Apparatus for Collecting Solid-Phase Materials

Abstract

The present invention relates to a solid material collection device. The solid material collection device installed in a piping section comprises: a collection chamber (110) fluidically connected to an upper pipe (101); a separation chamber (120) disposed inside the collection chamber (110), having an upper end protruding a certain height into the interior of the collection chamber (110) and having a flow path that communicates vertically so that gas can pass through it; and an inlet guide cap (130) installed above the separation chamber (120), having an upper end spaced apart from the upper opening of the collection chamber (110) and an open lower end so that the upper end of the separation chamber (120) and the interior of the collection chamber (110) are fluidly connected. By installing the solid material collection device in the piping section between a vacuum pump and a gate valve, the present invention effectively collects solid material while allowing gas to pass through smoothly, thereby preventing contamination and damage to the vacuum pump, and has the advantage of enabling easy maintenance and stable operation over a long period.

Description

Technology Field

[0001] The present invention relates to a solid-phase material capture device, and more specifically, to a solid-phase material capture device for preventing process by-products (powder and lump by-products) generated in the piping system of semiconductor manufacturing equipment and foreign substances that may enter during operation from entering a vacuum pump. Background Technology

[0002] In semiconductor manufacturing processes, various process by-products (powder) are generated during the product production process. These by-products frequently form chunks by being deposited on or solidified on the pipe walls as they move through the pipes. These chunky by-products can fall out of the pipes due to causes such as gravity, vibration, and shock. In particular, if they enter the vacuum pump installed at the bottom of the pipe, they become a major obstacle that interferes with the normal operation of the pump.

[0003] Figure 1 is a front view showing the piping section between the vacuum pump and the gate valve in a semiconductor manufacturing process line.

[0004] As shown in FIG. 1, a gate valve (20) is generally installed in the process line, and instantaneous pressure changes and mechanical shocks occur when it is opened or closed. During this process, additional problems may occur where by-products attached to the pipe fall off, which poses a risk of serious equipment failure, such as damage to the impeller of the vacuum pump (10), rotational imbalance, and pump stoppage.

[0005] In addition, there is a possibility that foreign substances, such as hand tools and consumables, may fall into the piping on the gate valve inlet side due to a worker's mistake during work processes such as equipment setup, for-line replacement, and maintenance inspection. If such foreign substances enter the vacuum pump (10), they can directly damage the pump components and cause serious problems such as the shutdown of the entire equipment and production loss. Prior art literature

[0006] Korean Registered Patent No. 1188024 "Powder trap and powder collection device equipped with the same" (Registered September 26, 2012) The problem to be solved

[0007] The technical problem that the present invention aims to solve is to provide a solid material capture device in a pipe to prevent the falling of solid materials occurring within the process pipe in advance, prevent accidents in which foreign substances such as hand tools or consumables enter the pipe due to operator error, and at the same time allow gas to pass normally toward the vacuum pump. means of solving the problem

[0008] To solve the above technical problem, the present invention provides a solid-phase material capture device.

[0009] According to one embodiment, a solid material collection device is installed in a piping section and comprises: a collection chamber formed by fluidly connecting to an upper pipe to form a collection space inside; a separation chamber disposed inside the collection chamber, with its upper end protruding a certain height into the interior of the collection chamber, and formed such that an upper opening and a lower opening communicate with each other to allow gas to move linearly in the axial direction; an inlet guide cap covering the upper end and outer surface of the separation chamber at a certain distance, with its upper end spaced at a certain distance from the upper opening of the collection chamber and its lower opening open to communicate directly fluidically with the upper opening of the separation chamber, and formed to cover the upper end of the separation chamber at a distance to prevent solid material from falling directly into the interior of the separation chamber; and a plurality of support members connecting the inner surface of the inlet guide cap to the outer surface of the separation chamber and ensuring that the inlet guide cap maintains a certain distance from the upper end and outer surface of the separation chamber, wherein gas introduced into the collection chamber through the upper pipe moves downward along the outer surface of the inlet guide cap and then the inlet guide An auxiliary guide part is formed to be formed to be formed so that a solid material flows into the upper opening of the separation chamber through the lower opening of the cap, moves downward along the outer surface of the inflow guide cap, and then falls to the bottom surface of the collection chamber by gravity, and is formed to protrude from the outer circumference of the separation chamber exposed to the interior of the collection chamber, is spaced apart by a predetermined distance from the lower opening of the inflow guide cap, has an inclination corresponding to the inclination of the inflow guide cap, and is formed to be located relatively inward compared to the outer end of the lower opening of the inflow guide cap, thereby assisting the gas moving downward along the outer surface of the inflow guide cap to be guided toward the upper opening of the separation chamber, and simultaneously assisting the solid material to be guided outward along the inclination and fall to the bottom surface of the collection chamber by gravity.It further includes an elastic cushioning material disposed at the bottom of the collection chamber or around the separation chamber to cushion the impact of falling solid material.

