Sheet having multiple faces of vapor chamber intermediary body, roll having sheet having multiple faces of vapor chamber intermediary body wound thereon, vapor chamber intermediary body and manufacturing method of vapor chamber

Abstract

It has a plurality of first channels and a second channel provided between adjacent first channels, a layer having a groove that becomes the first channel and the second channel, and a layer laminated on the inside of the groove that forms the inner surface of the first channel and the second channel.

Description

Technology Field

[0001] The present disclosure relates to a vapor chamber that performs heat transport by recirculating a working fluid enclosed in a sealed space while undergoing a phase change. Background Technology

[0002] The amount of heat generated from electronic components, such as CPUs (Central Processing Units), in personal computers and portable devices like mobile phones and tablets tends to increase with the improvement of information processing capabilities, making cooling technology important. Heat pipes are well known as a means for such cooling. This cools the heat source by diffusing the heat from the heat source to other parts through a working fluid enclosed within the pipe.

[0003] Meanwhile, in recent years, particularly in portable terminals, thinning has become significant, and a cooling means thinner than conventional heat pipes has become necessary. In contrast, vapor chambers such as those described in Patent Documents 1 to 3 have been proposed.

[0004] A vapor chamber is a device that applies the concept of heat transport by heat pipes to a flat plate-shaped component. In other words, a working fluid is enclosed between opposing plates in a vapor chamber, and this working fluid performs heat transport by circulating while undergoing a phase change, thereby transporting and diffusing heat from a heat source to cool the heat source.

[0005] More specifically, a flow path for the working fluid is formed between the opposing plates of the vapor chamber, and the working fluid is sealed within this path. When the vapor chamber is placed near a heat source, the working fluid near the heat source absorbs heat from the source, evaporates, becomes a gas (vapor), and moves through the flow path. This allows heat from the heat source to be smoothly transported to a location away from the heat source, thereby cooling the heat source. The working fluid in a gaseous state, having transported heat from the heat source, moves to a location away from the heat source, cools and condenses as it absorbs heat from the surroundings, and undergoes a phase change to a liquid state. The working fluid in the phase-changed liquid state returns to the location of the heat source through another flow path, where it absorbs heat from the heat source again, evaporates, and changes back into a gaseous state.

[0006] Through the circulation described above, heat generated from the heat source is transported to a location separated from the heat source, thereby cooling the heat source. Prior art literature

[0007] Patent Publication No. 5788069, Japanese Patent Publication No. 2016-205693, Patent Publication No. 6057952 The problem to be solved

[0008] The first objective of the present disclosure is to provide a vapor chamber that can obtain the required strength even when thinned.

[0009] A second objective of the present disclosure is to provide a vapor chamber capable of increasing heat transport capacity even when having a flow path with changing direction.

[0010] A third objective of the present disclosure is to provide an intermediate in which it is difficult for an oxide film to form on the inner surface of a channel through which a working fluid flows. means of solving the problem

[0011] A first aspect of the present disclosure is a vapor chamber in which an operating fluid is sealed in a sealed space provided on the inside, wherein the sealed space has a plurality of first flow paths and a second flow path provided between adjacent first flow paths, and the average flow path cross-sectional area of ​​two adjacent first flow paths is A g ...and the average cross-sectional area of ​​a plurality of second euros arranged between adjacent first euros is A l At the time it was said, at least in some parts A l is A g It is a vapor chamber having a layer having a groove that is 0.5 times or less of the first and second flow paths, and a layer laminated on the inner side of the groove that forms the inner surface of the first and second flow paths.

[0012] A second aspect of the present disclosure is a vapor chamber in which an operating fluid is sealed in a sealed space, wherein the sealed space is provided with a condensate flow path, which is a flow path through which the operating fluid moves in a condensate state, and a plurality of vapor flow paths, which have a flow path cross-sectional area larger than that of the condensate flow path and through which the operating fluid moves in a vapor and condensate state, and a straight section in which the plurality of condensate flow paths and the plurality of vapor flow paths extend in a straight shape, and a curved section continuous with the straight section in which the direction in which the plurality of condensate flow paths and the plurality of vapor flow paths extend changes, wherein in the curved section, the flow path cross-sectional area of ​​the vapor flow path disposed on the inner side is larger than the flow path cross-sectional area of ​​the vapor flow path disposed on the outer side.

[0013] A third aspect of the present disclosure is a sheet having multiple faces for an intermediate for a vapor chamber, having a hollow portion provided therein to be a flow path for an operating fluid, and the hollow portion is sealed off from the outside. Effects of the invention

[0014] According to the first embodiment, the strength of the vapor chamber can be increased.

[0015] According to the second embodiment, even a vapor chamber having a changing flow path can increase heat transport capacity.

[0016] According to the third embodiment, an intermediate can be obtained in which it is difficult for an oxide film to form on the inner surface of a channel through which the working fluid flows. Brief explanation of the drawing

[0017] Figure 1 is a perspective view of a vapor chamber (1). Figure 2 is an exploded perspective view of the vapor chamber (1). FIG. 3 is a perspective view of the first sheet (10). Figure 4 is a plan view of the first sheet (10). Figure 5 is a cross-sectional view of the first sheet (10). Figure 6 is another cross-section of the first sheet (10). Figure 7 is another cross-section of the first sheet (10). Figure 8 is a drawing of a portion of the outer liquid flow section (14) viewed in plan view. FIG. 9 is a drawing of a portion of the outer perimeter fluid flow section (14) of another example, viewed in plan view. FIG. 10 is a drawing of a portion of the outer perimeter fluid flow section (14) of another example, viewed in plan view. FIG. 11 is a drawing of a portion of the outer perimeter fluid flow section (14) of another example, viewed in plan view. FIG. 12 is a drawing of a portion of the outer perimeter fluid flow section (14) of another example, viewed in plan view. Figure 13 is a cross-sectional view focusing on the inner fluid flow path (15). FIG. 14 is a drawing of a portion of the inner fluid flow path (15) viewed in plan view. FIG. 15 is a perspective view of the second sheet (20). Figure 16 is a plan view of the second sheet (20). Figure 17 is a cross-section of the second sheet (20). Figure 18 is a cross-section of the second sheet (20). Figure 19 is a cross-sectional view of the vapor chamber (1). FIG. 20 is an enlarged view of a part of FIG. 19. Figure 21 is another cross-section of the vapor chamber (1). FIG. 22a is a drawing illustrating the manufacture of a vapor chamber (1). FIG. 22b is a drawing illustrating the manufacture of a vapor chamber (1). FIG. 22c is a drawing illustrating the manufacture of a vapor chamber (1). FIG. 22d is a drawing illustrating the manufacture of a vapor chamber (1). FIG. 23 is a drawing illustrating an electronic device (40). Figure 24 is a diagram illustrating the flow of the working fluid. FIG. 25 is a drawing illustrating a vapor chamber for a modified example. FIG. 26 is a drawing illustrating a vapor chamber for a modified example. FIG. 27 is a perspective view of a vapor chamber (101). FIG. 28 is an exploded perspective view of the vapor chamber (101). FIG. 29 is a perspective view of the first sheet (110). FIG. 30 is a plan view of the first sheet (110). Figure 31 is a cross-sectional view of the first sheet (110). FIG. 32 is another cross-section of the first sheet (110). Fig. 33 is another cross-section of the first sheet (110). FIG. 34 is a drawing of a portion of the outer liquid flow path (114) viewed in plan view. FIG. 35 is a cross-sectional view focusing on the inner fluid flow path (115). FIG. 36 is a drawing of a portion of the inner fluid flow path (115) viewed in planar view. FIG. 37 is a drawing illustrating an example of the shape of a curved portion (118c). FIG. 38 is a drawing illustrating an example of the shape of a curved portion (118c). FIG. 39 is a drawing illustrating an example of the shape of a curved portion (118c). FIG. 40 is a drawing illustrating an example of the shape of a curved portion (118c). FIG. 41 is a perspective view of the second sheet (120). FIG. 42 is a plan view of the second sheet (120). Figure 43 is a cross-section of the second sheet (120). Fig. 44 is another cross-section of the second sheet (120). Figure 45 is a cross-sectional view of the vapor chamber (101). Fig. 46 is an enlarged view of a part of Fig. 45. Fig. 47 is another cross-section of the vapor chamber (101). Figure 48 is a diagram illustrating an example of the shape of a condensate flow path. Figure 49 is a diagram illustrating an example of the shape of a condensate flow path. Figure 50 is a diagram illustrating an example of the shape of a condensate flow path. FIG. 51 is a drawing illustrating the condensate flow path (103) and the steam flow path (104). FIG. 52 is a diagram illustrating the operation of the vapor chamber (101). FIG. 53 is an external perspective view of the vapor chamber (201). FIG. 54 is an exploded perspective view of the vapor chamber (201). FIG. 55 is a view of the third sheet (230) from one side. FIG. 56 is a view of the third sheet (230) from the other side. Fig. 57 is a cross-section of the third sheet (230). Fig. 58 is another cross-section of the third sheet (230). FIG. 59 is a cross-sectional view of the vapor chamber (201). Fig. 60 is an enlarged view of a part of Fig. 59. Fig. 61 is another cross-sectional view of the vapor chamber (201). Figure 62 is a diagram showing the flow of method S301 for manufacturing a vapor chamber. Figure 63 is a diagram showing the flow of process S310. FIG. 64 is a perspective view of the first sheet (301) equipped with multiple faces. FIG. 65 is a perspective view showing one of the shapes (310) formed on the first sheet (301) having multiple faces. FIG. 66 is a plan view showing one of the shapes (310) formed on the first sheet (301) having multiple faces. FIG. 67 is a cross-sectional view showing one of the shapes (310) formed on the first sheet (301) having multiple faces. Fig. 68 is an enlarged view of a part of Fig. 67. FIG. 69 is another cross-sectional view showing one of the shapes (310) formed on the first sheet (301) having multiple faces. FIG. 70 is a drawing of a portion of the outer liquid flow section (314) viewed in plan view. FIG. 71 is a cross-sectional view focusing on one inner fluid flow path (315). FIG. 72 is a drawing of a portion of the inner fluid flow path (315) viewed in planar view. Figure 73 is a drawing explaining the connection. FIG. 74 is a drawing illustrating a sheet (350) having a multifaceted intermediate body and a roll (351) on which the sheet having a multifaceted intermediate body is wound. FIG. 75 is a part of the cross-section of a sheet (350) equipped with an intermediate body. FIG. 76 is a perspective view of the intermediate (352). Fig. 77 is a plan view of the intermediate (352). FIG. 78 is a drawing illustrating the formation of the injection port (319). FIG. 79 is a drawing explaining the formation of the injection port (319). FIG. 80 is a drawing illustrating the formation of another injection port (319). FIG. 81 is a drawing illustrating the formation of another injection port (319). FIG. 82 is a perspective view of a vapor chamber (353). FIG. 83 is a plan view of the vapor chamber (353). FIG. 84 is a cross-sectional view of the vapor chamber (353). FIG. 85 is a drawing illustrating a vapor chamber (353) of a different type. FIG. 86 is a drawing illustrating a vapor chamber (353) of a different type. FIG. 87 is a drawing illustrating a vapor chamber (353) of a different type. Specific details for implementing the invention

[0018] The present disclosure is described below based on the form illustrated in the drawings. In the drawings shown below, the size or proportion of the components may be altered or exaggerated for ease of understanding. Additionally, for ease of viewing, parts that are unnecessary for explanation or symbols that are repeated may be omitted.

[0019] [First form]

[0020] FIG. 1 shows an external perspective view of a vapor chamber (1) in a first form, and FIG. 2 shows an exploded perspective view of a vapor chamber (1). In these drawings and each of the drawings shown below, arrows (x, y, z) indicating directions are also indicated for convenience as needed. The xy in-plane direction is the plate surface direction of the vapor chamber (1), which is a flat plate shape, and the z direction is the thickness direction.

[0021] As can be seen from FIGS. 1 and 2, the vapor chamber (1) has a first sheet (10) and a second sheet (20). And, as described later, the first sheet (10) and the second sheet (20) are overlapped and joined (diffusion joining, brazing, etc.) so that a hollow space is formed between the first sheet (10) and the second sheet (20), and a working fluid is sealed therein to form a sealed space (2) (e.g., see FIG. 19).

[0022] In this form, the first sheet (10) is a member in the shape of a sheet overall. FIG. 3 shows a perspective view of the first sheet (10) viewed from the inner side (10a), and FIG. 4 shows a plan view of the first sheet (10) viewed from the inner side (10a). In addition, FIG. 5 shows a cross-sectional view of the first sheet (10) when cut along I1-I1 in FIG. 4.

[0023] The first sheet (10) is provided with an inner surface (10a), an outer surface (10b) opposite to the inner surface (10a), and a side surface (10c) that connects the inner surface (10a) and the outer surface (10b) to form a thickness, and a pattern is formed on the inner surface (10a) side for a flow path through which an operating fluid flows back. As described below, the inner surface (10a) of the first sheet (10) and the inner surface (20a) of the second sheet (20) are overlapped so as to face each other to form a hollow portion, and an operating fluid is sealed therein to form a sealed space (2).

[0024] As can be seen from FIG. 5, in this form, the first sheet (10) is configured to have an inner layer (10d) made of a material forming an inner surface (10a) and an outer layer (10e) made of a material forming an outer surface (10b). That is, the first sheet (10) is formed by stacking a plurality of layers, one of which forms the inner surface (10a) and another layer forms the outer surface (10b).

[0025] In this form, the side (10c) is formed by the end surface of the inner layer (10d) and the end surface of the outer layer (10e).

[0026] Here, a pattern for the working fluid to move is provided on the inner surface (10a) side of the first sheet (10) as described above, but the inner layer (10d) constitutes the surface that the working fluid directly contacts among this pattern. Therefore, it is desirable for the inner layer (10d) to be made of a material that is chemically stable with respect to the working fluid and has high thermal conductivity. More specifically, for example, copper and copper alloys may be used. In particular, by using copper and copper alloys, it is possible to improve heat transport capacity while suppressing the reaction with the working fluid (especially water), and furthermore, it becomes easier to manufacture the vapor chamber as described below.

[0027] The outer layer (10e) forms the outer surface (10b) together with the inner layer (10d) being laminated on the inner surface (10a) side.

[0028] On the side of the outer layer (10e) that contacts the inner layer (10d), a pattern formed on the inner surface (10a) side of the first sheet (10) is provided. However, as described above, the pattern portion of the outer layer (10e) forms a flow path, but is covered by the inner layer (10d) and is designed so that the working fluid does not come into direct contact with it. That is, a groove is formed in the outer layer (10e) to serve as a flow path for the working fluid (condensate flow path and vapor flow path), and the inner layer (10d) is laminated on the inside of this groove.

[0029] Meanwhile, in this form, the side of the outer layer (10e) that becomes the outer surface (10b) is a flat surface or a slightly uneven surface, and is a surface that takes into account contact with a part placed in the vapor chamber (1).

[0030] Accordingly, in this form, the outer layer (10e) is configured such that the distance (i.e., thickness) between the surface in contact with the inner layer (10d) on the inner side (10a) and the outer surface (10b) varies depending on the position in the x-direction and the position in the y-direction.

[0031] Thus, even a thin vapor chamber that forms a Euro can maintain its strength as a vapor chamber.

[0032] For this reason, it is desirable that the outer layer (10e) be made of a material with higher strength than the inner layer (10d). Specifically, it is desirable that the 0.2% yield strength or upper yield point of the outer layer (10e) be greater than the 0.2% yield strength or upper yield point of the inner layer (10d). While there are no specific limitations on satisfying this, for higher strength, it is desirable that the 0.2% yield strength or upper yield point of the outer layer (10e) be 100 MPa or more, and more preferably 200 MPa or more.

[0033] Thus, even when the vapor chamber is thinned while forming a desired flow path, deformation or damage to the vapor chamber can be suppressed against external impacts, expansion caused by the solidification of the working fluid due to low-temperature freezing, and forces such as vapor pressure during operation.

[0034] In addition, since the strength of the vapor chamber can be improved in this way by the outer layer (10e), the constraints regarding strength can be relaxed for the pattern of the flow path through which the working fluid moves formed on the inner side (10a), and since a design focused on improving thermal performance is possible, it can be said that there is an advantage in terms of thermal performance as well.

[0035] The material constituting the outer layer (10e) is not particularly limited, but from the perspective of heat diffusion, it is preferable to have a high thermal conductivity, and it is preferable to have a thermal conductivity of 10 W / m·K or higher. From this perspective, the material constituting the outer layer (10e) may include iron-based materials such as stainless steel, invariant steel (Invar), and Covar, titanium alloys, and nickel alloys. In addition, composite materials containing fine particles such as diamond, alumina, and silicon carbide may be used in these metals.

[0036] The thickness of the inner layer (10d) is not specifically limited in consideration of specifications, but it is preferable that it be 5㎛ or more and 20㎛ or less. If the inner layer (10d) is thinner than 5㎛, the likelihood of the material of the outer layer (10e) and the working fluid affecting each other increases. On the other hand, if the inner layer (10d) is thicker than 20㎛, difficulties may arise from a manufacturing perspective, or it may become difficult to meet the required specifications for thickness including in-plane variation, or the surface may become rough.

[0037] Meanwhile, the thickness of the outer layer (10e) is not specifically limited according to the specifications, but it is preferable that it be 0.02 mm or more and 0.5 mm or less in any part. If there is a part of the outer layer (10e) that is thinner than 0.02 mm, there is a risk that the effect of suppressing deformation will be reduced, and if there is a part that is thicker than 0.5 mm, heat transfer from the vapor chamber to the outside will be hindered, or it will be difficult to satisfy the thickness specifications.

[0038] The thickness of the first sheet (10) is the sum of the inner layer (10d) and the outer layer (10e), but the specific thickness is not specifically limited. However, it is preferable that it be 1.0 mm or less, and it may be 0.75 mm or less, or 0.5 mm or less. On the other hand, it is preferable that the thickness be 0.02 mm or more, and it may be 0.05 mm or more, or 0.1 mm or more. The range of this thickness may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of this thickness may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0039] This allows for a wider range of applications for the thin vapor chamber. Furthermore, even when the vapor chamber is made thin while forming the desired flow path, deformation or damage to the vapor chamber can be suppressed against forces such as external impacts, expansion caused by the solidification of the working fluid due to low-temperature freezing, and vapor pressure during operation.

[0040] This first sheet (10) is equipped with a main body (11) and an injection part (12). The main body (11) is a sheet shape that forms a portion where the working fluid flows back, and in this form, when viewed in planar view, it is a rectangle with corners formed in an arc shape (so-called R). In addition, as described above, the inner surface (10a) of the main body (11) and the injection part (12) is made of an inner layer (10d), and the outer surface (10b) is made of an outer layer (10e).

[0041] The injection portion (12) is a part for injecting working fluid into the hollow portion formed by the first sheet (10) and the second sheet (20). In this form, the sheet shape is rectangular when viewed from a flat plane of the main body (11) and protruding from a flat plane. In this form, the injection portion (12) of the first sheet (10) has a flat surface on both the inner side (10a) and the outer side (10b).

[0042] On the inner surface (10a) of the main body (11), a structure is formed for the working fluid to flow back. In addition to being square as in the present form, the main body (11) may be circular, elliptical, triangular, other polygonal, or have a curved shape, such as an L-shape, T-shape, or crank shape. In addition, it may be formed in a shape that combines at least two of these.

[0043] The main body (11) is configured with an outer periphery joint (13), an outer periphery liquid flow path (14), an inner periphery liquid flow path (15), a steam flow path groove (16), and a steam flow path communication groove (17) on its inner surface (10a).

[0044] The outer periphery joint (13) is a surface formed along the outer periphery of the main body (11) on the inner surface (10a) side of the main body (11). By overlapping and joining (diffusion joining, brazing, etc.) the outer periphery joint (13) to the outer periphery joint (23) of the second sheet (20), a hollow space is formed between the first sheet (10) and the second sheet (20), and an operating fluid is sealed therein to form a sealed space (2).

[0045] The width of the outer joint (13) shown as W1 in FIGS. 4 and 5 (which is the size in the direction perpendicular to the direction in which the outer joint (13) extends, and is the width at the joint surface with the second sheet (20)) can be appropriately set as needed, but this width W1 is preferably 3.0 mm or less, may be 2.5 mm or less, or 2.0 mm or less. If the width W1 is larger than 3 mm, there is a risk that the internal volume of the sealed space will decrease, making it impossible to sufficiently secure the steam flow path or condensate flow path. On the other hand, the width W1 is preferably 0.2 mm or more, may be 0.6 mm or more, or 0.8 mm or more. If the width W1 is smaller than 0.2 mm, there is a risk that the joint area will be insufficient when a positional misalignment occurs during the joining of the first sheet and the second sheet. The range of width W1 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. Additionally, the range of width W1 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0046] In addition, among the outer joint portions (13), holes (13a) penetrating in the thickness direction (z-direction) are formed at the four corners of the main body (11). These holes (13a) function as a means for determining position when the second sheet (20) overlaps.

[0047] The outer liquid flow path (14) functions as a liquid flow path and is a part of the condensate flow path (3), which is a second flow path through which the working fluid passes when it condenses and becomes liquefied. FIG. 6 shows the part indicated by arrow I2 in FIG. 5, and FIG. 7 shows the cross-sectional view of the part cut along I3-I3 in FIG. 4. The cross-sectional shape of the outer liquid flow path (14) is shown in either figure. In addition, FIG. 8 shows an enlarged planar view of the outer liquid flow path (14) seen from the direction indicated by arrow I4 in FIG. 6.

[0048] As can be seen from these drawings, the outer liquid flow section (14) is formed along the inner side of the outer joint (13) among the inner surface (10a) of the main body (11) and is provided along the outer surface of the sealed space (2). In addition, the outer liquid flow section (14) has a plurality of liquid flow grooves (14a) that extend parallel to the outer surface direction of the main body (11), and the plurality of liquid flow grooves (14a) are arranged at a predetermined interval in a direction different from the direction in which the liquid flow grooves (14a) extend. Accordingly, as can be seen from FIGS. 6 and 7, in the outer liquid flow section (14), on the cross-section of the outer liquid flow section (14), a concave liquid flow groove (14a) and a convex portion (14b) between the liquid flow grooves (14a) are repeatedly formed with an uneven surface.

[0049] Additionally, this liquid channel groove (14a) is a groove formed by stacking an inner layer (10d) on the inner side of a groove formed in an outer layer (10e).

[0050] By providing multiple liquid flow channels (14a) in this way, the depth and width of each liquid flow channel (14a) are reduced, and the cross-sectional area of ​​the second flow channel, the condensate flow channel (3) (see FIG. 20, etc.), is reduced, thereby allowing the use of a large capillary force. Meanwhile, by making the liquid flow channels (14a) multiple, the total cross-sectional area of ​​the condensate flow channel (3) is secured to a suitable size, so that a required amount of condensate can flow.

[0051] Here, the liquid flow groove (14a) is a groove, and in terms of its cross-sectional shape, it has a bottom portion provided on the outer surface (10b) side and an opening provided on the inner surface (10a) side opposite to the bottom portion.

[0052] In this form, the liquid channel groove (14a) has a cross-section that is semi-elliptical. However, the cross-sectional shape is not limited to a semi-elliptical shape, and may be a circular shape, a rectangular shape, a square shape, a trapezoidal shape, or other polygonal shapes, or a combination of any multiple of these shapes.

