Semiconductor chip, semiconductor package comprising the same and method of fabricating the same
KR103003176B1Active Publication Date: 2026-08-11SAMSUNG ELECTRONICS CO LTD
Patent Information
- Application Number
- KR1020220107917
- Authority / Receiving Office
- KR · KR
- Patent Type
- Patents
- Current Assignee / Owner
- Filing Date
- 2022-08-26
- Publication Date
- 2026-08-11
- Estimated Expiration
- 2042-08-26
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Figure R1020220107917_ABST
Abstract
A semiconductor chip, a semiconductor package including the same, and a method for manufacturing the same are provided. The semiconductor chip comprises: a semiconductor substrate having a first surface and a second surface opposite to each other; transistors disposed on the first surface; a first interlayer insulating film covering the transistors; a second interlayer insulating film covering the first interlayer insulating film; wiring disposed within the second interlayer insulating film; a first conductive pad disposed on the second interlayer insulating film; a first passivation film covering the second interlayer insulating film and the first conductive pad; a second conductive pad disposed within the first passivation film and connected to the first conductive pad; a through-via connecting to the wirings by penetrating the semiconductor substrate and the first interlayer insulating film; and a second passivation film covering the second surface. and includes a third conductive pad disposed within the second passivation film and connected to the through via, wherein the first passivation film has a first thickness, and the first thickness is 0.4 to 0.6 times the second thickness from the upper surface of the second passivation film to the first surface.
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Citation Information
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