first engaging member (77) engaged with the engaging member (90) of the second operating mechanism (6). The first operating mechanism (5) comprises a second engaging member (53) engaged with the input member (91) of the second operating mechanism (6).

[0032] In particular, the second operating mechanism (6) of the present embodiment is composed of a link mechanism (60) as shown in FIGS. 10 to 12, and has a vertical link part (61) including a coupling part (90) and a transmission link part (62) including an input part (91).

[0033] The second operating mechanism (6) converts the additional movement stress of the first operating mechanism (5) in the cross direction, which is input from the first operating mechanism (5) to the input part (91), into movement stress in the vertical direction through the transmission link part (62) and the vertical link part (61).

[0034] The vertical movement stress converted by the second operating mechanism (6) is transmitted to the guide member (7) through the engagement part (90) of the vertical link part (61), and the guide member (7) moves vertically for each moving body (2). The valve body (23) opens and closes according to the vertical movement of this moving body (2).

[0035] As shown in FIGS. 6 and FIGS. 8 to 12, the valve body (23) is configured to be movable between an open position (P1) that is housed in the lower part of the valve box (A1), an open surface (A100) that is opposite to the opening (A10) formed in the upper part of the valve box (A1) and is also spaced apart from the opening (A10), and a closed position (P3) that is opposite to the opening surface (A100) formed in the upper part of the valve box (A1) and is also close to the periphery of the opening (A10). When the valve body (23) is located at the closed position (P3), the opening (A10) is closed, and when it is located at the open position (P1), the opening (A10) is opened.

[0036] In addition, the first operating mechanism (5), as shown in FIGS. 10 to 12, moves the movable body (2) which operates integrally with the valve body (23) by moving the movable body (2) by means of the operation in the first operating area (R1) and the operation in the second operating area (R2), thereby moving the valve body (23) to each position of the open position (P1), face position (P2), and closed position (P3).

[0037] The first operating area (R1) is an area where the first operating mechanism (50) performs a first operation of moving the valve body (23; movable body (2)) between an open position (P1) and a facing position (P2). The second operating area (R2) is an area where the first operating mechanism (5) performs a second operation of moving the valve body (23) between a facing position (P2) and a closed position (P3).

[0038] To be more specific, the first operating area (R1) is an area in which the first operating mechanism (5) moves in a cross direction until the second engaging member (53), installed on the elevator body (50) described later as the first operating mechanism (5), comes into contact with the engaging part (90) of the second operating mechanism (6). The first operation of the first operating mechanism (5) is an operation in which the elevator body (50) moves within the first operating area (R1) and moves the movable body (2) in a cross direction. Due to the first operation, the valve body (23) installed in succession to the movable body (2) moves between the open position (P1) and the facing position (P2).

[0039] The second operating area (R2) is an area in which the first operating mechanism (5) moves in a cross direction while maintaining contact between the second engaging member (53) installed in the first operating mechanism (5) and the input part (91). The second operation of the first operating mechanism (5) is an operation in which the first operating mechanism (5) moves within the second operating area (R2) and operates the second operating mechanism (6). Due to the second operation, the valve body (23) installed in succession to the movable body (2) moves between the closed position (P3) and the facing position (P2). Additionally, the second operation causes the second operating mechanism (6) to move the movable body (2) in a vertical direction, but unlike the first operation, it does not move the movable body (2) in a cross direction.

[0040] That is, the first operating mechanism (5) performs a first operation in the first operating area (R1) to move the movable body (2) in a cross direction and position the valve body (23) from the open position (P1) to the facing position (P2), and then performs a second operation in the second operating area (R2) to perform additional movement in a cross direction different from the first operation. The second operating mechanism (6), accompanying the additional movement in a cross direction as the second operation in the second operating area (R2) of the first operating mechanism (5), moves the movable body (2) in a vertical direction and positions the valve body (23) from the facing position (P2) to the closed position (P3), thereby realizing tight sealing of the opening (A10) of the processing unit.

[0041] The valve body operating mechanism of the gate valve (A) according to this embodiment comprises two movement mechanism systems: a valve body cross-movement mechanism system for adjusting the movement position of the valve body (23) in the cross direction with respect to the opening surface (A100) communicating with the processing unit, and a valve body vertical movement mechanism system for adjusting the movement position of the valve body (23) in the vertical direction. Each system will be described in detail below.

[0042] [2. Valve Body Cross-Movement Mechanism System]

[0043] The valve body cross-movement mechanism system is maintained in the housing (1) and, as shown in FIG. 8, is composed of a vertical moving body (A2) having a moving body (2) movable in a cross direction with respect to the opening surface (A100) and a first operating mechanism (5). Furthermore, in the following description, since the vertical moving body (A2) basically has the same configuration symmetrically on the left and right when viewed from the front, the description of the above configuration is omitted by assigning the same reference numerals unless specifically explained.

[0044] As shown in FIG. 8, the vertical moving body (A2) is composed of a moving body (2), a first operating mechanism (5) that moves in a cross direction that intersects with the vertical direction together with the moving body (2), a driving source (3) that moves the first operating mechanism (5) in the cross direction, a transmission mechanism (4) that transmits power from the driving source (3) to the first operating mechanism (5), a lifting operating mechanism (8) that is installed between the moving body (2) and the first operating mechanism (5) and moves the moving body (2) in the cross direction in conjunction with the operation of the first operating mechanism (5), and a guide member (7) that integrally accommodates them so as to be movable in the vertical direction.

[0045] The vertical moving body (A2) has a regulating member (74) that regulates the movement of the moving body (2) in the cross direction in the second operating area (R2), and a first engaging member (77) that engages with the vertical operating mechanism (A3) described later.

[0046] The guide member (7) functions as a substantial housing that accommodates the lifting slider (20) as the moving body (2) and the lifting body (50) as the first operating mechanism (5) inside, thereby moving the valve body (23) in an intersecting direction. The guide member (7) is a roughly rectangular box-shaped member with an internal hollow that is smaller than the housing (1), and is supported so as to be movable in the vertical direction within the housing (1).

[0047] The guide member (7) itself does not move in the cross direction, but moves vertically for each valve body (23) (together with the valve body (23)) by means of the vertical movement mechanism (A3) in the valve body vertical movement mechanism system described later. The valve body cross movement mechanism system can be called a vertical movement body (A2) because the guide member (7) moves vertically by means of the valve body vertical movement mechanism system described later.

[0048] The guide member (7) comprises a lower wall (70), a guide rod (76) installed at a predetermined position on the lower wall (70) and guiding the lifting slider (20) and the lifting body (50) in an intersecting direction, and a first engaging member (77) engaged with the engaging part (90) of the second operating mechanism (6).

[0049] The guide member (7) of the present embodiment is formed in a U-shape with the upper side open when viewed from the front, and has a pair of side walls, a left wall (71) and a right wall (71), installed at the left and right ends of the lower wall (70). The left wall (71) and the right wall (71) each have a front part, a rear part, and left and right outer side parts, and are column parts in the shape of a curved plate that form a roughly U-shaped cross-section with the left and right inner sides open by these surface parts. The left wall (71) and the right wall (71) are not essential components if they provide a guiding function in the direction of intersection of the moving body (2) and the first operating mechanism (5) by the guide rod (76) installed on the lower wall (70). In addition, in the lower half of the left wall (71) and right wall (71) of the guide member (7) of the present embodiment, a longitudinal hole (73) in the shape of a rectangular window is formed into which the left and right ends of the elevator body (50) as the first operating mechanism (5) are inserted. The longitudinal hole (73) is formed in the side portion of each of the left wall (71) and right wall (71).