[0053] In addition, in this form, in the outer liquid flow section (14), as can be seen from FIG. 8, adjacent liquid flow grooves (14a) are connected by connecting openings (14c) at predetermined intervals. This promotes equalization of the amount of condensate between the plurality of liquid flow grooves (14a), allowing the condensate to flow efficiently and enabling smooth recirculation of the working fluid.

[0054] In this form, as shown in FIG. 8, a communication opening (14c) is positioned opposite to the same position in the direction in which the liquid flow groove (14a) extends, with the corresponding groove of the liquid flow groove (14a) in between. However, it is not limited thereto, and, for example, as shown in FIG. 9, a communication opening (14c) may be positioned at a different position in the direction in which the liquid flow groove (14a) extends, with the corresponding groove of the liquid flow groove (14a) in between. That is, the convex portion (14b) and the communication opening (14c) may be positioned alternately along a direction perpendicular to the direction in which the liquid flow groove extends.

[0055] In addition, it may be made in a form such as that described in FIGS. 10 to 12, for example. FIGS. 10 to 12 shows drawings illustrating, at the same point in time as FIG. 8, one condensate flow path (14a), two convex parts (14b) that fit it, and one communication opening (14c) formed in each convex part (14b). In all of these, the shape of the convex part (14b) and the communication opening (14c) at that point in time (viewed in plane) is different from the example in FIG. 8.

[0056] That is, in the convex portion (14b) illustrated in FIG. 8, the width at the end where the communication opening (14c) is formed is the same and constant as other parts. In contrast, in the convex portion (14b) of the shape illustrated in FIG. 10 to FIG. 12, the width at the end where the communication opening (14c) is formed is formed to be smaller than the maximum width of the convex portion (14b). More specifically, in the example of FIG. 10, the corner at the end is arc-shaped and an R is formed at the corner, thereby reducing the width of the end; FIG. 11 is an example where the end is semicircular and reducing the width of the end; and FIG. 12 is an example where the end tapers to become pointed.

[0057] As shown in FIGS. 10 to 12, the width of the communication opening (14c) at the end where it is formed in the convex portion (14b) is formed to be smaller than the maximum width of the convex portion (14b), thereby making it easier for the working fluid to move through the communication opening (14c), and thus facilitating the movement of the working fluid to the adjacent condensate flow path (3).

[0058] The external liquid Euro section (14) having the above configuration is preferably further equipped with the following configuration.

[0059] The width of the outer liquid flow channel (14) indicated as W2 in FIGS. 4 to 7 (which is the size in the direction in which the liquid flow channel grooves (14a) are arranged and the width at the joint surface with the second sheet (20)) can be appropriately set based on the size of the entire vapor chamber, etc., but the width W2 is preferably 3.0 mm or less, may be 1.5 mm or less, or 1.0 mm or less. If the width W2 exceeds 3.0 mm, there is a risk that sufficient space for the inner liquid flow channel or vapor flow channel will not be obtained. On the other hand, the width W2 is preferably 0.1 mm or more, may be 0.2 mm or more, or 0.4 mm or more. If the width W2 is less than 0.1 mm, there is a risk that sufficient amount of liquid to recirculate to the outside will not be obtained. The range of the width W2 may be determined by a combination of any one of the above multiple upper limit candidate values ​​and one of the multiple lower limit candidate values. In addition, the range of width W2 may be determined by any two combinations of multiple upper limit candidate values ​​or any two combinations of multiple lower limit candidate values.

[0060] And the width W2 may be the same as the width W9 (see FIG. 17) of the outer liquid flow section (24) of the second sheet (20), or it may be larger or smaller. In this form, it is the same.

[0061] With respect to the liquid flow channel groove (14a), the groove width (size in the direction in which the liquid flow channel groove (14a) is arranged, width at the opening surface of the groove) indicated by W3 in FIGS. 6 and 8 is preferably 1000 μm or less, may be 500 μm or less, and may be 200 μm or less. Meanwhile, the width W3 is preferably 20 μm or more, may be 45 μm or more, and may be 60 μm or more. The range of the width W3 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. Additionally, the range of the width W3 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0062] In addition, the depth of the groove indicated by D1 in FIGS. 6 and 7 is preferably 200 μm or less, may be 150 μm or less, or may be 100 μm or less. Meanwhile, the depth D1 is preferably 5 μm or more, may be 10 μm or more, or may be 20 μm or more. The range of depth D1 may be determined by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. In addition, the range of depth D1 may be determined by any two combinations of the plurality of upper limit candidate values ​​or any two combinations of the plurality of lower limit candidate values.

[0063] By configuring as described above, the capillary force of the condensate flow path required for reflux can be exerted more strongly.

[0064] From the perspective of exerting stronger capillary force in the condensate flow path, the aspect ratio (length-length ratio) in the cross-section of the flow path, expressed as the value obtained by dividing the width W3 by the depth D1, is preferably greater than 1.0. This ratio may be 1.5 or greater, or 2.0 or greater. Alternatively, the aspect ratio may be less than 1.0. This ratio may be 0.75 or less, or 0.5 or less.

[0065] Among them, from a manufacturing perspective, it is desirable that W3 be greater than D1, and from this perspective, it is desirable that the aspect ratio be greater than 1.3.

[0066] In addition, the pitch of adjacent liquid flow grooves (14a) in the plurality of liquid flow grooves (14a) is preferably 1100 μm or less, may be 550 μm or less, or may be 220 μm or less. Meanwhile, the pitch is preferably 30 μm or more, may be 55 μm or more, or may be 70 μm or more. The range of this pitch may be determined by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. In addition, the range of the pitch may be determined by any two combinations of the plurality of upper limit candidate values ​​or any two combinations of the plurality of lower limit candidate values.

[0067] By doing so, the density of the condensate flow path can be increased, and the deformation of the condensate flow path during joining or assembly can be suppressed.

[0068] Regarding the communication opening (14c), the size of the opening along the direction in which the liquid flow groove (14a) shown as L1 in FIG. 8 extends is preferably 1100 μm or less, may be 550 μm or less, or may be 220 μm or less. Meanwhile, the size L1 is preferably 30 μm or more, may be 55 μm or more, or may be 70 μm or more. The range of size L1 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. Additionally, the range of size L1 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0069] In addition, the pitch of the adjacent communication opening (14c) in the direction in which the liquid flow groove (14a) indicated as L2 in FIG. 8 extends is preferably 2700 μm or less, may be 1800 μm or less, or may be 900 μm or less. Meanwhile, this pitch L2 is preferably 60 μm or more, may be 110 μm or more, or may be 140 μm or more. The range of this pitch L2 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of pitch L2 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0070] Returning to FIGS. 1 to 5, the inner liquid flow channel (15) will be described. The inner liquid flow channel (15) also functions as a liquid flow channel and is a part of the condensate flow channel (3), which is a second flow channel through which the working fluid passes when it condenses and becomes liquefied. FIG. 13 shows the part indicated by I4 in FIG. 5. The cross-sectional shape of the inner liquid flow channel (15) is also shown in this figure. Additionally, FIG. 14 shows an enlarged planar view of the inner liquid flow channel (15) seen from the direction indicated by arrow I5 in FIG. 13.

[0071] As can be seen from these drawings, the inner liquid flow channel (15) is a wall formed on the inner side of the ring of the outer liquid flow channel (14) in the inner surface (10a) of the main body (11). As can be seen from FIGS. 3 and FIGS. 4, the inner liquid flow channel (15) of this form is a wall that is rectangular when viewed from the plane of the main body (11) and extends in a direction parallel to the long side (x-direction), and a plurality (three in this form) of inner liquid flow channels (15) are arranged at a predetermined interval in a direction parallel to the short side (y-direction).

[0072] In each inner liquid flow section (15), a liquid flow groove (15a) is formed, which is a groove parallel to the direction in which the inner liquid flow section (15) extends, and a plurality of liquid flow grooves (15a) are arranged at a predetermined interval in a direction different from the direction in which the liquid flow groove (15a) extends. Accordingly, as can be seen from FIGS. 5 and FIGS. 13, in the inner liquid flow section (15), on the cross-section, a concave liquid flow groove (15a) and a convex portion (15b) between the liquid flow grooves (15a) are repeatedly formed on the inner surface (10a) side. In addition, this liquid flow groove (15a) is a groove formed by stacking an inner layer (10d) on the inner side of a groove formed in the outer layer (10e).

[0073] By providing multiple liquid flow channels (15a) in this way, the depth and width of each liquid flow channel (15a) are reduced, and the cross-sectional area of ​​the condensate flow channel (3) (see FIG. 20, etc.) as a second flow channel is reduced, thereby allowing the use of a large capillary force. Meanwhile, by making the liquid flow channels (15a) multiple, the total cross-sectional area of ​​the condensate flow channel (3) is secured to a suitable size, so that a required amount of condensate can flow.

[0074] Here, the liquid channel groove (15a) is a groove, and in terms of its cross-sectional shape, it has a bottom portion provided on the outer surface (10b) side and an opening provided on the inner surface (10a) side on the opposite side facing the bottom portion.

[0075] In this form, the liquid channel groove (15a) has a cross-section that is semi-elliptical. However, the cross-sectional shape is not limited to a semi-elliptical shape, and may be a circular shape, a rectangular shape, a square shape, a trapezoidal shape, or other polygonal shapes, or a combination of any multiple of these shapes.

[0076] Additionally, as can be seen from FIG. 14, adjacent liquid flow channels (15a) are connected by connecting openings (15c) at predetermined intervals. This promotes the equalization of the amount of condensate between the multiple liquid flow channels (15a), thereby allowing the condensate to flow efficiently, and thus enables smooth recirculation of the working fluid.

[0077] For this communication opening (15c), just like the communication opening (14c), the convex portion (15b) and the communication opening (15c) may be alternately arranged along a direction perpendicular to the direction in which the liquid flow groove (15a) extends, mimicking the example shown in FIG. 9. Additionally, the shape of the communication opening (15c) and the convex portion (15b) may be mimicked in FIG. 10 to FIG. 12.

[0078] The inner fluid flow path (15) having the above configuration is preferably further equipped with the following configuration.

[0079] The width of the inner liquid flow channel (15) indicated by W4 in FIGS. 4, 5, and 13 (which is the size in the direction in which the inner liquid flow channel (15) and the vapor flow channel groove (16) are arranged, and is the width at the bonding surface with the second sheet (20)) is preferably 3000 μm or less, may be 1500 μm or less, or may be 1000 μm or less. Meanwhile, this width W4 is preferably 100 μm or more, may be 200 μm or more, or may be 400 μm or more. The range of this width W4 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of width G may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0080] The width W4 is the width W of the inner liquid flow path (25) of the second sheet. 10 It may be the same as (see Fig. 17), larger, or smaller. In this form, it is identical.

[0081] In addition, the pitch of the plurality of inner fluid passages (15) is preferably 4000 μm or less, may be 3000 μm or less, or 2000 μm or less. Meanwhile, the pitch is preferably 200 μm or more, may be 400 μm or more, or 800 μm or more. The range of the pitch may be determined by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. In addition, the range of the pitch may be determined by a combination of any two of the plurality of upper limit candidate values ​​or by a combination of any two of the plurality of lower limit candidate values.

[0082] This lowers the flow resistance of the steam path, allowing for a good balance between the movement of steam and the reflux of condensate.

[0083] With respect to the liquid flow channel groove (15a), the groove width indicated by W5 in FIGS. 13 and 14 (which is the size in the direction in which the liquid flow channel groove (15a) is arranged and is the width at the opening surface of the groove) is preferably 1000 μm or less, may be 500 μm or less, and may be 200 μm or less. Meanwhile, this width W5 is preferably 20 μm or more, may be 45 μm or more, and may be 60 μm or more. The range of this width W5 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. Additionally, the range of the width W5 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0084] In addition, the depth of the groove indicated by D2 in FIG. 13 is preferably 200 μm or less, may be 150 μm or less, or may be 100 μm or less. Meanwhile, this depth D2 is preferably 5 μm or more, may be 10 μm or more, or may be 20 μm or more. The range of this depth D2 may be determined by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. In addition, the range of depth D2 may be determined by any two combinations of the plurality of upper limit candidate values ​​or any two combinations of the plurality of lower limit candidate values.

[0085] This allows the capillary force of the condensate flow path required for reflux to be strongly exerted.

[0086] From the perspective of exerting stronger capillary force in the flow channel, the aspect ratio in the cross-section of the flow channel, expressed as the value obtained by dividing the width W5 by the depth D2, is preferably greater than 1.0. It may be 1.5 or greater, or 2.0 or greater. Alternatively, it may be less than 1.0, 0.75 or less, or 0.5 or less.

[0087] Among them, from a manufacturing perspective, it is desirable that the width W5 be greater than the depth D2, and from this perspective, it is desirable that the aspect ratio be greater than 1.3.

[0088] In addition, the pitch of adjacent liquid flow grooves (15a) in the plurality of liquid flow grooves (15a) is preferably 1100 μm or less, may be 550 μm or less, or may be 220 μm or less. Meanwhile, the pitch is preferably 30 μm or more, may be 55 μm or more, or may be 70 μm or more. The range of the pitch may be determined by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. In addition, the range of the pitch may be determined by any two combinations of the plurality of upper limit candidate values ​​or any two combinations of the plurality of lower limit candidate values.

[0089] By doing so, the density of the condensate flow path can be increased, and the flow path can be suppressed from being compressed due to deformation during joining or assembly.

[0090] In addition, regarding the communication opening (15c), the size of the opening along the direction in which the liquid flow groove (15a) shown as L3 in FIG. 14 extends is preferably 1100 μm or less, may be 550 μm or less, or may be 220 μm or less. Meanwhile, this size L3 is preferably 30 μm or more, may be 55 μm or more, or may be 70 μm or more. The range of this size L3 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of size L3 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0091] In addition, the pitch of the adjacent communication opening (15c) in the direction in which the liquid flow groove (15a), indicated as L4 in FIG. 14, extends is preferably 2700 μm or less, may be 1800 μm or less, or may be 900 μm or less. Meanwhile, this pitch L4 is preferably 60 μm or more, may be 110 μm or more, or may be 140 μm or more. The range of this pitch L4 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of this pitch L4 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0092] The liquid flow grooves (14a) and (15a) of the above-described liquid flow path are spaced apart at equal intervals and arranged parallel to each other, but are not limited to this; as long as capillary action can be exerted, the pitch between the grooves may vary, and the grooves may not be parallel to each other.

[0093] Next, the steam passage groove (16) will be described. The steam passage groove (16) is a part through which vaporized steam passes after the working fluid has evaporated, and it forms part of the first passage, the steam passage (4) (see FIG. 19, etc.). FIG. 4 shows the shape of the steam passage groove (16) viewed in plan, and FIG. 5 shows the cross-sectional shape of the steam passage groove (16).

[0094] As can be seen from these drawings, the steam flow channel groove (16) is formed by a groove formed on the inner side of the ring-shaped outer liquid flow channel (14) among the inner surface (10a) of the main body (11). In detail, the steam flow channel groove (16) of this form is formed between adjacent inner liquid flow channels (15) and between the outer liquid flow channel (14) and the inner liquid flow channel (15), and is a groove that is rectangular when viewed from the plane of the main body (11) and extends in a direction parallel to the long side (x-direction). In addition, a plurality (four in this form) of steam flow channel grooves (16) are arranged in a direction parallel to the short side (y-direction). Accordingly, as can be seen from FIG. 5, the first sheet (10) has a shape in which the walls of the outer liquid flow channel (14) and the inner liquid flow channel (15) are convex in the y-direction and the steam flow channel groove (16) is concave, and the shape of the repeated unevenness is formed.

[0095] Here, the steam flow groove (16) is a groove, and in terms of its cross-sectional shape, it has an opening on the inner surface (10a) side opposite to the outer surface (10b) side and an opening on the opposite side facing the outer surface (10b).

[0096] Additionally, this steam flow groove (16) is a groove formed by stacking an inner layer (10d) on the inner side of a groove formed in an outer layer (10e).

[0097] The steam flow channel (16) having such a configuration is preferably further equipped with the following configuration.

[0098] The width of the vapor flow channel groove (16) indicated by W6 in FIGS. 4 and 5 (which is the size in the direction in which the inner liquid flow channel portion (15) and the vapor flow channel groove (16) are arranged, and is the width at the opening surface of the groove) is formed to be at least larger than the width W3 of the liquid flow channel groove (14a) and the width W5 of the liquid flow channel groove (15a), and is preferably 2000 μm or less, may be 1500 μm or less, or may be 1000 μm or less. Meanwhile, this width W6 is preferably 100 μm or more, may be 200 μm or more, or may be 400 μm or more. The range of this width W6 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of the width W6 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0099] The pitch of the steam flow channel groove (16) is usually determined by the pitch of the inner liquid flow channel section (15).

[0100] Meanwhile, the depth of the vapor flow channel groove (16) shown as D3 in FIG. 5 is formed to be at least larger than the depth D1 of the liquid flow channel groove (14a) and the depth D2 of the liquid flow channel groove (15a), and is preferably 300 μm or less, may be 200 μm or less, or 100 μm or less. Meanwhile, this depth D3 is preferably 10 μm or more, may be 25 μm or more, or 50 μm or more. The range of this depth D3 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. Additionally, the range of depth D3 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0101] In this way, by making the cross-sectional area of ​​the steam flow path larger than the cross-sectional area of ​​the liquid flow path, steam, which has a larger volume than condensate due to the properties of the working fluid, can be smoothly recirculated.

[0102] In this form, the cross-sectional shape of the steam flow channel groove (16) is semi-elliptical, but it is not limited thereto and may be a rectangular shape such as a square, a square, a trapezoid, a triangle, a semicircle, a semicircle at the bottom, a semi-elliptical at the bottom, or a combination of any multiple of these. Since the steam flow channel can enable smooth recirculation of the working fluid by reducing the flow resistance of the steam, the shape of the cross-sectional shape of the flow channel may be determined from this perspective.

[0103] In this form, an example in which one steam flow path groove (16) is formed between adjacent inner liquid flow paths (15) has been described, but it is not limited thereto, and two or more steam flow path grooves may be arranged between adjacent inner liquid flow paths.

[0104] Additionally, if a steam flow channel groove is formed in the second sheet (20), the steam flow channel groove may not be formed in part or all of the first sheet (10).

[0105] The steam flow channel connecting groove (17) is a groove that connects multiple steam flow channel grooves (16). By doing so, the steam within the multiple steam flow channel grooves (16) can be equalized, or the steam can be transported over a wider range, allowing many condensate flow channels (3) to be utilized efficiently, thereby making it possible to make the recirculation of the working fluid smoother.

[0106] As can be seen from FIGS. 3 and 4, the steam flow channel communication groove (17) of this type is formed between the outer liquid flow channel (14) and the two ends in the direction in which the inner liquid flow channel (15) and the steam flow channel groove (16) extend. Additionally, FIG. 7 shows a cross-section perpendicular to the communication direction of the steam flow channel communication groove (17) in a cross-sectional view along the line I3-I3 shown in FIG. 4.

[0107] In FIGS. 2 to 4, a dotted line is drawn at the part that should be the boundary between the steam flow channel groove (16) and the steam flow channel connecting groove (17) for ease of understanding. However, this line is not necessarily a line that appears by shape, but is a virtual line drawn for ease of understanding.

[0108] The steam flow channel connecting groove (17) may be formed to connect with an adjacent steam flow channel (16), and although its shape is not particularly limited, it may be configured as follows, for example.

[0109] The width of the steam flow channel groove (17) indicated by W7 in FIGS. 4 and 7 (which is the size in the direction perpendicular to the communication direction and is the width at the opening surface of the groove) is preferably 1000 μm or less, may be 750 μm or less, or may be 500 μm or less. Meanwhile, this width W7 is preferably 100 μm or more, may be 150 μm or more, or may be 200 μm or more. The range of this width W7 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of the width W7 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0110] In addition, the depth of the steam flow channel groove (17) indicated as D4 in FIG. 7 is preferably 300 μm or less, may be 225 μm or less, or 150 μm or less. Meanwhile, this depth D4 is preferably 10 μm or more, may be 25 μm or more, or 50 μm or more. The range of this depth D4 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of the depth D4 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0111] In this form, the cross-sectional shape of the steam flow channel groove (17) is semi-elliptical, but is not limited thereto and may be a rectangular, square, trapezoidal shape, triangle, semicircle, semicircle at the bottom, semi-elliptical at the bottom, or any combination of these.

[0112] Since the steam flow channel groove can enable smooth recirculation of the working fluid by reducing the flow resistance of the steam, the shape of the cross-section of the flow channel can be determined from this perspective.

[0113] Also, this steam flow channel groove (17) is a groove formed in the outer layer (10e) and an inner layer (10d) stacked on the inside of the groove.

[0114] In this form, the outer surface (10b) of the main body (11) is configured to be a flat surface. This increases the adhesion to a member that must be in contact with the outer surface (10b) (e.g., an electronic component to be cooled, or a housing of an electronic device to which heat must be transferred). However, the shape of the outer surface (10b) is not limited to this and may have irregularities depending on the purpose.

[0115] Here, the outer surface (10b) is not shaped to correspond to the inner surface (10a), but is shaped to contribute to the heat transfer intended by the outer surface (10b). In addition, this outer surface (10b) is formed by an outer layer (10e) as described above. Accordingly, the outer layer (10e) has different thicknesses depending on the x-direction position and the y-direction position.

[0116] With these inner surface (10a), outer surface (10b) and the inner layer (10d) and outer layer (10e) constituting them, even when a desired flow path is formed in the vapor chamber and the chamber is thinned, deformation or damage to the vapor chamber can be suppressed against external impacts, expansion due to solidification of the working fluid by low-temperature freezing, and forces due to vapor pressure during operation.

[0117] Next, the second sheet (20) will be described. In this form, the second sheet (20) is also a member in the shape of a sheet overall. FIG. 15 shows a perspective view of the second sheet (20) viewed from the inner side (20a), and FIG. 16 shows a plan view of the second sheet (20) viewed from the inner side (20a). In addition, FIG. 17 shows the cross-section of the second sheet (20) when cut along I6-I6 in FIG. 16. In addition, FIG. 18 shows the cross-section of the second sheet (20) when cut along I7-I7 in FIG. 16.

[0118] The second sheet (20) is provided with an inner surface (20a), an outer surface (20b) opposite to the inner surface (20a), and a side surface (20c) that connects the inner surface (20a) and the outer surface (20b) to form a thickness, and a pattern is formed on the inner surface (20a) side for the recirculation of the working fluid. As described later, the inner surface (20a) of the second sheet (20) and the inner surface (10a) of the first sheet (10) are overlapped so as to face each other, thereby forming a hollow portion, and by sealing the working fluid therein, it becomes a sealed space (2).

[0119] As can be seen from FIGS. 16 and 17, in this form, the second sheet (20) is configured to have an inner layer (20d), which is a layer made of a material forming an inner surface (20a), and an outer layer (20e), which is a layer made of a material forming an outer surface (20b). That is, the second sheet (20) is formed by stacking a plurality of layers, one of which forms the inner surface (20a) and another layer forms the outer surface (20b).

[0120] In this form, the side (20c) is formed by the end surface of the inner layer (20d) and the end surface of the outer layer (20e).

