Deposition nozzle improving the straightness of deposition particle and deposition apparatus with the same

Abstract

A deposition nozzle including a head portion used to manufacture an organic light-emitting diode that enables a high-resolution display by controlling the spraying of deposition particles, such as organic materials, is disclosed. A deposition nozzle including a head portion according to an embodiment of the present invention may include: a nozzle body having an internal space formed therein for spraying deposition particles; and a stepped portion formed in a stepped shape on the inner surface of the nozzle body and guiding the flow of a portion of the deposition particles in a spiral shape.

Description

Technology Field

[0001] The present invention relates to deposition technology, and more specifically, to a deposition nozzle that improves the straightness of deposition particles sprayed onto a panel, such as organic materials or metals, and a deposition apparatus including the same. Background Technology

[0003] Recently, the demand for Organic Light Emitting Diodes (OLEDs) in the display market has been increasing significantly. In particular, the demand for high-resolution OLED displays is growing in the television and smartphone display markets.

[0004] Among the processes for manufacturing Organic Light-Emitting Diodes (OLEDs) to achieve high resolution in such displays, the core process is the deposition process for manufacturing RGB pixels. In the deposition process, organic material is heated at a deposition source located at the bottom of a chamber, and the heated organic material is sublimated. The sublimated organic material passes through a mask and is deposited onto a Thin Film Transistor (TFT). To achieve high resolution, the thickness of the mask must be reduced. However, as the mask thickness decreases, the difficulty of the process increases, leading to a problem where the yield of the OLED drops sharply. Additionally, the reduction in mask thickness increases the shadow effect, which in turn increases the defect rate of the OLED.

[0005] In addition, to realize high-resolution displays, a deposition device is being researched in which deposited particles are ejected to have a straight line without being emitted. The problem to be solved

[0007] The present invention aims to solve the above-mentioned problems by providing a deposition nozzle that improves the straightness of deposition particles used in manufacturing organic light-emitting diodes capable of realizing high-resolution displays by controlling the spraying of deposition particles, such as organic materials, and a deposition apparatus including the same.

[0008] The problems of the present invention are not limited to those mentioned above, and other problems not mentioned will be clearly understood by those skilled in the art from the description below. means of solving the problem

[0010] To solve the above problem, a deposition nozzle for improving the straightness of deposition particles according to an embodiment of the present invention may include: a nozzle body for spraying deposition particles; and a stepped portion formed in a stepped shape on the inner surface of the nozzle body and guiding the flow of a portion of the deposition particles in a spiral shape.

[0011] The above-mentioned stepped portion may be formed in a spiral shape.

[0012] The radius of the upper side of the stepped portion may be larger than the radius of the lower side of the stepped portion.

[0013] The inner diameter of the nozzle body can increase along the direction in which the deposition particles are ejected.

[0014] A deposition nozzle that improves the straightness of the deposition particles may further include a head portion disposed in the internal space and guiding the movement of the deposition particles.

[0015] The above head portion may be formed in a conical shape.

[0016] A guide groove may be formed on the outer surface of the head portion through which a portion of the deposited particles move.

[0017] The deposition nozzle for improving the straightness of the deposition particles may further include a vortex prevention part formed roundly on the upper side of the head part to prevent the generation of vortices of the deposition particles.

[0018] In addition, a deposition apparatus including a deposition nozzle that improves the straightness of deposition particles according to an embodiment of the present invention comprises: a deposition chamber that maintains a vacuum state; and a deposition source that includes a deposition nozzle that is received in the deposition chamber and sprays deposition particles, wherein the deposition nozzle may include: a nozzle body that sprays deposition particles; and a step portion formed in a step shape on the inner surface of the nozzle body and guiding the flow of a portion of the deposition particles in a spiral shape. Effects of the invention

[0020] According to an embodiment of the present invention, the spreading of the sprayed deposition particles is minimized to ensure straightness, thereby preventing the occurrence of shadow effects and improving the reliability of the deposition process.

