Dry-type cleaning apparatus

Abstract

The present invention provides a dry cleaning device. The present invention includes a dry cleaning device comprising: a housing having an air flow space inside and having one side open; a spray unit disposed inside the housing and spraying compressed air; a main frame on which the spray unit is mounted; and a guide plate unit connected to the main frame and covering a portion of the open side of the housing.

Description

Technology Field

[0001] The present invention relates to a dry cleaning device. Background Technology

[0002] Displays manufactured through microfabrication processes are susceptible to critical defects, such as pattern defects and insulation film failures, if fine dust or chemical residues generated during the manufacturing process remain on the surface. Consequently, a cleaning process to remove foreign substances is essential in the display manufacturing process.

[0003] Cleaning processes are utilized across all industrial sectors, including the display and semiconductor industries, and are primarily applied to intermediate and final products during the manufacturing process. Cleaning plays a role in improving product quality and yield by removing contaminants, such as particles floating around the product or particles adhering to it. Cleaning processes can be broadly classified into wet cleaning and dry cleaning. Wet cleaning utilizes liquids, such as chemical solutions, and offers the advantages of low cost and a relatively simple process. However, wet cleaning presents numerous drawbacks, including back-contamination caused by impurities in chemicals, increased chemical costs, and waste disposal issues; consequently, there has been a rapidly increasing demand for dry cleaning in recent years.

[0004] Dry cleaning is a method that uses a medium other than a solution, and compared to wet cleaning, it has lower process costs and is easy to maintain. A dry cleaning device that uses gas injection pressure can remove contaminants adhered to an object by controlling the gas flow rate and generating a gas vortex.

[0005] However, conventional dry cleaning devices have a problem in that contaminants removed from the target object are not all collected and are scattered by the gas injection pressure, contaminating the surroundings. Therefore, there is a need to develop a dry cleaning device that can effectively remove contaminants while preventing the scattering of dust generated from the cleaning process. The problem to be solved

[0006] The present invention aims to provide a dry cleaning device with an improved structure for capturing foreign substances on a cleaning target and removing them with high-pressure gas. However, this objective is exemplary and does not limit the scope of the present invention. means of solving the problem

[0007] One aspect of the present invention provides a dry cleaning device comprising: a housing having an air flow space inside and one side open; a spray unit disposed inside the housing and spraying compressed air; a main frame on which the spray unit is mounted; and a guide plate unit connected to the main frame and covering a portion of the open side of the housing.

[0008] In addition, the guide plate unit may have at least one opening communicating with the internal space of the housing.

[0009] Additionally, the guide plate unit may be provided with a first guide plate connected to one side of the main frame, extending in a first direction which is the longitudinal direction of the main frame, and having a first width in a second direction different from the first direction, and a second guide plate connected to the other side of the main frame, extending in the first direction, and having a second width in the second direction.

[0010] Additionally, the first guide plate has at least one first opening formed to penetrate the first guide plate, and the second guide plate has at least one second opening formed to penetrate the second guide plate, and the area of ​​the first opening and the area of ​​the second opening may be provided differently.

[0011] In addition, the area of ​​the first opening may be larger than the area of ​​the second opening.

[0012] In addition, the number of first openings disposed in the first guide plate may be greater than the number of second openings disposed in the second guide plate.

[0013] Additionally, the first guide plate has a first A opening positioned adjacent to the main frame, and the second guide plate has a second opening positioned adjacent to the main frame, wherein the first A opening may be positioned closer to the injection unit than the second opening.

[0014] In addition, the above dry cleaning device allows a substrate to be cleaned to be fed into the first guide plate and discharged into the second guide plate.

[0015] Additionally, the first guide plate is spaced apart from the first side wall of the housing and provides a first gap extending in the first direction, and the second guide plate can be connected to the second side wall of the housing.

[0016] Additionally, the first guide plate and the second guide plate may be spaced apart from the third side wall of the housing to provide a second gap extending in the second direction, and the first guide plate and the second guide plate may be spaced apart from the fourth side wall of the housing to provide a third gap.