[0121] Here, a pattern for the working fluid to move is provided on the inner surface (20a) side of the second sheet (20), but the inner layer (20d) forms the surface that the working fluid directly contacts among this pattern. Therefore, it is desirable for the inner layer (20d) to be made of a material that is chemically stable with respect to the working fluid and has high thermal conductivity. For this reason, copper and copper alloys, for example, can be used. In particular, by using copper and copper alloys, the reaction with the working fluid (especially water) is suppressed, and the heat transport capacity is improved, and furthermore, it becomes easier to manufacture a vapor chamber by etching and diffusion bonding as described later.

[0122] The outer layer (20e) forms the outer surface (20b) together with the inner layer (20d) being laminated on the inner surface (20a) side.

[0123] On the side of the outer layer (20e) that contacts the inner layer (20d), a pattern formed on the inner surface (20a) side of the second sheet (20) is provided. However, as described above, the pattern portion of the outer layer (20e) forms a flow path, but is covered by the inner layer (20d) and is designed so that the working fluid does not come into direct contact with it. That is, the outer layer (20e) has a groove that serves as a flow path, and the inner layer (20d) described above is laminated on the inside of this groove.

[0124] Meanwhile, in this form, the surface of the outer layer (20e) that becomes the outer surface (20b) is a flat surface or a slightly uneven surface, and contact with the part placed in the vapor chamber (1) is taken into consideration.

[0125] Accordingly, in this form, the outer layer (20e) is configured such that the distance (i.e., thickness) between the surface in contact with the inner layer (20d) on the inner side (20a) and the outer surface (20b) varies depending on the position in the x-direction and the position in the y-direction.

[0126] Thus, even a thin vapor chamber that forms a Euro can be equipped with the strength required as a vapor chamber.

[0127] For this reason, it is desirable that the outer layer (20e) be made of a material with higher strength than the inner layer (20d). Specifically, it is desirable that the 0.2% yield strength or upper yield point of the outer layer (20e) be greater than the 0.2% yield strength or upper yield point of the inner layer (20d). While there are no specific limitations on satisfying this, for higher strength, it is desirable that the 0.2% yield strength or upper yield point of the outer layer (20e) be 100 MPa or more, and more preferably 200 MPa or more.

[0128] Thus, even when the vapor chamber is thinned while forming a desired flow path, deformation or damage to the vapor chamber can be suppressed against external impacts, expansion caused by the solidification of the working fluid due to low-temperature freezing, and forces caused by vapor pressure during operation.

[0129] In addition, since the strength of the vapor chamber can be improved in this way by the outer layer (20e), the constraints regarding strength can be relaxed for the pattern of the flow path through which the working fluid moves formed on the inner side (20a), and since a design focused on improving thermal performance is possible, it can be said that there is an advantage in terms of thermal performance as well.

[0130] The material constituting the outer layer (20e) is not particularly limited, but from the perspective of heat diffusion, it is preferable to have a high thermal conductivity, and it is preferable to have a thermal conductivity of 10 W / m·K or higher. From this perspective, the material constituting the outer layer (20e) may include iron-based materials such as stainless steel, invariant steel (Invar), and Covar, titanium alloys, and nickel alloys. In addition, composite materials containing fine particles such as diamond, alumina, and silicon carbide may be used in these metals.

[0131] The thickness of the inner layer (20d) is not specifically limited in consideration of specifications, but it is preferable that it be 5㎛ or more and 20㎛ or less. If the inner layer (20d) is thinner than 5㎛, the likelihood of the material of the outer layer (20e) and the working fluid affecting each other increases. On the other hand, if the inner layer (20d) is thicker than 20㎛, difficulties may arise from a manufacturing perspective, it may become difficult to meet the required specifications for thickness including in-plane variation, or the surface may become rough.

[0132] Meanwhile, the thickness of the outer layer (20e) is not specifically limited according to the specifications, but it is preferable that it be 0.02 mm or more and 0.5 mm or less in any part. If there is a part of the outer layer (20e) that is thinner than 0.02 mm, there is a risk that the effect of suppressing deformation will be reduced, and if there is a part that is thicker than 0.5 mm, heat transfer from the vapor chamber to the outside will be hindered, or it will be difficult to satisfy the thickness specifications.

[0133] The thickness of the second sheet (20) is the sum of the inner layer (20d) and the outer layer (20e), but the specific thickness is not particularly limited. However, it is preferable that it be 1.0 mm or less, and it may be 0.75 mm or less, or 0.5 mm or less. Meanwhile, it is preferable that the thickness be 0.02 mm or more, and it may be 0.05 mm or more, or 0.1 mm or more. The range of this thickness may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of this thickness may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0134] This allows for a wider range of applications for the thin vapor chamber. Furthermore, even when the vapor chamber is made thin while forming the desired flow path, deformation or damage to the vapor chamber can be suppressed against forces such as external impacts, expansion caused by the solidification of the working fluid due to low-temperature freezing, and vapor pressure during operation.

[0135] In addition, the thickness of the first sheet (10) and the second sheet (20) may be the same or different.

[0136] This second sheet (20) is equipped with a main body (21) and an injection part (22). The main body (21) is a sheet-shaped part that forms a portion where the working fluid flows back, and in this form, when viewed in planar view, it is a rectangle with an arc (so-called R) formed at the corner.

[0137] However, the main body (21) of the second sheet (20) may be a square shape as in the present form, or a circular, elliptical, triangular, or other polygonal shape, and may have a curved shape, such as an L-shape, T-shape, or crank shape. In addition, it may be a shape formed by combining at least two of these.

[0138] The injection portion (22) is a part that injects an operating fluid into the hollow portion formed by the first sheet (10) and the second sheet (20) to form a sealed space (2) (see FIG. 19), and in this form, it is a rectangular sheet shape when viewed from a plane protruding from one side that is rectangular when viewed from the plane of the main body (21). In this form, an injection groove (22a) is formed on the inner side (20a) of the injection portion (22) of the second sheet (20), and the outer side and inner side (part to be a hollow portion, sealed space (2)) of the main body (21) are connected at the side (20c) of the second sheet (20).

[0139] On the inner surface (20a) side of the main body (21), a structure for the working fluid to flow back is formed. Specifically, on the inner surface (20a) side of the main body (21), an outer periphery joint (23), an outer periphery liquid flow path (24), an inner periphery liquid flow path (25), a steam flow path groove (26), and a steam flow path communication groove (27) are provided.

[0140] The outer periphery joint (23) is a surface formed along the outer periphery of the main body (21) on the inner surface (20a) side of the main body (21). By overlapping and joining (diffusion joining, brazing, etc.) the outer periphery joint (23) to the outer periphery joint (13) of the first sheet (10), a hollow space is formed between the first sheet (10) and the second sheet (20), and an operating fluid is sealed therein to form a sealed space (2).

[0141] The width of the outer joint (23) indicated by W8 in FIGS. 16 to 18 (which is the size in the direction perpendicular to the direction in which the outer joint (23) extends, and is the width at the joint surface with the first sheet (10)) is preferably the same as the width W1 of the outer joint (13) of the main body (11) described above. However, it is not limited thereto and may be larger or smaller.

[0142] In addition, among the outer joint portions (23), holes (23a) penetrating in the thickness direction (z direction) are formed at the four corners of the main body (21). These holes (23a) function as a means for determining position when overlapping with the first sheet (10).

[0143] The outer liquid flow path (24) is a liquid flow path and is a part of the condensate flow path (3), which is a second flow path through which the working fluid passes when it condenses and becomes liquefied.

[0144] The outer liquid flow channel (24) is formed along the inner side of the outer joint (23) among the inner surface (20a) of the main body (21). In this form, the outer liquid flow channel (24) of the second sheet (20) is a flat surface before joining with the first sheet (10), as can be seen from FIGS. 17 and 18, and is located on the same plane as the outer joint (23). By doing so, the opening of the plurality of liquid flow channel grooves (14a) of the first sheet (10) is closed to form a second liquid flow channel, which is a condensate flow channel (3). Detailed aspects regarding the combination of the first sheet (10) and the second sheet (20) will be described later.

[0145] In addition, in the second sheet (20) of this form, the outer periphery joint (23) and the outer periphery fluid flow channel (24) are located on the same plane, so structurally there is no boundary line distinguishing the two. However, for ease of understanding, the boundary between the two is indicated by a dotted line in FIGS. 15 and FIGS. 16.

[0146] It is preferable that the outsourced Euro section (24) be configured as follows.

[0147] The width of the outer liquid flow channel (24) shown as W9 in FIGS. 16 to 18 (which is the size in the direction perpendicular to the direction in which the outer liquid flow channel (24) extends, and is the width at the joint surface with the first sheet (10)) may be the same as, larger than, or smaller than the width W2 of the outer liquid flow channel (14) of the first sheet (10).

[0148] Next, the inner liquid flow path (25) will be described. The inner liquid flow path (25) is also a liquid flow path and is one part that constitutes the second flow path, the condensate flow path (3).

[0149] As can be seen from FIGS. 15 to 18, the inner fluid flow section (25) is formed on the inner side of the ring-shaped outer fluid flow section (24) within the inner surface (20a) of the main body (21). The inner fluid flow section (25) of this form is a rectangular wall that extends in a direction parallel to the long side (x-direction) when viewed from the plane of the main body (21), and a plurality (three in this form) of inner fluid flow sections (25) are arranged at a predetermined interval in a direction parallel to the short side (y-direction).

[0150] In this form, the surface of each inner liquid flow channel (25) on the inner side (20a) is formed by a flat surface before joining with the first sheet (10). This closes the openings of the plurality of liquid flow channel grooves (15a) of the first sheet (10) to form a condensed liquid flow channel (3).

[0151] W in Figs. 16 and 17 10 The width of the inner liquid flow channel (25) shown as (the size in the direction in which the inner liquid flow channel (25) and the steam flow channel groove (26) are arranged, and the width at the joint surface with the first sheet (10)) may be the same as the width W4 of the inner liquid flow channel (15) of the first sheet (10), or it may be larger or smaller. In this form, it is the same.

[0152] In addition, in this form, each inner liquid flow channel (25) is formed by a flat surface before joining, but a liquid flow channel groove may be formed in the same way as the first sheet. In that case, the liquid flow channel grooves may be in the same position when viewed from a flat plane, or they may be offset from each other.

[0153] Next, the steam passage groove (26) will be described. The steam passage groove (26) is a part through which vaporized steam passes after the working fluid has evaporated, and it constitutes a part of the first passage, the steam passage (4). Figure 16 shows the shape of the steam passage groove (26) viewed in plan, and Figure 17 shows the cross-sectional shape of the steam passage groove (26).

[0154] As can be seen from these drawings, the steam flow channel groove (26) is formed by a groove formed on the inner side of the ring-shaped outer liquid flow channel (24) within the inner surface (20a) of the main body (21). Specifically, the steam flow channel groove (26) of this form is formed between adjacent inner liquid flow channels (25) and between the outer liquid flow channel (24) and the inner liquid flow channel (25), and is a rectangular groove when viewed from the plane of the main body (21) and extends in a direction (x-direction) parallel to the long side. In addition, a plurality (four in this form) of steam flow channel grooves (26) are arranged in a direction (y-direction) parallel to the short side. Accordingly, as can be seen from FIG. 17, the second sheet (20) has a shape with repeated irregularities in the y-direction, formed by convexities by walls that are the outer liquid flow section (24) and the inner liquid flow section (25), and concaveities by grooves that are the steam flow grooves (26).

[0155] Here, the steam flow groove (26) is a groove, and in terms of its cross-sectional shape, it is provided with an opening on the inner side (20a) at the bottom side facing the outer surface (20b) and on the opposite side facing the bottom.

[0156] Additionally, this steam flow groove (26) is a groove formed by stacking an outer layer (20e) and an inner layer (20d) on the inside of the groove.

[0157] It is preferable that the steam flow channel groove (26) be positioned so as to overlap in the thickness direction with the steam flow channel groove (16) of the first sheet (10) when combined with the first sheet (10). This allows the first steam flow channel (4) to be formed by the steam flow channel groove (16) and the steam flow channel groove (26).

[0158] W in Figs. 16 and 17 11The width of the steam flow channel groove (26) shown (the size in the direction in which the inner liquid flow channel (25) and the steam flow channel groove (26) are arranged, and the width at the opening of the groove) may be the same as the width W6 of the steam flow channel groove (16) of the first sheet (10), or it may be larger or smaller.

[0159] In addition, the depth of the steam flow channel groove (26) indicated as D5 in FIG. 17 is preferably 300 μm or less, may be 225 μm or less, or may be 150 μm or less. Meanwhile, this depth D5 is preferably 10 μm or more, may be 25 μm or more, or may be 50 μm or more. The range of this depth D5 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of the depth D5 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0160] In addition, the depth of the steam flow groove (16) of the first sheet (10) and the steam flow groove (26) of the second sheet (20) may be the same, larger, or smaller.

[0161] In this form, the cross-sectional shape of the steam flow channel groove (26) is semi-elliptical, but it may be a rectangular shape such as a square, a square, a trapezoid, a triangle, a semicircle, a semicircle at the bottom, a semi-elliptical at the bottom, or a combination of several of these. Since the steam flow channel can smoothly recirculate the working fluid by reducing the flow resistance of the steam, the shape of the cross-section of the channel may be determined from this perspective.

[0162] In this form, an example in which one steam flow path groove (26) is formed between adjacent inner liquid flow paths (25) has been described, but it is not limited thereto, and two or more steam flow path grooves may be arranged between adjacent inner liquid flow paths.

[0163] In addition, if a steam flow channel groove is formed in the first sheet (10), the steam flow channel groove may not be formed in part or all of the second sheet (20).

[0164] The steam passage connecting groove (27) is a groove that connects multiple steam passage grooves (26). By doing so, the equalization of steam within multiple steam passages (4) is promoted, or the steam is transported over a wider range, allowing many condensate passages (3) to be utilized efficiently, thereby making it possible to make the recirculation of the working fluid smoother.

[0165] As can be seen from FIGS. 15, 16, and 18, the steam flow channel communication groove (27) of this type is formed between the end of the direction in which the inner liquid flow channel (25) and the steam flow channel groove (26) extend and the outer liquid flow channel (24). Additionally, FIG. 18 shows a cross-section perpendicular to the communication direction of the steam flow channel communication groove (27).

[0166] W in Figs. 16 and 18 12 The width of the steam flow channel communication groove (27) shown in Fig. 18 (size in the direction perpendicular to the communication direction, width at the opening surface of the groove) may be the same as the width W7 of the steam flow channel communication groove (17) of the first sheet (10), or it may be larger or smaller. In addition, the depth of the steam flow channel communication groove (27) shown as D6 in Fig. 18 is preferably 300 μm or less, may be 225 μm or less, or 150 μm or less. Meanwhile, this depth D6 is preferably 10 μm or more, may be 25 μm or more, or 50 μm or more. The range of this depth D6 may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of depth D6 may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0167] In addition, the depth of the steam flow channel groove (17) of the first sheet (10) and the steam flow channel groove (27) of the second sheet (20) may be the same, larger, or smaller.

[0168] In this form, the cross-sectional shape of the steam flow channel groove (27) is semi-elliptical, but is not limited thereto and may be a rectangular, square, trapezoidal shape, triangle, semicircle, semicircle at the bottom, semi-elliptical at the bottom, or a combination of several of these shapes. Since the steam flow channel can smoothly recirculate steam by reducing the flow resistance of steam, the shape of the cross-section of the channel may be determined from this perspective.

[0169] Additionally, the steam flow channel groove (27) is also a groove formed in the outer layer (20e) and an inner layer (20d) stacked on the inside of the groove.

[0170] In this form, the outer surface (20b) of the main body (21) is configured to be a flat surface. This increases the adhesion to a member that must be in contact with the outer surface (20b) (e.g., an electronic component to be cooled, or a housing of an electronic device to which heat must be transferred). However, the shape of the outer surface (20b) is not limited to this and may have irregularities depending on the purpose.

[0171] Here, the outer surface (20b) is not shaped to correspond to the inner surface (20a), but is shaped to contribute to the heat transfer intended by the outer surface (20b). In addition, this outer surface (20b) is formed by the outer layer (20e) as described above. Accordingly, the outer layer (20e) has different thicknesses depending on the x-direction position and the y-direction position.

[0172] With these inner surface (20a), outer surface (20b) and the inner layer (20d) and outer layer (20e) constituting them, even when a desired flow path is formed in the vapor chamber and it is thinned, deformation or damage to the vapor chamber can be suppressed against external impacts, expansion due to solidification of the working fluid by low-temperature freezing, and forces due to vapor pressure during operation.

[0173] Next, the structure when the first sheet (10) and the second sheet (20) are combined to form a vapor chamber (1) is described. Through this description, the arrangement, size, shape, etc. of each component of the first sheet (10) and the second sheet (20) are further understood.

[0174] FIG. 19 shows a cross-sectional view of the vapor chamber (1) cut in the thickness direction along the y-direction indicated as I8-I8 in FIG. 1. This drawing is a combination of the drawing shown in FIG. 5 regarding the first sheet (10) and the drawing shown in FIG. 17 regarding the second sheet (20), and shows the cross-sectional view of the vapor chamber (1) in this part.

[0175] FIG. 20 is an enlarged view of the area indicated as I9 in FIG. 19, and FIG. 21 is I in FIG. 1 10 -I 10 A cross-sectional view is shown by cutting along the x-direction indicated by the thickness direction of the vapor chamber (1). This drawing is a combination of the drawing shown in Fig. 7 of the first sheet (10) and the drawing shown in Fig. 18 of the second sheet (20), and shows the cross-sectional view of the vapor chamber (1) in this part.

[0176] As can be seen from FIGS. 1, 2 and FIGS. 19 to 21, a first sheet (10) and a second sheet (20) are arranged to overlap and joined to form a vapor chamber (1). At this time, the inner surface (10a) of the first sheet (10) and the inner surface (20a) of the second sheet (20) are arranged to face each other, the main body (11) of the first sheet (10) and the main body (21) of the second sheet (20) overlap, and the injection part (12) of the first sheet (10) and the injection part (22) of the second sheet (20) overlap. That is, the inner layer (10d) of the first sheet (10) and the outer layer (20e) of the second sheet (20) overlap.

[0177] In this form, the relative positional relationship between the first sheet (10) and the second sheet (20) is configured to be appropriate by aligning the position of the hole (13a) of the first sheet (10) and the hole (23a) of the second sheet (20).

[0178] By means of the laminate of the first sheet (10) and the second sheet (20), each component provided in the main body (11) and the main body (21) is arranged as shown in FIGS. 19 to 21. Specifically, it is as follows.

[0179] The outer periphery joint (13) of the first sheet (10) and the outer periphery joint (23) of the second sheet (20) are arranged to overlap, and both are joined by a joining means such as diffusion joining or brazing. As a result, a hollow space is formed between the first sheet (10) and the second sheet (20), and a working fluid is sealed therein to form a sealed space (2).

[0180] The outer liquid flow section (14) of the first sheet (10) and the outer liquid flow section (24) of the second sheet (20) are arranged to overlap. By doing so, a second liquid flow section (3) is formed in which a condensate, in which the working fluid is condensed and liquefied, flows through the liquid flow groove (14a) of the outer liquid flow section (14) and the outer liquid flow section (24).

[0181] Likewise, the inner liquid flow channel (15) of the first sheet (10) and the inner liquid flow channel (25) of the second sheet (20) are arranged to overlap. Thus, a second liquid flow channel (3) through which condensate flows is formed in the hollow portion by the liquid flow channel groove (15a) of the inner liquid flow channel (15) and the inner liquid flow channel (25).

[0182] In this way, by forming a narrow channel surrounded by walls on all sides in the cross-section, the condensate is moved by strong capillary force, making smooth circulation possible. That is, when considering a channel for the flow of condensate, compared to a channel formed by a so-called groove in which one side of the channel is continuously open, a high capillary force can be obtained according to the condensate channel (3).

[0183] In addition, since the condensate flow path (3) is formed separately from the first flow path, the steam flow path (4), the circulation of the working fluid can be facilitated.

[0184] In addition, adjacent condensate channels (3) are connected to each other by connecting openings (14c) and (15c), so equalization of the condensate is achieved and the circulation of the working fluid is smooth.

[0185] For the condensate flow path (3), in order to exert stronger capillary force in the flow path, the aspect ratio (length-length ratio) in the cross-section of the flow path, which is the value obtained by dividing the flow path width by the flow path height, is preferably greater than 1.0. This ratio may be 1.5 or greater, or 2.0 or greater. Alternatively, the aspect ratio may be less than 1.0. This ratio may be 0.75 or less, or 0.5 or less.

[0186] Among them, from a manufacturing perspective, it is desirable for the width of the Euro to be greater than the height of the Euro, and from this perspective, it is desirable for the aspect ratio to be greater than 1.3.

[0187] Meanwhile, as can be seen from FIGS. 19 and 20, the opening of the steam flow groove (16) of the first sheet (10) and the opening of the steam flow groove (26) of the second sheet (20) are overlapped to face each other to form a flow path, and this becomes the first steam flow path (4) through which steam flows.

[0188] The cross-sectional area of ​​the condensate flow path (3), which is the second flow path mentioned above, is smaller than the cross-sectional area of ​​the steam flow path (4), which is the first flow path. More specifically, the average cross-sectional area of ​​two adjacent steam flow paths (4) (in this form, a flow path formed by one steam flow path groove (16) and one steam flow path groove (26)) is A g ...and the average cross-sectional area of ​​the plurality of condensate flow paths (3) disposed between the two adjacent steam flow paths (4) (in this form, the plurality of condensate flow paths (3) formed by one inner liquid flow path section (15) and one inner liquid flow path groove (25)) is A l When said, the condensate flow path (3) and the steam flow path (4) are A l This A g The relationship is set to be 0.5 times or less, preferably 0.25 times or less. This makes it easier for the working fluid to selectively pass through the first flow path and the second flow path depending on its phase mode (gas phase, liquid phase).

[0189] This relationship needs to be satisfied in at least a part of the entire vapor chamber, and it is even more desirable to satisfy it in the entire vapor chamber.

[0190] As can be seen from FIG. 21, an overlapping flow path is formed so that the opening of the steam flow path connecting groove (17) of the first sheet (10) and the opening of the steam flow path connecting groove (27) of the second sheet (20) face each other.

[0191] Meanwhile, regarding the injection part (12) and injection part (22), as shown in FIGS. 1 and 2, the inner surface (10a) and inner surface (20a) are overlapped so as to face each other, and the opening on the opposite side from the bottom of the injection groove (22a) of the second sheet (20) is blocked by the inner surface (10a) of the injection part (12) of the first sheet (10), and an injection path (5) is formed that communicates the hollow part (condensate path (3) and steam path (4)) between the outside and the main body (11) and the main body (21).

[0192] However, after the working fluid is injected into the hollow part from the injection channel (5), the injection channel (5) is closed and becomes a sealed space (2), so in the final form of the vapor chamber (1), the hollow part is not connected to the outside.

[0193] In the present embodiment, the injection part (12) and the injection part (22) are shown as being provided at one end of a pair of ends along the longitudinal direction of the vapor chamber (1), but are not limited thereto and may be placed at any other end or may be placed in multiple locations. In the case of multiple locations, for example, they may be placed at each of the pair of ends along the longitudinal direction of the vapor chamber (1) or at one end of the other pair of ends.

