Gas distribution device capable of controlling flow rate

Abstract

The present invention relates to a gas distribution device capable of controlling supply line pressure and flow rate, and an integrated control system using the same, which controls the depletion time of containers within a supply device by controlling the pressure and flow rate of lines supplied from a plurality of supply devices, thereby enabling operational advantages in container replacement and preventing supply interruption due to insufficient flow rate. The device of the present invention comprises a plurality of supply devices (PI1 ~ PI4), a plurality of supply lines (IL1 ~ IL4), a buffer tank (PT), a plurality of supply lines for user destinations (OL1 ~ OL4), and a control unit (1). In the supply lines (IL1 ~ IL4), one inlet gas supply shut-off valve (MV1A, MV2A, MV1B, MV2B), a supply line regulator (REG1 ~ REG4), a supply line pressure sensor (PT1A ~ PT1D), an auto valve (AV1A, AV2A, AV1B, AV2B), a mass flow controller (MFCA, MFCB, MFCC, MFCD), and one outlet gas supply shut-off valve (MV3A, MV4A, MV3B, MV4B) are each installed in series. In the supply lines for user destinations (OL1 ~ OL4), one initial inlet gas supply shut-off valve (MV5A, MV5B, MV5C, It further includes one each of the MV5D, pressure sensors (PT3A ~ PT3D) for the supply line to the point of use, and gas supply shut-off valves (MV6A, MV6B, MV6C, MV6D) on the discharge side installed in series.

Description

Technology Field

[0001] The present invention relates to a gas distribution device capable of controlling supply line pressure and flow rate and an integrated control system using the same. More specifically, the invention relates to a gas distribution device capable of controlling supply line pressure and flow rate and an integrated control system using the same, which is configured to receive gas from a plurality of supply devices and supply gas to a secondary distribution device connected to the downstream end, thereby controlling the timing of depletion of containers within the supply device by controlling the pressure and flow rate of the lines supplied from the plurality of supply devices, and thereby enabling advantages in container replacement operations and preventing supply interruption due to insufficient flow rate. Background Technology

[0002] Generally, gas-using devices are designed to use a supply gas suitable for their respective purposes, and depending on the purpose and the type of supply gas, they are required to satisfy certain concentrations and pressures.

[0003] In particular, for devices supplying gas to gas consumption sites where precise operations are performed, such as semiconductor equipment, it is required that concentration, pressure, and temperature satisfy a precise error range.

[0004] If we examine the conventional gas supply valve distribution system further, it also serves as a safety device for distributing gas to the process line or preventing process shutdown.

[0005] However, this configuration presents a problem where gas cylinder consumption varies depending on the distance between the gas distribution system and the gas supply device, as well as gas pressure. Additionally, since gas has a limited lifespan, if replacement is delayed for a long time, cylinders with low consumption must be discarded.

[0006] In addition, most conventional distribution devices use a combination of one gas supply unit (G / C, Bundle) and multiple secondary distribution units (VMB; Valve Manifold Box). When multiple gas supply units are connected, there is a problem in that the difference in the depletion time of each gas supply unit causes the rapid depletion or long-term stagnation of the container within a specific gas supply unit. Prior art literature

[0007] Korean Registered Patent Publication No. 10-1275890 (June 11, 2013) The problem to be solved

[0008] The present invention has been devised to solve the various problems of the prior art, and aims to provide a gas distribution device capable of controlling supply line pressure and flow rate, and an integrated control system using the same, which controls the flow rate or pressure of gas supplied from a gas supply device in a gas distribution device connected to a gas supply device to control the gas consumption in multiple gas supply devices to be the same or similar, controls the gas cylinder depletion time in multiple gas supply devices to operate replacement cycles to be the same or similar, and prevents supply interruption due to insufficient flow rate.

[0009] Another objective of the present invention is to provide a gas distribution device capable of controlling supply line pressure and flow rate, and an integrated control system utilizing the same, which calculates the total flow rate based on the amount consumed in the process line, determines the gas consumption and the number of gas supply devices in the process line, controls the flow rate equally through a Mass Flow Controller (MFC) per gas supply device to enable replacement of gas cylinders at regular intervals, enables sequential replacement of gas cylinders by measuring the gas pressure or weight in the gas supply device and adjusting the supply amount of each line according to the amount consumed, and if the gas cylinder replacement schedule is delayed, adjusts the flow rate of cylinders with a large amount of gas remaining and cylinders with a small amount remaining to match the flow consumption according to the replacement schedule, and subsequently changes the flow rate of the replaced cylinder to a high level and lowers the flow rate of the cylinder that previously had a large amount of gas remaining and has been significantly consumed to adjust for the next replacement schedule.

[0010] Another objective of the present invention is to provide a gas distribution device capable of controlling supply line pressure and flow rate, and an integrated control system using the same, wherein the buffer pipe (buffer tank) uses a wider pipe diameter (25A to 200A) than the existing line (1 / 4” or ½”) to provide a buffer for controlling the flow rate consumed, a buffer that can provide time for changing the flow rate and prevent supply interruption due to insufficient flow rate, a directly connected line is also provided to prevent supply interruption in case of buffer abnormality (there may be additional valves), the buffer is set to be filled to a pressure higher than the required pressure in the process line (set pressure range), and if the pressure drops below the set pressure range, the MFC can increase the flow rate to raise the pressure.

[0011] Another objective of the present invention is to provide a gas distribution device capable of controlling supply line pressure and flow rate, which can control flow rate by controlling flow rate using an MFC or by controlling pressure through a Mass Flow Meter (MFM) and an autoregulator, and an integrated control system using the same.

[0012] Other detailed objectives of the present invention will be obvious to those skilled in the art or researchers in this technical field through the specific details described below. means of solving the problem

[0013] A gas distribution device capable of controlling supply line pressure and flow rate according to one embodiment of the present invention for achieving the above-mentioned purpose comprises: a plurality of supply devices supplying the same type of gas; a plurality of supply lines connected in parallel between the outlets of the supply devices and the inlets of a buffer tank, through which gases supplied from the supply devices flow; a buffer tank equipped with a pressure sensor, which stores gases delivered through the supply lines and provides them to gas consumption points; a plurality of consumption point supply lines connected in parallel between the outlets of the buffer tank and the gas consumption points, which provide the gas stored in the buffer tank to each gas consumption point; and a control unit that performs an overall control function of the gas distribution device.