[0017] Other aspects, features, and advantages other than those described above will become clear from the following specific details, claims, and drawings for implementing the invention. Effects of the invention

[0018] A dry cleaning device according to one embodiment of the present invention can collect foreign substances on a cleaning target by forming an intake airflow. A guide plate unit disposed at the lower part of the dry cleaning device has a plurality of openings to form an airflow of compressed gas discharged from a spray unit, and can effectively collect even fine foreign substances. Of course, the scope of the present invention is not limited by this effect. Brief explanation of the drawing

[0019] FIG. 1 is a drawing illustrating a dry cleaning device according to one embodiment of the present invention. FIG. 2 is an exploded perspective view illustrating the dry cleaning device of FIG. 1. Figure 3 is a drawing showing the spray unit and guide plate unit of the dry cleaning device of Figure 1. FIG. 4 is a cross-sectional view of a dry cleaning device according to an embodiment of the present invention. Figure 5 is an enlarged view of area B of Figure 4. Figure 6 is a cross-sectional view taken along A-A' of Figure 3. Figure 7 is a drawing showing the bottom surface of the dry cleaning device of Figure 1. FIG. 8 is a drawing illustrating another embodiment of the guide plate unit of the dry cleaning device of FIG. 3. Specific details for implementing the invention

[0020] Hereinafter, various embodiments of the present disclosure are described in conjunction with the accompanying drawings. As various embodiments of the present disclosure may be subject to various modifications and may have various embodiments, specific embodiments are illustrated in the drawings and described in detail. However, this is not intended to limit the various embodiments of the present disclosure to specific forms, and it should be understood that they include all modifications and / or equivalents and substitutions that fall within the spirit and scope of the various embodiments of the present disclosure. In relation to the description of the drawings, similar reference numerals have been used for similar components.

[0021] The terms used in the various embodiments of this disclosure are used merely to describe specific embodiments and are not intended to limit the various embodiments of this disclosure. The singular expression includes the plural expression unless the context clearly indicates otherwise.

[0022] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which the various embodiments of this disclosure pertain.

[0023] Terms such as those defined in commonly used dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in the various embodiments of the present disclosure.

[0024] FIG. 1 is a drawing illustrating a dry cleaning device according to one embodiment of the present invention.

[0025] Referring to FIG. 1, the dry cleaning device (10) according to the present invention is a device that sprays compressed gas to collect foreign substances present on a cleaning target. The dry cleaning device (10) can collect foreign substances remaining on a cleaning target while moving the cleaning target to be cleaned by a moving device (not shown).

[0026] The dry cleaning device (10) may be installed above the object to be cleaned, but is not limited thereto and may also be installed below the object to be cleaned. The object to be cleaned by the dry cleaning device (10) is not limited to a specific use or shape. For example, the object to be cleaned may be a glass substrate, a metal substrate, a wafer, an LED substrate, etc., and may also be applied to a substrate coated with metal or non-metal, a substrate having irregularities, etc.

[0027] FIG. 2 is an exploded perspective view illustrating the dry cleaning device of FIG. 1, and FIG. 3 is a drawing illustrating the spray unit and guide plate unit of the dry cleaning device of FIG. 1.

[0028] Referring to FIGS. 1 to 3, one embodiment of a dry cleaning device (10) may include a housing (100), a spray unit (200), a main frame (300), and a guide plate unit (400). The dry cleaning device (10) may allow compressed gas to be discharged onto a substrate (P) by a spray unit (200) disposed in the internal space of the housing (100).

[0029] The housing (100) may have one side open and may have an air flow space inside. The open side of the housing (100) may come into contact with one surface of the substrate (P) and may form an area for collecting contaminants. The housing (100) may form a sealed space to allow the collected contaminants to move upward.

[0030] The housing (100) may include a case (101) to accommodate contaminants. The case (101) may be provided in a rectangular (or square) shape and may guide the contaminants to be discharged upward. The housing (100) may include side walls coupled to both sides so that the case (101) forms a kind of sealed space.