[0194] A working fluid is contained in the sealed space (2) of the vapor chamber (1). The type of working fluid is not particularly limited, but any working fluid used in a normal vapor chamber, such as pure water, ethanol, methanol, acetone, and mixtures thereof, can be used.

[0195] As described above, in the vapor chamber (1), the condensate flow path (3) and the vapor flow path (4) are composed of an outer layer (10e), an outer layer (20e), an inner layer (10d), and an inner layer (20d), and the inner surface of the condensate flow path (3) and the vapor flow path (4) is composed of an inner layer (10d) and an inner layer (20d).

[0196] Meanwhile, in this form, the outer side of the vapor chamber (1) is formed by an outer layer (10e) and an outer layer (20e), and the shape is not formed by an inner condensate flow path (3) and a vapor flow path (4) (flat in this form).

[0197] In this embodiment, the outer layer (10e) and the outer layer (20e) have higher strength than the inner layer (10d) and the inner layer (20d), and while having a condensate flow path (3) and a vapor flow path (4), deformation or damage to the vapor chamber can be suppressed even when the vapor chamber is thinned. That is, deformation or damage to the vapor chamber can be suppressed even when force is applied due to external impact, expansion caused by solidification of the working fluid due to low-temperature freezing, and vapor pressure during operation.

[0198] Meanwhile, since the inner layer (10d) and the inner layer (20d) can be composed of a material that has chemical stability with respect to the working fluid and high thermal conductivity, the thermal resistance can be suppressed to a small level. At that time, since the strength of the vapor chamber can be improved by the outer layer (10e) and the outer layer (20e), the pattern of movement of the working fluid formed in the inner layer (10d) and the inner layer (20d) can be designed with a focus on thermal performance rather than strength improvement, so it can be said that there is an advantage in terms of thermal performance as well.

[0199] The vapor chamber (1) of this type is particularly effective when it is thin. In this regard, the thickness of the vapor chamber (1) is 1 mm or less, more preferably 0.4 mm or less, and even more preferably 0.2 mm or less. By making it 0.4 mm or less, in the electronic device in which the vapor chamber (1) is installed, there are many cases where the vapor chamber can be installed inside the electronic device without processing (e.g., forming a groove) to form a space for placing the vapor chamber. And according to this type, even such a thin vapor chamber maintains thermal performance while having high strength and being resistant to deformation.

[0200] A vapor chamber as described above can be manufactured by including, for example, the following process. Drawings for explanation are shown in FIGS. 22a to 22d.

[0201] First, as shown in FIG. 22a, a sheet (10e') that becomes the outer layer (10e) of the first sheet (10) is prepared.

[0202] Next, regarding this sheet (10e'), as shown in FIG. 22b, grooves that are to be liquid flow grooves (14a), liquid flow grooves (15a), steam flow grooves (16), and steam flow communication grooves (17) are formed by half etching. Half etching is etching performed up to the middle without penetrating in the thickness direction.

[0203] Next, as illustrated in FIG. 22c, sputtering or plating is performed on the side of the sheet (10e') that has undergone the half-etching to form an inner layer (10d) using a material that becomes the inner layer (10d). At this time, before sputtering or plating is performed using the material of the inner layer (10d), an intermediate layer may be formed by sputtering or plating to increase adhesion. For the formation of the intermediate layer by sputtering, an intermediate layer made of titanium, nickel, or nickel-chromium may be used, and for the formation of the intermediate layer by plating, the so-called strike plating treatment is used.

[0204] The first sheet (10) can be produced by including the above process. According to this, even with laminated materials, the removal of material by processing can be minimized, thereby minimizing material loss.

[0205] In addition, since there is no need to etch the material with other metals stacked on it, corrosion due to the galvanic effect during processing or a decrease in processing precision due to differences in etching rates can be suppressed.

[0206] In addition, materials made by rolling and laminating multiple types of metals tend to have increased warping when thinned, but since this warping can be suppressed to a small size by manufacturing as described above, an improvement in yield can be expected in bonding or conveying.

[0207] The second sheet (20) is also manufactured by including the above-described process, and thus the first sheet (10) and the second sheet (20) are obtained. Then, as shown in FIG. 22d, the inner surface (10a) (inner layer (10d)) of the first sheet (10) and the inner surface (20a) (inner layer (20d)) of the second sheet (20) are overlapped so as to face each other, and positioning is performed using a hole (13a) and a hole (23a) as positioning means, and temporary fixing is performed. The method of temporary fixing is not particularly limited, but may include resistance welding, ultrasonic welding, and bonding with an adhesive.

[0208] Then, after temporary fixation, diffusion bonding is performed to permanently bond the first sheet (10) and the second sheet (20). Here, "permanently bonded" means that, without being bound by the strict meaning, the bonding between the inner surface (10a) of the first sheet (10) and the inner surface (20a) of the second sheet (20) is maintained to the extent that the sealing of the sealed space (2) can be maintained during the operation of the vapor chamber (1).

[0209] In addition, in the above-described form, a method was explained in which the inner layer (10d) and the inner layer (20d) are formed by sputtering or plating, and then the first sheet (10) and the second sheet (20) are joined by diffusion bonding. However, this is not limited thereto, and for example, assuming that the first sheet (10) and the second sheet (20) are joined by brazing, the inner layer (10d) and the inner layer (20d) may be composed of a solder material which is a brazing material. According to this, it is possible to perform the formation and joining of the inner layer (10d) and the inner layer (20d) simultaneously.

[0210] After joining the first sheet (10) and the second sheet (20) as described above, vacuuming is performed through the formed injection channel (5) to reduce the pressure in the hollow section. Then, working fluid is injected into the reduced-pressure hollow section through the injection channel (5) (see FIG. 1) so that the working fluid is placed into the hollow section. Then, the injection channel (5) is closed by using laser melting or caulking with respect to the injection section (12) and injection section (22) to create a sealed space. As a result, the working fluid is stably maintained inside the sealed space (2).

[0211] In the vapor chamber of this type, since the inner liquid flow path (15) and the inner liquid flow path (25) overlap to function as supports, the sealing space can be suppressed from collapsing during bonding and depressurization. Additionally, since the strength is increased by the outer layer (10e) and the outer layer (20e), the occurrence of such collapsing can also be suppressed by this.

[0212] Although the above describes the manufacture of a vapor chamber by etching, the manufacturing method is not limited thereto, and a vapor chamber may also be manufactured by press processing, cutting processing, laser processing, and processing by a 3D printer.

[0213] For example, when manufacturing a vapor chamber using a 3D printer, there is no need to manufacture the vapor chamber by joining multiple sheets, and it becomes possible to make a vapor chamber without joints.

[0214] Next, the operation of the vapor chamber (1) will be explained. FIG. 23 schematically shows a state in which a vapor chamber (1) is placed inside a portable terminal (40), which is a form of electronic device. Here, the vapor chamber (1) is shown as a dotted line because it is placed inside the housing (41) of the portable terminal (40). This portable terminal (40) is configured to include a housing (41) containing various electronic components and a display unit (42) exposed so that an image is visible to the outside through an opening in the housing (41). As one of these electronic components, an electronic component (30) that needs to be cooled by the vapor chamber (1) is placed inside the housing (41).

[0215] The vapor chamber (1) is installed within the housing of a portable terminal, etc., and is installed on an electronic component (30) that is to be cooled, such as a CPU. The electronic component is installed directly on the outer surface (10b) or outer surface (20b) of the vapor chamber (1), or through a highly thermally conductive adhesive, sheet, tape, etc. The location where the electronic component is installed on the outer surface (10b) or outer surface (20b) is not specifically limited and is appropriately set in relation to the arrangement of other components in the portable terminal, etc. In this form, as shown by the dotted line in FIG. 1, the electronic component (30), which is a heat source to be cooled, is placed at the center of the main body (11) in the xy direction on the outer surface (10b) of the first sheet (10). Therefore, in FIG. 1, the electronic component (30) is in a position that is not visible as it is rectangular, so it is shown by the dotted line.

[0216] In the vapor chamber (1) of the present type, the outer surface (10b) and the outer surface (20b) are formed as an outer layer (10e) and an outer layer (20e), and their shape is not formed to follow the shape of the flow path on the inner side. Therefore, the shape of the outer surface (10b) and the outer surface (20b) can be formed from the perspective of increasing adhesion to electronic components or housings to be in contact, and thermal performance can be improved from this perspective.

[0217] FIG. 24 shows a diagram illustrating the flow of the working fluid. For ease of explanation, the second sheet (20) is omitted in this diagram, and the inner surface (10a) of the first sheet (10) is shown.

[0218] When the electronic component (30) generates heat, the heat is transferred through the first sheet (10) by heat conduction, and the condensate located near the electronic component (30) in the sealed space (2) receives the heat. The condensate that receives this heat absorbs the heat, evaporates, and vaporizes. As a result, the electronic component (30) is cooled.

[0219] The vaporized working fluid becomes steam and flows through the steam path (4) as indicated by the solid straight arrow in FIG. 24. Since this flow occurs in a direction away from the electronic component (30), the steam moves away from the electronic component (30).

[0220] The steam within the steam passage (4) is separated from the electronic component (30) which is the heat source and moves to the outer periphery of the vapor chamber (1), which has a relatively low temperature, and is cooled while sequentially losing heat to the first sheet (10) and the second sheet (20) during this movement. The first sheet (10) and the second sheet (20), having lost heat from the steam, transfer heat to the outer surface (10b), the housing (41) of the electronic device (40) in contact with the outer surface (20b), and finally, the heat is released to the outside air.

[0221] The working fluid, having lost heat while moving through the steam passage (4), condenses and becomes liquefied. This condensate adheres to the wall of the steam passage (4). Meanwhile, since steam is continuously flowing through the steam passage (4), the condensate is indicated by arrow I in FIGS. 20 and 21. 11 As shown in the figure, it moves to the condensate flow path (3) so as to be pressed in with steam. Since the condensate flow path (3) of this type is equipped with a connecting opening (14c) and a connecting opening (15c) as shown in FIG. 8 and FIG. 14, the condensate is distributed to a plurality of condensate flow paths (3) through the connecting opening (14c) and the connecting opening (15c).

[0222] The condensate that enters the condensate flow path (3) moves to approach the electronic component (30), which is the heat source, by the capillary force of the condensate flow path and the pressure from the steam, as indicated by the dotted straight arrow in FIG. 24.

[0223] At this time, since the openings of the liquid flow path (3) and the liquid flow path (14a) and the liquid flow path (15a) are blocked by the second sheet (20), the cross-section is made of walls on all sides, thereby increasing the capillary force. This enables smooth movement of the condensate.

[0224] Then, it is vaporized again by heat from the electronic component (30) which is the heat source, and the above process is repeated.

[0225] The vapor chamber (1) described so far is an example consisting of two sheets, a first sheet (10) and a second sheet (20). However, it is not limited to this, and may be a vapor chamber consisting of three sheets as shown in FIG. 25 and four sheets as shown in FIG. 26.

[0226] The vapor chamber illustrated in FIG. 25 is a laminate of a first sheet (10), a second sheet (20), and a third sheet (50) which is an intermediate sheet. The third sheet (50) is positioned to be sandwiched between the first sheet (10) and the second sheet (20), and each is joined.

[0227] In this example, the first sheet (10) is flat on both the inner surface (10a) and the outer surface (10b). Likewise, the second sheet (20) is also flat on both the inner surface (20a) and the outer surface (20b). Furthermore, the inner surface (10a) and the inner surface (20a) are each composed of an inner layer (10d) and an inner layer (20d), respectively, and the outer surface (10b) and the outer surface (20b) are each composed of an outer layer (10e) and an outer layer (20e), respectively.

[0228] At this time, the thickness of the first sheet (10) and the second sheet (20) is preferably 1.0 mm or less, may be 0.5 mm or less, or 0.1 mm or less. Meanwhile, the thickness is preferably 0.005 mm or more, may be 0.015 mm or more, or 0.030 mm or more. The thickness range may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. Additionally, the thickness range may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0229] Meanwhile, the third sheet (50) is provided with a steam flow path groove (51), a wall (52), a liquid flow path groove (53), and a convex portion (54).

[0230] The steam flow channel groove (51) is a groove that penetrates the third sheet (50) in the thickness direction, and when the steam flow channel groove (16) and the steam flow channel groove (26) mentioned above are overlapped to form the first flow channel steam flow channel (4), it is a similar groove and has a shape corresponding to this.

[0231] The wall (52) is a wall provided between adjacent steam flow channels (51) and has a shape corresponding to a wall overlapping the outer liquid flow channel (14) and the outer liquid flow channel (24) and the inner liquid flow channel (15) and the inner liquid flow channel (25) mentioned above.

[0232] The liquid flow channel groove (53) is a groove disposed on the surface of the wall (52) facing the first sheet (10), and has a shape corresponding to the liquid flow channel groove (14a) and the liquid flow channel groove (15a) described above. The second flow channel, the condensate flow channel (3), is formed by the liquid flow channel groove (53).

[0233] The convex portion (54) is a convex portion positioned between adjacent liquid flow grooves (53) and is positioned in a shape corresponding to the convex portion (14b) and convex portion (15b) mentioned above.

[0234] In addition, a groove is formed in the third sheet (50) to serve as a condensate flow path (3) and a steam flow path (4), and an inner layer (50d) is laminated on the inside of this groove. Furthermore, since the third sheet (50) does not form an outer surface, the area where the inner layer (50d) is laminated is a base layer (50f), which serves as a foundation for laminating the inner layer (50d). Accordingly, the wall (52) is formed such that the inner layer (50d) is laminated on the outer circumference of the base layer (50f). The material constituting the base layer (50f) can be considered to be the same as that of the outer layer (10e).

[0235] A vapor chamber with the configuration described above is also said to have the same effect as the above.

[0236] The vapor chamber illustrated in FIG. 26 is a laminate of a first sheet (10), a second sheet (20), and two intermediate sheets, a third sheet (60) and a fourth sheet (70). These sheets are laminated and bonded in the order of the first sheet (10), the third sheet (60), the fourth sheet (70), and the second sheet (20), starting from the first sheet (10).

[0237] In this form, the inner surface (10a, 20a) and outer surface (10b, 20b) of the first sheet (10) and the second sheet (20) are both flat. In addition, the inner surface (10a) and the inner surface (20a) are each composed of an inner layer (10d) and an inner layer (20d), respectively, and the outer surface (10b) and the outer surface (20b) are each composed of an outer layer (10e) and an outer layer (20e).

[0238] At this time, the thickness of the first sheet (10) and the second sheet (20) is preferably 1.0 mm or less, may be 0.5 mm or less, or 0.1 mm or less. Meanwhile, the thickness is preferably 0.005 mm or more, may be 0.015 mm or more, or 0.030 mm or more. The range of thickness may be determined by a combination of any one of the above-mentioned upper limit candidate values ​​and one of the above-mentioned lower limit candidate values. In addition, the range of thickness may be determined by any two combinations of the above-mentioned upper limit candidate values ​​or any two combinations of the above-mentioned lower limit candidate values.

[0239] In addition, for ease of viewing, the hatching of the inner layer is omitted in this form.

[0240] The third sheet (60) is provided with a liquid flow groove (14a), a liquid flow groove (15a), and a steam flow groove (16).

[0241] In this form, the liquid flow groove (14a), liquid flow groove (15a), and steam flow groove (16) are grooves that penetrate the third sheet (60) in the thickness direction, but otherwise, they can be made in the same form as the liquid flow groove (14a), liquid flow groove (15a), and steam flow groove (16) described above.

[0242] Furthermore, the third sheet (60) has grooves formed therein that serve as condensate channels (3) and steam channels (4), and an inner layer (60d) is laminated on the inside of these grooves. Additionally, since the third sheet (60) does not form an outer surface, the area where the inner layer (60d) is laminated is a base layer (60f) that serves as a foundation for laminating the inner layer (60d). The material constituting the base layer (60f) can be considered to be the same as that of the outer layer (10e).

[0243] The fourth sheet (70) is provided with a steam flow groove (26).

[0244] In this form, the steam flow channel groove (26) is a groove that penetrates the fourth sheet (70) in the thickness direction, but otherwise, it can be made in the same form as the steam flow channel groove (26) described above.

[0245] In addition, a groove is formed in the fourth sheet (70) to serve as a steam passage (4), and an inner layer (70d) is laminated on the inside of this groove. Furthermore, since the fourth sheet (70) does not form an outer surface, the area where the inner layer (70d) is laminated is a base layer (70f) that serves as a foundation for laminating the inner layer (60d). The material constituting the base layer (70f) can be considered to be the same as that of the outer layer (10e).

[0246] By stacking these sheets, a second condensate channel (3) surrounded by the first sheet (10), the condensate channel (14a), and the fourth sheet (70) and a second condensate channel (3) surrounded by the first sheet (10), the condensate channel (15a), and the fourth sheet (70) are formed.

[0247] Likewise, the steam flow channel (16) and the steam flow channel (26) overlap and are placed between the first sheet (10) and the second sheet (20) to become the first steam flow channel (4).

[0248] A vapor chamber with the configuration described above is also said to have the same effect as the above.

[0249] [2nd form]

[0250] FIG. 27 shows an external perspective view of a vapor chamber (101) regarding a second form, and FIG. 28 shows an exploded perspective view of a vapor chamber (101).

[0251] As can be seen from FIGS. 27 and 28, the vapor chamber (101) of this type has a first sheet (110) and a second sheet (120). As described later, the first sheet (110) and the second sheet (120) are overlapped and joined (diffusion joining, brazing, etc.) so that a hollow portion is formed between the first sheet (110) and the second sheet (120), and an operating fluid is sealed in this hollow portion to form a sealed space (102) (see, for example, FIG. 45).

[0252] In this form, the first sheet (110) is a member in the shape of a sheet overall, and when viewed in plan, it is L-shaped. FIG. 29 shows a perspective view of the first sheet (110) viewed from the inner side (110a), and FIG. 30 shows a plan view of the first sheet (110) viewed from the inner side (110a). In addition, FIG. 31 shows I of FIG. 30. 101 -I 101 The cut surface of the first sheet (110) when cut was shown.

[0253] The first sheet (110) is provided with an inner surface (110a), an outer surface (110b) opposite to the inner surface (110a), and a side surface (110c) that forms a thickness over the inner surface (110a) and the outer surface (110b), and a pattern is formed for a flow path for the working fluid to move toward the inner surface (110a). As described below, the inner surface (110a) of the first sheet (110) and the inner surface (120a) of the second sheet (120) are overlapped so as to face each other, thereby forming a hollow portion, and the working fluid is sealed therein to form a sealed space (102).

[0254] The thickness of the first sheet (110) is not specifically limited, but can be thought of as being similar to the first sheet (10).

[0255] The first sheet (110) is provided with a main body (111) and an injection part (112). The main body (111) is a sheet shape that forms a portion through which the working fluid moves, and in this form, it is an L-shape having a curved portion when viewed in a flat plane.

[0256] The injection portion (112) is a part for injecting working fluid into the hollow portion formed by the first sheet (110) and the second sheet (120), and in this form, it is a rectangular sheet shape when viewed from the plane of the main body (111) and when viewed from the plane protruding from the L-shape. In this form, the injection portion (112) of the first sheet (110) is a flat surface on both the inner side (110a) and the outer side (110b).

[0257] A structure for the movement of an operating fluid is formed on the inner surface (110a) side of the main body (111). Specifically, on the inner surface (110a) side of the main body (111), an outer circumferential joint (113), an outer circumferential liquid flow path (114), an inner liquid flow path (115), a steam flow path groove (116), and a steam flow path communication groove (117) are provided.

[0258] The outer periphery joint (113) is a surface formed along the outer periphery of the main body (111) on the inner surface (110a) side of the main body (111). By overlapping and joining (diffusion joining, brazing, etc.) the outer periphery joint (113) to the outer periphery joint (123) of the second sheet (120), a hollow space is formed between the first sheet (110) and the second sheet (120), and by sealing the working fluid therein, it becomes a sealed space (102). The width of the outer periphery joint (113) can be appropriately set as needed, but at the narrowest part, it can be considered the same as the width W1 described for the first sheet (10).

[0259] The outer liquid flow path (114) functions as a liquid flow path and is a portion of the condensate flow path (103) (see, for example, FIG. 46), which is a flow path through which the working fluid passes when it condenses and becomes liquefied. In FIG. 32, arrow I in FIG. 31 102 The part indicated by, in FIG. 33, I in FIG. 30 103 -I 103 A cross-sectional view is shown. In any drawing, the cross-sectional shape of the outer liquid flow path (114) is shown. Also, in FIG. 34, the arrow I in FIG. 32 105 An enlarged view of the outer liquid flow section (114) as seen in the direction indicated by the figure is shown in planar form.

[0260] As can be seen from these drawings, the outer liquid flow section (114) is formed along the inner side of the outer joint (113) among the inner surface (110a) of the main body (111) and is arranged to be in an annular shape along the outer circumference of the sealed space (102). In addition, the outer liquid flow section (114) has a plurality of liquid flow grooves (114a) that extend parallel to the direction in which the outer liquid flow section (114) extends, and the plurality of liquid flow grooves (114a) are spaced apart in a direction different from the direction in which the liquid flow grooves (114a) extend. Accordingly, as can be seen from FIGS. 32 and 33, in the outer liquid flow section (114), the liquid flow grooves (114a), which are concave parts in the cross-section, and the wall (114b), which is a convex part between the liquid flow grooves (114a), are formed repeatedly in an uneven manner.

[0261] Here, the liquid flow groove (114a) is a groove and, in terms of its cross-sectional shape, has a bottom portion and an opening on the opposite side facing the bottom portion.

[0262] By providing multiple liquid flow channels (114a) in this way, the depth and width of each liquid flow channel (114a) are reduced, and the cross-sectional area of ​​the condensate flow channel (103) (e.g., see FIG. 46) is reduced, thereby allowing for the use of large capillary force. Meanwhile, by making the liquid flow channels (114a) multiple, the total internal volume of the condensate flow channel (103) is secured to a suitable size, allowing the condensate to flow in the required flow rate.

[0263] Additionally, in the outer liquid flow path (114), as can be seen from FIG. 23, adjacent liquid flow path grooves (114a) are connected by a connecting opening (114c) formed with a gap in the wall (114b). This promotes the equalization of the amount of condensate between the multiple liquid flow path grooves (114a), thereby allowing the condensate to flow efficiently. Furthermore, a connecting opening (114c) formed in the wall (114b) adjacent to the steam flow path groove (116) forming the steam flow path (104) connects the steam flow path (104) with the condensate flow path (103). Accordingly, by forming a communication opening (114c), the condensate generated in the steam flow path (104) can be smoothly moved to the condensate flow path (103), and the steam generated in the condensate flow path (103) can also be smoothly moved to the steam flow path (104), and this also makes it possible to promote the smooth movement of the working fluid.

[0264] In this form, as shown in FIG. 34, a communication opening (114c) is positioned opposite to the same location in the direction in which the liquid flow groove (114a) extends, with the corresponding groove of one liquid flow groove (114a) in between. However, it is not limited to this, and the communication opening (114c) may be positioned by imitating the example described using FIG. 9.

[0265] In addition, the width of the outsourced Euro section (114) can be considered the same as the width W2 described in the first sheet (10).

