Transport device inspection system including diagnostic server and method of operation thereof

Abstract

A conveyor device inspection system includes: a plurality of conveyors moving along a conveyor path; a diagnostic server generating inspection schedule information for the plurality of conveyors; an inspector receiving the inspection schedule information from the diagnostic server and sequentially inspecting the plurality of conveyors according to the inspection schedule information; and a conveyor device controller receiving the inspection schedule information from the inspector and controlling the plurality of conveyors to move sequentially to an inspection position according to the inspection schedule information.

Description

Technology Field

[0001] The present disclosure relates to a conveyor inspection system for inspecting a conveyor and a method of operating the same. Background Technology

[0002] Transport equipment that moves along ceiling-mounted rails is used to transport wafers for semiconductor manufacturing between process facilities. Since the transport equipment is positioned on ceiling rails, there is no way to check its status while it is in operation; consequently, maintenance is typically performed only after a breakdown occurs, which can affect the productivity of semiconductor manufacturing. Furthermore, because the transport equipment is constantly moving along the rails, stopping any single piece of equipment for inspection can obstruct the movement of other transport equipment. The problem to be solved

[0003] The objective according to the embodiments of the present disclosure is to provide a conveyor inspection system for efficiently inspecting a conveyor and a method of operating the same. means of solving the problem

[0004] The conveyor device inspection system of the present disclosure may include: a plurality of conveyors moving along a conveyor path; a diagnostic server generating inspection schedule information for the plurality of conveyors; an inspector receiving the inspection schedule information from the diagnostic server and sequentially inspecting the plurality of conveyors according to the inspection schedule information; and a conveyor device controller receiving the inspection schedule information from the inspector and controlling the plurality of conveyors to move sequentially to an inspection position according to the inspection schedule information.

[0005] The conveyor device inspection system of the present disclosure comprises: a plurality of conveyors moving along a conveyor path; a diagnostic server generating inspection schedule information for the plurality of conveyors; an inspector receiving the inspection schedule information from the diagnostic server and sequentially inspecting the plurality of conveyors according to the inspection schedule information; and a conveyor device controller receiving the inspection schedule information from the inspector and controlling the plurality of conveyors to move sequentially to an inspection position according to the inspection schedule information, wherein the inspector includes an inspection module that inspects the conveyors that have arrived at the inspection position, and the diagnostic server may include a diagnostic unit that receives the inspection results obtained by the inspector inspecting the conveyors and analyzes the inspection results to diagnose whether there is an abnormality in the conveyors.

[0006] The method of operation of the conveyor device inspection system of the present disclosure may include: generating inspection schedule information for a plurality of conveyor devices; moving the plurality of conveyor devices sequentially to an inspection location according to the inspection schedule information; inspecting the conveyor devices that have arrived at the inspection location; analyzing the inspection results for the conveyor devices to diagnose whether there is an abnormality in the conveyor devices; and moving the conveyor devices to a conveyor path or to an outlet of an inspector according to the diagnosis results for the conveyor devices. Effects of the invention

[0007] According to an embodiment of the present disclosure, by providing a conveyor device inspection system capable of automatically inspecting conveyor devices according to a preset inspection sequence, it is possible to inspect conveyor devices efficiently and safely and prevent a decrease in productivity of a semiconductor production line caused by conveyor device failure. Brief explanation of the drawing

[0008] FIG. 1 is a schematic diagram of a conveying device inspection system according to one embodiment of the present disclosure. Figure 2 is a flowchart illustrating the operation method of the return device inspection system of Figure 1. FIG. 3 is a block diagram exemplarily illustrating the configuration of the conveying device of FIG. 1. FIG. 4 is a cross-sectional view illustrating the conveying device of FIG. 1 in an exemplary manner. Figure 5 is a block diagram exemplarily illustrating the configuration of the diagnostic server of Figure 1. FIG. 6 is a block diagram exemplarily illustrating the configuration of the inspection device of FIG. 1. FIG. 7 is a drawing for explaining a return device inspection system according to one embodiment of the present disclosure. FIG. 8 is a diagram showing inspection schedule information generated by a diagnostic server according to one embodiment of the present disclosure. FIG. 9 is a drawing illustrating the movement of a conveying device in an inspection machine according to one embodiment of the present disclosure. FIG. 10 illustrates an inspection of a conveying device by a distance sensor included in an inspection device according to one embodiment of the present disclosure. FIG. 11 illustrates an inspection of a return device by a camera included in an inspection device according to one embodiment of the present disclosure. FIG. 12 illustrates an inspection of a conveying device by a measuring device included in an inspection device according to one embodiment of the present disclosure. FIG. 13 illustrates the operation of a lifter included in an inspection device according to one embodiment of the present disclosure. Specific details for implementing the invention

[0009] FIG. 1 is a schematic diagram of a conveying device inspection system according to one embodiment of the present disclosure.

[0010] Referring to FIG. 1, a conveyor inspection system (10) may include a plurality of conveyors (100), a conveyor controller (200), an inspector (300), and a diagnostic server (400). The conveyors (100) are devices for transporting logistics in a factory, for example, an Overhead Hoist Transfer (OHT). The logistics may be a sealed container for receiving wafers, for example, a Front Open Unified Pod (FOUP).