[0031] For example, the case (101) may be provided with a first side wall (1011) and a second side wall (1012) formed with a predetermined slope toward the upper side, and a third side wall (102) and a fourth side wall (103) may be combined on both sides of the case (101) to form a housing (100). An outlet (104) for discharging collected pollutants may be combined at the top of the housing (100).

[0032] A main frame (300) and a guide plate unit (400) may be disposed at the bottom of the housing (100). The first side wall (1011) and the second side wall (1012) of the housing (100), together with the third side wall (102) and the fourth side wall (103), may form an internal receiving space. The receiving space serves as a passage for compressed gas and foreign matter to pass through, and may also contain some foreign matter. An intake airflow guided toward the discharge port (104) may be formed in the receiving space, and the first side wall (1011) and the second side wall (1012) may assist in the formation of the compressed gas airflow. At this time, a spray unit (200) may be disposed inside the housing (100) to spray compressed air.

[0033] The spray unit (200) can maintain a constant internal pressure so that the compressed gas discharged from the spray unit (200) is discharged in a constant amount. Specifically, the spray unit (200) is supported by the main frame (300) and can rotate in place. Multiple spray units (200) can be arranged within the main frame (300) at spaced intervals, and can be arranged so that they rotate without interference with each other and cover a wide cleaning range. The spray unit (200) can rotate and spray compressed gas to form a vortex on the surface of the object to be cleaned.

[0034] A dry cleaning device (10) according to embodiments of the present invention can cover a wide cleaning range by using compressed gas to which rotational force is applied by a spray unit (200), and can easily remove foreign substances remaining on the object to be cleaned. The compressed gas used in the dry cleaning device (10) may be introduced into the spray unit (200) through an injection pipe and discharged. The injection pipe may be installed to penetrate the main frame (300) and connected to the spray unit (200).

[0035] The compressed gas discharged from the spray unit (200) can easily move into the flow path between the guide plate unit (400) forming the bottom surface on one side of the housing (100) after contacting the object to be cleaned. Since foreign substances are collected by the compressed gas through the discharge port (104), the retention of foreign substances is minimized and secondary contamination generated during the cleaning process can be reduced.

[0036] The main frame (300) is positioned inside the housing (100) and can be mounted with a spray unit (200). The main frame (300) is extended in one direction to have a length and can have a space for mounting the spray unit (200). The main frame (300) can be connected to a first support member (310) and a second support member (320) positioned at both ends in the longitudinal direction.

[0037] The first support member (310) and the second support member (320) may be positioned adjacent to both sides of the main frame (300) and both ends of the guide plate unit (400). At this time, the first support member (310) and the second support member (320) may be formed to be symmetrical to each other. The first support member (310) and the second support member (320) may be spaced apart to correspond to the length of the main frame (300), so that a spray unit (200) can be fixed between them. The main frame (300) may be connected to the first support member (310) and the second support member (320) to fix and support the spray unit (200).

[0038] The guide plate unit (400) may be positioned at the bottom of the dry cleaning device (10). The guide plate unit (400) is connected to the main frame (300) and may cover a portion of the open side of the housing (100). The guide plate unit (400) may be formed to have the shape of a roughly flat plate.

[0039] The guide plate unit (400) may have at least one opening communicating with the internal space of the housing (100). The guide plate unit (400) can distinguish between the open position and the closed position of the housing (100) by the provided opening. Accordingly, the guide plate unit (400) can guide the direction of movement of the compressed gas.

[0040] The guide plate unit (400) may be composed of multiple plates or may be composed of a single plate manufactured as a single unit. Although the drawing illustrates a configuration in which the guide plate unit (400) is composed of a first guide plate (410) and a second guide plate (420) spaced apart from each other, the configuration of the guide plate unit (400) is not limited thereto and can be set in various shapes depending on the application.

[0041] In one embodiment, the guide plate unit (400) may include a first guide plate (410) and a second guide plate (420). The guide plate unit (400) may form the lower part of the dry cleaning device (10) together with the main frame (300) and the spray unit (200).