[0014] The above supply line is,

[0015] A plurality of inlet-side gas supply shut-off valves, each installed at an inlet and opened or closed manually or automatically; a plurality of supply line regulators, each installed at the rear of the gas supply shut-off valves and maintaining the pressure of the gas flowing inside the supply lines at a constant level; a plurality of supply line pressure sensors, each installed at the rear of the supply line regulators and detecting and displaying the gas pressure; a plurality of auto valves, each installed at the rear of the supply line pressure sensors and opened or closed in response to an output signal from a control unit to open the supply lines and supply gas; a plurality of mass flow controllers (MFCs), each installed at the rear of the auto valves, detecting the gas flow rate of the supply lines through sensors and transmitting it to a control unit, and controlling the gas flow rate by automatically opening or closing the auto shut-off valves in response to a driving signal output from the control unit corresponding to the gas flow rate; and a plurality of outlet-side gas supply shut-off valves, each installed at the rear of the mass flow controllers (MFCs) and opened or closed manually or automatically.

[0016] The above-mentioned supply lines for the required locations

[0017] It includes: a plurality of inlet-side gas supply shut-off valves, each installed at the inlet and opened or closed manually or automatically; a plurality of demand-side supply line pressure sensors, each installed at the rear of the gas supply shut-off valves and detecting and displaying the pressure of gas supplied to a demand-side through each demand-side supply line; and a plurality of outlet-side gas supply shut-off valves, each installed at the outlet and opened or closed manually or automatically.

[0018] At this time, the plurality of supply devices, the plurality of supply lines, and the plurality of supply lines for the user are 2 to 16, and the plurality of inlet gas supply shut-off valves, the plurality of supply line regulators, the plurality of supply line pressure sensors, the plurality of auto valves, the plurality of mass flow controllers (MFCs), and the plurality of outlet gas supply shut-off valves installed in series on the supply lines are 2 to 16, and the plurality of initial inlet gas supply shut-off valves, the plurality of supply line pressure sensors for the user, and the plurality of outlet gas supply shut-off valves installed in series on the supply lines for the user are also 2 to 16.

[0019] A gas distribution device capable of controlling supply line pressure and flow rate according to another embodiment of the present invention comprises: a plurality of supply devices supplying the same type of gas; a plurality of supply lines connected in parallel between the outlets of the supply devices and the inlets of a buffer tank, through which gases supplied from the supply devices flow; a buffer tank equipped with a pressure sensor, which stores gases delivered through the supply lines and provides them to gas consumption points; a plurality of consumption point supply lines connected in parallel between the outlets of the buffer tank and the gas consumption points, which provide the gas stored in the buffer tank to each gas consumption point; and a control unit that performs an overall control function of the gas distribution device.

[0020] The above supply line is,

[0021] A plurality of inlet-side gas supply shut-off valves, each installed at an inlet and opened or closed manually or automatically; a plurality of auto valves, installed at the rear of the inlet-side gas supply shut-off valves, which open or close in response to an output signal from a control unit and automatically open when air is supplied to open the supply line and supply gas; a plurality of auto regulators, installed at the front or rear of the auto valves and controlling the gas pressure on the supply line; a plurality of mass flow meters (MFMs), installed at the rear of the auto valves or auto regulators, which transmit the mass flow rate of the gas flowing inside the supply line to the control unit; and a plurality of outlet-side gas supply shut-off valves, installed at the rear of the mass flow meters (MFMs) and opened or closed manually or automatically; comprising

[0022] The above-mentioned supply lines for the required locations

[0023] It includes: a plurality of inlet-side gas supply shut-off valves, each installed at the inlet and opened or closed manually or automatically; a plurality of demand-side supply line pressure sensors, each installed at the rear of the gas supply shut-off valves and detecting and displaying the pressure of gas supplied to a demand-side through each demand-side supply line; and a plurality of outlet-side gas supply shut-off valves, each installed at the outlet and opened or closed manually or automatically.

[0024] At this time, the plurality of supply devices, the plurality of supply lines, and the plurality of supply lines for the user are 2 to 16, and the plurality of inlet gas supply shut-off valves, the plurality of auto valves, the plurality of auto regulators, the plurality of mass flow meters (MFMs), and the plurality of outlet gas supply shut-off valves installed in series on the supply lines are 2 to 16, and the plurality of initial inlet gas supply shut-off valves, the plurality of supply line pressure sensors for the user, and the plurality of outlet gas supply shut-off valves installed in series on the supply lines for the user are also 2 to 16.

[0025] In addition, the inlet and outlet pipe diameters of the buffer tank are characterized as being 25A to 200A.

[0026] Additionally, the lower portions of the plurality of supply devices may further include a weight detection unit that measures the weight of the gas container in real time and transmits it to a control unit, and a heating unit capable of heating the gas container.

[0027] Meanwhile, an integrated control system using a gas distribution device according to the present invention for achieving the above-mentioned purpose comprises: at least one gas supply device that supplies gas to a gas distribution device through a valve distribution system (VDS) and provides remaining amount and pressure information to a control server in real time; a valve distribution system (VDS) that distributes the gas supplied by the gas supply device to gas distribution devices and provides distribution status information to a control server; at least one gas distribution device that distributes the gas supplied through the valve distribution system from the gas supply devices to a plurality of process equipment in a constant manner and provides various information, such as gas flow rate and pressure, to a control server; a plurality of process equipment that executes a semiconductor manufacturing process using the gas supplied from each gas distribution device and provides manufacturing process information to a control server in real time; and a control server that calculates the gas supply status, remaining amount, pressure, and cylinder replacement time using various information transmitted from the gas supply devices, the valve distribution system, the gas distribution devices, and the process equipment, displays this information on a display device or administrator terminal equipped in the gas supply device or distribution device, and simultaneously performs overall control functions of the system. Effects of the invention

[0028] As described above, according to the gas distribution device capable of controlling supply line pressure and flow rate and the integrated control system using the same of the present invention, the flow rate or pressure of the gas supplied from the gas supply device can be controlled at the gas distribution device connected to the gas supply device, and the gas consumption at multiple gas supply devices can be controlled to be the same or similar. Furthermore, the replacement cycle can be operated to be the same or similar by controlling the gas cylinder depletion time at multiple gas supply devices, and the effect of preventing supply interruption due to insufficient flow rate is achieved.

[0029] Furthermore, in the present invention, the total flow rate is calculated based on the amount consumed in the process line, and the gas consumption and the number of gas supply devices in the process line are determined. By controlling the flow rate equally through a Mass Flow Controller (MFC) per gas supply device, gas cylinders can be replaced at regular intervals. Additionally, sequential replacement of gas cylinders is possible by measuring the gas pressure or weight in the gas supply device and adjusting the supply amount of each line according to the amount consumed. If the gas cylinder replacement schedule is delayed, the flow rate of cylinders with a large amount of gas remaining and cylinders with a small amount of gas can be adjusted to match the replacement schedule to meet the flow rate consumption. Moreover, there is an effect of increasing the flow rate of the cylinders that have been replaced in the future and lowering the flow rate of the cylinders that previously had a large amount of gas remaining and have been significantly depleted to adjust for the next replacement schedule.