[0266] Regarding the liquid flow channel groove (114a), the width of the groove can be considered as the width W3 described in the first sheet (10), and the depth of the groove as the depth D1 described in the first sheet (10). However, it is preferable that the depth of the liquid flow channel groove (114a) be smaller than the remaining sheet thickness after subtracting the depth of the groove from the thickness of the first sheet (110). This makes it more reliable to prevent the sheet from rupturing when the working fluid freezes.

[0267] Also, regarding the wall (114b), W in FIG. 32 and FIG. 34 101 The width indicated by is preferably 20㎛ or more and 300㎛ or less. If this width is smaller than 20㎛, it is prone to breakage due to repeated freezing and melting of the working fluid, and if this width is larger than 300㎛, the width of the communication opening (114c) becomes excessively large, and there is a risk that smooth communication of the working fluid with the adjacent condensate flow path (103) will be hindered.

[0268] With respect to the communication opening (114c), the size of the communication opening (114c) along the direction in which the liquid flow groove (114a) extends can be considered as size L1 as described in the first sheet (10), and the pitch of the adjacent communication opening (114c) in the direction in which the liquid flow groove (114a) extends can be considered as pitch L2 as described in the first sheet (10).

[0269] In this form, the cross-sectional shape of the liquid channel groove (114a) is semi-elliptical, but is not limited thereto and may be square, rectangular, trapezoidal, triangular, semicircular, semicircular at the bottom, semi-elliptical at the bottom, etc.

[0270] Additionally, it is preferable that the liquid channel groove (114a) be formed continuously along the edge of the sealed space. That is, it is preferable that the liquid channel groove (114a) be extended in a ring shape over a full period without being interrupted by other components. This reduces factors that hinder the movement of the condensate, thereby allowing the condensate to be moved smoothly.

[0271] In this form, an external liquid flow path (114) is provided, but the external liquid flow path (114) does not necessarily have to be provided. From the perspective of the shape of the vapor chamber, the relationship with the device to which the vapor chamber is applied, and the usage environment, it may be configured in a form where the external liquid flow path (114) is not provided. In this form, the outer periphery of the sealed space can be configured to serve as a vapor flow path, thereby transporting heat to the outer periphery of the vapor chamber by vapor, which may allow for higher cracking.

[0272] Returning to FIGS. 29 to 31, the inner liquid flow path (115) will be described. The inner liquid flow path (115) also functions as a liquid flow path and is a part of the condensate flow path (103) through which the working fluid passes when it condenses and becomes liquefied. FIG. 35 shows I in FIG. 31. 105 The part indicated by [] is illustrated. The cross-sectional shape of the inner fluid flow path (115) is also shown in this drawing. Additionally, in FIG. 36, the arrow I in FIG. 35 106 An enlarged view of the inner fluid flow path (115) in a planar view from the direction indicated by the figure is shown.

[0273] As can be seen from these drawings, the inner liquid flow section (115) is formed on the inner side of the ring of the outer liquid flow section (114) (or outer joint section (113)), which is ring-shaped, in the inner surface (110a) of the main body (111). As can be seen from FIGS. 29 and FIGS. 30, the inner liquid flow section (115) of this form is a convex shape that extends with a curved portion, and a plurality (five in this form) of inner liquid flow sections (115) are arranged with a spacing in a direction different from the direction of extension and are placed between the steam flow grooves (116).

[0274] In each inner liquid flow section (115), a liquid flow groove (115a) is formed, which is a groove parallel to the direction in which the inner liquid flow section (115) extends, and a plurality of liquid flow grooves (115a) are arranged at a predetermined interval in a direction different from the direction in which the liquid flow groove (115a) extends. Accordingly, as can be seen from FIGS. 31 and 36, in the inner liquid flow section (115), the liquid flow groove (115a), which is a concave part, and the wall (115b), which is a convex part between the liquid flow groove (115a), are formed repeatedly in a concave manner in the cross-section thereof.

[0275] Here, the liquid flow groove (115a) is a groove and, in terms of its cross-sectional shape, has a bottom portion and an opening located on the opposite side facing the bottom portion.

[0276] By providing multiple liquid flow channel grooves (115a) in this way, the depth and width of each liquid flow channel groove (115a) are reduced, thereby reducing the cross-sectional area of ​​the condensate flow channel (103) (e.g., see FIG. 46) and allowing for the use of large capillary force. Meanwhile, by making the liquid flow channel grooves (115a) multiple, the total internal volume of the condensate flow channel (103) is secured to a suitable size, allowing the condensate to flow in the required flow rate.

[0277] In addition, even in the inner liquid flow path (115), as can be seen from FIG. 36, the adjacent liquid flow path groove (115a) is connected by a connecting opening (115c) formed with a gap in the wall (115b), so as to be identical to FIG. 34 by mimicking the example of the outer liquid flow path (114). This promotes the equalization of the amount of condensate between the multiple liquid flow path grooves (115a), thereby allowing the condensate to flow efficiently. Furthermore, the connecting opening (115c) formed in the wall (115b) adjacent to the steam flow path groove (116) forming the steam flow path (104) connects the steam flow path (104) with the condensate flow path (103). Accordingly, by configuring the communication opening (115c) as described later, the condensate generated in the steam flow path (104) can be smoothly moved to the condensate flow path (103), and the steam generated in the condensate flow path can also be smoothly moved to the steam flow path (104), thereby making it possible to promote the smooth movement of the working fluid.

[0278] For the inner liquid flow channel (115), mimicking the example of FIG. 9, a communication opening (115c) may be placed at a different location in the direction in which the liquid flow channel groove (115a) extends, with the corresponding groove of one liquid flow channel groove (115a) in between.

[0279] The width of the inner fluid passage (115) having the above configuration can be considered the same as the width W4 described for the first sheet (10).

[0280] Regarding the liquid flow groove (115a), the groove width can be considered as W5 as described for the first sheet (10), and the groove depth as D2. Additionally, it is preferable that the groove depth be smaller than the remaining sheet thickness after subtracting the groove depth from the thickness of the first sheet (110). This makes it more reliable to prevent the sheet from rupturing when the working fluid freezes.

[0281] Also, regarding the wall (115b), W in FIG. 35 and FIG. 36 102 The width indicated by the figure is preferably 20㎛ or more and 300㎛ or less. If this width is smaller than 20㎛, it is prone to breakage due to repeated freezing and melting of the working fluid, and if this width is larger than 300㎛, the width of the communication opening (115c) becomes excessively large, and there is a risk that smooth communication between the condensate flow paths (103) will be hindered.

[0282] Regarding the communication opening (115c), the size of the communication opening (115c) along the direction in which the liquid flow groove (115a) extends can be conceived as L3 as described in the first sheet (10), and the pitch of the adjacent communication opening (115c) in the direction in which the liquid flow groove (115a) extends can be conceived as L4 as described in the first sheet (10).

[0283] In addition, the cross-sectional shape of the liquid channel groove (115a) in this form is semi-elliptical, but is not limited thereto and may be square, rectangular, trapezoidal, triangular, semicircular, semicircular at the bottom, semi-elliptical at the bottom, etc.

[0284] Next, the steam flow channel groove (116) will be described. The steam flow channel groove (116) forms part of the steam flow channel (104) in the area where the working fluid in the steam phase and the condensate phase moves. FIG. 30 shows the shape of the steam flow channel groove (116) viewed in plan, and FIG. 31 shows the cross-sectional shape of the steam flow channel groove (116).

[0285] As can be seen from these drawings, the steam flow channel groove (116) is formed by a groove formed on the inner side of the ring of the ring-shaped outer liquid flow channel (114) among the inner surface (110a) of the main body (111). In detail, the steam flow channel groove (116) of this form is formed between adjacent inner liquid flow channels (115) and between the outer liquid flow channel (114) and the inner liquid flow channel (115), and is an extended groove having a curved portion. In addition, a plurality (six in this form) of steam flow channel grooves (116) are arranged in a direction different from the direction of extension. Accordingly, as can be seen from FIG. 31, the first sheet (110) has a shape in which the inner liquid flow channel (115) is convex and the steam flow channel groove (116) is concave, with repeated unevenness.

[0286] Here, the steam flow channel (116) is a groove and, in terms of its cross-sectional shape, has a bottom portion and an opening on the opposite side facing the bottom portion.

[0287] The steam flow channel groove (116) is configured to allow the working fluid to move in the steam flow channel (104) when the steam flow channel groove (126) of the second sheet (120) is combined to form the steam flow channel (104).

[0288] The width of the steam flow channel (116) is formed to be at least larger than the width of the liquid flow channel (114a) and liquid flow channel (115a) described above, and can be thought of as being similar to the width W6 described in the first sheet (10).

[0289] Meanwhile, the depth of the steam flow channel (116) is formed to be greater than the depth of the liquid flow channel (114a) and liquid flow channel (115a) described above, and can be thought of as being similar to the depth D3 described in the first sheet (10).

[0290] By these, stable movement of the working fluid is achieved when the steam flow path is formed, and by making the cross-sectional area of ​​the steam flow path groove larger than that of the liquid flow path groove, steam, which has a larger volume than the condensate due to the nature of the working fluid, can be moved smoothly.

[0291] Here, the steam passage groove (116) is preferably configured such that when the steam passage (104) is formed by combining it with the second sheet (120) as described later, the width of the steam passage (104) is greater than the height (thickness direction size). Accordingly, the aspect ratio, which is the value obtained by dividing the height by the width, is preferably 4.0 or higher, and more preferably 8.0 or higher.

[0292] In this form, the cross-sectional shape of the steam flow channel groove (116) is semi-elliptical, but is not limited thereto and may be square, rectangular, trapezoidal, triangular, semi-circular, circular at the bottom, semi-elliptical at the bottom, etc.

[0293] The steam flow channel communication groove (117) is a groove that connects a plurality of steam flow channel grooves (116) and is combined with the steam flow channel communication groove (127) of the second sheet (120) to form a channel that connects a plurality of steam flow channels (104) through the steam flow channel grooves (116) at its end. By doing so, the movement of the working fluid generated in the steam flow channel (104) in the direction in which the inner liquid flow channel portion (115) extends can be carried out smoothly.

[0294] The steam flow channel groove (117) can be thought of as similar to the steam flow channel groove (17) described in the first sheet (10).

[0295] In this form, the first sheet (110) is provided with a curved portion (118c) which is a part where the direction in which the liquid flow path (114a) (outer liquid flow path portion (114)), the liquid flow path (115a) (inner liquid flow path portion (115)), and the steam flow path (116) extends changes. That is, the first sheet (110) has a straight section (118a) in which the liquid flow groove (114a) (outer liquid flow section (114)), the liquid flow groove (115a) (inner liquid flow section (115)), and the steam flow groove (116) extend in a straight line shape in the x-direction, a straight section (118b) in which the liquid flow groove (114a) (outer liquid flow section (114)), the liquid flow groove (115a) (inner liquid flow section (115)), and the steam flow groove (116) extend in a straight line shape in the y-direction, and a curved section (118c) connecting the liquid flow groove (114a) (outer liquid flow section (114)), the liquid flow groove (115a) (inner liquid flow section (115)), and the steam flow groove (116) in the straight section (118a) and the straight section (118b). Accordingly, the curved portion (118c) has one end connected to one straight portion (118a) and the other end connected to the other straight portion (118b), so that the liquid flow path groove (114a) (outer liquid flow path portion (114)), liquid flow path groove (115a) (inner liquid flow path portion (115)), and steam flow path groove (116) are curved so that the flow changes direction from the x direction to the y direction and from the y direction to the x direction.

[0296] Here, the boundary between the straight section and the curved section should be defined as the point where the direction of flow begins to change in each groove. The same can be applied to the following.

[0297] In this configuration, when considering the width of the plurality of steam flow grooves (116) in the curved section (118c), the width is configured to be larger in the inner side where the radius of curvature is smaller and smaller in the outer side where the radius of curvature is larger. According to this, the balance of flow resistance in the curved section can be increased, and the movement of the working fluid becomes smoother, thereby increasing the heat transport capacity.

[0298] The specific form resulting therefrom is not particularly limited, but examples include the forms illustrated in FIG. 37, FIG. 38, FIG. 39, and FIG. 40.

[0299] FIGS. 37 to 40 are drawings that explain with attention to a single steam flow channel groove (116). The meanings of the symbols shown in these drawings are as follows.

[0300] · The steam flow groove (116) is in the curved portion (118c), and the inner wall w of the curve in The radius of curvature is r in And, its center is on the arc of O1.

[0301] · The steam flow groove (116) is in the curved portion (118c), and the outer wall w of the curve out The radius of curvature is r out And, as explained later, depending on the shape, the center is on the arc of O1, O2, O3, or O4.

[0302] · Among the plurality of steam flow path grooves (116) belonging to the curved section (118c), the width of the narrowest steam flow path groove is α, and the width of the other steam flow path grooves (116) is expanded to β (α < β). That is, in this form, among the plurality of steam flow paths (116) belonging to the curved section (118c), the width of the steam flow path groove (116) positioned on the outermost side is α.

[0303] · The curve shown by the dashed line is a virtual line when the width of the steam flow channel groove (116) is α, and the radius of curvature at this time is r c And, its center is on the arc of O1.

[0304] · The radius of the curve can be defined as a circle passing through a total of three points: two points where the direction of the wall (inner wall, outer wall) begins to change in the curved section, and one point at the center of these two points, and the radius of this circle can be defined as the radius of the curve. Furthermore, when the curve is considered as part of a circle or an ellipse, as illustrated in FIGS. 37 to 40, the center side of the circle or ellipse relative to the curve (i.e., O1, O2, O3, O4 side) is defined as the "inner side" of the curved section, and the side opposite to the center side of the circle or ellipse relative to the curve is defined as the "outer side" of the curve. Additionally, the shape of the curve is not limited to being the same shape as part of a circle; it may be the same shape as part of an ellipse, or some of the multiple steam flow grooves arranged in the curved section may be straight. The shape of the curved section can be conceived in the same way below.

[0305] The example of FIG. 37 shows the outer wall w of the steam flow channel groove (116) in the curved portion (118c). out radius of curvature r out The radius of this curve r c Greater than (r out >r c Along with ), the center is O1. In this embodiment, regarding the steam flow path groove (116) belonging to the curved portion (118c), the steam flow path groove (116) positioned on the inner side is r out This can be made larger. As a result, the groove width β also becomes larger as the steam flow groove (116) placed on the inner side increases.

[0306] The example of FIG. 38 shows the outer wall w of the steam flow channel groove (116) in the curved portion (118c). out radius of curvature r out The radius of this curve r c Same as (r out =r cHowever, the center is located at O2, which is offset toward the steam flow groove (116) rather than O1. In this embodiment, in the steam flow groove (116) belonging to the curved portion (118c), the outer wall w of the steam flow groove (116) positioned on the inner side out The center (O2) of the steam flow path (116) should be positioned close to the steam flow path (116). As a result, the groove width β also increases as the steam flow path (116) is positioned further inside.

[0307] The example of FIG. 39 shows the outer wall w of the steam flow channel groove (116) in the curved portion (118c). out radius of curvature r out The radius of this curve r in and radius of curvature r c Smaller than (r out <r in <r c ), its center is located at O3, which is offset toward the steam flow groove (116) side from O1. In this embodiment, in the steam flow groove (116) belonging to the curved portion (118c), r out Depending on both the size and the position of O3, the width β of the steam flow channel groove (116) placed on the inner side can be made larger.

[0308] The example of FIG. 40 shows the outer wall w of the steam flow channel groove (116) in the curved portion (118c). out radius of curvature r out and inner wall w in radius of curvature r in This is identical, and the relevant r out The center of O4, r in It is located on the side offset toward the steam flow groove (116) rather than the center O1. In this example of the form, for the steam flow groove (116) belonging to the curved portion (118c), the width β should be made larger for the steam flow groove (116) that is positioned inwardly according to the position of O4.

[0309] Additionally, in the examples of FIGS. 37 and 38, the outer wall w outIn this case, the straight section and the arc section are connected by a single bend. It is not limited to this, and the connection may be configured so that the direction changes gradually and smoothly by making this single bend into a number of small bends or a curve.

[0310] The extent to which the width of the inner steam passage groove is expanded is not particularly limited, but it is preferable that it be about 3% to 20% wider than the adjacent groove placed on the outer side. This ratio does not need to be constant or regular across multiple grooves and can be set appropriately.

[0311] The width of the steam flow groove (116) in the curved section (118c) relative to the width of the steam flow groove (116) in the straight section (118b) is not specifically limited, but the width may be increased in the range of 10% to 100% compared to the straight section (118a) and the straight section (118b). By making it within this range, the balance between the flow resistance of the straight section (118b) and the flow resistance of the curved section (118c) can be improved.

[0312] In addition, although the shape was described above with attention to the width of the steam flow channel groove, the depth of the steam flow channel groove (116) in the curved section (118c) may be changed instead, or in addition to that. That is, among the multiple steam flow channel grooves (116) belonging to the curved section (118c), the steam flow channel groove (116) placed on the outer side may be the shallowest, and the steam flow channel groove (116) placed on the inner side may be configured to become deeper. In a shape formed by changing the depth direction (z-direction), expansion in the planar direction (xy-direction) is suppressed, so the area for arranging the condensate flow channel is increased to improve heat transport capacity, or the outer periphery joint can be widened to improve the reliability of internal pressure.

[0313] That is, by configuring the width of the steam flow path groove (116) in the curved portion (118c) to differ for each groove as described above, when the first sheet (110) and the second sheet (120) are combined, the width of the steam flow path positioned on the inner side in the curved portion can be made larger than the width of the steam flow path positioned on the outer side. By doing so, the cross-sectional area of ​​the steam flow path positioned on the inner side in the curved portion can be made larger than the cross-sectional area of ​​the steam flow path positioned on the outer side.

[0314] Meanwhile, by configuring the depth of the steam flow path grooves (116) in the curved portion (118c) to differ from groove to groove, when the first sheet (110) and the second sheet (120) are combined, the height of the steam flow path positioned on the inner side in the curved portion can be made greater than the height of the steam flow path positioned on the outer side. As a result, the cross-sectional area of ​​the steam flow path positioned on the inner side in the curved portion can be made greater than the cross-sectional area of ​​the steam flow path positioned on the outer side.

[0315] Additionally, in the curved section (118c), the pitch of the communication opening (114c) and communication opening (115c) (see FIG. 34 and FIG. 36) formed in the wall (114b) and wall (115b) that partition the liquid flow groove (114a) and liquid flow groove (115a) and the vapor flow groove (116) can be configured to be different from other parts (straight section (118a), straight section (118b)). This means that the pitch of the communication opening in the curved section may be larger or smaller than the pitch of the curved section in the straight section. Which shape to adopt can be determined by comprehensively judging the shape that can lower flow resistance, taking into account the influence of the overall shape of the vapor chamber, the location of the heat source, etc. Alternatively, for this curved portion (118c), it is not necessary to provide a communication opening (114c) and a communication opening (115c) formed in the wall (114b) and the wall (115b) that partition the liquid flow groove (114a) and the liquid flow groove (115a) and the steam flow groove (116).

[0316] In a shape where the pitch of the communication opening in the curved section is larger than the pitch of the communication opening in the straight section, the working fluid flowing through the steam passage groove (116) (steam passage (104)) can be prevented from entering the communication opening (114c) and communication opening (115c) from the curved section (118c). In the curved section (118c), because a force acts to cause the working fluid moving through the steam passage groove (116) (steam passage (104)) to enter the communication opening (114c) and communication opening (115c) more directly in the direction of flow, there is a tendency for the flow resistance to increase in the unevenness of the communication opening (114c) and communication opening (115c) or the steam to enter the condensate passage (103). In contrast, the increase in such flow resistance can be suppressed by increasing the pitch of the connecting opening (114c) and connecting opening (115c) that are in contact with the steam flow groove (116) in the curved section (118c), or by eliminating the connecting opening (114c) and connecting opening (115c) that are in contact with the steam flow groove (116), and by making the difference in flow resistance between each steam flow groove (116) (steam flow (104)) smaller, thereby improving the balance of the movement of the working fluid and increasing the heat transport capacity.

[0317] Meanwhile, in a form where the pitch of the flue opening in the curved section is smaller than the pitch of the flue opening in the straight section, the steam flowing through the steam passage groove (steam passage) in the curved section has an increased chance of strongly contacting the wall surface, so it tends to condense easily. In this case, by making the pitch of the flue opening in the curved section smaller than the pitch of the flue opening in the straight section, the number of flue openings can be increased, allowing the condensate to be smoothly introduced into the liquid passage groove (condensate passage) and preventing the steam passage from being blocked by the condensate. This can suppress the increase in flow resistance and further reduce the difference in flow resistance between each steam passage groove (steam passage), thereby improving the balance of the working fluid's movement and increasing the heat transport capacity.

[0318] In addition, instead of the size of the pitch mentioned above, in the curved section, the length of the wall between adjacent communication openings (size in the direction along the flow path) may be configured to be larger or smaller than the length of the wall in the straight section. In this case, the length of the wall belonging to the curved section does not need to be constant and may vary from wall to wall. In this case, the relationship between the length of the wall in the curved section and the length of the wall in the straight section is determined by the relationship between the average values ​​of the wall lengths belonging to each section.

[0319] Next, the second sheet (120) will be described. In this form, the second sheet (120) is also a member in the shape of a sheet overall, and when viewed in a planar view, it is curved in an L-shape. FIG. 41 shows a perspective view of the second sheet (120) viewed from the inner side (120a), and FIG. 42 shows a plan view of the second sheet (120) viewed from the inner side (120a). Additionally, FIG. 43 shows I in FIG. 42 107 -I 107 The cut surface of the second sheet (120) when cut is shown. Also, in FIG. 44, I in FIG. 42 is shown. 108 -I 108 The cut surface of the second sheet (120) when cut was shown.

[0320] The second sheet (120) is provided with an inner surface (120a), an outer surface (120b) opposite to the inner surface (120a), and a side surface (120c) that forms a thickness over the inner surface (120a) and the outer surface (120b), and a pattern is formed in which the working fluid moves toward the inner surface (120a). As described below, the inner surface (120a) of the second sheet (120) and the inner surface (110a) of the first sheet (110) are joined by overlapping so as to face each other, thereby forming a hollow portion, and the working fluid is sealed therein to form a sealed space (102).

[0321] The thickness of the second sheet (120) is not specifically limited, but can be thought of as similar to the second sheet (20) described above.

[0322] The second sheet (120) is equipped with a main body (121) and an injection part (122). The main body (121) is a sheet shape that forms a portion through which the working fluid moves, and in this form, it is an L-shape having a curved portion when viewed in a flat plane.

[0323] The injection portion (122) is a part for injecting working fluid into the hollow portion formed by the first sheet (110) and the second sheet (120), and in this form, it is a rectangular sheet shape when viewed from the plane of the main body (121) and protruding from the L-shape. In this form, an injection groove (122a) is formed on the inner side (120a) of the injection portion (122) of the second sheet (120), and is connected to the inner side (part to be the hollow portion, sealed space (102)) of the main body (121) from the side (120c) of the second sheet (120).

[0324] On the inner surface (120a) of the main body (121), a structure for the movement of an operating fluid is formed. Specifically, on the inner surface (120a) of the main body (121), an outer circumferential joint (123), an outer circumferential liquid flow path (124), an inner liquid flow path (125), a steam flow path groove (126), and a steam flow path communication groove (127) are provided.

