Magnet plate for RGB pixel deposition with circular pattern

Abstract

The present invention relates to a magnet plate for depositing RGB pixels having a circular pattern. Accordingly, the technical gist is that when manufacturing a high-resolution display (OLEDOS screen, with a size of less than 1 inch and a HUD of 3000 PPI or higher) for XR (eXtended Reality) devices, which collectively refers to VR (Virtual Reality), AR (Augmented Reality), and MR (Mixed Reality), a circular patterned magnet plate (arranged with multi-ring shaped magnet sticks like a target structure) is used during RGB pixel deposition (depositing high-resolution RGB organic material onto a substrate wafer through the pattern cells of a mask: the process of applying pixels to a silicon substrate). This allows for maintaining high adhesion and smoothness between the mask and the substrate wafer while significantly preventing shadow defects caused by organic material deposition (ensuring the organic material deposition process is performed under a state of high horizontality), and in particular, compared to the conventional straight magnet stick pattern structure (typically, in a tambour board-type corrugated pattern structure, the gap between polarities is inevitably (Gap is created where magnetic force does not reach) This ensures uniform adhesion without loss of magnetic field lines and magnetic attraction (pulling force), which is characterized by enabling an organic material deposition process for high-quality, high-resolution specifications.

Description

Technology Field

[0001] The present invention relates to a magnet plate for RGB pixel deposition having a circular pattern, characterized by using a circular pattern magnet plate (in which magnet sticks arranged in a multi-ring shape like a target structure) during RGB pixel deposition (depositing high-resolution RGB organic material on a substrate wafer through pattern cells of a mask: a process of applying pixels to a silicon substrate) when manufacturing a high-resolution display (eXtended Reality) device, collectively referred to as VR (Virtual Reality), AR (Augmented Reality), MR (Mixed Reality), etc., which has a size of less than 1 inch and a HUD (Head-Up Display) of 3000 PPI or more. This allows for maintaining high adhesion flatness between the mask and the substrate wafer while significantly preventing shadow defects caused by organic material deposition (allowing the organic material deposition process to be performed in a state of high horizontality).

[0002] The present invention is characterized by ensuring uniform adhesion without loss of magnetic field lines and magnetic field attraction (pulling force), thereby enabling an organic material deposition process for high-quality, high-resolution specifications. Background Technology

[0003] OLEDoS (OLED on Silicon) is a display created by performing a semiconductor process to generate pixels and drivers on a silicon wafer substrate, and then applying an OLED, which serves as the light-emitting part, on top of it.

[0004] Unlike OLED, OLEDoS uses a semiconductor substrate instead of a glass substrate, enabling ultra-precision driving and allowing for extremely dense pixel control.

[0005] OLEDoS made with this semiconductor process technology is thinner than conventional glass substrates and can accommodate more pixels.

[0006] For reference, while conventional panels have pixel sizes of hundreds of ppi (Pixels Per Inch), OLEDoS can have pixel sizes of thousands of ppi, enabling the realization of ultra-high resolution in the same area.

[0007] And the fields where OLEDoS can be applied are high-resolution displays for XR (eXtended Reality) devices, which collectively refer to VR (Virtual Reality), AR (Augmented Reality), and MR (Mixed Reality) (OLEDoS screens, with a size of less than 1 inch and a HUD of 3000 PPI or more).

[0008] Meanwhile, in order to have high-resolution pixels when depositing the RGB light-emitting layer, the OLEDoS uses a magnet plate. This is to ensure horizontality or flatness between the pattern mask (Invar metal material) and the substrate wafer (silicon substrate), and is formed to prevent shadow defects (improved deposition efficiency) during organic material deposition by strengthening the adhesion due to magnetic force and magnetic field.

[0009] In other words, in the process of forming an organic layer on a substrate, the step of depositing the organic material in the desired area is a very important matter depending on the close relationship between the mask and the substrate.

[0010] However, in conventional magnet plates, the arrangement of magnet sticks is formed in a straight pattern (typically, in a corrugated pattern structure of a tambour board, gaps between polarities inevitably occur, creating gaps where magnetic force does not reach), and if there is a void (air gap) that does not directly correspond to the mask pattern cell, a loss of attractive force occurs, which ultimately leads to reduced adhesion and causes a problem of shadow defects. Prior art literature

[0011] 1. Korean Patent Publication No. 10-2023-0146225 (Published Oct. 19, 2023) The problem to be solved

[0012] The present invention aims to solve the aforementioned problems, and the technical gist of the present invention is that, in manufacturing a high-resolution display for an XR device, a circular pattern magnet plate is used during RGB pixel deposition, and the purpose of the present invention is to provide a method that significantly prevents shadow defects caused by organic material deposition while maintaining high adhesion smoothness between the mask and the substrate wafer.