[0030] In addition, in the present invention, by using a buffer pipe (buffer tank) with a wider pipe diameter of 25A to 200A than the existing line (1 / 4” or ½”), a buffer can be provided for controlling the flow rate consumed, and a buffer can be provided that allows for time to change the flow rate and prevents supply interruption due to insufficient flow rate. A directly connected line can also be provided (there may be additional valves) to prevent supply interruption in case of buffer abnormality, and the buffer can be set to be filled at a pressure higher than the required pressure (set pressure range) in the process line, and if it drops below the set pressure range, the MFC can increase the flow rate to increase the pressure.

[0031] Furthermore, the present invention is a very useful invention, as it allows for flow rate control using an MFC or pressure control through a Mass Flow Meter (MFM) and an auto-regulator.

[0032] Other effects of the present invention will be obvious to those skilled in the art or researchers in this field through the specific details described below or during the process of implementing the present invention. Brief explanation of the drawing

[0033] FIG. 1 is a configuration diagram of a gas distribution device to which an embodiment of the present invention is applied. FIG. 2 is a configuration diagram of a gas distribution device to which another embodiment of the present invention is applied. FIG. 3 is a block diagram of an integrated control system using the device of the present invention. Specific details for implementing the invention

[0034] The present invention is capable of various modifications and may take various forms, and specific embodiments are illustrated in the drawings and described in detail in the text. However, this is not intended to limit the invention to the specific disclosed forms, and it should be understood that the invention includes all modifications, equivalents, and substitutions that fall within the spirit and scope of the invention.

[0035] Terms such as "first," "second," etc., may be used to describe various components, but said components should not be limited by said terms. These terms are used solely for the purpose of distinguishing one component from another. For example, without departing from the scope of the present invention, the first component may be named the second component, and similarly, the second component may be named the first component.

[0036] The terms used in this application are used merely to describe specific embodiments and are not intended to limit the invention. The singular expression includes the plural expression unless the context clearly indicates otherwise. In this application, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the specification, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof.

[0037] Unless otherwise defined, all terms used herein, including technical or scientific terms, have the same meaning as generally understood by those skilled in the art to which this invention pertains.

[0038] Terms such as those defined in commonly used dictionaries should be interpreted as having meanings consistent with their meanings in the context of the relevant technology, and should not be interpreted in an ideal or overly formal sense unless explicitly defined in this application.

[0039] Hereinafter, the operating state according to each configuration, including a preferred embodiment according to the present invention, will be described in detail with reference to the attached drawings.

[0040] FIG. 1 shows a configuration diagram of a gas distribution device to which one embodiment of the present invention is applied, FIG. 2 shows a configuration diagram of a gas distribution device to which another embodiment of the present invention is applied, and FIG. 3 shows a block diagram of an integrated control system using the device of the present invention.

[0041] According to this, a gas distribution device capable of controlling supply line pressure and flow rate to which an embodiment of the present invention is applied (applying a mass flow controller (MFC)) comprises, as shown in FIG. 1, a plurality (2 to 16) supply devices (PI1 to PI4), a plurality (2 to 16) supply lines (IL1 to IL4), a buffer tank (PT), a plurality (2 to 16) supply lines (OL1 to OL4) for use, and a control unit (1).

[0042] In addition, the supply lines (IL1 ~ IL4) to which an embodiment of the present invention is applied further include, for each, one inlet gas supply shut-off valve (MV1A, MV2A, MV1B, MV2B), supply line regulator (REG1 ~ REG4), supply line pressure sensor (PT1A ~ PT1D), auto valve (AV1A, AV2A, AV1B, AV2B), mass flow controller (MFCA, MFCB, MFCC, MFCD), and outlet gas supply shut-off valve (MV3A, MV4A, MV3B, MV4B) installed in series.

[0043] In addition, the above-mentioned supply lines (OL1~OL4) further include one gas supply shut-off valve (MV5A, MV5B, MV5C, MV5D) on the inlet side, one pressure sensor (PT3A~PT3D) on the supply line to the outlet side, and one gas supply shut-off valve (MV6A, MV6B, MV6C, MV6D) on the outlet side, each selected and installed in series.

[0044] At this time, the "multiple" is determined by the number of supply devices, the number of supply lines, and the number of supply lines for use connected to a gas distribution device to which an embodiment of the present invention is applied, and includes at least one, preferably 2 to 16, but is not limited thereto and may be more.

[0045] For example, when two supply devices (PI1, PI2) are connected and used in a gas distribution device to which one embodiment of the present invention is applied, two supply lines (IL1, IL2) and two supply lines for the user (OL1, OL2) are installed in a 2 x 2 type, and when three supply devices (PI1 ~ PI3) are connected and used, three supply lines (IL1 ~ IL3) and three supply lines for the user (OL1 ~ OL3) are installed in a 3 x 3 type, and when four supply devices (PI1 ~ PI4) are connected and used, four supply lines (IL1 ~ IL4) and four supply lines for the user (OL1 ~ OL4) are installed in a 4 x 4 type.

[0046] Additionally, among the above supply lines (IL1 to IL4), for example, an inlet gas supply shut-off valve (MV1A), a supply line regulator (REG1), a supply line pressure sensor (PT1A), an auto valve (AV1A), a mass flow controller (MFCA), and an outlet gas supply shut-off valve (MV3A) may be installed in series on the first supply line (IL1), and an inlet gas supply shut-off valve (MV2A), a supply line regulator (REG2), a supply line pressure sensor (PT1B), an auto valve (AV2A), a mass flow controller (MFCB), and an outlet gas supply shut-off valve (MV4A) may be installed in series on the second supply line (IL2).

[0047] Additionally, in the third supply line (IL3), an inlet gas supply shut-off valve (MV1B), a supply line regulator (REG3), a supply line pressure sensor (PT1C), an auto valve (AV2A), a mass flow controller (MFCC), and an outlet gas supply shut-off valve (MV3B) may be installed in series, and in the fourth supply line (IL2), an inlet gas supply shut-off valve (MV2B), a supply line regulator (REG4), a supply line pressure sensor (PT1D), an auto valve (AV2B), a mass flow controller (MFCD), and an outlet gas supply shut-off valve (MV4B) may be installed in series.

[0048] In addition, among the above-mentioned supply lines (OL1 ~ OL3), the first supply line (OL1) has an inlet-side gas supply shut-off valve (MV5A), a supply line pressure sensor (PT3A), and an outlet-side gas supply shut-off valve (MV6A) installed in series; the second supply line (OL2) has an inlet-side gas supply shut-off valve (MV5B), a supply line pressure sensor (PT3B), and an outlet-side gas supply shut-off valve (MV6B) installed in series; the third supply line (OL1) has an inlet-side gas supply shut-off valve (MV5C), a supply line pressure sensor (PT3C), and an outlet-side gas supply shut-off valve (MV6C) installed in series; and the fourth supply line (OL1) has an inlet-side gas supply shut-off valve (MV5D), a supply line pressure sensor (PT3D), and an outlet-side gas supply A shut-off valve (MV6D) may be installed.