[0325] The outer periphery joint (123) is a surface formed along the outer periphery of the main body (121) on the inner surface (120a) side of the main body (121). By overlapping and joining (diffusion joining or brazing, etc.) the outer periphery joint (123) to the outer periphery joint (113) of the first sheet (110), a hollow space is formed between the first sheet (110) and the second sheet (120), and an operating fluid is sealed therein to form a sealed space (102).

[0326] It is preferable that the width of the outer joint (123) be the same as the width of the outer joint (113) of the main body (111) of the first sheet (110) described above.

[0327] The outer liquid flow path (124) functions as a liquid flow path and is a part of the condensate flow path (103) (e.g., see FIG. 46), which is a flow path through which the working fluid passes when it condenses and becomes liquefied.

[0328] The outer liquid flow channel (124) is formed along the inner side of the outer joint (123) among the inner surface (120a) of the main body (121), and is formed to form an annular shape along the outer circumference of the sealed space (102). In this form, the outer liquid flow channel (124) of the second sheet (120) is a flat surface before joining with the first sheet (110), as can be seen from FIGS. 43 and 44, and is located on the same plane as the outer joint (123). By doing so, the opening of at least some of the liquid flow channel grooves (114a) among the plurality of liquid flow channel grooves (114a) of the first sheet (110) is closed to form a condensed liquid flow channel (103). Detailed aspects regarding the combination of the first sheet (110) and the second sheet (120) will be described later.

[0329] In addition, since the outer periphery joint (123) and the outer periphery fluid flow channel (124) are located on the same plane in the second sheet (120), there is no boundary line to distinguish the two structurally. However, for ease of understanding, the boundary between the two is indicated by a dotted line in FIGS. 41 and FIGS. 42.

[0330] The width of the outflow amount Euro section (124) is not specifically limited and may be the same as or different from the width of the outflow amount Euro section (114) of the first sheet (110).

[0331] When the width of the outer liquid flow section (124) is made smaller than the width of the outer liquid flow section (113), in at least a part of the outer liquid flow section (114), the opening of the liquid flow groove (114a) is not closed by the outer liquid flow section (124) and remains open, so that condensate can easily enter and steam can easily come out from there, thus allowing for smoother movement of the working fluid.

[0332] In this form, the outer liquid flow channel (124) of the second sheet (120) is configured to be a flat surface, but is not limited thereto, and a liquid flow channel groove may be formed similarly to the outer liquid flow channel (114). In this case, the liquid flow channel groove of the first sheet and the liquid flow channel groove of the second sheet may overlap to form a condensed liquid flow channel (103).

[0333] In addition, as explained in the first sheet, in this form, the external fluid flow section (124) does not necessarily need to be provided, and it may be a form in which the external fluid flow section (124) is not provided.

[0334] Next, the inner liquid flow path (125) will be described. The inner liquid flow path (125) is also a liquid flow path and is one part that constitutes the condensate flow path (103).

[0335] As can be seen from FIGS. 41 to 44, the inner liquid flow section (125) is formed on the inner side of the outer liquid flow section (124), which is in the shape of an outer liquid flow section (124), within the inner surface (120a) of the main body (121). The inner liquid flow section (125) of this form is a convex shape that extends with a curved portion, and a plurality (5 in this form) of inner liquid flow sections (125) are arranged with a gap in a direction different from the direction of extension and are positioned between the steam flow grooves (126).

[0336] In this configuration, each inner liquid flow channel (125) is formed such that the surface on the inner side (120a) becomes a flat surface before joining with the first sheet (110). By doing so, the opening of at least some of the liquid flow channel grooves (115a) among the plurality of liquid flow channel grooves (115a) of the first sheet (110) is closed to form a condensed liquid flow channel (103).

[0337] In addition, in the case where a groove for forming a condensate flow path (103) is not formed in the inner liquid flow path (125) as in the present form, it is preferable that the thickness of the second sheet (120) be greater than or equal to the thickness of the first sheet (110) minus the depth of the liquid flow path groove (115a). By doing so, breakage (rupture) on the second sheet side in the vapor chamber can be prevented.

[0338] In this form, the inner liquid flow channel (125) of the second sheet (120) is configured to be a flat surface, but is not limited thereto, and a liquid flow channel groove may be formed in the same way as the inner outer liquid flow channel (115). In this case, the liquid flow channel groove of the first sheet and the liquid flow channel groove of the second sheet may overlap to form a condensed liquid flow channel (103).

[0339] The width of the inner fluid flow channel (125) is not specifically limited and may be the same as or different from the width of the inner fluid flow channel (115) of the first sheet (110). In this form, the width of the inner fluid flow channel (125) and the width of the inner fluid flow channel (115) are the same.

[0340] If the width of the inner liquid flow section (125) and the width of the inner liquid flow section (115) are different, the effect of positional misalignment during joining can be reduced. In addition, if the width of the inner liquid flow section (125) is smaller than the width of the inner liquid flow section (115), in at least a part of the inner liquid flow section (115), the opening of the liquid flow groove (115a) is not closed by the inner liquid flow section (125) and remains open, making it easy for condensate to enter and for generated steam to exit, thereby allowing the working fluid to be moved more smoothly.

[0341] Next, the steam flow channel groove (126) will be described. The steam flow channel groove (126) is a part through which the working fluid in the steam phase and condensate phase moves, and forms part of the steam flow channel (104). FIG. 42 shows the shape of the steam flow channel groove (126) viewed in plan, and FIG. 43 shows the cross-sectional shape of the steam flow channel groove (126).

[0342] As can be seen from these drawings, the steam flow channel groove (126) is composed of a groove having a curved portion formed on the inner side of the ring of the ring-shaped outer liquid flow channel (124) among the inner surface (120a) of the main body (121). In detail, the steam flow channel groove (126) of this form is a groove formed between adjacent inner liquid flow channels (125) and between the outer liquid flow channel (124) and the inner liquid flow channel (125). In addition, a plurality (six in this form) of steam flow channel grooves (126) are arranged in a direction different from the direction in which the steam flow channel groove (126) extends. Accordingly, as can be seen from FIG. 43, the second sheet (120) has a shape in which a convex portion is formed to make the inner liquid flow channel (125) convex, a concave portion is formed to make the steam flow channel groove (126) concave, and these irregularities are repeated.

[0343] Here, the steam flow channel (126) is a groove and, in terms of its cross-sectional shape, has a bottom portion and an opening on the opposite side facing the bottom portion.

[0344] It is preferable that the steam flow channel groove (126) be positioned so as to overlap in the thickness direction with the steam flow channel groove (116) of the first sheet (110) when combined with the first sheet (110). This allows the steam flow channel (104) to be formed with the steam flow channel groove (116) and the steam flow channel groove (126).

[0345] The width of the steam flow channel groove (126) is not specifically limited and may be the same as or different from the width of the steam flow channel groove (116) of the first sheet (110). In this form, the width of the steam flow channel groove (116) and the width of the steam flow channel groove are the same.

[0346] If the width of the steam flow channel groove (126) and the width of the steam flow channel groove (116) are different, the effect of positional misalignment during joining can be reduced. Additionally, if the width of the steam flow channel groove (126) is made larger than the width of the steam flow channel groove (116), in at least a part of the inner liquid flow channel (115), the opening of the liquid flow channel groove (115a) is not closed by the inner liquid flow channel (125) and remains open, making it easy for condensate to enter and steam to exit, thereby allowing for smoother movement of the working fluid.

[0347] Meanwhile, the depth of the steam flow channel groove (126) can be thought of as being similar to the steam flow channel groove (26) of the second sheet (20) mentioned above.

[0348] Here, the steam passage groove (126) is preferably configured to have a flat shape such that when the steam passage (104) is formed by combining it with the first sheet (110) as described later, the width of the steam passage (104) is greater than the height (size in the thickness direction). Accordingly, the aspect ratio, which is the value obtained by dividing the depth of the steam passage groove (126) by the width of the steam passage groove (126), is preferably 4.0 or higher, and more preferably 8.0 or higher.

[0349] In this form, the cross-sectional shape of the steam flow channel groove (126) is semi-elliptical, but it may also be square, rectangular, trapezoidal, triangular, semicircular, semicircular at the bottom, semi-elliptical at the bottom, etc.

[0350] The steam flow channel communication groove (127) is a groove that is combined with the steam flow channel communication groove (117) of the first sheet (110) and forms a channel that communicates the ends of a plurality of steam flow channels (104) through the steam flow channel groove (126). The steam flow channel communication groove (127) can be conceived in the same way as the steam flow channel communication groove (27) of the second sheet (20) described above.

[0351] In this form, the second sheet (120) is provided with a curved portion (128c) in which the direction in which the outer liquid flow section (124), the inner liquid flow section (125), and the steam flow groove (126) extend changes. That is, as can be seen from FIG. 42, the second sheet (120) has a straight section (128a) in which the outer liquid flow section (124), the inner liquid flow section (125), and the steam flow groove (126) extend in a straight line shape in the x-direction, a straight section (128b) in which the outer liquid flow section (124), the inner liquid flow section (125), and the steam flow groove (126) extend in a straight line shape in the y-direction, and a curved section (128c) connecting the outer liquid flow section (124), the inner liquid flow section (125), and the steam flow groove (126) in the straight section (128a) and the straight section (128b). Accordingly, the curved section (128c) has one end connected to one straight section (128a) and the other end connected to the other straight section (128b), so that the outer liquid flow section (124), inner liquid flow section (125), and steam flow groove (126) are curved so that the flow changes direction from the x direction to the y direction and from the y direction to the x direction.

[0352] And, in the curved portion (128c) of this form, the external liquid flow section (124), the internal liquid flow section (125), and the steam flow groove (126) can be conceived in the same way as the curved portion (118c) of the first sheet (110) described above.

[0353] Next, the structure when the first sheet (110) and the second sheet (120) are combined to form a vapor chamber (101) is described. Through this description, the arrangement, size, shape, etc. of each component of the first sheet (110) and the second sheet (120) are further understood.

[0354] In FIG. 45, I in FIG. 27 109 -I 109A cross-sectional view of the vapor chamber (101) cut in the thickness direction along the y-direction indicated by [the figure] is shown. This drawing is a combination of the drawing shown in Fig. 31 of the first sheet (110) and the drawing shown in Fig. 43 of the second sheet (120) to show the cross-sectional view of the vapor chamber (101) in this part.

[0355] In Fig. 46, I in Fig. 45 110 An enlarged drawing of the area represented by was shown.

[0356] In FIG. 47, I in FIG. 27 111 -I 111 A cross-sectional view is shown by cutting along the x-direction indicated by the thickness direction of the vapor chamber (101). This drawing is a combination of the drawing shown in Fig. 33 of the first sheet (110) and the drawing shown in Fig. 44 of the second sheet (120), showing the cross-sectional view of the vapor chamber (101) in this area.

[0357] As can be seen from FIGS. 27, 28 and FIGS. 45 to 47, the first sheet (110) and the second sheet (120) are arranged to overlap and joined to form a vapor chamber (101). At this time, the inner surface (110a) of the first sheet (110) and the inner surface (120a) of the second sheet (120) are arranged to face each other, the main body (111) of the first sheet (110) and the main body (121) of the second sheet (120) overlap, and the injection part (112) of the first sheet (110) and the injection part (122) of the second sheet (120) overlap.

[0358] By means of the laminate of the first sheet (110) and the second sheet (120), each component provided in the main body (111) and the main body (121) is arranged as shown in FIGS. 45 to 47. Specifically, it is as follows.

[0359] The vapor chamber (101) of this type is particularly effective when it is thin. In this regard, L in FIGS. 27 and FIGS. 45 100The thickness of the vapor chamber (101) shown is 1 mm or less, more preferably 0.4 mm or less, and even more preferably 0.2 mm or less. By making it 0.4 mm or less, in an electronic device in which the vapor chamber (101) is installed, there are many cases where the vapor chamber can be installed inside the electronic device without performing processing (e.g., forming a groove) to form a space for placing the vapor chamber. And according to this form, even such a thin vapor chamber maintains thermal performance while having high strength and being resistant to deformation.

[0360] Meanwhile, the outer periphery joint (113) of the first sheet (110) and the outer periphery joint (123) of the second sheet (120) are arranged to overlap, and both are joined by a joining means such as diffusion joining or brazing, and an operating fluid is sealed. Thus, a sealed space (102) is formed between the first sheet (110) and the second sheet (120).

[0361] Additionally, the outer liquid flow section (114) of the first sheet (110) and the outer liquid flow section (124) of the second sheet (120) are arranged to overlap. Thus, a condensate flow path (103) is formed through which the working fluid flows in a condensed state by condensing the liquid flow path groove (114a) of the outer liquid flow section (114) and the outer liquid flow section (124).

[0362] Likewise, the convex inner liquid flow channel (115) of the first sheet (110) and the convex inner liquid flow channel (125) of the second sheet (120) are arranged to overlap. Thus, a condensate flow channel (103) through which condensate flows is formed by the liquid flow channel groove (115a) of the inner liquid flow channel (115) and the inner liquid flow channel (125).

[0363] Here, it is preferable that the condensate flow path (103) has a flat cross-sectional shape in conjunction with the thinning of the vapor chamber (101). This increases capillary force and allows for smoother movement of the condensate, thereby making it possible to maintain a high level of heat transport capacity. More specifically, it is preferable that the aspect ratio, expressed as the value obtained by dividing the width of the condensate flow path (103) by the height, is greater than 1.0 and less than or equal to 4.0.

[0364] At this time, the width of the condensate flow path (103) is similar to the width of the liquid flow path groove (115a) in this form, but it is preferable that it be 10㎛ or more and 300㎛ or less. If the width becomes smaller than 10㎛, the flow path resistance increases, and there is a risk that the transport capacity will decrease. On the other hand, if the width becomes larger than 300㎛, the capillary force decreases, so there is a risk that the transport capacity will decrease.

[0365] In addition, the height of the condensate channel (103) is preferably 5 μm or more and 200 μm or less, corresponding to the depth of the liquid channel groove (115a) in this form. This allows the capillary force of the condensate channel required for movement to be sufficiently exerted. In addition, this height is preferably less than the thickness (thickness) of the first sheet (110) and the second sheet (120) on one side and the other side in the thickness direction (z direction) with respect to the condensate channel (103). This further prevents the rupture (rupture) of the vapor chamber caused by the condensate channel (103).

[0366] The cross-sectional shape of the condensate flow path (103) is semi-elliptical based on the cross-sectional shapes of the liquid flow path groove (114a) and the liquid flow path groove (115a), but is not limited thereto and may be square, rectangular, trapezoidal, triangular, semicircular, semicircular at the bottom, semi-elliptical at the bottom, or a combination thereof. In addition, it may be crescent-shaped.

[0367] In addition, in this form, since the liquid flow groove (114a) and the liquid flow groove (115a) are formed only in the first sheet (110), the height of the condensate flow path is based on the depth of the liquid flow groove (114a) and the liquid flow groove (115a), but is not limited thereto and may also have a liquid flow groove formed in the second sheet (120). In this case, the liquid flow groove of the first sheet and the liquid flow groove of the second sheet overlap to form a condensate flow path, and the height of the condensate flow path is equal to the sum of the depths of the liquid flow grooves on both sides.

[0368] In this way, liquid flow channels are formed in the first sheet and the second sheet and overlapped to form a condensate flow channel, and a condensate flow channel can be configured as shown in FIGS. 48 to 50.

[0369] The example of FIG. 48 is an example in which the liquid flow grooves of the first sheet and the second sheet are placed at the same width and same position.

[0370] The example of FIG. 49 is an example in which the width of the liquid flow channel groove in the second sheet is larger than the width of the liquid flow channel groove in the first sheet, and the positions coincide. In this example, a convex portion is formed within the condensate flow channel as indicated by P, and the capillary force is improved, thereby increasing the force for the condensate to move (the supply force of the condensate).

[0371] The example in FIG. 51 is an example in which the liquid flow channel grooves of the first sheet and the second sheet have the same width but are positioned offset from each other. In this example as well, a convex portion is formed within the condensate flow channel as indicated by P, and the capillary force is improved, thereby increasing the force for the condensate to move (the supply force of the condensate).

[0372] In addition, as described above, a communication opening (114c) and a communication opening (115c) are formed in the condensate flow path (103). Thus, a plurality of condensate flow paths (103) are connected, thereby promoting equalization of the condensate and enabling efficient movement of the condensate. Furthermore, regarding the communication opening (114c) and the communication opening (115c) that are adjacent to the steam flow path (104) and connect the steam flow path (104) and the condensate flow path (103), the condensate generated in the steam flow path (104) can be smoothly moved to the condensate flow path (103), and the steam generated in the condensate flow path (103) can be smoothly moved to the steam flow path (104), thereby enabling rapid movement of the working fluid.

[0373] Additionally, the condensate flow path (103) formed by the outer liquid flow path (114) and the outer liquid flow path (124) is preferably formed in a continuous ring shape along the edge of the sealed space (102). That is, the condensate flow path (103) formed by the outer liquid flow path (114) and the outer liquid flow path (124) is preferably extended in a ring shape over a full circle without being interrupted by other components. This reduces factors that hinder the movement of the condensate, allowing the condensate to be moved smoothly.

[0374] In this form, as described above, a condensate channel is formed by creating a condensate channel groove in the sheet and thereby forming a channel, but instead, a means for generating capillary force may be separately placed here to form a condensate channel. For this reason, a so-called wick, such as a mesh material, nonwoven fabric, twisted wire, and a sintered body of metal powder, may be placed.

[0375] The opening of the steam flow groove (116) of the first sheet (110) and the opening of the steam flow groove (126) of the second sheet (120) are overlapped to face each other to form a flow path, and this becomes the steam flow path (104).

[0376] Here, it is preferable that the vapor channel (104) has a flat cross-sectional shape in conjunction with the thinning of the vapor chamber (101). This makes it possible to secure the surface area within the channel even when thinned, and enables maintaining a high level of heat transport capacity. More specifically, it is preferable that the aspect ratio, which is the value obtained by dividing the width of the vapor channel (104) by the height of the vapor channel (104), is 2.0 or higher. From the perspective of securing a higher heat transport capacity, it is even more preferable that the ratio be 4.0 or higher.

[0377] As can be seen from FIG. 47, an overlapping flow path is formed so that the opening of the steam flow path communication groove (117) of the first sheet (110) and the opening of the steam flow path communication groove (127) of the second sheet (120) face each other, and the ends of the plurality of steam flow paths (104) formed by the steam flow path groove (116) and the steam flow path groove (126) are connected to form a flow path for moving the working fluid in a balanced manner.

[0378] As described above, in the sealed space (102) of the vapor chamber (101), a condensate flow path (103) and a vapor flow path (104) are formed by the shape of the first sheet (110) and the second sheet (120). FIG. 51 shows a drawing focusing on the condensate flow path (103) and the vapor flow path formed in the sealed space (102).

[0379] As can be seen from FIG. 46, FIG. 51, etc., the vapor chamber (101) has a shape in which a plurality of condensate passages (103) are arranged between two vapor passages (104). Thus, the condensate passage (103), through which the condensate mainly flows, and the vapor passage (104), through which the vapor and condensate move, are separated and arranged alternately, thereby facilitating the smooth movement of the working fluid.

[0380] Through the steam flow path (104) and the condensate flow path (103), the working fluid in the steam flow path (104), in the state of steam and condensate, moves to efficiently transfer and diffuse heat. Meanwhile, because the condensate moves efficiently by capillary force through the condensate flow path (103), which is provided separately from the steam flow path (104), it is possible to suppress the occurrence of dry-out.

[0381] In addition, in the vapor chamber (101), the condensate flow path (103) and the vapor flow path (104) are formed in a manner in which two straight sections (106) extending in different directions are connected by a curved section (107). By forming such a flow path, even when the vapor chamber is placed in an electronic device and the flow path cannot be formed only in a straight shape due to constraints on the placement, heat generated from a heat source can be efficiently transferred to a separated location by providing a curved section (107).

[0382] This curved portion (107) is formed by the curved portion (118c) of the first sheet (110) and the curved portion (128c) of the second sheet (120). Accordingly, the curved portion (107) has one end connected to a straight portion (106) on one side and the other end connected to a straight portion (106) on the other side, so that the condensate flow path (103) and the steam flow path (104) are curved so that the flow changes direction from the x direction to the y direction and from the y direction to the x direction.

[0383] In addition, in this configuration, regarding the cross-sectional area of ​​the steam flow path (104) belonging to the curved section (107), the side of the steam flow path (104) positioned on the inner side is configured to be larger than the cross-sectional area of ​​the steam flow path (104) positioned on the outer side. According to this, the balance of flow resistance in the curved section can be increased, and the movement of the working fluid can be made smoother, thereby increasing the heat transport capacity. Specifically, the cross-sectional area of ​​the steam flow path can be adjusted by adjusting the size of at least one of the width and height of the flow path.

[0384] Here, "cross-sectional area of ​​the flow path" is the cross-sectional area of ​​the flow path in a plane perpendicular to the direction in which the flow path extends.

[0385] The means, degree, and method of thinking for increasing the cross-sectional area (width in this form) of the steam flow path (104) in the curved section (107) in this way are the same as those described for the curved section (118c) of the first sheet (110) above.

[0386] Additionally, in the curved section (107), the pitch of the communication opening (114c) and communication opening (115c) (see FIG. 34 and FIG. 36) formed in the wall (114b) and wall (115b) that partition the condensate flow path (103) and the vapor flow path (104) can be configured to be different from that of the straight section (106). This means that the pitch of the communication opening in the curved section may be larger or smaller than the pitch of the curved section in the straight section. The shape can be adopted by comprehensively determining a shape that can lower flow resistance, taking into account the influence of the overall shape of the vapor chamber, the location of the heat source, etc. Alternatively, for this curved section (107), it is not necessary to provide a communication opening (114c) and a communication opening (115c) in the wall (114b) and wall (115b) that partition the condensate flow path (103) and the steam flow path (104).

[0387] In a shape where the pitch of the communication opening in the curved section is larger than the pitch of the communication opening in the straight section, the working fluid flowing through the steam passage (104) can be prevented from entering the communication opening (114c) and communication opening (115c) from the curved section (107). In the curved section (107), because the working fluid moving through the steam passage (104) is subjected to a force that more directly inflows into the communication opening (114c) and communication opening (115c) in the direction of flow, there is a tendency for the flow resistance to increase in the unevenness of the communication opening (114c) and communication opening (115c) or the steam to enter the condensate passage (103). In contrast, the increase in such flow resistance can be suppressed by increasing the pitch of the flue opening (114c) and flue opening (115c) that are in contact with the steam flow path (104) in the curved section (107), or by eliminating the flue opening (114c) and flue opening (115c) that are in contact with the steam flow path (104), and by making the difference in flow resistance between each steam flow path (104) smaller, the movement balance of the working fluid can be improved, and the heat transport capacity can be increased.