[0050] A motor (30) is installed below the guide member (7) as a driving source (3). The motor (30) is connected to a transmission mechanism (4) via a coupling (31) on the output shaft. The transmission mechanism (4) is composed of a so-called ball screw (40) having a screw shaft (41) installed in succession to the output shaft of the motor (30) via a coupling (31) and a ball nut (42) that moves in a cross direction along the screw shaft (41). In addition, as another embodiment, the driving source (3) may be a pressure device using fluid (e.g., air, hydraulic) or a linear actuator using magnetic force. Furthermore, the transmission mechanism (4) only needs to move the first operating mechanism (5) in a cross direction.

[0051] As shown in FIGS. 6 and 7, the screw shaft (41) is inserted into the insertion hole (70a) formed in the center of the lower wall (70) of the guide member (7). As shown in FIG. 3, the ball nut (42) is connected to the screw shaft (41), which protrudes upward from the lower wall (70) into the guide member (7) through the insertion hole (70a), so as to be movable in the cross direction (up and down direction). In addition, the ball nut (42) is connected to the lifting body (50) as the first operating mechanism (5) and moves integrally with the lifting body (50) in the cross direction.

[0052] In the lower circumference of the insertion hole (70a) of the lower wall (70), a driving source support frame (72) is installed to support a motor (30) and a coupling (31) facing upward with the output shaft downward from below the guide member (7).

[0053] As shown in FIGS. 6 to 8, the drive source support frame (72) is provided with four support frame parts (72a) installed vertically at positions corresponding to the four corners of a rectangular shape, maintaining a certain distance from the periphery of the insertion hole (70a) on the bottom surface of the lower wall (70), and a frame substrate (72b) installed between the lower portions of the four support frame parts (72a). A motor (30) is attached to the lower side of the frame substrate (72b), and a coupling (31) is attached to the upper side.

[0054] Additionally, in the central part of the lower wall (10) of the housing (1), as shown in FIG. 3, a support frame insertion hole (10a) is formed to accommodate a motor (30) and a coupling (31) inside each drive source support frame (72). The support frame insertion hole (10a) is formed with a certain clearance between it and the drive source support frame (72) so that the drive source support frame (72) can move in the vertical direction. In this way, the drive source (3) is supported on the guide member (7) while its rotation is restricted through the drive source support frame (72).

[0055] The guide rod (76) is a member that guides the movable body (2) on the upper side and the first operating mechanism (5) on the lower side in an intersecting direction. As shown in FIGS. 2 and 3, the guide rod (76) is installed on the lower wall (70) of the guide member (7). The guide rod (76) of this embodiment is formed with an upper and lower length approximately equal to that of the left wall (71) and the right wall (71), and is installed at the left and right sides of the screw shaft (41).

[0056] In the lifting slider (20) as the moving body (2) and the lifting body (50) as the first operating mechanism (5), a pair of left and right guide rods (76) are inserted through guide rod insertion holes (21, 51). By this, the movement of the moving body (2) and the first operating mechanism (5) in the vertical direction (front-back direction) and left-right direction is restricted, and at the same time, the rotation of the ball nut (42) due to the movement of the ball nut (42) of the ball screw (40) in the cross direction is restricted.

[0057] Additionally, the guide rod (76) is provided with a regulating member (74) that regulates the movement of the movable body (2) in the cross direction in the second operating area (R2). The regulating member (74) is fixed to the upper end of the guide rod (76).

[0058] Specifically, a pair of left and right guide rods (76) are each equipped with a regulating member (74) on the left guide rod (76) and the right guide rod (76) respectively, centered on the screw shaft (41). The regulating member (74) is a rectangular member in plan view and has a horizontal upper surface and lower surface. The regulating member (74) is installed in a manner that fits the U-shaped plan view of each side wall at the upper end of the left wall (71) and the right wall (71). The left regulating member (74) is fixed to the upper end of the left wall (71) of the guide member (7) and the upper end of the left guide rod (76), respectively. The right regulating member (74) is fixed to the upper end of the right wall (71) of the guide member (7) and the upper end of the right guide rod (76), respectively. Accordingly, the upper surfaces of the left and right sides of the movable body (2) come into contact with the lower surface of the regulating member (74), thereby defining the position of the movable body (2) in the intersection direction.

[0059] That is, the upward end position of the moving body (2), whose movement in the cross direction (up and down direction) is restricted by the regulating member (74), becomes the facing position (P2) in which the valve body (23), which is installed in succession to the moving body (2) through the valve body shaft (24) as shown in FIGS. 6 and 7, protrudes upward within the valve box (A1) and faces the opening surface (A100).

[0060] The first engaging member (77) is installed on the left and right outer sides of the guide rod (76). In this embodiment, the first engaging member (77) is installed on the front side of the outer upper portion of the left wall (71) and the right wall (71), but the first engaging member (77) may also be installed on the regulating member (74) installed on the upper portion of the guide rod (76).

[0061] As shown in FIG. 5, FIG. 10 to FIG. 12, the first engaging member (77) is a first bearing body (770) having an elongated groove (770a) that is open at the top. A first engaging shaft (900) as the engaging part (90) of the second operating mechanism (6) is inserted into the elongated groove (770a). Additionally, as shown in FIG. 5, the first bearing body (770) has an elongated groove (770b) that is open at the bottom. The elongated groove (770b) is formed to be vertically symmetrical with respect to the upper elongated groove (770a). Accordingly, when the first bearing body (770) is worn out due to repeated use, the frequency of replacement with a new first bearing body (770) can be reduced by replacing the left and right first bearing bodies (770) by inverting them vertically. When the first bearing body (770) on the left and right sides is replaced by being inverted vertically, the first engaging shaft (900) as the engaging part (90) of the second operating mechanism (6) is inserted into the longitudinal groove (770b).

[0062] The first bearing body (770) supports the first engaging shaft (900), which is displaced according to the operation of the link mechanism (60), so that it can move up and down within the longitudinal groove (770a). In addition, each left wall (71) and right wall (71) of the guide member (7) are installed in succession with a link regulating member (78) that contacts the rear end of the driving link body (620) of the link mechanism (60) at the rear side of the outer upper portion, as shown in FIGS. 8 to 10, to regulate the oscillation range of the link body.

[0063] As shown in FIG. 6, this guide member (7) is supported from the upper and lower sides within the housing (1) by the upper support member (75) and the lower support member (75) so that it can move in the vertical direction while its movement in the cross direction is restricted. The upper support member (75) and the lower support member (75) each have the same configuration and are installed on the diagonal of the part forming the rectangular shape of the guide member (7) when viewed from the front.

[0064] As shown in FIGS. 6 and 7, the upper support member (75) is composed of a support shaft (75a) protruding from the upper wall (11) of the housing (1) and a boss (75b) protruding from the upper end of the guide member (7) and moving vertically around the support shaft (75a). Likewise, the lower support member (75) is composed of a support shaft (75a) protruding from the lower wall (10) of the housing (1) and a boss (75b) protruding from the lower end of the guide member (7). The vertical moving body (A2) is supported so as to be movable vertically with respect to the housing (1) through the upper support member (75) and the lower support member (75).