[0010] The above separation chamber may be installed to penetrate the lower opening of the above collection chamber.

[0011] The above separation chamber may be installed inside the collection chamber and have a structure in which its lower end is fixed to the bottom surface of the collection chamber.

[0012] The outer surface of the above-mentioned inlet guide cap may be formed in a conical or curved shape.

[0013] The separation chamber is cylindrical in shape with both the upper and lower sides open, and is positioned on the same axis as the central axis of the collection chamber.

[0014] The above separation chamber is a cylindrical shape with both the upper and lower sides open, is positioned on the same axis as the central axis of the upper pipe, and the lower cross-section of the inlet guide cap is relatively larger than the top of the separation chamber so as to cover the top of the separation chamber.

[0015] The inlet guide cap is fixed and supported by a support member that connects and supports the inner surface of the inlet guide cap and the outer surface of the separation chamber, so as to maintain a certain distance from the top and outer surface of the separation chamber.

[0016] The height of the separation chamber exposed to the interior of the collection chamber can be adjusted according to the size of the solid material and the gas flow rate entering the interior of the collection chamber.

[0017] An auxiliary guide portion is formed on the outer surface of the separation chamber exposed to the interior of the collection chamber, spaced apart from the inflow guide cap by a predetermined distance and having the same slope.

[0018] The above-described solid material collection device is installed in the piping section between the vacuum pump and the gate valve, and the gas introduced into the collection chamber through the upper piping moves downward along the outer surface of the inlet guide cap and then flows into the upper opening of the separation chamber through the lower opening of the inlet guide cap, and the solid material introduced into the collection chamber through the upper piping moves downward along the outer surface of the inlet guide cap and is collected on the bottom surface of the collection chamber. Effects of the invention

[0019] The present invention effectively blocks solid material from entering the separation chamber through a structure in which the inlet guide cap and the separation chamber cooperate with each other, and stably guides and collects the solid material to the bottom surface of the collection chamber, thereby preventing contamination and damage to the vacuum pump.

[0020] In addition, since the gas flows downward along the outer surface of the inlet guide cap and naturally enters the separation chamber, the generation of turbulence is suppressed, and a stable high-vacuum flow path required in semiconductor processes is maintained.

[0021] In addition, in the case of the embodiment (100-2) in which the separation chamber is fixed inside the collection chamber, shaking and displacement of the separation chamber are minimized, resulting in high structural stability, and the separation chamber is easy to remove and clean, thereby improving maintenance efficiency and enabling stable operation for a long period.

[0022] In addition, since the structure of the present invention can selectively separate and capture only solid-phase materials even in various mixed gas environments such as inert gases, reaction gases, and byproduct gases, it has the effect of ensuring high applicability and reliability for various semiconductor and vacuum process conditions.

[0023] In addition, the solid phase material capture device can be installed at various locations within the piping section (S), and configuration changes such as installing one or two units are also easy, allowing for a high degree of freedom in system design. This can buffer the problem of solid phase material escape caused by high-speed gas flow and pressure fluctuations within the piping and improve the reliability of the entire vacuum piping system.

[0024] In addition, various auxiliary components such as auxiliary guides, sensors, buffers, and multi-stage separation structures can be selectively added, enabling performance expansion and advancement, including improved solid material capture efficiency, process status monitoring, and shock mitigation. Brief explanation of the drawing