[0042] The first guide plate (410) may have at least one first opening (411) formed to penetrate the first guide plate (410), and the second guide plate (420) may have at least one second opening (421) formed to penetrate the second guide plate (420).

[0043] Additionally, the number of first openings (411) arranged in the first guide plate (410) and the second guide plate (420) may be greater than the number of second openings (421) arranged in the second guide plate (420).

[0044] FIG. 4 is a cross-sectional view of a dry cleaning device according to an embodiment of the present invention, and FIG. 5 is an enlarged view of area B of FIG. 4.

[0045] Referring to FIGS. 4 and 5, the first guide plate (410) can be connected to one side of the main frame (300). The first guide plate (410) can form a path that guides gas flowing into the internal space of the housing (100) to the outlet (104). Compressed gas sprayed onto the upper surface of the substrate (P) can be introduced into the internal space of the housing (100). The first guide plate (410) forms an outlet passage to allow the discharged compressed gas to flow, and the gas can easily move to the opening of the first guide plate (410).

[0046] For example, referring to the drawing, the first guide plate (410) extends in the longitudinal direction of the main frame (300) and may have a width in a direction intersecting the longitudinal direction.

[0047] In detail, the first guide plate (410) extends in a first direction, which is the longitudinal direction of the main frame (300), and may have a first width (W1) in a second direction different from the first direction. Since the first guide plate (410) has an extended length and width, it is possible to isolate the compressed gas discharged on the upper surface of the substrate (P) and the foreign matter remaining on the substrate (P), thereby preventing the foreign matter remaining on the cleaning target from scattering and allowing it to move into the housing (100) with the flow of the compressed gas.

[0048] The first guide plate (410) may have at least one first opening (411) formed to penetrate the first guide plate (410). Compressed gas and foreign matter may pass through the first opening (411) of the first guide plate (410) and be guided into a receiving space.

[0049] For example, the first opening (411) may include a first A opening (411A) and a first B opening (411B). The first A opening (411A) and the first B opening (411B) may be arranged parallel to each other on the first guide plate (410).

[0050] The first A opening (411A) and the first B opening (411B) may be provided in a shape that penetrates the first guide plate (410) along the extension direction of the first guide plate (410). The first A opening (411A) and the first B opening (411B) may form a suction path on the first guide plate (410) that isolates the substrate (P) to be cleaned from the foreign matter collection space. Although the drawing shows the first opening (411) having two openings including the first A opening (411A) and the first B opening (411B), it is not limited thereto and may be provided in the shape of at least one opening or two or more openings depending on the application.

[0051] The first A opening (411A) may be positioned closest to the injection unit (200). The first A opening (411A) may have a firsta width (ma-1). The first A opening (411A) may form an inlet positioned closest to the injection unit (200) to form a path through which foreign substances on the substrate (P) enter most quickly.

[0052] The first A opening (411A) may be positioned closer to the injection unit (200) than the first B opening (411B). Specifically, the center axis of the first A opening (411A) may be positioned closer to the injection unit (200) than the first B opening (411B). The center axis may be defined as a first axis (C-1). The first axis (C-1) of the first A opening (411A) may be positioned spaced apart from the rotation axis (CA) of the injection unit (200) by a first distance (d1).

[0053] The first B opening (411B) may be spaced apart from the first A opening (411A) by a predetermined distance and positioned adjacent to the side wall of the housing (100). The first B opening (411B) may have a first B width (mb-1) set to have the same area as the first A width (ma-1). Accordingly, the first B opening (411B) may form a path to allow foreign substances that have not yet entered through the first A opening (411A) to enter sequentially.

[0054] Compressed gas and foreign substances sprayed from the spray unit (200) can first pass through the first A opening (411A) and be guided into the receiving space. The first A opening (411A) can be spaced apart from the first B opening (411B) by a predetermined distance, and the width of the first a (ma-1) and the width of the first b (mb-1) can be set to have the same area. Accordingly, the suction path on the first guide plate (410) isolating the substrate (P) to be cleaned and the foreign substance collection space can be set evenly.