[0011] The conveying devices (100) can move along a conveying path installed in the factory. The conveying path is mainly installed on the factory ceiling and can be formed by rails. The conveying devices (100) can load logistics and then move along the conveying path to unload the logistics at a desired location. For example, the conveying devices (100) can move along the conveying path to send the logistics to appropriate semiconductor process equipment according to the semiconductor process sequence. In addition, the conveying devices (100) can move along the conveying path to an inspection location where an inspection can be performed when an inspection of the conveying devices (100) is required.

[0012] A conveyor device controller (200) can manage the overall movement and conveyance of conveyor devices (100). The conveyor devices (100) can move and convey logistics according to the control commands of the conveyor device controller (200). The conveyor device controller (200) can control the conveyor devices (100) to move to appropriate semiconductor process equipment according to the semiconductor process sequence so as to load or unload logistics. Additionally, the conveyor device controller (200) can control the conveyor devices (100) to move to an inspection location where they can be properly inspected according to inspection schedule information for the conveyor devices (100).

[0013] The inspector (300) can perform an inspection to check for abnormalities in the transport devices (100). The transport devices (100) can move along a transport path according to the control command of the transport device controller (200) and arrive at the inspection location sequentially. For example, the inspection location may correspond to the location of the inspector (300). The inspector (300) can perform an inspection on the transport devices (100) that have arrived at the inspection location. For example, the inspector (300) can inspect the appearance or operation of the transport devices (100).

[0014] The diagnostic server (400) can diagnose whether there is an abnormality in the return devices (100). The diagnostic server (400) receives inspection results for the return devices (100) from the inspector (300) and can diagnose whether there is an abnormality in the return devices (100) through the inspection results. The diagnostic server (400) can store the inspection results and / or diagnostic results.

[0015] The diagnostic server (400) can oversee inspections to check for abnormalities in the return devices (100). The diagnostic server (400) can generate inspection schedule information for the return devices (100). Inspection schedule information may refer to information regarding the inspection order for the return devices (100) to be inspected by the inspector (300). Specific details regarding the diagnostic server (400) generating inspection schedule information will be described later. The diagnostic server (400) can transmit the inspection schedule information to the return device controller (200) through the inspector (300). The return device controller (200) controls the return devices (100) according to the received inspection schedule information, and the inspector (300) can also inspect the return devices (100) according to the inspection schedule information.

[0016] The diagnostic server (400) can generate inspection schedule information for the return devices (100) based on information stored in the diagnostic server (400), generate it based on status information of the return devices (100) received from the return devices (100), and / or generate inspection schedule information by receiving information for performing an inspection (e.g., inspection target and / or inspection schedule) from a user.

[0017] Figure 2 is a flowchart illustrating the operation method of the return device inspection system of Figure 1.

[0018] Referring to FIG. 2, the diagnostic server (400) can generate inspection schedule information for the return devices (100) (S101). The diagnostic server (400) can transmit the inspection schedule information to the inspector (300) and transmit an inspection request for the return devices (100) to the inspector (300) (S102). The inspector (300) can receive the inspection schedule information and the inspection request from the diagnostic server (400). In response to the inspection request, the inspector (300) can request the return device controller (200) to move the return devices (100) to the inspector (300) along with the inspection schedule information (S103). The return device controller (200) can control the return devices (100) to move to the inspector (300) (i.e., the inspection location) in response to the move request from the inspector (300) (S104). The return device controller (200) can control the return devices (100) to move to the inspection device (300) according to the received inspection schedule information.

[0019] When at least one of the return devices (100) arrives at the inspection location or the entry point of the inspector (300) (S105), the arrived return device (100) may communicate with the inspector (300) to confirm to the inspector (300) that it has arrived at the inspection location or the entry point (S106). The entry point of the inspector (300) may be any location adjacent to the inspector (300) before the return device (100) arrives at the inspection location. When the return device (100) arrives at the entry point of the inspector (300), the inspector (300) may confirm the arrival of the return device (100) and then control the return device (100) to move to the inspection location. The inspector (300) may perform an inspection on the return device (100) that has arrived at the inspection location (S107). After the inspection device (300) performs an inspection on the return device (100), it can transmit the inspection result to the diagnosis server (400) (S108).

[0020] The diagnostic server (400) can analyze the received inspection results to diagnose whether there is an abnormality in the return device (100) that performed the inspection (S109). After performing a diagnosis by analyzing the inspection results, the diagnostic server (400) can request the inspection device (300) to move the return device (100) based on the diagnosis results (S110). For example, the diagnostic server (400) can request the movement of the return device (100) by transmitting the diagnosis results to the inspection device (300).

[0021] If the return device (100) is diagnosed as normal or requires inspection, the diagnosis server (400) may request the inspector (300) to move the return device (100) outside the inspector (i.e., inspection location) (S110). The inspector (300) may request the return device controller (200) to move the return device (100) outside the inspector (300) in accordance with the movement request (S111). Additionally, the inspector (300) may request the return device controller (200) to control the return device (100) outside the inspector (300). The return device controller (200) may move the return device (100) outside the inspector (300) in accordance with the movement request and the control request, and may control the movement and return of the return device (100) outside the inspector (300) (S112). That is, the return device controller (200) can control the return device (100), which is diagnosed as normal or requires inspection, to move away from the inspection device (300) and return the logistics along the return path.