[0065] The configuration for supporting the guide member (7) within the housing (1) is not limited to a support configuration by an upper support member (75) and a lower support member (75). As for the support configuration of the guide member (7) within the housing (1), for example, a configuration including a pair of left and right slide mechanisms (175) may be used, as shown in FIG. 13. Each slide mechanism (175) is installed on the upper side of the left and right restraining members (74) that form the upper part of the guide member (7).

[0066] The slide mechanism (175) forms a rail structure with the vertical direction as the sliding direction and has a linear guide (176) fixed to the lower surface (11b) of the upper wall (11) by means of a bolt, and a slider (177) that slides freely into the linear guide (176). The linear guide (176) extends in the vertical direction. The slider (177) is fixed to the upper surface (7a; for example, the upper surface of the regulating member (74)) of the guide member (7) by means of a bolt, and becomes a part that moves integrally with the guide member (7).

[0067] The slider (177) is a slide member having a shorter dimension than the linear guide (176) with respect to the elongation direction of the linear guide (176), and has a engaging groove (177a) that engages the lower portion of the linear guide (176). The linear guide (176) has a groove (176a) on the left and right sides according to the sliding direction, and the slider (177) is engaged with the linear guide (176) in a state where the upper left and right openings of the engaging groove (177a) are respectively engaged with the left and right grooves (176a) of the linear guide (176). Due to this engagement mode between the linear guide (176) and the slider (177), the vertical movement of the slider (177) relative to the linear guide (176), that is, the vertical movement of the guide member (7) relative to the upper side wall (11), is restricted.

[0068] In this way, the guide member (7) may be supported so as to be slidable in a vertical direction by the left and right slide mechanism (175) with respect to the upper wall (11) constituting the housing (1) within the housing (1). According to the support configuration of the guide member (7) by the left and right slide mechanism (175), the downward movement of the guide member (7) with respect to the upper wall (11) is restricted, so it becomes possible to support the guide member (7) by suspending it with respect to the upper wall (11). Accordingly, as a support configuration of the guide member (7), a support member installed between the guide member (7) and the lower wall (10) of the housing (1), such as the lower support member (75) shown in FIG. 9, etc., can be made unnecessary. In addition, the configuration of the slide mechanism (175) may be the opposite of the configuration shown in FIG. 13, that is, a linear guide (176) installed on the upper surface (7a) side of the guide member (7) and a slider (177) installed on the upper wall (11) side.

[0069] The lifting slider (20) as a moving body (2) receives movement stress in the vertical and cross directions of the valve body (23) by the first operating mechanism (5) and the second operating mechanism (6), and performs the function of a substantial actuator that moves the valve body (23) in the closing and opening directions. The lifting slider (20) is a member having a box-shaped outer shape and is connected to the valve body (23) through the valve body shaft (24). The lifting slider (20) is housed in the guide member (7) at a position (upward position) closer to the valve body (23) than the lifting body (50) in the cross direction, and is installed to be guiding and moving in the cross direction (upward and downward direction).

[0070] In the central part of the lifting slider (20), a screw shaft insertion hole (22) for inserting a screw shaft (41) is formed. In addition, as shown in FIGS. 3 to 7, the upper surface of the lifting slider (20) forms a flat surface, and a valve body shaft (24) connected to the valve body (23) is installed in the central part of the lifting slider (20), and the parts on both the left and right sides (upper surfaces of the left and right upper corners) are made into contact surfaces that contact the regulating member (74).

[0071] In this embodiment, the valve body shaft (24) is positioned with its axial direction aligned with the axial direction of the screw shaft (41) and has a lifting slider (20) connected to its lower end. Accordingly, the movement stress in the cross direction from the transmission mechanism (4) is reliably transmitted to the valve body (23) connected to the upper end of the valve body shaft (24), thereby enabling precise movement.

[0072] The lifting body (50) as the first operating mechanism (5) initially receives the movement stress in the cross direction from the driving source (3) transmitted from the transmission mechanism (4) and moves, and further functions to transmit the movement stress to the moving body (2) and the second operating mechanism (6). The lifting body (50) is configured to move in the cross direction in a first operating area (R1) that moves together with the moving body (2) through the lifting operating mechanism (8), and in a second operating area (R2) that moves additionally in the cross direction by operating the vertical operating mechanism described later while the movement of the moving body (2) in the cross direction is restricted. That is, as described above, the lifting body (50) moves in the cross direction along the screw shaft (41) together with the ball nut (42) and moves back and forth between the first operating area (R1) and the second operating area (R2).

[0073] The lifting body (50) is a rectangular plate-shaped member that is connected to the lifting slider (20) via a lifting motion mechanism (8) and simultaneously connected to the transmission mechanism (4). The lifting body (50) is housed in the guide member (7) at a position (downward position) closer to the driving source (3) than the lifting slider (20) in the cross direction, and is guided to move in the cross direction (upward and downward direction). The lifting body (50) is installed in a position positioned below the lifting slider (20) which acts as the moving body (2). A ball nut (42) which acts as the transmission mechanism (4) housed in the guide member (7) is integrally installed on the lifting body (50).

[0074] As shown in FIG. 7, the lifting body (50) has a nut fitting hole (54) in the central part to which a ball nut (42) that moves in an intersecting direction along the screw shaft (41) is fitted. The lifting body (50) fixes the ball nut (42) in the nut fitting hole (54) so ​​that it can move integrally with the ball nut (42) that moves along the screw shaft (41).

[0075] Additionally, as shown in FIGS. 4 to 7, the lifting body (50) is formed with a left-right width slightly longer than the left-right width of the lifting slider (20). The side end portion (52) in the left-right direction of the lifting body (50) is located outside the left wall (71) and the right wall (71) through the vertical hole (73) formed in the lower half of the left wall (71) and the right wall (71), respectively. That is, the lifting body (50) protrudes the left-right side end portion (52) outward from the left wall (71) and the right wall (71) through the vertical hole (73).

[0076] As shown in FIGS. 7 to 12, a second bearing body (530) is installed in succession on the side end (52) of the lifting body (50) as a second engaging member (53). The second bearing body (530) has an insertion groove (530a) that guides and accommodates the second engaging shaft (910), which is an input part (91) located at the bottom of the link mechanism (60).

[0077] The second bearing body (530) functions as a so-called cam groove, in which the second engaging shaft (910) installed at the bottom of the driving link body (620) located at the bottom of the link mechanism (60) with respect to the insertion groove (530a) is used as a contactor, and each link body constituting the link mechanism (60) is used as a cam follower.

[0078] As shown in FIG. 10, the insertion groove (530a) is a horizontal groove formed on the left and right sides of the lifting body (50) in a roughly L-shape, and an entry opening (530e) is formed at the upper end of one side of the L-shaped path. The entry opening (530e) is a part that accommodates the second engaging shaft (910) installed at the bottom of the link mechanism (60) described later, and is open upward.