[0025] FIG. 1 is a front view showing a piping section between a vacuum pump and a gate valve in a semiconductor manufacturing process line. FIG. 2 is a front view showing a state in which a solid-phase material collection device according to an embodiment of the present invention is installed in the piping section. FIG. 3 is a cross-sectional view for explaining a solid-phase material collection device according to an embodiment of the present invention. FIG. 4 is a cross-sectional view for explaining the gas movement path and byproduct collection path when applying a solid-phase material collection device according to an embodiment of the present invention. FIG. 5 is a perspective view showing the shape of the separation chamber and inlet guide cap of a solid-phase material collection device according to an embodiment of the present invention. FIG. 6 is a cross-sectional view for explaining a solid-phase material collection device according to another embodiment of the present invention. FIG. 7 is a perspective view showing the shape of the separation chamber and inlet guide cap of a solid-phase material collection device according to another embodiment of the present invention. FIG. 8 is a cross-sectional view for explaining a solid-phase material collection device according to yet another embodiment of the present invention. FIG. 9 is a perspective view showing the shape of the separation chamber and inlet guide cap of a solid-phase material collection device according to yet another embodiment of the present invention. Specific details for implementing the invention

[0026] Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the attached drawings. However, the technical concept of the present invention is not limited to the embodiments described herein and may be embodied in other forms. Rather, the embodiments introduced herein are provided to ensure that the disclosed content is thorough and complete and to sufficiently convey the concept of the present invention to those skilled in the art.

[0027] FIG. 2 is a front view showing a solid material collection device according to an embodiment of the present invention installed in a piping section, FIG. 3 is a cross-sectional view for explaining a solid material collection device according to an embodiment of the present invention, FIG. 4 is a cross-sectional view for explaining a gas movement path and a byproduct collection path when applying a solid material collection device according to an embodiment of the present invention, and FIG. 5 is a perspective view showing the shape of a separation chamber and an inlet guide cap of a solid material collection device according to an embodiment of the present invention.

[0028] As illustrated in FIG. 2, a solid material collection device (100) is installed in a piping section (S) between a vacuum pump (10) and a gate valve (50). Here, the piping section (S) refers to an area including an adapter (20), a bellows (30), and a straight pipe section (40) that connects the vacuum pump (10) and the gate valve (50) and constitutes a path through which fluid is transported.

[0029] A solid material collection device (100) can be installed at any location within these piping sections (S) and is configured to collect solid materials while allowing gas to pass through. That is, the solid material collection device (100) collects solid materials, such as powder, lump by-products, and various foreign substances generated during the process, at selected points along the piping path leading from the gate valve (50) to the vacuum pump (10), thereby preventing them from entering the interior of the vacuum pump (10). Since solid materials refer to by-products generated during the semiconductor process, the terms 'solid material' and 'by-product' may be used interchangeably as needed.

[0030] In the embodiment, the solid material collection device (100) is shown as being installed between the straight pipe section (40) and the bellows (30). However, the solid material collection device (100) may also be installed between the bellows (30) and the adapter (20).

[0031] For convenience of explanation, in this specification, the pipe connected to the upper side of the solid material collection device (100) is referred to as the upper pipe (101), and the pipe connected to the lower side is referred to as the lower pipe (103). The upper pipe (101) and the lower pipe (103) may be any one of a straight pipe section (40), a bellows (30), or an adapter (20). Additionally, the straight pipe section (40) may be configured by connecting one or more straight pipes.

[0032] The piping section (S) between the vacuum pump (10) and the gate valve (50) is the final path immediately before the fluid flows into the vacuum pump (10), and is the section where the fluid velocity is maintained at the highest level. Additionally, when the gate valve (50) is opened or closed, instantaneous pressure changes and mechanical shocks occur, which easily cause by-products attached to the piping to detach and fall. Accordingly, a solid material collection device (100) is installed in this section to allow the gas to pass through as is, and to effectively collect only solid materials such as powder and by-products, thereby preventing contamination and damage to the vacuum pump (10). Meanwhile, the fluid flowing into the vacuum pump (10) is a gas, and may be a various mixed gas including inert gas and process reaction gas.

[0033] As illustrated in FIGS. 3 to 5, the solid material capture device (100) includes a capture chamber (110), a separation chamber (120), and an inflow guide cap (130).

[0034] The collection chamber (110) is a space that receives fluid and solid material flowing in through the upper pipe (101), with an upper opening connected to the upper pipe (101). The collection chamber (110) forms the entire exterior of the solid material collection device (100) and provides sufficient volume and support structure so that the separation chamber (120) can be stably installed inside. The collection chamber (110) is formed in a cylindrical shape, with an upper opening (111) formed at the top and a lower opening (113) formed at the bottom.

[0035] An upper pipe (101) is connected to cover the upper opening (111) of the collection chamber (110). An O-ring is placed at the connection point between the collection chamber (110) and the upper pipe (101) to ensure airtightness, and the connection is firmly maintained by fastening with a bolt and nut.