[0022] If the return device (100) is diagnosed as being abnormal (or requiring emergency inspection), the diagnosis server (400) may request the inspector (300) to move the return device (100) to the discharge port via a lift (S110). The inspector (300) may move the return device (100) to the discharge port of the inspector (300) via a lift in response to the request for movement. For example, the return device (100) moved to the discharge port may undergo inspection or repair for the abnormal configuration.

[0023] In one embodiment, when the return device (100) is diagnosed as requiring inspection, the diagnosis server (500) outputs the diagnosis result to the user, receives control information for the return device (100) from the user, and may control the return device (100) according to the control information. For example, the user may control the return device (100) diagnosed as requiring inspection to move outside the inspection machine (300) to return logistics, or may control it to move to the discharge port via a lift to receive inspection.

[0024] FIG. 3 is a block diagram exemplarily illustrating the configuration of the conveying device of FIG. 1. FIG. 4 is a cross-sectional view exemplarily illustrating the conveying device of FIG. 1.

[0025] Referring to FIGS. 1, 3, and 4, a conveying device (100) may be suspended from a rail (RA) forming a conveying path. The conveying device (100) may include a main body (101), a driving device (110), a hoist (120), a sensor unit (130), and a control unit (140). The driving device (110), the hoist (120), the sensor unit (130), and the control unit (140) may be connected to the main body (101). An equipment name (ID) of the conveying device (100) may be inscribed on a portion of the surface of the main body (101).

[0026] The driving device (110) may include a driving unit (111) that enables the transport device (100) to move along a transport path. For example, the driving unit (111) may include a wheel (111a), a motor (111b) that drives it, and a steering unit (111c) that controls the direction of the wheel (111a). The driving device (110) may further include a driving signal generating unit (112). The driving signal generating unit (112) may generate driving information for the driving unit (111). For example, the driving information may include the speed (angular velocity) and / or torque of the motor (111b).

[0027] The hoist (120) is located inside the main body (101) and may include a handler (122) capable of loading or unloading goods and a hoist drive unit (121) that enables the handler (122) to move in a vertical or horizontal direction. Although not shown in the drawing, the hoist (120) may further include a hoist drive signal generator. For example, the hoist drive signal generator may generate drive information such as speed (angular velocity) and / or torque for a motor included in the hoist drive unit (121).

[0028] The sensor unit (130) is attached to the main body (101) and can detect the operating state of the conveying device (100) or the surrounding environment state of the conveying device (100). For example, the sensor unit (130) may include a trolley detection sensor (131), an obstacle detection sensor (132), a logistics detection sensor (133), and a tag recognition sensor (134). The trolley detection sensor (131) can detect whether there is another conveying device (100) in front of the conveying device (100). The obstacle detection sensor (132) can detect whether there is an obstacle on the travel trajectory of the conveying device (100). The logistics detection sensor (133) can detect whether logistics is loaded on the handler (122) of the hoist (120). The tag recognition sensor (134) can recognize a tag (TA) attached to the rail (RA) (i.e., the conveying path). In addition to the sensors described above, the sensor unit (130) may include sensors capable of detecting and measuring the driving state of the conveying device (100), such as vibration, noise, speed, etc., of the driving unit (111) or the hoist driving unit (121).

[0029] The control unit (140) can control the drive unit (110), the hoist (120), and the sensor unit (130) according to the control command of the conveying device controller (200). The control unit (140) can control the drive unit (111) of the drive unit (110) to move the conveying device (100) along the conveying path. The control unit (140) can control the hoist drive unit (121) to move the handler (122) up and down or left and right, and control the handler (122) to load logistics or provide logistics to process equipment. The control unit (140) can control the sensor unit (130) to detect the driving state of the conveying device (100) or the surrounding environment state of the conveying device (100).

[0030] The control unit (140) can receive status information including at least one of the driving signal of the driving unit (111), the driving signal of the hoist driving unit (121), the driving status of the transport unit (100), and tag recognition information from each of the driving signal generating unit (112) of the driving device (110), the hoist driving signal generating unit of the hoist (120), and the sensor unit (130). The control unit (140) can transmit the received status information to the diagnostic server (400). Although not shown in the drawing, the transport unit (100) further includes a communication unit, and the control unit (140) can transmit the status information to the diagnostic server (400) through the communication unit.

[0031] Figure 5 is a block diagram exemplarily illustrating the configuration of the diagnostic server of Figure 1.

[0032] Referring to FIGS. 1 and FIGS. 5, the diagnostic server (400) may include a diagnostic unit (401), a database (402), a scheduling unit (403), a display unit (404), and an interface unit (405). The diagnostic server (400) may further include a communication unit.

[0033] The diagnostic server (400) can receive status information for each of the return devices (100) from the return devices (100) through the communication unit. The diagnostic unit (401) can analyze the received status information to diagnose whether there is an abnormality in each of the return devices (100).

[0034] The diagnostic unit (401) can receive inspection results for the return devices (100) from the inspection device (300) through the communication unit. The diagnostic unit (401) can analyze the received inspection results to diagnose whether there is an abnormality in each of the return devices (100).