[0013] In other words, the purpose of the present invention is to provide a method for enabling an organic material deposition process for high-quality, high-resolution specifications by ensuring uniform adhesion without loss of magnetic field lines and magnetic attraction compared to conventional straight magnet stick pattern structures. means of solving the problem

[0014] To achieve this purpose, the present invention is configured such that magnet sticks (100) of N-pole and S-pole arranged with respect to a central origin form a target configuration by forming a plurality of layers of circular or ring-shaped patterns, and the magnet sticks (100) combined with N-pole rings and S-pole rings are formed such that when progressively expanded from the central origin, the circumferential surfaces between the large-diameter side and the adjacent small-diameter side are closely connected without any gap between them.

[0015] Accordingly, the magnet sticks (100: a combination of a North pole ring and a South pole ring) are formed such that, as an example, when arranging polarities, the opposite polarities (ring-shaped magnet sticks with polarities different from the reference polarity) alternate in sequence with respect to the small-diameter side reference polarity (a ring-shaped structure of either the North pole or the South pole) that is first adjacent to the central origin.

[0016] In addition, as another example, magnet sticks (100: combination of N-pole ring and S-pole ring) can be set up so that N-pole and S-pole magnet sticks (100) are divided and connected at equal intervals along the circumferential direction in a multi-ring form of a target configuration, with a certain section for each ring, and alternately (zigzag) with each other (in the combination of the reference polarity ring on the small diameter side and the other polarity ring on the large diameter side, the alternation of polarity must be simultaneously carried out according to the diffusion direction in the section divided at a certain angle relative to the center origin so that alternation between different polarities is possible). Effects of the invention

[0017] In this way, the present invention enables the use of a circular patterned magnet plate (in which magnet sticks arranged in a multi-ring shape like a target structure) during RGB pixel deposition (depositing high-resolution RGB organic material on a substrate wafer through pattern cells of a mask: a process of applying pixels to a silicon substrate) while maintaining high adhesion flatness between the mask and the substrate wafer, thereby significantly preventing shadow defects caused by organic material deposition (allowing the organic material deposition process to be carried out in a state of high horizontality).

[0018] Compared to the conventional straight magnet stick pattern structure (typically, in a temba board-type corrugated pattern structure, gaps between polarities inevitably occur, creating gaps where magnetic force does not reach), this invention ensures uniform adhesion without loss of magnetic field lines and magnetic attraction (pulling force), thereby enabling an organic material deposition process for high-quality, high-resolution specifications.

[0019] In addition, the present invention is formed so that it can be manufactured in a circular shape identical to the shape of a substrate wafer, so that the magnetic force and magnetic field correspond directly, and the arrangement of magnet sticks is easy (including N / S arrangement and division into N equal numbers), and the pitch between circular magnet sticks can be adjusted, thereby having the effect of enabling Gaussian adjustment.

[0020] In other words, it is possible to form a magnetic field without loss to the circular substrate wafer, and it has the effect of ensuring uniform adhesion. Brief explanation of the drawing

[0021] FIG. 1 is an exemplary diagram of a magnet plate for depositing RGB pixels having a circular pattern according to the present invention. FIG. 2 is another example of a magnet plate for RGB pixel deposition having a circular pattern according to the present invention. Figure 3 is an example diagram showing the application of a magnet plate in a typical deposition chamber. FIGS. 4 to 6 are exemplary diagrams showing a combination of a conventional magnet plate (straight magnet stick array structure), a mask, and a substrate wafer. Figures 7 and 8 are example diagrams showing a magnetic field gap area (simulation of reduced adhesion) caused by the spacing (gap) between magnet sticks when a conventional magnet plate is applied. Specific details for implementing the invention

[0022] The present invention will be described in more detail below with reference to the attached drawings.

[0023] First, as illustrated in FIGS. 1 and 2, the present invention is formed such that magnet sticks (100) of N and S poles arranged with respect to a central origin form a target configuration by forming a plurality of layers of circular or ring-shaped patterns.

[0024] And, the magnet sticks (100) combined with the N-pole ring (100-1) and the S-pole ring (100-2) are formed so that when gradually expanded from the central origin, the circumferential surface between the large-diameter side and the adjacent small-diameter side is closely connected without any gap between them.