[0021] In addition, since the deposition particles are sprayed to have straight-line propulsion, the deposition process can be precisely controlled. Brief explanation of the drawing

[0023] FIG. 1 is a schematic diagram showing a deposition apparatus according to one embodiment of the present invention. FIG. 2 is a perspective view schematically showing a deposition nozzle according to one embodiment of the present invention. FIG. 3 is a partially cutaway perspective view schematically showing a part of a deposition nozzle according to one embodiment of the present invention. FIG. 4 is a drawing showing the appearance of a deposition material being sprayed from a deposition nozzle according to one embodiment of the present invention. FIG. 5 is a perspective view schematically showing a deposition nozzle according to another embodiment of the present invention. FIG. 6 is a cross-sectional view schematically showing a deposition nozzle according to another embodiment of the present invention. Specific details for implementing the invention

[0024] Various embodiments are described in more detail below with reference to the attached drawings. Embodiments according to the present invention may be modified in various ways. Specific embodiments may be depicted in the drawings and described in detail in the detailed description. However, specific embodiments disclosed in the attached drawings are intended only to facilitate understanding of various embodiments. Accordingly, the technical scope is not limited by specific embodiments disclosed in the attached drawings and should be understood to include all equivalents or substitutions that fall within the spirit and scope of the invention.

[0025] Terms including ordinal numbers, such as first, second, etc., may be used to describe various components, but these components are not limited by the aforementioned terms. The aforementioned terms are used solely for the purpose of distinguishing one component from another.

[0026] In embodiments of the present invention, terms such as "comprising" or "having" are intended to specify the existence of the features, numbers, steps, actions, components, parts, or combinations thereof described in the embodiments of the present invention, and should be understood as not precluding the existence or addition of one or more other features, numbers, steps, actions, components, parts, or combinations thereof. When a component is described as being "connected" or "connected" to another component, it should be understood that it may be directly connected to or connected to that other component, or that there may be other components in between. On the other hand, when a component is described as being "directly connected" or "directly connected" to another component, it should be understood that there are no other components in between.

[0027] Meanwhile, a "module" or "part" for a component used in an embodiment of the present invention performs at least one function or operation. Furthermore, the "module" or "part" may perform the function or operation by hardware, software, or a combination of hardware and software. Additionally, a plurality of "modules" or a plurality of "parts," excluding a "module" or "part" that must be performed on specific hardware or on at least one processor, may be integrated into at least one module. A singular expression includes a plural expression unless the context clearly indicates otherwise.

[0028] In describing embodiments of the present invention, if it is determined that a detailed description of related known functions or configurations may unnecessarily obscure the essence of the present invention, such detailed description is abbreviated or omitted.

[0029] In the embodiments of this specification, the X-axis shown in the drawings is perpendicular to the Y-axis and perpendicular to the Z-axis. Also, the Y-axis shown in the drawings is perpendicular to the Z-axis. Also, the direction of the arrow of the Z-axis is referred to as the upper side. The lower side means the direction opposite to the upper side.

[0031] FIG. 1 is a schematic diagram showing a deposition apparatus according to one embodiment of the present invention.

[0032] Referring to FIG. 1, a deposition apparatus (hereinafter referred to as "deposition apparatus") (100) including a deposition nozzle that improves the straightness of deposition particles according to one embodiment of the present invention may include a deposition chamber (110), a first frame (140), and a deposition source (150).

[0033] The deposition chamber (110) accommodates a substrate (115) for forming a thin film. The substrate (115) is positioned above the deposition chamber (110). The deposition chamber (110) is made of a metal material. The interior (111) of the deposition chamber (110) is in a vacuum state or vacuum atmosphere. Additionally, the deposition chamber (110) may be made of various materials capable of maintaining a vacuum state inside (111) of the deposition chamber (110) while having rigidity such as plastic.

[0034] Additionally, the deposition chamber (110) is connected to a vacuum pump (not shown) to maintain a vacuum state inside it. The vacuum pump is installed outside or inside the deposition chamber (110).

[0035] The first frame (140) is positioned below the deposition chamber (110). The first frame (140) accommodates a deposition source (150) to be described later. The first frame (140) is made of metal or plastic material.

[0036] The deposition source (150) is housed in the frame (140). Additionally, the deposition source (150) is composed of multiple sources. The multiple deposition sources (150) are positioned on the lower side of the deposition chamber (110) to face the substrate (115).

[0037] Additionally, the deposition source (150) sprays deposition particles toward the substrate (115). Here, the deposition particles may be organic materials or metals, and may be various materials that vaporize or sublimate to form a thin film.

[0038] In addition, the deposition source (150) is provided with a deposition nozzle (hereinafter referred to as "deposition nozzle") (200) that improves the straightness of the deposition particles. The deposition nozzle (200) will be described in detail later with reference to the drawings.

[0039] In addition, a second frame (120) is provided on the upper side of the first frame (140).

[0040] The second frame (120) is combined with the first frame (140). Additionally, the second frame (120) is positioned between the substrate (115) and the first frame (140). The second frame (120) is made of metal or plastic material. The second frame (120) prevents deposition particles sprayed from the deposition nozzle (200) from being deposited into an area other than the substrate (115).