[0035] The diagnosis results diagnosed by the diagnosis unit (401) can be stored in the database (402) along with the test results. The diagnosis unit (401) can output the diagnosis results to the user through the display unit (404). The diagnosis results are stored in the database (402) and can be used later when the scheduling unit (403) generates test schedule information.

[0036] The database (402) can store information about the transport devices (100). As described above, the database (402) can store status information received from the transport devices (100), inspection results from inspections previously performed on the transport devices (100) by the inspector (300), and can also store diagnosis results in which the diagnostic unit (401) analyzes the status information and inspection results to diagnose whether there is an abnormality in each of the transport devices (100). For example, the database (402) can store information such as the usage of each transport device (100) (e.g., usage period), the number of times the transport devices (100) have been inspected, the number of times each transport device (100) has been diagnosed as having an abnormality, and / or configurations in which each transport device (100) had an abnormality. The database (402) can store at least one of the status information, inspection results, and diagnostic results for the return device (100) by corresponding it to the equipment name (ID) of the return device (100).

[0037] The scheduling unit (403) can generate inspection schedule information for the return devices (100). For example, the inspection schedule information may include the equipment name (ID) of the inspection targets among the return devices (100) to be inspected and the inspection order of the inspection targets. The scheduling unit (403) can provide the inspection schedule information to the inspector (300) through the communication unit.

[0038] In one embodiment, the scheduling unit (403) may receive diagnostic results from the diagnostic unit (401) and generate inspection schedule information based on the diagnostic results. For example, when the diagnostic unit (401) receives status information of the transport devices (100) from the transport devices (100) and the diagnostic unit (401) analyzes the status information to generate diagnostic results, the scheduling unit (403) may receive the diagnostic results from the diagnostic unit (401) and generate inspection schedule information based on the diagnostic results. When the diagnostic unit (401) receives inspection results for the transport devices (100) from the inspector (300) and the diagnostic unit (401) analyzes the inspection results to generate diagnostic results, the scheduling unit (403) may receive the diagnostic results from the diagnostic unit (401) and generate inspection schedule information based on the diagnostic results. For example, the scheduling unit (403) can generate inspection schedule information for the return devices (100) that have been diagnosed as having an abnormality among the return devices (100) that have transmitted status information according to the diagnosis result. The scheduling unit (403) can determine the order for the return devices (100) that have been diagnosed as having an abnormality to undergo inspection through the inspector (300).

[0039] In one embodiment, the scheduling unit (403) can generate inspection schedule information based on information stored in the database (402). The scheduling unit (403) can determine the inspection order for the transport devices (100) based on information stored in the database (402). For example, the scheduling unit (403) can generate inspection schedule information so that inspections are performed first on the transport device (100) that has been diagnosed as having an abnormality more frequently among the transport devices (100). For example, if the first transport device has been diagnosed as having an abnormality 3 times, the second transport device has been diagnosed as having an abnormality 2 times, and the third transport device has been diagnosed as having an abnormality 5 times, the scheduling unit (403) can set the inspection order of the third transport device as 1st priority, the inspection order of the first transport device as 2nd priority, and the inspection order of the second transport device as 3rd priority.

[0040] For example, the scheduling unit (403) can generate inspection schedule information so that inspections can be performed first on the return device (100) that has been inspected less frequently among the return devices (100). For example, if the first return device (100) has been inspected 5 times previously, the second return device (100) has been inspected 3 times previously, and the third return device (100) has been inspected 1 time previously, the scheduling unit (403) can set the inspection order of the third return device (100) as 1st priority, the inspection order of the second return device (100) as 2nd priority, and the inspection order of the first return device (100) as 3rd priority.

[0041] For example, the scheduling unit (403) may generate inspection schedule information based on the number of times the return devices (100) have been diagnosed as having an abnormality and the number of times the return devices (100) have been inspected. For example, the scheduling unit (403) may determine the inspection order based on the number of times the return devices (100) have been diagnosed as having an abnormality, but for return devices (100) that have been diagnosed as having an abnormality the same number of times, the priority may be determined based on the number of times they have been inspected. Alternatively, the scheduling unit (403) may determine the inspection order based on the number of times they have been inspected, but for return devices (100) that have been inspected the same number of times, the priority may be determined based on the number of times they have been diagnosed as having an abnormality.

[0042] In one embodiment, the scheduling unit (403) can generate inspection schedule information based on information received from the user. The scheduling unit (403) can receive information from the user to generate inspection schedule information through the interface unit (405). The user can specify an inspection target among the return devices (100) to be inspected and determine the inspection order for the inspection targets through the display unit (404) and the interface unit (405). The display unit (404) can output information about the return devices (100) to the user based on information stored in the database (402), and the user can check the information about the return devices (100) through the display unit (404) and, based on this, input an inspection target and an inspection order through the interface unit (405). The scheduling unit (403) can generate inspection schedule information according to the inspection target and inspection order input by the user through the interface unit (405).

[0043] FIG. 6 is a block diagram exemplarily illustrating the configuration of the inspection device of FIG. 1.