[0388] On the other hand, in a form where the pitch of the flue opening in the curved section is smaller than the pitch of the flue opening in the straight section, the steam flowing through the steam passage groove (steam passage) in the curved section has an increased chance of strongly contacting the wall surface, so it tends to condense easily. In this case, by making the pitch of the flue opening in the curved section smaller than the pitch of the flue opening in the straight section, the number of flue openings can be increased, allowing the condensate to be smoothly introduced into the liquid passage groove (condensate passage), thereby preventing the steam passage from being blocked by the condensate. This can suppress the increase in flow resistance and further reduce the difference in flow resistance between each steam passage groove (steam passage), thereby improving the movement balance of the working fluid and increasing the heat transport capacity.

[0389] In addition, instead of the size of the pitch mentioned above, in the curved section, the length of the wall between adjacent communication openings (size in the direction along the flow path) may be configured to be larger or smaller than the length of the wall in the straight section. In this case, the length of the wall belonging to the curved section does not need to be constant and may vary from wall to wall. In this case, the relationship between the length of the wall in the curved section and the length of the wall in the straight section is determined by the relationship between the average values ​​of the wall lengths belonging to each section.

[0390] Meanwhile, regarding the injection part (112) and injection part (122), as shown in FIGS. 27 and 28, the inner surface (110a) and inner surface (120a) are overlapped so as to face each other, and the opening on the opposite side from the bottom of the injection groove (122a) of the second sheet (120) is blocked by the inner surface (110a) of the injection part (112) of the first sheet (110), and an injection channel (105) is formed to communicate the hollow portion (condensate channel (103) and steam channel (104)) between the outside and the main body (111) and the main body (121).

[0391] However, after the working fluid is injected from the injection channel (105) into the sealed space (102), the injection channel (105) is closed, so the sealed space (102) is not connected to the outside in the final form of the vapor chamber (101).

[0392] And a working fluid is sealed in the sealed space (102) of the vapor chamber (101). The type of working fluid is not particularly limited, but any working fluid used in a normal vapor chamber, such as pure water, ethanol, methanol, or acetone, can be used.

[0393] The vapor chamber (101) described above can be manufactured in the same way as the vapor chamber (1) described above.

[0394] Next, the operation of the vapor chamber (101) when it is in operation will be explained. The manner in which the vapor chamber (101) is installed in an electronic device can be considered the same as the manner described by FIG. 23.

[0395] FIG. 52 shows a diagram illustrating the behavior of the working fluid. For ease of explanation, this diagram is a diagram taken at the same time as FIG. 51 and focuses on the condensate flow path (103) and the steam flow path (104) formed within the sealed space (102).

[0396] When the electronic component (30) generates heat, the heat is transferred through the first sheet (110) by heat conduction, and the condensate located near the electronic component (30) within the sealed space (102) receives the heat. The condensate that receives this heat absorbs the heat, evaporates, and vaporizes. As a result, the electronic component (30) is cooled.

[0397] The vaporized working fluid becomes steam and moves through the steam path (104). The movement of the vaporized working fluid may be such that it moves vibrating within the steam path (104), as indicated by the solid straight arrow in FIG. 52, or it may move in a unidirectional manner away from the heat source electronic component (30) without vibrating, although this is not shown.

[0398] At this time, the steam flow path (104) includes a curved portion of the curved section (107), but since the curved section (107) has the above configuration, the balance of flow resistance is good even in the curved section (107), so the working fluid moves smoothly through the steam flow path (104). This enables high heat transport capacity.

[0399] And during the movement of the working fluid, the working fluid is cooled while losing heat to the first sheet (110) and the second sheet (120) in sequence. The first sheet (110) and the second sheet (120), having lost heat from the steam, transfer heat to the outer surface (110b), the housing of a portable terminal device in contact with the outer surface (120b), etc., and finally, the heat is released to the outside air. Then, the working fluid, having lost heat while moving through the steam path (104), condenses and becomes liquefied.

[0400] A portion of the condensate generated in the steam passage (104) moves to the condensate passage (103) through the connecting opening, etc. Since the condensate passage (103) of this type is equipped with a connecting opening (114c) and a connecting opening (115c), the condensate is distributed to a plurality of condensate passages (103) through the connecting opening (114c) and the connecting opening (115c).

[0401] The condensate that enters the condensate flow path (103) moves to approach the electronic component (30), which is the heat source, by the capillary force of the condensate flow path, as indicated by the dotted straight arrow in FIG. 52. Then, it is vaporized again by the heat from the electronic component (30), which is the heat source, and the above process is repeated.

[0402] As described above, according to the vapor chamber (101), the movement of the working fluid in the vapor path and the high capillary force in the condensate path allow the movement of the working fluid to be smooth and good, thereby increasing the heat transport capacity.

[0403] In addition, by forming a flow path having a curved portion (107) in the vapor chamber (101), heat generated from a heat source can be efficiently transferred to a separated location even when the vapor chamber is placed in an electronic device and there are restrictions on the placement and it is not possible to form a flow path only in a straight shape.

[0404] In addition, the curved section (107) is configured such that the difference in flow resistance between the multiple steam passages (104) is reduced as described above, allowing the working fluid to be moved in a balanced manner, thereby increasing the heat transport capacity.

[0405] FIGS. 53 to 61 are drawings illustrating a vapor chamber (201) according to a modified example. FIG. 53 is an external perspective view of the vapor chamber (201), and FIG. 54 is an exploded perspective view of the vapor chamber (201).

[0406] As can be seen from FIG. 53 and FIG. 54, the vapor chamber (201) has a first sheet (210), a second sheet (220), and a third sheet (230). And, by overlapping and joining (diffusion joining, brazing, etc.) the first sheet (210), the second sheet (220), and the third sheet (230), a hollow portion surrounded by the first sheet (210), the second sheet (220), and the third sheet (230) is formed between the first sheet (210) and the second sheet (220), and an operating fluid is sealed in this hollow portion to become a sealed space (202).

[0407] In this form, the first sheet (210) is a member having the shape of a sheet overall. The first sheet (210) is composed of flat surfaces on both the front and back sides and has an inner surface (210a), an outer surface (210b) opposite to the inner surface (210a), and a side surface (210c) that forms a thickness over the inner surface (210a) and the outer surface (210b).

[0408] The first sheet (210) is provided with a main body (211) and an injection part (212). The main body (211) is a sheet-shaped portion that forms a sealed space through which the working fluid moves, and in this form, when viewed in planar view, it is a rectangle with corners that are arcs (so-called R).

[0409] The injection portion (212) is a part for injecting working fluid into a sealed space formed by the first sheet (210), the second sheet (220), and the third sheet (230). In this form, it is a rectangular sheet shape when viewed from the plane of the main body (211) and when viewed from the plane protruding from the L-shape. In this form, the injection portion (212) of the first sheet (210) is a flat surface on both the inner side (210a) and the outer side (210b).

[0410] In this form, the second sheet (220) is a member having the shape of a sheet overall. The second sheet (220) is composed of flat surfaces on both the front and back sides and has an inner surface (220a), an outer surface (220b) opposite to the inner surface (220a), and a side surface (220c) that forms a thickness over the inner surface (220a) and the outer surface (220b).

[0411] And the second sheet (220) also has a main body (221) and an injection part (222).

[0412] In this form, the third sheet (230) is a sheet that is sandwiched and overlapped between the inner surface (210a) of the first sheet (210) and the inner surface (220a) of the second sheet (220), and a structure for the movement of an operating fluid is formed in the main body (231). FIGS. 55 and 56 show a planar view of the third sheet (230). FIG. 55 is a view of the surface that overlaps with the second sheet (220), and FIG. 56 is a view of the surface that overlaps with the first sheet (210). Also, FIG. 57 shows I in FIG. 55 201 -I 201 A cross-sectional plane along the line indicated by, in FIG. 58, I in FIG. 55 202 -I 202 The cross-sections along the lines indicated by were each shown.

[0413] The third sheet (230) is provided with a main body (231) and an injection part (232). The main body (231) is a sheet-shaped portion that forms a sealed space through which the working fluid moves, and in this form, it is L-shaped with a curved portion when viewed in planar form.

[0414] The injection portion (232) is a part for injecting working fluid into a sealed space formed by the first sheet (210), the second sheet (220), and the third sheet (230), and in this form, it is a rectangular sheet shape when viewed from the plane protruding from the L-shape when viewed from the plane of the main body (231). In the injection portion (232), an injection groove (232a) is formed on the side overlapping with the first sheet (210). The injection groove (232a) can be conceived in the same way as the injection groove (122a) described above.

[0415] The main body (231) is provided with an outer periphery joint (233), an outer periphery liquid flow path (234), an inner periphery liquid flow path (235), a steam flow path slit (236), and a steam flow path communication groove (237).

[0416] The outer periphery joint (233) is a portion formed along the outer periphery of the main body (231). Then, one side of the outer periphery joint (233) overlaps with the surface of the first sheet (210) and is joined (diffusion joining, brazing, etc.), and the other side overlaps with the surface of the second sheet (220) and is joined (diffusion joining, brazing, etc.). Thus, a hollow portion surrounded by the first sheet (210), the second sheet (220), and the third sheet (230) is formed, and an operating fluid is sealed therein to form a sealed space.

[0417] The outer joint (233) can be thought of in the same way as the outer joint (113) described above.

[0418] The outer liquid flow path (234) functions as a liquid flow path and is a part of the condensate flow path (103) through which the working fluid passes when it condenses and becomes liquefied. The outer liquid flow path (234) is formed along the inner side of the outer joint (233) of the main body (231) and is arranged to be in an annular shape along the outer circumference of the sealed space (202). In addition, a liquid flow path groove (234a) is formed on the side of the outer liquid flow path (234) facing the second sheet (220). In this form, the liquid flow path groove (234a) is provided only on the side facing the second sheet (220), but in addition to this, a liquid flow path groove may also be provided on the side facing the first sheet (210).

[0419] The external liquid flow section (234) and the liquid flow groove (234a) provided therein can be conceived in the same way as the external liquid flow section (114) and the liquid flow groove (114a) described above.

[0420] The inner liquid flow path (235) also functions as a liquid flow path and is a part of the condensate flow path (103) through which the working fluid passes when it condenses and becomes liquefied. The inner liquid flow path (235) is formed to have a curved portion and extend into the inner side of the ring of the outer liquid flow path (234), which is ring-shaped, in the main body (231). In addition, a plurality (5 in this form) of inner liquid flow paths (235) are arranged in a direction different from the direction of extension and are placed between the steam flow path slits (236).

[0421] Among the inner liquid flow sections (235), on the side facing the second sheet (220), a liquid flow groove (235a) is formed, which is a groove parallel to the direction in which the inner liquid flow section (235) extends. The inner liquid flow section (235) and the liquid flow groove (235a) can be conceived in the same way as the inner liquid flow section (115) and the liquid flow groove (115a) described above.

[0422] In this form, the liquid flow groove (235a) is formed only on the side facing the second sheet (220), but in addition to this, a liquid flow groove may also be formed on the side facing the first sheet (210).

[0423] The vapor flow channel slit (236) is a slit that constitutes the vapor flow channel (104) in the area where the working fluid in the vapor phase and condensate phase moves. The vapor flow channel slit (236) is composed of a slit having a curved portion formed on the inner side of the ring of the ring-shaped outer liquid flow channel (234) in the main body (231). More specifically, the vapor flow channel slit (236) of this form is a slit formed between adjacent inner liquid flow channels (235) and between the outer liquid flow channel (234) and the inner liquid flow channel (235). Accordingly, the vapor flow channel slit (236) penetrates in the thickness direction (z-direction) of the third sheet (230).

[0424] And, a plurality (six in this form) of steam flow channel slits (236) are arranged in a direction different from the direction of extension. Accordingly, as can be seen from FIG. 60, the third sheet (230) has a shape in which the outer liquid flow channel (234), the inner liquid flow channel (235), and the steam flow channel slits (236) are alternately repeated.

[0425] This steam flow channel slit (236) can be conceived as being similar to the form of a steam flow channel (104) formed by combining the steam flow channel groove (116) and the steam flow channel groove (126) described above.

[0426] In this form, the cross-sectional shape of the steam flow channel slit (236) is formed by overlapping parts of the arcs of an ellipse and has a protruding center in the thickness direction, but it is not limited to this and may be in other shapes such as a square, rectangle, trapezoid, triangle, semicircle, crescent, and combinations thereof.

[0427] The steam flow channel communication groove (237) is a groove that forms a flow channel connecting a plurality of steam flow channel slits (236). By doing so, the movement of the working fluid occurring in the steam flow channel in the direction in which the inner liquid flow channel (235) extends can be balanced.

[0428] In addition, this allows for equalization of the working fluid in the steam path, or allows the steam to be transported over a wider range, thereby enabling efficient use of the condensate path through many liquid path grooves (234a) and liquid path grooves (235a).

[0429] The steam flow channel communication groove (237) of this type is formed between the two ends in the direction in which the inner liquid flow channel (235) extends and the two ends in the direction in which the steam flow channel slit (236) extends, and the outer liquid flow channel (234). The steam flow channel communication groove (237) only needs to be able to communicate with the adjacent steam flow channel slit (236), and its shape is not particularly limited, but it can be conceived as a flow channel formed by overlapping the steam flow channel communication groove (117) and the steam flow channel communication groove (127) described above.

[0430] In addition, regarding the third sheet (230), the vapor chamber (201) is formed by having a straight section (238a), a straight section (238b), and a curved section (238c) so that the condensate flow path (103) and the vapor flow path (104) have a straight section and a curved section in a sealed space. The manner of thinking of these straight and curved sections is the same as that described so far.

[0431] These third sheets (230) can be produced by etching each side individually, etching from both sides simultaneously, press processing, or cutting processing.

[0432] FIGS. 59 to 61 show drawings explaining the structure when the first sheet (210), the second sheet (220), and the third sheet (230) are combined to form a vapor chamber (201). FIG. 59 shows I in FIG. 53203 -I 203 A cross-sectional plane along the line indicated by, and FIG. 60 shows an enlarged view of a portion of FIG. 59. Also, FIG. 61 shows I in FIG. 53 204 -I 204 The cross-section along the line indicated by was shown.

[0433] As can be seen from FIGS. 53 and FIGS. 59 to 61, the first sheet (210), the second sheet (220), and the third sheet (230) are arranged to overlap and joined to form a vapor chamber (201). At this time, the inner surface (210a) of the first sheet (210) and one side of the third sheet (230) (the side where the liquid flow groove (234a) and liquid flow groove (235a) are not arranged) are arranged to face each other, and the inner surface (220a) of the second sheet (220) and the other side of the third sheet (230) (the side where the liquid flow groove (234a) and liquid flow groove (235a) are arranged) are overlapped to face each other. In the same way, the injection portion (212), injection portion (222), and injection portion (232) of each sheet are also overlapped.

[0434] Thus, between the first sheet (210) and the second sheet (220), a sealed space is formed that is surrounded by the first sheet (210), the second sheet (220), and the third sheet (230). A condensate flow path (103) and a vapor flow path (104) are formed therein. Regarding the shape of the condensate flow path (103) and the vapor flow path (104) within these sealed spaces, the same approach as that used for the condensate flow path (103) and the vapor flow path (104) of the vapor chamber (101) described above can be applied.

[0435] In addition, the above description describes a vapor chamber having a curved section at the intersection where two straight sections intersect at 90 degrees and extend to form an L-shape. However, the shape of the curve is not limited to this, and it is possible to apply the curved section described above to other shapes as well. For example, the above-described curved section can be applied to each intersection section where two straight sections extend in a direction of T-shape, where two straight sections extend in a direction of cross-shape, where two straight sections intersect at an acute angle (an angle smaller than 90 degrees) and extend to form a V-shape, and where two straight sections intersect at an obtuse angle (an angle larger than 90 degrees) and extend to form a V-shape.

[0436] [Third Form]

[0437] In the third embodiment, for convenience in describing the intermediate obtained during the manufacture of the final product, the vapor chamber, the sheet having multiple faces of the intermediate, and the roll on which the sheet is wound, a method of manufacture is described, and while describing it accordingly, the composition of the intermediate obtained, the sheet having multiple faces of the intermediate, and the roll having multiple faces of the intermediate is described.

[0438] <<Method for manufacturing a vapor chamber S1>>

[0439] FIG. 62 shows the flow of a method S301 for manufacturing a vapor chamber of one type (hereinafter referred to as “manufacturing method S301”). As can be seen from FIG. 62, the manufacturing method S301 includes the processes of manufacturing a multifaceted intermediate sheet and a multifaceted intermediate roll S310, manufacturing an intermediate S320, forming an inlet S330, injecting liquid S340, and sealing S350.

[0440] In addition, for convenience, the “multi-faceted intermediate sheet for a vapor chamber” may be referred to as the “multi-faceted intermediate sheet” and the “roll wound with the multi-faceted intermediate sheet for a vapor chamber” may be referred to as the “multi-faceted intermediate roll.”

[0441] Each process is explained in detail below.

[0442] Ingredients

[0443] Prior to manufacturing method S301, materials are prepared. In this form, two material sheets are prepared in order to manufacture a vapor chamber by joining two sheets.

[0444] As described below, in this embodiment, the vapor chamber is not produced as a single-wafer from two material sheets, but rather undergoes a so-called "multi-faceted" process in which a plurality of intermediates are arranged in a multi-faceted intermediate sheet and a multi-faceted intermediate roll by overlapping two long strip-shaped material sheets, and then the intermediates are individually punched to produce the vapor chamber. Accordingly, the material sheets prepared in this embodiment are two long strip-shaped sheets, and are typically provided as a roll wound with these strip-shaped sheets.

[0445] However, the present disclosure may also be applied to the respective manufacturing methods of an intermediate produced by single-wafer production and a vapor chamber produced by single-wafer production, except for the process specific to multi-faceted provisioning.

[0446] The materials constituting the material sheet are not particularly limited, but metals may be used. Among them, it is preferable to use metals with high thermal conductivity. Examples of such materials include copper, copper alloys, and aluminum. However, the material does not necessarily have to be metal; ceramics such as AlN, Si3N4, or Al2O3, or resins such as polyimide or epoxy, are also possible.

[0447] In addition, a sheet in which two or more types of materials are laminated (the first sheet (10) or the second sheet (20) described as a so-called clad material or vapor chamber (1)) may be used, and materials with different materials depending on the part may also be used.

[0448] The thickness of the material sheet can be thought of as similar to the first sheet (10), second sheet (20) of the vapor chamber (1), the first sheet (110), second sheet (120) of the vapor chamber (101), etc.

[0449] <Manufacture of multi-faceted intermediate sheet and multi-faceted intermediate roll S310>

[0450] The manufacturing process S310 of a multifaceted intermediate sheet and a multifaceted intermediate roll (hereinafter referred to as "process S310") manufactures a multifaceted intermediate sheet and / or a multifaceted intermediate roll from the above-mentioned material. FIG. 63 shows the flow of process S310. As can be seen from FIG. 63, process S310 includes the processes of processing S311 and bonding S312.

[0451] (Processing S311)

[0452] Processing S311 is a process for forming a shape for the flow path of a vapor chamber. In this form, the shape is formed on the first sheet (301) with a facet, which is one of the two material sheets, and the second sheet (302) with a facet, which is the other material sheet, is used without processing for the flow path. FIG. 64 shows a drawing illustrating the first sheet (301) with a facet, which has a shape (310) after processing. As can be seen from this drawing, the first sheet (301) with a facet has a plurality of shapes (310) for the flow path of a vapor chamber arranged thereon, and the shape (310) is formed into a sheet (301) with a facet, and this sheet (301) is wound into a roll.

[0453] The method of forming the shape (310) is not particularly limited and may include etching, cutting, and press forming. Among these, forming the shape by etching is more efficient and has higher mass production capabilities compared to other methods. In this case, so-called half-etching can be applied, in which etching is performed up to the middle without penetrating the thickness direction of the material sheet.

[0454] Here, the specific embodiment of the shape (310) is not particularly limited, but can be in the following form, for example. Drawings illustrating one example of the shape are shown in FIGS. 65 to 67. FIGS. 65 is an external perspective view focusing on one of the shapes (310) among the multifaceted shapes (310) in FIGS. 64. FIGS. 66 shows FIGS. 65 viewed from the z-direction (planar view). Also, FIGS. 67 shows I in FIGS. 66 301 -I 301 A cross-sectional view was shown when cut.

[0455] The shape provided is a groove that serves as a flow path for the working fluid to flow back and a groove that serves as a flow path for injecting the working fluid into the groove. Specifically, in this shape, an outer liquid flow path section (314), an inner liquid flow path section (315), a steam flow path groove (316), a steam flow path connecting groove (317), and an injection groove (318) are provided.

[0456] The outer liquid flow path (314) functions as a liquid flow path and is a part of the condensate flow path (354), which is a second flow path through which the working fluid passes when it condenses and becomes liquefied (see FIG. 84, etc.). In FIG. 68, the arrow I in FIG. 67 302 The part indicated by, in Fig. 69, I in Fig. 66 303 -I 303 The cross-sectional surface of the part being cut is shown. The cross-sectional shape of the outer liquid flow channel (314) is shown in any drawing. Also, in FIG. 90, the arrow I in FIG. 7 304An enlarged view of a part of the outer liquid flow path (314) is shown in the direction indicated by (z direction, viewed in plane).

[0457] As can be seen from these drawings, the outer liquid flow section (314) is a portion configured in a ring shape. In the outer liquid flow section (314), a plurality of liquid flow grooves (314a), which are grooves extending along the direction of this ring shape, are formed, and the plurality of liquid flow grooves (314a) are arranged at a predetermined interval in a direction different from the direction in which the liquid flow grooves (314a) extend. Accordingly, as can be seen from FIGS. 68 and 69, in the outer liquid flow section (314), a concave liquid flow groove (314a) and a convex portion (314b) between the liquid flow grooves (314a) are repeatedly formed in a concave manner in the cross-section. In this form, in the outer liquid flow section (314), as can be seen from FIG. 70, adjacent liquid flow grooves (314a) are connected by a communication opening (314c) at a predetermined interval.

[0458] The shape of this external fluid flow path (314) can be thought of as similar to the external fluid flow path of each of the above-mentioned shapes of the vapor chamber.

[0459] The inner liquid flow path (315) also functions as a liquid flow path and is a part that constitutes a portion of the condensate flow path (354), which is a second flow path through which the working fluid flows when it condenses and becomes liquefied. In FIG. 71, the arrow I in FIG. 67 305 The part indicated by is shown. The cross-sectional shape of the inner fluid flow path (315) is also shown in this drawing. Additionally, in FIG. 72, the arrow I in FIG. 71 is shown. 306 An enlarged view of a part of the inner fluid flow path (315) is shown, viewed from the direction indicated (viewed from the z-direction, viewed in a plane).

[0460] As can be seen from these drawings, the inner liquid flow channel (315) is formed on the inner side of the ring shape of the outer liquid flow channel (314). As can be seen from FIGS. 65 and 66, the inner liquid flow channel (315) of this form is a wall extending in the x-direction, and a plurality (three in this form) of inner liquid flow channels are arranged at predetermined intervals in a direction orthogonal to the direction of extension (y-direction).

[0461] In each inner liquid flow section (315), a liquid flow groove (315a) is formed, which is a groove parallel to the direction in which the inner liquid flow section (315) extends, and a plurality of liquid flow grooves (315a) are arranged at a predetermined interval in a direction different from the direction in which the liquid flow groove (315a) extends. Accordingly, as can be seen from FIG. 67 and FIG. 71, in the cross-section of the inner liquid flow section (315), a convex shape is formed by a concave liquid flow groove (315a) and a convex part (315b) between the liquid flow groove (315a), with repeated irregularities. And, as can be seen from FIG. 72, adjacent liquid flow grooves (315a) are connected by a communication opening (315c) at a predetermined interval.