[0079] Specifically, the second bearing body (530) has a lower groove wall (530b) that protrudes outward from the left and right ends of the lifting body (50) and extends along the front and rear directions, an upper groove wall (530c) that extends along the front and rear directions above the lower groove wall (530b), and a longitudinal groove wall (530d) that connects the front ends of the lower groove wall (530b) and the upper groove wall (530c). The longitudinal groove wall (530d) is a portion that connects the lower groove wall (530b) and the upper groove wall (530c). The second bearing body (530) forms a space portion surrounded by these walls (530b, 530c, 530d) in an indented groove portion (530a) having an entrance (530e) that opens upward from the upper rear end. In this way, the second bearing body (530) has an indentation groove (530a) formed by a lower groove wall (530b), an upper groove wall (530c), and a longitudinal groove wall (530d), and the indentation groove (530a) has an entrance (530e) with an upper opening.

[0080] The upper groove wall (530c) is formed with a length in the front-rear direction shorter than that of the lower groove wall (530b), and the area where the upper groove wall (530c) and the lower groove wall (530b) do not overlap in the upper and lower directions of the indentation groove (530a) becomes the area where the entrance (530e) is formed.

[0081] Additionally, the second bearing body (530) may further be provided with a guide groove wall (530f) installed on the rear side of the lower groove wall (530b0). The guide groove wall (530f) is a curved portion forming an R shape when viewed from the side, and is configured to restrict the movement of the second engaging shaft (910) that has entered the insertion groove (530a) in the rear direction (right direction in FIG. 10) and to accelerate the movement in the forward direction (left direction in FIG. 10).

[0082] The second engagement shaft (910) is positioned overlapping the inlet port (530e) in the vertical direction when the valve body (23) does not seal the opening (A10), as shown in FIGS. 10 and 11. In other words, the driving link body (620) in the link mechanism (60) positions the input part (91) opposite the inlet port (530e) when the lifting body (50) is positioned in the first operating area (R1).

[0083] The first operating area (R1) of the lifting body (50) configured in this manner is the lower area among the areas where the lifting body (50) moves up and down along the axial direction of the screw shaft (41). Additionally, the second operating area (R2) is the upper area among the areas where the lifting body (50) moves up and down along the axial direction of the screw shaft (41).

[0084] In detail, the first operating area (R1) is an area in which the elevator body (50) moves in the up and down direction until the second bearing body (530), which is a second engaging member (53) installed in succession to the elevator body (50), comes into contact with the second engaging shaft (910) which is an input part (91). Additionally, the second operating area (R2) is an area in which the elevator body (50) moves in the up and down direction while maintaining the state in which the second bearing body (530), which is a second engaging member (53) installed in succession to the elevator body (50), comes into contact with the second engaging shaft (910) which is an input part (91).

[0085] In addition, a lifting mechanism (8) is installed between the first operating mechanism (5) and the moving body (2). Specifically, the lifting mechanism (8) is an elastic body (80), for example, a compression coil spring. The elastic body (80) is installed in multiple places between the lower surface of the lifting slider (20) and the upper surface of the lifting body (50). In other words, the lifting slider (20) and the lifting body (50) are connected to each other through the elastic body (80) as the lifting mechanism (8), as shown in FIGS. 4 to 12.

[0086] Two elastic bodies (80) are installed in the lifting slider (20) and the lifting body (50) at a position that is point-symmetric with respect to the axis center of the screw shaft (41). As shown in FIG. 4, the elastic bodies (80) are externally wrapped around a guide rod (81) extending between the lifting slider (20) and the lifting body (50) and apply upward force to the lifting slider (20) on the lifting body (50). Additionally, as another example, the elastic bodies (80) may be multiple disc springs externally wrapped around the guide rod (81).

[0087] The lifting slider (20) and lifting body (50) configured as described above are housed in the guide member (7) and move in the up and down direction without idle rotation by following the screw rotation of the ball screw (40). That is, in the vertical moving body (A2) as a valve body cross-movement mechanism system, as shown in FIGS. 4 to 7, the power is transmitted to the ball screw (40) as a transmission mechanism (4) in conjunction with the driving of the motor (30) as a driving source (3).

[0088] Specifically, a screw shaft (41) connected to the output shaft of the motor (30) via a coupling (31) rotates, and a connected ball nut (42) moves in the up and down direction. As the ball nut (42) moves in the up and down direction, a lifting body (50) installed integrally with the ball nut (42) begins to move in the up and down direction, and the movement stress is transmitted to a lifting slider (20) located above as a moving body (2) through an elastic body (80) acting as a lifting operation mechanism (8). That is, the lifting body (50) moves in the up and down direction together with the lifting slider (20) through the elastic body (80) which maintains an elongated shape by the ball screw (40).

[0089] In this way, the elastic body (80) is installed to move integrally in the cross direction and vertical direction together with the lifting slider (20) and the lifting body (50). By adopting this integrally moving configuration, buckling deformation of the elastic body (80) can be prevented, for example, when moving in the vertical direction. In addition, since the perturbation at the contact portion between the elastic body (80) and the lifting slider (20) and the contact portion between the elastic body (80) and the lifting body (50) is reduced, the generation of particles can be reduced.

[0090] When the lifting slider (20) hits the regulating member (74) and stops at the rising end position, as shown in FIGS. 8 and FIGS. 11, the valve body (23) protrudes upward within the valve box (A1) to become a facing position (P2) that maintains a certain distance from the opening (A10).

[0091] That is, according to the first operation performed by the lifting body (50) in the first operation area (R1), the lifting slider (20) moves between the open position (P1) and the facing position (P2). In other words, the lifting slider (20) moves in the up and down direction in a state where it is positioned downward and in a state where it collides with the regulating member (74).

[0092] In this way, the vertical moving body (A2) enables the vertical positioning of the valve body (23) by moving the lifting body (50) and the lifting slider (20) in an intersecting direction through the rotational operation of the ball screw (40). That is, when the screw shaft (41) installed in series with the output shaft rotates by the operation of the motor (30), the lifting slider (20) moves along the screw shaft (41), and the valve body shaft (24) installed integrally in series with the lifting slider (20) also moves, thereby enabling movement in an intersecting direction for adjusting the position of the valve body (23), and the height position of the valve body (23) is adjusted to accurately correspond to the opening (A10) of the valve box (A1).

[0093] Additionally, by the lifting body (50) performing a second operation in the second operation area (R2), the valve body vertical movement mechanism system described later is operated, and the lifting slider (20) moves vertically for each valve body (23), causing the valve body (23) to move closer to or further away from the opening (A10). This second operation of the lifting body (50) is a movement that moves the lifting body (50) closer to or further away from the lifting slider (20) while deforming the elastic body (80) into an extended or contracted form with respect to the lifting slider (20) that has stopped at the rising end position.

[0094] [3. Valve Body Vertical Movement Mechanism System]

[0095] Next, the valve body vertical movement mechanism system is described in detail. The valve body vertical movement mechanism system is configured by having a vertical movement body (A2) as a valve body cross-movement mechanism system, in addition to a vertical movement mechanism (A3) installed between the housing (1) and the vertical movement body (A2). Furthermore, since the vertical movement mechanism (A3) basically has the same configuration symmetrically on the left and right when viewed from the front, the same reference numerals are used for identical configurations and the description is omitted unless specifically explained otherwise.

[0096] As shown in FIGS. 9 and 12, the vertical motion mechanism (A3) moves the vertical moving body (A2) in the vertical direction according to the second motion in the second motion area (R2) of the lifting body (50) as the first motion mechanism (5), that is, the movement in the cross direction.