[0044] Referring to FIGS. 1 and FIGS. 6, the inspector (300) may include a control unit (301), an inspection module (302), a display unit (303), an interface unit (304), and a lifter (305). The inspector (300) may further include a communication unit.

[0045] The control unit (301) can receive inspection schedule information from the diagnostic server (400). The control unit (301) can receive inspection schedule information through the communication unit. The control unit (301) can transmit the received inspection schedule information to the return device controller (200). By transmitting the inspection schedule information to the return device controller (200), the control unit (301) can request the return device controller (200) to move the return devices (100) according to the inspection schedule information.

[0046] When the transport device (100) arrives at an inspection location or the entry point of the inspection machine (300), the control unit (301) can communicate with the transport device (100) to confirm the arrival of the transport device (100). After confirming the arrival, the control unit (301) can check through the inspection module (302) whether the transport device (100) is currently a subject for inspection. For example, the control unit (301) can control the camera (302a) included in the inspection module (302) to photograph the equipment name (e.g., ID) of the transport device (100) that has arrived at the inspection location. The control unit (301) can analyze the captured image to recognize the equipment name and then compare the recognized equipment name with the inspection schedule information. The control unit (301) can determine whether the transport device (100) with the recognized equipment name is a transport device corresponding to the inspection priority that must currently be inspected. Alternatively, the control unit (301) can communicate with the return device (100) that has arrived at the inspection location or the entry point of the inspection device (300) and receive the equipment name from the return device (100) to determine whether the return device (100) is a return device corresponding to the current inspection ranking.

[0047] If the return device (100) that has arrived at the inspection location or the entry of the inspection device (300) is a return device corresponding to the inspection priority for which an inspection must currently be performed, the control unit (301) can control the inspection module (302) to perform an inspection on the return device (100). For example, if the return device (100) that has arrived at the entry of the inspection device (300) is a return device corresponding to the inspection priority for which an inspection must currently be performed, the control unit (301) can communicate with the return device (100) to control the return device (100) to move from the entry to the inspection location, and then perform an inspection.

[0048] The inspection module (302) can operate according to a control signal from the control unit (301) to perform an inspection on the return device (100) that has arrived at the inspection location. For example, the inspection module (302) may include at least one of a camera (302a), a measuring instrument (302b), and a distance sensor (302c). However, it is not limited thereto, and the inspection module (302) may also include other inspection devices capable of observing the state of the return device (100).

[0049] The control unit (301) can receive the inspection result of the return device (100) from the inspection module (302) and transmit it to the diagnosis server (400) through the communication unit. Alternatively, the inspection module (302) may directly transmit the inspection result to the diagnosis server (400) through the communication unit. The control unit (301) can receive the diagnosis result in which the diagnosis server (400) diagnoses whether there is an abnormality in the return device (100) through the inspection result. The control unit (301) can output the received diagnosis result to the display unit (303). The user can check the diagnosis result not only through the display unit (404) of the diagnosis server (400) but also through the display unit (303) of the inspection device (300).

[0050] The inspection unit (300) can receive control information regarding the inspection completed return device (100) from the user through the interface unit (304). The user can check the diagnosis results for the inspection completed return device (100) through the display unit (303) and input control information to the inspection unit (300) through the interface unit (304) regarding how to control the return device (100) according to the diagnosis results. The control unit (301) can receive control information through the interface unit (304) and control the return device (100) according to the control information. Alternatively, the control unit (301) can receive control information through the interface unit (304) and transmit it to the return device controller (200) through the communication unit.

[0051] The lifter (305) can move the return device (100) after the inspection is completed. The lifter (305) can lower the return device (100) and send it to the discharge port of the inspection device (300). The control unit (301) can control the lifter (305) according to the diagnosis result of the return device (100) received from the diagnosis server (400). For example, if the diagnosis result of the return device (100) received from the diagnosis server (400) is abnormal, the control unit (301) can control the lifter (305) to send the return device (100) to the discharge port. If the inspection result of the return device (100) received from the diagnosis server (400) is normal, the control unit (301) may not operate the lifter (305). The control unit (301) may allow the return device controller (200) to control the return device (100) when the inspection result of the return device (100) received from the diagnostic server (400) is normal. The return device controller (200) may control the return device (100) to move outside the inspection device (300). The return device controller (200) may control the return device (100) to move according to the process sequence. Alternatively, the control unit (301) may control the lifter (305) according to the control information received through the interface unit (304).

[0052] FIG. 7 is a drawing for explaining a return device inspection system according to one embodiment of the present disclosure. FIG. 8 is a drawing showing inspection schedule information generated by a diagnostic server according to one embodiment of the present disclosure.

[0053] Referring to FIGS. 1, FIGS. 4 and FIGS. 7, the transport devices (100) can move along a transport path (RA). A plurality of tags (TA) may be installed along the transport path (RA). The transport devices (100) can recognize the tags (TA) through a tag recognition sensor (134) provided by each of the transport devices (100). For example, the tags may consist of a barcode, text, an image, or a combination thereof. By recognizing the tags (TA), the transport devices (100) can generate location information indicating where the transport device (100) is located along the transport path (RA). The transport device controller (200) can determine where the transport device (100) is located along the transport path (RA) by receiving location information from the transport device (100), and can control the movement of the transport device (100) according to the location information.