[0055] The second guide plate (420) is connected to the other side of the main frame (300), extends in a first direction, and may have a second width (W2) in a second direction. The second guide plate (420) has a second opening (421) positioned adjacent to the main frame (300), wherein the first A opening (411A) may be positioned closer to the injection unit (200) than the second opening (421).

[0056] The second opening (421) can form a suction path on the second guide plate (420) that isolates the substrate (P) to be cleaned from the foreign matter collection space. Compressed gas and foreign matter can be guided into the receiving space by passing through the second opening (421) of the second guide plate (420). The second opening (421) may have a second axis (C-2) having a second distance (d2) from the rotation axis (CA) of the spray unit (200). The second opening (421) may be set to a seconda width (m-2). The second opening (421) may be set to be the same as or different from the area of ​​the first A opening (411A).

[0057] The dry cleaning device (10) may have the area of ​​the opening placed in the first guide plate (410) and the area of ​​the opening placed in the second guide plate (420) set differently. In one embodiment, the area of ​​the first opening (411) and the area of ​​the second opening (421) may be set differently.

[0058] In one embodiment, the area of ​​the first opening (411) may be set to be larger than the area of ​​the second opening (421). Accordingly, the discharged gas may flow and move toward the first opening (411) of the first guide plate (410), which has a relatively larger area than the opening of the second guide plate (420).

[0059] Additionally, the center of the first opening (411A) may be set closer to the center of the injection unit (200) than the center of the second opening (421). Specifically, one side of the first guide plate (410) is positioned in contact with one end of the main frame (300), and the first opening (411A) may be positioned to be in contact with the outer edge of the main frame (300). Inside the main frame (300), the nozzle of each injection unit (200) may be positioned in the radial direction of the injection unit (200). When the injection unit (200) injects compressed gas, the first opening (411A) is positioned closest to the nozzle, and the second opening (421) is positioned relatively far away, so the compressed gas injected from the injection unit (200) can be rapidly drawn toward the first opening (411A), which is closest to the injection unit (200). That is, the suction airflow flowing through the opening of the first guide plate (410) can be formed faster than the opening of the second guide plate (420). As the compressed gas is sucked in, foreign substances detached from the object to be cleaned can be discharged through the outlet (104) together with the compressed gas.

[0060] Referring again to FIG. 5, the guide plate unit (400) may be positioned so that it is partially in contact with the inner side of the housing (100) and partially spaced apart. For example, the first guide plate (410) may be positioned so that one end contacts one end of the main frame (300) and the other end is spaced apart from the inner wall of the housing (100). The second guide plate (420) may be positioned so that one end contacts the other end of the main frame (300) and the other end contacts the inner wall of the housing (100).

[0061] The first width (W1) of the first guide plate (410) may be provided with an area smaller than the second width (W2) of the second guide plate (420). By setting the first guide plate (410) and the second guide plate (420) to different widths, the flow of gas sprayed from the spray unit (200) can be induced.

[0062] For example, the first guide plate (410) and the first side wall (1011) of the housing (100) have a gap distance (Wa1) spaced apart from each other by a predetermined distance. Specifically, the gap distance (Wa1) can be set to an area relatively larger than the first opening (411) that forms the intake airflow.

[0063] The first A opening (411A) and the first B opening (411B) are set to have the same width, and the gap distance (Wa1) can be set to have an area larger than the first A opening (411A) and the first B opening (411B). That is, the compressed gas discharged from the injection unit (200) first flows into the nearest first A opening (411A), and then sequentially flows into the first B opening (411B) located at a close distance, and foreign substances on the substrate (P) that are not sucked into the first A opening (411A) and the first B opening (411B) can have a path to flow into the gap distance (Wa1) having the largest area.