[0049] Below, a 4 x 4 type gas distribution device with a general regulator (REG) and a mass flow controller (MFC) applied as shown in FIG. 1 will be explained in detail.

[0050] Among the components of the above 4 x 4 type gas distribution device, the plurality of supply devices (PI1 to PI4) each include a cylinder filled with gas and perform the function of supplying the same type of gas filled in each cylinder to the buffer tank (BT) through supply lines (IL1 to IL4) connected in a 1:1 ratio.

[0051] In addition, the plurality of supply lines (IL1 to IL4) are connected in parallel between the outlet of the supply device (PI1 to PI4) and the inlet of the buffer tank (BT), and perform the function of allowing gases supplied from the supply devices to flow.

[0052] At this time, the plurality of supply lines (IL1 ~ IL4) each have one inlet gas supply shut-off valve (MV1A, MV2A, MV1B, MV2B), supply line regulator (REG1 ~ REG4), supply line pressure sensor (PT1A ~ PT1D), auto valve (AV1A, AV2A, AV1B, AV2B), mass flow controller (MFCA, MFCB, MFCC, MFCD), and outlet gas supply shut-off valve (MV3A, MV4A, MV3B, MV4B) installed in series, as described above.

[0053] Among the above-mentioned components, the inlet side gas supply shut-off valves (MV1A, MV2A, MV1B, MV2B) include manual valves or automatic valves that operate manually or automatically, and are installed at the inlets of the supply lines (IL1 ~ IL4), respectively. They perform the function of allowing an administrator to manually open and close and shut off the gas supplied from the plurality of supply devices (PI1 ~ PI4) to the buffer tank (BT) side through each supply line (IL1 ~ IL4), or to automatically open and close and shut off the gas by the control unit.

[0054] In addition, the supply line regulators (REG1 to REG4) are installed at the rear of the gas supply shut-off valves (MV1A, MV2A, MV1B, MV2B) respectively, and perform the function of maintaining a constant pressure of the gas flowing inside each supply line (IL1 to IL4).

[0055] In addition, the plurality of supply line pressure sensors (PT1A ~ PT1D) are each installed at the rear of the supply line regulators (REG1 ~ REG4) and perform the function of detecting the pressure of gases flowing inside the supply lines (IL1 ~ IL4) and displaying it for each supply line.

[0056] In addition, the plurality of auto valves (AV1A, AV2A, AV1B, AV2B) are each installed at the rear of the supply line pressure sensors (PT1A ~ PT1D) and are operated to open and close in response to the output signal of the control unit (1) to automatically control the gas flow.

[0057] The above-mentioned auto valves (AV1A, AV2A, AV1B, AV2B) perform the function of automatically opening when air is supplied for supply control, thereby opening the supply line and allowing gas to be supplied.

[0058] However, it is not limited to this, and the auto valve may also open and close the piping by means of an actuator operated by electricity or hydraulics.

[0059] In addition, the plurality of mass flow controllers (MFCA, MFCB, MFCC, MFCD) are equipped with a flow sensor (not shown), an automatic shut-off valve, a hydraulic sensor, and a control unit as a single unit, and are installed at the rear of the auto valves (AV1A, AV2A, AV1B, AV2B), respectively, and detect the mass flow rate of gases flowing inside the supply lines (IL1 ~ IL4) through the flow sensor and transmit it to the control unit, and in response to a driving signal output from the control unit corresponding to the gas flow rate, the automatic shut-off valve automatically opens and closes and performs the function of controlling the gas flow rate.

[0060] That is, the above mass flow controllers (MFCA, MFCB, MFCC, MFCD) measure the mass flow rate of the gas flowing inside each supply line (IL1 ~ IL4) and perform the function of automatically correcting the mass flow rate so that the gas flowing through the supply line always has a constant mass flow rate and stably providing it.

[0061] Accordingly, by calculating the total flow rate based on the amount consumed in the process line to which the device of the present invention is applied, determining the gas consumption and the number of gas supply devices in the process line, and then controlling the flow rate equally through a mass flow controller (MFC), gas cylinders can be replaced at regular intervals. Furthermore, sequential replacement of gas cylinders is possible by measuring the gas pressure or weight in the gas supply device and adjusting the supply amount of each line according to the amount consumed. If the gas cylinder replacement schedule is delayed, the flow rate of cylinders with a large amount of gas remaining and cylinders with a small amount of gas can be adjusted to match the flow consumption according to the replacement schedule. Additionally, the flow rate of the cylinders that have been replaced can be increased, and the flow rate of the cylinders that previously had a large amount of gas remaining and were significantly depleted can be lowered to match the next replacement schedule.

[0062] In addition, the plurality of outlet-side gas supply shut-off valves (MV3A, MV4A, MV3B, MV4B) include manual valves or automatic valves that are operated manually or automatically, and are each installed at the rear of the mass flow controllers (MFCA, MFCB, MFCC, MFCD), and perform the function of allowing an administrator to manually open and close and shut off the gas supplied from the plurality of supply devices (PI1 to PI4) to the buffer tank (BT) side through each supply line (IL1 to IL4), or to automatically open and close and shut off the gas by the control unit.

[0063] Meanwhile, the buffer tank (BT) is equipped with a pressure sensor (PT2) that detects and displays the pressure inside the tank, and performs the function of storing gases delivered through the supply lines (IL1 ~ IL4) connected in parallel and stably supplying them to the gas consumption point.

[0064] In addition, the above buffer tank (BT) also performs the function of extending the cycle time by securing the time between filling between the upper and lower limits of pressure filling, so as to reduce the number of times the air automatic valve operates and extend its lifespan.

[0065] The above buffer tank (BT) is connected to a plurality of supply lines (IL1 to IL4) and a plurality of supply lines (OL1 to OL4) by a reducer, and is composed of a pipe having a larger diameter than the plurality of supply lines (IL1 to IL4) and the plurality of supply lines (OL1 to OL4).

[0066] For example, the buffer tank (BT) may be composed of a plurality of supply lines (IL1 to IL4) and a plurality of supply lines (OL1 to OL4) that may be 1 / 4" or 1 / 2", and may have a pipe diameter of 1" or more than that.

[0067] In addition, it may be desirable for the buffer tank (BT) to have a pipe diameter of 8 inches or less so as not to increase the external size of the distribution device.

[0068] Meanwhile, the control unit (1) can stop supplying gas to the buffer tank (BT) by closing the auto valves (AV1A, AV2A, AV1B, AV2B) and the MFC when the pressure of the buffer tank (BT) rises above the set pressure range due to the MFC supply amount, and can supply gas to the buffer tank (BT) by reopening the auto valves (AV1A, AV2A, AV1B, AV2B) and the MFC when the pressure falls below the set pressure range.