[0054] The return path (RA) may include a first path (RA1) and a second path (RA2). For example, the first path (RA1) may be installed so that the return devices (100) can return logistics to process equipment, etc., while passing through the first path (RA1), and the second path (RA2) may be installed so that the return devices (100) can be inspected by an inspector (300) while passing through the second path (RA2). An inspector (300) may be installed in the second path (RA2). For example, the second path (RA2) may branch off from the first path (RA1). The return device controller (200) can control the return devices (100) to return logistics to appropriate process equipment while moving along the first path (RA1).

[0055] Referring to FIGS. 1, 7, and 8, the transport devices (100) can move along a first path (RA1) and a second path (RA2) according to inspection schedule information (1). When the transport device controller (200) receives inspection schedule information (1) from the inspector (300), it can control the transport devices (100) to move along the first path (RA1) and the second path (RA2) according to the inspection schedule information (1). The transport device controller (200) can control the transport devices (100) to sequentially enter the second path (RA2) and sequentially move to the inspector (300) (i.e., inspection location) according to the inspection order for the transport devices (100) included in the inspection schedule information (1). The return device controller (200) can control the return device (100) that is not in the current inspection order to not enter the second path (RA2) or arrive at the inspection device (300) while the return device (100) that is in the current inspection order moves to the inspection device (300) and receives an inspection from the inspection device (300) according to the inspection schedule information (1). Additionally, the return device controller (200) can control the return devices (100) that are not included as inspection targets in the received inspection schedule information (1) to continue moving along the first path (RA1) and return logistics to the appropriate process equipment.

[0056] In one embodiment, the conveying device inspection system may include first to fifth conveying devices (100a, 100b, 100c, 100d, 100e). However, this is merely an example, and the number of conveying devices that the present invention may include is not limited thereto. For example, the equipment name (ID) of the first conveying device (100a) may be ST01, the equipment name (ID) of the second conveying device (100b) may be ST02, the equipment name (ID) of the third conveying device (100c) may be ST03, the equipment name (ID) of the fourth conveying device (100d) may be ST04, and the equipment name (ID) of the fifth conveying device (100e) may be ST05.

[0057] The return device controller (200) can move the first to fourth return devices (100a, 100b, 100c, 100d) to the inspection device (300) in the order of the fourth return device (100d), the second return device (100b), the third return device (100c), and the first return device (100a) according to the inspection schedule information (1). First, the return device controller (200) can move the fourth return device (100d), which has the first priority in the inspection order, to the inspection device (300) or the entry part of the inspection device (300). The fourth return device (100d) can move along the first path (RA1) and arrive at a first location where the first tag (TA1) is located. For example, the first location where the first tag (TA1) is located may be a branching point between the first path (RA1) and the second path (RA2). The fourth transport device (100d) recognizes the first tag (TA1) through a tag recognition sensor and generates tag recognition information, and the transport device controller (200) receives the tag recognition information and can know that the transport device controller (200) has arrived at the first location. The transport device controller (200) can control the fourth transport device (100d) that has arrived at the first location to enter the second path (RA2). The fourth transport device (100d) can move toward the inspector (300) located on the second path (RA2). The second tag (TA2) may be installed at the inspection location of the inspector (300). Alternatively, the fourth transport device (100d) may arrive at the entry point of the inspector (300) first. Upon arriving at the entry point, the fourth transport device (100d) can communicate with the inspector (300) to notify the inspector (300) that it has arrived at the entry point. The inspector (300) can move the fourth conveyor (100d) to the inspection position after confirming whether the fourth conveyor (100d) is equipment corresponding to the current inspection ranking. In one embodiment, the fourth conveyor (100d) may notify the inspector (300) that it has arrived at the first position from the first position.The inspector (300) may move the fourth conveyor (100d) to the inspection position after confirming whether the fourth conveyor (100d) that arrived at the first position is equipment corresponding to the current inspection ranking.

[0058] The return device controller (200) can control the first to third return devices (100a, 100b, 100c) so that they do not enter the second path (RA2) while the fourth return device (100d) is being inspected at the inspection location. For example, the return device controller (200) can have the second return device (100b) wait at the first location when the second return device (100b), which is immediately next in rank (e.g., rank 2) to the current inspection rank (e.g., rank 1), arrives at the first location. When a return device controller (200) arrives at a first location that is not immediately next in rank to the current inspection rank (e.g., rank 1) (e.g., rank 3, rank 4, or not subject to inspection), the return device (100c, 100a, 100e) that arrived at the first location can be moved to a location with a third tag (TA3) on the first path (RA1).

[0059] In one embodiment, the return device controller (200) can pre-align the first to third return devices (100a, 100b, 100c) around the first position in the order of inspection so that the first to third return devices (100c) can be moved to the inspector (300) in the order of inspection after the inspection of the fourth return device (100d) is completed.

[0060] After the inspection of the fourth return device (100d) is completed, the fourth return device (100d) may be removed from the inspection location. The inspector (300) may move the fourth return device (100d) to the discharge port via a lifter, or the return device controller (200) may re-enter the fourth return device (100d) into the first path (RA1). If the fourth return device (100d) is moved to the discharge port via a lifter, the inspector (300) may move the fourth return device (100d) to the location where the fourth tag (TA4) is installed on the second path (RA2).