[0064] Additionally, the dry cleaning device (10) may be provided such that the guide plate unit (400) is spaced apart from the upper surface of the substrate (P) by a predetermined height. Specifically, the guide plate unit (400) may be positioned at a height spaced apart from the upper surface of the substrate (P) by a first height (h1). By positioning the guide plate unit (400) spaced apart from the bottom of the housing (100), it can form a path for the compressed gas discharged under high pressure to be reflected onto the upper surface of the substrate (P). Accordingly, foreign substances on the substrate (P) can be rapidly collected into a receiving space along the path of the reflected compressed gas.

[0065] FIG. 6 is a cross-sectional view taken along A-A' of FIG. 3, and FIG. 7 is a drawing showing the bottom surface of the dry cleaning device of FIG. 1.

[0066] Referring to FIGS. 6 and 7, the dry cleaning device (10) removes foreign substances present on the cleaning target by spraying compressed gas through the spray unit (200) and can collect foreign substances through the discharge passage of the guide plate unit (400).

[0067] According to the process flow direction of the dry cleaning device (10), the substrate (P) advances in one direction, and, for example, the substrate (P) to be cleaned may have a path in which it is fed into the first guide plate (410) and residual foreign matter that is not sucked in is fed into the second guide plate (420).

[0068] When the substrate (P) moves in one direction and the cleaning process proceeds, the compressed gas sprayed from the spray unit (200) flows into the first opening (411A) adjacent to the spray unit (200), and foreign substances on the substrate (P) can be detached and collected sequentially according to the direction of movement of the substrate (P). At this time, foreign substances may first flow into the first opening (411) adjacent to the spray unit (200) and the gap distance (Wa1) forming the largest inlet. Additionally, accordingly, the dry cleaning device (10) forms a path for fine foreign substances and compressed gas on the substrate (P) toward the discharge port (104), and can collect residual substances scattered on the substrate (P) into the cleaning device.

[0069] The dry cleaning device (10) can collect foreign substances that are not captured by passing through the guide plate unit (400) due to the gap existing between the guide plate unit (400) and the housing (100), and can suck up residual substances so that they do not scatter. That is, the dry cleaning device (10) can form a discharge passage in which foreign substances are captured into the inner space of the housing (100) by forming a spaced gap between one side of the lower part of the housing (100) and the guide plate unit (400).

[0070] For example, the first guide plate (410) may be spaced apart from the first side wall (1011) of the housing (100) and provide a first gap (A1) extending in a first direction, and the second guide plate (420) may be connected to the second side wall (1012) of the housing (100), and the first guide plate (410) and the second guide plate (420) may be spaced apart from the third side wall (102) of the housing (100) and provide a second gap (A2) extending in a second direction. Additionally, the first guide plate (410) and the second guide plate (420) may be spaced apart from the fourth side wall (103) of the housing (100) and provide a third gap (A3).

[0071] Specifically, the open lower portion of the housing (100) can be divided into an open portion and a closed portion by the guide plate unit (400). The gap between the guide plate unit (400) and the housing (100) can be formed by connecting the first side wall (1011), the second side wall, the third side wall (102), and the fourth side wall. At this time, the first gap (A1) can be set to an area larger than the opening of the first guide plate (410) and the second guide plate (420).

[0072] Additionally, the first gap (A1) may be set to have an area equal to or larger than the area of ​​the second gap (A2) and the third gap (A3). The size of the opening or gap of the guide plate unit (400) placed at the bottom of the dry cleaning device (10) can change the flow velocity and suction force of the suction airflow. As the area of ​​the opening or gap of the guide plate unit (400) changes, the pressure of the airflow sucked into the discharge port (104) can change. Accordingly, the dry cleaning device (10) can easily suck in high-pressure compressed gas and guide it toward the discharge port, and prevent the scattering of foreign substances.

[0073] FIG. 8 is a drawing illustrating another embodiment of the guide plate unit of the dry cleaning device of FIG. 3.

[0074] Referring to FIG. 8, the dry cleaning device (10C) according to the present invention may include a housing (100), a spray unit (200), a main frame (300), and a guide plate unit (400C). When compared with the dry cleaning device (10) according to the above-described embodiment, the dry cleaning device (10C) according to the embodiment shown in FIG. 8 has a difference in the number and area of ​​the openings (411C) provided in the first guide plate (410C). Therefore, the following description will focus on the differences mentioned above.