[0069] At this time, the control unit (1) detects the pressure inside the buffer tank through the pressure sensor (PT2) installed in the buffer tank (BT), and when the pressure drops below the set pressure range, increases the MFC supply amount to stably provide gas to the gas consumption location.

[0070] For example, the control unit (1) can set multiple lower limits for the set pressure ranges, and when the pressure of the buffer tank (BT) reaches the lower limit of each set pressure range or when the pressure does not increase for a certain period of time, it can increase the flow rate of the MFC to control the pressure of the buffer tank.

[0071] For example, the control unit (1) can supply gas to the buffer by opening the auto valves (AV1A, AV2A, AV1B, AV2B) and the MFC when the pressure of the buffer tank reaches the highest first set pressure among the lower limits of the set pressure range, while the gas supply is interrupted because the buffer tank (BT) has reached the upper limit of the set pressure range.

[0072] Here, the control unit (1) can increase the flow rate of the MFC to supply gas when the pressure of the buffer tank (BT) drops below the highest first set pressure among the lower limits of the set pressure range and reaches the second set pressure, or when the pressure of the buffer tank does not increase even after a certain period of time has elapsed.

[0073] Additionally, the plurality of gas demand supply lines (OL1~OL4) are connected in parallel between the outlet of the buffer tank (BT) and the gas demand locations, and perform the function of supplying the gas stored in the buffer tank (BT) to each gas demand location.

[0074] At this time, the plurality of supply lines (OL1~OL4) have a configuration in which, as described above, one gas supply shut-off valve (MV5A, MV5B, MV5C, MV5D), one pressure sensor (PT3A~PT3D), and one gas supply shut-off valve (MV6A, MV6B, MV6C, MV6D) are each installed in series.

[0075] Among the above components, the gas supply shut-off valves (MV5A, MV5B, MV5C, MV5D) at the initial inlet side include manual valves or automatic valves that are operated manually or automatically, and are installed at the inlets of the supply lines (OL1~OL4) respectively. They perform the function of allowing a manager to manually open and close and shut off the process gas supplied from the buffer tank (BT) to the gas users through the respective supply lines (OL1~OL4), or to automatically open and close and shut off the gas by the control unit.

[0076] In addition, the above-mentioned plurality of supply line pressure sensors (PT3A ~ PT3D) are each installed at the rear of the gas supply shut-off valves (MV5A, MV5B, MV5C, MV5D) and perform the function of detecting the pressure of the gas supplied to the supply line (OL1 ~ OL4) through each supply line and displaying it for each supply line.

[0077] In addition, the plurality of discharge-side gas supply shut-off valves (MV6A, MV6B, MV6C, MV6D) include manual valves or automatic valves that operate manually or automatically, and are installed at the discharge ports of the supply lines (OL1~OL4) respectively. They perform the function of allowing an administrator to manually open and close the process gas supplied from the buffer tank (BT) to the gas users through the respective supply lines (OL1~OL4), or to automatically open and close the process gas by the control unit.

[0078] In addition, the control unit (1) performs an overall control function for a gas distribution device to which an embodiment of the present invention is applied, including the plurality of auto valves (AV1A, AV2A, AV1B, AV2B), etc.

[0079] Meanwhile, FIG. 2 shows a configuration diagram of a gas distribution device to which another embodiment of the present invention is applied.

[0080] According to this, a gas distribution device capable of controlling supply line pressure and flow rate, to which another embodiment of the present invention is applied (mass flow meter (MFM) applied), largely comprises, as shown in FIG. 2, a plurality (2 to 16) supply devices (PI1 to PI4), a plurality (2 to 16) supply lines (IL1 to IL4), a buffer tank (PT), a plurality (2 to 16) supply lines (OL1 to OL4) for use, and a control unit (1).

[0081] In addition, the supply lines (IL1 ~ IL4) to which an embodiment of the present invention is applied further include, for each, one inlet gas supply shut-off valve (MV1A, MV2A, MV1B, MV2B), one auto valve (AV1A, AV2A, AV1B, AV2B), one plurality of auto regulators (AREGA, AREGB, AREGC, AREGD), one mass flow meter (MFMA ~ MFMD), and one outlet gas supply shut-off valve (MV3A, MV4A, MV3B, MV4B) installed in series.

[0082] In addition, the above-mentioned supply lines (OL1~OL4) further include, as in one embodiment, one gas supply shut-off valve (MV5A, MV5B, MV5C, MV5D), one pressure sensor (PT3A~PT3D), and one gas supply shut-off valve (MV6A, MV6B, MV6C, MV6D) installed in series, respectively.

[0083] At this time, the "multiple" is determined by the number of supply devices, the number of supply lines, and the number of supply lines for use connected to a gas distribution device to which another embodiment of the present invention is applied, and includes at least one, preferably 2 to 16, but is not limited thereto and may be more.

[0084] For example, when two supply devices (PI1, PI2) are connected and used in a gas distribution device to which another embodiment of the present invention is applied, two supply lines (IL1, IL2) and two supply lines (OL1, OL2) for the user are each installed in a 2 x 2 type; when three supply devices (PI1 ~ PI3) are connected and used, three supply lines (IL1 ~ IL3) and three supply lines for the user are each installed in a 3 x 3 type; and when four supply devices (PI1 ~ PI4) are connected and used, four supply lines (IL1 ~ IL4) and four supply lines for the user are each installed in a 4 x 4 type.

[0085] Additionally, among the above supply lines (IL1 to IL4), for example, an inlet gas supply shut-off valve (MV1A), an auto valve (AV1A), an auto regulator (AREGA), a mass flow meter (MFMA), and an outlet gas supply shut-off valve (MV3A) may be installed in series on the first supply line (IL1), and an inlet gas supply shut-off valve (MV2A), an auto valve (AV2A), an auto regulator (AREGB), a mass flow meter (MFMB), and an outlet gas supply shut-off valve (MV4A) may be installed in series on the second supply line (IL2).

[0086] Additionally, in the third supply line (IL3), an inlet gas supply shut-off valve (MV1B), an auto valve (AV1B), an auto regulator (AREGC), a mass flow meter (MFMC), and an outlet gas supply shut-off valve (MV3B) may be installed in series, and in the fourth supply line (IL2), an inlet gas supply shut-off valve (MV2B), an auto valve (AV2B), an auto regulator (AREGD), a mass flow meter (MFMD), and an outlet gas supply shut-off valve (MV4B) may be installed in series.