[0041] In addition, a first heater (161) and a second heater (163) are provided that are accommodated in the first frame (140).

[0042] The first heater (161) wraps around the deposition source (150) along the outer surface of the deposition source (150). The first heater (161) may be an electric heater that receives power and converts electricity into heat.

[0043] The second heater (161) is spaced apart from the first heater (163). Additionally, the second heater (163) surrounds the deposition nozzle (200) along the outer surface of the deposition nozzle (200). The second heater (163) may be an electric heater that receives power and converts electricity into heat.

[0044] In addition, an angle adjustment plate (170) is provided on the first frame (140).

[0045] The angle adjustment plate (170) is positioned on the upper side of the first frame (140). Additionally, the angle adjustment plate (170) controls the direction of injection of deposition particles ejected from the plurality of deposition sources (150).

[0047] FIG. 2 is a perspective view schematically showing a deposition nozzle according to one embodiment of the present invention, and FIG. 3 is a partial cutaway perspective view schematically showing a part of a deposition nozzle according to one embodiment of the present invention.

[0048] Referring to FIGS. 2 and FIGS. 3, a deposition nozzle (200) according to one embodiment of the present invention may include a nozzle body (210) and a stepped portion (230).

[0049] The exterior of the nozzle body (210) may be cylindrical in shape. Additionally, the nozzle body (210) may be made of metal or plastic material. An internal space (211) in which the deposition particles are sprayed is formed in the nozzle body (210).

[0050] The internal space (211) of the nozzle body (210) is formed in the shape of a truncated cone. The inner diameter of the nozzle body (210) increases along the direction (Z-axis) in which the deposition particles are ejected. For example, the inner diameter (R1) of the upper side (212) of the nozzle body (210) is larger than the inner diameter (R2) of the lower side (213) of the nozzle body (210).

[0051] The stepped portion (230) is formed in a stepped shape on the inner surface of the nozzle body (210). Additionally, the stepped portion (230) is formed in a spiral shape. The stepped portion (230) can guide the flow of a portion of the deposited particles in a spiral shape.

[0052] Additionally, the radius of the upper side (232) of the step portion (230) is larger than the radius of the lower side (233) of the step portion (230). Furthermore, the radius of the step portion (230) increases along the direction (Z-axis) in which the deposited particles are ejected.

[0053] Meanwhile, [Equation 1] for implementing a high-resolution display is as follows.

[0054]

[0055] Here, N represents the maximum number of collisions of deposition particles inside the deposition source, Na represents the total number of deposition particles inside the deposition source, Nb represents the average number of deposition particles inside the deposition source, Fn represents the actual number of particles represented by one DSMC (Direct Simulation Monte Carlo) particle, (σCr) represents the product of the collision cross-section inside the deposition source and the maximum value of the relative velocity, and V represents the volume inside the deposition source.

[0056] If the length (L) of the nozzle body (210) is increased to increase the straightness of the deposited particles, there is a problem in that the V value increases and the N value decreases.

[0057] However, a deposition nozzle (200) including a head portion according to one embodiment of the present invention improves the straightness of the deposition particles by increasing the N value by the head portion (250) without increasing the length (L) of the nozzle body (210). The straightness of the deposition particles will be explained in detail later with reference to the drawings.

[0059] FIG. 4 is a drawing showing the appearance of a deposition material being sprayed from a deposition nozzle according to one embodiment of the present invention.

[0060] Referring to FIG. 4, the deposition particles are sprayed through the internal space (211) of the nozzle body (210).

[0061] As the deposition particles pass through the internal space (211), they collide with each other and collide with the inner surface of the nozzle body (210). As the number of collisions of the deposition particles increases, the deposition particles lose their straightness and are emitted as they pass through the deposition nozzle (200). Furthermore, the straightness of the deposition particles is determined by the inclination (θ) of the deposition particles with respect to the central axis (P) of the nozzle body (210).

[0062] The deposition particles are moved in a spiral shape by the step portion (230) while passing through the internal space (211). This spiral flow of the deposition particles reduces collisions between the deposition particles in the internal space (211) or collisions between the deposition particles and the inner surface of the nozzle body (210).

[0063] Accordingly, the step portion (230) reduces collisions of the deposition particles in the internal space (211) of the nozzle body (210), thereby increasing the straightness of the deposition particles ejected from the deposition nozzle (200).

[0064] In addition, since the internal space (211) is formed in the shape of a truncated cone, the collision of the deposited particles in the internal space (211) is reduced compared to the cylindrical shape, thereby improving the straightness of the deposited particles.