[0097] The vertical motion mechanism (A3) is configured to have a pair of link mechanisms (60) that are oscillating and opened between the housing (1) and the guide member (7) as the second motion mechanism (6) described above, and to displace the vertical moving body (A2) in the vertical direction of the housing (1), that is, the moving body (2) equipped with the valve body (23) in the vertical direction for each guide member (7).

[0098] The link mechanism (60) is composed of a plurality of link bodies connected so as to be rotatable relative to each other, as shown in FIGS. 10 to 12. The plurality of link bodies includes a tension link body (611) which is rotatably mounted on the housing (1) at one end, a driven link body (610) which is rotatably connected to the tension link body (611) at one end and engages with the first engaging member (77) at the front end, and a driving link body (620) at one end which is connected to at least one of the tension link body (611) and the driven link body (610).

[0099] The link mechanism (60) moves the movable body (2) from a cross-direction movement to a vertical direction through the driven link body (610) and the tension link body (611). Specifically, the link mechanism (60) moves the movable body (2) in a vertical direction by displacing the driving link body (620) through the second engaging member (53) of the lifting body (50) in the first operating mechanism (5) in the second operating area (R2), thereby performing a shape displacement between the tension link body (611) and the driven link body (610).

[0100] As shown in FIGS. 10 to 12, the shape displacement of the tension link body (611) and the driven link body (610) in the link mechanism (60) has two forms: a bent shape (T1) in which the tension link body (611) and the driven link body (610) intersect and protrude downward, and a straight shape (T2) in which the tension link body (611) and the driven link body (610) are aligned in a straight line in the vertical direction. That is, in the link mechanism (60), the shapes formed by the tension link body (611) and the driven link body (610) include the bent shape (T1) and the straight shape (T2).

[0101] The bent shape (T1) of the tension link body (611) and the driven link body (610) separates the valve body (23) from the opening surface (A100) to open the opening (A10). The straight shape (T2) of the tension link body (611) and the driven link body (610) brings the valve body (23) close to the opening surface (A100) to close the opening (A10).

[0102] The straight form (T2) is not necessarily limited to a state where the tension link body (611) and the driven link body (610) are aligned in a straight line. For example, if the engagement part (90; first engagement axis (900)) moves only in the vertical direction, the straight form (T2) may be a slightly bent form (including either a slightly bent form protruding upward or a slightly bent form protruding downward). Furthermore, in the straight form (T2) with a bend protruding upward, if the movement of the elevator body (50) in the cross direction is restricted, the closed state of the opening (A10) described later is not released even if an external force is applied to move the valve body (23) in the vertical direction.

[0103] The shape displacement of the tension link body (611) and the driven link body (610) is achieved by movement in the cross direction in the second operating area (R2) of the first operating mechanism (5). That is, in the second operating area (R2), the lifting body (50) makes the link mechanism (60) into a bent shape (T1) by engaging the upper groove wall (530c) of the second bearing body (530) with the driving link body (620), and makes the link mechanism (60) into a straight shape (T2) by engaging the lower groove wall (530b) of the second bearing body (530) with the driving link body (620).

[0104] The configuration of the link mechanism is described in more detail below. A plurality of link bodies constituting the link mechanism (60) are connected to be rotatable relative to each other through a plurality of oscillating pivot shafts including a coupling part (90) and an input part (91), and are simultaneously maintained on the left wall (12) and right wall (12) of the housing (1) through a plurality of housing pivot shafts serving as a support part (92).

[0105] The housing pivot shafts serving as the support member (92) consist of three parts: an upper housing pivot shaft (920) located at the upper and front side, a middle housing pivot shaft (921) located at the middle and rear side, and a lower housing pivot shaft (922) located at the lower and front side, in the left wall (12) and right wall (12) of the housing (1). Thus, the support member (92) is composed of a plurality of housing pivot shafts and maintains the link mechanism (60) serving as the second operating mechanism (6) in the left wall (12) and right wall (12) of the housing (1) at a predetermined position (part).

[0106] The oscillating thrust shaft, including the engaging part (90) and the input part (91), is composed of four parts: a first engaging shaft (900) that moves the lifting slider (20) in a vertical direction at a lower position of the upper housing thrust shaft (920); an intermediate oscillating thrust shaft (930) between the first engaging shaft (900) and the intermediate housing thrust shaft (921); a lower oscillating thrust shaft (931) located lower than the intermediate oscillating thrust shaft (930) and rearward than the lower housing thrust shaft (922); and a second engaging shaft (910) located at the bottom of the link mechanism (60).

[0107] That is, the engaging portion (90) is composed of a first engaging shaft (900) that engages with a first bearing body (770), which is a first engaging member (77) of a vertical moving body (A2). Additionally, the input portion (91) is composed of a second engaging shaft (910) that engages with a second bearing body (530), which is a second engaging member (53) of a lifting body (50) serving as a first operating mechanism (5) of a vertical moving body (A2).

[0108] In a link mechanism (60), the driven link body (610) and the tension link body (611) constitute a vertical link body (61) including a coupling part (90). Specifically, the vertical link body (61) is composed of a driven link body (610) opened between a first coupling shaft (900) at one end and a oscillating shaft at the other end, a tension link body (611) opened between a oscillating shaft at the other end of the driven link body (610) and a housing shaft, and an upper oscillating link body (612) opened between a first coupling shaft (900) at one end of the driven link body (610) and a housing shaft at the other end. That is, the driven link body (610) is provided with a first coupling shaft (900) at one end, and the end is configured as a coupling part (900).

[0109] The driving link body (620) comprises a transmission link body (62) including an input part (91) in the link mechanism (60). Specifically, the transmission link body (62) is composed of a driving link body (620) connected to at least a driven link body (610) or a tension link body (611) at one end through a oscillating pivot shaft, and an intermediate oscillating link body (621) opened between the oscillating pivot shaft of the middle part of the driving link body (620) and the housing pivot shaft of the other end.

[0110] The driving link body (620) is configured with an input part (91) that engages with or disengages from the lifting body (50) at the other end and engages with the lifting body (50). As shown in FIG. 10, the driving link body (620) positions the input part (91) to face the entry port (530e) while the lifting body (50) is in the first operating area (R1). The driving link body (620) inserts the second engagement shaft (910) at the end into the insertion groove (530a) of the second bearing body (530) of the lifting body (50).

[0111] The second engagement shaft (910) is capable of being inserted into and removed from the insertion groove (530a) of the second bearing body (530) of the lifting body (50) protruding from the longitudinal hole (73) of the guide member (7).

[0112] One end of the driving link body (620) is oscillatingly driven by the intermediate oscillating drive shaft (930) connecting the driven link body (610) and the tension link body (611). That is, the driven link body (610), the tension link body (611), and the driving link body (620) are connected to each other so as to be oscillating (rotating) around a common intermediate oscillating drive shaft (930).

[0113] The driving link body (620) is the longest link body in the link mechanism (60), and as shown in FIGS. 10 to 12, with one end driven through the intermediate oscillating driving shaft (930), the one end is positioned at the upper side of the longitudinal hole (73) installed in the lower half of the left wall (71) and right wall (71) of the guide member (7) as the lowest end of the link mechanism (60).

[0114] The driving link body (620) drives the other end of the intermediate driving link body (621) so as to drive it oscillately through the lower oscillating driving shaft (931) installed in the middle part of the driving link body (620).