[0087] In addition, among the above-mentioned supply lines (OL1 ~ OL3), the first supply line (OL1) has an inlet-side gas supply shut-off valve (MV5A), a supply line pressure sensor (PT3A), and an outlet-side gas supply shut-off valve (MV6A) installed in series; the second supply line (OL2) has an inlet-side gas supply shut-off valve (MV5B), a supply line pressure sensor (PT3B), and an outlet-side gas supply shut-off valve (MV6B) installed in series; the third supply line (OL1) has an inlet-side gas supply shut-off valve (MV5C), a supply line pressure sensor (PT3C), and an outlet-side gas supply shut-off valve (MV6C) installed in series; and the fourth supply line (OL1) has an inlet-side gas supply shut-off valve (MV5D), a supply line pressure sensor (PT3D), and an outlet-side gas supply A shut-off valve (MV6D) may be installed.

[0088] Below, a 4 x 4 type gas distribution device equipped with an auto-regulator (AREGC) and a mass flow meter (MFMC) as shown in FIG. 2 will be explained.

[0089] Among the components of the above 4 x 4 type gas distribution device, the plurality of supply devices (PI1 to PI4) each include a cylinder filled with gas and perform the function of supplying the same type of gas filled in each cylinder to the buffer tank (BT) through supply lines (IL1 to IL4) connected in a 1:1 ratio.

[0090] In addition, the plurality of supply lines (IL1 to IL4) are connected in parallel between the outlet of the supply device (PI1 to PI4) and the inlet of the buffer tank (BT), and perform the function of allowing gases supplied from the supply devices to flow.

[0091] At this time, the plurality of supply lines (IL1 ~ IL4) have a configuration in which one inlet gas supply shut-off valve (MV1A, MV2A, MV1B, MV2B), one auto valve (AV1A, AV2A, AV1B, AV2B), one plurality of auto regulators (AREGA, AREGB, AREGC, AREGD), one mass flow meter (MFMA ~ MFMD), and one outlet gas supply shut-off valve (MV3A, MV4A, MV3B, MV4B) are each installed in series as described above.

[0092] Among the above-mentioned components, the inlet side gas supply shut-off valves (MV1A, MV2A, MV1B, MV2B) include manual valves or automatic valves that operate manually or automatically, and are installed at the inlets of the supply lines (IL1 ~ IL4), respectively. They perform the function of allowing an administrator to manually open and close and shut off the gas supplied from the plurality of supply devices (PI1 ~ PI4) to the buffer tank (BT) side through each supply line (IL1 ~ IL4), or to automatically open and close and shut off the gas by the control unit.

[0093] In addition, the plurality of auto valves (AV1A, AV2A, AV1B, AV2B) are each installed at the rear of the inlet side gas supply shut-off valves (MV1A, MV2A, MV1B, MV2B) and are operated to open and close in response to the output signal of the control unit (1) to automatically control the gas flow.

[0094] The above-mentioned auto valves (AV1A, AV2A, AV1B, AV2B) perform the function of automatically opening to open the supply line and supply gas when the gas pressure flowing inside the supply line in which they are installed among the plurality of supply lines (IL1 ~ IL4) drops below a predetermined set pressure and air is supplied for supply control.

[0095] In addition, the plurality of auto regulators (AREGA, AREGB, AREGC, AREGD) can change the gas pressure flowing through each supply line while installed in the front or rear portions of the auto valves (AV1A, AV2A, AV1B, AV2B).

[0096] For example, multiple auto regulators (AREGA, AREGB, AREGC, AREGD) can each adjust the gas supply pressure according to the input setting pressure.

[0097] In addition, the mass flow meters (MFMA ~ MFMD) are each installed at the rear of the auto valves (AV1A, AV2A, AV1B, AV2B) or auto regulators (AREGA, AREGB, AREGC, AREGD), and perform the function of transmitting the mass flow rate of the gas flowing inside the supply lines (IL1 ~ IL4) to the control unit (1).

[0098] Unlike volumetric flow meters that measure the flow velocity of gases and liquids, the aforementioned mass flow meter (MFM) determines the flow rate by measuring heat convection transfer on the flow surface using a temperature sensor attached to the flow or piping, and can precisely and accurately measure a wide range of temperatures.

[0099] Additionally, the mass flow meter (MFM) includes either a thermal mass flow meter or a Coriolis flow meter. When passing through a vibrating tube equipped with sensors at the inlet and outlet, the mass of the fluid is measured by the inertia of the fluid, and the vibration of the tube causes vibrations proportional to the mass of the fluid, thereby allowing the control unit (1) to calculate the mass flow rate of the gas.

[0100] In this way, in another embodiment of the present invention, the flow rate of gas filled into the buffer tank (BT) through each supply line (IL1 to IL4) can be automatically controlled by controlling the pressure using a mass flow meter (MFM) and an auto regulator.

[0101] In addition, the plurality of outlet-side gas supply shut-off valves (MV3A, MV4A, MV3B, MV4B) include manual valves or automatic valves that are operated manually or automatically, and are each installed at the rear of the mass flow meters (MFMA ~ MFMD), and perform the function of allowing an administrator to manually open and close and shut off the gas supplied from the plurality of supply devices (PI1 ~ PI4) to the buffer tank (BT) side through each supply line (IL1 ~ IL4), or to automatically open and close and shut off the gas by the control unit.

[0102] Meanwhile, the buffer tank (BT) is equipped with a pressure sensor (PT2) that detects and displays the pressure inside the tank, and performs the function of storing gases delivered through the supply lines (IL1 ~ IL4) connected in parallel and stably supplying them to the gas consumption point.

[0103] The above buffer tank (BT) is connected to a plurality of supply lines (IL1 to IL4) and a plurality of supply lines (OL1 to OL4) by a reducer, and is composed of a pipe having a larger diameter than the plurality of supply lines (IL1 to IL4) and the plurality of supply lines (OL1 to OL4).

[0104] For example, the buffer tank (BT) may be composed of a plurality of supply lines (IL1 to IL4) and a plurality of demand supply lines (OL1 to OL4) that may be 1 / 4" or 1 / 2", and may have a pipe diameter of 1" or more than that.

[0105] In addition, it may be desirable for the buffer tank (BT) to have a pipe diameter of 8 inches or less so as not to increase the external size of the distribution device.

[0106] Meanwhile, the control unit (1) can stop supplying gas by closing the auto valves (AV1A, AV2A, AV1B, AV2B) and a plurality of auto regulators (AREGA, AREGB, AREGC, AREGD) when the MFC supply amount rises above the set pressure range, and can supply gas to the buffer by opening the auto valves (AV1A, AV2A, AV1B, AV2B) and a plurality of auto regulators (AREGA, AREGB, AREGC, AREGD) when the pressure drops below the set pressure range.

[0107] For example, the control unit (1) detects the pressure inside the buffer tank through the pressure sensor (PT2) installed in the buffer tank (BT), and if the pressure drops below the set pressure, it increases the pressure of a plurality of auto regulators (AREGA, AREGB, AREGC, AREGD) to stably supply gas to the gas consumption location.