[0025] For reference, the magnet sticks (100) of the present invention are placed on the bottom surface of a magnet plate (20) provided in a deposition chamber (10), and a mask (30: including a pattern cell) and a substrate wafer (40) are placed in sequence on the lower side of the magnet plate (20).

[0026] At this time, the mask (30) is formed with pattern cells (high resolution specification of less than 1 inch) that are compatible with the XR device, and is formed such that the pattern cells, which are typically rectangular in shape, are aligned in parallel in the up, down, left, and right directions.

[0027] Accordingly, the organic material source is deposited on the bottom surface of the substrate wafer (40) (where the RGB organic material source is placed on the bottom surface of the deposition chamber and transferred upward) according to the pattern cell of the mask.

[0028] At this time, the mask and the substrate wafer must maintain mutual adhesion and horizontality (smoothness) with considerable precision.

[0029] Accordingly, the circular pattern type magnet plate of the present invention is formed to solve existing problems by arranging the pattern of magnet sticks in a circular manner.

[0030] In other words, the existing straight magnet sticks had a problem where the gap between the pattern cells of the mask was created due to the spacing between them when placed (the reason a gap inevitably occurs is that if the parts connected in a straight line are attached in a straight line parallel to each other, they stick together due to the magnetic force between them or fall over toward the other side), which resulted in reduced adhesion.

[0031] To solve this, the present invention is formed such that, as an example of the polarity arrangement of magnet sticks (100: a combination of a N-pole ring and a S-pole ring), the opposite polarities (ring-shaped magnet sticks with polarities different from the reference polarity) are alternately set in a zigzag pattern based on the reference polarity on the small-diameter side (a ring-shaped structure of either the N-pole or the S-pole) that is first adjacent to the central origin.

[0032] In other words, the polarities are arranged in a circular structure without any gaps between magnets of different polarities, so that when they correspond to the pattern cells of a mask, there are almost no empty spaces, thereby improving the degree of adhesion and horizontality during the generation of magnetic field lines and magnetic attraction.

[0033] In addition, as another example, the magnet sticks (100: combination of N-pole ring and S-pole ring) are formed such that the N-pole and S-pole magnet sticks (100) are set up alternately (zigzag) by dividing and connecting them at equal intervals along the circumferential direction in a multi-ring form of a target configuration, with a fixed section for each ring.

[0034] That is, the first embodiment is formed in the form of a band with one polarity in a single ring, whereas the second embodiment is formed by dividing and assembling magnet sticks that alternate at equal intervals in each ring in a multi-ring form so that the magnetic force and magnetic field adhesion are further strengthened.

[0035] Furthermore, in the combination of a reference polarity ring on the small diameter side and another polarity ring on the large diameter side of the magnet sticks of the present invention, alternation between different polarities is possible only if alternation of polarities occurs simultaneously in parallel according to the diffusion direction in sections partitioned at a certain angle with respect to the central origin.

[0036] This is ultimately intended to prevent the occurrence of gaps (separated gaps) with the mask pattern cells (holes).

[0037] The present invention is not limited to the specific preferred embodiments described above, and anyone with ordinary knowledge in the art to which the invention pertains can make various modifications without departing from the essence of the invention as claimed in the claims, and such modifications will be within the scope of the claims. Explanation of the symbols

[0038] 100 ... Magnet stick 100-1 ... N-pole ring 100-2 ... S-pole ring 10 ... deposition chamber 20 ... magnet plate 30 ... mask 40 ... substrate wafer

Claims

Claim 1 Magnet sticks (100) of N and S poles arranged based on a central origin are arranged to form a target configuration by forming a multi-layered circular or ring-shaped pattern, and the magnet sticks (100) combined with N pole rings (100-1) and S pole rings (100-2) are arranged so that when gradually expanded from the central origin, the circumferential surfaces between the large diameter side and the adjacent small diameter side are closely connected without any gaps or distances between them, and the magnet sticks (100) are arranged in a zigzag pattern such that, when polarity arrangement, the opposite polarity is alternately set in sequence based on the reference polarity of the small diameter side first adjacent to the central origin, and the magnet sticks (100) are arranged so that the N and S pole magnet sticks (100) are set alternately by dividing and connecting at equal intervals along the circumferential direction in the rotational direction by defining a certain section for each ring in the multi-ring form of the target configuration, and the magnet sticks are the reference polarity ring of the small diameter side and A magnet plate for RGB pixel deposition having a circular pattern, characterized in that, in a combination of different polarity rings on the large-diameter side, polarity alternation occurs simultaneously in parallel according to the diffusion direction in sections partitioned at a certain angle with respect to the central origin. Claim 2 delete Claim 3 delete

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