[0115] The intermediate oscillating link body (621) defines the oscillating direction or oscillating range of other link bodies in the link mechanism (60). Specifically, the intermediate oscillating link body (621) functions as a regulating link that ensures the reproduction of the bending shape (T1) and the straight shape (T2) by defining the posture of the driving link body (620) as a bending shape (T1) that opens the opening (A10) and a rigid shape (T3) corresponding to the straight shape (T2) that closes the opening (A10), as shown in FIGS. 10 to 12.

[0116] The driven link body (610), tension link body (611), and upper oscillating link body (612) as link bodies, the upper housing oscillating shaft (920) and intermediate housing oscillating shaft (921) as oscillating shafts, the first engaging shaft (900), and the intermediate oscillating oscillating shaft (930) constitute a vertical link section (61) as a single unit. As shown in FIGS. 10 to 12, the vertical link section (61) moves the vertical moving body (A2) in the vertical direction by displacing the posture of the driven link body (610) and the tension link body (611) into a bent shape (T1) and a straight shape (T2).

[0117] The driving link body (620) as a link body, the intermediate oscillating link body (621), the lower housing oscillating shaft (922) as a oscillating shaft, the intermediate oscillating oscillating shaft (930), the lower oscillating oscillating shaft (931), and the second engaging shaft (910) constitute a transmission link section (62) as a single unit. The transmission link section (62) transmits input from the lifting body (50) to the vertical link section (61) to change the posture of the vertical link section (61).

[0118] That is, as shown in FIGS. 10 to 12, the vertical link section (61), which consists of a driven link body (610) and a tension link body (611) connected through an intermediate oscillating shaft (930), is displaced in a straight line (changes shape) by the force input to the transmission link section (62), which consists of a lower oscillating shaft (931) connected through the intermediate oscillating shaft (930). When the vertical link section (61) is displaced in a straight line, the lifting slider (20), which is connected to the link mechanism (60) through a guide member (7), moves in a vertical direction (forward) for each guide member (7). As the lifting slider (20) moves in a vertical direction, the valve body (23) installed in succession to the lifting slider (20) also moves in a vertical direction, thereby closing the opening (A10) by the valve body (23).

[0119] In other words, the link mechanism (60) as the second operating mechanism (6) maintains a bent shape (T1) during the movement of the first operating mechanism (5) in the cross direction in the first operating area (R1) to separate the valve body (23) from the opening surface (A100) and open the opening (A10), and then, in opposition to the negative force of the elastic body (80) of the first operating mechanism (5) in the second operating area, becomes a straight shape (T2) as it moves further in the cross direction to bring the valve body (23) closer to the opening surface (A100) and close the opening (A10).

[0120] In this way, compared to a conventional valve body operating structure using a link mechanism, the gate valve (A) has a link mechanism (60) as a second operating mechanism (6) that does not move together with the movement of the valve body (23) in the cross direction, and the link mechanism (60) is installed in a housing (1) at a separate location from the lifting slider (20) as a moving body (2) and the lifting body (50) as a first operating mechanism (5). The link mechanism (60) is installed in a housing (1), which is a pre-positioned part different from the lifting body (50), regardless of the movement of the moving body (2) in the up and down direction. Because of this, assembly is simple and reliable vertical movement of the valve body can be realized, thereby minimizing failures or wear damage to the link movement part.

[0121] The vertical motion mechanism (A3) is based on a link mechanism (60) as a second motion mechanism (6). The link mechanism (60) connects a driven link body (610) that moves the valve body (23) in a vertical direction to a tension link body (611) through an intermediate oscillating shaft (930), and operates the driven link body (610) by displacing the intermediate oscillating shaft (930). That is, the vertical movement of the valve body (23) can be realized with a minimal configuration that forms a link mechanism without requiring a complex link mechanism.

[0122] [4. Closing operation of the valve body]

[0123] Next, the closing operation of the valve body (23) that closes the opening (A10) will be described. As shown in FIGS. 6, 8, 10 and 11, as a first operation in the first operation area (R1), when the lifting body (50) moves in the cross direction, the valve body (23) is positioned from the open position (P1) to the facing position (P2).

[0124] When the lifting body (50) performs a second operation in the second operation area (R2), as shown in FIG. 11, the second engaging shaft (910) is inserted into the insertion groove (530a). In this state, if the lifting body (50) moves further in the cross direction, as shown in FIG. 12, the driving link body (620) pushes up the intermediate oscillating shaft (930) to reveal a straight shape (T2) between the driven link body (610) and the tension link body (611). That is, as the intermediate oscillating shaft (930) is pushed upward by the driving link body (620), the shape formed by the driven link body (610) and the tension link body (611) changes from a bent shape (T1) to a straight shape (T2).

[0125] The displacement in a straight line shape (T2) between the driven link body (610) and the tension link body (611) induces vertical movement of the lifting slider (20) through the first bearing body (770) receiving the first engagement axis (900) of the driven link body (610), thereby moving the lifting slider (20) vertically along each guide member (7).

[0126] Accordingly, as shown in FIGS. 11 and 12, the valve body (23) moves vertically from the facing position (P2) to the closed position (P3) through the valve body shaft (24) installed in succession to the lifting slider (20). In this way, the tight closing operation of the opening (A10) of the gate valve (A) in the valve body (23) is performed.

[0127] Specifically, the lifting body (50), which moves in the up and down direction by means of a ball screw (40), moves the lifting slider (20) located above it until it comes into contact with the regulating member (74). Meanwhile, the elastic body (80) connecting the lifting body (50) and the lifting slider (20) maintains a roughly extended state. Additionally, the second engagement shaft (910) as a movement input part (91) is located directly above the entrance (530e) of the insertion groove (530a) of the second bearing body (530) as the second engagement member (53) below, in the bent shape (T1) of the link mechanism (60).

[0128] As shown in FIGS. 10 to 12, the lifting body (50) moves the lifting slider (20) to the regulating member (74) while moving in a cross direction in the first operating area (R1) as a first operation, and then the elastic body (80) interposed between the lifting slider (20) contracts and deforms against elastic stress, and as a second operation, performs additional movement in a cross direction in the second operating area (R2).

[0129] By performing the second operation of the lifting body (50), the insertion groove (530a) of the second bearing body (530) approaches the lower end of the driving link body (620), and the second engaging shaft (910) of the driving link body (620) enters the insertion groove (530a) from the entry opening (530e).

[0130] The second engagement shaft (910) that has entered the insertion groove (530a) approaches the longitudinal groove wall (530d) as it is guided to the lower groove wall (530b) and guide groove wall (530f) of the second bearing body (530) according to the additional movement of the lifting body (50). Since the oscillation range of the driving link body (620) is regulated by the intermediate oscillating link body (621), the posture of the second engagement shaft (910) is displaced from an inclined posture (T3) to an upright posture (T4) as shown in FIGS. 11 and 12 according to the movement of the second engagement shaft (910).

[0131] Accordingly, the driven link body (610) and the tension link body (611) are pushed up by the driving link body (620) through the intermediate oscillating pivot shaft (930) and displaced from a bent shape (T1) protruding downward to a straight shape (T2). The first engaging shaft (900) at one end of the driven link body (610) moves in a vertical direction starting from the intermediate housing pivot shaft (921) at one end of the tension link body (611).