[0036] The collection chamber (110) provides an internal space in which solid material can fall by gravity and be collected. A separation chamber (120) is installed inside the collection chamber (110) to form a flow path through which the incoming gas can pass through the internal space and flow continuously toward the vacuum pump (10).

[0037] The separation chamber (120) is installed to penetrate the lower opening (113) of the collection chamber (110). The upper end of the separation chamber (120) is positioned to protrude a certain height into the collection space inside the collection chamber (110), and the lower end extends downward past the lower opening (113) and is fluidly connected to the lower pipe (103). In FIG. 2, the lower pipe (103) connected to the separation chamber (120) becomes a bellows (30). An O-ring is placed at the connection point between the separation chamber (120) and the lower pipe (103) to ensure airtightness, and the connection is maintained firmly by fastening with a bolt and nut.

[0038] With this configuration, a continuous flow path is formed leading to the upper pipe (101), the collection chamber (110), the separation chamber (120), and the lower pipe (103). The separation chamber (120) serves as a straight flow passage to allow the gas to move smoothly to the lower pipe (103).

[0039] The separation chamber (120) is formed with a flow path that is connected from top to bottom so that gas can pass through the interior. Specifically, the separation chamber (120) is formed in a cylindrical shape with both the upper and lower sides open, and is positioned to be aligned with the central axis of the collection chamber (110) and the upper pipe (101). This coaxial structure increases the straightness of the fluid flow, allowing the gas to flow normally into the vacuum pump through the interior of the separation chamber (120).

[0040] An inlet guide cap (130) is installed on the upper part of the separation chamber (120). The inlet guide cap (130) is installed in a shape that covers the top of the separation chamber (120) with a gap.

[0041] Specifically, the inlet guide cap (130) is formed such that its upper side is spaced apart from the upper opening (111) of the collection chamber (110) and its lower side is open, so that the upper side of the separation chamber and the interior of the collection chamber (110) are fluidly connected. Here, being formed to be fluidly connected means that gas can pass through.

[0042] The outer surface of the inlet guide cap (130) is formed in a conical or curved shape. The lower cross-section of the inlet guide cap (130) is formed to be relatively larger than the upper cross-section of the separation chamber (120) so as to sufficiently cover the upper cross-section of the separation chamber (120) to allow for maximum separation of the gaseous and solid phases.

[0043] As illustrated in FIG. 5, the inlet guide cap (130) is fixed and supported by a support member (140) connecting the inner surface of the inlet guide cap (130) and the outer surface of the separation chamber (120) so as to maintain a constant distance from the top and outer surface of the separation chamber (120). This spacing structure maintains a constant gas flow while effectively preventing solid material from entering the interior of the separation chamber (120). A plurality of support members (140) are provided to connect the inner surface of the inlet guide cap (130) and the outer surface of the separation chamber (120), and are arranged at a constant distance from each other.

[0044] Additionally, although not illustrated, the height of the separation chamber (120) protruding into the collection chamber (110) can be adjusted according to the size of the solid material and the gas flow rate flowing into the collection chamber (110). By adjusting the protruding height of the separation chamber (120), optimal separation conditions can be set in accordance with the incoming gas velocity and changes in the process environment. In the embodiment, the top of the separation chamber (120) is positioned to protrude a certain height into the collection chamber (110), thereby effectively preventing solid material from flowing into the separation chamber (120).

[0045] As illustrated in FIG. 4, the structure of the above-described solid material collection device (100) is such that gas introduced into the collection chamber (110) through the upper pipe (101) moves downward along the outer surface of the inflow guide cap (130) and then enters the upper opening (121) of the separation chamber (120) through the lower opening (131) of the inflow guide cap (130). Then, the solid material introduced into the collection chamber (110) through the upper pipe (101) moves downward along the outer surface of the inflow guide cap (130) in the same way as the gas, but falls due to gravity and is collected on the bottom surface of the collection chamber (110).

[0046] As described above, the solid material collection device (100) is arranged such that the inlet guide cap (130) covers the top of the separation chamber (120), thereby effectively blocking solid material flowing in through the upper pipe (101) from directly entering the separation chamber (120). This fundamentally prevents solid material, such as powder, pipe debris, and lump by-products, from flowing into the vacuum pump (10).