[0075] The dry cleaning device (10C) removes foreign substances present on the cleaning target by spraying compressed gas through the spray unit (200), and can collect foreign substances through the opening and gap between the housing (100) and the guide plate unit (400).

[0076] The first guide plate (410C) may have a first C opening (411C) that penetrates the first guide plate (410C) with a predetermined width. The first C opening (411C) may be positioned adjacent to the injection unit (200) to guide the movement of compressed gas injected from the injection unit (200). The compressed gas may flow into the interior of the housing (100) through the first C opening (411C) formed in the first guide plate (410C) and may be discharged to the outlet (104) along the airflow formed in the housing (100).

[0077] The dry cleaning device (10) according to the present invention may be equipped with a guide plate unit (400) mounted on the lower part of a housing (100). Additionally, the device may include a structure for forming a flow of compressed gas and collecting foreign substances on a substrate (P) by setting the opening and gap areas of the guide plate unit (400) and the housing (100) and the guide plate unit (400) differently. When the opening and gap areas of the guide plate unit (400) are set differently, the airflow passing through the guide plate unit (400) has a higher pressure on the side with the larger area than on the side with the smaller area. Accordingly, the dry cleaning device (10) can easily guide high-pressure compressed gas toward the outlet and prevent the scattering of foreign substances.

[0078] As such, the present invention has been described with reference to the embodiments illustrated in the drawings, but this is merely illustrative, and those skilled in the art will understand that various modifications and equivalent alternative embodiments are possible therefrom. Accordingly, the true technical scope of protection of the present invention should be determined by the technical spirit of the appended claims. Explanation of the symbols

[0079] 10: Dry cleaning device 100: Housing 200: Injection unit 300: Mainframe 400 : Guide plate unit 410: First guide plate 420 : Second guide plate

Claims

Claim 1 A dry cleaning device comprising: a housing having one side open and an air flow space inside; a spray unit disposed inside the housing and spraying compressed air; a main frame on which the spray unit is mounted; and a guide plate unit connected to the main frame and covering a portion of the open side of the housing; wherein the guide plate unit comprises: a first guide plate connected to one side of the main frame and extending in a first direction which is the longitudinal direction of the main frame and having a first width in a second direction different from the first direction; and a second guide plate connected to the other side of the main frame, extending in the first direction and having a second width in the second direction; wherein the first guide plate provides a first gap extending in the first direction spaced apart from the first side wall of the housing, and the second guide plate is connected to the second side wall of the housing. Claim 2 A dry cleaning device according to claim 1, wherein the guide plate unit has at least one opening communicating with the internal space of the housing. Claim 3 delete Claim 4 A dry cleaning device according to claim 1, wherein the first guide plate has at least one first opening formed to penetrate the first guide plate, and the second guide plate has at least one second opening formed to penetrate the second guide plate, and the area of ​​the first opening and the area of ​​the second opening are different. Claim 5 A dry cleaning device according to claim 4, wherein the area of ​​the first opening is larger than the area of ​​the second opening. Claim 6 A dry cleaning device according to claim 4, wherein the number of first openings disposed in the first guide plate is greater than the number of second openings disposed in the second guide plate. Claim 7 A dry cleaning device according to claim 1, wherein the first guide plate has a first A opening positioned adjacent to the main frame, and the second guide plate has a second opening positioned adjacent to the main frame, wherein the first A opening is positioned closer to the spray unit than the second opening. Claim 8 In claim 1, the dry cleaning device is a dry cleaning device in which a substrate to be cleaned is fed into the first guide plate and discharged into the second guide plate. Claim 9 delete Claim 10 A dry cleaning device according to claim 1, wherein the first guide plate and the second guide plate are spaced apart from the third side wall of the housing to provide a second gap extending in the second direction, and the first guide plate and the second guide plate are spaced apart from the fourth side wall of the housing to provide a third gap.

Images