[0061] When the fourth conveyor device (100d) moves away from the inspection position, the conveyor device controller (200) can move the second conveyor device (100b), which has an inspection rank of 2, to the inspection position. The process of moving the second conveyor device (100b) to the inspection position can be repeated in the same way as the process of moving the fourth conveyor device (100d) described above to the inspection position. Subsequently, the process described above can be applied sequentially in the same way to the third conveyor device (100c), which has an inspection rank of 3, and the first conveyor device (100a), which has an inspection rank of 4.

[0062] FIG. 9 is a diagram illustrating the movement of a conveyor device in an inspection device according to one embodiment of the present disclosure. FIG. 10 illustrates the inspection of a conveyor device by a distance sensor included in an inspection device according to one embodiment of the present disclosure. FIG. 11 illustrates the inspection of a conveyor device by a camera included in an inspection device according to one embodiment of the present disclosure. FIG. 12 illustrates the inspection of a conveyor device by a measuring device included in an inspection device according to one embodiment of the present disclosure. FIG. 13 illustrates the operation of a lifter included in an inspection device according to one embodiment of the present disclosure.

[0063] Referring to FIGS. 7 and 9, the second path (RA2) may include a first rail (R1) and a second rail (R2). The first rail (R1) may branch off from the first path (RA1). The first rail (R1) may be spaced apart from the first path (RA1) so that vibrations from the first path (RA1) are not transmitted to the first rail (R1). The second rail (R2) may branch off from the first path (RA1). The second rail (R2) may be located between the first rail (R1) and the first path (RA1). The second rail (R2) may be spaced apart from the first path (RA1) so that vibrations from the first path (RA1) are not transmitted to the second rail (R2). The second rail (R2) may also be spaced apart from the first rail (R1) or may be detachably connected to the first rail (R1).

[0064] Referring to FIGS. 9 through 13, the inspection device (300) may include a panel (P), a port (310), a camera (302a), a measuring device (302b), a lifter (305), and a discharge port (390). The panel (P) may be located on a second path (RA2). The panel (P) may enclose at least a portion of the first rail (R1) and the second rail (R2) of the second path (RA2). The panel (P) may be located on the upper surface and both sides of the second path (RA2) and may be open in a downward direction. The transport device (100) may pass through the interior of the panel (P) while passing through the second path (RA2). The panel (P) may prevent light from being emitted to the outside when the inspection device (300) photographs the transport device (100) using the camera (302a).

[0065] Referring to FIGS. 6, 9, and 10, the port (310) may be located below the first rail (R1). The port (310) may be equipped with a distance sensor (302c). The distance sensor (302c) can determine whether the handler (122) of the conveyor device (100) maintains a horizontal position when moving up and down. For example, a plurality of distance sensors (302c) may be spaced apart from each other on the port (310), and each of the plurality of distance sensors (302c) may measure the distance to the lower surface of the handler (122). The control unit (301) of the inspector (300) transmits the measured distance to the diagnostic server (400), and the diagnostic unit (401) of the diagnostic server (400) can diagnose whether the conveyor device (100) is abnormal by checking whether the handler (122) maintains a horizontal position based on the measured distance.

[0066] Referring to FIGS. 6, FIGS. 9 and FIGS. 11, the inspection device (300) may include a camera (302a). The camera (302a) is located on the inner side of the panel (P) and may also be located on the outer side. The camera (302a) can photograph the exterior of the transport device (100) that has arrived at the first rail (R1). The camera (302a) may be installed in a position that facilitates photographing each component of the transport device (100) that has arrived at the first rail (R1).

[0067] In one embodiment, logistics may be provided on the port (310). The transport device (100) may load the logistics provided on the port (310). Alternatively, the transport device (100) may place the logistics that was being loaded onto the port (310). The camera (302a) may capture the transport device (100) loading or placing the logistics.

[0068] The control unit (301) of the inspection device (300) transmits a video or image captured by the camera (302a) to the diagnosis server (400), and the diagnosis unit (401) of the diagnosis server (400) analyzes the video or image captured to diagnose whether there is an abnormality in the return device (100).

[0069] Referring to FIGS. 6, FIGS. 9 and FIGS. 12, the inspection device (300) may include a measuring device (302b). The measuring device (302b) is located on the inner side of the panel (P) and may also be located on the outer side. The measuring device (302b) can inspect the condition of the sensors (130) included in the conveyor device (100) that has arrived at the first rail (R1). The measuring device (302b) can receive light emitted by the sensors (130) to measure the amount of light or confirm the location where the sensors (130) are emitting light.

[0070] The control unit (301) of the inspection device (300) transmits the results of measuring light from the sensors (130) to the diagnosis server (400), and the diagnosis unit (401) of the diagnosis server (400) analyzes the results of measuring light to diagnose whether there is an abnormality in the return device (100).