[0047] In addition, in the solid material collection device (100), gas flows along the outer surface of the inlet guide cap (130) inside the collection chamber (110) and enters the separation chamber (120) through the lower opening (131), while solid material falls in the direction of gravity and collects on the bottom surface of the collection chamber (110). Therefore, natural separation of gas and solid material is achieved without a separate filter or mesh, allowing for long-term operation without pipe clogging or pump failure.

[0048] In addition, the solid material collection device (100) prevents the phenomenon in which the solid material flows downward in an agitated state because the instantaneous pressure change or turbulence that occurs when the gate valve (50) is opened or closed is buffered in the collection chamber (110).

[0049] In addition, the solid material collection device (100) ensures airtightness and prevents vacuum leakage by applying an O-ring and bolt fastening structure to the connection portion between the upper pipe (101) and the collection chamber (110) and the connection portion between the separation chamber (120) and the lower pipe (103). This contributes to stably maintaining the high vacuum state required in semiconductor processes.

[0050] In addition, the solid material capture device (100) can operate stably under various process conditions because, even if the incoming gas is a mixture of inert gas (N2, Ar), reaction gas (SiH4, CF4, etc.), byproduct gas, etc., the gas passes normally through the separation chamber and only the solid material is captured.

[0051] Thus, the above-described solid material collection device (100) can efficiently separate solid material and gas through a unique structure in which the collection chamber (110), separation chamber (120), and inflow guide cap (130) are interconnected, thereby preventing contamination and damage to the vacuum pump (10) and significantly improving the reliability of the vacuum piping system.

[0052] Meanwhile, in one embodiment, the separation chamber (120), the inflow guide cap (130), and the support member (140) are formed integrally.

[0054] FIG. 6 is a cross-sectional view illustrating a solid-phase material collection device according to another embodiment of the present invention, and FIG. 7 is a perspective view showing the shape of the separation chamber and the inlet guide cap of a solid-phase material collection device according to another embodiment of the present invention.

[0055] The solid-phase material collection device (100-1) of another embodiment illustrated in FIGS. 6 and 7 includes a collection chamber (110), a separation chamber (120), an inlet guide cap (130), and an auxiliary guide part (150). The solid-phase material collection device (100) is identical to the previously described embodiment, but differs in that an auxiliary guide part (150) is additionally formed on the outer surface of the separation chamber (120).

[0056] The auxiliary guide section (150) is formed along the outer surface of the separation chamber (120) protruding into the interior of the collection chamber (110), and is designed to be spaced apart from the inflow guide cap (130) by a predetermined distance and have the same slope. The auxiliary guide section (150) guides the direction of the inflow gas to stably enter the separation chamber (120), reduces the generation of turbulence, and maintains a uniform fluid flow. In addition, it enables effective separation of gas and solid material, thereby preventing contamination of the vacuum pump (10) and increasing the collection efficiency of solid material, enabling stable operation for a long period.

[0057] The auxiliary guide section (150) can be applied in various ways depending on the design purpose. For example, if it protrudes as a conical structure that gradually narrows from the outer surface of the separation chamber (120), it can guide the gas flow to the center and increase the efficiency of solid material falling due to gravity. In addition, it can be formed as a curved shape to smoothly guide the falling path of the solid material, or if it is designed as a stepped structure protruding in multiple stages along the outer surface, the solid material can fall at each stage and be effectively guided to the collection chamber (110).

[0058] As illustrated in FIG. 7, in the structure of the solid material collection device (100-1), gas introduced into the collection chamber (110) through the upper pipe (101) moves downward along the auxiliary guide section (150) formed on the outer surface of the inlet guide cap (130) and the outer circumference of the separation chamber (120), and then enters the upper opening (121) of the separation chamber (120) through the lower opening (131) of the inlet guide cap (130). Meanwhile, solid material introduced into the collection chamber (110) through the upper pipe (101) moves downward along the outer surface of the inlet guide cap (130) and the auxiliary guide section (150) in the same way as gas, but falls due to gravity and is collected on the bottom surface of the collection chamber (110) along the path guided by the structure of the auxiliary guide section (150).

[0059] Meanwhile, in another embodiment, the separation chamber (120), the inflow guide cap (130), the support member (140), and the auxiliary guide part (150) are formed integrally.

[0061] FIG. 8 is a cross-sectional view illustrating a solid-phase material collection device according to another embodiment of the present invention, and FIG. 9 is a perspective view showing the shape of the separation chamber and the inlet guide cap of a solid-phase material collection device according to another embodiment of the present invention.