[0066] FIG. 5 is a perspective view schematically showing a deposition nozzle according to another embodiment of the present invention, and FIG. 6 is a cross-sectional view schematically showing a deposition nozzle according to another embodiment of the present invention.

[0067] Referring to FIGS. 5 and 6, a deposition nozzle (200') according to another embodiment of the present invention further includes a head portion (250) disposed in the internal space (211). If the components of another embodiment of the present invention and the components of the aforementioned embodiment are identical or similar, the description above is substituted.

[0068] The head portion (250) is provided with a connecting portion (260) that connects to the inner surface of the nozzle body (210). The connecting portion (260) extends from the side of the head portion (250) and is fixed to the inner surface of the nozzle body (210). The head portion (250) includes a conical portion (251) formed in a conical shape and a vortex prevention portion (252) extending from the conical portion (251).

[0069] The conical portion (251) is formed with a pointed shape in the downward direction. As the conical portion (251) partially blocks the movement of the deposited particles into the central region of the internal space (211), it guides the flow pattern of the movement of the deposited particles in a spiral shape.

[0070] In this way, the head portion (250), together with the step portion (230), moves in a spiral shape as the deposition particles pass through the internal space (211), thereby minimizing the collision of the deposition particles with the inner surface of the nozzle body (210).

[0071] The above vortex prevention part (252) is formed in a rounded shape on the upper side of the conical part (251). The above vortex prevention part (252) prevents vortices that occur after the deposited particles pass through the conical part (251). Accordingly, it prevents the straightness of the deposited particles from being reduced by the vortices.

[0072] Additionally, a guide groove (253) is formed on the outer surface of the conical portion (251) through which a portion of the deposited particles move. The guide groove (253) is formed in a spiral shape along the outer surface of the conical portion (251). The guide groove (253) guides the flow pattern of the deposited particles' movement in a spiral shape.

[0074] As described above, preferred embodiments according to the present invention have been examined. It is obvious to those skilled in the art that, in addition to the embodiments described above, the present invention may be embodied in other specific forms without departing from its spirit or scope. Therefore, the embodiments described above should be regarded as illustrative rather than restrictive, and accordingly, the present invention is not limited to the description above but may be modified within the scope of the appended claims and their equivalents. Explanation of the symbols

[0075] 100: Deposition apparatus 200: Deposition nozzle 210: Nozzle body 230: Step section

Claims

Claim 1 A deposition nozzle for improving the straightness of deposition particles, comprising: a nozzle body that sprays deposition particles and forms an internal space; a stepped portion formed in a step shape on the inner surface of the nozzle body and guiding the flow of a portion of the deposition particles in a spiral shape; and a head portion disposed in the internal space and guiding the movement of the deposition particles; wherein the head portion is formed in a conical shape and guides the flow pattern of the deposition particles moving in the internal space in a spiral shape; and a vortex prevention portion formed roundly on the upper side of the conical portion and preventing vortices generated after the deposition particles pass the conical portion. Claim 2 A deposition nozzle that improves the straightness of deposition particles, wherein the stepped portion is formed in a spiral shape in claim 1. Claim 3 A deposition nozzle that improves the straightness of deposition particles, wherein, in claim 1, the radius of the upper side of the stepped portion is larger than the radius of the lower side of the stepped portion. Claim 4 A deposition nozzle according to claim 1, wherein the inner diameter of the nozzle body increases along the direction in which the deposition particles are ejected, thereby improving the straightness of the deposition particles. Claim 5 delete Claim 6 delete Claim 7 A deposition nozzle that improves the straightness of deposition particles, wherein, in claim 1, a guide groove is formed on the outer surface of the head portion through which a portion of the deposition particles move. Claim 8 delete Claim 9 A deposition apparatus comprising a deposition source that includes a deposition chamber maintaining a vacuum state; and a deposition nozzle that is received in the deposition chamber and sprays deposition particles; wherein the deposition nozzle includes a nozzle body that sprays deposition particles and forms an internal space; a stepped portion formed in a stepped shape on the inner surface of the nozzle body and inducing the flow of a portion of the deposition particles in a spiral shape; and a head portion disposed in the internal space and guiding the movement of the deposition particles; wherein the head portion is formed in a conical shape and guides the flow pattern of the movement of the deposition particles in the internal space in a spiral shape; and a vortex prevention portion formed roundly on the upper side of the conical portion and preventing vortices generated after the deposition particles pass the conical portion; and a deposition nozzle that improves the straightness of deposition particles.

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