[0132] As a result, the first engagement shaft (900) that has moved in the vertical direction presses against the front groove wall of the longitudinal groove (770a) of the first bearing body (770) to move the lifting slider (20) in the vertical direction for each guide member (7). Accordingly, the valve body (23) connected to the lifting slider (20) moves in the vertical direction from the facing position (P2) opposite the opening (A10) to the closed position (P3) so as to be close to the opening surface (A100), and closes the opening (A10) as shown in FIGS. 9 and 12.

[0133] In the closed state of the opening (A10) by the valve body (23), the driven link body (610) and the tension link body (611) of the link mechanism (60) are constantly subjected to upward force by the driving link body (620) through the intermediate oscillating shaft (930), so even if an external force is applied to separate the valve body (23) from the opening (A10), the straight shape (T2) is maintained and the compressed state of the valve body (23) towards the opening (A10) is maintained.

[0134] Specifically, the link mechanism (60) acts as a toggle mechanism. As the angle formed between the driven link body (610), one end of which is connected to the moving object (e.g., vertical moving body (A2)), and the tension link body (611), one end of which is rotatably supported in the housing (1) and the other end of which is connected to the driven link body (610), increases, the output for moving the vertical moving body (A2) increases with respect to the magnitude of the force input from the intermediate oscillating pivot shaft (930).

[0135] The link mechanism (60) can strongly push the valve body (23) toward the opening (A10) even when operated with a small force. That is, the gate valve (A) can strongly push the valve body (23) toward the opening (A10) by the operation of the link mechanism (60) even when using a driving source (3) with a small output, thereby achieving tight closure. Therefore, the operation of the link mechanism (60) enables vertical movement of the valve body (23) with a small operating force, thereby saving energy consumption.

[0136] In addition, since the driven link body (610) and the tension link body (611) take a straight shape (T2) while the valve body (23) is in a state where the opening (A10) is closed, even if an external force is applied that separates the valve body (23) from the opening (A10) due to unintended contact or the like, the valve body (23) can maintain the state of being in a state where the opening (A10) is closed.

[0137] Specifically, when an external force is applied to the valve body (23), a vertical moving force is applied to the first engagement shaft (900) through the lifting slider (20) connected to the valve body (23). However, since the force is received by the tension link body (611), which has one end fixed to the housing (1), through the driven link body (610), the driven link body (610) and the tension link body (611) do not displace from a straight shape (T2) to a bent shape (T1) protruding downward. Therefore, the compressed state into the opening (A10) of the valve body (23) is maintained.

[0138] That is, without providing a special locking mechanism, a valve body lock can be realized by maintaining a tight closing state of the opening (A10) by the valve body (23) through the straight shape (T2) of the driven link body (610) and the tension link body (611) of the link mechanism (60). Accordingly, maintaining the sealed state of the opening (A10) by the valve body (23) is made possible by making the driven link body (610) and the tension link body (611) into a straight shape, so that energy is not required to maintain the sealed state, thereby preventing unnecessary energy consumption.

[0139] [5. Opening Operation of the Valve Body]

[0140] Next, the opening operation of the valve body (23) that opens the opening (A10) will be described. As previously described, in the closed state of the opening (A10) by the valve body (23), as shown in FIGS. 8, 9, 11 and 12, the valve body (23) moves from the closed position (P3) to the facing position (P2) in accordance with the additional movement of the lifting body (50) in the cross direction, which is separated from the valve body (23) in the second operating area (R2). That is, the second engaging shaft (910) of the link mechanism (60) that has entered the insertion groove (530a) in accordance with the second operation of the lifting body (50) engages with the upper groove wall (530c) of the insertion groove (530a) and moves downward and backward, thereby separating from the longitudinal groove wall (530d).

[0141] Additionally, the driving link body (620) shifts its posture from an upright position (T4) to an inclined position (T3) as shown in FIGS. 11 and 12, in accordance with the movement of the second engagement axis (910). Accordingly, the driven link body (610) and the tension link body (611) are pulled downward by the driving link body (620) through the intermediate oscillating pivot axis (930), and shift from a straight shape (T2) to a bent shape (T1) as shown in FIGS. 10 and 11. That is, the intermediate oscillating pivot axis (930) is pulled downward by the driving link body (620) that changes the posture from an upright position (T4) to an inclined position (T3), thereby changing the shape formed by the driven link body (610) and the tension link body (611) from a straight shape (T2) to a bent shape (T1). In addition, the first engagement axis (900) of one end of the driven link body (610) moves vertically starting from the intermediate housing support axis (921) of one end of the tension link body (611).

[0142] As a result, the first engagement shaft (900) that has moved in the vertical direction presses against the rear groove wall of the longitudinal groove (770a) of the first bearing body (770), thereby moving the lifting slider (20) in the vertical direction for each guide member (7). Accordingly, the valve body (23) connected to the lifting slider (20) moves in the vertical direction so as to be spaced apart from the opening (A10), and the opening (A10) is opened.

[0143] Finally, by moving the lifting body (50) in a cross direction in the first operating area (R1) so that the lifting slider (20) is separated from the opening surface (A100) through the elastic body (80), the valve body (23) is positioned from the facing position (P2) to the opening position (P1), as shown in FIGS. 6 and FIGS. 10, thereby opening the opening (A10).

[0144] In this way, the gate valve (A) according to the present embodiment performs a closing operation by the valve body (23) such that, in the sequence of ‘movement of the moving body in the cross direction of the valve body cross movement mechanism system → movement of the vertical moving body (A2) in the vertical direction by the vertical movement mechanism (A3) of the valve body vertical movement mechanism system’, ‘closed state of the opening (A10) in the cross direction of the valve body (23) → close movement of the opening (A10) in the vertical direction of the valve body (23) → closed state of the opening (A10)’ or an opening operation by the valve body (23) such that, ‘separated movement of the valve body (23) in the vertical direction of the opening (A10) → separated movement of the valve body (23) in the cross direction of the valve body (23) → open state of the opening (A10)’.

[0145] In particular, the link mechanism (60) of the present embodiment enables the vertical movement of the lifting slider (20), that is, the vertical movement to the opening (A10) of the valve box (A1) of the valve body (23), by means of the engagement operation between the driving link body (620) and the lifting body (50), so that the driven link body (610) and the tension link body (611) are displaced in a straight shape (T2) or a bent shape (T1) through the intermediate oscillating pivot shaft (930).

[0146] As described above, according to the gate valve (A) of the present embodiment, by combining a simple mechanism of a vertical moving body (A2) and a vertical movement mechanism (A3), movement in the cross direction and vertical direction is neatly distinguished to realize stepwise and individual movement of the valve body (23), while simultaneously suppressing wear damage of the seal member (23a) and tightly closing the opening (A10) of the valve box (A1) that leads to the opening (B10) of the load lock device (B) or the opening (C10) of the processing device (C).