[0108] In addition, the control unit (1) can set a plurality of lower limits for the set pressure ranges, and when the pressure of the buffer reaches the lower limit of each set pressure range or when the pressure does not increase for a certain period of time, it can increase the pressure of the plurality of auto regulators (AREGA, AREGB, AREGC, AREGD) to regulate the pressure of the buffer tank.

[0109] In addition, the control unit (1) can supply gas to the buffer by opening the auto valve (AV1A, AV2A, AV1B, AV2B) and a plurality of auto regulators (AREGA, AREGB, AREGC, AREGD) when the pressure of the buffer tank reaches the highest first set pressure among the lower limits of the set pressure range while the gas supply is interrupted because the buffer tank has reached the upper limit of the set pressure range.

[0110] Here, the control unit (1) can regulate the pressure of a plurality of auto regulators (AREGA, AREGB, AREGC, AREGD) to increase the pressure and supply gas when the pressure of the buffer tank drops below the highest first pressure among the lower limits of the set pressure range and reaches the second pressure setting value, or when the pressure of the buffer tank does not increase even after a certain period of time has elapsed.

[0111] Additionally, the plurality of gas demand supply lines (OL1~OL4) are connected in parallel between the outlet of the buffer tank (BT) and the gas demand locations, and perform the function of supplying the gas stored in the buffer tank (BT) to each gas demand location.

[0112] At this time, the plurality of supply lines (OL1~OL4) have a configuration in which, as described above, one gas supply shut-off valve (MV5A, MV5B, MV5C, MV5D), one pressure sensor (PT3A~PT3D), and one gas supply shut-off valve (MV6A, MV6B, MV6C, MV6D) are each installed in series.

[0113] Among the above components, the gas supply shut-off valves (MV5A, MV5B, MV5C, MV5D) at the initial inlet side include manual valves or automatic valves that are operated manually or automatically, and are installed at the inlets of the supply lines (OL1~OL4) respectively. They perform the function of allowing a manager to manually open and close and shut off the process gas supplied from the buffer tank (BT) to the gas users through the respective supply lines (OL1~OL4), or to automatically open and close and shut off the gas by the control unit.

[0114] In addition, the above-mentioned plurality of supply line pressure sensors (PT3A ~ PT3D) are each installed at the rear of the gas supply shut-off valves (MV5A, MV5B, MV5C, MV5D) and perform the function of detecting the pressure of the gas supplied to the supply line (OL1 ~ OL4) through each supply line and displaying it for each supply line.

[0115] In addition, the plurality of discharge-side gas supply shut-off valves (MV6A, MV6B, MV6C, MV6D) include manual valves or automatic valves that operate manually or automatically, and are installed at the discharge ports of the supply lines (OL1~OL4) respectively. They perform the function of allowing an administrator to manually open and close the process gas supplied from the buffer tank (BT) to the gas users through the respective supply lines (OL1~OL4), or to automatically open and close the process gas by the control unit.

[0116] In addition, the control unit (1) performs an overall control function for a gas distribution device to which another embodiment of the present invention is applied, including the plurality of auto valves (AV1A, AV2A, AV1B, AV2B) and the plurality of mass flow meters (MFMA ~ MFMD).

[0117] Accordingly, the device of the present invention can provide a buffer for controlling the consumed flow rate, and can provide a buffer that allows for time for changing the flow rate and prevents supply interruption due to insufficient flow rate.

[0118] In addition, a direct line is provided (with additional valves) to prevent supply interruption in the event of a buffer malfunction. If the buffer is configured to be filled at a pressure higher than the required pressure (set pressure range) from the process line, the MFC can automatically increase the pressure by raising the flow rate if the pressure within the buffer drops below the set pressure range.

[0119] In addition, although the city has been omitted, the gas distribution device to which the present invention is applied includes an input section, allowing the user to input and adjust the required flow rate.

[0120] In addition, information on the remaining amount of gas in a gas container can be received from multiple supply devices and provided to a display device equipped in the gas distribution device to be provided to the user, and the user can check the display device and adjust the flow rate of each line in the distribution device to adjust the required flow rate. That is, it includes an interface means.

[0121] In addition, the gas distribution device to which the present invention is applied can calculate the depletion time based on the supply flow rate and display it on a display device or provide it to an integrated control server.

[0122] In addition, the distribution device receives information on the remaining amount of gas or the replacement time from multiple supply devices, calculates the flow rate according to the replacement time in the control unit, and can adjust the flow rate of each line. It can also adjust the flow rate of each line according to the process supply flow rate to control the cylinder replacement time, calculate the replacement time, and display it on a display device or provide it to an integrated control server.

[0123] Meanwhile, FIG. 3 shows a schematic block diagram of an integrated control system using the devices of the present invention described above.

[0124] According to this, the integrated control system using the gas distribution device of the present invention largely comprises the gas supply device (31), the valve distribution system (32), the gas distribution device (33), the process equipment (34), and the control server (35).

[0125] In addition, the integrated control system to which the present invention is applied may further include a system management computer and an administrator terminal, although the city has been omitted.

[0126] At this time, the gas supply device (31) may include at least two cylinders that fill with the same type of gas and supply it to the gas distribution device (33), and performs the function of supplying gas to the gas distribution device (33) through the valve distribution system (32), as well as the function of providing information on the remaining amount and pressure of the gas in each cylinder in real time to the control server (35) through a communication unit or communication line not shown.

[0127] In addition, the valve distribution system (32) performs the function of distributing the gas supplied from the gas supply device (31) to the gas distribution devices (33), as well as the function of providing real-time information on the distribution status of each gas to the control server through a communication unit or a communication line.

[0128] In addition, the gas distribution device (33) is installed in at least two units corresponding to the number of gas supply devices (31) installed, and distributes the gas supplied from the gas supply devices (31) through the valve distribution system (32) into multiple units by line, and distributes it evenly to multiple process equipment (34) connected to the gas distribution device, and performs the function of providing various information such as gas flow rate and pressure in real time to a control server (35) through a communication unit or communication line, etc., which is not shown.

[0129] In addition, the plurality of process equipment (34) is configured such that 2 to 16 are connected to one gas distribution device (33), and performs the function of executing a predetermined semiconductor manufacturing process using gas supplied from each of the above-mentioned gas distribution devices (33), and simultaneously providing various manufacturing process information generated during the execution of the semiconductor manufacturing process to a control server (35) in real time through a communication unit or communication line, etc., which is not shown.

[0130] Additionally, the control server (35) is equipped with a system management computer (not shown) that executes programs necessary for system control and various information decoding programs, etc., and calculates the gas supply status, remaining amount, pressure, and cylinder replacement time using various information transmitted in real time from the gas supply devices (31), the valve distribution system (32), the gas distribution devices (33), and the process equipment (34), and displays this information on a display device or manager terminal equipped in the gas supply device (31) or gas distribution device (33), etc., while simultaneously performing overall control functions of the integrated control system.