[0062] A solid-phase material collection device (100-2) of another embodiment illustrated in FIGS. 8 and 9 includes a collection chamber (110), a separation chamber (120a), and an inlet guide cap (130). The solid-phase material collection device (100-2) is identical to the previously described embodiment, but differs in the structure in which the separation chamber (120) is fixed to the collection chamber (110).

[0063] In one embodiment, the separation chamber (120) is installed to penetrate the lower opening of the collection chamber (110), whereas in another embodiment, the separation chamber (120a) is installed inside the collection chamber (110), and the structure is formed such that the lower end of the separation chamber (120) is fixed to the bottom surface of the collection chamber (110). Additionally, a lower pipe (103) is connected to the lower opening (113) of the collection chamber (110), and the flow path of this lower pipe (103) communicates with the flow path of the separation chamber (120).

[0064] An O-ring is placed at the connection point between the collection chamber (110) and the lower pipe (103) to ensure airtightness, and the connection point is securely maintained by fastening it using a bolt and nut.

[0065] In another embodiment, the separation chamber (120a) is fixed inside the collection chamber (110) and its bottom is directly connected to the bottom surface, thereby minimizing the possibility of the separation chamber (120a) shaking or moving. Additionally, the internal fixing structure of the separation chamber (120a) allows for more freedom in connecting the lower pipe (103) and designing the flow path, making it easy to apply to various pipe configurations. Furthermore, since the separation chamber (120a) is fixed inside the collection chamber (110), it is easy to remove and clean the separation chamber (120a), and the simple structure has the advantage of reducing maintenance time.

[0066] A fixing rib (125) is formed on the lower edge of the separation chamber (120a), and a through hole (126) is formed in the fixing rib (125). When the lower end of the separation chamber (120a) is placed on the bottom surface of the collection chamber (110), the fixing rib (125) is in close contact with the bottom surface, and by fastening a fixing bolt (127) through the through hole (126), the separation chamber (120a) can be stably fixed inside the collection chamber (110).

[0067] In the structure of the solid phase material collection device (100-2) of another embodiment, the gas introduced into the collection chamber (110) through the upper pipe (101) moves downward along the outer surface of the inflow guide cap (130) and then enters the upper opening (121a) of the separation chamber (120a) through the lower opening (131) of the inflow guide cap (130).

[0068] In addition, since the lower end of the separation chamber (120a) is fixed to the bottom surface of the collection chamber (110), the lower opening (131) of the inflow guide cap (130) and the upper opening (121a) of the separation chamber (120a) maintain a constant distance and form a stable flow path. Accordingly, gas flows into the separation chamber (120a) without generating turbulence and moves smoothly toward the lower pipe (103).

[0069] Meanwhile, the solid material introduced into the collection chamber (110) through the upper pipe (101) moves downward along the outer surface of the inflow guide cap (130) just like gas, but it cannot enter the interior of the separation chamber (120a) because the upper part of the separation chamber (120a) protrudes into the interior of the collection chamber (110) and the upper part is covered by the inflow guide cap (130). The solid material falls by gravity, passes through the outer periphery of the separation chamber (120a), and naturally falls to the bottom surface of the collection chamber (110), where it is stably collected.

[0070] This structure has the advantage that the separation chamber (120a) is fixed inside the collection chamber and thus does not shake, thereby maintaining a more stable path for the incoming gas and solid material, and improving the separation and collection efficiency of the solid material.

[0071] Meanwhile, in another embodiment, the separation chamber (120a), the inflow guide cap (130), and the support member (140) are formed integrally.

[0073] The above-described solid material collection device (100) is installed in the piping section (S) between the vacuum pump (10) and the gate valve (50), and it is important that it be installed as close as possible to the vacuum pump (10) to protect the vacuum pump (10). In the embodiment, the solid material collection device (100) is shown as being installed between the straight piping section (40) and the bellows (30), but it may be more effective to install it between the bellows (30) and the adapter (20) to protect the vacuum pump (10).

[0074] Additionally, the solid material collection device (100) was described as an example where only one is installed in the piping section (S), but more than one may be installed as needed. However, since installing two or more may affect the fluid flow rate, it is generally preferable to install one or two.

[0075] Meanwhile, the above-described solid material capture device (100) may additionally include the following components to improve performance and ease of maintenance.

[0076] An elastic buffer can be placed at the bottom of the collection chamber or around the separation chamber. This allows the vacuum pump to be effectively protected by buffering the fall of solid material caused by the instantaneous impact that occurs when the gate valve is opened or closed.