[0147] Furthermore, the above-described embodiments are examples of the present invention, and the present invention is not limited to the above-described embodiments. Accordingly, it is understood that various modifications are possible depending on the design, etc., even in addition to the above-described embodiments, as long as they do not deviate from the technical concept related to the present invention. Furthermore, the effects described in this disclosure are merely examples and are not limited thereto, and other effects may also be present. Explanation of the symbols

[0148] A; Gate valve, A1; Valve box, A2; Vertical moving body, A3; vertical motion mechanism, 1; housing, 10; lower side wall, 11; upper side wall, 12; left wall or right wall, 2; movable body, 20; lifting slider, 21; guide rod insertion hole, 22; screw shaft insertion hole, 3; driving source, 30; motor, 31; coupling, 4; transmission mechanism, 40; ball screw, 41; screw shaft, 42; ball nut, 5; first operating mechanism, 50; lifting body, 51; guide rod insertion hole, 52; side end, 53; second engaging member, 530; second bearing body, 54; nut fitting hole, 6; second actuation mechanism, 60; link mechanism, 61; vertical link section, 610; driven linkage, 611; tension linkage, 612; upper oscillating link body, 62; transmission link section, 620; driving link body, 621; intermediate oscillating link body, 7; guide member 70; lower side wall 71; left wall or right wall, 72; drive source support frame, 73; Jonggong, 74; Absence of regulation, 75; upper support or lower support, 76; guide rod, 77; first engaging member, 770; first bearing body, 8; lifting motion mechanism, 80; elastic body, 81; guide rod, 90; engaging part, 900; first engaging shaft, 91; input part, 910; 2nd coupling axis, 92; support part, 920; upper housing pivot axis, 921; middle housing pivot axis, 922; lower housing pivot shaft, 930; intermediate oscillating pivot shaft, 931; Lower oscillating pivot axis.

Claims

Claim 1 A gate valve that seals an opening formed on an opening surface communicating with a processing unit of a vacuum processing device by pressing a valve body equipped with a sealing member, the gate valve comprises: a movable body that operates integrally with the valve body; a conversion mechanism that moves the movable body in each direction, such as a direction perpendicular to the opening surface and a direction intersecting the perpendicular direction; and a transmission mechanism that transmits power from a driving source to the conversion mechanism. The conversion mechanism comprises a first operating mechanism that moves in the perpendicular direction and moves the movable body in the perpendicular direction, and a second operating mechanism that moves the movable body in the perpendicular direction. The operation by the second operating mechanism includes an operation by additional movement of the first operating mechanism in the perpendicular direction while the movement of the movable body in the perpendicular direction is restricted. The gate valve comprises a housing in which the second operating mechanism is arranged and installed, and a guide member installed in the housing such that the movement in the perpendicular direction is restricted and the guide member is movable in the perpendicular direction together with the movable body. The second operating mechanism comprises a support member supported by the housing and a member engaged with the guide member. A gate valve characterized by having a engaging portion and an input portion that engages with or disengages from the first operating mechanism. Claim 2 A gate valve according to claim 1, wherein the second operating mechanism is installed at a predetermined position regardless of the movement of the movable body in the cross direction. Claim 3 delete Claim 4 A gate valve according to claim 1 or 2, wherein the second operating mechanism comprises a vertical link portion including the engaging portion and a transmission link portion including the input portion in the link mechanism, and wherein the transmission link portion transmits a force input from the first operating mechanism to the input portion to the vertical link portion. Claim 5 A gate valve according to claim 4, wherein the movable body is installed to be movably guided in the vertical direction as the cross direction on the guide member, the first operating mechanism is a lifting body that moves the movable body in the vertical direction within the guide member, the link mechanism as the second operating mechanism is configured to move the movable body in the vertical direction for each guide member, and the link mechanism is installed at a separate, predetermined position different from the lifting body, regardless of the vertical movement of the movable body. Claim 6 A gate valve according to claim 5, wherein the link mechanism comprises a oscillating grasping shaft connecting a plurality of link bodies so as to be rotatable relative to each other, a plurality of housing grasping shafts grasped in the housing as a support member, a first engaging shaft engaged with the guide member as a engaging member, a driven link body opened between the first engaging shaft at one end and the oscillating grasping shaft at the other end as a vertical link member, and a tension link body opened between the oscillating grasping shaft at the other end of the driven link body and the housing grasping shaft, and a driving link body connected to at least the driven link body or the tension link body via the oscillating grasping shaft at one end as a transmission link member, wherein the driving link body comprises a second engaging shaft at the other end that engages with or disengages from the lifting body as an input member, and engages with the lifting body to follow additional movement in the vertical direction of the lifting body. Claim 7 A gate valve according to claim 6, wherein the link mechanism moves the moving body from the cross direction to the vertical direction through the driven link body and the tension link body. Claim 8 A gate valve that seals an opening formed on an opening surface communicating with a processing unit of a processing device for performing vacuum processing by pressing a valve body equipped with a sealing member, the gate valve comprises: a housing; a vertical moving body maintained in the housing and movable in a direction perpendicular to the opening surface; and a vertical movement mechanism installed between the housing and the vertical moving body. The vertical moving body comprises a moving body that operates integrally with the valve body; a lifting body that moves together with the moving body in a direction intersecting the vertical direction; a driving source that moves the lifting body in the direction intersecting the vertical direction; and a lifting mechanism installed between the lifting body and the moving body. The lifting body is configured to move in the direction intersecting the first operating area in which it moves together with the moving body in the direction intersecting the vertical movement mechanism through the lifting mechanism, and to move in the direction intersecting the second operating area in which it additionally moves in the direction intersecting the vertical movement mechanism when the movement of the moving body in the direction intersecting the vertical movement mechanism is restricted. The vertical movement mechanism, in conjunction with the movement of the lifting body in the direction intersecting the vertical moving body in the second operating area, Moving in the above vertical direction, the vertical moving body has a regulating member that regulates the movement of the moving body in the above cross direction in the second operating region, and a first engaging member that engages with the vertical moving mechanism, and the vertical moving mechanism, in a link mechanism, has a tension link body rotatably mounted on the housing at one end, a driven link body that is rotatably connected to the tension link body at one end and engages with the first engaging member at the other end, and a driving link body at one end connected to at least one of the tension link body and the driven link body, and the lifting body has a second engaging member that engages with the driving link body, and the link mechanism, by displacing the driving link body through the second engaging member in the second operating region,A gate valve characterized by performing shape displacement of the above tension link body and the above driven link body. Claim 9 delete Claim 10 A gate valve according to claim 8, wherein the shape displacement of the tension link body and the driven link body in the link mechanism includes two shapes: a bent shape in which the tension link body and the driven link body intersect to protrude downward, and a straight shape in which the tension link body and the driven link body are aligned in a straight line in the vertical direction; and wherein the movable body separates the valve body from the opening surface by the bent shape of the link mechanism to open the opening, and at the same time closes the valve body to the opening surface by the straight shape of the link mechanism to close the opening. Claim 11 A gate valve according to claim 10, wherein the second engaging member has an indentation groove formed by a lower groove wall extending along the vertical direction, an upper groove wall extending along the vertical direction and shorter than the lower groove wall, and a longitudinal groove wall connecting the lower groove wall and the upper groove wall, wherein the indentation groove has an entrance opening with an upper side open, and the lifting body is characterized in that, in the second operating region, the link mechanism is formed into the bent shape by engaging the upper groove wall with the driving link body, and the link mechanism is formed into the straight shape by engaging the lower groove wall with the driving link body. Claim 12 A gate valve according to claim 11, wherein the driving link body has an input portion at the other end that engages with or disengages from the second engaging member, and wherein, when the lifting body is positioned in the first operating region, the input portion is positioned opposite the inlet.

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