[0462] The shape of this inner fluid passage (315) can be conceived as being similar to the inner fluid passage of each of the above-mentioned shapes of the vapor chamber.

[0463] The steam passage groove (316) forms part of the first passage, the steam passage (355) (see FIG. 84, etc.), in the area where the working fluid evaporates and vaporizes steam. FIG. 66 shows the shape of the steam passage groove (316) viewed in the z-direction, and FIG. 67 shows the cross-sectional shape of the steam passage groove (316).

[0464] As can be seen from these drawings, the steam flow groove (316) is composed of a groove formed on the inner side of the ring shape of the outer liquid flow section (314). In detail, the steam flow groove (316) of this form is formed between adjacent inner liquid flow sections (315) and between the outer liquid flow section (314) and the inner liquid flow section (315), and is a groove that extends in the direction in which the inner liquid flow section (315) extends (x-direction). In addition, a plurality (four in this form) of steam flow grooves (316) are arranged in a direction orthogonal to the direction in which they extend (y-direction). Accordingly, as can be seen from FIG. 67, in the y-direction, the shape is provided with repeated irregularities, such as the convex shape of the outer liquid flow section (314) and the inner liquid flow section (315) and the concave shape of the steam flow groove (316).

[0465] The shape of these vapor flow channels (316) can be thought of as similar to the vapor flow channels of each of the above-mentioned shapes of the vapor chambers.

[0466] The steam passage connecting groove (317) is a groove that connects multiple steam passage grooves (316). By doing so, the steam in multiple steam passages (355) can be equalized, or the steam can be transported over a wider range, allowing many condensate passages (354) to be utilized efficiently, thereby making it possible to make the recirculation of the working fluid smoother.

[0467] The shape of the vapor flow channel groove (317) can be thought of as similar to the vapor flow channel groove of each shape of the vapor chamber described above.

[0468] The injection groove (318) is a groove for injecting working fluid into the steam flow channel groove (316). As can be seen from FIGS. 65 and 66, in this embodiment, the injection groove (318) is a groove connected to the steam flow channel connecting groove (317) by crossing the outer liquid flow channel (314).

[0469] (Joining S312)

[0470] In the bonding S312 illustrated in FIG. 63, the multifaceted first sheet (301) and the multifaceted second sheet (302) prepared in processing S311 as described above are overlapped and bonded, and a multifaceted intermediate sheet (350) and a multifaceted intermediate roll (351) formed by winding the sheet are manufactured.

[0471] The joining method is not particularly limited, and specifically, diffusion joining, brazing, and irradiation may be used. Here, as an example, the case of joining by irradiation is explained. A diagram for explanation is shown in FIG. 73. In addition, in this form, all of these joining methods are performed in a vacuum chamber (360) connected to a vacuum pump that is not shown.

[0472] The first sheet (301) and the second sheet (302) equipped with multiple faces are each unwound from the roll.

[0473] Next, on the side of the first sheet (301) with the above-mentioned shape (310) formed thereon, at least one of an atomic beam, an ion beam, and a plasma is irradiated from an irradiation device (361).

[0474] Here, the atomic beam refers to a group of neutral atoms driven in a linear flux in a constant direction, the ion beam refers to ions accelerated by an electric field, and plasma refers to a state in which molecules constituting a gas are ionized and separated into positive ions and electrons in motion.

[0475] Thus, the oxide film on the surface of the multifaceted first sheet (301) that has been investigated is removed.

[0476] Likewise, among the unwound multifaceted second sheet (302), at least one of an atomic beam, an ion beam, and a plasma is irradiated from an irradiation device (362) on the side that overlaps with the multifaceted first sheet (301).

[0477] Thus, the oxide film on the surface of the multifaceted second sheet (302) that has been investigated is removed.

[0478] As described above, the surface of the multifaceted first sheet (301) and the surface of the multifaceted second sheet (302) are overlapped and compressed by a compression roll (363). As a result, the multifaceted first sheet (301) and the multifaceted second sheet (302) are joined to form a multifaceted intermediate sheet (350). Then, this multifaceted intermediate sheet (350) is wound to form a multifaceted intermediate roll (351).

[0479] In this way, if bonding is performed after conducting the above-described investigation on the bonding surface of the sheets to be bonded, the oxide film is removed, and since there is no need to perform bonding at high temperatures, the deterioration of the material can be suppressed. In particular, as the vapor chamber becomes thinner, such material deterioration is prone to causing problems such as poor sealing of the working fluid, so the occurrence of such problems can be suppressed.

[0480] In addition, not only can the oxide film on the bonding surface be removed, but the oxide film on the inside of the liquid channel groove (314a), liquid channel groove (315a), vapor channel groove (316), and vapor channel connecting groove (317) can also be removed, so the wettability of the inner surface is increased, and the heat transport performance of the vapor chamber can also be improved.

[0481] Furthermore, this oxide film removal effect and the resulting improvement in heat transport performance can also be observed in diffusion bonding and brazing.

[0482] FIG. 74 illustrates the appearance of a multifaceted intermediate sheet (350) and a multifaceted intermediate roll (351). In FIG. 74, the shape (310) is positioned between the multifaceted first sheet (301) and the multifaceted second sheet (302) and is not visible from the outside and is shown as a dotted line.

[0483] FIG. 75 shows a cross-section of a portion of one of the multifaceted shapes (310) of a multifaceted intermediate sheet (350). This cross-section is a drawing taken at the same viewpoint as FIG. 67.

[0484] As can be seen from these drawings, in the multifaceted intermediate sheet (350) and multifaceted intermediate roll (351), the openings of the liquid flow path groove (314a), liquid flow path groove (315a), steam flow path groove (316), and steam flow path connecting groove (317) are closed by the multifaceted second sheet (302) and form a hollow portion.

[0485] In addition, in this form, the oxygen concentration inside the hollow section is configured to be 1% or less. Preferably, it is 0.1% or less, and more preferably 500 ppm or less. Also, since this hollow section is isolated from the outside and is not in communication with the outside of the multifaceted intermediate sheet (350) and the multifaceted intermediate roll (351), this oxygen concentration is maintained.

[0486] According to this, even when processing into a vapor chamber is not performed immediately, such as when storing or transporting the multifaceted intermediate sheet (350) and the multifaceted intermediate roll (351), the inner side of the hollow section can be maintained at a low oxygen concentration, thereby suppressing the formation of an oxide film on the inner surface of the hollow section. Therefore, even if a vapor chamber is subsequently manufactured using this multifaceted intermediate sheet (350), it is possible to make a vapor chamber with good heat transport performance, as there is less oxide film on the inner surface of the flow path (condensate flow path (354), vapor flow path (355)).

[0487] As a means to achieve this, the inside of the hollow can be made into a vacuum. Here, "vacuum state" is not limited to a complete vacuum, but, for example, the pressure can be made 134 Pa or less (1 Torr or less).

[0488] The method of creating a vacuum inside the hollow section is not particularly limited, but for example, when joining the multifaceted first sheet (301) and the multifaceted second sheet (302) as described above, it is thought that the process is carried out in a vacuum atmosphere. In addition to joining by the above-mentioned irradiation, it is also possible to join by diffusion joining or brazing in a vacuum atmosphere.

[0489] In addition, in this embodiment, although an example has been described in which the hollow portion of the multifaceted intermediate sheet (350) and multifaceted intermediate roll (351) is in a vacuum state, it is sufficient to suppress the oxygen concentration to suppress the formation of an oxide film on the inner surface of the hollow portion, and instead of making it a vacuum state, it may be configured to contain an inert gas such as nitrogen or argon inside the hollow portion. By doing so, the oxygen concentration inside the hollow portion can also be suppressed, thereby suppressing the formation of an oxide film.

[0490] In this case as well, it is possible to include the inert gas within the hollow portion by performing the joining using a joining method that allows joining in an inert gas atmosphere.

[0491] In addition, moisture may be contained within the hollow part.

[0492] In addition, even if the configuration contains air within the hollow section and the oxygen concentration is greater than 1%, the formation of an oxide film is suppressed compared to the case where the hollow section is in communication with the outside, because the hollow section is sealed off from the outside as described above and there is no exchange of air. Therefore, even if a form containing air in the hollow section is adopted, the above effect is achieved, although there may be differences in degree.

[0493] <Manufacture of Intermediate S320>

[0494] In the manufacturing S320 of the intermediate shown in FIG. 62, an intermediate (352) is manufactured from a multifaceted intermediate sheet (350) and a multifaceted intermediate roll (351). Specifically, the intermediate (352) is formed by removing individual intermediates (352) from a multifaceted intermediate sheet (350) that is to be made into an intermediate (352) using a known method such as punching.

[0495] FIG. 76 shows an external perspective view of the intermediate body (352), and FIG. 77 shows a drawing of the intermediate body (352) viewed from the z-direction (planar view). FIG. 77 shows the shape of the hollow portion formed inside the intermediate body (352) with a dotted line.

[0496] As can be seen from FIGS. 76 and 77, even in the intermediate (352), the hollow portion is blocked from the outside. Thus, the formation of an oxide film on the inner surface of the hollow portion is suppressed even in the state of the intermediate (352). Therefore, in this form, storage and transport may be carried out in the state of the intermediate (352).

[0497] W in Fig. 77 301 The width of the joint indicated by can be appropriately set as needed, but this width W 301 It is preferable that the width be 3.0 mm or less, and it may be 2.5 mm or less, or 2.0 mm or less. Width W 301 If this becomes larger than 3.0 mm, there is a concern that the internal volume of the space for the working fluid flow path will decrease, making it impossible to sufficiently secure the steam or condensate flow paths. Meanwhile, the width W 301 It is preferable that it be 0.2 mm or more, and it may be 0.6 mm or more, or 0.8 mm or more. Width W 301 If this becomes smaller than 0.2 mm, there is a risk that the bonding area will be insufficient when positional misalignment occurs during the bonding of the first sheet and the second sheet. Width W 301The range of may be determined by a combination of any one of the plurality of upper limit candidate values ​​and one of the plurality of lower limit candidate values. In addition, the width W 301 The range of may be determined by any two combinations of multiple upper limit candidate values ​​or any two combinations of multiple lower limit candidate values.

[0498] <Formation of injection port S330>

[0499] In the formation of the injection port S330 illustrated in FIG. 62, an opening is formed to inject a working fluid into the hollow portion. Accordingly, in this form, an opening is formed in the intermediate body (352) that communicates with the injection groove (318) from the outside. FIG. 78 and FIG. 79 illustrate the shape of the injection port (319) according to one example, and FIG. 80 and FIG. 81 illustrate the shape of the injection port (319) according to another example.

[0500] In the example illustrated in FIG. 78 and FIG. 79, an injection port (319) is formed by opening a hole in the z-direction (thickness direction) with respect to the intermediate body (352), and the injection groove (318) is connected to the outside.

[0501] In contrast, in the example illustrated in FIG. 80 and FIG. 81, an injection port (319) is formed by removing the end surface of the intermediate body (352) and is connected to the outside with the injection groove (318).

[0502] In this form, the injection port is opened for the intermediate (352), but in other cases, storage and transport are performed using a multifaceted intermediate sheet (350) and a multifaceted intermediate roll (351), and a vapor chamber is manufactured immediately after removing the intermediate (352), the injection port (319) may be formed for the multifaceted intermediate sheet (350) at a stage prior to the intermediate (352).

[0503] Therefore, in this case, the injection port (319) is formed before the intermediate (352) is removed, or simultaneously with the removal of the intermediate (352).

[0504] <Injection S340>

[0505] In the injection S340 illustrated in FIG. 62, working fluid is injected into the hollow portion using the formed injection port (319). The method of injection is not particularly limited, and known methods may be applied.

[0506] The type of working fluid is not particularly limited, but working fluids used in ordinary vapor chambers, such as pure water, ethanol, methanol, acetone, and mixtures thereof, may be used.

[0507] <Sealed S350>

[0508] In seal S350, the injection groove (318) is closed with the working fluid injected. The method for closing is not particularly limited, but may include caulking or welding.

[0509] [Vapor Chamber]

[0510] The vapor chamber (353) manufactured as described above has the following configuration. Drawings for explanation are shown in FIGS. 82 to 84. FIG. 82 is an external perspective view of the vapor chamber (353), FIG. 83 is a view of the vapor chamber (353) seen in the z-direction, and FIG. 84 is a view of FIG. 83 I 307 -I 307 This is a cross-sectional view along the line indicated by. In FIG. 83, the internal structure is shown by a dotted line.

[0511] The interior of the vapor chamber (353) is sealed as a space by sealing the working fluid in the hollow portion of the intermediate (352).

[0512] Specifically, this sealed space is provided with a second flow path, a condensate flow path (354), through which a condensate flows in a liquefied state after the working fluid has condensed by the liquid flow path groove (314a) and the liquid flow path groove (315a), and a first flow path, a steam flow path (355), through which steam flows in a vaporized state after the working fluid has condensed by the steam flow path groove (316). In addition, this sealed space is provided with a flow path that connects the steam flow path (355) through the steam flow path connecting groove (317).

[0513] Thus, the second condensate flow path (354) is formed separately from the first steam flow path (355), allowing for smooth circulation of the working fluid. Additionally, by forming a narrow flow path in the cross-section of the condensate flow path (354) that is surrounded by walls on all sides, the condensate is moved by strong capillary force, enabling smooth circulation.

[0514] Here, the cross-sectional area of ​​the second flow path, the condensate flow path (354), is smaller than the cross-sectional area of ​​the first flow path, the steam flow path (355). More specifically, the average cross-sectional area of ​​two adjacent steam flow paths (355) (in this form, the steam flow path (355) formed by one steam flow path groove (316)) is A g ...and the average cross-sectional area of ​​a plurality of condensate flow paths (354) disposed between two adjacent steam flow paths (355) (in this form, a plurality of condensate flow paths (354) formed by one inner liquid flow path section (315)) is A l At that time, the condensate flow path (354) and the steam flow path (355) are, A l This A g The relationship is set to be 0.5 times or less, preferably 0.25 times or less. This makes it easier for the working fluid to selectively pass through the first flow path and the second flow path depending on its phase mode (gas phase, liquid phase).

[0515] This relationship needs to be satisfied in at least a part of the entire vapor chamber, and it is even more desirable to satisfy it in the entire vapor chamber.

[0516] This vapor chamber (353) can also be installed and operated in an electronic device, just like the other types of vapor chambers described above.

[0517] In this form, as described above, during the manufacturing process, in the multifaceted intermediate sheet (350), multifaceted intermediate roll (351), and intermediate (352), since a state is maintained in which an oxide film is difficult to form on the inner surface of the hollow portion (condensate flow path (354), steam flow path (355)), the inner surface wettability of the condensate flow path (354) and steam flow path (355) is good, thereby increasing the smooth flow of the working fluid and heat transfer.

[0518] In particular, in a form intended to obtain high heat transport capacity by making the vapor chamber thin and increasing the internal surface area of ​​the flow path to increase the heat transfer area, such as in the present form, the influence of the oxide film becomes relatively large, so the effect of being able to exert heat transport capacity as disclosed in the present disclosure is significant.

[0519] In this embodiment, an example is shown in which a liquid flow groove (314a), a liquid flow groove (315a), and a steam flow groove (316) are formed only on the first sheet (301) with multiple faces, but as shown in FIG. 85, a steam flow groove (326) may also be provided on the second sheet (302) with multiple faces, and as shown in FIG. 86, a liquid flow groove (324a), a liquid flow groove (325a), and a steam flow groove (326) may also be provided on the second sheet (302) with multiple faces.

[0520] In this example as well, the present disclosure may be made of a multifaceted intermediate sheet, a multifaceted intermediate roll, an intermediate, and a vapor chamber.

[0521] In addition, it is not limited to being composed of two multifaceted sheets, and may also be a multifaceted intermediate sheet, a multifaceted intermediate roll, an intermediate and a vapor chamber manufactured therefrom, formed by three multifaceted sheets as shown in FIG. 87.

[0522] The multifaceted intermediate sheet illustrated in FIG. 87 is a laminate of a multifaceted first sheet (301), a multifaceted second sheet (302), and a multifaceted intermediate sheet (303) (a multifaceted third sheet (303)).

[0523] A multifaceted intermediate sheet (303) is positioned to be sandwiched between a multifaceted first sheet (301) and a multifaceted second sheet (302), and each is joined in imitation of the example described above.

[0524] In this example, the multifaceted first sheet (301) and the multifaceted second sheet (302) have flat surfaces on both sides.

[0525] At this time, the thickness of the multifaceted first sheet (301) and the multifaceted second sheet (302) is preferably 1.0 mm or less, may be 0.5 mm or less, or 0.1 mm or less. Meanwhile, the thickness is preferably 0.005 mm or more, may be 0.015 mm or more, or 0.030 mm or more. The thickness range may be determined by a combination of any one of the multiple upper limit candidate values ​​and one of the multiple lower limit candidate values. Additionally, the thickness range may be determined by any two combinations of the multiple upper limit candidate values ​​or any two combinations of the multiple lower limit candidate values.

[0526] The multi-faceted intermediate sheet (303) is provided with a steam flow path (336), an outer liquid flow path (334), an inner liquid flow path (335), a liquid flow path (334a), and a liquid flow path (335a).

[0527] The steam flow channel groove (336) is a groove that penetrates the multifaceted intermediate sheet (303) in the thickness direction, and is a groove similar to the groove that constitutes the first steam flow channel (355) by the steam flow channel groove (316) described above, and is arranged in a shape corresponding to this.

[0528] The external liquid flow section (334) and the liquid flow groove (334a) can be conceived in the same way as the external liquid flow section (314) and the liquid flow groove (314a) described above, and the external liquid flow section (335) and the liquid flow groove (335a) can be conceived in the same way as the external liquid flow section (315) and the liquid flow groove (315a) described above.

[0529] The examples of each of the above forms of the present disclosure are not limited thereto and may be embodied by modifying the components without departing from the gist thereof. Furthermore, various forms may be made by appropriate combinations of the plurality of components disclosed in the above forms. Several components may be deleted from the entire set of components appearing in each form. Explanation of the symbols

[0530] 1, 101: Vapor Chamber 2, 102: enclosed space 3, 103: Condensate flow path 4, 104: Steam Euro 10, 110: 1st sheet 10a: Inner self 10b: Outward 10c: Side 10d: inner layer 10e: outer layer 11, 111: Main body 12, 112: Injection part 13, 113: Peripheral joint 14, 114: Outsourcing amount Eurobu 14a, 114a: Liquid Euro Home 14c, 114c: Chimney opening 15, 115: Internal fluid passage 15a, 115a: Liquid Euro Home 15c, 115c: Chimney opening 16, 116: Steam Euro Home 17, 117: Steam flow path chimney groove 20, 120: 2nd sheet 20a: Inner self 20b: Outward 20c: Side 20d: inner layer 20e: outer layer 21, 121: Main body 22, 122: Injection part 23, 123: Peripheral joint 24, 124: Outsourcing amount Eurobu 25, 125: Internal fluid passage 26, 126: Steam Euro Home 27, 127: Steam flow path chimney groove 30: Electronic Components 40: Electronic devices (portable terminals) 41: Housing 50, 230: 3rd sheet 236: Steam Euro Slit 301: Multi-faceted equipped first sheet 302: Multi-faceted equipped second sheet 350: Multi-faceted intermediate sheet 351: Multi-faceted intermediate roll 352: Intermediate 353: Vapor Chamber

Claims

Claim 1 An intermediate for a vapor chamber, wherein a hollow portion is provided inside the intermediate to serve as a flow path for a working fluid, wherein no working fluid is injected into the hollow portion, wherein the hollow portion contains air with an oxygen concentration greater than 1%, wherein the hollow portion is sealed off from the outside, and wherein no inlet is formed in the hollow portion for injecting the working fluid. Claim 2 An intermediate for a vapor chamber, wherein a hollow portion is provided inside the intermediate to serve as a flow path for a working fluid, wherein no working fluid is injected into the hollow portion, wherein the hollow portion is filled with an inert gas having a pressure greater than 134 Pa, wherein the hollow portion is sealed off from the outside, and wherein no inlet port is formed to inject the working fluid into the hollow portion. Claim 3 An intermediate according to claim 1 or 2, wherein the hollow portion contains moisture. Claim 4 A sheet having multiple faces of the intermediate described in paragraph 1 or 2. Claim 5 A sheet having a multifaceted intermediate for a vapor chamber, wherein a hollow portion is provided inside the intermediate to serve as a flow path for a working fluid, wherein no working fluid is injected into the hollow portion, wherein the hollow portion contains air with an oxygen concentration greater than 1%, and wherein the hollow portion is sealed off from the outside. Claim 6 A sheet having a multifaceted intermediate for a vapor chamber, wherein a hollow portion is provided inside the intermediate to serve as a flow path for a working fluid, wherein no working fluid is injected into the hollow portion, wherein the hollow portion is filled with an inert gas having a pressure greater than 134 Pa, and wherein the hollow portion is sealed off from the outside. Claim 7 A sheet according to claim 5 or 6, wherein an inlet for injecting the working fluid is not formed in the hollow portion. Claim 8 A sheet according to claim 5 or 6, wherein the above-mentioned hollow portion contains moisture. Claim 9 A roll wound with the sheet described in paragraph 5 or 6. Claim 10 A method for manufacturing a vapor chamber from an intermediate, wherein the intermediate is provided with a hollow portion to serve as a flow path for a working fluid, the hollow portion is not injected with the working fluid and contains air with an oxygen concentration greater than 1%, and the hollow portion is sealed from the outside, and the intermediate comprises a process of manufacturing a sheet having multiple intermediate portions, a process of extracting individual intermediates from the sheet to manufacture the intermediates, a process of forming an inlet for injecting the working fluid into the hollow portion, a process of injecting the working fluid through the inlet, and a sealing process of closing the inlet while the working fluid is injected. Claim 11 A method for manufacturing a vapor chamber from an intermediate, wherein the intermediate is provided with a hollow portion to serve as a flow path for a working fluid, the hollow portion is not injected with the working fluid and is filled with an inert gas having a pressure greater than 134 Pa, and the hollow portion is sealed from the outside, and the intermediate comprises the steps of: manufacturing a sheet having multiple faces; extracting individual intermediates from the sheet to manufacture the intermediates; forming an inlet for injecting the working fluid into the hollow portion; injecting the working fluid through the inlet; and sealing the inlet while the working fluid is injected. Claim 12 A method for manufacturing a vapor chamber according to claim 10 or 11, wherein the process of manufacturing a sheet having a facet of the intermediate comprises a processing process for forming a shape for a flow path of a vapor chamber on a plurality of material sheets and a bonding process for bonding the plurality of material sheets prepared in the processing process together, wherein, prior to the bonding process, an oxide film on the bonding surface of the material sheets is removed. Claim 13 A method for manufacturing a vapor chamber according to claim 10 or 11, wherein the process of forming the injection port is after the process of manufacturing the intermediate. Claim 14 A method for manufacturing a vapor chamber according to claim 10 or 11, wherein the process of forming the injection port is after the process of manufacturing a sheet having the intermediate and also before the process of manufacturing the intermediate.

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