[0131] By applying the integrated control system of the present invention, it is possible to accurately determine the overall supply status of gas supplied to multiple semiconductor manufacturing process equipment, as well as the remaining gas volume and pressure of gas supply devices, the replacement timing of cylinders, the gas distribution status of the valve distribution system, and the operating status of gas distribution devices from a remote location, and to display each status in real time on a display device.

[0132] Furthermore, by notifying each manager through manager terminals and enabling them to take necessary measures quickly, semiconductor manufacturing equipment can be managed more efficiently, yield can be significantly increased, product marketability and reliability can be improved, and production costs can be drastically reduced.

[0133] As described above, it is obvious to those skilled in the art that the present invention is not limited to the described embodiments and can be modified and varied in various ways without departing from the spirit and scope of the invention.

[0134] Accordingly, since the invention can be implemented in various other forms without departing from the technical concept or main features, the embodiments of the invention are merely examples in all respects and should not be interpreted restrictively, but can be implemented with various modifications.

[0135] In other words, although the detailed description of the present invention described above has been explained with reference to preferred embodiments of the invention, those skilled in the art or those with ordinary knowledge in the relevant technical field will understand that various modifications and changes can be made to the present invention without departing from the spirit and technical scope of the invention as described in the claims set forth below. Explanation of the symbols

[0136] 1 : Control unit PI1 ~ PI4: Supply devices IL1 ~ IL4: Supply Line BT: Buffer tank OL1 ~ OL4: Supply lines to end users MV1A, MV2A, MV1B, MV2B: Inlet side gas supply shut-off valve REG1 ~ REG4: Supply line regulators AREGA, AREGB, AREGC, AREGD : Auto Regulator PT1A ~ PT1D: Supply line pressure sensors AV1A, AV2A, AV1B, AV2B: Auto valve MFC, MFCA, MFCB, MFCC, MFCD: Mass Flow Controller MFM, MFMA, MFMB, MFMC, MFMD: Mass flow meters MV3A, MV4A, MV3B, MV4B: Outlet-side gas supply shut-off valve BT: Buffer tank OL1 ~ OL4: Supply lines to end users MV5A, MV5B, MV5C, MV5D: Inlet side gas supply shut-off valve PT3A ~ PT3D: Pressure sensors on the supply line to the end user MV6A, MV6B, MV6C, MV6D: Discharge-side gas supply shut-off valve 31: Gas supply device 32: Valve distribution system 33: Gas distribution device 34 : Process Equipment 35 : Control Server

Claims

Claim 1 A plurality of supply lines through which gases supplied from the supply devices flow are connected in parallel between the outlets of the plurality of supply devices supplying the same type of gas and the inlets of the buffer tank, wherein each of the supply lines comprises: an inlet-side gas supply shut-off valve that opens and closes manually or automatically; a supply line regulator that maintains a constant pressure of the gas flowing inside the supply line; a supply line pressure sensor that detects and displays the pressure of the gas inside the supply line; an auto valve that opens and closes in response to an output signal from a control unit to automatically control the gas flow; a mass flow controller that detects the gas flow rate through a built-in flow sensor and transmits it to the control unit, and precisely controls the mass flow rate of the gas by adjusting a built-in automatic shut-off valve according to a driving signal received from the control unit; and an outlet-side gas supply shut-off valve that opens and closes manually or automatically; a buffer tank equipped with a pressure sensor that stores gases delivered through the plurality of supply lines and supplies them to a plurality of gas consumption points; and a plurality of supply lines connected in parallel between the outlet of the buffer tank and the gas consumption points, wherein the gas stored in the buffer tank is supplied to each A plurality of gas supply lines provided to the above-mentioned gas demand locations, wherein each of the above-mentioned gas supply lines comprises: an inlet-side gas supply shut-off valve that is opened or closed manually or automatically; a gas supply line pressure sensor that detects and displays the pressure of the gas passing through the above-mentioned gas supply line; and an outlet-side gas supply shut-off valve that is opened or closed manually or automatically;A gas distribution device capable of controlling supply line pressure and flow rate using a mass flow rate controller, wherein the above-described control unit receives pressure information measured by a pressure sensor of the buffer tank, controls the flow rate of the mass flow rate controller provided in each of the plurality of supply lines so that the depletion time of the gas containers in the plurality of supply devices approaches a preset replacement cycle or minimizes the depletion deviation between the plurality of containers, and controls the pressure of the buffer tank to maintain a preset pressure range, and closes the auto valve or the mass flow rate controller when the pressure of the buffer tank exceeds the upper limit of the preset pressure range, and reopens the auto valve or the mass flow rate controller to supply gas to the buffer tank when the pressure of the buffer tank drops to the lower limit of the preset pressure range, and controls the flow rate of the mass flow rate controller to increase the supply of gas when the pressure of the buffer tank falls below the first preset pressure among the lower limits of the preset pressure range and reaches the second preset pressure or when the pressure does not increase even after a certain period of time. Claim 2 A gas distribution device capable of controlling supply line pressure and flow rate using a mass flow controller according to claim 1, wherein the control unit receives gas remaining amount information or replacement time information for each of the plurality of supply devices, calculates a target flow rate for each supply line based on the received gas remaining amount information and replacement time information so that the depletion time of gas containers in the plurality of supply devices approaches a preset replacement cycle or minimizes the depletion deviation between the plurality of containers, and individually controls the flow rate of the mass flow controller (MFC) provided in each of the plurality of supply lines so that the calculated target flow rate and the pressure of the buffer tank (BT) maintain a preset pressure range. Claim 3 In an integrated control system using a gas distribution device according to claim 1 or claim 2, the control unit included in the gas distribution device is configured to receive source status information related to the remaining gas amount, pressure, or weight from a plurality of supply devices, or to acquire distribution device operation information including current flow rate information of each supply line and current pressure information of the buffer tank through a sensor of the gas distribution device itself, and to receive or estimate actual gas consumption or related information from a plurality of connected process equipment or secondary distribution devices; the control unit comprehensively utilizes the acquired, received, or estimated source status information, distribution device operation information, and consumption location information to predict the gas depletion time of each supply device, support the replacement cycles of gas containers within the plurality of supply devices to be operated similarly or in a planned order, determine the possibility of flow rate shortage or supply fluctuation, and, if necessary, generate an alarm or record related information; and the control unit, based on the prediction and judgment results or a pre-set operation strategy, dynamically adjusts the target flow rate of each supply line defined in claim 1 or claim 2 or adjusts operation parameters, thereby [regarding] the total gas An integrated control system characterized by controlling the operation of the gas distribution device to achieve stability of the supply system and balanced consumption or planned sequential consumption of multiple supply devices, and further including interface means capable of displaying or transmitting relevant information externally so that an administrator can recognize information predicted by the control unit, generated alarms, and the current operating status of the gas distribution device.

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