[0077] In addition, pressure, flow rate, and solid material loading sensors are installed inside the collection chamber to monitor in real time, thereby providing automatic alarm functions or enabling the prediction of maintenance timing.

[0078] In addition, by configuring the separation chamber into two or more stages, solid-phase materials can be captured in multiple stages according to particle size. This allows for maximizing the efficiency of solid-phase material separation and improving process stability.

[0080] Although the present invention has been described in detail using preferred embodiments, the scope of the invention is not limited to specific embodiments and should be interpreted by the appended claims. Furthermore, those skilled in the art will understand that many modifications and variations are possible without departing from the scope of the invention. Explanation of the symbols

[0081] 10: Vacuum pump 20: Adapter 30: Bellows 40: Straight piping section 50: Gate valve 100,100-1,100-2: Solid phase material capture device 101: Upper piping 103: Lower piping 110: Collection chamber 111: Upper opening 113: Lower opening 120, 120a: Separation chamber 125: Fixed rib 126: Penetrating hole 127: Fixing bolt 130: Inflow guide cap 140: Support member 150: Auxiliary guide part

Claims

Claim 1 A solid material collection device installed in a piping section comprises: a collection chamber fluidically connected to an upper pipe to form a collection space inside; a separation chamber disposed inside the collection chamber, with its upper end protruding a certain height into the interior of the collection chamber, and formed such that an upper opening and a lower opening are in communication with each other to allow gas to move linearly in the axial direction; an inlet guide cap covering the upper end and outer surface of the separation chamber at a certain distance, wherein the upper end is spaced at a certain distance from the upper opening of the collection chamber and the lower opening is open to be in direct fluidic communication with the upper opening of the separation chamber, and is formed in a shape that covers the upper end of the separation chamber at a distance to prevent solid material from falling directly into the interior of the separation chamber; and a plurality of support members connecting the inner surface of the inlet guide cap to the outer surface of the separation chamber and ensuring that the inlet guide cap maintains a certain distance from the upper end and outer surface of the separation chamber.Including, the gas introduced into the collection chamber through the upper piping moves downward along the outer surface of the inlet guide cap and then enters the upper opening of the separation chamber through the lower opening of the inlet guide cap, and the solid material moves downward along the outer surface of the inlet guide cap and is formed to fall to the bottom surface of the collection chamber by gravity; an auxiliary guide part is formed to protrude from the outer circumference of the separation chamber exposed to the interior of the collection chamber, is spaced apart by a predetermined distance from the lower opening of the inlet guide cap, has an inclination corresponding to the inclination of the inlet guide cap, and is formed to be located relatively inward compared to the outer end of the lower opening of the inlet guide cap, thereby assisting the gas moving downward along the outer surface of the inlet guide cap to be guided toward the upper opening of the separation chamber while simultaneously guiding the solid material outward along the inclination to fall to the bottom surface of the collection chamber by gravity; and an elastic element is disposed at the bottom of the collection chamber or around the separation chamber to cushion the impact of the solid material falling. A solid-phase material capture device further comprising a buffer material.; Claim 2 In claim 1, the separation chamber is a solid material collection device installed to penetrate the lower opening of the collection chamber. Claim 3 A solid material collection device according to claim 1, wherein the separation chamber is installed inside the collection chamber and has a structure in which the lower end is fixed to the bottom surface of the collection chamber. Claim 4 A solid material capture device according to claim 1, wherein the outer surface of the inlet guide cap is formed in a conical or curved shape. Claim 5 A solid material collection device according to claim 1, wherein the separation chamber is a cylindrical shape with both the upper and lower sides open, and is positioned on the same axis as the central axis of the collection chamber. Claim 6 A solid material collection device according to claim 1, wherein the separation chamber is a cylindrical shape with both the upper and lower sides open, is positioned on the same axis as the central axis of the upper pipe, and the lower cross-section of the inlet guide cap is relatively larger than the upper end of the separation chamber and is formed to cover the upper end of the separation chamber. Claim 7 delete Claim 8 A solid material capture device according to claim 1, wherein the height of the separation chamber exposed to the interior of the capture chamber can be adjusted according to the size of the solid material and the gas flow rate introduced into the interior of the capture chamber. Claim 9 delete Claim 10 In claim 1, the solid phase material capture device is a solid phase material capture device installed in the piping section between the vacuum pump and the gate valve.

Images