[0071] Referring to FIGS. 1 and FIGS. 9 through 12, the inspector (300) can perform an inspection on the return device (100) that has arrived at the first rail (R1). The inspector (300) can inspect for abnormalities in the return device (100) using a camera (302a), a measuring instrument (302b), and a distance sensor (302c). After completing the inspection of the return device (100), the inspector (300) can move the return device (100) to the second rail (R2). After completing the inspection of the return device (100), the inspector (300) can transmit the inspection results to the diagnosis server (400) and receive a diagnosis result from the diagnosis server (400) that diagnoses whether there are abnormalities in the return device (100) based on the inspection results. The inspector (300) can control the return device (100) to pass through the second rail (R2) and re-enter the first path (RA1) when the diagnosis result is normal.

[0072] Referring to FIG. 13, the lifter (305) can move the second rail (R2) up and down. For example, the lifter (305) may have a configuration in which a belt (305b) or a chain is connected to a rotating body (305a) that is rotated by a motor, and the second rail (R2) may be connected to the belt (305b) or the chain. The lifter (305) can move the second rail (R2) up and down according to the movement of the belt or chain. However, the configuration of the lifter (305) is not limited thereto, and other embodiments capable of moving the second rail (R2) up and down may be applied.

[0073] In one embodiment, if it is determined that the conveying device (100) is malfunctioning, the lifter (305) can lower the second rail (R2). The second rail (R2) can be lowered via the lifter (305) and aligned with the third rail (RA3) located at the discharge port (390). The conveying device (100) can move to the discharge port (390) via the third rail (RA3).

[0074] Although embodiments according to the technical concept of the present invention have been described above with reference to the attached drawings, those skilled in the art will understand that the present invention may be implemented in other specific forms without changing its technical concept or essential features. The embodiments described above should be understood as illustrative in all respects and not restrictive. Explanation of the symbols

[0076] 100: Return device 110: Driving device 120: Hoist 130: Sensor unit 140: Control unit 200: Return device controller 300: Inspector 301: Control unit 302: Inspection Module 303: Display Unit 304: Interface section 305: Lifter 400: Diagnostic Server 401: Diagnostic Unit 402: Database 403: Scheduling Department 404: Display unit 405: Interface unit

Claims

Claim 1 A conveyor device inspection system comprising: a plurality of conveyor devices moving along a conveyor path; a diagnostic server generating inspection schedule information for the plurality of conveyor devices; an inspector receiving the inspection schedule information from the diagnostic server and sequentially inspecting the plurality of conveyor devices according to the inspection schedule information; and a conveyor device controller receiving the inspection schedule information from the inspector and controlling the plurality of conveyor devices to move sequentially to an inspection position according to the inspection schedule information, wherein the inspector includes an inspection module that inspects a conveyor device at the inspection position and a control unit that receives an inspection result from the inspection module and transmits it to the diagnostic server, and the diagnostic server includes a diagnostic unit that analyzes the inspection result to diagnose whether there is an abnormality in the conveyor device and transmits the diagnostic result to the inspector, and a scheduling unit that generates the inspection schedule information based on the diagnostic result. Claim 2 A conveyor device inspection system according to claim 1, wherein the conveyor device controller moves a conveyor device corresponding to the current inspection order among the plurality of conveyor devices to the inspection position according to the inspection schedule information, and controls conveyor devices not corresponding to the current inspection order not to move to the inspection position. Claim 3 delete Claim 4 A conveyor inspection system according to claim 1, wherein the control unit communicates with a conveyor that has arrived at the entry of the inspection device to confirm the arrival of the conveyor and to confirm whether the conveyor is a conveyor corresponding to the current inspection ranking. Claim 5 delete Claim 6 A conveyor device inspection system according to claim 1, wherein the control unit requests the conveyor device controller to move the conveyor device outside the inspection position when the diagnosis result is normal or requires inspection, and moves the conveyor device to the discharge port of the inspection device when the diagnosis result is abnormal. Claim 7 A return device inspection system according to claim 1, wherein the diagnostic server includes a database that stores the diagnostic results, and the scheduling unit generates the inspection schedule information based on the diagnostic results stored in the database. Claim 8 In claim 7, the diagnostic server further comprises: a display unit for outputting the diagnostic result; and an interface unit for receiving information from a user to generate the inspection schedule information, and the scheduling unit generates the inspection schedule information based on the information received through the interface unit, a return device inspection system. Claim 9 A conveyor device inspection system comprising: a plurality of conveyors moving along a conveyor path; a diagnostic server generating inspection schedule information for the plurality of conveyors; an inspector receiving the inspection schedule information from the diagnostic server and sequentially inspecting the plurality of conveyors according to the inspection schedule information; and a conveyor device controller receiving the inspection schedule information from the inspector and controlling the plurality of conveyors to move sequentially to an inspection position according to the inspection schedule information, wherein the inspector includes an inspection module that inspects the conveyors that have arrived at the inspection position, and the diagnostic server includes a diagnostic unit that receives the inspection result of the inspector inspecting the conveyors, analyzes the inspection result to diagnose whether there is an abnormality in the conveyors, and generates a diagnostic result, wherein the diagnostic server generates the inspection schedule information based on the diagnostic result, and the diagnostic unit transmits the diagnostic result to the inspector. Claim 10 In claim 9, the conveyor device controller moves the conveyor device corresponding to the current inspection order among the plurality of conveyor devices to the inspection position according to the inspection schedule information, and controls the conveyor devices not corresponding to the current inspection order not to move to the inspection position, a conveyor device inspection system.

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